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CN1352805A - Substrate with at least two metallized polymer bumps for soldered connection to wiring - Google Patents

Substrate with at least two metallized polymer bumps for soldered connection to wiring Download PDF

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Publication number
CN1352805A
CN1352805A CN00807834A CN00807834A CN1352805A CN 1352805 A CN1352805 A CN 1352805A CN 00807834 A CN00807834 A CN 00807834A CN 00807834 A CN00807834 A CN 00807834A CN 1352805 A CN1352805 A CN 1352805A
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Prior art keywords
substrate
polymer
wiring
polymer bumps
protrusions
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CN00807834A
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Chinese (zh)
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J·范普伊姆布雷克
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Siemens Corp
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Siemens Corp
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    • H10W70/68
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/341Surface mounted components
    • H05K3/3431Leadless components
    • H05K3/3436Leadless components having an array of bottom contacts, e.g. pad grid array or ball grid array components
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29LINDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00Other particular articles
    • B29L2031/34Electrical apparatus, e.g. sparking plugs or parts thereof
    • B29L2031/3493Moulded interconnect devices, i.e. moulded articles provided with integrated circuit traces
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09009Substrate related
    • H05K2201/09045Locally raised area or protrusion of insulating substrate
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09818Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
    • H05K2201/09845Stepped hole, via, edge, bump or conductor
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Structures For Mounting Electric Components On Printed Circuit Boards (AREA)

Abstract

A substrate (S) with at least two metallized polymer bumps (PS), especially a polymer stud grid array, is configured in such a way that the polymer bumps (PS) have at least one step (ST) and at least one elevation (E). The geometry of the solder bumps (PS) ensures that the soldered connections to the wiring (V) are secure and guarantees reproducible layer thickness for the solder (L).

Description

用于与一个布线焊接的 至少带有两个用金属喷涂的 聚合物突起的基底Substrate with at least two metallized polymer protrusions for soldering to a wiring

集成开关电路总是具有较高的接线点数,并且越来越微型化。随着微型化程度的增加,预计焊膏涂覆和装备会出现困难,这应该通过新的外壳形状得以消除,在这里,特别是在球状栅格点阵组件中的单个的、少量的或者多个芯片的微型模件非常突出(DE-Z 1994年5月刊,54,55页)。这些模件基于一个通体接触的基底,在基底上,这些芯片例如通过接触线或使用倒装法而接触。在此基底的下表面有球状栅格点阵(BGA),它也经常被称作焊接栅格点阵或焊接突起点阵。此球状栅格点阵包括布置在基底下表面上的焊接突起,其使一个在印刷电路板或标准组件上的表面安装成为可能。通过这个焊接突起的平面布置,在一个粗糙的网栅中,比如1.27mm,可以实现较高的接线点数。Integrated switching circuits always have a high number of wiring points and are increasingly miniaturized. Difficulties in solder paste application and tooling are expected to arise with increasing miniaturization, which should be eliminated by new housing shapes, here especially in ball grid array assemblies for single, small or multiple The micromodule of a chip is very prominent (DE-Z May 1994, pp. 54, 55). These modules are based on a body-contacted substrate on which the chips are contacted, for example by contact wires or using the flip-chip method. On the lower surface of this substrate is a ball grid array (BGA), which is also often referred to as a solder grid array or a solder bump grid. The ball grid lattice includes solder bumps arranged on the lower surface of the substrate, which enable a surface mount on a printed circuit board or on a modular assembly. Through this layout of the solder bumps, a higher number of connection points can be achieved in a coarse grid, such as 1.27mm.

在所谓的MID技术中(MID=Moulded Interconnection Devices)使用带有集成导线组的压铸件来代替传统的印刷电路。适用于三维基底压铸的高级热塑性塑料,是这个技术的基础。这种热塑性塑料与用于印刷电路的传统的基底材料相比,其特点在于它具有较好的机械的、化学的、电的、和环境技术的特性。在MID技术的一个特殊的方向,也就是所谓的SIL技术(SIL=Spritzgiepteile mit integriertenLeiterziigen即带有集成导线组的压铸件),放弃通常的掩模技术,通过使用一种特殊的激光结构化分解处理,得到一个在压铸件上的金属层结构。因此在这个带有结构化的金属涂层的三维压铸件中,可集成更多的机械的和电的功能。壳体托架同时具有引导功能和开关连接功能,而金属化层除了具有布线和连接功能外,还可以用作电磁屏蔽,并保障一个良好的热漂移。为了使在压铸件的表面上的两个布线设备产生导电性的横向连接,在压铸时已经制造出了相应的通体接触孔。在压铸件的金属喷涂时,这个通体接触孔的内壁也被金属层所覆盖。生产带有集成导线组的三维压铸件的其它细节例如可参见DE-A-37 32249或EP-A-0 361 192。In the so-called MID technology (MID=Moulded Interconnection Devices) die-cast parts with integrated conductor sets are used instead of conventional printed circuits. Advanced thermoplastics suitable for die-casting of three-dimensional substrates are the basis of this technology. This thermoplastic is distinguished by better mechanical, chemical, electrical, and environmental-technical properties than conventional substrate materials for printed circuits. In a special direction of MID technology, the so-called SIL technology (SIL=Spritzgiepteile mit integrierten Leiterziigen, i.e. die casting with integrated conductor set), the usual mask technology is abandoned by using a special laser structured decomposition process , to obtain a metal layer structure on the die casting. Further mechanical and electrical functions can thus be integrated in the three-dimensional die-cast part with structured metal coating. The housing bracket has both a guiding function and a switch connection function, while the metallization layer, in addition to its wiring and connection functions, also serves as electromagnetic shielding and guarantees a good thermal drift. In order to produce an electrically conductive transverse connection of the two wiring devices on the surface of the die-cast part, corresponding through-body contact holes are already produced during die-casting. During the metal spraying of the die casting, the inner wall of the whole body contact hole is also covered by the metal layer. Other details of the production of three-dimensional die-cast parts with an integrated lead set can be found, for example, in DE-A-37 32 249 or EP-A-0 361 192.

可以看出,WO-A-89/00346所示的是一个单芯片模块,由一个电绝缘的在基底底面上的聚合物而制成的三维压铸基底在压铸时与突起共同成形,这些突起也是平面布置的。在这个基底的上侧,布置有一个集成电路芯片(IC芯片),其接线点通过精细的线束与在基底表面上形成的导轨连接在一起。这些导轨本身越过通体接触与在突起上形成的外部接线点连接在一起。It can be seen that WO-A-89/00346 shows a single-chip module, a three-dimensional die-cast base made of an electrically insulating polymer on the bottom surface of the base is co-formed with protrusions during die-casting, and these protrusions are also floor plan. On the upper side of this substrate, an integrated circuit chip (IC chip) is arranged, and its connection points are connected together with rails formed on the surface of the substrate through fine wiring harnesses. The rails themselves are connected via through-body contacts to external terminal points formed on the protrusions.

可以看出,WO-A-96 096 46所示的是一个所谓的聚合物柱状栅格点阵(PSGA),它将球状栅格点阵(BGA)的优点与MID技术的优点结合在一起。这个被称作聚合物柱状栅格点阵(PSGA)的新型结构形式是根据球状栅格点阵(BGA)而来的,其中“聚合物柱”的概念应是指在基底的压铸时共同成形的聚合物突起。这个新的对于单个的、少量的或多个芯片模件合适的结构形式包括It can be seen that WO-A-96 096 46 shows a so-called Polymer Columnar Grid Array (PSGA) which combines the advantages of Ball Grid Array (BGA) with the advantages of MID technology. This new structural form, called Polymer Column Grid Array (PSGA), is based on Ball Grid Array (BGA), where the concept of "Polymer Column" should refer to co-formation during die-casting of the substrate. polymer protrusions. Suitable configurations for this new single, small or multiple chip module include

——一个由电绝缘的聚合物压铸而成的三维基底;- a three-dimensional base die-cast from an electrically insulating polymer;

——在基底底面上平面布置的,并且在压铸过程中共同成形的聚合物突起;- polymeric protrusions arranged planarly on the bottom surface of the substrate and co-formed during the die-casting process;

——在聚合物突起上,通过一个可拆卸的终端表面而成的外部接线点- External terminal points via a detachable terminal surface on polymer protrusions

——至少在基底底面上形成的导线组,其将外部接线点与内部接线点相连接。- a conductor set formed at least on the bottom surface of the substrate, which connects the external connection points with the internal connection points.

——至少布置在基底上的一个芯片,它的接线点与内部接线点导电性地连接在一起。- at least one chip arranged on a substrate, the connection points of which are electrically conductively connected to the internal connection points.

在此基底的压铸过程中,聚合物突起的制造是简单的,并且成本也是适宜的。除此之外,也可以优选使用最少的费用在聚合物突起上制造外部接线点,而同时应用MID技术或者SIL技术制造导线组。通过利用SIL技术所优选的激光最精细结构化,在聚合物突起之上,在一个精细的网栅内,可以实现一个高接线点数的外部接线点。During die-casting of this substrate, the manufacture of the polymer protrusions is simple and cost-effective. In addition, it is also possible, preferably with minimal effort, to produce the external connection points on the polymer protrusions, while at the same time producing the wire groups using MID technology or SIL technology. By utilizing the laser-finest structuring preferred by SIL technology, a high number of external connection points can be achieved on top of the polymer protrusions in a fine grid.

还要强调的是,聚合物突起的温度的增加,与装纳模件的电路温度和基底的温度增加相对应。由此,在频繁的温度变化的情况下,可以实现焊接的高度的可靠性。It should also be emphasized that the increase in temperature of the polymer protrusions corresponds to an increase in the temperature of the circuit housing the module and the temperature of the substrate. A high degree of reliability of the soldering can thus be achieved in the case of frequent temperature changes.

由US-A-5 477 087中也可以看出,在与电子元件,比如半导体连接时,聚合物突起的弹性特性与温度特性得以充分利用。为此,首先在电子元件的铝电极上产生一个起阻挡作用的金属层,在这层金属层上形成聚合物突起。然后这个已经成形的聚合物突起被一层金属所覆盖,这种金属具有较低的熔点。It can also be seen from US-A-5 477 087 that the elastic properties and temperature properties of the polymer protrusions can be fully utilized when connecting with electronic components, such as semiconductors. To do this, a barrier metal layer is first created on the aluminum electrodes of the electronic component, on which the polymer protrusions are formed. The formed polymer protrusion is then covered with a layer of metal, which has a lower melting point.

如果通过回流焊接来实现聚合物柱状栅格点阵或者其它带有金属喷涂层的电气元件与布线例如印刷电路板之间的连接,则存在这种危险,即融化了的焊剂沿着这种聚合物突起的金属喷涂层被向上引起来。但这种在约75%的聚合物突起处出现的现象本身会导致在聚合物突起之下不可复制的焊剂层厚度,甚至可能会与相邻的导体线路短路。If the connection between a polymer columnar grid lattice or other metallized electrical component and a wiring such as a printed circuit board is achieved by reflow soldering, there is a danger that the melted flux will The protruding metallized coating is drawn upwards. But this phenomenon, which occurs at about 75% of the polymer protrusions, itself leads to an unreproducible solder layer thickness under the polymer protrusions, which may even short-circuit adjacent conductor lines.

权利要求1给出的本发明要解决的问题是,在一个带有用于与布线相焊接的聚合物突起的基底中保证在聚合物突起之下产生可复制的焊剂层厚度。The problem to be solved by the invention set forth in claim 1 is to ensure a reproducible solder layer thickness below the polymer protrusions in a substrate with polymer protrusions for soldering to wiring.

本发明基于以下知识,即,通过带有至少一个隆起的聚合物突起的几何形状,由此形成的台肩或者由此而形成的多个台肩,阻止融化了的焊剂的跃升。因此在聚合物突起之下可以产生可复制的焊剂层厚度,聚合物突起本身可以保证产生一个高度可靠的焊接。这也可以使因为跃升了的焊剂而造成的短路的危险成为不可能。The invention is based on the knowledge that, by means of the geometry of the polymer protrusion with at least one bulge, the shoulder or the shoulders formed thereby prevent the jumping of molten solder. Reproducible solder layer thicknesses can thus be produced under the polymer bumps which themselves ensure a highly reliable soldering. This can also eliminate the risk of short circuits due to jumping flux.

本发明的优选方案在从属权利要求中给出。Preferred developments of the invention are given in the dependent claims.

按照权利要求2的设计方案,特别适用于通过压铸制造带有集成聚合物突起的基底。在权利要求3中所给出的聚合物柱状栅格阵列的圆柱形隆起的尺寸致使焊接特别可靠。The refinement according to claim 2 is particularly suitable for the production of substrates with integrated polymer protrusions by die casting. The dimensions of the cylindrical elevations of the polymeric columnar grid array specified in claim 3 render the welding particularly reliable.

在权利要求4,5和6中所说明的那些变型方案,对于聚合物突起的几何形状,也可以通过台肩来阻止那些焊剂的跃升。因此,存在这样的可能性,可以调整聚合物突起的几何形状以配合具体的应用形式。In the variants specified in claims 4, 5 and 6, for the geometry of the polymer protrusions, those solder jumps are also prevented by shoulders. Thus, the possibility exists that the geometry of the polymeric protrusions can be tuned to suit a specific application form.

本发明的实施例在图中示出并在下面进行更进一步的描述。Embodiments of the invention are shown in the drawings and described further below.

图1所示的是一个带有整体成形的阶梯形的聚合物突起的基底截断的视图。Figure 1 shows a sectional view of a substrate with integrally formed stepped polymeric protrusions.

图2所示的是图1所示基底的一个聚合物突起,在其上设有金属涂层和由聚合物突起引开的导线组。FIG. 2 shows a polymeric protrusion of the substrate shown in FIG. 1 with a metal coating and a set of wires extending from the polymeric protrusion.

图3所示的是,在图2中所示的聚合物突起与布线之间的焊接。Figure 3 shows the soldering between the polymer bumps shown in Figure 2 and the wires.

图4所示的是,带有双层阶梯形聚合物突起的第一种变型。Figure 4 shows a first variant with double-layer stepped polymer protrusions.

图5所示的是带有布置在一个台肩上的多个隆起的聚合物突起的第二种变型。Shown in FIG. 5 is a second variant of polymer protrusions with protrusions arranged on a shoulder.

图6所示的是,带有一个环形隆起的聚合物突起的第三种变型。Figure 6 shows a third variant of the polymeric protrusion with an annular ridge.

图1所示的是一个基底S的一个剖面图,在压铸基底时,为了形成聚合物柱状栅格阵列,在它的底面U上布置了共同成形的聚合物突起PS,或者说是聚合物柱。可以看出,简单的锥形构造的聚合物突起PS在其底端设有圆柱形隆起E。圆柱形隆起E的直径这样来定尺寸,即产生一个向其它聚合物突起PS过渡的环形台肩ST。在所述的实施例中显示出,一个聚合物突起PS在其底座范围中其直径D为400μm,而作为基底S底面U与台肩ST之间的间距的高度H为400μm。圆柱形隆起E的直径d为160μm,而圆柱形隆起E的高度h为50μm。Figure 1 shows a cross-sectional view of a substrate S on which co-formed polymer protrusions PS, or polymer columns, are arranged on its bottom surface U in order to form a polymer columnar grid array during die casting. . It can be seen that the polymer projection PS of simple conical configuration is provided with a cylindrical elevation E at its bottom end. The diameter of the cylindrical elevation E is dimensioned in such a way that an annular shoulder ST transitions into the further polymer projection PS. In the exemplary embodiment described, it is shown that a polymer protrusion PS has a diameter D of 400 μm in the region of its base and a height H as the distance between the bottom surface U of the substrate S and the shoulder ST of 400 μm. The diameter d of the cylindrical ridge E was 160 μm, and the height h of the cylindrical ridge E was 50 μm.

图2所示的是对图1所示突起在基底S整个平面上所获得的一层金属层进行激光最精细结构化而来的一个聚合物突起PS。可以看出,包括圆柱形隆起E在内的聚合物突起PS设有一个金属涂层M,一个导线组LZ由此基底S底面U上的聚合物突起PS引导。FIG. 2 shows a polymer protrusion PS obtained by laser finest structuring of a metal layer obtained by the protrusion shown in FIG. 1 over the entire plane of the substrate S. FIG. It can be seen that the polymeric protrusion PS including the cylindrical elevation E is provided with a metal coating M, from which the polymeric protrusion PS on the bottom surface U of the substrate S leads a lead group LZ.

图3所示的是在图2中所示的聚合物突起PS与一个布线V之间的焊接,此布线在所示的实施例中作为印刷电路板LP与在表面上布置有连接垫圈构造而成。可以清楚地看出,在回流焊接时,全部焊剂L停留在台肩ST和连接垫圈AP之间的范围中;并不像在没有阶梯结构的聚合物突起时,焊剂在侧面一直跃升到导线组LZ处。通过阶梯形的聚合物突起PS的几何形状,保证了焊剂L的可重复出现的层厚度。FIG. 3 shows the soldering between the polymer protrusion PS shown in FIG. 2 and a wiring V, which in the shown embodiment is configured as a printed circuit board LP with connection gaskets arranged on the surface. become. It can be clearly seen that during reflow soldering, the entire flux L stays in the area between the shoulder ST and the connection gasket AP; it does not jump up to the wire group on the side as in the polymer protrusion without the stepped structure LZ office. A reproducible layer thickness of the solder L is ensured by the geometry of the stepped polymer protrusions PS.

在图4中所示的第一种变型是称作PS的聚合物突起,它整体地成形于一个基底S1上。通过这个聚合物突起PS1的一个两层阶梯构造出一个环形隆起E1和一个圆柱形隆起E10。相应的环形台肩被称作ST1或ST10。The first variant shown in FIG. 4 is a polymeric protrusion called PS, which is integrally formed on a substrate S1. An annular elevation E1 and a cylindrical elevation E10 are formed by a two-level step of the polymer protrusion PS1. The corresponding annular shoulders are referred to as ST1 or ST10.

在图5中所示的第二种变型是称作PS2的聚合物突起,它整体地成形于一个基底S2上。在一个作为平台而构造的台肩ST2上,布置有总共四个有一定间距的圆柱形隆起E2。The second variant shown in Figure 5 is a polymeric protrusion called PS2, which is integrally formed on a substrate S2. A total of four spaced apart cylindrical elevations E2 are arranged on a shoulder ST2 configured as a platform.

在图6中所示的第三种变型是称作PS3的聚合物突起,它整体地成形于一个基底S3上。这里有一个环形隆起E3处于一个同样作为平台而构造的台肩ST3之上。A third variant shown in FIG. 6 is a polymeric protrusion called PS3, which is integrally formed on a substrate S3. Here an annular elevation E3 rests on a shoulder ST3 which is likewise designed as a platform.

除了在图1到6中所示的简单的具有截锥形状的聚合物突起之外,也可以应用聚合物突起或隆起的其它横截面形式。但在此处,至少一个台肩的构造有决定性的作用,此台肩在回流焊接时阻止焊剂的沿侧面的跃升。In addition to the simple polymer protrusions with frustoconical shape shown in FIGS. 1 to 6 , other cross-sectional forms of polymer protrusions or elevations can also be used. Here, however, the configuration of at least one shoulder which prevents a lateral jump of the flux during reflow soldering plays a decisive role.

Claims (6)

1. be used for substrate (S with wiring (V) welding; S1; S2; S3), the polymer bumps (PS that has at least two metal sprayings; PS1, PS2; PS3) with at substrate (S; S1; S2; S3) lower surface (U) is gone up by polymer bumps (PS; PS1; PS2; PS3; ) guiding lead group (LZ), wherein, these polymer bumps (PS; PS1; PS2; PS3) have at least one and be used to construct at least one protuberance (E; E1; E10; E2; E3) shoulder (ST; ST1, ST10; ST2; ST3).
2. according to the described substrate of claim (S), it is characterized in that the cylindrical protuberance (E) with polymer bumps (PS) arranged concentric.
3. substrate according to claim 2 (S) is characterized in that, the diameter (d) of cylindrical protuberance (E) at 100 μ m between the 300 μ m, its height (h) at 25 μ m between the 250 μ m.
4. substrate according to claim 1 (S1) is characterized in that, polymer bumps (PS1) is provided with two protuberance (E1; E10) and two shoulder (ST1; ST10).
5. substrate according to claim 1 (S2) is characterized in that, polymer bumps (PS2) is provided with the protuberance a plurality of at regular intervals (E2) that is arranged on the shoulder (ST2).
6. substrate according to claim 1 (S3) is characterized in that, polymer bumps (PS3) is provided with the ring uplift (E3) that is arranged on the shoulder (ST3).
CN00807834A 1999-05-20 2000-05-11 Substrate with at least two metallized polymer bumps for soldered connection to wiring Pending CN1352805A (en)

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DE19923247 1999-05-20
DE19923247.4 1999-05-20

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DE10145348C1 (en) * 2001-09-14 2003-03-27 Siemens Dematic Ag Intermediate carrier for electronic component has suction used for removal of excess solder at foot of contact projections formed integral with plastics carrier body
DE10217700A1 (en) * 2002-04-20 2003-11-06 Festo Ag & Co Injection-molded circuit board, carries ramped tracks terminating at studs with laser-beam activated upper surfaces forming flip-chip connections
DE10217698B4 (en) * 2002-04-20 2008-04-24 Festo Ag & Co. Electrical switching arrangement with an injection-molded circuit carrier
DE10227305A1 (en) * 2002-06-19 2003-09-04 Siemens Dematic Ag Electrical multiple layer component module used in polymer stud grid array technology comprises a second three-dimensional substrate arranged on first three-dimensional substrate with intermediate connections connected to contacts
JP2005353740A (en) 2004-06-09 2005-12-22 Toshiba Corp Semiconductor element and semiconductor device
DE102015005205A1 (en) * 2015-04-23 2016-10-27 Multiple Dimensions Ag Carrier body for receiving electronic circuits

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JPH0832183A (en) * 1994-05-12 1996-02-02 Furukawa Electric Co Ltd:The Semiconductor device package
ES2148564T3 (en) * 1994-09-23 2000-10-16 Siemens Nv MATRIX BLOCK WITH POLYMER PROJECTIONS.
JPH0969401A (en) * 1995-08-31 1997-03-11 Oki Electric Ind Co Ltd Surface mounting component
US5736790A (en) * 1995-09-21 1998-04-07 Kabushiki Kaisha Toshiba Semiconductor chip, package and semiconductor device
JPH09275106A (en) * 1996-04-04 1997-10-21 Nec Corp Bump structure and formation method
JP2828069B2 (en) * 1996-10-11 1998-11-25 松下電器産業株式会社 Soldering method of work with bump
KR100239406B1 (en) * 1996-12-27 2000-01-15 김영환 Surface mounted semiconductor package and method of manufacturing the same
JPH10270819A (en) * 1997-03-28 1998-10-09 Ngk Spark Plug Co Ltd Electronic component for surface mounting and method of manufacturing the same

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TW465263B (en) 2001-11-21
WO2000072378A1 (en) 2000-11-30
KR100426044B1 (en) 2004-04-06
JP2003500858A (en) 2003-01-07
KR20020005753A (en) 2002-01-17

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