CN1328604C - 3-D optical ware guide and its producing method, optical module and optical transmission system - Google Patents

Abstract

Conventional 3D waveguides are costly and require complex adjustments. A three-dimensional optical waveguide can be formed by laminating planar substrates, such as a plurality of lens substrates, isolator substrates, and wavelength division multiplexing filters. The optical substrate includes at least a waveguide substrate with a waveguide and a reflective surface. In the three-dimensional optical waveguide, the planar substrates are positioned using marks integrally formed on at least two of the planar substrates. Light introduced into the waveguide is reflected by the reflective surface and passes through the lens substrate and the isolator substrate.

Description

Three-dimensional optical waveguide and manufacturing method thereof, optical module and optical transmission system

technical field

The invention relates to a three-dimensional optical waveguide, a manufacturing method thereof, an optical module and an optical transmission system for enhancing the performance of an optical device.

Background technique

Usually, when forming a three-dimensional optical waveguide, for example, in order to output the light propagating through the waveguide perpendicular to the waveguide, as shown in FIG. Obliquely formed in the groove 1002 in the planar waveguide 1001, the light reflected or emitted by the planar filter 1006 is oriented relative to the spatially arranged light receiving element 1008, lens system and another planar optical waveguide, thereby forming a three-dimensional optical waveguide.

Contents of the invention

Accordingly, it is an object of the present invention to provide a three-dimensional optical waveguide and its manufacturing method, an optical module and an optical transmission system which are inexpensive and do not require complicated adjustments.

A first aspect of the present invention is a three-dimensional optical waveguide comprising at least a laminate consisting of a planar substrate having a planar optical waveguide and a planar substrate having a sheet-like optical element.

A second aspect of the present invention is the three-dimensional optical waveguide according to the first aspect, wherein the planar substrate having the sheet-shaped optical element is one of a lens layer, a spacer layer, and a filter layer.

A third aspect of the present invention is the three-dimensional optical waveguide according to the second aspect, wherein a planar substrate having a planar waveguide and one of said lens layer, spacer layer and filter layer are integrally formed on a forming glass.

A fourth aspect of the present invention is the three-dimensional optical waveguide according to the second and third aspects, the total reflection surface of which is formed on a planar optical waveguide, and light passes through one of the lens layer, isolator layer, and filter layer.

A fifth aspect of the present invention is the three-dimensional optical waveguide according to the fourth aspect, further including at least one of a light receiving element and a light emitting element.

A third aspect of the present invention is the three-dimensional optical waveguide according to the first aspect, wherein the planar substrates are positioned relative to each other by marks integrally formed on at least two of the planar substrates.

A third aspect of the present invention is a method of manufacturing a three-dimensional optical waveguide, characterized in that it includes:

providing a plurality of planar substrates each having a planar optical waveguide;

Simultaneously forming marks on each planar substrate; and

The planar substrates are stacked by positioning the planar substrates with marks.

An eighth aspect of the present invention is the method of manufacturing a three-dimensional optical waveguide according to the seventh aspect, wherein the mark is concave or convex, and before laminating the planar substrates, by adding light to the mark and causing the light to be reflected or transmitted by the mark while positioning the planar substrate.

A ninth aspect of the present invention is the method of manufacturing a three-dimensional optical waveguide according to the eighth aspect, wherein the mark bottom surface is one of an inclined surface, a scattering surface, and a lens surface.

A tenth aspect of the present invention is an optical transmitter module comprising:

electrical input terminal;

Light emitting elements connected to electrical input terminals;

A three-dimensional optical waveguide according to the third aspect of the present invention, for transmitting light emitted by a light-emitting element; and

An optical output terminal that outputs light transmitted through the three-dimensional optical waveguide.

An eleventh aspect of the present invention is an optical receiver module comprising:

optical input terminal;

A three-dimensional optical waveguide as claimed in claim 3 connected to an optical input terminal;

a light receiving element that receives light transmitted through the three-dimensional optical waveguide; and

The electrical output terminal connected to the light-receiving element.

A third aspect of the invention is an optical transceiver module comprising:

electrical input terminal;

A three-dimensional optical waveguide, including a stack consisting of at least a planar substrate with a planar optical waveguide, a planar substrate with an isolator, and a planar substrate with a wavelength division multiplexing filter;

A light-emitting element connected to an electrical input terminal and a three-dimensional optical waveguide;

The light-receiving element connected to the three-dimensional optical waveguide;

an electrical output terminal connected to the light-receiving element; and

Optical input and output terminals connected to the three-dimensional optical waveguide,

The electrical signal input from the electrical input terminal is converted into an optical signal and emitted from the optical input and output terminal, and the optical signal received by the optical input and output terminal is converted into an electrical signal and output to the electrical output terminal.

The third aspect of the present invention is an optical transmission system for sending and receiving, including:

Optical Transmitter Modules, including:

electrical input terminal;

The light-emitting element connected to the power input terminal;

3D optical waveguides have:

A laminate consisting of at least one planar substrate with a planar optical waveguide connected to the light-emitting element and one planar substrate with a sheet-like optical element;

a waveguide for transporting light emitted from the light emitting element; and

an optical output terminal for outputting light transmitted through the three-dimensional optical waveguide;

an optical cable to the optical transmitter module; and

Optical Receiver Module, including:

optical input terminal;

Three-dimensional optical waveguide with:

A stack consisting of at least one planar substrate with a planar optical waveguide connected to the optical input and one planar substrate with a sheet-like optical element;

a light receiving element that receives light transmitted through the three-dimensional optical waveguide; and

Electrical output terminals receiving optical elements;

The optical receiver module connects to the fiber optic cable.

The fourteenth aspect of the present invention is an optical transmission system for optical transceiver, comprising:

The optical transceiver module according to the twelfth aspect of the present invention; and

Connect the fiber optic cable to the optical transceiver module.

Description of drawings

FIG. 1 is a cross-sectional view showing the structure of a three-dimensional optical waveguide according to a first embodiment of the present invention.

Fig. 2 is a cross-sectional view showing a modified three-dimensional optical waveguide structure according to the first embodiment of the present invention.

Fig. 3 is a cross-sectional view showing the structure of a three-dimensional optical waveguide according to a second embodiment of the present invention.

4 is a cross-sectional view showing a modified three-dimensional optical waveguide structure according to a second embodiment of the present invention.

Fig. 5 is a cross-sectional view showing the structure of a three-dimensional optical waveguide according to a third embodiment of the present invention.

6 is a cross-sectional view showing a modified three-dimensional optical waveguide structure according to a third embodiment of the present invention.

Fig. 7 is a cross-sectional view showing the structure of a three-dimensional optical waveguide according to a fourth embodiment of the present invention.

8 is a cross-sectional view showing a modified three-dimensional optical waveguide structure according to a fourth embodiment of the present invention.

Fig. 9 is a cross-sectional view showing the structure of a three-dimensional optical waveguide according to a fifth embodiment of the present invention.

Fig. 10 is a cross-sectional view showing the structure of a three-dimensional optical waveguide according to a sixth embodiment of the present invention.

11(a) to 11(f) are cross-sectional views showing marks formed in each substrate and used when manufacturing the three-dimensional optical waveguide of the present invention.

12(a) to 12(c) are schematic diagrams showing a method of manufacturing the three-dimensional optical waveguide of the present invention.

13(a) to 13(c) are schematic diagrams showing a correction method for manufacturing the three-dimensional optical waveguide of the present invention.

14(a) and 14(b) are schematic diagrams showing another method of manufacturing the three-dimensional optical waveguide of the present invention.

15(a) and 15(b) are schematic views showing still another method of manufacturing the three-dimensional optical waveguide of the present invention.

16(a) and 16(b) are schematic diagrams showing still another method of manufacturing the three-dimensional optical waveguide of the present invention.

17(a) to 17(d) are schematic diagrams showing another method of manufacturing the three-dimensional optical waveguide of the present invention.

18(a) and 18(b) are schematic diagrams showing still another method of manufacturing the three-dimensional optical waveguide of the present invention.

Fig. 19 is a schematic diagram showing the structure of the optical transmitter module of the present invention.

Fig. 20 is a schematic diagram showing the structure of the optical transmitter module of the present invention.

Fig. 21 is a schematic diagram showing the structure of the optical receiver module of the present invention.

Fig. 22 is a schematic diagram showing the structure of the optical receiver module of the present invention.

Fig. 23 is a schematic diagram showing the structure of the optical transceiver module of the present invention.

Fig. 24 is a schematic diagram showing the application structure of the optical transceiver module of the present invention.

Fig. 25 is a perspective view showing an example of an optical input terminal, an optical output terminal, or an optical input and output terminal of the present invention.

Figure 26 shows the original counted waveguide structure.

Label description

1, 11 waveguide substrate

2,12 waveguide

3,10 Lens substrate

4, 9 lens

8 Isolator substrate

13, 14 Reflective surfaces

59,99 Surface emitting lasers

69, 89 Surface mount photodiodes

101, 103 mark

102, 104 bottom surface

105 light source

106 light receiver

107, 108 images

Detailed ways

first embodiment

Fig. 1 shows a cross-sectional structure of a three-dimensional optical waveguide of a first embodiment of the present invention.

As a planar substrate having a planar waveguide of the present invention, a waveguide substrate 1 is composed of forming glass, and a waveguide 2 is a planar optical waveguide of the present invention formed on the top surface of the waveguide substrate 1 . At the end of the waveguide 2, a reflective surface 13 is formed, which is the reflective surface of the present invention and includes a small mirror or the like. On the top surface of the waveguide substrate 1, a lens substrate 3, which is a planar substrate having a lens layer of the present invention, is laminated. In the lens substrate 3, the lens 4 is integrally formed by forming glass (same as the lens substrate described below).

A polarizer 5 , a Faraday rotator 6 and a polarizer 7 are sequentially stacked above the lens substrate 3 , and the isolator substrate 8 formed by these elements is a planar substrate with the isolator of the present invention. On the top surface of the spacer substrate 8, a lens substrate 10, which is a planar substrate having a lens layer of the present invention, is laminated. In the lens substrate 10, the lens 9 is integrally formed by forming glass. Above the lens layer 10, the laminated waveguide substrate 11 is the planar optical waveguide of the present invention, also formed of glass.

In the lower part of the waveguide substrate 11, a waveguide 12 formed is a planar optical waveguide of the present invention, and a reflective surface 14 formed at one end thereof is a reflective surface including small mirrors of the present invention. The reflective surface 13, lens 4, lens 9 and reflective surface 14 are arranged such that their vertical positions are vertically aligned. The position alignment method will be described later. The reflective surface 13 is inclined (45°) so that light traveling in the horizontal direction travels in the vertical direction. The reflective surface 14 is inclined (45°) so that vertically propagating light propagates in the horizontal direction. The substrates are bonded with a UV curable adhesive.

The description assumes that the vertical and horizontal (longitudinal) directions correspond to those of FIG. 1 (suitable for the following description).

When manufacturing this three-dimensional optical waveguide, it must be between the waveguide substrate 1 with the reflective surface 13 and the lens substrate 3 with the lens 4 . Precise positional alignment is performed between the lens substrate 3 and the lens substrate 10 with the lens substrate 9, and between the lens substrate 10 and the optical waveguide substrate 11 with the reflective surface 14. Figures 11 and 12 help illustrate this alignment method.

First, the concave mark 101 of FIG. 11(a) is formed integrally with the substrates (waveguide substrate 1, lens substrates 3 and 10, and waveguide substrate 11) by press forming glass. As shown in FIG. 11( a ), the bottom surface 102 of the mark 101 is inclined at 45°.

Next, referring to FIGS. 12( a ) to 12 ( c ), taking the waveguide substrate 1 and the lens substrate 3 as examples, the process of aligning the substrates will be described.

The above-mentioned inclined bottom surface 102 is formed in the same direction as the length direction of the substrates. The horizontal position of the mark 101 formed on the substrate is determined so as to be along the lengthwise direction of the substrates (hereinafter referred to as the x direction), the direction orthogonal to the x direction in the substrate plane (hereinafter referred to as the y direction), and the substrate stacking directions. (vertically, that is, the direction orthogonal to the x and y directions, hereinafter referred to as the z direction) to set a predetermined distance. For example, stacking the substrates, as shown in FIGS. 12(a) to 12(c), makes the positions of the marks 101 formed in the waveguide substrate 1 and the positions of the marks 101 formed in the lens substrate 3 the same basis. In the y direction of the sheet, a predetermined pitch a is set in the x direction, and a predetermined pitch c is set in the z direction.

As shown in FIG. 12( a ), the waveguide substrate 1 is placed below and the lens substrate 3 is placed above the waveguide substrate 1 by UV curing adhesive. Then, a light source 105 emitting parallel light is placed under the waveguide substrate 1 , and a light receiver 106 such as a CCD camera is placed on the side of the laminated substrate above the lens substrate 3 . When the light source 105 emits parallel light, part of the emitted parallel light is reflected by the part of the bottom surface 102 where the mark 101 is, and the reflected part of the light reaches the light receiver 106 on the laminated substrate side. In the part where there is no mark 101 , all the emitted parallel light is transmitted and reaches the light receiver 106 above the lens substrate 3 .

FIG. 12(b) shows an image obtained from the photoreceptor 106 above the lens substrate 3 in this manner. In the figure, image 108 corresponds to the mark 101 formed in the waveguide 1, and image 107 corresponds to the mark 101 formed in the lens substrate 3, and these images are shown on the light receptor 106 as darker portions than any surrounding portions. Then move the waveguide substrate 1 and the lens substrate 3 in the horizontal direction for adjustment, so that the positions of the images 107 and 108 along the y direction coincide, and the distance between them is a predetermined distance a along the x direction.

Fig. 12(c) shows an image obtained from the photoreceptor 106 placed on the laminated substrate side, as described above. In the figure, an image 116 corresponds to the mark 101 formed in the lens substrate 3, and an image 117 corresponds to the mark 101 formed in the waveguide substrate 1, and these images are shown on the light receiver 106 as brighter parts than any surrounding parts. . Then move the waveguide 1 and the lens substrate 3 along the z direction for adjustment, so that the distance between the images 116 and 117 is a predetermined distance c. When the components are brought into predetermined alignment, ultraviolet light is applied to the waveguide substrate 1 and the lens substrate 3 to cure the ultraviolet curing adhesive filling the space therebetween, thereby bonding the substrates 1 and 3 .

Similarly, positional adjustments are also made between the lens substrates 3 and 10 and between the lens substrate 10 and the waveguide substrate 11 . At this time, the positional alignment between the lens substrates 3 and 10 operates similarly to the case where the spacer substrate 8 is sandwiched between the lens substrates 3 and 10 described above.

At this time, although the predetermined spacing a between the substrates may be different, it is determined that when the substrates are stacked, the horizontal positions of the reflective surface 13, the lenses 4 and 9, and the reflective surface 9 are vertically aligned.

Next, operations when such a three-dimensional optical waveguide is used will be described.

Light introduced into the waveguide substrate 1 propagates through the waveguide 2, is reflected upward by the reflective surface 13, and is incident on the lens 4. Light exiting lens 4 passes through isolator substrate 8 and lens 9, and propagates through waveguide 12 by horizontal reflection from reflective surface 4.

This provides an inexpensive and sophisticated three-dimensional optical waveguide that does not require complex adjustments.

In the above description, although the substrates are positioned so that the horizontal positions (in the x and y directions) of the marks 101 formed in the substrates are the same in the y direction, and the predetermined pitch a is set in the x direction, the substrates are also It may be positioned to set a predetermined distance b along the y-direction.

In the first embodiment, the lens substrate 10 is present between the isolator substrate 8 and the waveguide substrate 11 . However, when only the lens 24 shown in FIG. 2 is used to concentrate the light reflected by the reflective surface 13 on the reflective surface 14, the lens substrate 10 is unnecessary. In this case, effects similar to those described above can be obtained.

In the example, although the light source 105 is placed under the waveguide substrate 1 when the positions are aligned between the waveguide substrate 1 and the lens substrate 3, the light source 105 may also be placed on the side of the waveguide substrate 1 and the lens substrate 3, As shown in Figure 13(a). At this time, at the part inconsistent with the bottom surface 102 of the mark 101, the parallel light emitted by the light source 105 is transmitted to the waveguide substrate 1 and the lens substrate when it reaches the light receiver 106 placed on the side of the waveguide 1 and the lens substrate 3. 3, and at the portion corresponding to the bottom surface 102 of the mark 101, part of the parallel light is reflected upwards and reaches the light receiver 106 above the lens substrate 3.

Therefore, as the image obtained on the photoreceptor 106 above the lens substrate 3, as shown in FIG. Image 110, is shown on light receiver 106 as a portion that is brighter than surrounding portions. As mentioned above, when the light source 105 is placed on the side of the waveguide substrate 1 and the lens substrate 3, by adjusting the distance a between the images 109 and 110 similarly to the above case, the waveguide substrate 1 and the lens substrate 3 can be placed along the Put it in the predetermined position horizontally.

Fig. 13 (c) shows the image obtained from the photoreceptor 106 placed on the side of the waveguide substrate 1 and the lens substrate 3 as described above, where the image 118 corresponds to the mark 101 formed in the lens substrate 3, the image 119 corresponds to the marks 101 formed in the waveguide substrate 1, and these images are shown as darker parts on the light receiver 106 than the surrounding parts. Then, move the waveguide 1 and the lens substrate 3 along the z direction for adjustment, so that the distance between the images 118 and 119 is a predetermined distance c. When the elements are brought into predetermined alignment, the waveguide 1 and the lens substrate 3 are bonded together as described above.

In the above description, although the concave marks 101 are used for positioning the substrates, the convex marks 103 are also used for positioning. Figure 11(d) shows the case where the bottom surface 104 of the convex mark 103 is inclined at 45°, Figure 11(e) shows the case where the bottom surface 104 of the convex mark 103 has a scattering surface, and Figure 11(f) shows the convex mark 103 is the case where the bottom surface 104 has a lens structure.

When using these convex marks 103, the adjustment of the horizontal and vertical positions of the substrates is similar to the case of the concave marks 101. As mentioned above, the spaces between the substrates are fixed by spacers (not shown) or glued agent filling, the light source 105 is placed below or on the side of the waveguide 1 .

In the above description, although the bottom surfaces of the marks 101 and 103 are inclined at 45°, they can also be inclined at different angles. At this time, by setting the light receiver 106, the light from the light source 105 is projected obliquely upward or downward relative to the substrate. On the photoreceptor 106, by observing the image shown on the photoreceptor 106, the distance between the substrates can also be adjusted.

In the above description, although the markers 101 and 103 whose bottom surfaces are inclined are used to position the substrates in the horizontal and vertical directions, it is conceivable to use a marker 101 whose bottom surface 102 has a different structure.

14(a) and 15(a) show several examples of element configurations used in the case where the bottom surface 102 has a marker 101 having a lens structure. As shown in FIG. 14(a), the light source 111 is a diffuse light source, and is placed under the waveguide substrate 1 at a predetermined distance. The light receiver 106 is located above the lens substrate 3 . In the waveguide substrate 1, a concave mark 101 is set, and when viewed from below, the bottom surface 102 of its lens structure is concave, and in the lens substrate 3, a concave mark 101 is set, and when viewed from below, the bottom surface 102 of the lens structure is concave. , the bottom surface 102 of the lens structure is convex. Here, the concave mirror formed on the bottom surface 102 inside the waveguide substrate 1 has a lens structure and a refractive index to refract the diffuse light emitted from the light source 111 at a predetermined distance from the waveguide substrate 1 into parallel light.

The lens structure like a convex mirror and the refractive index of the bottom surface 102 formed in the lens substrate 103 are to gather the parallel light incident on the bottom surface 102 of the lens substrate 3 on the light receiver 106 above the lens substrate 3 Lens structure and refractive index. The position of the substrate mark 101 is the same along the x and y directions, that is, a predetermined position. In this configuration, when the light source 11 emits light, the light passes through the marks 101 of the waveguide substrate 1 and the marks 101 of the lens substrate 3 and is collected on the light receiver 106. At this time, the image obtained from the light receiver 106 is shown in FIG. 14(b ), that is, on the light receiver 106, the image 112 formed is the image of the mark 101 itself, and the image 113 gathered by the bottom surface 102 with the lens structure is formed inside the image 112. As described above, adjusting the waveguide substrate 1 or the lens substrate 3 in the horizontal direction so that the image 113 is formed inside the image 112 can position the waveguide substrate 1 and the lens substrate 3 in the horizontal direction.

Adjust the distance between the waveguide substrate 1 and the lens substrate 3, so that the outer diameter of the image 113 on the light receiver 106 is a predetermined value (that is, most of the light emitted by the light source 111 is gathered on the light receiver 106), and the waveguide can be adjusted (vertically positioned) The distance between substrate 1 and lens substrate 3. In FIG. 14(b), although two images 112 and 113 are placed side by side, these images are formed when another mark 101 of the same type is provided side by side on the substrate. Markers 101 are provided one by one on each substrate, as shown in Fig. 14(a).

FIG. 15(a) shows a modification of the structure of FIG. 14(a). At this time, the bottom surface 102 of the mark 101 formed in the waveguide substrate 1 has a convex lens structure viewed from below. Formed on the bottom surface 102 of the waveguide substrate 1 and the lens structure and refractive index as a convex mirror formed on the bottom surface 102 of the lens substrate 3, using the bottom surface 102 of the waveguide substrate 1 and the lens substrate 3, the light source 111 The emitted light is collected on the light receiver 106 above the lens substrate 3 . On the photoreceiver 106, images 114 and 115 are formed as in Fig. 15(b), and the waveguide substrate 1 and the lens substrate 3 are positioned in the horizontal and vertical directions as in the above case.

Although FIGS. 14(a), 14(b), 15(a) and 15(b) have been described with reference to the example in which the concave mark 101 is applied, the above-mentioned situation is applicable to the application of the convex mark 101 as shown in FIG. 11(f). Case.

16(a) and 16(b) show the case where the bottom surface 102 of the mark 101 is a scattering surface (see FIG. 11(b)). At this time, as shown in FIG. 16(a), the light receiver 106 and the light source 105 are placed under the waveguide substrate 1 to be adjacent to each other. In this configuration, when the light source 105 emits parallel light, the light is scattered at the scattering surface of the bottom surface 102 of the mark 101 , and part of the scattered light reaches the light receiver 106 under the waveguide substrate 1 . FIG. 16( b ) shows the image light received by the light receiver 106 . In the figure, an image 120 corresponds to the mark 101 formed in the lens substrate 3 , and an image 121 corresponds to the mark 101 formed in the waveguide substrate 1 . By adjusting the distance between the images 120 and 121 by a predetermined interval a, the substrates can be positioned in the horizontal direction.

17( a ) to ( d ) show the case where the bottom surface 102 of the mark 101 is an oblique scattering surface. At this time, as shown in FIG. 17( a ), the light receiver 106 is placed under the waveguide substrate 1 or above the lens substrate on the side of the waveguide substrate 1 and the lens substrate 3 . In this configuration, the horizontal or vertical positions of the substrates are adjusted using light from the light source 105 below the waveguide substrate 1 .

For example, placing the light receiver 106 above the lens substrate 3 and on the side of the waveguide substrate 1 and the lens substrate 3 can simultaneously position the substrate along the horizontal and vertical directions, as in the case of Fig. 12(a)-(c) . Furthermore, placing the light receiver 106 under the waveguide substrate 1 and on the side of the waveguide substrate 1 and the lens substrate 3 can also position the substrate along the horizontal and vertical directions at the same time. 17( b ) shows images shown by the light receiver 106 above the lens substrate 3 , the image 122 corresponds to the mark 101 formed in the lens substrate 3 , and the image 123 corresponds to the mark 101 formed in the waveguide substrate 1 . Fig. 17 (c) shows the image shown by the light receiver 106 on one side of the lens substrate 3 and the waveguide substrate 1, the image 124 corresponds to the mark 101 formed in the lens substrate 3, and the image 125 corresponds to the mark 101 formed on the waveguide substrate. Mark 101 within 1. 17( d ) shows the image shown by the light receiver 106 under the waveguide substrate 1 , the image 126 corresponds to the mark 101 formed in the lens substrate 3 , and the image 127 corresponds to the mark 101 formed in the waveguide substrate 1 .

As described above, when the bottom surface of the mark 101 is an oblique scattering surface, since the light receiver 106 can be arranged in three directions relative to the substrate, the positioning method has flexibility. For example, it can also be positioned when the laminated substrate does not transmit light, as will be described later. By adjusting and observing the photoreceptors 106 arranged in three directions, more precise positioning is possible.

Also, consider the case where the bottom surface 102 of the mark 101 is a slanted lens surface. At this time, as shown in FIGS. 18( a ) and 18 ( b ), the photoreceiver 106 is disposed away from the optical axis of the light source 105 .

In addition, the case where the bottom surface 102 of the mark 101 is a lens surface with a scattering surface is investigated.

In the above description, the marks 101 formed in the substrate are a combination of marks 101 of the same type, but a combination of marks 101 of different types can also be used to achieve positioning. For example, when positioning is performed, a mark 101 whose bottom surface 102 is inclined may be formed in one substrate, and a mark 101 whose bottom surface 102 has a scattering surface may be formed in another substrate. Furthermore, when positioning is performed, the mark 101 whose bottom surface 102 is inclined can be formed in one substrate, and the mark 101 whose bottom surface 102 has a lens surface can be formed in another substrate. In addition, when positioning is performed, the mark 101 whose bottom surface 102 has a scanning surface may be formed in one substrate, and the mark 101 whose bottom surface 102 has a lens surface may be formed in another substrate. When combining indicia 101 with a lensed surface, the light emitted by light source 105 does not have to be strictly parallel.

In the above description, the substrate positioning method is described as the case of positioning the waveguide substrate 1 and the lens substrate 3, but this method can also be used in the case of positioning other substrates (ie, the planar substrate of the present invention).

In the above description, the light from below the substrate is used for positioning, but the application of light from above the substrate is also studied. For example, as shown in FIG. 1, in the state where the waveguide substrate 1, the lens substrate 3, the spacer substrate 8, and the lens substrate 10 are stacked, the waveguide substrate 12 is also laminated on the lens substrate 10 and aligned. The lens substrate 10 is positioned with the waveguide substrate 11 , the light source 105 and the light receiver 106 are placed above the waveguide substrate 11 , and the light receiver 106 is located at the side of the lens substrate 10 and the waveguide substrate 11 . At this time, the marker 101 whose bottom surface 102 is an oblique scattering surface is used. When light from above the waveguide substrate 11 is applied to the portion without the mark 101, the light is reflected by the isolator substrate 11, and at the portion with the mark 101, the light is reflected sideways. Thus, on the photoreceptor 106 above the waveguide substrate 11, an image similar to FIG. 12(b) is projected. On the photoreceptor 106 on one side of the waveguide substrate 11, an image similar to FIG. 12(c) is projected, so that the substrate can be positioned in the horizontal and vertical directions simultaneously by utilizing the light from above the substrate.

second embodiment

A second embodiment of the present invention will be described below with reference to FIG. 3 .

In the three-dimensional optical waveguide of FIG. 3 , the waveguide substrate 31 has two waveguides 22 and 32 , and the waveguide 32 is located on the far side of the plane of FIG. 3 and parallel to the waveguide 22 . The waveguide 22 has a reflective surface 313 at its end and the waveguide 32 has a reflective surface 333 at its end. The lens 34 of the lens substrate 33 corresponds to the reflective surface 313 , and the lens 304 corresponds to the reflective surface 333 .

Above the isolator substrate 8, the laminated lens substrate 30 has a lens 29 corresponding to the lens 34. Above the lens substrate 30, the laminated waveguide substrate 31 has a waveguide 312 and a reflector corresponding to the lens 29 at one end of the waveguide 312. Surface 314. Above the waveguide substrate 31, a lens substrate 300 having a lens 209 corresponding to the lens 304 is laminated, and above the lens substrate 300, the laminated waveguide substrate 301 has a waveguide 302 and a lens corresponding to the lens 209 at one end of the waveguide 302. reflective surface 324 .

In the figure, the reflective surfaces 313 and 333 are inclined at 45°, like the reflective surface 13 of the first embodiment. Both reflective surfaces 314 and 324 are inclined at 45°, like the reflective surface 14 of the first embodiment. Like the first embodiment, the horizontal positions of the reflective surface 314, the lenses 34 and 29, and the reflective surface 314 are all aligned in the vertical direction, while the horizontal positions of the reflective surface 33, the lenses 304 and 209, and the reflective surface 324 are aligned in the vertical direction. .

Among them, the positioning of the waveguide substrate 31 and the lens substrate 33, the positioning of the lens substrates 33 and 30, the positioning of the lens substrate 30 and the waveguide substrate 31, the positioning of the waveguide substrate 31 and the lens substrate 300, the lens substrate 300 and the positioning of the waveguide substrate 301 are similar to the first embodiment (also applicable to the following embodiments).

The above three-dimensional optical waveguide is constructed to guide the light guided into the waveguides 22 and 32 of the waveguide substrate 31 to the waveguides 312 and 302, respectively, by means similar to the first embodiment. As described above, laminating the planar substrates of the present invention and forming two waveguides three-dimensionally provides an inexpensive and high-performance three-dimensional optical waveguide that does not require complicated adjustments.

In the second embodiment, the lens substrate 30 is positioned between the isolator substrate 8 and the waveguide substrate 31, and the lens substrate 300 is positioned between the waveguide substrates 31 and 301, when the reflective surface 313 can be reflected only by the lens 44 The light collected on the reflective surface 314, and as shown in Figure 4, when only the light reflected by the reflective surface 333 is collected on the reflective surface 324 by the lens 404, the lens substrates 30 and 300 are not needed, and the effect Same as above.

In the second embodiment, the waveguide 32 is located on the far side from the plane of FIG. 3 and is parallel to the waveguide 22 , but the arrangement of the waveguides 22 and 32 is not limited thereto. As long as the waveguides 22 and 32 are placed separately on the same waveguide substrate 31, and the light guided therein is guided to other waveguides 312 and 302 respectively, any arrangement can obtain the same effect as above.

The waveguides 22 and 32 do not necessarily appear on the same waveguide substrate 31, but may appear on different laminated waveguide substrates, while the waveguides 312 and 302 do not necessarily appear on the waveguide substrates 31 and 301, but may appear on the same waveguide substrate, Now the effect is the same as above.

third embodiment

Fig. 5 shows a three-dimensional optical waveguide structure of a third embodiment of the present invention.

In this three-dimensional optical waveguide of the present invention, the surface-emitting laser (VCSEL) 59 placed above the isolator substrate 8 is the light-emitting element of the present invention, and the horizontal positions of the reflective surface 513, the lens 54, and the surface-emitting laser 59 are set so that Align vertically. Wherein, the component structure composed of the waveguide substrate 51 , the lens substrate 53 and the isolator substrate 8 is similar to that of the first embodiment, so it will not be described again.

According to the above structure, the laser beam emitted from the surface emitting laser 59 is guided to the waveguide 52 of the waveguide substrate 51 through the isolator substrate 8 and the lens 54 . In this way, an inexpensive and high-performance three-dimensional optical waveguide that does not require complex adjustments can be provided.

In the third embodiment, although there is the isolator substrate 8 between the lens substrate 53 and the surface-emitting laser 59, the isolator substrate 8 is not necessarily required, and the effect is the same as above.

The above description refers to an example of placing the surface-emitting laser 59 above the isolator substrate 8. As shown in FIG. The three-dimensional optical waveguide in FIG. 6 includes a waveguide substrate 61 with a waveguide 62 , a lens substrate 63 with a lens 64 and a surface mount photodiode 69 . The structures of the waveguide substrate 61 and the lens substrate 63 are similar to those described above and will not be described again. In the structure of FIG. 6 , the isolator substrate 8 may be laminated between the lens substrate 63 and the surface mount photodiode 69 .

Fourth embodiment

Fig. 7 shows a three-dimensional optical waveguide structure of a fourth embodiment of the present invention.

In the three-dimensional optical waveguide of the fourth embodiment, a waveguide substrate 71 has a waveguide 72 and a waveguide 702 opposite thereto. A reflective surface 713 is formed at one end of the waveguide 72, and a reflective surface 733 is formed at one end of the waveguide 702, wherein the two reflective surfaces face each other and are each inclined at 22.5° from the horizontal plane along a direction forming a trapezoidal slope. On the lens substrate 73 laminated above the waveguide substrate 71, the lenses 74 and 704 are integrally formed with the lens substrate 73 and adjacent to each other.

A wavelength division multiplexing filter 76 is laminated above the lens substrate 73, which is a planar substrate having a filter layer of the present invention, and a lens substrate 70 with a lens 79 is laminated thereon. Above the lens substrate 70, a laminated waveguide substrate 711 has a waveguide 712 and a reflective surface 714 formed at one end of the waveguide 712, wherein the reflective surface 714 is inclined at 22.5° from the horizontal plane. Viewed from the reflective surface 713, the lenses 74 and 79 and the reflective surface 714 are aligned at an angle of 45° to the upper left from the horizontal plane. When viewed from the reflective surface 733, the lens 704 is inclined at 45° from the horizontal direction in a direction inclined to the upper right.

The operation of the above three-dimensional optical waveguide structure is described below.

Light propagating leftward in the horizontal direction through waveguide 72 is reflected by surface 713 at 45° along the direction of horizontal propagation. Reflects upwards and passes through lens 74. Part of the light passing through the lens 74 passes through the wavelength division multiplexing filter 76 (that is, is separated by the wavelength division multiplexing filter), reaches the reflective surface 714 through the lens 79, is reflected in the horizontal direction, and propagates through the waveguide 712 to the left. The light comprising the remaining wavelength components separated by the wavelength division multiplexing filter 76 is reflected to the left side of the cross-section of the lens substrate 73 and the wavelength division multiplexing filter 76 along the downwardly inclined direction and the horizontal direction at 45°, and Reflected by the reflective surface 733 through the lens 704, it propagates through the waveguide 702 in a horizontal direction to the left.

As described above, according to the three-dimensional optical waveguide of this example, after the light incident on the waveguide 72 is separated between the light propagating through the waveguide 712 and the light propagating through the waveguide 702, wavelength components can be extracted.

In this example, when the lens 74 is sufficient to concentrate the light on the reflective surface 714, the lens substrate 70 is not required, and the same effect as above can be obtained.

Fig. 8 shows the modification of this example. In the modification, the surface mount photodiode 89 is provided above the lens substrate 70, and the waveguide substrate 711 is not laminated. Therefore, for the light of the incident waveguide 72, only the light whose wavelength component is separated by the wavelength division multiplexing filter 76 is guided into the surface mount photodiode 89, and the light whose wavelength component is not separated by the wavelength division multiplexing filter 76 is guided into another A waveguide 702.

When forming the three-dimensional optical waveguide of this example, the light from above the three-dimensional optical waveguide can be used to position the substrate as required. For example, in the case where the waveguide substrate 711 is positioned under the condition that the waveguide substrate 71, the lens substrate 73, the wavelength division multiplexing filter 76, and the lens substrate 70 are laminated as shown in FIG. 7, when the light emitted by the light source 105 When the wavelength does not pass through the wavelength division multiplexing filter 76, the light source 105 is placed above the waveguide substrate 711, and the light from above is used to position the waveguide substrate 711 in a manner similar to that of the first embodiment.

fifth embodiment

Fig. 9 shows a three-dimensional optical waveguide structure of a fifth embodiment of the present invention.

The three-dimensional optical waveguide of this example has a three-dimensional optical waveguide on the left side, wherein a lens substrate 900 with lenses 919 is stacked above the three-dimensional optical waveguide shown in the third embodiment (Fig. The three-dimensional optical waveguide shown (Fig. 8). The left and right sides of the lens substrate 900 have different thicknesses. In this example, the right side of the three-dimensional optical waveguide is thicker than the left side, and the thickness is the sum of the thicknesses of the Faraday rotator 96 and the polarizer 97 . Furthermore, the wavelength division multiplexing filter 906 is designed to reflect the wavelength of light emitted by the surface emitting laser 99 and emit the wavelength of light incident from the waveguide 92 . Other components are similar to those of the third and fourth embodiments, and will not be described again.

In the three-dimensional optical waveguide of this structure, the light propagating to the left through the waveguide 92 is reflected upward by the reflective surface 913 at an angle of 45° to the horizontal propagation direction, and reaches the surface through the lens 94, the wavelength division multiplexing filter 906 and the lens 909 Photodiodes 999 are installed. The light emitted by the surface-emitting laser 99 passes downward through the lens 919, the isolator substrate 98 and the lens 914, is reflected by the reflective surface 943 toward the right in the horizontal direction, and is reflected upward by the reflective surface 933 in a direction 45° from the propagation direction. . The light reflected by the reflective surface 933 passes through the lens 904 , is reflected toward the right side of the cross-section between the wavelength division multiplexing filter 906 and the lens substrate 93 along the downward oblique direction at 45°, and passes through the lens 94 to reach the reflective surface 913 . The light reflected by the reflective surface 913 toward the right in the horizontal direction propagates through the waveguide 92 to the right.

As described above, according to this example, there is provided an inexpensive and high-performance three-dimensional optical waveguide that does not require complicated adjustments despite its complicated structure.

Sixth embodiment

Fig. 10 shows the structure of a sixth embodiment of the present invention.

The structure on the right side of the three-dimensional optical waveguide shown in FIG. 10 is similar to the three-dimensional optical waveguide structure ( FIG. 3 ) of the second embodiment, and will not be described again. The structure on the left side of the three-dimensional optical waveguide shown in Figure 10 is obtained after vertically and horizontally inverting the three-dimensional optical waveguide structure (Figure 7) in the fourth embodiment, wherein the wavelength division multiplexing filter 1316 provided is the present invention An example of a wavelength division multiplexing filter that emits light of wavelength λ1 but not light of wavelength λ2.

In the three-dimensional optical waveguide with this structure, when the lights of different wavelengths λ1 and λ2 are respectively introduced into the waveguides 1322 and 1332, the light of the wavelength λ1 introduced into the waveguide 1322 passes through the reflective surface 1313, the lens 1334, the isolator substrate 1308, and the lens 1324 , reflective surface 1363 and waveguide 1342 to reflective surface 1373 . The light reflected by the reflective surface 1373 passes through the lens 1344 , the WDM filter 1316 and the lens 1364 , and is reflected by the reflective surface 1393 to reach the waveguide 1362 .

Light of wavelength λ2 introduced into waveguide 1332 passes through reflective surface 1333 , lens 1304 , isolator substrate 1308 , lens 1314 , and reflective surface 1353 to reach reflective surface 1383 . The light reflected by the reflective surface 1383 enters the wavelength division multiplexing filter 1316 obliquely from the upper right through the lens 1354 . Since the wavelength division multiplexing filter 1316 does not emit light of wavelength λ2, the light incident obliquely from its upper right is reflected at the interface between the filter 1316 and the lens substrate 1350, propagates obliquely upward toward the left, and passes through the lens 1364 and the lens substrate 1350. Reflective surface 1393 leads into waveguide 1362 .

As described above, when light with wavelengths λ1 and λ2 is introduced into waveguides 1322 and 1332 , light with wavelength components λ1 and λ2 is output from waveguide 1362 . As described above, according to this example, there is provided an inexpensive and high-performance three-dimensional optical waveguide that does not require complicated adjustments although its structure is complicated.

Seventh embodiment

An optical transceiver module can be constructed by using the three-dimensional optical waveguide of any of the above embodiments. Fig. 19 is an example of the structure of such an optical transmitter module. As shown in Figure 19, a laser diode 1109 is connected to the electrical input terminal 1105, the electrical input terminal 1105 is an example of the electrical input terminal of the present invention, and the laser diode 1109 is an example of the light emitting element of the present invention. Laser diode 1109 is connected to waveguide 1102 which is connected to waveguide 1112 via isolator 1108 . The waveguide 1112 is connected to the optical output 1107, which is an example of the optical output of the present invention. Such an optical transmitter module can be constructed by using the three-dimensional optical waveguide shown in FIG. 1 (an example of the three-dimensional optical waveguide of the present invention). At this time, the waveguide 1102 in FIG. 19 corresponds to the waveguide 2 in FIG. 1 , and a laser diode 1109 (an edge-emitting laser) is connected to one end of it. The waveguide 1112 in FIG. 19 corresponds to the waveguide 12 in FIG. 1, and at one end thereof, for example, a V-groove 1042 shown in FIG. 25 is provided as an optical output end 1107, and an optical cable (not shown) is fixed.

In this way, an optical output can be output from the output terminal 1107 according to an electrical signal input to the electrical input terminal 1105, thereby providing an inexpensive optical transmitter module that does not require complicated adjustments.

Instead of the three-dimensional optical waveguide of FIG. 1, the three-dimensional optical waveguide of FIG. 2 can be used, and the three-dimensional optical waveguide of FIG. 3 or FIG. 4 can also be applied. At this time, the two waveguides 22 and 32 correspond to the waveguide 1102 , and the two waveguides 312 and 302 correspond to the waveguide 1112 . One end of each waveguide 22 and 32 is provided with a laser diode 1109 . One end of each waveguide 312 and 302 is connected to the optical output end 1107 , and the light emitted by each laser diode 1109 is output from the optical output end 1107 . Moreover, the three-dimensional optical waveguide of FIG. 5 can be used, in which case the waveguide 1102 can be omitted, and the surface emitting laser 59 can be used as the laser diode 1109 .

In addition, FIG. 20 shows an example of wavelength division multiplexing optical transmitter module structure, and its two laser diodes 1119 and 1129 have electrical input terminals 1105 respectively. Laser diodes 1119 and 1129 are respectively connected to waveguides 1132 and 1142, and these two waveguides are respectively connected to waveguides 1152 and 1162 through an isolator 1118, and the latter two waveguides are connected to optical output terminal 1107 through a wavelength division multiplexing filter 1106.

For example, the three-dimensional optical waveguide structure in Figure 10 can be used to form this wavelength division multiplexing optical transmitter module. At this time, the laser diode 1119 that outputs light with a wavelength of λ1 is placed at one end of the waveguide 1322, and the laser diode 1129 that outputs light with a wavelength of λ2 is placed at one end of the waveguide 1322. At one end of the waveguide 1332 , the output terminal 1107 is placed at one end of the waveguide 1362 .

In this way, the electrical signals input from the two laser diodes 1119 and 1129 are combined with each other to output an optical signal.

Eighth embodiment

Fig. 21 shows an example of the structure of an optical receiver module. As shown in Figure 21, the optical input end 1117 (as the V-groove in Figure 25) as an example of the present invention is placed at one end of the waveguide 1122, and the photodiode 1209 as an example of the light receiving element of the present invention is connected to the waveguide 1122. The photodiode 1209 is connected to the electrical output terminal 1115, which is an example of the electrical output terminal of the present invention. For example, such an optical receiver module can be constructed by using the three-dimensional optical waveguide shown in FIG. 6 (an example of a three-dimensional optical waveguide). According to the optical receiver module having such a structure, an electrical output can be obtained from the electrical output terminal 1115 based on an optical signal input from the optical input terminal 1117 .

Fig. 22 shows an example of the structure of a wavelength division multiplexing optical receiver module. In this structure example, the optical input terminal 1117 is connected to the wavelength division multiplexing filter 1116, the waveguides 1172 and 1182 are connected to the wavelength division multiplexing filter 1116, and the photodiodes 1219 and 1229 are respectively connected to the waveguides 1172 and 118.

For example, using the three-dimensional optical waveguide of FIG. 7, such a wavelength division multiplexing optical receiver module can be constructed. At this time, the optical input terminal 1117 is connected to one end of the waveguide 72, and the photodiodes 1219 and 1229 are respectively connected to the ends of the waveguides 712 and 702. The wavelength division multiplexing filter 76 is set to emit light of wavelength λ1 and not light of wavelength λ2.

In the wavelength division multiplexing optical receiver module with this structure, when the light of wavelength λ1 and λ2 is introduced into the waveguide 71, the light of wavelength λ1 reaches the photodiode 1219 through the waveguide 712, and the light of wavelength λ2 reaches the photodiode 1229 through the waveguide 702, according to Thus, the electrical output from electrical output 1115 connected to each photodiode 1219 and 1229, ie the optical signal input by one optical input 1117, can be obtained from each electrical output 1115 as two separate electrical signals.

The above-mentioned optical transmitter module and optical receiver module can be used as an optical transmission system for sending and receiving through an optical cable.

Ninth embodiment

FIG. 23 shows an example of the structure of a wavelength division multiplexing optical transceiver module, which has two functions of optical transmission and reception. In the structure of FIG. 23 , a laser diode 1139 having an electrical input terminal 1105 and emitting light with a wavelength of λ1 passes through a waveguide 1192, an isolator 1128 and a waveguide 1212 as an example of the isolator of the present invention, and then a wavelength division multiplexing filter 1126 (the present invention) An example of a wavelength division multiplexing filter invented). It has an electrical output terminal 1115 and receives a wavelength λ2 photodiode 1239, and is connected to a wavelength division multiplexing filter 1126 through a waveguide 1202. The wavelength division multiplexing filter 1126 is connected to the optical input and output terminals 1127 (such as the V-groove in FIG. 25 ), which is an example of the optical input and output terminals of the present invention.

For example, the three-dimensional optical waveguide shown in FIG. 9 can be used to form such a wavelength division multiplexing optical transceiver module. At this time, the optical input and output terminals 1127 are placed at one end of the waveguide 92 . The wavelength division multiplexing filter 906 is configured not to emit the light of the wavelength λ1 emitted by the surface laser 99 , but to emit the light of the wavelength λ2 input to the optical input and output port 1127 .

According to this structure, the light of wavelength λ1 emitted by the surface emitting laser 99 is reflected at the interface between the wavelength division multiplexing filter 906 and the lens substrate 93 , and is output from the optical input and output port 1127 through the waveguide 92 . The wavelength λ2 light input to the optical input and output port 1127 passes through the wavelength division multiplexing filter 906 and reaches the surface mount photodiode 999 . According to this wavelength division multiplexing optical transceiver module, only one optical input and output terminal 1127 is used to transmit and receive light.

FIG. 24 shows an example of optical transmission equipment using such a wavelength division multiplexing optical transceiver module. In FIG. 24, a laser diode 1149 is connected to a laser diode driver IC 1104, which is connected to an electrical signal input terminal 1125 for inputting a plurality of signals. Laser diode driver IC1104 controls the bias current applied to the laser diode and superimposes digital signals.

On the other hand, the photodiode 1249 is connected to the receiving front-end IC 1114, and the receiving front-end IC 1114 is connected to the demultiplexer 1113, and the latter is connected to the receiving signal output terminal 1135 for outputting multiple signals. The receiving front-end IC1114 amplifies the weak signal output by the photodiode 1249 with low noise.

In FIG. 24, the laser diode 1149 and the elements disposed to the right of the photodiode 1249 are as described above. Using this optical transmission device, a plurality of electrical signals can be transmitted on an optical cable through an optical input and output.

By connecting the above-mentioned multiple optical modules for sending and receiving through optical cables, it can be used as an optical transmission system for sending and receiving. At this time, for example, by setting one optical transceiver module to transmit at wavelength λ1 and receive at wavelength λ2, and another optical transceiver module to transmit at wavelength λ2 and receive at wavelength λ1, the paired two optical transceiver modules can be used as optical A pair of transceiver modules for the transmission system.

In the above description, up, down, left, and right are fixed as shown in the figure, as long as the same effect can be obtained, the fixing method can be different.

In the above description, the light from the horizontal direction travels vertically or at an angle of 45°, but these are just examples. Light can propagate at any angle relative to the laminated substrate, at which point the angle of the reflective surface and the configuration of the lens and reflective surface can be set so that the light propagates in this manner.

In the above embodiments, the substrates are formed of formed glass, but the present invention is not limited thereto, and they may be formed of resin or the like. For example, the marks 101 and 103 can be formed simultaneously with the waveguide on the silicon substrate by dry etching, and the effect is the same as above.

In the above embodiments, in addition to or instead of the lens layer, the isolator layer and the filter layer, the planar substrate without waveguides is a sheet optical element. Examples of such sheet optical elements include sheet attenuators that attenuate optical power.

The effect of the invention

The present invention can provide an inexpensive three-dimensional optical waveguide that does not require complex adjustments.

Also, when a planar waveguide and a lens layer, a spacer layer, or a filter layer are integrally formed on forming glass, an inexpensive three-dimensional optical waveguide that does not require complicated adjustments can be provided.

Furthermore, when the planar substrate has a lens layer, spacer layer or filter layer, a high-performance three-dimensional optical waveguide can be provided.

In addition, according to the method of manufacturing a three-dimensional optical waveguide of the present invention, it is possible to provide a precise and inexpensive three-dimensional optical waveguide that does not require complicated adjustments.

Also, according to the optical module having the three-dimensional optical waveguide of the present invention, an inexpensive optical module that does not require complicated adjustment can be provided.

Claims (5)

1. A three-dimensional optical waveguide, characterized in that, comprising: A stack consisting of at least a first planar substrate having a planar optical waveguide and a second planar substrate having one of a lens layer, an isolator layer and a filter layer, Wherein the first planar substrate is a substrate in which planar optical waveguides are integrally formed on forming glass, The second planar substrate is a substrate in which one of said lens layer, spacer layer and filter layer is integrally formed on forming glass, indicia having a concave or convex shape and optically transparent properties are formed together with the forming glass on both the first and second planar substrates, and A reflective surface is formed on the planar optical waveguide while light passes through one of the lens layer, isolator layer and filter layer. 2. The three-dimensional optical waveguide according to claim 1, further comprising at least one of a light receiving element and a light emitting element. 3. The three-dimensional optical waveguide according to claim 1, wherein the first and second planar substrates are positioned relative to each other using marks formed on connecting surfaces of both the first and second planar substrates. 4. An optical transmitter module and a receiver module, characterized in that it comprises: electrical input terminal; The three-dimensional optical waveguide of claim 1; A light-emitting element connected to an electrical input terminal and a three-dimensional optical waveguide; The light-receiving element connected to the three-dimensional optical waveguide; an electrical output terminal connected to the light-receiving element; and Optical input and output terminals connected to the three-dimensional optical waveguide, The electrical signal input from the electrical input terminal is converted into an optical signal and sent to the optical input and output terminal, and the optical signal received by the optical input and output terminal is converted into an electrical signal and output to the electrical output terminal. 5. An optical transmission system for optical transceiver, characterized in that it comprises: The optical transmitter module and receiver module of claim 4; and Fiber optic cable connecting the optical transmitter module and receiver module.

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