CN1474169A - Infrared Thermal Imager - Google Patents
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- CN1474169A CN1474169A CNA03132259XA CN03132259A CN1474169A CN 1474169 A CN1474169 A CN 1474169A CN A03132259X A CNA03132259X A CN A03132259XA CN 03132259 A CN03132259 A CN 03132259A CN 1474169 A CN1474169 A CN 1474169A
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Abstract
本发明提出一种用于将不可见图像转化为可见图像的红外热像成像仪，由光源，微梁阵列，成像透镜，光学接受器和零部件组装用的支架组成，在微梁阵列前方设有红外透镜，在来自微梁阵列的衍射光的汇聚谱平面上设有直线边界滤波单元且成像透镜位于直线边界滤波单元之后，光源为点光源。本发明有以下几个方面的优点：①在本发明的直线边界的光学滤波技术，在保证光学测量装置的探测灵敏度的同时，使光学测量装置具有很高的空间分辨率和数据的可靠性。②确认了照明强度(光学接收器的量化级数)与探测灵敏度的关系，探测灵敏度的提高可以通过简单的调节照明强度加以实现。③光学测量装置采用非干涉测量方式，光学抗振性能高，适合工程应用。
The present invention proposes an infrared thermal imager for converting invisible images into visible images, which is composed of a light source, a microbeam array, an imaging lens, an optical receiver and a bracket for component assembly, and is set in front of the microbeam array There is an infrared lens, a linear boundary filter unit is arranged on the converging spectrum plane of the diffracted light from the microbeam array, and the imaging lens is located behind the linear boundary filter unit, and the light source is a point light source. The present invention has the advantages in the following aspects: ① The linear boundary optical filtering technology of the present invention enables the optical measuring device to have high spatial resolution and data reliability while ensuring the detection sensitivity of the optical measuring device. ②The relationship between the illumination intensity (the quantization series of the optical receiver) and the detection sensitivity is confirmed, and the improvement of the detection sensitivity can be realized by simply adjusting the illumination intensity. ③ The optical measurement device adopts non-interference measurement method, which has high optical anti-vibration performance and is suitable for engineering applications.
Description
Technical field
The invention belongs to the invisible light image transitions is the infrared thermal image imager of visible images, especially relate to by measuring the corner of micro-beam array distortion, with the heat picture that infrared origin is become, change the infrared thermal image imager of visible optical image on micro-beam array.
Background technology
With the invisible light image transitions is that the method and the device of visible images is existing multiple, and always, the method and the device that transform infrared light are the focuses of research always.The infrared detective device is used for sightless infrared radiation is converted into visible image, and it comprises thermal infrared imager, infrared thermometer etc.According to the difference of detection principle, can be the core component-detector of infrared detective device-roughly be divided into two classes: the infrared radiation detector of quantum type and the infrared radiation detector of pattern of fever.
Its core component of infrared detective device of quantum type is the infrared radiation detector of quantum type, and it is photoelectronic energy according to photoelectric effect with the Conversion of energy of infrared photon.Corresponding to wavelength is the infrared photon of 8-14 micron, and its energy is between 0.1 to 0.4eV; The energy that the thermal motion of (300K) electronics produces under this and the room temperature is suitable.Therefore in order to suppress the electronics thermonoise effectively, the infrared detective device of all quantum types all needs the extra refrigerating plant of a cover at present, the temperature of detector is dropped to about 77K, to reduce the energy of electronics thermal motion.This not only makes the infrared detective device of quantum type relatively heavier, and price is very expensive.
Its core component of infrared detective device of pattern of fever is the infrared radiation detector of pattern of fever.Traditional heat type infrared radiation detector is converted into the heat energy of detector with the infrared energy of incident, detects the variation that thermic that the temperature rise of detector causes can be surveyed physical quantity by integrated circuit, such as resistivity or changes in capacitance etc.These thermics can be surveyed the variation of physical quantity by the probe unit input current is read.And when electric current passes through detector cells, can on detector cells, produce additional heat, bring reading error.In order to allow detector cells can produce local temperature rise effectively, must realize the heat isolation between detector cells and the substrate simultaneously.In order to read the variation of thermic physical parameter, have to link to each other between detector cells and the substrate by lead.And lead often also is the good conductor of heat, so the heat that traditional heat type infrared radiation detector is difficult to realize ideal is isolated.These contradictions have caused the detection sensitivity of traditional pattern of fever infrared eye lower just.All very faint (for example in the infrared eye of impedance type, the variation of the detector resistance rate that temperature variation caused of 1K only is 0.02% to these thermoelectric effects on the testee in addition.), in order to detect these faint electric signal, integrated circuit will have quite high signal to noise ratio (S/N ratio) and very strong gain.This has increased the design and the manufacture difficulty of detector and sensing circuit.
Based on the heat type infrared radiation detector of micro-cantilever array structure, its sensing unit is a bi-material microcantilevel.The infrared luminous energy of incident is converted into the temperature rise on little beam after being absorbed by the reflector of micro-cantilever, and then causes little beam generation thermal deformation.When a plurality of unit of little beam are arranged as array (abbreviation micro-beam array) according to needed form, just can reflect the thermal deformation that infrared radiation produced of multiple spot incident.Detect the parameter that characterizes this thermal deformation by optical pickup system, the acoplanarity displacement of little beam for example just can obtain the temperature of testee.This heat type infrared radiation detector based on micro-beam array has many advantages: on the one hand, little beam can be worked under the condition that does not need to freeze; On the other hand, because employing is the optics playback mode, read-out system can not produce additional heat on little beam.And, need not little beam is drawn any lead and integrated any micro-signal treatment circuit, this design is easy to realize good heat isolation between little beam and substrate, is easy to increase the quantity of little beam simultaneously, and does not introduce manufacture difficulty and cost.Therefore based on the infrared radiation detector of micro girder construction, be expected to develop more high performance heat type infrared radiation sniffer.
The infrared detective technology of existing micro-beam array structure has been utilized the accurate detecting method of optical interference, be used to extract the thermal deformation acoplanarity displacement information of micro-beam array, though the measuring method of optical interference has higher measuring accuracy, obtained the thermal imagery of room temperature object with it, but its resistance to shock is poor, and engineering has many difficulties on using.
Technology contents
The objective of the invention is to propose a kind of infrared thermal image imager that is adapted to the invisible heat picture of engineering application, it is to realize by the corner that detects little beam, and existing very high measurement sensitivity has good resistance to shock again.
A kind of infrared thermal image imager that is used for invisible image is converted into visual picture, by light source, micro-beam array 11, imaging len 8, the support of optics receptacle 9 and parts assembling usefulness is formed, be provided with Infrared Lens 13 in micro-beam array 11 the place aheads, be provided with on the spectrum plane from converging of the diffraction light of micro-beam array 11 after straight border filter unit 7 and imaging len 8 be positioned at straight border filter unit 7, light source is a pointolite.
The measuring method that the present invention proposes is: shine micro-beam array with incident light, filter unit with straight border on the optics spectrum plane of micro-beam array carries out Filtering Processing to the diffraction spectra of micro-beam array reflection, by optical imaging lens micro-beam array is imaged on the optical receiver again, make little corner deformation signal of micro-beam array change the light intensity signal of micro-beam array picture corresponding on the optical receiver into, thereby see the Temperature Distribution of testee.
The optical measuring device that the present invention proposes is: the dispenser by illumination optical subsystem, optical filter subsystem, imaging optical subsystem and measuring object micro-beam array is formed, the illumination optical subsystem is positioned at the prime of optical filter subsystem, and is positioned at the incident side of micro-beam array; Optical filter subsystem is positioned at the back level of illumination optical subsystem, and is positioned at the reflection side of micro-beam array; Imaging optical subsystem is positioned at the back level of optical filter subsystem, to the micro-beam array imaging; Wherein especially optical filter subsystem is the straight border filtering system.
Be embodied in: the straight border filtering system is made up of filter lens and optically filtering unit, or directly is made up of the optically filtering unit; The optically filtering unit is the edge of a knife, slit or rectangular opening; The optically filtering unit is positioned on the optics spectrum plane of micro-beam array.
On the such scheme basis, the illumination intensity of incident light should reach the saturation value of optical receiver as far as possible.The infrared thermoviewer that the present invention proposes is: above-mentioned optical measuring device is combined with the infrared radiation detector with micro-beam array structure, promptly replace the dispenser of measuring object micro-beam array in the such scheme with infrared radiation detector.
That is to say, the present invention proposes a kind of corner deformation signal,, be converted to the measuring method of micro-joist unit light intensity signal on the optical receiver by the diffraction spectra filtering technique with each unit on the micro-beam array.And the infrared eye of this method with the double-material micro beam array structure combined, constitute infrared thermoviewer.
The basic ideas of the corner detection mode technical scheme that the present invention proposes are: when little beam is out of shape, can characterize this variation with two amounts, one is the acoplanarity displacement of mentioning in the prior art, and another is the corner of deformed end.Corner during at the distortion of little beam can be with the little beam of a branch of rayed, and the diffraction spectra energy that the deflection of reflection ray receives after by the optically filtering unit is represented, promptly detects the light intensity of little beam imaging, just can detect the corner of little beam when being out of shape.
Therefore, the irradiate light micro-beam array that adopts the illumination optical subsystem to send, the diffracted ray that reflects from micro-beam array enters optical filter subsystem, this diffracted ray pools the optical diffraction spectrum on the optics spectrum plane of micro-beam array, diffraction spectra behind optically filtering enters imaging optical subsystem, forms visible images.The illumination optical subsystem that is adopted in the device is made of jointly light source, light source filtering hole, light lens, and light source is positioned at the place ahead in light source filtering hole, and light source filtering hole is positioned at the place ahead of the front focal plane or the front focal plane of light lens.Described light source can be common white light, laser etc., constitutes the parallel light scheme when light source filtering hole just in time is positioned at the front focal plane of light lens; When being positioned at the place ahead of front focal plane of light lens, light source filtering hole constitutes the optical illumination scheme that converges.Optical filter subsystem is formed (during parallel light) by filter lens and optically filtering unit, and at this moment, the optics of micro-beam array spectrum plane is exactly the back focal plane of filter lens; Or directly form (when converging optical illumination) by the optically filtering unit, at this moment, the optics of micro-beam array spectrum plane is exactly directly to be converged by diffraction spectra to form.Imaging optical subsystem is then the same with prior art to be made up of imaging len and optical receiver, and described optical receiver can be human eye, charge-coupled image sensor (being CCD) or other light-sensitive detector spares.
For above-mentioned optical measuring device, its detection sensitivity is determined by following formula:
D
R＝FI， (1)
D wherein
RBe the detection sensitivity of optical measuring device, F is the function that characterizes the optically filtering operation, and I is the illumination intensity of optical measuring device.
After micro-joist unit absorbs infrared radiation, it will produce the thermic corner.The diffraction spectra of micro-joist unit will produce a translation on the optics spectrum plane of micro-beam array this moment.Because the energy of diffraction spectra is not equally distributed on the optics spectrum plane of micro-beam array, so the light intensity that this translation will cause seeing through the optically filtering unit changes.As a result, the intensity of visible images also can change thereupon on the optical receiver, and this changes the corner that has just reflected micro-joist unit.The temperature of testee can be by the light intensity reflection of visible images in other words.Formula (1) shows that reasonably the optically filtering operation can be optimized the F in the formula, makes F reach maximum, thereby makes the detection sensitivity of optical measuring device reach maximum.Be positioned at shape and the position that micro-beam array optics is composed the optically filtering unit on the plane by adjusting, just can select to make the diffraction spectra of which level as required by optically filtering unit, the detection sensitivity that so just can regulate optical measuring device.As the optically filtering unit of selecting little beam diffraction spectra, the present invention has adopted the optically filtering unit of straight border (abbreviating straight flange as) form, is specially the edge of a knife, slit or rectangular opening, to optimize the F in the formula (1).The boundary definition of optically filtering unit on little beam diffraction spectra moving direction " logical light " and " obstructed light " two states.When
After little beam produced the thermic corner, its diffraction spectra moves to the transparent zone territory from the opaque zone territory of this boundary definition, and was perhaps opposite; Correspondingly, the luminous energy that reflects on the little beam that receives on the optical receiver will increase or reduce.Diffraction spectra depends on the initial position and the shape on this border in this borderline energy gradient (variation of the luminous flux that the unit amount of movement of diffraction spectra is brought, i.e. detection sensitivity).The present invention learns that through experimental analysis repeatedly the optically filtering unit of straight flange can obtain maximum energy gradient, so the edge of a knife, slit or rectangular opening will be best optically filtering unit.And, because diffraction spectra everywhere intensity gradient on the back focal plane of filter lens is different, the intensity gradient maximum at Zero-order diffractive peak, and then the initial position of optically filtering unit efficiency frontier should be positioned at the Zero-order diffractive peak near, optical measuring device could obtain maximum detection sensitivity like this.
In addition, because the minimum-value aperture in the optical measuring device of the present invention is the optically filtering unit, therefore, in order to receive distinct image, the logical light yardstick of optically filtering unit should have a lower limit.Prescribe a time limit down less than this when the logical light yardstick of optically filtering unit, the optical imagery that receives can not correctly reflect the Temperature Distribution of testee.Formula (2) has provided the principle of design of the logical light yardstick of optically filtering unit:
D=λ f/T≤D, (2) wherein D is that the half-angle of Airy spot of optically filtering unit is wide, T is the logical light yardstick of optically filtering unit, λ is the wavelength of lighting source in the optical measuring device, f is the focal length of imaging optical subsystem, d is the smallest dimension of optical receiver sensing unit, if receive with charge-coupled image sensor (CCD), d is exactly effective size of charge-coupled device (CCD) pixel.
Formula (2) shows, has only when the wide smallest dimension less than the optical receiver sensing unit of the half-angle of the Airy of optically filtering unit spot, and the visible images that obtains could correctly reflect the Temperature Distribution of testee.The analysis showed that like this, in the optically filtering unit of straight flange, the optically filtering unit of edge of a knife form will be best selection, because its logical light yardstick is a half-plane, the half-angle of the Airy spot of optically filtering unit is wide the narrowest, the image that receives is subjected to the influence of optics aliasing smaller, and image is also the most clear.From angle of practical application, after logical light yardstick arrived certain degree greatly, the optics aliasing was very little, and therefore all right selection slit and rectangular opening are as the optically filtering unit.
When adopting the filter unit of straight flange form, what detection sensitivity can be more concrete is expressed as:
Wherein λ is the illumination wavelengths of optical measuring device, and N is the quantification progression of optical receiver, and L is the length of little beam reflective surface on its yawing moment.Here same notion during the illumination intensity I in the quantification progression N of optical receiver and the formula (1), formula (3) shows that the quantification progression N that improves optical receiver also will effectively improve detection sensitivity.Because the width of little beam diffraction spectra is that after improving illumination intensity, the peak width of diffraction spectra can not change by the geometric scale decision of the reflector in the micro-joist unit, and amplitude will improve thereupon.In other words, little beam produces identical corner and will cause bigger light intensity to change, and this will improve optical detection sensitivity.Because the detection sensitivity of illumination intensity and optical measuring device is proportional, will increase the detection sensitivity of optical measuring device effectively so increase the light intensity of incident light.It should be noted that, the illumination intensity of the optical measuring device of mentioning here is the comprehensive result of light source and optical receiver, it can directly be realized by the brightness of regulating light source, can also realize by the gain of regulating optical receiver, also can both regulate simultaneously.Range of adjustment is to make illumination intensity reach the saturation value of optical receiver as far as possible.
The present invention has the advantage of the following aspects:
1. in real-time optical measurement mechanism, straight border has been proposed (for example based on the diffraction spectra filtering technique
The edge of a knife, slit and rectangular opening) optical filtering technology, guaranteeing the detection spirit of optical measuring device
In the time of sensitivity, make optical measuring device have the very high spatial resolution and the reliability of data.
2. confirmed the relation of illumination intensity (the quantification progression of optical receiver), surveyed with detection sensitivity
The raising of sensitivity can be realized by simple adjusting illumination intensity.
3. optical measuring device adopts non-interferometry mode, and optics resistance to shock height is fit to engineering and uses.
And as a kind of pervasive optical detecting method, the diffraction spectra filtering technique that the present invention proposes not merely is applicable to the optical measuring device of micro girder construction infrared imaging detector.Measure the micro-beam array angular signal so long as relate to, can angular signal be converted into light intensity signal, intuitively corner information is shown in the optical imagery mode with method and apparatus of the present invention.Simultaneously, for the angular signal of single mini-prober, such as the angular signal of single micro-cantilever, method and apparatus of the present invention is suitable equally.
Description of drawings
Fig. 1 is the infrared radiation detector in conjunction with micro-beam array, and the basic implementation of diffraction spectra filtering technique is described.
Fig. 2 is the implementation example (enlarged drawing of light source among Fig. 1) of illumination optical subsystem.
Fig. 3 is optically filtering unit (edge of a knife form) and filtering principle thereof.
Fig. 4 is the influence of illumination intensity to the optical measuring device detection sensitivity.
Fig. 5 is a diffraction spectra filtering technique implementation 2: converge the light illumination scheme.
Fig. 6 is the micro girder construction synoptic diagram.
Specific embodiments
A kind of infrared thermal image imager that is used for invisible image is converted into visual picture of embodiment, by light source, micro-beam array 11, imaging len 8, the support of optics receptacle 9 and parts assembling usefulness is formed, be provided with Infrared Lens 13 in micro-beam array 11 the place aheads, be provided with on the spectrum plane from converging of the diffraction light of micro-beam array 11 after straight border filter unit 7 and imaging len 8 be positioned at straight border filter unit 7, light source is a pointolite, above-mentioned micro-beam array 11 is arranged in the vacuum box 10, above-mentioned pointolite can take following concrete technical measures to realize: (1) pointolite is by non-pointolite 1, light source filtering hole 3 and light lens 4 are formed, light source filtering hole 3 is positioned on the front focal plane of light lens 4, and the back focal plane that is provided with filter lens 6 and this filter lens 6 between micro-beam array 11 and straight border filter unit 7 is positioned at the plane at straight border filter unit 7 places.(2) pointolite is made up of non-pointolite 1, light source filtering hole 3 and light lens 4, light source filtering hole 3 is between the front focal plane of non-pointolite 1 and light lens 3, in the present embodiment, below micro-beam array 11, be provided with semi-permeable and semi-reflecting mirror 5, this semi-permeable and semi-reflecting mirror 5 is accepted to be derived from the light beam 16 of light lens 4 and it is reflexed to micro-beam array 11, and passes semi-permeable and semi-reflecting mirror 5 through the diffracted wave 17 of micro-beam array reflection.
Below accompanying drawing, in conjunction with having the bi-material microcantilevel array structure, be example with the optical measuring device of infrared radiation detector, provide the diffraction spectra filtering technique is described in detail.Accompanying drawing provides various embodiment of the present invention to this optical measuring device simultaneously.
Fig. 1 has provided system's sketch plan (for optical measuring device, the dispenser of measuring object micro-beam array promptly is in figure intermediate infrared radiation position of detector, and micro-beam array then places on the dispenser as measuring object) of infrared thermoviewer.Light source filtering hole 3 among Fig. 1 is placed on the rear (among the figure right-hand) of light source 1, as far as possible near light source to obtain the ceiling capacity of light source.Logical light part 2 that can arrive light source filtering hole 3 and the light that passes through logical light part 2 are all arranged in the light that every bit sends on the light source 1.When logical light part 2 just in time was positioned at the front focus of light lens 4, these light that pass logical light part 2 were parallel beam 16 by light lens 4 collimations.The irradiate light that parallel beam 16 is reflected by semi-transparent semi-reflecting lens 5 and is reflected by micro-beam array 11 on micro-beam array 11.The diffracted ray 17 that returns from micro-beam array 11 sees through semi-transparent semi-reflecting lens 5, and filtered lens 6 converge on its back focal plane, forms the optical diffraction spectrum 18 of micro-beam array 11.Optically filtering unit 7 is placed on the back focal plane of filter lens 6, and has set in advance transparent zone territory and opaque zone territory.The part that diffraction spectra 18 only drops on 7 transparent zone territories, optically filtering unit could arrive optical receiver 9 through imaging len 8, and on optical receiver 9, form visible images 19, the part that drops on 7 opaque zone territories, optically filtering unit is blocked, and can not arrive optical receiver 9.When testee 14 during near infrared thermoviewer, the infrared radiating light 15 of testee 14 is collected by Infrared Lens 13, through behind the silicon substrate 12 of micro-beam array, forms infrared light image on micro-beam array 11.After micro-beam array 11 absorbs infrared luminous energy, produce an angular deflection.Correspondingly, diffraction light 17 integral body that the reflecting part from micro-beam array 11 is returned also produce a deflection, show on filter lens 6 back focal planes to be exactly the translation of a diffraction spectra 18.A part of light that the translation of diffraction spectra 18 makes it drop on 7 transparent zone territories, optically filtering unit has originally moved into the opaque zone territory (perhaps opposite) of optically filtering unit 7, and is partly blocked (perhaps can pass through optically filtering unit 7) by the obstructed light of optically filtering unit 7.Therefore can will reduce (or increasing) by the light of optically filtering unit 7, the luminous energy that arrives optical receiver 9 reduces (or increasing).Being reflected on the optical receiver 9 is exactly weaken (or enhancing) of visible images 19 light intensity.In other words, the visible light intensity variations that receives has just reflected the infrared radiation of testee.Micro-beam array among Fig. 1 is encapsulated in the vacuum box 10, so that micro-beam array is carried out temperature control, and protection micro-beam array (this is a prior art).In illustrated example, though the optically filtering unit 7 usefulness edges of a knife realize that as top analysis as can be known, optically filtering unit 7 also can be realized by slit or rectangular opening.Just when the optically filtering unit 7 usefulness edges of a knife were realized, the visible images spatial resolution that receives was the highest.In fact, (can utilize the principle of design of formula (2) to calculate the size of slit or rectangular opening) after the transparent zone territory of slit or rectangular opening reaches certain yardstick, spatial resolution has not been subjected to the influence of transparent zone territory size substantially.As for physically how realizing optically filtering unit 7, can make the edge of a knife, slit and rectangular opening with the method for machinery.The canonical parameter of each parts is: the common white light of light source 1 usefulness, laser etc.; The aperture of the logical light part 2 in light source filtering hole 3 is 0.02～1mm; The focal length of light lens 4 is 50～100mm (or littler); Focal length 50～the 100mm of filter lens 6 (lens numerical aperture F#=1, or littler); The blade that the edge of a knife 7 can adopt light-proof material to make, the blade place should approach as far as possible, reaches micron dimension; Focal length 50～the 100mm of imaging len 8 (lens numerical aperture F#=1, or littler).
Fig. 2 has provided the implementation of illumination light among Fig. 1.1 is light source.101,102 and 103 is independent luminous points on the light source.With 103 luminous points is example, and from the light that 103 send, 1032 can be blocked by the light hole 2,1031 in light source filtering hole 3.101 is the same with 103 with 102 situation, and always some light can pass through light hole 2.Therefore light source filtering hole 3 is placed on the front focal plane of lens 4, and the light of the light hole 2 by light source filtering hole 3 becomes light parallel to each other 1601 (deriving from luminous point 101), 1602 (deriving from luminous point 102) and 1603 (deriving from luminous point 103) behind light lens 4.As incident light, little beam infrared detective array throws light on these parallel beams.
Fig. 3 has provided among Fig. 1 the relative position relation of optics filter unit 7 and diffraction spectra 18 on filter lens 6 back focal planes.Fig. 3-1 expression be little beam when not being heated, the relative position relation of optically filtering unit 7 and diffraction spectra 18; Fig. 3-2 expression be little beam be heated produce deflection after, the relative position relation of optically filtering unit 7 and diffraction spectra 18.In Fig. 3, the opaque zone territory of optically filtering unit is by 7 expressions of optically filtering unit, and the filtering boundary of definition is by 701 expressions.1801,1802 and 1803 represent 0 grade, 1 grade and 2 grades of diffraction spectra 18 respectively.The more senior time diffraction light that do not draw among Fig. 3, be because luminous energy on the higher order of diffraction time quite a little less than, optically filtering has not been had too much influence.When little beam was not heated, the initial position of optically filtering unit 7 was positioned at the zero level of diffraction spectra 18, i.e. the position of diffraction spectra intensity gradient maximum (seeing shown in Fig. 3-1).After little beam was heated, the mobile of its diffraction spectra saw shown in Fig. 3-2.Because the translation of diffraction spectra, its part diffraction light has shifted out the transparent zone territory and has entered the opaque zone territory, and correspondingly, the light intensity that receives on the optical receiver 9 will die down.The difference because each micro-joist unit is heated, so corner is also different, the translational movement of its diffraction spectra is also inequality, the diffraction spectra of each micro-joist unit changes also just different by optically filtering unit 7 transparent zone territory light quantities, being reflected on the optical receiver 9 is exactly that light intensity changes with corner, and the intensity image that receive on the receiver this moment is exactly the visible images that is subjected to the temperature modulation of testee.That is to say, " seen " Temperature Distribution of testee.In fact, the optically filtering unit not only can be realized with the edge of a knife in the diagram, also can realize with slit or rectangular opening.
Fig. 4 has provided the influence of illumination intensity to the optical measuring device detection sensitivity.Because the increase of illumination intensity will improve the diffraction peak height of little beam diffraction spectra, and can not influence the physical dimension of little beam diffraction spectra, in this case, the light quantity by the optically filtering unit will increase with the increase of the light intensity of throwing light on.In other words, produce at little beam under the situation of identical deflection angle, increase the illumination light good general and produce bigger intensity gradient variation, so the detection sensitivity of optical measuring device rises.Among Fig. 4 1901 is the sensitivity curves when the illumination light intensity is increased to 2 times of original illumination light intensity (corresponding 1902 shown in sensitivity curves).Compare with the sensitivity curve shown in 1902, after illumination light was forced doubly, the detection sensitivity of optical measuring device also doubled.In the utilization of reality, range of adjustment is to make the illumination intensity of incident light should reach the saturation value of optical receiver as far as possible, and after with digital quantization illumination light intensity, such as with the 8-bit optical receiver time, the gray level of its initial illumination intensity should be near 255; During with the optical receiver of 12-bit, the gray level of its initial illumination intensity should be near 4095; By that analogy, the quantification progression of optical receiver is high more, and correspondingly, the sensitivity of optical measuring device is also high more.
Fig. 5 has provided the structure key diagram that another embodiment of infrared thermoviewer " converges the optical illumination scheme ".It is identical with basic optical measuring device that it implements thinking.But from the light of illumination subsystems outgoing is not directional light, but converges light.Converging ray can be realized by the position that light source filtering hole 3 is placed on light lens 4 front focal plane the place aheads (front focal plane is taken back a bit among the figure).The distance that light lens 4 front focus are departed from light source filtering hole 3 directly has influence on the enlargement factor of optical measuring device.Because be the caustic illumination of using foreign currency, the filter lens 6 of optical filter subsystem can save.The plane that diffracted ray converges is exactly the optics spectrum plane of micro-beam array, optically filtering unit 7 is placed on this plane get final product.Light source filtering hole 3 is near more apart from light lens 4 front focus, and the enlargement ratio of optical measuring device is more little; Light source filtering pitch-row is far away more from light lens 4 front focus, the enlargement ratio of optical measuring device big more (light source filtering hole 3 can be regulated by the optical translation platform with respect to the distance of light lens 4 front focus).Than Fig. 1, this scheme is owing to having saved filter lens 6, and is therefore simpler.
Claims (5)
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| CN101241231B (en) * | 2007-02-07 | 2010-04-07 | 中国科学院微电子研究所 | Infrared optical imaging device |
| CN102169018A (en) * | 2010-12-17 | 2011-08-31 | 中国科学院光电技术研究所 | An illumination device for an infrared imaging optical readout system |
| CN102486410A (en) * | 2010-12-06 | 2012-06-06 | 中国科学院微电子研究所 | Optical imaging device |
| CN102721530A (en) * | 2012-06-05 | 2012-10-10 | 中国电子科技集团公司第四十一研究所 | Double-edge scanning measurement method for infrared focal plane array (IRFPA) modulation transfer function (MTF) and device thereof |
| CN102789114A (en) * | 2011-05-18 | 2012-11-21 | 中国科学院微电子研究所 | Visible-infrared bi-pass camera |
| CN103578097A (en) * | 2012-07-30 | 2014-02-12 | 中国科学院光电研究院 | Dual-waveband high-low resolution collaborative target identification device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100453443C (en) * | 2006-12-01 | 2009-01-21 | 中国科学技术大学 | Glass substrate optical readout infrared sensor |
| CN101241231B (en) * | 2007-02-07 | 2010-04-07 | 中国科学院微电子研究所 | Infrared optical imaging device |
| CN102486410A (en) * | 2010-12-06 | 2012-06-06 | 中国科学院微电子研究所 | Optical imaging device |
| CN102169018A (en) * | 2010-12-17 | 2011-08-31 | 中国科学院光电技术研究所 | An illumination device for an infrared imaging optical readout system |
| CN102169018B (en) * | 2010-12-17 | 2012-10-03 | 中国科学院光电技术研究所 | Lighting device of infrared imaging optical reading system |
| CN102789114A (en) * | 2011-05-18 | 2012-11-21 | 中国科学院微电子研究所 | Visible-infrared bi-pass camera |
| CN102789114B (en) * | 2011-05-18 | 2015-07-15 | 中国科学院微电子研究所 | Visible-infrared bi-pass camera |
| CN102721530A (en) * | 2012-06-05 | 2012-10-10 | 中国电子科技集团公司第四十一研究所 | Double-edge scanning measurement method for infrared focal plane array (IRFPA) modulation transfer function (MTF) and device thereof |
| CN103578097A (en) * | 2012-07-30 | 2014-02-12 | 中国科学院光电研究院 | Dual-waveband high-low resolution collaborative target identification device |
| CN103578097B (en) * | 2012-07-30 | 2017-05-10 | 中国科学院光电研究院 | Dual-waveband high-low resolution collaborative target identification device |
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|---|---|
| CN1228615C (en) | 2005-11-23 |
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