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CN1440057A - Circuit board manufacturing method and device - Google Patents

Circuit board manufacturing method and device Download PDF

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Publication number
CN1440057A
CN1440057A CN 03103718 CN03103718A CN1440057A CN 1440057 A CN1440057 A CN 1440057A CN 03103718 CN03103718 CN 03103718 CN 03103718 A CN03103718 A CN 03103718A CN 1440057 A CN1440057 A CN 1440057A
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liquid
substrate
aforesaid
aforesaid substrate
circuit board
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CN1259704C (en
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五味二夫
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Seiko Epson Corp
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Seiko Epson Corp
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  • Manufacturing Of Printed Circuit Boards (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

This wiring board manufacturing method includes a liquid removing process of supplying the liquid 22 to the surface of a board 10 and removing some of the liquid 22 on the surface of the board 10 by moving a pair of rollers each kept in contact with the surfaces of the board 10 relatively to the board 10. The object of invention is to remove a liquid so as to manufacture a product of high reliability by wiring board manufacturing method.

Description

电路板的制造方法以及制造装置Circuit board manufacturing method and manufacturing device

技术领域technical field

本发明涉及电路板的制造方法及制造装置。The invention relates to a manufacturing method and a manufacturing device of a circuit board.

背景技术Background technique

在电路板的制造方法中,向电路板的表面供给水、酸或碱等液体。然后除去液体,洗净电路板。以往,用吹空气的方法除去液体。In the method of manufacturing a circuit board, a liquid such as water, acid, or alkali is supplied to the surface of the circuit board. Then remove the liquid and wash the board. In the past, liquid was removed by blowing air.

但因为在以往方法中吹大量的空气,所以制造装置大型化,操作烦杂。并且,由于吹大量的空气,所以促进电路板的氧化,产品质量变差。However, in the conventional method, since a large amount of air is blown, the manufacturing equipment is enlarged and the operation is complicated. Also, since a large amount of air is blown, oxidation of the circuit board is promoted, and product quality deteriorates.

发明内容Contents of the invention

本发明的目的在于提供能够制造高可信度产品的除液体方法。The object of the present invention is to provide a liquid removal method capable of producing a high-reliability product.

本发明之1的电路板的制造方法包括向基板表面供给液体,除去上述基板表面上的上述液体的至少一部分的工序,在上述除去液体的工序中,相对于上述基板,移动与上述基板的各表面接触的一对滚子而除去上述液体的至少一部分。The method for manufacturing a circuit board according to claim 1 of the present invention includes a step of supplying a liquid to the surface of a substrate and removing at least a part of the liquid on the surface of the substrate. A pair of rollers in surface contact removes at least a portion of the liquid.

根据本发明,因为使用滚子,所以能够简单地除去基板表面液体的至少一部分。另外,仅是除去液体程度地夹住电路板,所以不会促进配线的氧化并且能够防止电路板的品质变差。因此,能够制造出高可信度产品。According to the present invention, since the roller is used, at least a part of the liquid on the surface of the substrate can be easily removed. In addition, since the circuit board is clamped to a certain extent only to remove the liquid, it is possible to prevent the deterioration of the quality of the circuit board without promoting the oxidation of the wiring. Therefore, a high-reliability product can be manufactured.

本发明之2的电路板的制造方法中,可以在上述供给液体的工序后连续进行除去上述液体的工序。In the method for manufacturing a circuit board according to the second aspect of the present invention, the step of removing the liquid may be continuously performed after the step of supplying the liquid.

本发明之3的电路板的制造方法中,上述电路板形成长条状,并且可以在在包括进行上述供给液体的工序的液体供给单元和进行上述除去液体的工序的液体除去工序单元的区域,把上述基板从一滚子输送到另一滚子。In the method for manufacturing a circuit board according to claim 3 of the present invention, the circuit board is formed in an elongated shape, and may be in a region including a liquid supply unit for performing the process of supplying the liquid and a liquid removal process unit for performing the process of removing the liquid, The aforementioned substrates are conveyed from one roller to the other.

根据本发明,因为能够实现电路板制造工序的连续作业,所以能够提高生产效率并减少制造费用。According to the present invention, since the continuous operation of the circuit board manufacturing process can be realized, the production efficiency can be improved and the manufacturing cost can be reduced.

本发明之4的电路板的制造方法中,上述除去液体的工序中可以包括通过上述滚子除去上述液体之后向上述基板吹空气,从而除去上述基板上的上述液体的至少一部分。In the method for manufacturing a circuit board according to claim 4 of the present invention, the step of removing the liquid may include removing the liquid with the roller and then blowing air to the substrate to remove at least a part of the liquid on the substrate.

由此,能够更加可靠地除去液体。Thereby, liquid can be removed more reliably.

本发明之5的电路板的制造方法中,上述基板具有配线,并且上述滚子中的与上述基板接触的面可以由比上述配线材料更柔软的材料形成。In the manufacturing method of the circuit board of Claim 5 of this invention, the said board|substrate has wiring, and the surface of the said roller which contacts the said board|substrate may be formed with the material softer than the said wiring material.

由此,能够在不损伤配线的基础上除去液体。Thereby, the liquid can be removed without damaging the wiring.

本发明之6的电路板的制造方法中,在上述的除去液体的工序之后还可以包括洗净上述基板的工序。In the manufacturing method of the circuit board of Claim 6 of this invention, the process of washing the said board|substrate may be further included after the said liquid removal process.

本发明之7的电路基板的制造装置,包括向基板表面供给液体的液体供给单元、除去上述基板表面上的上述液体至少一部分的液体除去单元和设置于上述液体除去单元并与上述基板的各表面接触的一对滚子,其中,上述滚子是相对于上述基板移动,并由此除去上述基板上的上述液体的至少一部分。A circuit board manufacturing apparatus according to claim 7 of the present invention includes a liquid supply unit for supplying liquid to the surface of the substrate, a liquid removal unit for removing at least a part of the liquid on the surface of the substrate, and a liquid removal unit provided in the liquid removal unit and connected to each surface of the substrate. A pair of rollers in contact, wherein said rollers move relative to said substrate and thereby remove at least a portion of said liquid on said substrate.

根据本发明,能够使用滚子简单地除去基板表面的液体的至少一部分。并且仅仅通过把电路基板夹成除去液体的程度,所以不会促进配线的氧化并能够防止电路基板品质的劣化。因此能够制造可信度高的产品。According to the present invention, at least a part of the liquid on the surface of the substrate can be easily removed using a roller. And only by sandwiching the circuit board to the extent that the liquid is removed, the oxidation of the wiring is not promoted and the deterioration of the quality of the circuit board can be prevented. Therefore, it is possible to manufacture a highly reliable product.

本发明之8的电路基板的制造装置中,上述液体除去单元可以相对于上述液体供给单元,连续地设置在上述基板输送方向的下流侧。In the circuit board manufacturing apparatus according to the eighth aspect of the present invention, the liquid removing unit may be provided continuously on the downstream side of the substrate conveying direction with respect to the liquid supply unit.

本发明之9的电路基板的制造装置中,上述基板形成长条形状,并且在包括上述液体供给单元和上述液体除去单元的区域中,还包括搭置上述基板的一对滚子,用于从一滚子向另一滚子输送上述基板。In the circuit board manufacturing apparatus according to claim 9 of the present invention, the board is formed in an elongated shape, and further includes a pair of rollers on which the board is placed in a region including the liquid supply unit and the liquid removal unit, for One roller conveys the above-mentioned substrate to the other roller.

由此,因为能够实现电路板制造工序的连续作业,所以能够提高生产效率并减少制造费用。As a result, since the continuous operation of the circuit board manufacturing process can be realized, the production efficiency can be improved and the manufacturing cost can be reduced.

本发明之10的电路基板的制造装置中,在上述液体除去单元设置向上述基板吹空气的吹出部。In the circuit board manufacturing apparatus according to claim 10 of the present invention, the liquid removal unit is provided with a blowing unit for blowing air to the board.

由此,能够更可靠地除去液体。Thereby, liquid can be removed more reliably.

本发明之11的电路基板的制造装置中,上述空气吹出部可以相对于上述滚子,设置在输送上述基板的方向的下流侧。In the circuit board manufacturing apparatus according to the eleventh aspect of the present invention, the air blowing unit may be provided on a downstream side in a direction in which the board is conveyed with respect to the rollers.

由此,当基板上还残留有液体时,即使使用滚子也能够除去上述液体的至少一部分。Accordingly, when the liquid remains on the substrate, at least a part of the liquid can be removed by using a roller.

本发明之12的电路基板的制造装置中,上述基板具有配线,并且上述滚子中,与上述基板接触的面可以由比上述配线材料更柔软的材料形成。In the circuit board manufacturing apparatus according to claim 12 of the present invention, the board has wiring, and a surface of the roller that contacts the board may be formed of a material softer than a material of the wiring.

由此,能够不损伤配线的同时除去液体。Thereby, the liquid can be removed without damaging the wiring.

本发明之13的电路基板的制造装置中,相对于液体除去单元,在上述基板的输送方向的下流侧还可以包含洗净上述基板的洗涤单元。In the circuit board manufacturing apparatus according to claim 13 of the present invention, a cleaning unit for cleaning the substrate may be further included on the downstream side of the conveyance direction of the substrate relative to the liquid removal unit.

在上述电路板的制造方法中,在上述液体供给单元和上述液体除去单元之间,可以近似水平地把上述基板从一滚子输送到另一滚子上。In the above method of manufacturing a circuit board, between the liquid supply unit and the liquid removal unit, the substrate may be conveyed approximately horizontally from one roller to the other roller.

由此,近似水平输送时输送过程中液体常常从基板流出,但如果使用滚子则能够简单地去除液体。As a result, the liquid often flows out from the substrate during the approximately horizontal conveyance, but the liquid can be easily removed by using rollers.

在上述基板的制造方法中,在上述除去液体的工序,可以通过滚子除去上述液体之后吹上述空气。In the manufacturing method of the above-mentioned substrate, in the step of removing the liquid, the air may be blown after removing the liquid with a roller.

由此,基板上残留有液体时,即使使用滚子也能够除去上述液体的至少一部分。Accordingly, when liquid remains on the substrate, at least a part of the liquid can be removed by using a roller.

在上述电路板的制造方法中,在上述供给液体的工序,可以把上述液体分布在上述基板上。In the above method of manufacturing a circuit board, in the step of supplying the liquid, the liquid may be distributed on the substrate.

在上述电路板的制造装置中,可以在上述液体供给单元和上述液体除去单元之间把上述基板近似水平地从一滚子输送到另一滚子上。In the manufacturing apparatus of the circuit board described above, the substrate may be conveyed approximately horizontally from one roller to the other roller between the liquid supply unit and the liquid removal unit.

由此,近似水平输送时输送过程中液体常常从基板流出,但如果使用滚子则能够简单地去除液体。As a result, the liquid often flows out from the substrate during the approximately horizontal conveyance, but the liquid can be easily removed by using rollers.

在上述电路板的制造装置中,可以在上述液体供给单元设置向上述基板分散上述液体的喷嘴。In the manufacturing apparatus of the circuit board described above, a nozzle for dispersing the liquid onto the substrate may be provided in the liquid supply unit.

附图说明Description of drawings

图1是表示本发明的实施例1的电路板的制造方法及制造装置的图。FIG. 1 is a diagram showing a method and apparatus for manufacturing a circuit board according to Embodiment 1 of the present invention.

图2是表示本发明的实施例2的电路板的制造方法及制造装置的图。FIG. 2 is a diagram showing a method and apparatus for manufacturing a circuit board according to Embodiment 2 of the present invention.

图3是表示本发明实施例的电子设备的图。FIG. 3 is a diagram showing an electronic device according to an embodiment of the present invention.

图4是表示本发明实施例的电子设备的图。FIG. 4 is a diagram showing an electronic device according to an embodiment of the present invention.

具体实施方式Detailed ways

下面,参照附图说明本发明的实施例。但是本发明并不限定于以下的实施例。Embodiments of the present invention will be described below with reference to the drawings. However, the present invention is not limited to the following examples.

(实施例1)(Example 1)

图1是表示本发明实施例1的电路板的制造方法及制造装置的图。FIG. 1 is a diagram showing a method and apparatus for manufacturing a circuit board according to Embodiment 1 of the present invention.

制造装置1使用于基板10的湿式处理中。湿式处理的形式没有限定。例如可以例举照相平版印刷技术中的显象工序、电路板的表面处理(电镀处理)、湿式蚀刻、保护层的溶解(剥离)、洗涤工序等。The manufacturing apparatus 1 is used for wet processing of the substrate 10 . The form of wet processing is not limited. For example, a developing step in photolithography, surface treatment (plating treatment) of a circuit board, wet etching, dissolution (stripping) of a protective layer, washing step, and the like can be exemplified.

基板10是挠性基板(柔性基板),通常由有机材料(例如聚酰亚胺)构成。根据湿式处理的形式的不同,基板10的结构也不同,例如可以具有作为配线的材料。基板10也可以是COF(Chip On Film)用基板或TAB(Tape Automated Bonding)用基板。The substrate 10 is a flexible substrate (flexible substrate) and is usually made of an organic material (such as polyimide). Depending on the type of wet processing, the structure of the substrate 10 is also different, for example, it may have a material as a wiring. The substrate 10 may be a substrate for COF (Chip On Film) or a substrate for TAB (Tape Automated Bonding).

在制造装置1中可以使用由多个滚子12、14搭置基板10进行输送的所谓滚子到滚子的输送方式。即制造装置1包括一对滚子12、14。In the manufacturing apparatus 1 , a so-called roller-to-roller conveyance method in which the substrate 10 is laid and conveyed by a plurality of rollers 12 and 14 can be used. That is, the manufacturing device 1 includes a pair of rollers 12 , 14 .

制造装置1可以是电路板(或者是半导体装置)制造线上的一部分。即通过滚子到滚子的输送方式,可以与本实施例中所示的工序(液体的供给、除去、洗涤工序)并列(作为前后工序)进行其它工序。The manufacturing device 1 may be a part of a circuit board (or semiconductor device) manufacturing line. That is, by the roller-to-roller transfer method, other steps can be performed in parallel with the steps shown in this embodiment (liquid supply, removal, and washing steps) (as front and rear steps).

基板10形成长条状(或者带子状)。基板10,通过设置在1个制造线(包含制造装置1)两侧最端部的一对滚子12、14被卷成筒状。在图1所示的例子中,从滚子12送出基板10,把基板卷在滚子14上。在滚子12、14之间,沿基板10的长度方向输送基板10。滚子12、14至少与基板10的宽度方向两端部相接触。滚子12、14可以把其链轮嵌入到基板10的宽度方向两端部的孔中进行输送,也可以不使用链轮进行输送。如果采用滚子到滚子的输送,则因为能够使电路板的制造工序成为连续操作,所以提高生产效率并削减制造费用。The substrate 10 is formed in a strip shape (or a tape shape). The substrate 10 is rolled into a cylindrical shape by a pair of rollers 12 and 14 provided at both ends of one production line (including the production apparatus 1 ). In the example shown in FIG. 1 , the substrate 10 is fed out from the roller 12 and the substrate is wound on the roller 14 . Between the rollers 12 , 14 , the substrate 10 is conveyed in the longitudinal direction of the substrate 10 . The rollers 12 and 14 are in contact with at least both ends in the width direction of the substrate 10 . The rollers 12 and 14 may be conveyed with their sprockets fitted into the holes at both ends in the width direction of the substrate 10 , or may be conveyed without using sprockets. If the conveyance from roller to roller is adopted, since the manufacturing process of the circuit board can be made into a continuous operation, the production efficiency can be improved and the manufacturing cost can be reduced.

制造装置1包含向基板10的表面供给液体的液体供给单元20和除去基板10表面的液体22的至少一部分的液体除去单元30。如图1所示,在1个制造线(与是否滚子到滚子的输送无关)上设置液体供给和液体除去单元20、30时,液体除去单元30,相对于液体供给单元20,设置在输送基板10方向的下流侧。在图1所示的例子中,连续设置液体供给及液体除去单元20、30,以使它们之间没有其它工序。The manufacturing apparatus 1 includes a liquid supply unit 20 for supplying a liquid to the surface of the substrate 10 and a liquid removal unit 30 for removing at least part of the liquid 22 on the surface of the substrate 10 . As shown in FIG. 1 , when the liquid supply and liquid removal units 20 and 30 are installed on one production line (it has nothing to do with the transfer of roller to roller), the liquid removal unit 30 is arranged at The downstream side of the substrate 10 direction is conveyed. In the example shown in FIG. 1, the liquid supply and liquid removal units 20, 30 are arranged consecutively so that there is no other process between them.

基板10是,在液体供给及液体除去单元20、30之间由一个滚子输送到另一个滚子上。如图1所示,可以在液体供给及液体除去单元20、30之间,近似水平地输送基板10。由此,输送基板10时因为可以使其尽量不弯曲,所以能够防止基板10受到应力。另外,在液体供给和液体除去单元20、30之间近似水平地输送基板10时,输送过程中液体22常常从基板10流出而不积存,但通过使用本实施例,能够简单地除去液体22的至少一部分。The substrate 10 is conveyed between the liquid supply and liquid removal units 20 and 30 by one roller to the other roller. As shown in FIG. 1 , the substrate 10 can be transported approximately horizontally between the liquid supply and liquid removal units 20 and 30 . As a result, since the substrate 10 can be transported without bending as much as possible, it is possible to prevent the substrate 10 from being subjected to stress. In addition, when the substrate 10 is transported approximately horizontally between the liquid supply and liquid removal units 20, 30, the liquid 22 often flows out from the substrate 10 without being accumulated during the transport process, but by using this embodiment, the liquid 22 can be easily removed. at least partly.

图1所示的例子中,在液体供给单元20中设置至少向基板10的进行过湿式处理的表面供给液体22的1个或多个(图1中为3个)喷嘴24。即可以在基板的上方或下方设置喷嘴24。上述液体22的成分取决于湿式处理形式,例如可以是碱性溶液、酸性溶液或水等。In the example shown in FIG. 1 , the liquid supply unit 20 is provided with one or more (three in FIG. 1 ) nozzles 24 for supplying the liquid 22 to at least the surface of the substrate 10 subjected to the wet process. That is, the nozzle 24 may be provided above or below the substrate. The composition of the above-mentioned liquid 22 depends on the form of wet treatment, for example, it may be an alkaline solution, an acidic solution, or water.

喷嘴24把液体22分散在基板10的表面。例如可以通过喷嘴24,喷出雾状(液滴状)液体22。或者液体22的供给方法并不限定于上述喷雾法,例如处理基板10表面的方法,也可以采用把液体22涂布在基板10的表面或者把基板10浸渍到液体22中的方法。The nozzle 24 distributes the liquid 22 over the surface of the substrate 10 . For example, the liquid 22 can be sprayed out through the nozzle 24 in the form of mist (droplet). Alternatively, the method of supplying the liquid 22 is not limited to the above-mentioned spraying method. For example, the method of treating the surface of the substrate 10 may also be a method of coating the surface of the substrate 10 with the liquid 22 or immersing the substrate 10 in the liquid 22.

在图1所示的例子中,向基板10的一侧表面供给液体22。例如可以向基板10的形成配线的表面供给液体22。或者可以向基板10的两面供给液体22。在这种情况下,于基板10的各面设置喷嘴24。In the example shown in FIG. 1 , the liquid 22 is supplied to one surface of the substrate 10 . For example, the liquid 22 may be supplied to the surface of the substrate 10 on which wiring is formed. Alternatively, the liquid 22 may be supplied to both surfaces of the substrate 10 . In this case, nozzles 24 are provided on each surface of the substrate 10 .

如图1所示,在液体除去单元30设置与基板10的两侧主表面接触的一对滚子32、34。如图1所示,滚子32、34通过边与基板10的表面接触边移动而相对于基板10进行转动。通过基板10经过滚子32、34之间,滚子32、34与基板10相接触,而除掉基板10表面的液体22的至少一部分。即可以去掉基板10的液体。As shown in FIG. 1 , a pair of rollers 32 and 34 in contact with both main surfaces of the substrate 10 are provided in the liquid removal unit 30 . As shown in FIG. 1 , the rollers 32 and 34 rotate relative to the substrate 10 by moving while contacting the surface of the substrate 10 . At least a portion of the liquid 22 on the surface of the substrate 10 is removed by the substrate 10 passing between the rollers 32 , 34 which contact the substrate 10 . That is, the liquid on the substrate 10 can be removed.

图1所示的例子中,在基板10的第1面上设置滚子32,并在作为基板10的第1面里侧的第2面上设置滚子34。各滚子32、34设置于俯视基板10时相重叠的位置上。滚子32、34和基板10的表面近似线接触。由此,相对于基板10,向与基板10表面的线接触方向相垂直的方向移动滚子32、34,而除去基板10表面的液体22。滚子32、34的宽度(滚子的轴向宽度)大于基板10的宽度为理想,但对其大小不作限定。In the example shown in FIG. 1 , the roller 32 is provided on the first surface of the substrate 10 , and the roller 34 is provided on the second surface which is the back side of the first surface of the substrate 10 . The respective rollers 32 and 34 are provided at overlapping positions in a plan view of the substrate 10 . The rollers 32, 34 and the surface of the substrate 10 are in approximately line contact. Accordingly, the rollers 32 and 34 are moved in a direction perpendicular to the line contact direction of the surface of the substrate 10 with respect to the substrate 10 , and the liquid 22 on the surface of the substrate 10 is removed. The width of the rollers 32 and 34 (roller axial width) is ideally larger than the width of the substrate 10, but the size is not limited.

在图1所示的例子中,通过把基板10从一滚子输送到另一滚子,可实现基板10和滚子32、34相对移动。这时,在液体除去单元30中,滚子32、34的位置可以固定在基板10的长度方向,或者可向与基板10的输送方向相反的方向移动。另外,滚子32、34可以是能够向垂直于基板10表面的方向调节位置的滚子。由此,可以根据基板10的厚度调整滚子32、34之间的宽度。In the example shown in FIG. 1, relative movement of the substrate 10 and the rollers 32, 34 is achieved by conveying the substrate 10 from one roller to the other. At this time, in the liquid removal unit 30, the positions of the rollers 32 and 34 may be fixed in the longitudinal direction of the substrate 10, or may be movable in a direction opposite to the direction in which the substrate 10 is transported. In addition, the rollers 32 and 34 may be rollers whose position can be adjusted in a direction perpendicular to the surface of the substrate 10 . Thus, the width between the rollers 32 and 34 can be adjusted according to the thickness of the substrate 10 .

各滚子32、34,可以具有与图1相同的形式(例如同一直径和宽度),或者具有不同的形式(例如不同的直径和宽度)。Each roller 32, 34 may have the same form (eg same diameter and width) as in Fig. 1, or a different form (eg different diameter and width).

滚子32、34中,与基板10相接触的面,可以由比在基板10所形成的配线(例如铜)更软的材料(例如塑料(PET树脂等))形成。更详细地讲,滚子32、34中,与基板10上的配线材料(例如导电箔)相接触的部分(例如滚子32的表面),可以由比配线更软的材料形成。由此,能够在不损伤配线的基础上除去液体22的至少一部分。The surfaces of the rollers 32 and 34 that come into contact with the substrate 10 may be formed of a softer material (for example, plastic (PET resin, etc.)) than the wiring (for example, copper) formed on the substrate 10 . More specifically, among the rollers 32 and 34 , the portion (for example, the surface of the roller 32 ) that is in contact with the wiring material (for example, conductive foil) on the substrate 10 may be formed of a material softer than the wiring. Thereby, at least a part of the liquid 22 can be removed without damaging the wiring.

与基板10相接触的滚子32、34的接触面可以是由具有弹性的材料形成,上述弹性应使滚子32、34和基板10上的凹凸(例如通过配线材料和基材形成的凹凸)紧密贴在一起。由此,能够更可靠地从基板10除去液体22。The contact surfaces of the rollers 32, 34 in contact with the substrate 10 may be formed of an elastic material, and the above-mentioned elasticity should make the unevenness on the rollers 32, 34 and the substrate 10 (for example, the unevenness formed by the wiring material and the base material) ) stick together tightly. Accordingly, the liquid 22 can be more reliably removed from the substrate 10 .

另外,可以与图1不同地在液体除去单元30设置多个多对滚子32、34。这时,每对滚子32、34排列在基板的输送方向。In addition, a plurality of pairs of rollers 32 and 34 may be provided in the liquid removal unit 30 differently from FIG. 1 . At this time, each pair of rollers 32, 34 is aligned in the conveying direction of the substrate.

在图1所示的例子中,制造装置1包括洗涤基板10的洗涤单元40。洗涤单元40是相对于液体除去单元30,设置在基板10输送方向的下流侧。在洗涤单元40中,当通过液体除去单元30后的基板10上还残留由液体22一部分时,为了几乎完全地除去残留在基板10上的液体22,洗涤基板10(例如水洗)。其结果,因为在上述工序的液体除去单元30除去液体22的至少一部分,所以能够减少洗涤单元30中洗涤液量。由此,能够简化洗涤单元30的结构。In the example shown in FIG. 1 , manufacturing apparatus 1 includes cleaning unit 40 for cleaning substrate 10 . The cleaning unit 40 is provided on the downstream side in the transport direction of the substrate 10 with respect to the liquid removal unit 30 . In the cleaning unit 40 , when a part of the liquid 22 remains on the substrate 10 after passing through the liquid removing unit 30 , the substrate 10 is washed (eg, washed with water) to almost completely remove the liquid 22 remaining on the substrate 10 . As a result, since at least a part of the liquid 22 is removed in the liquid removing unit 30 in the above process, the amount of washing liquid in the washing unit 30 can be reduced. Thereby, the structure of the washing unit 30 can be simplified.

本实施例的电路板的制造装置具有上述结构,下面说明使用上述制造装置1的电路板的制造方法。另外,在下面的电路板的制造方法中,可以选择使用能够由上述内容导出的任意一种内容。The circuit board manufacturing apparatus of the present embodiment has the above-mentioned structure, and a circuit board manufacturing method using the above-mentioned manufacturing apparatus 1 will be described below. In addition, in the following method of manufacturing a circuit board, any one of the contents that can be derived from the above-mentioned contents can be selected and used.

本实施例的制造方法包括上述湿式处理的工序。在本实施例中作为湿式处理的形式,用溶解(剥离)基板10上面的保护层(例如为了形成配线而作为掩模的保护层)的例子来说明湿式处理形式。但是,本实施例的制造方法并不限定于上述例子。The manufacturing method of this embodiment includes the above-mentioned wet processing steps. In this embodiment, as a form of wet processing, an example of dissolving (peeling off) a protective layer on the substrate 10 (for example, a protective layer used as a mask for forming wiring) will be described. However, the manufacturing method of this embodiment is not limited to the above example.

首先准备在基材(例如聚酰亚胺)上设有导电箔(例如铜箔)的基板10。导电箔是例如用粘接剂贴附在基材的一个整面(上述表侧的面)上。并且在基板10,形成具有感光性的保护层,并通过一定图形形状的掩模曝光、显象保护层。然后,对导电箔中的从保护层露出的部分浸渍腐蚀剂(腐蚀液),进行蚀刻。由此,在基板10形成一定形状的配线,配线上残留保护层。First, the board|substrate 10 which provided the conductive foil (for example, copper foil) on the base material (for example, polyimide) is prepared. The conductive foil is attached to the entire surface of the substrate (the above-mentioned surface on the front side), for example, with an adhesive. And on the substrate 10, a photosensitive protective layer is formed, and the protective layer is exposed and developed through a mask with a certain pattern shape. Then, the portion exposed from the protective layer in the conductive foil is immersed in an etchant (etching solution) to perform etching. As a result, wiring of a fixed shape is formed on the substrate 10, and the protective layer remains on the wiring.

如图1所示,上述基板10搭在滚子12、14上,从一滚子被输送至另一滚子上。另外,在液体供给单元20中,向基板10供给用于溶解上述保护层的液体22(例如碱性溶液)。在图1所示的例中,使用喷雾器的方式来向基板10供给液体22。通过供给液体22,溶解基板10上的保护层,在基板上残留液体22。As shown in FIG. 1, the above-mentioned substrate 10 rides on rollers 12, 14, and is conveyed from one roller to the other roller. In addition, in the liquid supply unit 20 , a liquid 22 (such as an alkaline solution) for dissolving the above-mentioned protective layer is supplied to the substrate 10 . In the example shown in FIG. 1 , the liquid 22 is supplied to the substrate 10 using a nebulizer. By supplying the liquid 22, the protective layer on the substrate 10 is dissolved, and the liquid 22 remains on the substrate.

接着把基板10输送至液体除去单元30,通过滚子32、34除去在基板10上残留的液体22的至少一部分。详细地讲,通过把滚子32、34与基板10接触,而除去基板10上的液体22的至少一部分。这时,可以通过滚子32、34,除去基板10上的残留于配线表面的一部分液体22。或者是不仅可以除去基板10上的残留于配线表面的液体22的一部分,而且也可以除去基板10上的残留在配线间基材表面上的液体22的一部分。然后,根据需要,把基板10输送至洗涤单元40洗涤基板10,几乎完全地除去液体22。Next, the substrate 10 is transported to the liquid removal unit 30 , and at least a part of the liquid 22 remaining on the substrate 10 is removed by the rollers 32 and 34 . Specifically, at least a part of the liquid 22 on the substrate 10 is removed by bringing the rollers 32 and 34 into contact with the substrate 10 . At this time, part of the liquid 22 remaining on the surface of the wiring on the substrate 10 can be removed by the rollers 32 and 34 . Alternatively, not only a part of the liquid 22 remaining on the surface of the wiring on the substrate 10 but also a part of the liquid 22 remaining on the surface of the inter-wiring base material on the substrate 10 may be removed. Then, if necessary, the substrate 10 is transported to the washing unit 40 to wash the substrate 10 and remove the liquid 22 almost completely.

由此,可以在基板10形成一定形状的多个配线,制得电路板。最后在长条状的电路板上搭载半导体芯片等电子部件,在所定区域内被单独分开。Thereby, a plurality of wirings having a fixed shape can be formed on the substrate 10, and a circuit board can be obtained. Finally, electronic components such as semiconductor chips are mounted on the strip-shaped circuit board, and are separated in a predetermined area.

另外,各工序的详细说明与在上述制造装置中的各工序中的说明相同。In addition, the detailed description of each process is the same as the description of each process in the said manufacturing apparatus.

根据本实施例,因为使用滚子32、34,所以能够简单地除去基板10上的液体22的至少一部分。另外,因为仅是除去液体22程度地夹住电路板,所以不促进氧化,并能够防止电路板品质的劣化。特别是作为液体22,使用碱或酸溶液时,如果同时进行吹空气的工序,将促进电路板的氧化,所以使用本实施例将会有很好效果。并由此能够制造出高可信度产品。According to this embodiment, since the rollers 32 and 34 are used, at least a part of the liquid 22 on the substrate 10 can be easily removed. In addition, since the removal liquid 22 sandwiches the circuit board to a certain extent, oxidation is not promoted, and deterioration of the quality of the circuit board can be prevented. Especially as the liquid 22, when using alkali or acid solution, if the process of blowing air is carried out at the same time, the oxidation of the circuit board will be promoted, so the use of this embodiment will have a good effect. And thus can manufacture high reliability products.

(实施例2)(Example 2)

图2是表示使用本发明实施例2的电路板的制造方法以及制造装置的图。在本实施例中,液体除去单元130的形式不同于上述实施例。在以下说明中,可以选择使用由上述内容导出的任意一种内容。Fig. 2 is a diagram showing a method and apparatus for manufacturing a circuit board according to Embodiment 2 of the present invention. In this embodiment, the form of the liquid removal unit 130 is different from the above-described embodiments. In the following description, any content derived from the above content can be selected and used.

如图2所示,液体除去单元130具有上述滚子32、34和用于吹出空气38的吹出器。吹出器可以是气刀。吹出器具有1个或多个(图2中为1个)空气38的吹出部36。吹出部36向基板10的至少一面吹空气38。通过吹空气,能够挥发除去液体22。根据该实施例,因为并用滚子32、34,所以与仅通过吹空气38而除去液体22的方法相比,空气38的使用量少。其结果能够防止电路板的氧化。As shown in FIG. 2 , the liquid removal unit 130 has the aforementioned rollers 32 , 34 and a blower for blowing out air 38 . The blower can be an air knife. The blower has one or more (one in FIG. 2 ) blowing parts 36 for air 38 . The blowing unit 36 blows air 38 to at least one surface of the substrate 10 . By blowing air, the liquid 22 can be volatilized and removed. According to this embodiment, since the rollers 32 and 34 are used together, the amount of air 38 used is less than that of the method of removing the liquid 22 by blowing only the air 38 . As a result, oxidation of the circuit board can be prevented.

如图2所示,空气38的吹出部36可以相对于滚子32、34,设置在基板10输送方向的下游侧。由此,在基板10上还残留有液体22时,即使使用滚子32、34,,也能够除去上述液体22的至少一部分。As shown in FIG. 2 , the blowing portion 36 of the air 38 may be provided on the downstream side in the conveying direction of the substrate 10 with respect to the rollers 32 and 34 . Thereby, when the liquid 22 remains on the substrate 10, even if the rollers 32 and 34 are used, at least a part of the liquid 22 can be removed.

在本实施例中也能够达到上述效果,更可靠地除去基板10上的液体22。另外,因为能够由上述导出本实施例的电路板制造方法的结构和效果,所以省略说明。In this embodiment as well, the above effects can be achieved, and the liquid 22 on the substrate 10 can be removed more reliably. In addition, since the structure and effect of the circuit board manufacturing method of this embodiment can be derived from the above, description is omitted.

作为具有本实施例的电路板的电子设备,在图3中表示笔记本电脑200,在图4中表示手机300。As electronic equipment having the circuit board of this embodiment, a notebook computer 200 is shown in FIG. 3 , and a mobile phone 300 is shown in FIG. 4 .

本发明并不限定于上述实施例,可以进行各种改变。例如,本发明包括实质上与实施例中说明的结构相同的结构(例如,功能、方法以及效果相同的结构或者目的和结果相同的结构)。另外,本发明包括把实施例中说明的非实质部分替换后的结构。另外,本发明包括与本实施例中说明的结构具有相同效果的结构或者达到同一目的的结构。另外,本发明包括向实施例中说明的结构附加已知技术后的结构。The present invention is not limited to the above-described embodiments, and various changes can be made. For example, the present invention includes structures substantially the same as those described in the embodiments (for example, structures with the same function, method, and effect, or structures with the same purpose and result). In addition, this invention includes the structure which replaced the insubstantial part demonstrated in the Example. In addition, the present invention includes structures that have the same effect or achieve the same purpose as the structures described in this embodiment. In addition, the present invention includes configurations in which known techniques are added to the configurations described in the embodiments.

Claims (13)

1, a kind of manufacture method of circuit board, comprise to the substrate surface feed fluid, remove the operation of at least a portion of the lip-deep aforesaid liquid of aforesaid substrate, in above-mentioned operation of removing liquid, with respect to aforesaid substrate, move a pair of roller that contacts with each surface of aforesaid substrate and at least a portion of removing aforesaid liquid.
2, the manufacture method of circuit board according to claim 1, the operation of after the operation of above-mentioned feed fluid, removing aforesaid liquid continuously.
3, the manufacture method of circuit board according to claim 1 and 2, aforesaid substrate forms strip, and, aforesaid substrate is transported to another roller from a roller at the fluid supply unit that comprises the operation of carrying out above-mentioned feed fluid and carry out the zone that the above-mentioned liquid of removing the operation of liquid is removed the operation unit.
4, the manufacture method of circuit board according to claim 1 and 2, above-mentioned operation of removing liquid comprise that removing aforesaid liquid by above-mentioned roller blows air to aforesaid substrate afterwards, thereby remove at least a portion of the aforesaid liquid on the aforesaid substrate.
5, the manufacture method of circuit board according to claim 1 and 2, aforesaid substrate has distribution, and the face that contacts with aforesaid substrate in the above-mentioned roller can be formed by the material than above-mentioned wiring material softness.
6, the manufacture method of circuit board according to claim 1 and 2 also comprises the operation of cleaning aforesaid substrate after the above-mentioned operation of removing liquid.
7, a kind of manufacturing installation of circuit board, the liquid of comprise fluid supply unit to the substrate surface feed fluid, removing the lip-deep aforesaid liquid at least a portion of aforesaid substrate is removed the unit and is arranged at a pair of roller that aforesaid liquid is removed the unit and contacted with each surface of aforesaid substrate, wherein, above-mentioned roller is to move with respect to aforesaid substrate, and removes at least a portion of the aforesaid liquid on the aforesaid substrate thus.
8, according to the manufacturing installation of the described circuit board of right claim 7, aforesaid liquid is removed the unit with respect to the aforesaid liquid feed unit, is arranged on the downstream of aforesaid substrate throughput direction continuously.
9, according to the manufacturing installation of right claim 7 or 8 described circuit boards, aforesaid substrate forms elongate in shape, and also comprise in the zone of unit and take a pair of roller of putting aforesaid substrate comprising that aforesaid liquid feed unit and aforesaid liquid are removed, be used for carrying aforesaid substrate to another roller from a roller.
10, according to the manufacturing installation of right claim 7 or 8 described circuit boards, remove the unit at aforesaid liquid the portion that blows out of blowing air to aforesaid substrate is set.
11, according to the manufacturing installation of the described circuit board of right claim 10, above-mentioned air blows out portion can be arranged on the downstream of carrying the aforesaid substrate direction with respect to above-mentioned roller.
12, according to the manufacturing installation of right claim 7 or 8 described circuit boards, aforesaid substrate has distribution, and the face that contacts with aforesaid substrate in the above-mentioned roller can be formed by the material than above-mentioned wiring material softness.
13, according to the manufacturing installation of right claim 7 or 8 described circuit boards, remove the unit, also comprise the washing unit of cleaning aforesaid substrate in the downstream of aforesaid substrate throughput direction with respect to liquid.
CN 03103718 2002-02-18 2003-02-17 Circuit board manufacturing method and device Expired - Fee Related CN1259704C (en)

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JP2002040099A JP2003243801A (en) 2002-02-18 2002-02-18 Wiring board manufacturing method and manufacturing apparatus

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101034660B (en) * 2006-03-08 2010-05-26 住友精密工业株式会社 Basal plate processing device
CN108123069A (en) * 2016-11-28 2018-06-05 乐金显示有限公司 roll-to-roll manufacturing equipment

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100802394B1 (en) * 2005-11-10 2008-02-13 (주)비엔에프 Equipment and method for cleaning circuit boards in advanced electronic and communication equipment using insulator solutions

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101034660B (en) * 2006-03-08 2010-05-26 住友精密工业株式会社 Basal plate processing device
CN108123069A (en) * 2016-11-28 2018-06-05 乐金显示有限公司 roll-to-roll manufacturing equipment
US10802308B2 (en) 2016-11-28 2020-10-13 Lg Display Co., Ltd. Roll to roll fabrication apparatus
CN108123069B (en) * 2016-11-28 2020-10-16 乐金显示有限公司 Roll to Roll Manufacturing Equipment

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