Technique of atomic gas radio frequency discharge in slat waveguide
The present invention is a kind of technique of atomic gas radio frequency discharge in slat waveguide, relates to the atomic gas laser technology.
At present both at home and abroad in radio frequency transversely excited plate waveguide gas laser, its hollow sheeting bar waveguide discharge plot structure by a pair of wide metal electrode a pair of narrow potsherd is clipped in two side ends between pair of electrodes, form the sandwich structure of the lath-shaped hollow waveguide of noncontinuous electrode spacing, electrode spacing is at 1mm to 8mm, the rf wave frequency is carried on its a pair of wide metal electrode at the radio frequency source of 5MHz to 200MHz scope, forms noncontinuous electrode Board for adjusting vision distance stripe waveguide gas-discharge zone (as shown in Figure 1).This technology is (as: CO in radio frequency transversely excited molecular gas laser
2In the CO laser) and radio frequency transversely excited hyperbar (greater than 1.3Kpa time) atomic gas laser in (as: in the Xe-Ar laser) all successful application.But in radio frequency transversely excited low pressure (less than 1.3Kpa time) atomic gas laser, because the ionization energy of atomic gas is than the ionization energy height of molecular gas, and when hanging down gas pressure, the mean free path of electron motion is longer, thereby when electrode spacing hour, be limited in the waveguide discharge plasma but very difficult.Can't form lath-shaped waveguide gas-discharge zone if increase electrode spacing.
Fig. 1 is the noncontinuous electrode Board for adjusting vision distance strip hollow waveguide schematic diagram that wide metal electrode of the prior art and narrow ceramic sidewalls constitute.
The present invention seeks to be clipped in two side ends between its a pair of wide potsherd, constitute the sandwich structure of lath-shaped hollow waveguide, form long electrode Board for adjusting vision distance stripe waveguide discharged atomic gas district by a pair of narrow metal electrode that makes a pair of wide potsherd will load radio frequency source.
Above-mentioned purpose of the present invention is realized by following technical scheme: this technique of atomic gas radio frequency discharge in slat waveguide, the a pair of narrow metal electrode that will be loaded radio frequency source by a pair of wide potsherd is clipped in two side ends between its a pair of wide potsherd, constitute the sandwich structure of lath-shaped hollow waveguide, form long electrode Board for adjusting vision distance stripe waveguide discharged atomic gas district, the lath-shaped waveguide of this formation is placed vacuum chamber, when being lower than the air pressure of 1.3Kpa, form the horizontal discharged atomic gas of radio frequency to produce a lath-shaped region of discharge, a pair of narrow metal electrode spacing is 8mm to 1000mm, and a pair of narrow metal electrode width is 0.5mm to 10mm.
Characteristics of the present invention are: can be applicable in radio frequency transversely excited low pressure (less than the 1.3Kpa time) atomic gas laser, can form lath-shaped hollow waveguide low-pressure gas discharging district by increasing electrode spacing.
Concrete structure of the present invention is illustrated by Fig. 2.
Fig. 2 is the long electrode Board for adjusting vision distance strip hollow waveguide schematic diagram that narrow metal electrode of the present invention and wide potsherd constitute.
Primary structure is among the figure: narrow metal electrode 1, potsherd 2, lath-shaped hollow waveguide 3, rf inputs 4, earth terminal 5, narrow metal electrode spacing W, narrow metal electrode width H.
Example of the present invention is as follows:
In radio frequency transversely excited waveguide He-Ne (HeNe) atomic gas laser, He-Ne mist total gas pressure is usually less than 1.3Kpa, adopts existing technology and structure (as shown in Figure 1) plasma that gas discharge forms can't to be limited in the lath-shaped waveguide.Adopt technology of the present invention and structure, the a pair of width H that will load radio frequency source greater than the potsherd 2 of electrode spacing by a pair of width is that 1mm or 2mm or 3mm and electrode spacing W are that 10mm or 200mm or the narrow metal electrode 1 of 500mm are clipped in two side ends between its a pair of wide potsherd, the connected mode of a pair of narrow metal electrode 1 and a pair of wide potsherd 2 is that soldering sealing-in or bonding or slave plate stripe waveguide outside are pushed down with screw fastening with ceramic bar, constitute the sandwich structure of lath-shaped hollow waveguide 3, form long electrode Board for adjusting vision distance stripe waveguide discharged atomic gas district (as shown in Figure 2), the lath-shaped waveguide of this formation is placed vacuum chamber, the radio frequency source that with frequency is 60MHz is carried on its a pair of narrow metal electrode by rf inputs 4, forms the horizontal gas discharge of radio frequency to produce a lath-shaped waveguide discharge district when being lower than the air pressure of 1.3Kpa.This lath-shaped waveguide discharge district can be used as the light amplification gain region of atomic gas laser.