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CN1315058A - 压电执行元件 - Google Patents

压电执行元件 Download PDF

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Publication number
CN1315058A
CN1315058A CN00801151A CN00801151A CN1315058A CN 1315058 A CN1315058 A CN 1315058A CN 00801151 A CN00801151 A CN 00801151A CN 00801151 A CN00801151 A CN 00801151A CN 1315058 A CN1315058 A CN 1315058A
Authority
CN
China
Prior art keywords
neutral phase
piezoelectric actuator
region
electrodes
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN00801151A
Other languages
English (en)
Chinese (zh)
Inventor
克劳斯－彼得·施莫尔
弗里德里希·伯金
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of CN1315058A publication Critical patent/CN1315058A/zh
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/508—Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Measuring Fluid Pressure (AREA)
CN00801151A 1999-06-19 2000-06-19 压电执行元件 Pending CN1315058A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19928177.7 1999-06-19
DE19928177A DE19928177C2 (de) 1999-06-19 1999-06-19 Piezoaktor

Publications (1)

Publication Number Publication Date
CN1315058A true CN1315058A (zh) 2001-09-26

Family

ID=7911880

Family Applications (1)

Application Number Title Priority Date Filing Date
CN00801151A Pending CN1315058A (zh) 1999-06-19 2000-06-19 压电执行元件

Country Status (7)

Country Link
EP (1) EP1110254A1 (fr)
JP (1) JP2003522510A (fr)
KR (1) KR20010072697A (fr)
CN (1) CN1315058A (fr)
DE (1) DE19928177C2 (fr)
HU (1) HUP0103374A3 (fr)
WO (1) WO2000079615A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100479217C (zh) * 2003-10-01 2009-04-15 罗伯特·博世有限公司 压电执行元件
CN1774822B (zh) * 2004-06-29 2010-05-05 西门子公司 具有额定裂纹位置的压电结构件、其制造方法和应用

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10201641A1 (de) 2002-01-17 2003-08-07 Epcos Ag Piezoelektrisches Bauelement und Verfahren zu dessen Herstellung
DE10207292B4 (de) * 2002-02-21 2005-08-11 Siemens Ag Piezostack und Verfahren zur Herstellung eines Piezostacks
DE102005008717A1 (de) 2005-02-25 2006-08-31 Robert Bosch Gmbh Aktormodul mit einem Piezoaktor
DE102007060167A1 (de) 2007-12-13 2009-06-25 Robert Bosch Gmbh Piezoaktor mit einem Multilagenaufbau von Piezoelementen und ein Verfahren zu dessen Herstellung
DE102009058907B4 (de) 2009-12-17 2012-12-13 Eads Deutschland Gmbh Piezoaktor und Verfahren zum Betreiben eines Piezoaktors, insbesondere in mobilen technischen Einrichtungen
DE102011014296A1 (de) * 2011-03-17 2012-09-20 Epcos Ag Piezoelektrisches Aktorbauelement und Verfahren zur Herstellung eines piezoelektrischen Aktorbauelements
KR101471185B1 (ko) * 2013-04-11 2014-12-11 한국기계연구원 자가 정렬 임프린트 리소그래피 장치 및 이를 이용한 임프린트 리소그래피 방법
KR102547025B1 (ko) 2022-05-09 2023-06-26 박대용 하수관거 비굴착 부분보수 장치 및 공법
KR102495695B1 (ko) 2022-05-09 2023-02-06 박대용 하수관거 비굴착 부분보수 및 모니터링 시스템
KR102634118B1 (ko) 2022-12-29 2024-02-06 삼아건설 주식회사 하수관거 비굴착 부분보수 장치 및 공법

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04214686A (ja) * 1990-10-05 1992-08-05 Nec Corp 電歪効果素子
JPH04159785A (ja) * 1990-10-23 1992-06-02 Nec Corp 電歪効果素子
JP2940376B2 (ja) * 1993-12-24 1999-08-25 日立プラント建設株式会社 積層形圧電アクチュエータ
JPH08274381A (ja) * 1995-03-31 1996-10-18 Chichibu Onoda Cement Corp 積層型圧電アクチュエータ及びその製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100479217C (zh) * 2003-10-01 2009-04-15 罗伯特·博世有限公司 压电执行元件
CN1774822B (zh) * 2004-06-29 2010-05-05 西门子公司 具有额定裂纹位置的压电结构件、其制造方法和应用

Also Published As

Publication number Publication date
DE19928177C2 (de) 2001-04-26
WO2000079615A1 (fr) 2000-12-28
EP1110254A1 (fr) 2001-06-27
HUP0103374A3 (en) 2002-03-28
DE19928177A1 (de) 2001-01-11
JP2003522510A (ja) 2003-07-22
HUP0103374A2 (hu) 2002-01-28
KR20010072697A (ko) 2001-07-31

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication