CN1223613C - Continuous processing apparatus by plasma polymerization with vertical chamber - Google Patents

Abstract

The present invention relates to a plasma polymerization continuous processing device with a plurality of chambers, which carries out the surface processing by plasma polymerization for the surfaces of materials which movably enter the chambers. The present invention comprises at least one upstanding chamber, wherein the materials vertically move in the chamber; the chamber comprises at least one electrode. The upstanding chamber can be formed by single or more chambers, or horizontal type chambers, and therefore, various typal plasma polymerization processing systems can be built. In addition, the chambers can be used for various functions according to the purposes of the surface processing, such as polymerization chambers, postprocessing chambers and pre-processing chambers.

Description

Plasma polymerization continuous processing equipment with vertical chamber

field of invention

The present invention relates to a plasma continuous processing plant having vertical chambers, and more particularly to a plasma polymerization continuous processing plant having at least one vertical chamber in which the material to be surface treated can be moved vertically.

Background technique

When the surface of a substance to be coated, such as a metal plate, is subjected to plasma discharge, a coating layer having excellent hardness and wear resistance is formed thereon. Products with such a coating are used as magnetic disks, optical disks or cemented carbide tools.

In addition, when the paint film formed on the surface of the steel sheet is plasma-treated, a paint-coated hard steel sheet having excellent durability and wear resistance can be obtained.

WO 99/28530 (published June 10, 1999) discloses plasma polymerized surface treatment equipment.

Fig. 1 is a schematic plan view of plasma polymerization equipment in the prior art.

As shown in Figure 1, the traditional plasma polymerization equipment includes a vacuum chamber 1, vacuum pumps 5 and 6 to control the pressure in the vacuum chamber, measuring instruments 7 and 8 to measure the degree of vacuum, a power supply device 3 to generate a potential difference for the substance, and a reaction gas control device 9 and 10 injecting a polymerizing gas such as an unsaturated hydrocarbon gas such as acetylene gas, and a non-polymerizing gas such as nitrogen around the surface to be treated.

The substance 2 is placed in the chamber and the rotary pump 6 is started. After the pressure in the chamber was adjusted to 10 ^-6 Torr, the diffusion pump 5 was started to maintain the pressure in the chamber at 10 ^-6 Torr.

The substance is biased by means of a power supply and the opposite electrode 4 is grounded.

When the pressure in the chamber is maintained at a certain degree of vacuum, unsaturated aliphatic hydrocarbon gas such as acetylene gas and non-polymerizing gas such as nitrogen are injected into the chamber.

When the pressure in the chamber reaches a certain level, the plasma is discharged using DC or high frequency.

Next, the plasma generated by DC or high frequency cuts the bonds of the gas molecules, and the severed chains and activated positive or negative ions are bonded on the surface of the material placed between the electrodes to form a polymerized material.

But conventional surface treatment equipment by plasma polymerization has many problems.

For example, first since surface treatment is done in such a way that one substance is surface treated, a different substance is brought back into the room for surface treatment. It is therefore difficult to continuously surface treat large quantities of substances.

Secondly, in the case of treating the surface of a substance such as a polymer film of a metal sheet by plasma polymerization, as the polymerization process progresses, a polymerized substance is formed on the electrode, causing carbonization of the electrode to produce carbide. Then, when the carbide falls off from the electrode, it falls onto the surface of the substance being surface treated and damages the surface.

Third, it is difficult to maintain a uniform flow of polymerized or non-polymerized gas being introduced into the chamber to the surface of the substance. Such inhomogeneity of gas flow causes different surface treatment effects on different parts of the surface of the substance, which is an obstacle to the formation of a uniform polymeric film on the surface of the substance.

Fourth, during the long-term surface treatment process in the room, the material cannot guarantee a certain tension and sags due to gravity. Also, in such a case, each part of the surface of the substance has a different surface treatment effect.

Contents of the invention

It is therefore an object of the present invention to provide continuous processing equipment for plasma polymerization, which can more efficiently obtain high-quality plasma-polymerized films.

Another object of the present invention is to provide a plasma polymerization processing system having various forms by arranging a plurality of chambers in succession.

It is still another object of the present invention to provide a plasma polymerization treatment system which reduces the possibility of carbides formed by carbonization of the electrodes falling onto the surface of the material.

Yet another object of the present invention is to provide a plasma polymerization treatment system that allows a uniform and smooth flow of gas injected into the chamber so that the surface treatment effect obtained is uniform for each part of the surface.

Another object of the present invention is to provide a plasma polymerization processing system having a plurality of chambers whose installation space is greatly reduced.

Yet another object of the present invention is to provide a plasma polymerization system that prevents the surface to be treated from sagging due to gravity.

In accordance with the object of the present invention, in order to achieve these and other advantages both specifically and broadly described herein, there is provided a plasma polymerization continuous treatment apparatus having a plurality of chambers for surface treatment by plasma polymerization of the surface of a substance moved into the chamber , comprising: at least one vertical chamber in which the substance to be coated is moved vertically and which includes at least one electrode.

In the plasma polymerization continuous processing apparatus of the present invention, the electrodes are preferably placed in a position parallel to the moving direction of the substances in the vertical chamber.

In the plasma polymerization continuous processing apparatus of the present invention, in the case of a continuous processing apparatus, a plurality of vertical chambers are included, and the surface treatment of a substance by plasma polymerization is preferably performed in one of the vertical chambers.

In the plasma polymerization continuous treatment apparatus of the present invention, the substance which is continuously moved to a plurality of chambers for surface treatment can itself be used as an electrode when a voltage is applied thereto.

In a plasma polymerization continuous processing apparatus according to an embodiment of the present invention, the vertical chamber includes a chamber body in which substances can move vertically, one side of the chamber is opened, a chamber door is combined with the opened side of the chamber body, and At least one electrode is positioned parallel to the movement of the mass.

In another embodiment of the plasma polymerization continuous processing apparatus of the present invention, the upright chamber is a combined upright chamber in which a partition plate is formed at the center thereof to divide the chamber into two upright regions.

The plasma polymerization continuous processing apparatus of the present invention may include at least one horizontal chamber in which substances move horizontally, and a vertical chamber in which substances move vertically, so that a plurality of chambers can be connected in various forms.

Preferably, the plasma polymerization continuous treatment equipment of the present invention, for continuous surface treatment, includes an unwinding chamber with an unrolling roller for unrolling a material rolled in a roll state, and a roll for winding the surface treated substance.

The above and other objects, features, related aspects and advantages of the present invention will be more apparent from the following detailed description of the present invention with reference to the accompanying drawings.

Brief description of the drawings

The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of the specification, illustrate specific implementations of the invention, and together with the description, serve to explain the principle of the invention.

In the attached picture:

Figure 1 is a schematic diagram of a plasma polymerization device according to the prior art;

2A is a cross-sectional view of a plasma polymerization continuous processing device according to a specific embodiment of the present invention;

Fig. 2B is an enlarged sectional view of the upright chamber in Fig. 2A of a specific embodiment of the present invention;

Figure 2C is a schematic diagram of another upright chamber example of a preferred embodiment of the present invention;

Figure 2D is a schematic diagram of yet another upright chamber example of a preferred embodiment of the present invention;

Figure 3A is a schematic diagram of an example of the provision of gas to the vertical chamber of the preferred embodiment of the present invention;

Figure 3B is a schematic diagram of another example of providing gas to the vertical chamber of the preferred embodiment of the present invention;

Fig. 4 is the sectional view of the horizontal chamber of the plasma polymerization continuous treatment equipment of preferred embodiment of the present invention;

Figure 5A is a cross-sectional view of an upright chamber having two upright regions according to one embodiment of the invention.

Figure 5B is a cross-sectional view of an upright chamber having two upright regions according to another embodiment of the present invention.

6 is a cross-sectional view of an upright chamber having two upright regions according to yet another embodiment of the present invention.

Detailed description of the preferred embodiment

Reference will be made in detail to the preferred embodiments of the invention, examples of which are illustrated in the accompanying drawings.

Fig. 2 is a cross-sectional view of a plasma polymerization continuous processing device according to a specific embodiment of the present invention.

As shown in Figure 2, the plasma polymerization continuous processing equipment of the present invention generally comprises a first vertical chamber 20a, a second vertical chamber 20b, a horizontal chamber 21 placed between the two vertical chambers 20a and 20b, and a spreading roller 25 is used to expand The substance wound thereon is used to convey it to the chamber, and the winding roller 26 is used for winding the surface treated substance in sheet form thereon.

Regardless of surface treatment or not, horizontal chambers can simply be horizontal tubes used as transport paths for substances.

The unwinding and winding rolls may be installed in separate chambers (ie unwinding and winding chambers) other than that illustrated in Figure 2A.

In a preferred embodiment of the present invention, there are only two vertical chambers, but depending on the polymerization system it may further comprise a third and fourth vertical chamber. Or by building aggregate systems with more than four vertical chambers or with multiple horizontal chambers various modifications are possible.

The material conveyed from the unwinding roller passes through the through hole 22b, enters the first vertical chamber and moves vertically, so that the material is surface-treated.

Next, the substance passes through the horizontal chamber 21 through the straight passage hole 22a from the first vertical chamber, and it is transported to the second vertical chamber, where the substance is surface-treated, and finally wound on a roll.

Tension rollers 23a and 23b are placed between each chamber and on the conveying path of the substance between the unrolling roller and the take-up roller to apply tension to the substance, thereby preventing sagging of the substance and changing the moving direction of the substance. Therefore, even when the material moves along a continuous long path, it can maintain a constant speed of movement.

In a preferred embodiment of the present invention, preferably at least one vertical chamber is installed in the polymerization treatment system, and a plurality of vertical chambers and horizontal chambers can be arranged together according to the purpose of surface treatment.

In particular, where several horizontal chambers and vertical chambers are installed, the (shielding) gas, pressure and applied voltage in each chamber should be properly controlled so that the surface can be carried out by different processes through said chambers deal with. At the same time, at least one of these polymerization conditions, gas type, gas supply ratio, range of voltage applied to electrodes, and chamber pressure, should be the same in more than two adjacent chambers to serve as a polymerization chamber.

In addition, the surface treatment in each chamber can be divided into pretreatment, first polymerization treatment, second polymerization treatment, and post-treatment, so that various surface treatments can be performed on the substance when it passes through several chambers.

In particular, in the pretreatment chamber, cleaning is preferably performed to remove various contaminants attached to the surface of the substance, after which a polymeric film is formed by plasma discharge.

Therefore, the pretreatment chamber is placed in front of the mass movement path. A non-polymerizing gas such as oxygen, nitrogen or argon is injected into the pretreatment chamber so that the surface of the material is cleaned by a plasma discharge.

The polymerization process can be carried out in a vertical chamber or in a horizontal chamber, during which polymerization gas is injected into the chamber to which a DC or high frequency voltage is applied to discharge the plasma. In this respect, in order to solve the problems existing in the prior art, it is preferable that at least one vertical chamber is used as the polymerization chamber.

After the surface of the substance in the polymerization chamber has been treated, the surface treatment is carried out successively in different chambers by plasma discharge, preferably after injecting air into the chamber. Such post-treatment under an air atmosphere helps to prevent the gradual reduction of the surface characteristics of the material on which the polymeric film is formed.

As mentioned above, the plasma polymerization treatment equipment with multiple chambers including vertical chambers can achieve various surface treatment effects of substances through multi-step treatment, once the substances move from the unrolling roll to the take-up roll, the surface required for each of the substances Processing can be done in one go.

In the vertical chamber of the preferred embodiment of the present invention, since the substance can move vertically, ie up or down, it is preferred that the electrodes are also mounted vertically in the chamber.

Figure 2B is an enlarged cross-sectional view of the upright chamber of Figure 2A according to one embodiment of the present invention.

The formed upright chamber is a rectangular parallelepiped with an aspect ratio greater than 1, and the area occupied by the bottom plane of the chamber is very small compared with the horizontal chamber, so that the entire space of the polymerization treatment system is greatly reduced.

The electrodes 27 are installed in a chamber which is vertically arranged parallel to the moving direction of the substance 24 .

Although one electrode is shown installed in two chambers in the drawings, several electrodes may also be arranged in a vertical row. The illustrated substances are mounted on the upper and lower sides of the chamber through holes 22a and 22b.

Figure 2C is a cross-sectional view of another example of the upright chamber of the preferred embodiment of the present invention.

As shown in FIG. 2C, the upright chamber 20 includes a chamber body 29a containing an electrode 27 therein, and a chamber door 29b connected to one side of the chamber for opening and closing the chamber. Additional electrodes 28 are attached to the inside of the door.

Since the electrode is attached to the chamber door, only one side of the electrode (the side facing the substance) participates in the plasma discharge, preventing the formation of carbides on the other side due to the polymeric material.

In addition, installation of the electrodes is easy since the electrodes are simply attached to the chamber door.

Also, in this embodiment of the invention, as described above, the electrodes may be positioned parallel to the movement of the material.

Meanwhile, unlike the case of FIG. 2B , note that the substance passage holes 22 a are formed at the top and bottom of the chamber.

For vertical chambers, straight passage holes can be selectively formed on the top and bottom or upper and lower sides according to the transport path of the substance and the connection structure between the chambers.

Therefore, even though a plurality of vertical chambers and horizontal chambers can be connected in various forms, the moving direction of matter can be freely changed from vertical to horizontal and from horizontal to vertical.

Figure 2D is a cross-sectional view of another example of the upright chamber of the preferred embodiment of the present invention.

As shown in Figure 2D, the upright chamber is somewhat different from the upright chamber in Figure 2C. That is, the electrode 28 attached to the chamber door 29c is separated from the door surface. In such a structure, by controlling the distance between the electrode and the substance, it is easy to make the position of the electrode close to the surface of the substance.

Referring to Figures 2B-2D, two electrodes facing both sides of the substance are installed in the chamber. By applying a DC or AC voltage to the electrodes, electricity can also be applied to the surface of the substance being treated so that the substance can be used as an electrode.

To apply electricity to a substance, electricity can be applied to the part that is in contact with the substance, so that electricity can be indirectly applied to the substance.

For example, the rollers are installed in a plurality of chambers, such as an unwinding chamber with unwinding rollers, a winding chamber with winding rollers, and a polymerization chamber, preferably with power applied to one of the rollers in contact with the moving mass so that the electric power applied to the substance. In such a case, a power supply device is additionally included inside or outside the chamber to apply power to the roller.

A substance can be either an anode or a cathode due to the application of electricity to the substance. In this regard, considering the surface treatment effect, it is more preferable that the substance becomes an anode, and the facing electrodes become opposite electrodes facing both sides of the substance.

In surface treatment by plasma discharge, the gas flow introduced into the chamber is critical. If the gas cannot flow into the chamber uniformly, the uniformity of the surface treatment of the substance will be deteriorated.

In particular, in continuous surface treatment, it is difficult to maintain a uniform gas flow for the substance being transported. Thus in the case of the vertical chamber of the preferred embodiment of the present invention, the gas supplied into the chamber flows very uniformly with respect to the substance since the direction of movement of the substance is vertical with respect to the horizontal chamber.

Figure 3A is a cross-sectional view of an example of the provision of gas into the vertical chamber of the preferred embodiment of the present invention.

A gas inlet 31a is formed at the bottom of the upright chamber 20, and a gas outlet 31b is formed at the top thereof.

In such a case, the gas flow is parallel to the moving direction of the substance, so that the gas can be uniformly supplied to every position on the surface of the substance.

In a preferred embodiment of the present invention, the direction of gas flow may be the same as or opposite to the direction of movement of the substance. In the case where the substance is moved upwards, the gas inlet is placed in the upper part of the chamber and the gas outlet is placed in the lower part thereof so that the movement of the substance is in the opposite direction to the flow of the gas.

Figure 3B is a cross-sectional view of another example of providing gas into the vertical chamber of the preferred embodiment of the present invention.

As illustrated in Figure 3B, unlike the Figure 3 embodiment, it is noted that the gas is provided into the chamber in a horizontal direction. Gas is supplied to the gas inlet 32a, flows in a direction perpendicular to the material movement, and is then discharged through the gas outlet 32b. Although only two gas inlets and outlets are each illustrated in the drawings, a plurality of gas inlets and gas outlets may be formed on the right and left sides of the chamber to make gas flow smooth and uniform.

Regardless of the flow direction of the gas in the vertical chamber, that is, whether the movement along the material is parallel or vertical, in the vertical chamber of the preferred embodiment of the present invention, the pollutants attached to the surface due to carbides generated during the polymerization process can be greatly reduced. The reason is that the possibility of carbides adhering to the surface of the substance is very small due to the vertical movement of the substance compared to the case where the substance is moved horizontally.

Therefore, there is no need for a dust removal device to remove carbides or various dusts attached to the surface of the material, which simplifies the structure of the equipment.

The plasma polymerization apparatus as schematically shown in FIG. 2A includes a horizontal chamber and a vertical chamber. Like vertical rooms, horizontal rooms can also be converging rooms. In horizontal chambers, pretreatment can be performed before the polymerization process, or post-treatment after the polymerization process.

4 is a cross-sectional view of a horizontal chamber of a plasma polymerization continuous processing apparatus according to a preferred embodiment of the present invention.

Substance passage holes 45a and 45b are formed at the right and left ends of the chamber, and an upper door 42a and a lower door 42b are installed at the upper and lower parts of the chamber. Electrodes 43a and 43b are connected to the upper and lower doors, respectively.

Although not shown, a gas inlet and a gas outlet may be formed in the chamber.

The electrodes may be attached to the door faces of the upper door and the lower door, or connected at intervals from the door faces. The upper door opens upwards, while the lower door opens downwards.

When the electrodes are connected to the horizontal chamber, the horizontal chamber can be used as a polymerization chamber, a pre-treatment chamber or a post-treatment chamber. Or without electrodes, the horizontal chamber simply serves as a path for the material to move.

Figure 5A is a cross-sectional view of an upright chamber having two upright regions in accordance with one embodiment of the present invention.

As shown in FIG. 5A, the upright chamber 50a includes a partition plate 52 vertically formed at the center of one chamber. A partition plate 52 divides the chamber into two upstanding regions 51a and 51b. At least one electrode is placed in each upright area.

In a preferred embodiment of the present invention, two electrodes (53a and 53b, 54a and 54b) are formed facing each other in each upright area.

In the lower part of the vertical chambers, horizontal paths (or horizontal chambers) 58a and 58b are formed for connection.

After the substance 55 passes through the horizontal path 58a on the left side, it is introduced into a horizontal area 51a, which makes the substance pass through the straight passage hole 57a formed on the upper part of the dividing plate, is moved to another vertical area 51b, and then passes through another horizontal path. 58b, so removed.

The movement of matter can take place in the opposite direction.

Since each upright area of the upright chamber is separated by the partition plate, each upright area can be used as an independent chamber for surface treatment with different processes.

For example preprocessing in one vertical area and aggregation process in another vertical area. Or afterwards, do the aggregation process in one upright and post-processing in the other.

Of course, the polymerization process can also be carried out in two vertical zones.

For a combined upright chamber with two upright regions, despite the long path for material surface treatment, the area substantially occupied by the polymerization chamber is relatively small, so its space utilization is very efficient. In addition, two different surface treatments can be applied to the substance being transported in a single chamber.

Reference numeral 57b denotes a substance passing hole between the vertical chamber and the horizontal path, 57c denotes a substance passing hole formed at the end of the horizontal path, and 56 denotes a tension roller.

Figure 5B is a cross-sectional view of an upright chamber having two upright regions according to another embodiment of the present invention.

As shown in Figure 5B, the upright chamber is the same as in Figure 5A, the upright chamber 50b is divided into two upright regions by a partition plate 52 formed at the center of the chamber, the difference is that the substance 55 passes through an upright region 51a, and through another horizontal region 58, It then enters a further upright area 51b.

The horizontal area is integrally formed with the vertical chamber, and the substance moves between the vertical area and the horizontal path through the passage hole 57d formed between the vertical area and the horizontal area.

The advantage of an upright chamber with an integrally formed horizontal area and two upright areas is that the space utilization can be maximized since the surface treatment can be carried out independently in each area, and three surface treatment processes can be carried out sequentially in a single room .

Figure 6 is a cross-sectional view of an upright chamber having two upright regions according to another embodiment of the present invention.

As shown in FIG. 6, an upright chamber 60 includes a chamber body 61 including two upright regions divided by a partition plate 65 formed at the center of the chamber, and chamber doors 62a and 62b installed at both ends of the chamber body for opening and closing the chamber.

Substance 66 travels through each upright region of the upright chamber through through holes 68 . Each tension roller 67 changes the moving direction of the substance, so that the substance moves from the outside to the upright area or from one upright area to another upright area.

The vertical chamber includes electrodes 64a and 64b, which are placed on both sides of the central partition 65 of the chamber body at positions parallel to the material movement, and electrodes 63a and 63b are placed on the door of the chamber door at positions parallel to the material movement.

Electrodes mounted on the door of the chamber may be attached to or spaced from the door so that their spacing from the substance can be adjusted.

Although the movement of material from one upright area to another is illustrated in the exposed exterior space, it is preferable to connect an additional horizontal path (or horizontal chamber) to the upright chamber, similar to the embodiments described above.

As described above, the plasma polymerization continuous processing apparatus of the present invention has many advantages.

For example, first, since the vertical chamber can be formed alone or from a plurality of chambers, or can be formed together with the horizontal chamber, various types of plasma polymerization processing systems can be constructed.

Second, depending on the purpose of surface treatment, multiple chambers can be used in various functions and applications, such as polymerization chambers, post-treatment chambers, and pre-treatment chambers.

Third, since the possibility of the carbides generated by the carbonization of the electrodes falling on the surface of the material is greatly reduced, in the horizontal chamber, there is no need for ash removal devices for removing carbides or various ash falling on the surface of the material.

Fourth, since the gas injected into the chamber can flow upwards or downwards therein, the gas can flow smoothly and evenly with respect to both sides of the substance. As a result, a uniform surface treatment can be obtained on both sides of the substance, and thus the reliability of the surface treatment is increased.

Fifth, in cases where some or all of the polymerization processing systems are built as vertical chambers, it is even advantageous in terms of space utilization since the system space in the plant can be substantially reduced.

Sixth, as the material to be surface treated is transported through the chamber, the material is prevented from sagging due to gravity as tension is normally applied as the material passes through the upright chamber.

A plasma polymerization treatment plant comprising a vertical chamber is an essential component of a continuous treatment plant, whereby substances can be surface treated rapidly and in large quantities.

Without departing from the spirit or essential characteristics of the present invention, the present invention has been described in detail by using several forms, but it should also be understood that the above-mentioned specific embodiments are not limited by the details described above, unless otherwise specified, but by The spirit and scope of the appended claims shall be construed broadly, and all changes and modifications are therefore intended to be within the scope of the appended claims, or equivalents within the scope thereof are also intended to be embraced by the appended claims. In request.

Claims (26)

1. A continuous processing apparatus for plasma polymerization having a plurality of chambers for surface treatment of the surface of a substance moving into the chamber by plasma polymerization, comprising: At least one upright chamber in which a substance moves vertically, and at least one electrode included therein, wherein the upright chamber includes substance passing holes formed in upper and lower parts. 2. The apparatus of claim 1, wherein the electrodes are placed in a direction parallel to the direction of movement of the substance in the chamber. 3. The apparatus of claim 2, wherein the chamber includes a plurality of electrodes arranged in a row in a direction parallel to the direction of movement of the material within the chamber. 4. The apparatus of claim 1, wherein the upright chamber is a polymerization chamber in which the surface of the substance is treated by plasma polymerization. 5. The apparatus of claim 1, wherein the upright chamber includes substance passage holes at the top and bottom thereof. 6. The device of claim 1, wherein the substance itself acts as an electrode when electric power is applied to the substance. 7. The apparatus of claim 1, wherein the upright chamber comprises: A chamber in which matter moves vertically, with one side of the chamber open; a door connected to the open side of the body; and At least one electrode is positioned in a direction parallel to the direction of material movement. 8. The apparatus of claim 7, wherein the electrodes are disposed within the chamber. 9. The apparatus of claim 7, wherein the electrodes are placed on the door of the chamber. 10. The apparatus of claim 1, wherein the upright chamber includes a partition plate at its center such that the upright chamber is divided into two upright regions by the partition. 11. The apparatus of claim 10, wherein the direction of movement of the substance is opposite in the two upright regions. 12. The apparatus of claim 10, wherein the two upstanding regions each comprise at least one electrode disposed in a direction parallel to the direction of movement of the substance. 13. Continuous processing apparatus for plasma polymerization having vertical chambers, wherein a plurality of chambers are provided for surface treatment of the surface of a substance moving into the chamber by plasma polymerization, comprising: a first vertical chamber, wherein matter moves vertically, having at least one electrode; and The second vertical chamber, in which the substance moves vertically, has at least one electrode and is spaced from the first vertical chamber. 14. The apparatus of claim 13, wherein at least one of the first and second upright chambers is a polymerization chamber in which the substance is surface treated by plasma polymerization. 15. The apparatus of claim 14, comprising at least one horizontal chamber in which the material moves horizontally. 16. The apparatus of claim 15, wherein if the second upright chamber is a polymerization chamber, one of the remaining chambers is a pretreatment chamber in which the surface of the substance is cleaned before polymerization. 17. The apparatus of claim 15, wherein if the first vertical chamber is a polymerization chamber, one of the remaining chambers is a post-processing chamber into which air is injected to perform post-processing by plasma discharge. 18. The apparatus of claim 15, wherein the sleeping chamber comprises: a chamber body having passage holes formed on its left and right sides so that substances can pass therethrough; an upper door, having electrodes inside it, said door opening and closing upwards; and The lower door, having electrodes inside it, said door opens and closes downwards. 19. The apparatus of claim 14, wherein the first and second vertical chambers are polymerization chambers having at least one of the same conditions: the gas is provided in the chamber, the rate at which the gas is provided, the range of applied voltage to the electrodes, and the temperature in the chamber. pressure. 20. A continuous processing apparatus for plasma polymerization with vertical chambers, comprising an unwinding chamber with unwinding rollers for unrolling a substance wound thereon, a winding chamber with winding rollers for winding up a substance whose surface is to be treated, and a polymerization chamber, in which the substances delivered from the development chamber are surface-treated by plasma discharge, wherein a substance moves vertically in a polymerization chamber, and at least one electrode is included in the polymerization chamber, wherein the vertical chamber includes substance passing holes formed in upper and lower parts. 21. The apparatus of claim 20, wherein the polymerization chamber includes a chamber body having the electrodes formed therein, and a door having the electrodes formed therein, opening and closing the chamber body. 22. The apparatus of claim 20, wherein one of the chambers comprises: at least one roll with which the substance being moved contacts; and The power supply unit is used to make the substance itself an electrode by bringing the substance into contact with the roller when power is supplied to the roller. 23. Plasma continuous processing equipment having a vertical chamber, comprising: an unwinding chamber with unwinding rollers for unwinding the coiled substance; a winding chamber having winding rollers for winding the surface-treated substance; a first polymerization chamber for surface-treating a substance conveyed from the development chamber by plasma discharge, and having a substance passage hole formed at an upper portion and a lower portion of at least one of the electrodes; a second polymerization chamber for surface-treating a substance delivered from the development chamber by plasma discharge, and having a substance passage hole formed at an upper portion and a lower portion of at least one of the electrodes; Wherein the direction of movement of substances in the first and second polymerization chambers is opposite. 24. The apparatus of claim 23, wherein the first and second polymerization chambers are respectively combining chambers, wherein a partition plate is formed at the center thereof to divide each chamber into two regions. 25. The apparatus of claim 23, wherein the binding chamber comprises: a chamber body with a partition in its center and electrodes arranged on both sides of the partition, the chamber can be open on the left and right; and First and second doors having electrodes inside thereof, said doors being opened and closed on the left and right sides of the chamber body. 26. The apparatus of claim 25, wherein the first and second gates include electrodes arranged in parallel directions of material movement.

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