CN1320400C - Digital optical switch in low cross talk - Google Patents
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Abstract
本发明公开了一种低串扰数字光开关。由一个Y分叉波导数字光开关和分别与Y分叉波导数字光开关两端相连的S弯曲波导型可变光衰减器集成构成。利用材料的负折射率效应,在不增加器件长度和复杂结构的前提下,大大提高开关光的开关特性。并可扩大Y分叉的角度,同时对Y分叉区域进行结构修正,降低了工艺难度。根据BPM法(光束传输法)模拟分析,本发明的数字光开关具有低串扰、插入损耗小,偏振相关性小,波谱平坦性好,易于集成等优点。
The invention discloses a low crosstalk digital optical switch. It is composed of a Y-branched waveguide digital optical switch and S-curved waveguide variable optical attenuators respectively connected to both ends of the Y-branched waveguide digital optical switch. Using the negative refractive index effect of the material, the switching characteristics of the switching light are greatly improved without increasing the length of the device and the complex structure. In addition, the angle of the Y bifurcation can be expanded, and the structure of the Y bifurcation area can be modified at the same time, which reduces the difficulty of the process. According to the BPM method (beam transmission method) simulation analysis, the digital optical switch of the present invention has the advantages of low crosstalk, small insertion loss, small polarization correlation, good wave spectrum flatness, easy integration and the like.
Description
技术领域technical field
本发明涉及一种光学元器件,特别是涉及一种低串扰数字光开关。The invention relates to an optical component, in particular to a digital optical switch with low crosstalk.
背景技术Background technique
随着光纤通信技术和密集波分复用(DWDM)系统的飞速发展,数字光开关(DOS)作为重要的光波导器件,得到了越来越广泛的应用。常见的光开关有马赫一增德尔(Mach-Zehnder)干涉仪型、方向耦合器型、X结型、Y分叉型等,其中Y分叉型数字光开关更为人们关注,然而通常Y分叉角度设计的非常小,一般控制在在0.05°至0.15°之间,这给波导制作增加了工艺难度。因此人们不断从开关的结构入手,设计出具有某些优良性能参数的开关器件,如采用与可变光衰减器(VOA)集成为一种有效的方法,可大大提高开关的消光比。With the rapid development of optical fiber communication technology and dense wavelength division multiplexing (DWDM) system, digital optical switch (DOS), as an important optical waveguide device, has been used more and more widely. Common optical switches include Mach-Zehnder interferometer type, directional coupler type, X junction type, Y bifurcated type, etc. Among them, Y bifurcated digital optical switches are more concerned by people, but usually Y bifurcated The fork angle is designed to be very small, generally controlled between 0.05° and 0.15°, which increases the difficulty of the waveguide manufacturing process. Therefore, people continue to design switching devices with some excellent performance parameters starting from the structure of the switch, such as integrating with a variable optical attenuator (VOA) as an effective method, which can greatly improve the extinction ratio of the switch.
普通Y分叉型1×2DOS的输出波导末端一般有一段S型弯曲的过渡波导,将输出光引出并便于同标准光纤阵列耦合。根据弯曲波导理论,波导弯曲区域的切面上折射率不是成阶跃型,而可以等效为向外倾斜的分布,当距离向外侧增大时,包层的折射率不断增加,甚至比核芯区的更大,电磁场分布也会向折射率增大的方向平移,所以产生辐射损耗。另外,常规的Y分叉数字型光开关,由于是利用模式耦合分离的原理来实现开关功能,从而分叉角α需要非常小,一般在0.05°至0.15°之间,因此该分叉波导制作工艺难度大。The end of the output waveguide of the common Y-branch type 1×2DOS generally has an S-curved transitional waveguide, which leads the output light out and facilitates coupling with the standard optical fiber array. According to the curved waveguide theory, the refractive index on the tangent surface of the waveguide bending area is not a step type, but can be equivalent to an outwardly inclined distribution. When the distance increases to the outside, the refractive index of the cladding increases continuously, even higher than that of the core. The larger the area, the electromagnetic field distribution will also translate to the direction of the increase of the refractive index, so radiation loss will occur. In addition, the conventional Y-branch digital optical switch uses the principle of mode coupling separation to realize the switching function, so the bifurcation angle α needs to be very small, generally between 0.05° and 0.15°, so the bifurcated waveguide fabrication The process is difficult.
发明内容Contents of the invention
根据弯曲波导易产生辐射损耗,并利用材料的负折射率效应可制作成弯曲型光可变衰减器的特点,本发明的目的是提供一种低串扰数字光开关。直接利用Y分叉DOS型开关输出波导的S形弯曲过渡波导,并将其弯曲波导设计成S形弯曲波导可变光衰减器(VOA),形成与该Y分叉1×2DOS的集成。According to the characteristics that the curved waveguide is easy to produce radiation loss and can be made into a curved optical variable attenuator by using the negative refractive index effect of the material, the purpose of the present invention is to provide a digital optical switch with low crosstalk. Directly use the S-shaped bend transition waveguide of the Y-branch DOS switch output waveguide, and design its curved waveguide into an S-shaped bend waveguide variable optical attenuator (VOA), forming an integration with the Y-branch 1×2DOS.
为了达到上述目的,本发明采用的技术方案是:由一个Y分叉波导数字光开关和分别与一个Y分叉波导数字光开关两端相连的、由有机聚合物材料制成的S弯曲波导型可变光衰减器集成构成,S弯曲波导型可变光衰减器部分的电极分别位于S形弯曲的曲率半径小的一侧。In order to achieve the above-mentioned purpose, the technical scheme adopted by the present invention is: a Y-branched waveguide digital optical switch and an S-curved waveguide made of organic polymer material respectively connected to the two ends of a Y-branched waveguide digital optical switch The variable optical attenuator is integrated, and the electrodes of the S-bend waveguide type variable optical attenuator are respectively located on the side of the S-shaped bend with a smaller curvature radius.
S弯曲波导型可变光衰减器依次由连接波导经锥形过渡波导、S弯曲波导、另一锥形过渡波导与另一连接波导连接,在S弯曲波导边缘一侧的电极边缘距S形弯曲波导边缘距离为±1微米,两侧的S弯曲波导型可变光衰减器部分的电极分别同Y分叉波导数字光开关部分电极相串联。The S-curved waveguide type variable optical attenuator is sequentially connected by a connecting waveguide through a tapered transition waveguide, an S-curved waveguide, another tapered transition waveguide and another connecting waveguide. The edge distance of the waveguide is ±1 micron, and the electrodes of the S-curved waveguide variable optical attenuator on both sides are respectively connected in series with the electrodes of the Y-branched waveguide digital optical switch.
Y分叉波导数字光开关的分叉角α在0.3-1.0°,并在分叉处填去分叉角填充部分,其顶部宽度d为1.5-2μm。The bifurcation angle α of the Y bifurcated waveguide digital optical switch is 0.3-1.0°, and the filling part of the bifurcation angle is filled at the bifurcation, and the top width d thereof is 1.5-2 μm.
本发明与背景技术相比具有的有益的效果是:The beneficial effect that the present invention has compared with background technology is:
本发明在不增加器件长度和复杂结构的前提下,大大提高开关光的串扰特性。并可扩大Y分叉的角度,同时采用过对分叉区域进行结构修正,降低了工艺难度。根据BPM法(光束传输法)模拟分析,这种新型的数字光开关具有低串扰、插入损耗小,偏振相关性小,波谱平坦性好,易于集成等优点。The invention greatly improves the crosstalk characteristic of the switching light without increasing the device length and complex structure. And the angle of the Y bifurcation can be expanded, and at the same time, the structural modification of the bifurcation area is adopted to reduce the difficulty of the process. According to the BPM method (beam transmission method) simulation analysis, this new type of digital optical switch has the advantages of low crosstalk, small insertion loss, small polarization dependence, good spectral flatness, and easy integration.
附图说明Description of drawings
下面结合附图和实施例对本发明作进一步说明。The present invention will be further described below in conjunction with drawings and embodiments.
图1是该开关光用BPM法模拟的效果图;Figure 1 is an effect diagram of the switching light simulated by the BPM method;
图2是本发明的数字光开关结构示意图;Fig. 2 is a schematic structural diagram of a digital optical switch of the present invention;
图3是本发明的数字开关光Y分叉部分结构示意图;Fig. 3 is a schematic diagram of the structure of the digital switch light Y bifurcation part of the present invention;
图4是本发明的数字开关光中S弯曲波导可变光衰减器部分结构示意图;Fig. 4 is a partial structural diagram of an S-curved waveguide variable optical attenuator in the digital switching light of the present invention;
图5是图2的C-C剖面示意图;Fig. 5 is the C-C sectional schematic diagram of Fig. 2;
图6是图2的D-D剖面示意图。FIG. 6 is a schematic cross-sectional view along D-D of FIG. 2 .
图中:1、Y分叉波导数字光开关,2、S弯曲波导型可变光衰减器,3、输入波导,4、分叉角填充部分,5、Y分叉波导数字光开关部分电极,6、Y分叉部分波导,7、连接波导,8、锥形过渡波导,9、S弯曲波导型可变光衰减器部分的电极,10、S弯曲波导,11、硅或玻璃衬底,12、波导包层(即包括上下限制层)。In the figure: 1. Y-branched waveguide digital optical switch, 2. S-curved waveguide type variable optical attenuator, 3. Input waveguide, 4. Filling part of bifurcation angle, 5. Electrodes of Y-branched waveguide digital optical switch, 6. Waveguide of Y bifurcated part, 7. Connecting waveguide, 8. Tapered transition waveguide, 9. Electrodes of S-curved waveguide type variable optical attenuator, 10. S-curved waveguide, 11. Silicon or glass substrate, 12 1. Waveguide cladding (that is, including upper and lower confinement layers).
具体实施方式Detailed ways
如图2所示,由一个Y分叉波导数字光开关1和分别与一个Y分叉波导数字光开关1两端相连的S弯曲波导型可变光衰减器2集成构成。As shown in FIG. 2 , it is composed of a Y-branched waveguide digital optical switch 1 and S-curved waveguide variable optical attenuators 2 respectively connected to both ends of a Y-branched waveguide digital optical switch 1 .
如图4所示,S弯曲波导型可变光衰减器2依次由连接波导7经锥形过渡波导8、S弯曲波导10、另一锥形过渡波导8与另一连接波导7连接,S弯曲波导型可变光衰减器部分的电极9分别位于S形弯曲的曲率半径小的一侧;在波导边缘一侧的电极边缘距S形弯曲波导边缘距离为±1微米,两侧的S弯曲波导型可变光衰减器部分的电极9分别同Y分叉波导数字光开关部分电极5相串联。As shown in Figure 4, the S-curved waveguide type variable optical attenuator 2 is sequentially connected by a connecting
如图3所示,Y分叉波导数字光开关1的分叉角α在0.3-1.0°,并在分叉处填去分叉角填充部分4,其顶部宽度d为1.5-2μm。As shown in FIG. 3 , the bifurcation angle α of the Y bifurcated waveguide digital optical switch 1 is 0.3-1.0°, and the bifurcation angle filling part 4 is filled at the bifurcation, and its top width d is 1.5-2 μm.
图5是图2中C-C’处波导结构的剖示图,在硅或玻璃基底11上,分别制作波导包层12(含上下限制层),S弯曲波导10的芯层和S弯曲波导型可变光衰减器部分的电极9。Figure 5 is a cross-sectional view of the waveguide structure at CC' in Figure 2. On a silicon or
图6是图2中D-D’处波导结构的剖示图,在硅或玻璃基底11上,分别制作波导包层12(含上下限制层),Y分叉部分波导6的芯层和Y分叉波导数字光开关部分的电极5。Fig. 6 is the sectional view of the waveguide structure at DD' place in Fig. 2, on silicon or
以采用有机聚合物材料,利用其热光效应来开关光功能实现为例。Take the use of organic polymer materials, using its thermo-optic effect to realize the function of switching light as an example.
按照图2、5、6的器件和结构设计,在硅或玻璃基底上,利用常规的有机聚合物波导旋涂成膜的制作工艺完成该器件制作。对于波长为1.55μm的光波,波导的折射率为n=1.529/1.521(TE/TM模),芯层、覆盖层折射率差为Δn=0.005,热光系数为-2.5×10-4/K-1,下限制层厚10μm,芯层厚度为7μm,芯层与覆盖层总厚19μm。在Y分叉后紧接一个S弯曲波导,Y分叉区波导和输入、连接波导宽度选取7μm,S形弯曲部分的波导宽度选取5μm,Y分叉区波导与S形弯曲部分的波导通过1000μm的锥形波导过渡,S形弯曲部分的曲率半径大于600μm。Y分叉角为α=0.4°Y分叉尖角部分填补修正d=1.5μm,Y分叉的末端间隔L=20μm;电极可采用铬一金双层金属电极,厚度约200-300nm,Y分叉部分的电极分为两部分,宽度与波导相同,A区的电极与波导的夹角为α,B区的电极与波导平行,其中各电极的长度和具体位置与器件所用材料性质和α角度有关。S弯曲波导的弯曲的内侧各设计串联电极,电极外侧边缘同波导的内侧基本重合,并同Y分叉部分电极串联一起。According to the device and structure design in Figures 2, 5 and 6, the device is fabricated on a silicon or glass substrate using a conventional organic polymer waveguide spin-coating film forming process. For a light wave with a wavelength of 1.55 μm, the refractive index of the waveguide is n=1.529/1.521 (TE/TM mode), the refractive index difference between the core layer and the cladding layer is Δn=0.005, and the thermo-optic coefficient is -2.5×10 -4 /K -1 , the thickness of the lower limiting layer is 10 μm, the thickness of the core layer is 7 μm, and the total thickness of the core layer and the cladding layer is 19 μm. After the Y bifurcation, there is an S-curved waveguide. The width of the waveguide in the Y-bifurcated area and the input and connecting waveguide is selected as 7 μm. The width of the waveguide in the S-shaped curved part is selected as 5 μm. The tapered waveguide transition, the radius of curvature of the S-shaped bending part is greater than 600 μm. Y bifurcation angle is α=0.4° Y bifurcation sharp part fill correction d=1.5μm, distance between Y bifurcation ends L=20μm; electrode can be chromium-gold double-layer metal electrode with a thickness of about 200-300nm, Y The electrodes in the bifurcated part are divided into two parts, the width of which is the same as that of the waveguide. The angle between the electrodes in area A and the waveguide is α, and the electrodes in area B are parallel to the waveguide. The length and specific position of each electrode are related to the properties of the material used in the device and α Angle related. The inner side of the S-curved waveguide is designed with series electrodes, and the outer edge of the electrodes basically coincides with the inner side of the waveguide, and is connected in series with the electrodes of the Y bifurcation part.
S弯曲波导部分有二个作用,一是将输出端分开到能与光纤阵列耦合的距离,另一作用就是起到可变光衰减器的功能。当右侧电极作用时,首先利用Y分叉的模式分离原理,将绝大部分光能量耦合到左侧的波导,剩余的极少部分光能量进入S形弯曲波导,此时再利用S弯曲波导的电极作用,在波导的垂直方向产生温度梯度,由于聚合物材料的负热光系数,形成相应的垂直方向的折射率梯度,使得折射率分布向外倾斜更厉害,水平方向上的光能量发生严重的泄漏,剩余的这极少部分光能量通过S弯曲波导结构的可变光衰减器衰减掉,这样便可以大大提高光开关的消光比性能。图1为采用BPM法模拟的光开关效果图。The S-curved waveguide part has two functions, one is to separate the output end to a distance that can be coupled with the fiber array, and the other is to function as a variable optical attenuator. When the right electrode works, first use the mode separation principle of Y bifurcation to couple most of the light energy to the left waveguide, and the remaining very little light energy enters the S-shaped curved waveguide, and then use the S-shaped curved waveguide Due to the electrode action of the waveguide, a temperature gradient is generated in the vertical direction of the waveguide. Due to the negative thermo-optic coefficient of the polymer material, a corresponding refractive index gradient in the vertical direction is formed, so that the refractive index distribution is more inclined outward, and the light energy in the horizontal direction is generated. Serious leakage, the remaining very little light energy is attenuated by the variable optical attenuator of the S-curved waveguide structure, so that the extinction ratio performance of the optical switch can be greatly improved. Figure 1 is an effect diagram of an optical switch simulated by the BPM method.
Y分叉的作用主要完成能量的分配,高消光比的性能主要通过可变光衰减器来实现,故它Y分叉角度可以放大一些,同时考虑到工艺制作的问题,在分叉处填去尖角部分,使其顶部宽度在一般波导制作光刻工艺易实现的宽度,如1.5μm,利用BPM(光束传输法)模拟分析表明,这一修正引起的插入损耗的增加仅仅0.15dB左右。Y分叉的末端间隔(L)设计在20μm,此时分叉两端产生相互耦合很小,这样可缩短Y分叉波导长度。The function of Y bifurcation is mainly to complete the distribution of energy, and the performance of high extinction ratio is mainly realized by the variable optical attenuator, so the angle of Y bifurcation can be enlarged, and at the same time, considering the problem of manufacturing process, fill in the bifurcation For the sharp corners, the width of the top is within the width that is easy to achieve in the general waveguide manufacturing lithography process, such as 1.5 μm. The simulation analysis using BPM (beam transmission method) shows that the increase in insertion loss caused by this correction is only about 0.15dB. The distance (L) between the ends of the Y bifurcation is designed to be 20 μm. At this time, the mutual coupling between the two ends of the bifurcation is very small, which can shorten the length of the Y bifurcation waveguide.
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| CN106654488A (en) * | 2016-07-26 | 2017-05-10 | 上海阖煦微波技术有限公司 | Rapid connection attenuator based on flexible waveguide |
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