CN1227535C - Six-axis acceleration sensor with double E-shaped circular diaphragm cross beam structure - Google Patents

Abstract

The present invention discloses a six-dimensional acceleration sensor for simultaneously acquiring full acceleration information, namely, a six-axis acceleration sensor with a double E-type circular diaphragm cross beam structure, which can simultaneously realize the measurement of three-axis linear acceleration and angular acceleration in three-dimensional space coordinates. The sensor uses thick film technology, a circular diaphragm and a cross beam made of ceramic material as a sensitive elastic matrix, a structure composed of a double E-type circular diaphragm and a cross beam, and sintering a thick film force sensitive resistor on the ceramic matrix. Through a special bridge assembly method and decoupling, it realizes the simultaneous measurement of three-dimensional linear acceleration and three-dimensional angular acceleration. It is mainly used in dynamic compensation, dynamic decoupling and acceleration feedback control of multi-axis finger force and wrist force sensors of various robot dexterous hands.

Description

A six-axis acceleration sensor with double E-shaped circular diaphragm cross-beam structure

technical field

The invention relates to the field of robot sensors such as humanoid robots, multi-fingered dexterous hands, robot compliance control, and virtual reality technology, and in particular to an integrated sensor structure capable of simultaneously realizing six-axis acceleration information sensitivity, and realizing three-axis A six-axis acceleration sensor with a double E-type circular diaphragm cross-beam structure with independent acquisition methods for linear acceleration and three-axis angular acceleration information.

Background technique

Along with the development of robot technology, since the beginning of the 1980s, countries have started research on various sensors for robots, and there is no report on the products and research of small-scale integrated six-axis acceleration sensors. From a structural point of view, in recent years, American AD and JR3 companies have produced miniaturized three-dimensional acceleration sensors. Generally, these sensors use piezoelectric, piezoresistive or photoelectric, optical fiber and other methods. In the aviation field, gyroscopes are generally used as navigation control components.

At present, the widely used micro-electro-mechanical technology proposes and produces basically uniaxial to triaxial acceleration sensors, while angular acceleration sensors are mainly uniaxial, whether based on piezoelectric, piezoresistive, etc. Sensors have a common feature that there are inertial masses inside the sensor;

In addition, there is a three-axis acceleration sensor that uses three independent uniaxial linear acceleration sensors to integrate using an orthogonal method. An important problem with this method is that the center of mass of the inertial mass is inconsistent, and it is not reflected in the same space coordinate system. Measurement. In fact, in robot research, the movement of the controlled object is generally carried out in three-dimensional space, and the measured object has three-dimensional linear acceleration and three-dimensional angular acceleration during the movement process.

The acceleration sensor is one of the most important internal sensors of the robot. Due to the change of the position/attitude and movement of the load during the movement of the robot, it will bring additional dynamic load, and the movement of the robot arm of the intelligent robot is carried out in three-dimensional space. , each joint of the manipulator or the manipulator moves at the same time, so in the working process, the load has three-dimensional linear acceleration and three-dimensional angular acceleration in three-dimensional space.

For the manipulative intelligent robot based on force feedback compliant control, the force measurement during the control process is realized through the six-axis force sensor installed on the mechanical wrist, and the additional load is generated due to the position/posture and motion changes of the load. The contact force information required for force feedback control cannot be obtained from the output of the force sensor. If the position, attitude, and acceleration information of each joint of the manipulator can be obtained while performing force measurement, the information can be directly used to compensate the position/attitude and inertial force, and obtain six-dimensional contact force and load force information that is truly dynamically decoupled. .

Contents of the invention

The purpose of the present invention is to provide a new type of six-axis acceleration sensor with a double E-type circular diaphragm cross beam structure that can obtain six-dimensional acceleration information, including a method for measuring three-dimensional linear acceleration and three-dimensional angular acceleration information. , to meet the application needs of the above research fields.

The technical solution of the present invention is: a six-axis acceleration sensor with double E-shaped circular diaphragm cross beam structure, including a flange plate fixing base (1), a lower E-shaped circular diaphragm (2), and an inertial mass (3) , Upper E-type circular diaphragm (4), upper diaphragm connecting disc (5), cross beam (6), housing (7), sealing ring (8), bottom cover plate (9), lower diaphragm connecting disc Sheet (10), they jointly constitute the six-axis acceleration sensor of double E type circular diaphragm cross beam structure, it is characterized in that:

When metal is used as the elastic body, the upper E-shaped circular diaphragm (4), the lower E-shaped circular diaphragm (2) and the cross beam (6) in the middle are an integrated structure, that is, the cross beam (6) is docked on the upper diaphragm The connection disc (5) and the lower diaphragm connection disc (10) are fixed in the cross groove of the disc (10), and the upper surface of the upper diaphragm connection disc (5) is connected with the upper E-shaped round diaphragm (4), The periphery of the upper E-shaped circular diaphragm (4) is a uniformly distributed inertial mass (3), and the mass (3) maintains inertia in three-dimensional space to generate inertial force and act on the elastic body;

The lower surface of the lower diaphragm connection disc (10) is connected with the lower E-shaped circular diaphragm (2), and the lower E-shaped circular diaphragm (2) is fixed together with the sensor base (1).

The casing (7) and the base (1) are screwed together, and the cavity between them is filled with oil medium, and the sealing ring (8) is installed at the connection part between the casing (7) and the base (1), for Prevent the medium in the cavity from overflowing. The oil medium filled in the cavity is used to achieve proper damping control to improve the sensor output signal characteristics.

The materials of the lower E-shaped circular diaphragm (2), the cross beam (6) and the upper E-shaped circular diaphragm (4) are 97% Al ₂ O ₃ sintered body ceramics.

This three-dimensional structure can place linear acceleration a _x , a _y measurement and angular acceleration α _x , α _y measurement on two E-shaped circular diaphragms respectively, and the installation base (1) is convenient for mechanical connection with the measured object , the inertial mass block (3) brings inertial force when the motion of the measured object changes and acts on the elastic body of the upper and lower E-shaped circular diaphragms (4), (2) and the cross beam (6).

The lower E-shaped circular diaphragm (2), the cross beam (6), and the upper E-shaped circular diaphragm (4) are sintered with ruthenium-based thick-film force sensitive resistors, and their positions are shown in Figures 3 and 4. The upper and lower E-shaped circular diaphragms (4), (2) have symmetrical arrangement of resistors in the sensitive surface, and each resistor has the same distance from the center of the circle. The thick film force sensitive resistor realizes the six-dimensional acceleration information through different sensitive bridge layout Acquire, and eliminate the coupling between each other through decoupling, and at the same time realize the independent acquisition of full acceleration information of three-dimensional linear acceleration and three-dimensional angular acceleration;

The angular acceleration information acquisition sensitive bridge in the X and Y directions is arranged perpendicular to each other in the plane of the upper E-shaped circular diaphragm (4), and its thick-film force sensitive resistor is arranged in the same direction as the lower E-shaped circular diaphragm (2). :

The resistances R1y, R2y, R3y, and R4y on the sensitive surface of the upper E-shaped circular diaphragm (4) are used to realize the measurement of the angular acceleration α _x ;

The resistances R1x, R2x, R3x, and R4x on the sensitive surface of the upper E-type circular diaphragm (4) are used to realize the measurement of the angular acceleration α _y ;

The four thick film resistors on the cross beam (6) are arranged in the same beam plane, and are symmetrically arranged along the up and down, left and right symmetry axes, and are used to obtain the information of the moment α _z ;

The two sensitive directions of the lower E-shaped circular diaphragm (2) and the upper E-shaped circular diaphragm (4) are required to be consistent, and the force information in the X and Y directions is obtained from the sensitive bridge resistors R1x, R2x, R3x, R4x and R1y, R2y, R3y, R4y are arranged perpendicular to each other in the plane of the lower E-type circular diaphragm (2). The sensitive resistors R1z, R2z, R3z, and R4z for acquiring linear acceleration information in the Z direction are arranged on the lower E-shaped circular diaphragm (2) in a direction intersecting 45 degrees along the X and Y sensitive directions, wherein:

The resistors R1x, R2x, R3x, and R4x on the sensitive surface of the lower E-type circular diaphragm (2) are used to measure the linear acceleration _ax ;

The resistors R1y, R2y, R3y, and R4y on the sensitive surface of the lower E-type circular diaphragm (2) are used to measure the linear acceleration a _y ;

The resistors R1z, R2z, R3z, and R4z on the sensitive surface of the lower E-type circular diaphragm (2) are used to measure the linear acceleration _az ;

The resistors R1z, R2z, R3z, and R4z on the sensitive surface of the upper E-shaped circular diaphragm (4) provide redundant information on the line acceleration _az ;

The double E-type circular membrane structure connected by the cross beam of the present invention is used to realize the simultaneous measurement of the three-dimensional linear acceleration and the three-dimensional angular acceleration in the same space coordinate system, and the present invention changes the upper and lower double E-type membranes (4), (2) The size of the structure and the position of the sensitive unit can realize the range and sensitivity adjustment of the sensors a _x , a _y , a _z , α _x , α _y .

In the aforementioned structure, the cross beam (6) is not only the connecting body and the force transmission member of the upper and lower double E-shaped circular membranes, but also a sensitive elastic body that obtains the information of the angular acceleration α _z in the Z direction, and the actual output signal and the input The linearity between force and load is excellent, and other force components have no effect on it in theory, and the coupling interference in the actual measurement is very small. The range and sensitivity of the acquisition of angular acceleration information in the Z direction can be easily adjusted by changing the size of the cross beam, which overcomes the problem that the stiffness in the Z direction is greatly different from that in other directions, which causes a large difference in the sensitivity of the acceleration components in each direction.

The above-mentioned six-dimensional acceleration sensor with double E-shaped circular membrane structure connected by cross beams and its signal acquisition method are realized by thick film technology, and the mask is made by photolithography according to the design position of the sensitive unit. Diaphragm. The thick film paste with force-sensitive properties is printed on the corresponding position on the sensor elastic body by screen printing, and then sintered at a certain temperature. It is very convenient to adjust various parameters and realize the process in the process of sensor production.

The structure of the sensor and the arrangement of sensitive bridges can be applied to metal elastic body strain type six-dimensional acceleration sensors or devices for obtaining six-dimensional acceleration information, and can be applied to six-dimensional acceleration sensors or devices with different size and range requirements.

The beneficial effects of the present invention are: the present invention is of great significance to the urgent need of a six-dimensional acceleration sensor with small size and small range in the micro-drive operation technology, multi-finger dexterous hand and telepresence technology research, which are increasingly active in the current robotics research. .

The acquisition of six-dimensional acceleration information is achieved by sintering sensitive elements on the double E-shaped circular diaphragm and cross beam with ceramics as the elastomer material by using thick film technology. This structure, process and signal acquisition method are easy to realize from miniaturization The design of various six-dimensional acceleration sensors with different ranges from size to large size, and the sensitivity adjustment of the sensor in all directions can be realized by changing the structural parameters such as the thickness and size of the diaphragm and beam, so as to meet the requirements of the robot's full perception system in different occasions. Requirements.

The double E-type circular membrane structure connected by cross beams adopted by the present invention can realize simultaneous acquisition of three-dimensional linear acceleration and three-dimensional angular acceleration information, solve the contradiction between obtaining linear acceleration information and angular acceleration information in the form of a force rectangle, and overcome Solved the strong coupling problem of general multi-dimensional acceleration sensor;

The cross-beam form structure adopted in the present invention is not only the connection and force transmission member of the double E-type circular membrane of the present invention, but also a sensitive elastic body for obtaining the Mz moment. This independent cross-beam structure overcomes the angular acceleration in the Z direction and the The problem of mutual interference between linear acceleration and angular acceleration in other directions, and the adjustment of sensitivity can be easily realized by changing the structural size of the cross beam, which overcomes the problem of inconsistency between the stiffness of the Z direction and the stiffness of other directions in some current patents, and has a large Adjust for space and flexibility.

Below in conjunction with accompanying drawing and embodiment the present invention is described in further detail:

Description of drawings

Fig. 1 is a schematic cross-sectional view of the external structure of the present invention.

Figure 2 is a cross-sectional view of the structure size of the metal circular diaphragm.

Fig. 3 is a schematic diagram of the arrangement position of the sensitive resistors on the upper and lower E-shaped circular diaphragms.

Fig. 4 is a schematic diagram of the arrangement position of the sensitive resistor on the ceramic of the cross beam in the middle.

Figure 5 is the strain diagram of the E-type circular diaphragm under the action of the force _ax , _ay , _az on the sensor.

Figure 6 is the strain diagram of the E-type circular diaphragm under the action of moment α _x and α _y on the sensor.

Fig. 7 is a three-dimensional schematic diagram of strain and a sensitive plane strain diagram of the sensor under the action of torque α _z .

Fig. 1 is a schematic cross-sectional view of the external structure of the present invention. The two E-shaped circular diaphragms 2 and 4 are fixed together through the middle ceramic cross beam 6, and the gap between the cross beam 6 and the E-shaped circular diaphragms 2 and 4 is fixed by the diaphragm and the disc fixed on the two circular diaphragms. 5. The cross recess connection on 10.

The coordinates of the whole six-dimensional force sensor are based on the surface center O of the above E-shaped circular diaphragm 4, and the fixing of the metal disc is also based on O as the center of the circle, and the width of the cross groove is equal to the thickness of the cross beam 6, and the direction is the same as that of the lower E The direction of the sensitive resistors on the E-type circular diaphragm 2 and the last E-type circular diaphragm 4 is consistent.

The outer diameter of the upper E-type circular diaphragm 4 is connected to the inertial mass block 3, and the outer diameter of the installation base 1 is greater than the outer diameter of the inertial mass block. For example, the outer diameter of the inertial mass block 3 can be selected as φ18mm, and the outer diameter of the installation base 1 is selected as φ20mm. Different materials should be selected for the inertial mass 3 and the installation base 1. The material and size of the inertial mass 3 should be selected according to the sensitivity and range required by the designed sensor. The installation base 1 can be made of aluminum alloy or other metal materials. , the two can also choose the same metal material according to the inertial mass.

The aluminum alloy diaphragms of the E-type circular diaphragms 2 and 4 and the cross beam 6 are connected. The outer diameter of the discs 5 and 10 is φ5mm. A cross groove with a width of 0.2mm is processed on the surface pasted with the ceramic diaphragm. The width of the groove is Equal to the thickness of the cross beam 6, the width of the groove is the same as the width of the ceramic cross beam 6, to ensure that there is no clearance between each other, the width of the ceramic cross beam 6 is 5mm, and the outer surface of the disc 5, 10 is connected with the circular diaphragm. The diameter is the same, and the height is selected as 12mm.

In Figures 1 and 2, the upper E-shaped circular diaphragm 4 and the metal disc 6 are fixed together by 703 glue, and the upper and lower E-shaped circular diaphragms have a symmetrical structure. For this type of six-dimensional acceleration sensor with a metal elastic body structure, the upper and lower E-shaped circular diaphragms connect the circular plates 5, 10 and the cross beam 6, and the upper and lower circular diaphragms can be made into an integral structure.

The structural shape of the upper and lower E-shaped circular diaphragms 4 and 2 connecting the upper and lower circular diaphragms 5 and 10 is shown in FIG. 3 . Wherein, a cross groove with a width of 0.2 mm is processed in the middle of one side fixedly connected with the cross beam 6 to facilitate connection with the cross beam 6 .

FIG. 3 and FIG. 4 are schematic diagrams showing the position of the sintered resistance on the upper and lower E-shaped circular diaphragms 4 and 2 and the cross beam 6 ceramics. Fig. 3 shows the resistance position diagram on the sensitive surface of the upper and lower E-shaped circular diaphragms 4 and 2, wherein: the resistors R1x, R2x, R3x, and R4x on the sensitive surface of the lower E-shaped circular diaphragm 2 are used to realize the linear acceleration a _x Measurement;

The resistors R1y, R2y, R3y, and R4y on the sensitive surface of the lower E-shaped circular diaphragm 2 are used to measure the linear acceleration a _y ;

The resistors R1z, R2z, R3z, and R4z on the sensitive surface of the lower E-shaped circular diaphragm 2 are used to measure the linear acceleration _az ;

The resistors R1y, R2y, R3y, and R4y on the sensitive surface of the upper E-type circular diaphragm 4 are used to measure the angular acceleration α _x ;

The resistors R1x, R2x, R3x, and R4x on the sensitive surface of the upper E-shaped circular diaphragm 4 are used to realize the measurement of the angular acceleration _αy .

The resistors R1z, R2z, R3z, and R4z on the sensitive surface of the upper E-shaped circular diaphragm 2 can provide redundant information about the linear acceleration _az .

The 24 resistors in the sensitive surface of the upper and lower E-type circular diaphragms 4 and 2 are symmetrically arranged according to the position shown in Figure 5, and the middle 6 resistors of each diaphragm are located at a relative diameter of φ6 to the center of the circle, and each resistor is at the same distance from the center of the circle.

Fig. 4 shows a schematic diagram of the sintering position of a sensitive in-plane thick-film resistor on the ceramic crossbeam 6. The resistors R1, R2, R3, and R4 in the figure are used to measure the angular acceleration α _z in the Z direction. The four resistors are according to the figure The positions are arranged symmetrically and as far away from the axis of symmetry as possible, and the direction of the resistor intersects the axis of symmetry at an angle, for example, the direction of 30 degrees in the figure.

Fig. 5 is a cross-sectional view of the strain of the sensor diaphragm under three different inertial forces. Among them, A means that the sensor is affected by the inertial force Fx in the X direction in the plane shown in the figure. Since the force acting plane is on the upper E-shaped circular diaphragm 4, the resistances R1x, R2x, R3x, R4x does not change, the lower E-shaped circular diaphragm 2 produces deformation as shown in the figure, and the bridge composed of resistors R1x, R2x, R3x, R4x on the lower E-shaped circular diaphragm 2 has an output, and the output signal is consistent with the applied The force Fx satisfies the functional relationship, and the applied force can be obtained through the output value, while the resistance values of other resistors on the circular diaphragm do not change, and no output is generated. The magnitude of the inertial force in the X direction is proportional to its linear acceleration.

For the Y direction, the input and output and the force deformation of the sensor are the same as the X direction, and the measurement principle is also the same. The inertial force in the Y direction is proportional to its linear acceleration.

Fig. 5B shows the deformation of the sensor circular diaphragm along the Y-direction inertial force Fy.

Figure 5C shows that the sensor is deformed when it is acted by the inertial force F shown in the figure, and its direction is consistent with the Z direction. Since R1z, R2z, R3z, and R4z on the upper and lower E-type diaphragms 4 and 2 all change, the bridge output and the applied force satisfy a certain functional relationship, and the inertial force Fz can be obtained through the output value , to realize the measurement of the inertial force Fz. In actual use, the output of the lower sensitive surface bridge is used, and the output of the sensitive surface bridge is used as redundant information.

Figure 6 is the strain diagram of the E-shaped circular diaphragm under the action of the corresponding inertia moments Mx and My when the measured object has angular acceleration α _x , α _y .

FIG. 6A is a deformation sectional view of the sensor when it is subjected to the moment of inertia Mx, so that the upper and lower E-shaped circular diaphragms 4 and 2 are deformed as shown in the figure.

The resistances R1y, R2y, R3y, and R4y on the sensitive surface of the sensor all change, and the two sets of bridges will generate output. The output generated by the change in angular acceleration and the change in sensor resistance satisfies a fixed functional relationship.

Figure 6B shows the deformation of the sensor when it is subjected to the moment of inertia My, which produces the same effect as the moment Mx. As shown in Figure 6B,.

Fig. 7 is a three-dimensional schematic diagram of the strain under the action of the moment of inertia Mz generated when the object to be measured by the sensor has an acceleration α _z and a diagram of the sensitive plane strain.

Figure 7 shows the deformation of the middle cross beam 6 under the action of inertial moment on the sensor. Figure 7(A) shows the strain of the sensitive surface of the cross beam, and Figure 7(B) shows the strain under the same inertial moment as shown in Figure (A). stereogram. Under the action of the moment of inertia as shown in the figure, the resistors R1 and R4 are subjected to tensile stress, and R2 and R3 are subjected to compressive stress. Through a specific electric bridge, an output signal that is a function of the applied moment of inertia Mz is output, so that it can be realized The measurement of the moment of inertia Mz, and in this case, no signal output from other bridges. The magnitude of the moment of inertia is proportional to the measured angular acceleration.

Specific embodiments: the present invention adopts the thick film process, and uses the screen printing technology to print the force sensitive resistor paste and the conductor paste on the specific position of the ceramic substrate of the E-shaped circular diaphragm and the cross beam, and forms 24 thick plates after sintering. The membrane strain resistance constitutes six groups of bridges for obtaining six-dimensional acceleration information respectively.

In order to realize the measurement of small range and high sensitivity, the thickness of the E-type circular diaphragm is 0.2-0.4mm, and the thickness of the cross beam is 0.2-0.4mm. When metal is used as the elastic body, the upper and lower E-shaped circular membranes and the middle cross beam can be processed into an integrated structure, and the three-dimensional linear acceleration and three-dimensional angular acceleration information can be realized by pasting the strain gauge resistance according to the above-mentioned sensitive unit layout. Acquisition, the range and sensitivity adjustment in each direction in this way can be realized by changing the structural size of the upper and lower E-shaped circular membranes or the middle cross beam part, so that the present invention can be applied to six-dimensional acceleration sensors that require small range and high sensitivity and use Six-dimensional acceleration sensor device.

In order to realize the above-mentioned structure, the processing and manufacturing method of the present invention includes the following steps: first process two circular ceramic diaphragms 2, 4 and the ceramic cross beam 6 respectively, and sinter the thick film force sensitive resistor at the predetermined position above;

Next, process two E-shaped circular diaphragms with a diameter of φ5mm and a thickness of 2mm to connect the discs 5 and 10, process a cross groove in the middle of one side of the alloy disc, and then connect the E-shaped circular diaphragms to the discs 5 and 10. The groove surface is pasted on the center of the non-sensitive surface of the ceramic circular diaphragm, while ensuring that the cross groove of the metal disc is consistent with the sensitive direction of the E-type circular diaphragm;

Finally, the ceramic cross beam 6 is butted in the cross grooves of the two E-type diaphragms connecting the discs 5, 10 and fixed.

In order to facilitate the connection of bridge power supply input and signal output leads, silver lead solder joints are sintered on the edge of each E-shaped circular diaphragm, and the lead wires connect the thick film resistors together according to the predetermined sensitive bridge layout and signal acquisition method. Before each E-shaped circular diaphragm is fixed with the cross beam, firstly weld the input and output leads on each diaphragm to the inner edge of the silver solder joint of the E-shaped circular diaphragm. After the upper and lower E-shaped circular diaphragms of the sensor are fixed, the outer leads are welded to the outer edge of the lower E-shaped circular diaphragm and provided to the external transmitter.

Claims (1)

1. A six-axis acceleration sensor with a double E-shaped circular diaphragm cross beam structure, including a flange plate fixed base (1), a lower E-shaped circular diaphragm (2), an inertial mass (3), an upper E-shaped circular Diaphragm (4), upper diaphragm connection disc (5), cross beam (6), housing (7), sealing ring (8), bottom cover plate (9), lower diaphragm connection disc (10), and Features: When metal is used as the elastic body, the upper E-shaped circular diaphragm (4), the lower E-shaped circular diaphragm (2) and the cross beam (6) in the middle are an integrated structure, that is, the cross beam (6) is docked on the upper diaphragm The connection disc (5) and the lower diaphragm connection disc (10) are fixed in the cross groove of the disc (10), and the upper surface of the upper diaphragm connection disc (5) is connected with the upper E-shaped round diaphragm (4), The periphery of the upper E-shaped circular diaphragm (4) is a uniformly distributed inertial mass (3), the mass (3) maintains inertia in three-dimensional space to generate inertial force and acts on the elastic body, and the lower diaphragm is connected to the disc (10 ) is connected to the lower E-type circular diaphragm (2), and the lower E-type circular diaphragm (2) is fixed together with the sensor base (1); The casing (7) and the base (1) are screwed together, and the cavity between them is filled with oil medium, and the sealing ring (8) is installed at the connection part between the casing (7) and the base (1), for Prevent the medium in the cavity from overflowing; The material of the lower E-shaped circular diaphragm (2), the cross beam (6), and the upper E-shaped circular diaphragm (4) is 97% _{AL2O3 sintered} ceramics, and the inertial masses (3) are evenly distributed It is a metal copper alloy material, and the metal discs of the upper diaphragm connecting disc (5) and the lower diaphragm connecting disc (10) are aluminum alloy materials; the lower E-type circular diaphragm (2), cross beam (6), The upper E-shaped circular diaphragm (4) is sintered with a ruthenium-based thick-film force-sensing resistor. The resistance achieves the acquisition of six-axis acceleration information through different sensitive bridge layout methods, and obtains the inter-dimensional coupling relationship through calibration, and decouples the output of the six groups of bridges to achieve three-axis linear acceleration and three-axis angular acceleration independent access to information; All three-axis linear accelerations and angular accelerations are defined above as the center of the sensitive surface of the E-type circular diaphragm (4), where the axis of the circular diaphragm is the Z direction, and the corresponding X and Y directions are defined in accordance with the right-handed direction of the Cardison coordinates; The angular acceleration information acquisition sensitive bridge in the X and Y directions is arranged perpendicular to each other in the plane of the upper E-shaped circular diaphragm (4), and the arrangement direction of the thick-film force sensitive resistor is the same as that of the lower E-shaped circular diaphragm (2), wherein: The resistances R1y, R2y, R3y, and R4y on the sensitive surface of the upper E-shaped circular diaphragm (4) are used to realize the measurement of the angular acceleration α _x ; The resistances R1x, R2x, R3x, and R4x on the sensitive surface of the upper E-type circular diaphragm (4) are used to realize the measurement of the angular acceleration α _y ; The four thick film resistors on the cross beam (6) are arranged in the plane of the cross beam, and are symmetrically arranged along the up and down, left and right symmetry axes, and are used to obtain the information of the angular acceleration α _z ; The two sensitive directions of the lower E-shaped circular diaphragm (2) and the upper E-shaped circular diaphragm (4) are required to be consistent, and the linear acceleration information in the X and Y directions is obtained from the sensitive bridge resistors R1x, R2x, R3x, R4x and R1y , R2y, R3y, R4y are arranged perpendicular to each other in the plane of the lower E-shaped circular diaphragm (2), and the sensitive resistors R1z, R2z, R3z, R4z are arranged on the lower E-shaped circular diaphragm (2) for obtaining linear acceleration information in the Z direction. Along the direction of X, Y sensitive direction intersecting 45 degrees, where: The resistors R1x, R2x, R3x, and R4x on the sensitive surface of the lower E-type circular diaphragm (2) are used to measure the linear acceleration _ax ; The resistors R1y, R2y, R3y, and R4y on the sensitive surface of the lower E-type circular diaphragm (2) are used to measure the linear acceleration a _y ; The resistors R1z, R2z, R3z, and R4z on the sensitive surface of the lower E-type circular diaphragm (2) are used to measure the linear acceleration _az ; Among them, the resistors R1z, R2z, R3z, and R4z on the sensitive surface of the upper E-shaped circular diaphragm (2) provide redundant information about the linear acceleration a _z for sensor calibration; Resistors are arranged on the four sensitive surfaces of the middle cross beam (6) according to the aforementioned method to provide redundant angular acceleration α _z information for calibration and compensation of angular acceleration α _z , and the cross beam (6) can provide at most 3-way redundant information.

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