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CN1219789A - Technique of atomic gas radio frequency discharge in slat waveguide - Google Patents

Technique of atomic gas radio frequency discharge in slat waveguide Download PDF

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Publication number
CN1219789A
CN1219789A CN 97121855 CN97121855A CN1219789A CN 1219789 A CN1219789 A CN 1219789A CN 97121855 CN97121855 CN 97121855 CN 97121855 A CN97121855 A CN 97121855A CN 1219789 A CN1219789 A CN 1219789A
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China
Prior art keywords
pair
waveguide
radio frequency
atomic gas
slab
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Pending
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CN 97121855
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Chinese (zh)
Inventor
辛建国
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Beijing Institute of Technology BIT
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Beijing Institute of Technology BIT
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Publication date
Application filed by Beijing Institute of Technology BIT filed Critical Beijing Institute of Technology BIT
Priority to CN 97121855 priority Critical patent/CN1219789A/en
Publication of CN1219789A publication Critical patent/CN1219789A/en
Pending legal-status Critical Current

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Abstract

本发明是一种板条波导内原子气体射频放电技术,涉及原子气体激光器技术。该技术由一对宽陶瓷片将加载射频源的一对窄金属电极夹在其一对宽陶瓷片间两侧端,构成板条状中空波导的夹心结构,一对窄金属电极间距为8mm至1000mm,一对窄金属电极宽度为0.5mm至10mm;本发明可应用于射频横向激励低气压(小于1.3KPa时)原子气体激光器中,能通过增加电极间距形成板条状中空波导低气压气体放电区。

The invention relates to an atomic gas radio frequency discharge technology in a slab waveguide, and relates to the atomic gas laser technology. This technology consists of a pair of wide ceramic sheets sandwiching a pair of narrow metal electrodes loaded with radio frequency sources on both sides of the pair of wide ceramic sheets to form a sandwich structure of a slab-shaped hollow waveguide. The distance between a pair of narrow metal electrodes is 8mm to 1000mm, the width of a pair of narrow metal electrodes is 0.5mm to 10mm; the invention can be applied to the radio frequency transverse excitation low-pressure (less than 1.3KPa) atomic gas laser, and can form a strip-shaped hollow waveguide low-pressure gas discharge by increasing the electrode spacing district.

Description

Technique of atomic gas radio frequency discharge in slat waveguide
The present invention is a kind of technique of atomic gas radio frequency discharge in slat waveguide, relates to the atomic gas laser technology.
At present both at home and abroad in radio frequency transversely excited plate waveguide gas laser, its hollow sheeting bar waveguide discharge plot structure by a pair of wide metal electrode a pair of narrow potsherd is clipped in two side ends between pair of electrodes, form the sandwich structure of the lath-shaped hollow waveguide of noncontinuous electrode spacing, electrode spacing is at 1mm to 8mm, the rf wave frequency is carried on its a pair of wide metal electrode at the radio frequency source of 5MHz to 200MHz scope, forms noncontinuous electrode Board for adjusting vision distance stripe waveguide gas-discharge zone (as shown in Figure 1).This technology is (as: CO in radio frequency transversely excited molecular gas laser 2In the CO laser) and radio frequency transversely excited hyperbar (greater than 1.3Kpa time) atomic gas laser in (as: in the Xe-Ar laser) all successful application.But in radio frequency transversely excited low pressure (less than 1.3Kpa time) atomic gas laser, because the ionization energy of atomic gas is than the ionization energy height of molecular gas, and when hanging down gas pressure, the mean free path of electron motion is longer, thereby when electrode spacing hour, be limited in the waveguide discharge plasma but very difficult.Can't form lath-shaped waveguide gas-discharge zone if increase electrode spacing.
Fig. 1 is the noncontinuous electrode Board for adjusting vision distance strip hollow waveguide schematic diagram that wide metal electrode of the prior art and narrow ceramic sidewalls constitute.
The present invention seeks to be clipped in two side ends between its a pair of wide potsherd, constitute the sandwich structure of lath-shaped hollow waveguide, form long electrode Board for adjusting vision distance stripe waveguide discharged atomic gas district by a pair of narrow metal electrode that makes a pair of wide potsherd will load radio frequency source.
Above-mentioned purpose of the present invention is realized by following technical scheme: this technique of atomic gas radio frequency discharge in slat waveguide, the a pair of narrow metal electrode that will be loaded radio frequency source by a pair of wide potsherd is clipped in two side ends between its a pair of wide potsherd, constitute the sandwich structure of lath-shaped hollow waveguide, form long electrode Board for adjusting vision distance stripe waveguide discharged atomic gas district, the lath-shaped waveguide of this formation is placed vacuum chamber, when being lower than the air pressure of 1.3Kpa, form the horizontal discharged atomic gas of radio frequency to produce a lath-shaped region of discharge, a pair of narrow metal electrode spacing is 8mm to 1000mm, and a pair of narrow metal electrode width is 0.5mm to 10mm.
Characteristics of the present invention are: can be applicable in radio frequency transversely excited low pressure (less than the 1.3Kpa time) atomic gas laser, can form lath-shaped hollow waveguide low-pressure gas discharging district by increasing electrode spacing.
Concrete structure of the present invention is illustrated by Fig. 2.
Fig. 2 is the long electrode Board for adjusting vision distance strip hollow waveguide schematic diagram that narrow metal electrode of the present invention and wide potsherd constitute.
Primary structure is among the figure: narrow metal electrode 1, potsherd 2, lath-shaped hollow waveguide 3, rf inputs 4, earth terminal 5, narrow metal electrode spacing W, narrow metal electrode width H.
Example of the present invention is as follows:
In radio frequency transversely excited waveguide He-Ne (HeNe) atomic gas laser, He-Ne mist total gas pressure is usually less than 1.3Kpa, adopts existing technology and structure (as shown in Figure 1) plasma that gas discharge forms can't to be limited in the lath-shaped waveguide.Adopt technology of the present invention and structure, the a pair of width H that will load radio frequency source greater than the potsherd 2 of electrode spacing by a pair of width is that 1mm or 2mm or 3mm and electrode spacing W are that 10mm or 200mm or the narrow metal electrode 1 of 500mm are clipped in two side ends between its a pair of wide potsherd, the connected mode of a pair of narrow metal electrode 1 and a pair of wide potsherd 2 is that soldering sealing-in or bonding or slave plate stripe waveguide outside are pushed down with screw fastening with ceramic bar, constitute the sandwich structure of lath-shaped hollow waveguide 3, form long electrode Board for adjusting vision distance stripe waveguide discharged atomic gas district (as shown in Figure 2), the lath-shaped waveguide of this formation is placed vacuum chamber, the radio frequency source that with frequency is 60MHz is carried on its a pair of narrow metal electrode by rf inputs 4, forms the horizontal gas discharge of radio frequency to produce a lath-shaped waveguide discharge district when being lower than the air pressure of 1.3Kpa.This lath-shaped waveguide discharge district can be used as the light amplification gain region of atomic gas laser.

Claims (1)

1.一种板条波导内原子气体射频放电技术,其特征在于由一对宽陶瓷片将加载射频源的一对窄金属电极夹在其一对宽陶瓷片间两侧端,构成板条状中空波导的夹心结构,形成长电极间距板条状波导原子气体放电区,将该构成的板条状波导置于真空腔中,在低于1.3Kpa的气压时形成射频横向原子气体放电以产生一板条状放电区,一对窄金属电极间距W为8mm至1000mm,一对窄金属电极宽度H为0.5mm至10mm。1. An atomic gas radio frequency discharge technology in a slab waveguide, characterized in that a pair of wide ceramic sheets clamp a pair of narrow metal electrodes loaded with a radio frequency source on both sides of the pair of wide ceramic sheets to form a slab-shaped hollow waveguide The sandwich structure forms a slab-shaped waveguide atomic gas discharge area with long electrode spacing. The slab-shaped waveguide is placed in a vacuum cavity, and a radio-frequency transverse atomic gas discharge is formed at a pressure lower than 1.3Kpa to produce a slab. Shaped discharge area, the distance W between a pair of narrow metal electrodes is 8mm to 1000mm, and the width H of a pair of narrow metal electrodes is 0.5mm to 10mm.
CN 97121855 1997-12-09 1997-12-09 Technique of atomic gas radio frequency discharge in slat waveguide Pending CN1219789A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 97121855 CN1219789A (en) 1997-12-09 1997-12-09 Technique of atomic gas radio frequency discharge in slat waveguide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 97121855 CN1219789A (en) 1997-12-09 1997-12-09 Technique of atomic gas radio frequency discharge in slat waveguide

Publications (1)

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CN1219789A true CN1219789A (en) 1999-06-16

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CN 97121855 Pending CN1219789A (en) 1997-12-09 1997-12-09 Technique of atomic gas radio frequency discharge in slat waveguide

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CN (1) CN1219789A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8098705B2 (en) 2007-06-26 2012-01-17 El. En. S.P.A. Radio frequency excited gas laser source
CN102377097A (en) * 2011-12-06 2012-03-14 大连民族学院 Optical fiber plasma discharge laser amplification device and technology
CN103025042A (en) * 2012-12-07 2013-04-03 华中科技大学 Radio frequency discharge device and hollow-core fiber radio frequency discharge system
CN103503252A (en) * 2010-11-23 2014-01-08 依拉迪激光有限公司 Ceramic gas laser with integrated beam-shaping waveguide
CN115621829A (en) * 2022-12-21 2023-01-17 吉林省永利激光科技有限公司 A Radio Frequency Excited Waveguide CO2 Laser

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8098705B2 (en) 2007-06-26 2012-01-17 El. En. S.P.A. Radio frequency excited gas laser source
CN101689743B (en) * 2007-06-26 2012-02-08 伊尔恩股份公司 Radio frequency excited gas laser source
CN103503252A (en) * 2010-11-23 2014-01-08 依拉迪激光有限公司 Ceramic gas laser with integrated beam-shaping waveguide
CN102377097A (en) * 2011-12-06 2012-03-14 大连民族学院 Optical fiber plasma discharge laser amplification device and technology
CN102377097B (en) * 2011-12-06 2013-05-01 大连民族学院 Optical fiber plasma discharge laser amplification device and technology
CN103025042A (en) * 2012-12-07 2013-04-03 华中科技大学 Radio frequency discharge device and hollow-core fiber radio frequency discharge system
CN103025042B (en) * 2012-12-07 2014-12-10 华中科技大学 Radio frequency discharge device and hollow-core fiber radio frequency discharge system
CN115621829A (en) * 2022-12-21 2023-01-17 吉林省永利激光科技有限公司 A Radio Frequency Excited Waveguide CO2 Laser

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