CN121409124A - Micro-liquid film thickness measuring device and method based on spectral confocal displacement sensor - Google Patents
Micro-liquid film thickness measuring device and method based on spectral confocal displacement sensorInfo
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- CN121409124A CN121409124A CN202511859054.8A CN202511859054A CN121409124A CN 121409124 A CN121409124 A CN 121409124A CN 202511859054 A CN202511859054 A CN 202511859054A CN 121409124 A CN121409124 A CN 121409124A
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Abstract
本发明涉及精密测量领域，公开了一种基于光谱共焦位移传感器的微液膜厚度测量装置和方法。其装置包括控制器、运动平台、尾纤式光学探头传感器、载物盘和计算机。其方法包括：S1，将微液置于载物盘上；S2，设置扫描参数；S3，进行一次微液膜厚度测量；S4，确定测量次数；S5，根据测量次数对载物盘上的微液进行测量；S6,得到微液膜厚度并显示。本发明利用光谱共焦原理，采用多传感器数据实时同步采集与融合算法，克服单传感器局限性，实现纳米级的微液膜厚度测量精度，适用于极端场景的高分辨率检测。
This invention relates to the field of precision measurement and discloses a device and method for measuring the thickness of a microliquid film based on a spectral confocal displacement sensor. The device includes a controller, a motion platform, a fiber-optic probe sensor, a sample tray, and a computer. The method includes: S1, placing the microliquid on the sample tray; S2, setting scanning parameters; S3, performing a single microliquid film thickness measurement; S4, determining the number of measurements; S5, measuring the microliquid on the sample tray according to the number of measurements; S6, obtaining and displaying the microliquid film thickness. This invention utilizes the principle of spectral confocal measurement and employs a multi-sensor data real-time synchronous acquisition and fusion algorithm to overcome the limitations of a single sensor, achieving nanometer-level accuracy in measuring microliquid film thickness, and is suitable for high-resolution detection in extreme scenarios.
Description
Technical Field
The invention relates to the field of precise measurement, in particular to a micro liquid film thickness measuring device and method based on a spectral confocal displacement sensor.
Background
Corrosion is one of the important forms of material failure. Under atmospheric conditions, equipment or material corrosion is essentially an electrochemical process that occurs in its surface film of water, the reaction kinetics and corrosion mechanisms of which are highly dependent on the surface film of liquid to provide it with ion transport media and electrochemical environment. The liquid film thickness is a liquid film state parameter with the greatest influence on equipment or material corrosion, and not only determines whether corrosion reaction can occur, but also directly influences the corrosion reaction rate and the damage degree. The equipment or material surface liquid film is a dynamic water film varying with the external climate environment, the thickness of which typically fluctuates in the range of a few micrometers to a few millimeters, and such a thick liquid film is also called a micro liquid film. In particular, when the surface of equipment or material is covered with a thin liquid film of the order of micrometers, the distance that oxygen diffuses from the gas phase to the metal surface becomes short, which significantly aggravates the metal corrosion process. Therefore, the method for accurately measuring the thickness of the corrosion micro-liquid film on the surface of the equipment or the material has great significance in the aspects of corrosion resistance evaluation of supporting materials and surface protection processes, equipment outfield corrosion maintenance measure optimization, equipment safe and reliable operation and the like.
The conventional micro-liquid film thickness testing method mainly comprises an optical interferometry method, a capacitance method, a laser triangulation method and the like. Optical interferometry (such as white light interferometers) is mainly to obtain the thickness of a micro-liquid film by analyzing the phase or optical path difference change of interference fringes, but has the problem of phase ambiguity in transparent water film measurement, needs to calibrate a reference plane strictly, and is easily disturbed by environmental vibration in dynamic measurement. The capacitance method is mainly to obtain initial voltage by adjusting the distance between a capacitance sensor and a metal flat plate, and then calculate the thickness of a liquid film by combining a standard curve. The method requires that the measured surface is flat and conductive, the thickness of a liquid film of a non-conductive plane such as a paint cannot be measured, and the measurement resolution is low (about 0.01 mm). The laser triangulation method mainly comprises the steps that after laser beams irradiate the surface of a liquid film, reflected light is focused on a position sensitive detector through a lens to obtain a light spot position, when the thickness of the liquid film is changed, the surface height is changed, the angle of the reflected light is deviated along with the change, and the light spot position is changed, so that the thickness of the liquid film is calculated. However, the method has high requirements on the surface morphology of the liquid film, nonlinear errors caused by edge effects exist, and the measurement errors are increased due to secondary reflection when the transparent water film is measured. Therefore, a device and a method for measuring the thickness of the micro-liquid film with convenient use and high measurement precision are needed.
Disclosure of Invention
Aiming at the problems of the technology, the invention provides a micro-liquid film thickness measuring device and method based on a spectrum confocal displacement sensor. The measuring method is based on the spectral dispersion confocal principle, has the advantages of high precision, wide applicability, convenience in operation and the like, and can realize wide-range thickness measurement of a micro-liquid film corroded on the surface of equipment or materials in the atmospheric environment from micrometers to millimeters, and the measuring resolution is as high as 10 -6 mm.
The invention discloses a micro-liquid film thickness measuring device based on a spectrum confocal displacement sensor, which comprises a controller, a motion platform, a tail fiber type optical probe sensor, a carrying disc and a computer, wherein:
The controller comprises a fast white light source, a light source driver, a spectrometer, a photoelectric signal processor, an optical fiber and a controller driver interface; the spectrometer is also connected with the optical fiber, receives the optical signal of the tail optical fiber type optical probe sensor through the optical fiber, obtains a spectrogram according to the received optical signal, sends the spectrogram to the photoelectric signal processor, and obtains the thickness of the micro-liquid film at the position measured by the current tail optical probe sensor according to the spectrogram;
The motion platform consists of a two-dimensional moving device and a motion platform driving interface, wherein the two-dimensional moving device comprises an x axis and a y axis which can move, and the motion platform driving interface is connected with a computer to realize the movement control of the two-dimensional moving device;
The tail fiber type optical probe sensor consists of two tail fiber type optical probe sensors with different precision, which are all arranged on the y axis of the two-dimensional moving device and are connected with the spectrometer and the fast white light source through optical fibers;
The carrying disc is positioned below the moving platform in parallel and is used for carrying micro liquid;
the computer controls the operation of the two-dimensional moving device of the moving platform through the driving interface of the moving platform, and according to the thickness of the micro liquid collected by the tail fiber type optical probe sensor at different positions, a micro liquid film thickness measuring result is obtained.
Preferably, the controller is connected with the computer through a USB line, and the motion platform is connected with the computer through a network line.
Preferably, a computer is used for the graphical display of the micro-liquid film thickness measurement.
Preferably, when the fast white light source emits light, the light is coupled into the optical fiber, and is transmitted to the probe of the tail fiber type optical probe sensor through the tail fiber of the tail fiber type optical probe sensor, the probe focuses the light with different wavelengths at different positions of the optical axis and irradiates the object carrying disc, and then the reflected light is received and transmitted to the spectrometer through the optical fiber.
Preferably, the measuring range of the first tail fiber type optical probe sensor is [0,0.2] mm, and the measuring range of the second tail fiber type optical probe sensor is [0,3.5] mm.
The invention also discloses a method for measuring the thickness of the micro-liquid film based on the spectral confocal displacement sensor, which comprises the following steps:
S1, placing micro liquid on a carrying disc;
s2, setting scanning parameters;
The scanning parameters at least comprise the step ranges and the step times of an x axis and a y axis according to the surface size of the micro liquid to be detected, and the sampling frequency during scanning;
S3, measuring the thickness of the micro liquid film once;
The two-dimensional moving device moves according to the set stepping range and the stepping times to drive the first tail fiber type optical probe sensor and the second tail fiber type optical probe sensor to scan and sample the micro liquid, so that the thickness of the micro liquid film at different sampling points on the carrying disc is obtained.
S4, determining the measurement times;
s5, measuring the micro liquid on the carrying disc according to the measurement times;
Each time according to S3, measuring the micro liquid on the carrying disc once to obtain a micro liquid film thickness matrix formed by sampling points of the first tail fiber type optical probe sensor And a micro liquid film thickness matrix composed of sampling points of the second tail fiber type optical probe sensor,A serial number indicating the number of measurements,。
S6, obtaining and displaying the thickness of the micro-liquid film;
and averaging the thickness matrix of the micro-liquid film after N times of measurement, and obtaining the thickness of the micro-liquid film according to the weights of the two tail fiber type optical probe sensors.
Preferably, the specific step of determining the number of measurement in S4 is:
S41, obtaining a sample standard deviation:
;
;
;
wherein n is the number of sampling points obtained by one scanning according to the step S3, The thickness of the micro liquid film measured for each sampling point; Is the average value of the thickness of the micro liquid film at the sampling point, As the sample variance of the micro-liquid film thickness at the sampling point,Is the standard deviation of the sample of the micro liquid film thickness of the sampling point.
S42, determining a sample variation coefficient
;
Wherein, the As a result of the coefficient of variation of the sample,The standard deviation of the sample is the thickness of the micro liquid film at the sampling point,Is the average value of the thickness of the micro liquid film at the sampling point.
S43, obtaining the measurement times
The number of measurements can be calculated based on the sample coefficient of variation, the desired confidence level, and the relative error limit, or can be directly looked up using a table.
Preferably, the number of measurements can be calculated based on the sample variation coefficient, the expected confidence level and the relative error limit, specifically:
;
Wherein, the In order to measure the number of times,As a result of the coefficient of variation of the sample,For relative error limits, z is the quantile of the standard normal distribution, determined by confidence.
Preferably, S6 obtains the thickness of the micro-liquid film and displays the average matrix of the thickness of the micro-liquid film of two tail fiber type optical probe sensors:
;
;
Wherein, the Is the firstA micro liquid film thickness matrix formed by sampling points of a first tail fiber type optical probe sensor during secondary measurement,Is the firstAnd in secondary measurement, N is the total measurement times, A is the micro-liquid film average thickness matrix formed by the sampling points of the first tail fiber type optical probe sensor, and B is the micro-liquid film average thickness matrix formed by the sampling points of the second tail fiber type optical probe sensor.
Determining weights:
,;
Wherein, the AndThe weights of the first tail fiber type optical probe sensor and the second tail fiber type optical probe sensor are respectively,AndThe linear errors of the first tail fiber type optical probe sensor and the second tail fiber type optical probe sensor are respectively.
Micro liquid film thickness matrix:
;
Wherein t is the thickness of the micro-liquid film, and the thickness units of the micro-liquid film are all mm.
Preferably, the micro liquid on the carrying tray in S1 is one or more drops as a sample.
Compared with the prior art, the invention has the following beneficial effects:
1. the thickness measurement precision of the nano micro-liquid film is realized by utilizing the spectral confocal principle, and the method is suitable for high-resolution detection of extreme scenes.
2. The multi-sensor data real-time synchronous acquisition and fusion algorithm is adopted, so that the limitation of a single sensor is overcome, and the measurement reliability of the non-uniformity or the surface characteristics of the liquid film is enhanced.
3. The sensor corrosion is avoided through non-contact optical measurement, and the chromatic dispersion confocal technology has self-adaptive analysis capability on the optical characteristics of the transparent/semitransparent liquid film, and is suitable for corrosive media such as acid and alkali.
Drawings
FIG. 1 is a schematic diagram of the overall structure of a micro-liquid film thickness measuring device based on a spectral confocal displacement sensor;
FIG. 2 is a schematic diagram of a micro-liquid film thickness measuring device based on a spectral confocal displacement sensor according to the invention;
FIG. 3 is a flow chart of a method of measuring micro-liquid film thickness based on a spectral confocal displacement sensor of the present invention;
FIG. 4 is a graph showing the thickness measurement results of a micro liquid film according to an embodiment of the present invention.
Detailed Description
The invention provides a micro-liquid film thickness measuring method and device based on a spectral confocal displacement sensor, wherein the spectral confocal displacement sensor realizes nano-level high-precision measurement of the micro-liquid film thickness by utilizing the principle of optical dispersion and confocal. The invention expands the traditional spectrum confocal technology to the micro-liquid film field, and solves the problem of measuring the thickness of the micro-liquid film through optical-algorithm-mechanical cooperative optimization. Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
The invention provides a micro liquid film thickness measuring device based on a spectrum confocal displacement sensor, which is shown in fig. 1 and comprises a controller 1, a motion platform 2, a tail fiber type optical probe sensor 3, a carrying disc 4 and a computer 5, wherein:
The controller 1 comprises a fast white light source, a light source driver, a spectrometer, a photoelectric signal processor, an optical fiber and a controller driver interface. The light source drive is used for driving a fast white light source, and the fast white light source is connected with the optical fiber and used for sending the light source to the tail fiber type optical probe sensor. The spectrometer is also connected with the optical fiber, receives the optical signal of the tail optical fiber type optical probe sensor through the optical fiber, obtains a spectrogram according to the received optical signal, sends the spectrogram to the photoelectric signal processor, and the photoelectric signal processor obtains the thickness of the micro liquid film at the position measured by the current tail optical fiber type optical probe sensor according to the spectrogram. The controller driving interface is connected with the computer and used for controlling the light source to drive and receiving the thickness of the micro-liquid film of the photoelectric signal processor by the computer. The controller is preferably connected to the computer via a USB cable.
The motion platform 2 is composed of a two-dimensional moving device and a motion platform driving interface, wherein the two-dimensional moving device comprises a movable x axis and a movable y axis, the motion platform driving interface is connected with a computer to realize the motion control of the two-dimensional moving device, and the preferred motion platform is connected with the computer through a network cable.
The tail fiber type optical probe sensor 3 consists of two tail fiber type optical probe sensors with different precision, which are all arranged on the y axis of the two-dimensional moving device and are connected with the spectrometer and the fast white light source through optical fibers. As shown in fig. 2, when the fast white light source emits light, the light is coupled into the optical fiber, and is transmitted to the probe of the tail fiber type optical probe sensor through the tail fiber of the tail fiber type optical probe sensor, the probe focuses the light with different wavelengths at different positions of the optical axis and irradiates the object carrying disc, and then the reflected light is received and transmitted to the spectrometer through the optical fiber. In this embodiment, the measurement range of the first pigtail type optical probe sensor is 0-0.2 mm, and the measurement range of the second pigtail type optical probe sensor is 0-1.5 mm.
The carrying tray 4 is positioned below the moving platform in parallel and is used for carrying micro liquid.
And the computer controls the operation of the two-dimensional moving device of the moving platform through the driving interface of the moving platform 5, and according to the thickness of the micro liquid collected by the tail fiber type optical probe sensor at different positions, a patterned micro liquid film thickness measurement result is obtained.
The invention also discloses a method for measuring the thickness of the micro liquid film based on the spectral confocal displacement sensor by using the device, as shown in figure 3, comprising the following steps:
s1, placing the micro-fluid on a carrying disc, wherein the micro-fluid on the carrying disc can be one or more drops as a sample.
And S2, setting scanning parameters, namely setting the stepping range and the stepping times of an x axis and a y axis according to the surface size of the micro liquid to be detected and the sampling frequency during scanning in a computer.
S3, measuring the thickness of the micro liquid film once;
The two-dimensional moving device operates under the control of the computer according to the set stepping range and the stepping times, and drives the first tail fiber type optical probe sensor and the second tail fiber type optical probe sensor to scan and sample the micro liquid along the motion track, so that the micro liquid film thickness of different positions of the micro liquid on the carrying disc is obtained.
S4, determining the measurement times;
The single measurement has a large error, and the error caused by the data sample can be eliminated through multiple measurements, but the measurement of the multiple times causes inefficiency, so that the proper measurement times need to be determined. The application uses the sample variation coefficient to correspond to the preset measurement times to obtain the times which finally need to be tested. The method comprises the following steps:
S41, obtaining a sample standard deviation:
;
;
;
Wherein n is the number of sampling points obtained by performing one scan according to step S3, in this embodiment, because two fiber optic probe sensors are used, the number of sampling points obtained by one scan is the sum of the sampling points of the two fiber optic probe sensors, The thickness of the micro liquid film measured for each sampling point; Is the average value of the thickness of the micro liquid film at the sampling point, As the sample variance of the micro-liquid film thickness at the sampling point,Is the standard deviation of the sample of the micro liquid film thickness of the sampling point.
S42, determining a sample variation coefficient
;
Wherein, the As a result of the coefficient of variation of the sample,The standard deviation of the sample is the thickness of the micro liquid film at the sampling point,Is the average value of the thickness of the micro liquid film at the sampling point.
S43, obtaining the measurement times
The number of measurements can be obtained based on the sample coefficient of variation, the desired confidence level, and the relative error limit:
;
Wherein, the In order to measure the number of times,As a result of the coefficient of variation of the sample,For relative error limits, z is the quantile of the standard normal distribution, determined by confidence. Common value 90% confidenceAt 95%99% Of。
The table may be directly used to correspond to the sample variation coefficient, and in this embodiment, the correspondence relationship between the sample variation coefficient and the measurement frequency is specified directly using table 1:
TABLE 1
The measurement times in the table refer to the minimum measurement times, and after multiple measurements are carried out according to the measurement times determined in the table, the final micro-liquid film thickness value can be ensured to meet the confidenceError limit =95%. Of course, the number of measurements may be increased from the minimum number of measurements according to actual requirements.
S5, measuring the micro liquid on the carrying disc according to the measurement times N;
each time the micro liquid on the carrying disc is measured according to the step S3, a micro liquid film thickness matrix formed by sampling points of the first tail fiber type optical probe sensor is obtained And a micro liquid film thickness matrix composed of sampling points of the second tail fiber type optical probe sensor,A serial number indicating the number of measurements,。
S6, obtaining and displaying the thickness of the micro-liquid film;
and averaging the micro-liquid film thickness matrix after multiple measurements, and obtaining the micro-liquid film thickness according to the weights of the two tail fiber type optical probe sensors.
Micro-liquid film thickness average matrix of two tail fiber type optical probe sensors:
;
;
Wherein, the Is the firstA micro liquid film thickness matrix formed by sampling points of a first tail fiber type optical probe sensor during secondary measurement,Is the firstAnd in secondary measurement, N is the total measurement times, A is the micro-liquid film average thickness matrix formed by the sampling points of the first tail fiber type optical probe sensor, and B is the micro-liquid film average thickness matrix formed by the sampling points of the second tail fiber type optical probe sensor.
Determining weights:
, ;
Wherein, the AndThe weights of the first tail fiber type optical probe sensor and the second tail fiber type optical probe sensor are respectively,AndThe linear errors of the first tail fiber type optical probe sensor and the second tail fiber type optical probe sensor belong to design parameters;
micro liquid film thickness matrix:
;
Wherein t is the thickness of the micro-liquid film, and the thickness units of the micro-liquid film are all mm.
In this embodiment, taking one group of micro-liquid film data as an example, the data record is shown in table 2, wherein the thickness of the micro-liquid film measured by the first tail fiber type optical probe sensor is recorded as CH 1-thickness, the thickness of the micro-liquid film measured by the second tail fiber type optical probe sensor is recorded as CH 2-thickness, and the numerical value-2147.48 represents that the point position is out of range.
TABLE 2
It can be seen from the above table that the first fiber optic probe sensor does not sample the carrying tray at this time, but only the second fiber optic probe sensor samples the thickness of the micro-liquid film, and along with the movement of the x-axis and the y-axis of the two-dimensional moving device, the subsequent first fiber optic probe sensor samples the thickness of the micro-liquid film at the same position, which is not shown here. The thickness of the micro liquid film of the first tail fiber type optical probe sensor and the thickness of the micro liquid film of the second tail fiber type optical probe sensor at the same position sampling point and the average thickness of the micro liquid film at the same position sampling point can be obtained after multiple times of scanning;
Obtaining the weight according to the linear error sigma 1 of the first tail optical probe sensor being 0.12 mu m and the linear error sigma 2 of the second tail optical probe sensor being 0.40 mu m And
According to the weights w 1 and w 2, the thickness t of the micro-liquid film can be calculated
;
According to the calculated matrix of the thickness t of the micro liquid film, according to the corresponding coordinate position of each element in the matrix, the measuring result of the thickness of the micro liquid film can be displayed in a graphical mode by using tool software, as shown in fig. 4.
The above examples are only illustrative of the preferred embodiments of the present invention and are not intended to limit the scope of the present invention, and various modifications and improvements made by those skilled in the art to the technical solution of the present invention should fall within the scope of protection defined by the claims of the present invention without departing from the spirit of the present invention.
Claims (10)
1. A micro-liquid film thickness measuring device based on a spectrum confocal displacement sensor is characterized by comprising a controller, a motion platform, a tail fiber type optical probe sensor, a carrying disc and a computer, wherein:
The controller comprises a fast white light source, a light source driver, a spectrometer, a photoelectric signal processor, an optical fiber and a controller driver interface; the spectrometer is also connected with the optical fiber, receives the optical signal of the tail optical fiber type optical probe sensor through the optical fiber, obtains a spectrogram according to the received optical signal, sends the spectrogram to the photoelectric signal processor, and obtains the thickness of the micro-liquid film at the position measured by the current tail optical probe sensor according to the spectrogram;
The motion platform consists of a two-dimensional moving device and a motion platform driving interface, wherein the two-dimensional moving device comprises an x axis and a y axis which can move, and the motion platform driving interface is connected with a computer to realize the movement control of the two-dimensional moving device;
The tail fiber type optical probe sensor consists of two tail fiber type optical probe sensors with different precision, which are all arranged on the y axis of the two-dimensional moving device and are connected with the spectrometer and the fast white light source through optical fibers;
The carrying disc is positioned below the moving platform in parallel and is used for carrying micro liquid;
the computer controls the operation of the two-dimensional moving device of the moving platform through the driving interface of the moving platform, and according to the thickness of the micro liquid collected by the tail fiber type optical probe sensor at different positions, a micro liquid film thickness measuring result is obtained.
2. The micro-liquid film thickness measuring device based on the spectral confocal displacement sensor according to claim 1, wherein the controller is connected with a computer through a USB (universal serial bus) line, and the motion platform is connected with the computer through a network cable.
3. The micro-liquid film thickness measuring device based on the spectrum confocal displacement sensor according to claim 1, wherein a graphical display is adopted for a micro-liquid film thickness measuring result computer.
4. The micro-liquid film thickness measuring device based on the spectrum confocal displacement sensor according to claim 1, wherein when the fast white light source emits light, the fast white light source is coupled into an optical fiber, the light is transmitted to a probe of the tail optical fiber type optical probe sensor through a tail optical fiber of the tail optical fiber type optical probe sensor, the probe focuses light with different wavelengths at different positions of an optical axis and irradiates on a carrying disc, and then reflected light is received and transmitted to a spectrometer through the optical fiber.
5. The spectral confocal displacement sensor-based micro-liquid film thickness measurement apparatus according to claim 1, wherein:
The measuring range of the first tail fiber type optical probe sensor is [0,0.2] mm, and the measuring range of the second tail fiber type optical probe sensor is [0,3.5] mm.
6. A method of using the spectral confocal displacement sensor-based micro-liquid film thickness measurement apparatus according to any one of claims 1-5, characterized in that it comprises the steps of:
S1, placing micro liquid on a carrying disc;
s2, setting scanning parameters;
The scanning parameters at least comprise the step ranges and the step times of an x axis and a y axis according to the surface size of the micro liquid to be detected, and the sampling frequency during scanning;
S3, measuring the thickness of the micro liquid film once;
the two-dimensional moving device moves according to the set stepping range and the stepping times to drive the first tail fiber type optical probe sensor and the second tail fiber type optical probe sensor to scan and sample the micro liquid to obtain the thickness of the micro liquid film at different sampling points on the carrying disc;
S4, determining the measurement times;
s5, measuring the micro liquid on the carrying disc according to the measurement times;
Each time according to S3, measuring the micro liquid on the carrying disc once to obtain a micro liquid film thickness matrix formed by sampling points of the first tail fiber type optical probe sensor And a micro liquid film thickness matrix composed of sampling points of the second tail fiber type optical probe sensor,A serial number indicating the number of measurements,;
S6, obtaining and displaying the thickness of the micro-liquid film;
and averaging the thickness matrix of the micro-liquid film after N times of measurement, and obtaining the thickness of the micro-liquid film according to the weights of the two tail fiber type optical probe sensors.
7. The method for measuring the thickness of the micro-liquid film based on the spectral confocal displacement sensor according to claim 6, wherein the step S4 of determining the measurement times is specifically as follows:
S41, obtaining a sample standard deviation:
;
;
;
wherein n is the number of sampling points obtained by one scanning according to the step S3, The thickness of the micro liquid film measured for each sampling point; Is the average value of the thickness of the micro liquid film at the sampling point, As the sample variance of the micro-liquid film thickness at the sampling point,The standard deviation of the sample is the thickness of the micro liquid film at the sampling point;
S42, determining a sample variation coefficient
;
Wherein, the As a result of the coefficient of variation of the sample,The standard deviation of the sample is the thickness of the micro liquid film at the sampling point,The average value of the thickness of the micro liquid film at the sampling point;
S43, obtaining the measurement times
The number of measurements can be calculated based on the sample coefficient of variation, the desired confidence level, and the relative error limit, or can be directly looked up using a table.
8. The method for measuring the thickness of the micro-liquid film based on the spectral confocal displacement sensor according to claim 7, wherein the measuring times can be obtained by calculation according to the sample variation coefficient, the expected confidence coefficient and the relative error limit, and the measuring times are specifically as follows:
;
Wherein, the In order to measure the number of times,As a result of the coefficient of variation of the sample,For relative error limits, z is the quantile of the standard normal distribution, determined by confidence.
9. The method for measuring the thickness of the micro-liquid film based on the spectral confocal displacement sensor according to claim 6, wherein the step S6 is performed to obtain the thickness of the micro-liquid film and display specifically:
micro-liquid film thickness average matrix of two tail fiber type optical probe sensors:
;
;
Wherein, the Is the firstA micro liquid film thickness matrix formed by sampling points of a first tail fiber type optical probe sensor during secondary measurement,Is the firstIn secondary measurement, N is the total measurement times, A is the micro-liquid film average thickness matrix formed by the sampling points of the first tail fiber type optical probe sensor, and B is the micro-liquid film average thickness matrix formed by the sampling points of the second tail fiber type optical probe sensor;
Determining weights:
,;
Wherein, the AndThe weights of the first tail fiber type optical probe sensor and the second tail fiber type optical probe sensor are respectively,AndThe linear errors of the first tail fiber type optical probe sensor and the second tail fiber type optical probe sensor are respectively;
micro liquid film thickness matrix:
;
Wherein t is the thickness of the micro-liquid film, and the thickness units of the micro-liquid film are all mm.
10. The method of claim 6, wherein the micro-fluid on the tray in S1 is one or more drops as a sample.
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