CN1379000A - Process for preparing coated silicide layer on surface of silicon titanocarbide material - Google Patents
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- 239000000463 material Substances 0.000 title claims abstract description 29
- 229910021332 silicide Inorganic materials 0.000 title claims abstract description 9
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 title claims abstract description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 13
- 229910052710 silicon Inorganic materials 0.000 title claims description 7
- 239000010703 silicon Substances 0.000 title claims description 7
- 238000004519 manufacturing process Methods 0.000 title 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 33
- 238000000576 coating method Methods 0.000 claims abstract description 21
- 239000011248 coating agent Substances 0.000 claims abstract description 20
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 19
- 239000000203 mixture Substances 0.000 claims abstract description 17
- 238000000034 method Methods 0.000 claims abstract description 15
- 239000000843 powder Substances 0.000 claims abstract description 12
- DFJQEGUNXWZVAH-UHFFFAOYSA-N bis($l^{2}-silanylidene)titanium Chemical compound [Si]=[Ti]=[Si] DFJQEGUNXWZVAH-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910021352 titanium disilicide Inorganic materials 0.000 claims abstract description 6
- PUZPDOWCWNUUKD-UHFFFAOYSA-M sodium fluoride Chemical compound [F-].[Na+] PUZPDOWCWNUUKD-UHFFFAOYSA-M 0.000 claims description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 8
- 235000013024 sodium fluoride Nutrition 0.000 claims description 8
- 239000011775 sodium fluoride Substances 0.000 claims description 8
- 229910052786 argon Inorganic materials 0.000 claims description 6
- 239000000377 silicon dioxide Substances 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims description 5
- 238000009792 diffusion process Methods 0.000 claims description 4
- 239000011261 inert gas Substances 0.000 claims description 4
- 239000001307 helium Substances 0.000 claims description 3
- 229910052734 helium Inorganic materials 0.000 claims description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 3
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims 3
- 235000013312 flour Nutrition 0.000 claims 3
- 229910052700 potassium Inorganic materials 0.000 claims 3
- 239000011591 potassium Substances 0.000 claims 3
- 239000007789 gas Substances 0.000 claims 2
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims 2
- 238000009413 insulation Methods 0.000 claims 1
- UGACIEPFGXRWCH-UHFFFAOYSA-N [Si].[Ti] Chemical compound [Si].[Ti] UGACIEPFGXRWCH-UHFFFAOYSA-N 0.000 abstract description 18
- 230000003647 oxidation Effects 0.000 abstract description 16
- 238000007254 oxidation reaction Methods 0.000 abstract description 16
- 239000010936 titanium Substances 0.000 abstract description 13
- 229910008484 TiSi Inorganic materials 0.000 abstract description 4
- 229910004298 SiO 2 Inorganic materials 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 abstract description 2
- -1 potassium fluorosilicate Chemical compound 0.000 description 7
- 239000011863 silicon-based powder Substances 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 4
- 238000002441 X-ray diffraction Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 3
- 238000005475 siliconizing Methods 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 125000004122 cyclic group Chemical group 0.000 description 2
- 230000008595 infiltration Effects 0.000 description 2
- 238000001764 infiltration Methods 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 239000004408 titanium dioxide Substances 0.000 description 2
- 230000004584 weight gain Effects 0.000 description 2
- 235000019786 weight gain Nutrition 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000003064 anti-oxidating effect Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 150000003385 sodium Chemical class 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
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- Ceramic Products (AREA)
- Silicon Compounds (AREA)
Abstract
本发明属于表面工程技术,具体是一种在钛碳化硅(Ti3SiC2)材料表面制备硅化物涂层的方法,渗料由硅粉、氧化铝粉、氟硅酸钾、氟化钠固体粉末混合物组成,Ti3SiC2材料用渗料包埋后在1000~1200℃保温2~8小时进行热扩散处理。所获得的涂层由二硅化钛(TiSi2)和碳化硅(SiC)两相组成,厚度为10~60微米。涂层在1000~1200℃空气中氧化后主要形成SiO2膜,恒温氧化的抛物线速度常数相比Ti3SiC2材料降低了2~3个数量级,应用本发明可使Ti3SiC2材料应用于高温腐蚀性环境中。The invention belongs to the surface engineering technology, specifically a method for preparing a silicide coating on the surface of a titanium silicon carbide (Ti 3 SiC 2 ) material. Composition of powder mixture, Ti 3 SiC 2 material is embedded with seepage material and then heat-diffused at 1000-1200°C for 2-8 hours. The obtained coating is composed of two phases of titanium disilicide (TiSi 2 ) and silicon carbide (SiC), and the thickness is 10-60 microns. After the coating is oxidized in the air at 1000-1200°C, it mainly forms a SiO 2 film, and the parabolic velocity constant of the constant temperature oxidation is 2-3 orders of magnitude lower than that of the Ti 3 SiC 2 material. The application of the present invention can make the Ti 3 SiC 2 material used in High temperature corrosive environment.
Description
技术领域technical field
本发明属于表面工程技术,具体地说是一种在钛碳化硅材料表面制备硅化物涂层的方法。The invention belongs to surface engineering technology, in particular to a method for preparing a silicide coating on the surface of a titanium silicon carbide material.
背景技术Background technique
钛碳化硅(Ti3SiC2)是一种性能优异的结构/功能一体化材料,它有机地综合了金属的塑性、导电、导热、易加工性和陶瓷的耐高温、抗热冲击、高强度和低比重等特点,作为高温结构材料以及熔盐电解电极等具有广阔的应用前景,目前受到研究者的极大关注。Titanium silicon carbide (Ti 3 SiC 2 ) is a structural/functional integrated material with excellent performance. It organically combines the plasticity, electrical conductivity, thermal conductivity, and ease of processing of metals with the high temperature resistance, thermal shock resistance, and high strength of ceramics. It has broad application prospects as high-temperature structural materials and electrodes for molten salt electrolysis, and is currently receiving great attention from researchers.
但钛碳化硅(Ti3SiC2)在1000℃以上抗高温氧化性能差,原因是:虽然其材料内含硅,氧化时却形不成完整连续的二氧化硅膜。在900~1300℃下的恒温氧化实验以及X射线衍射分析表明,钛碳化硅表面形成外层为二氧化钛和内层为二氧化钛和二氧化硅混合物的双层结构的氧化膜。一般地,在1000℃以上只有SiO2和Al2O3才具有良好的抗氧化保护性能。因此,只要增加材料表面的硅含量就会改善其抗氧化性能,而表面渗硅是一条简捷有效的途径。Tamer El-Raghy和Michel W. Barsoum(文献:Tamer El-Raghy and Michel W.Barsoum,Diffusion kinetics of the carburization andsilicidation of Ti3SiC2,J.Appl.Phys.83(1)(1998)112-119)曾经将钛碳化硅材料夹在两个单晶硅片之间,施加一定的压力使它们保持良好的接触,然后在1200~1350℃下真空中热处理,在钛碳化硅材料表面获得了硅化物涂层。但上述方法只能处理光滑表面,并需施加外力和在真空中进行,因此成本高且工艺复杂,实用性差。However, titanium silicon carbide (Ti 3 SiC 2 ) has poor high-temperature oxidation resistance above 1000°C. The reason is that although its material contains silicon, it cannot form a complete and continuous silicon dioxide film when oxidized. Constant temperature oxidation experiments at 900-1300°C and X-ray diffraction analysis show that a double-layer oxide film with an outer layer of titanium dioxide and an inner layer of a mixture of titanium dioxide and silicon dioxide is formed on the surface of titanium silicon carbide. Generally, only SiO 2 and Al 2 O 3 have good oxidation protection performance above 1000°C. Therefore, as long as the silicon content on the surface of the material is increased, its oxidation resistance will be improved, and surface siliconization is a simple and effective way. Tamer El-Raghy and Michel W. Barsoum (Document: Tamer El-Raghy and Michel W.Barsoum, Diffusion kinetics of the carburization and silicidation of Ti 3 SiC 2 , J.Appl.Phys.83(1)(1998) 112-119 ) once sandwiched titanium silicon carbide material between two single crystal silicon wafers, applied a certain pressure to keep them in good contact, and then heat-treated it in vacuum at 1200-1350 ° C, and obtained silicide on the surface of titanium silicon carbide material coating. However, the above method can only deal with smooth surfaces, and needs to apply external force and be carried out in a vacuum, so the cost is high, the process is complicated, and the practicability is poor.
发明内容Contents of the invention
本发明的目的在于提供一种工艺简单、成本低廉、实用性强且能有效地提高钛碳化硅材料抗高温氧化性能的在钛碳化硅(Ti3SiC2)材料表面制备硅化物涂层的方法。The object of the present invention is to provide a method for preparing a silicide coating on the surface of titanium silicon carbide (Ti 3 SiC 2 ) material, which has simple process, low cost, strong practicability and can effectively improve the high temperature oxidation resistance of titanium silicon carbide material .
为了实现上述目的,本发明的技术方案是:用硅粉、氧化铝粉、氟硅酸钾、氟化钠混合而成的固体粉末混合物为渗料,将钛碳化硅材料放入渗料中,在惰性气体保护下,以20~40℃/min的升温速度、在1000~1200℃条件下、保温2~8小时,进行热扩散处理,然后炉冷至室温,即在样品表面形成10~60微米厚的二硅化钛和碳化硅涂层;In order to achieve the above object, the technical scheme of the present invention is: use the solid powder mixture formed by mixing silicon powder, aluminum oxide powder, potassium fluorosilicate and sodium fluoride as the infiltrating material, put the titanium silicon carbide material into the infiltrating material, Under the protection of an inert gas, at a heating rate of 20-40°C/min, at a temperature of 1000-1200°C, heat preservation for 2-8 hours, perform thermal diffusion treatment, and then cool to room temperature in the furnace, that is, 10-60 Micron-thick titanium disilicide and silicon carbide coatings;
本发明所述粉末混合物组成以重量百分比计:硅粉(Si)25~80,氧化铝粉(Al2O3)15~70,氟硅酸钾(K2SiF6)0.5~3,氟化钠(NaF)0.5~3;所述硅粉(Si)纯度≥99.00%、粒度≤0.4毫米;氧化铝(Al2O3)纯度≥99.00%、粒度≤0.4毫米;氟硅酸钾(K2SiF6)为分析纯;氟化钠(NaF)为分析纯;所述惰性气体为纯度≥99.99%的氩气或纯度≥99.99%的氦气。The composition of the powder mixture in the present invention is calculated by weight percentage: silicon powder (Si) 25-80, alumina powder (Al 2 O 3 ) 15-70, potassium fluorosilicate (K 2 SiF 6 ) 0.5-3, fluorinated Sodium (NaF) 0.5-3; the silicon powder (Si) purity ≥ 99.00%, particle size ≤ 0.4 mm; alumina (Al 2 O 3 ) purity ≥ 99.00%, particle size ≤ 0.4 mm; potassium fluorosilicate (K 2 SiF 6 ) is analytically pure; sodium fluoride (NaF) is analytically pure; the inert gas is argon with a purity ≥ 99.99% or helium with a purity ≥ 99.99%.
本发明具有如下优点:The present invention has the following advantages:
1.采用本发明所制备的涂层具有优良的抗高温氧化性能,能显著地降低钛碳化硅的高温氧化速度。在1200℃下空气中恒温氧化20小时后,Ti3SiC2的氧化增重达0.35kg/m2,而涂层的氧化增重只有0.022kg/m2,降低了16倍。在1100℃下和1200℃空气中恒温氧化时,Ti3SiC2氧化的抛物线速度分别为4.43×10-7和1.81×10-6kg2m-4s-1,而涂层的相应数据分别为1.58×10-9和5.15×10-9kg2m-4s-1,降低了2~3个数量级。在1100℃下的循环氧化实验证明涂层表面氧化膜的抗剥落性能也有改善。表面氧化膜主要由SiO2组成,同时含少量TiO2。1. The coating prepared by the present invention has excellent high-temperature oxidation resistance, and can significantly reduce the high-temperature oxidation rate of titanium silicon carbide. After constant temperature oxidation in air at 1200°C for 20 hours, the oxidation weight gain of Ti 3 SiC 2 reached 0.35kg/m 2 , while the oxidation weight gain of the coating was only 0.022kg/m 2 , which was reduced by 16 times. At 1100°C and 1200°C in air, the parabolic velocities of Ti 3 SiC 2 oxidation are 4.43×10 -7 and 1.81×10 -6 kg 2 m -4 s -1 respectively, while the corresponding data of the coating are are 1.58×10 -9 and 5.15×10 -9 kg 2 m -4 s -1 , which are reduced by 2 to 3 orders of magnitude. Cyclic oxidation experiments at 1100°C prove that the peeling resistance of the oxide film on the coating surface is also improved. The surface oxide film is mainly composed of SiO 2 and contains a small amount of TiO 2 .
2.本发明采用固体硅粉及其它添加剂的混合物包埋钛碳化硅材料的样品,经高温热扩散,获得硅化物涂层。制备过程并不需施加外力,不用在真空中进行,所以它方法简单,并且成本低廉。2. The present invention adopts the mixture of solid silicon powder and other additives to embed the sample of titanium silicon carbide material, and obtain the silicide coating through high temperature thermal diffusion. The preparation process does not need to apply external force and is not carried out in a vacuum, so the method is simple and the cost is low.
3.采用本发明能处理光滑表面,还能处理具有复杂表面的实际工件,应用范围广,应用本发明可使Ti3SiC2材料应用于高温腐蚀性环境中。3. The invention can be used to process smooth surfaces and actual workpieces with complex surfaces, and has a wide range of applications. The application of the invention can make Ti 3 SiC 2 materials used in high-temperature corrosive environments.
附图说明Description of drawings
图1为本发明Ti3SiC2经渗硅处理后表面的X射线衍射谱。Fig. 1 is the X-ray diffraction spectrum of the surface of Ti 3 SiC 2 of the present invention after siliconizing treatment.
图2为本发明Ti3SiC2经渗硅处理后表面形成的硅化物涂层扫描电镜照片。Fig. 2 is a scanning electron micrograph of the silicide coating formed on the surface of Ti 3 SiC 2 of the present invention after siliconizing treatment.
具体实施方式Detailed ways
下面结合附图和实施例详述本发明。The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.
实施例1Example 1
本发明固体粉末混合物的组成:硅粉(Si)纯度≥99.00%、粒度≤0.4毫米;氧化铝(Al2O3)纯度≥99.00%、粒度≤0.4毫米;氟硅酸钾(K2SiF6)为分析纯;氟化钠(NaF)为分析纯;The composition of the solid powder mixture of the present invention: silicon powder (Si) purity ≥ 99.00%, particle size ≤ 0.4 mm; aluminum oxide (Al 2 O 3 ) purity ≥ 99.00%, particle size ≤ 0.4 mm; potassium fluorosilicate (K 2 SiF 6 ) is analytically pure; sodium fluoride (NaF) is analytically pure;
固体粉末混合物组成按重量百分计:硅粉25~80%、氧化铝15~70%、氟硅酸钾0.5~3%、氟化钠0.5~3%。The solid powder mixture is composed by weight percentage: 25-80% of silicon powder, 15-70% of aluminum oxide, 0.5-3% of potassium fluorosilicate, and 0.5-3% of sodium fluoride.
在料罐中用渗料包埋钛碳化硅材料的样品,然后将料罐放置在一个可抽真空及充氩气的系统中,先抽系统真空至1~10Pa,然后充入氩气(99.99%Ar),以20~40℃/min的升温速度加热至1000~1200℃,保持2~8小时后自然冷却至室温,即完成渗硅全部工艺过程,获得由二硅化钛(TiSi2)和碳化硅(SiC)两相组成的涂层,厚度为10~60微米。Embed the sample of titanium silicon carbide material in the material tank with seepage material, and then place the material tank in a system that can be vacuumed and filled with argon. %Ar), heated to 1000-1200°C at a heating rate of 20-40°C/min, kept for 2-8 hours and then naturally cooled to room temperature to complete the entire process of siliconizing, and obtain titanium disilicide (TiSi 2 ) and The coating is composed of two phases of silicon carbide (SiC), and the thickness is 10-60 microns.
本实施例具体数据为:钛碳化硅样品尺寸为10×5×2毫米,粉末混合物组成以重量百分比计:66%硅、33%氧化铝、0.5%氟硅酸钾、0.5%氟化钠,总重量为175g;抽系统真空至10Pa,然后充入氩气(99.99%Ar);加热温度:1100℃;升温速度:35℃/min;保温时间:6小时。炉冷至室温后取出试样。The specific data of this embodiment are: the size of the titanium silicon carbide sample is 10×5×2 mm, and the composition of the powder mixture is by weight percentage: 66% silicon, 33% aluminum oxide, 0.5% potassium fluorosilicate, 0.5% sodium fluoride, The total weight is 175g; the system is evacuated to 10Pa, and then filled with argon (99.99% Ar); heating temperature: 1100°C; heating rate: 35°C/min; holding time: 6 hours. The samples were taken out after the furnace was cooled to room temperature.
经X射线衍射分析表明,经上述工艺处理后钛碳化硅材料表面形成了二硅化钛(TiSi2)和碳化硅(SiC)混合组成的涂层,X衍射谱见图1。用扫描电子显微镜观察表面和断面,证实渗后的样品表面光滑,呈黑灰色;形成了完整连续且结合力好的涂层,厚度为50微米,参见图2。通过测量渗后样品的质量变化,渗入的量为21mg/cm2。X-ray diffraction analysis shows that a coating composed of titanium disilicide (TiSi 2 ) and silicon carbide (SiC) is formed on the surface of the titanium silicon carbide material after the above process, and the X-ray diffraction spectrum is shown in Figure 1. Observing the surface and cross-section with a scanning electron microscope confirmed that the surface of the infiltrated sample was smooth and black-gray; a complete, continuous and well-bonded coating was formed with a thickness of 50 microns, see Figure 2. By measuring the mass change of the sample after infiltration, the amount of infiltration was 21 mg/cm 2 .
施加硅化物涂层后,钛碳化硅在1100~1200℃空气中恒温氧化的抛物线速度常数降低了2~3个数量级,达到了完全抗氧化级。而1100℃下的循环氧化实验(氧化1小时后空冷15分钟为一次循环)证明了涂层表面氧化膜的抗剥落性能也有改善。After applying the silicide coating, the parabolic velocity constant of the constant temperature oxidation of titanium silicon carbide in the air at 1100-1200 ° C is reduced by 2 to 3 orders of magnitude, reaching a complete anti-oxidation level. The cyclic oxidation experiment at 1100°C (oxidation for 1 hour followed by air cooling for 15 minutes is a cycle) proves that the peeling resistance of the oxide film on the coating surface is also improved.
实施例2Example 2
与实施例1不同之处在于:钛碳化硅材料样品10×5×2毫米,粉末混合物组成以重量百分比计:35%硅、63%氧化铝、1%氟硅酸钾、1%氟化钠,总重量为125g;加热温度:1050℃;保温时间:6小时。炉冷至室温后取出试样。The difference from Example 1 is that the titanium silicon carbide material sample is 10 × 5 × 2 mm, and the composition of the powder mixture is by weight percentage: 35% silicon, 63% aluminum oxide, 1% potassium fluorosilicate, 1% sodium fluoride , with a total weight of 125g; heating temperature: 1050°C; holding time: 6 hours. The samples were taken out after the furnace was cooled to room temperature.
经检验在钛碳化硅材料样品表面形成22微米厚的二硅化钛(TiSi2)和碳化硅(SiC)混合组成的涂层。渗后的氧品表面光滑,呈黑灰色。断面观察,涂层连续完整,与基体结合好。After testing, a 22-micron-thick coating composed of a mixture of titanium disilicide (TiSi 2 ) and silicon carbide (SiC) was formed on the surface of the titanium silicon carbide material sample. The surface of the infiltrated oxygen product is smooth and dark gray. The cross-section observation shows that the coating is continuous and complete, and is well combined with the substrate.
本发明所述惰性气体亦为纯度≥99.99%的氦气。The inert gas in the present invention is also helium with a purity ≥ 99.99%.
Claims (4)
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| CNB021094683A CN1139555C (en) | 2002-04-12 | 2002-04-12 | A method for preparing silicide coating on the surface of titanium silicon carbide material |
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| CNB021094683A CN1139555C (en) | 2002-04-12 | 2002-04-12 | A method for preparing silicide coating on the surface of titanium silicon carbide material |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1321220C (en) * | 2003-11-17 | 2007-06-13 | 中国科学院金属研究所 | Method of forming boride coating layer on Ti3 SiC2 material surface |
| CN100455688C (en) * | 2006-08-16 | 2009-01-28 | 中国科学院上海硅酸盐研究所 | Titanium carbon silicide-based gradient material and preparation method of in-situ reaction |
| CN101671808B (en) * | 2009-10-16 | 2011-06-01 | 江苏大学 | Method for preparing ultralow elasticity modulus high-wearing feature shell microstructural membrane on surface of titanium |
| CN101318837B (en) * | 2008-07-17 | 2012-05-23 | 居小平 | Oxidation protection matching treatment layer coating for carbon/carbon composite aerospace brake parts |
| TWI589177B (en) * | 2013-03-21 | 2017-06-21 | 日本碍子股份有限公司 | Ceramic heater and its preparation method |
| CN107319948A (en) * | 2017-08-09 | 2017-11-07 | 泾县信达工贸有限公司 | It is a kind of not glue nontoxic inner container of electric cooker coating |
| CN114042911A (en) * | 2021-11-22 | 2022-02-15 | 河北京津冀再制造产业技术研究有限公司 | Composite powder, composite coating, preparation method and application thereof |
| CN114988905A (en) * | 2022-07-19 | 2022-09-02 | 中南大学 | Al2O3 filled Cf/PyC-SiCNWs composite material and preparation method thereof |
| CN117286443A (en) * | 2023-10-08 | 2023-12-26 | 北京交通大学 | A high-temperature oxidation-resistant microwave-absorbing ceramic coating with a double-layer structure and its preparation method |
| CN118559021A (en) * | 2024-05-16 | 2024-08-30 | 中南林业科技大学 | A composite powder and its preparation method and application |
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- 2002-04-12 CN CNB021094683A patent/CN1139555C/en not_active Expired - Fee Related
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1321220C (en) * | 2003-11-17 | 2007-06-13 | 中国科学院金属研究所 | Method of forming boride coating layer on Ti3 SiC2 material surface |
| CN100455688C (en) * | 2006-08-16 | 2009-01-28 | 中国科学院上海硅酸盐研究所 | Titanium carbon silicide-based gradient material and preparation method of in-situ reaction |
| CN101318837B (en) * | 2008-07-17 | 2012-05-23 | 居小平 | Oxidation protection matching treatment layer coating for carbon/carbon composite aerospace brake parts |
| CN101671808B (en) * | 2009-10-16 | 2011-06-01 | 江苏大学 | Method for preparing ultralow elasticity modulus high-wearing feature shell microstructural membrane on surface of titanium |
| TWI589177B (en) * | 2013-03-21 | 2017-06-21 | 日本碍子股份有限公司 | Ceramic heater and its preparation method |
| CN107319948A (en) * | 2017-08-09 | 2017-11-07 | 泾县信达工贸有限公司 | It is a kind of not glue nontoxic inner container of electric cooker coating |
| CN114042911A (en) * | 2021-11-22 | 2022-02-15 | 河北京津冀再制造产业技术研究有限公司 | Composite powder, composite coating, preparation method and application thereof |
| CN114042911B (en) * | 2021-11-22 | 2023-11-24 | 河北京津冀再制造产业技术研究有限公司 | Composite powder, composite coating, preparation method and application thereof |
| CN114988905A (en) * | 2022-07-19 | 2022-09-02 | 中南大学 | Al2O3 filled Cf/PyC-SiCNWs composite material and preparation method thereof |
| CN114988905B (en) * | 2022-07-19 | 2022-12-02 | 中南大学 | A kind of Al2O3 filled Cf/PyC-SiCNWs composite material and its preparation method |
| CN117286443A (en) * | 2023-10-08 | 2023-12-26 | 北京交通大学 | A high-temperature oxidation-resistant microwave-absorbing ceramic coating with a double-layer structure and its preparation method |
| CN118559021A (en) * | 2024-05-16 | 2024-08-30 | 中南林业科技大学 | A composite powder and its preparation method and application |
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