CN120703875B - Manufacturing method of fused quartz double-aspheric rod mirror - Google Patents
Manufacturing method of fused quartz double-aspheric rod mirrorInfo
- Publication number
- CN120703875B CN120703875B CN202511198435.6A CN202511198435A CN120703875B CN 120703875 B CN120703875 B CN 120703875B CN 202511198435 A CN202511198435 A CN 202511198435A CN 120703875 B CN120703875 B CN 120703875B
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- Prior art keywords
- aspheric
- rod mirror
- fused silica
- silica double
- tool
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/02—Simple or compound lenses with non-spherical faces
- G02B3/04—Simple or compound lenses with non-spherical faces with continuous faces that are rotationally symmetrical but deviate from a true sphere, e.g. so called "aspheric" lenses
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Optics & Photonics (AREA)
- Optical Elements Other Than Lenses (AREA)
- Laser Beam Processing (AREA)
Abstract
本发明公开了一种熔石英双非球面棒镜制造方法，包括步骤：S1、对熔石英双非球面棒镜进行激光辅助超精密车削；S2、检测熔石英双非球面棒镜的面型精度和表面粗糙度，如果检测结果达到加工要求，执行步骤S3，否则执行步骤S1；S3、对熔石英双非球面棒镜进行保形抛光；S4、检测熔石英双非球面棒镜的面型精度和表面粗糙度，如果检测结果达到加工要求，执行步骤S5，否则执行步骤S3；S5、对熔石英双非球面棒镜进行光学检验。本发明增加刀具寿命的同时提高了加工后面型精度，降低了加工后表面粗糙度，增加了车削效率，并在超精密车削加工后引入保形抛光工序，实现加工棒镜粗糙度的快速提升。
The present invention discloses a method for manufacturing a fused silica double aspheric rod mirror, comprising the following steps: S1, performing laser-assisted ultra-precision turning on the fused silica double aspheric rod mirror; S2, detecting the surface accuracy and surface roughness of the fused silica double aspheric rod mirror; if the detection result meets the processing requirements, executing step S3; otherwise, executing step S1; S3, performing conformal polishing on the fused silica double aspheric rod mirror; S4, detecting the surface accuracy and surface roughness of the fused silica double aspheric rod mirror; if the detection result meets the processing requirements, executing step S5; otherwise, executing step S3; S5, performing optical inspection on the fused silica double aspheric rod mirror. The present invention increases tool life while improving post-processing profile accuracy, reducing post-processing surface roughness, and increasing turning efficiency. Furthermore, a conformal polishing step is introduced after ultra-precision turning to achieve rapid improvement in the roughness of the processed rod mirror.
Description
Technical Field
The invention relates to the technical field of ultra-precise machining methods of optical elements, in particular to a manufacturing method of a fused quartz double-aspheric rod lens.
Background
At present, fused quartz materials are main materials of optical elements in a high-energy laser system, and have the characteristics of high hardness, high durability, high-power laser damage resistance and the like. The light intensity distribution generated by the general optical fiber laser output device is Gaussian distribution with high peak power, the internal optical element of the optical fiber laser output device is easy to damage due to high peak power laser irradiation, and the fused quartz double-aspheric rod lens has the advantages of simple structure, strong laser damage resistance, easy integration and the like while realizing beam shaping, and has wide application prospect in an optical fiber laser system.
However, the fused quartz is used as a typical hard and brittle difficult-to-process material, the traditional grinding and polishing forming processing mode for the fused quartz optical element has low processing efficiency, large subsurface damage to the material and difficult guarantee of surface type precision. The ultra-precise grinding technology is difficult to process small-caliber optical elements, particularly has the problem of grinding head interference during small-caliber aspheric surface processing, and has larger surface roughness after processing, and has the problems of larger cutter abrasion, cutter scratch and the like during ultra-precise turning processing.
Therefore, how to realize high-precision manufacture of the fused quartz double-aspheric rod lens is a current difficult problem.
Disclosure of Invention
The invention aims to solve the technical problem of overcoming the defects in the prior art and providing the manufacturing method of the fused quartz double-aspheric rod lens, which is beneficial to prolonging the service life of a cutter, improving the precision of the machined rear surface and reducing the surface roughness of the machined rear surface.
In order to solve the technical problems, the invention adopts the following technical scheme:
The manufacturing method of the fused quartz double-aspheric rod mirror comprises the following steps:
s1, performing laser-assisted ultra-precise turning on a fused quartz double-aspheric rod mirror;
s2, detecting the surface type precision and the surface roughness of the fused quartz double-aspheric rod mirror, if the detection result meets the processing requirement, executing the step S3, otherwise, executing the step S1;
S3, performing conformal polishing on the fused quartz double-aspheric rod mirror;
s4, detecting the surface type precision and the surface roughness of the fused quartz double-aspheric rod mirror, if the detection result meets the processing requirement, executing the step S5, otherwise, executing the step S3;
s5, carrying out optical inspection on the fused quartz double-aspheric rod mirror.
As a further improvement of the above technical scheme:
step S1 comprises S1.1 rough turning:
the method comprises the steps of adopting cutters with front angles of-20 DEG to-40 DEG, rear angles of 10 DEG to 20 DEG and curvature radius of 0.3 to 0.8mm when the convex aspheric surface at one end of the rod lens is roughly machined, adopting cutters with front angles of-20 DEG to-40 DEG, rear angles of 10 DEG to 20 DEG and curvature radius of 0.3 to 0.8mm when the concave aspheric surface at one end of the rod lens is roughly machined, wherein the technological parameters are that the workpiece rotating speed is 1000 to 3000rpm, the cutter feeding speed is 2 to 4mm/min, the cutting depth is 4 to 6 mu m, the laser wavelength is 1064nm, and the laser power is 10 to 15W.
Step S1 also includes S1.2 semi-finish turning:
the semi-finish turning is carried out by adopting cutters with front angles of-20 to-40 degrees, rear angles of 10 to 20 degrees and curvature radius of 0.3 to 0.8mm, and the semi-finish turning is carried out by adopting cutters with front angles of-20 to-40 degrees, rear angles of 10 to 20 degrees and curvature radius of 0.3 to 0.8mm, wherein the technological parameters are that the workpiece rotating speed is 1000 to 3000rpm, the cutter feeding speed is 1 to 2mm/min, the cutting depth is 2 to 4 mu m, the laser wavelength is 1064nm, and the laser power is 10 to 15W.
Step S1 also includes S1.3 finish turning:
the method comprises the steps of adopting cutters with the front angles of-20 DEG to-40 DEG, the rear angles of 10 DEG to 20 DEG and the curvature radius of 0.3 to 0.8mm when the convex aspheric surface is finely turned, adopting cutters with the front angles of-20 DEG to-40 DEG, the rear angles of 10 DEG to 20 DEG and the curvature radius of 0.3 to 0.8mm when the concave aspheric surface is finely turned, wherein the technological parameters are that the workpiece rotating speed is 1000 to 3000rpm, the cutter feeding speed is 0.5 to 1mm/min, the cutting depth is 1 to 2 mu m, the laser wavelength is 1064nm, and the laser power is 10 to 15W.
And in the step S2, if the detection result does not meet the processing requirement, introducing a compensation curvature radius to perform semi-finish turning in the step S1.2, and then performing finish turning in the step S1.3.
The cutter is a single-point diamond cutter.
The technological parameters of the step S3 are that the workpiece rotation speed is 10-15 rpm, the polyurethane polishing rotation speed is 8000-10000rpm, the pressure is 5-10N, and the feeding speed is 2-4 mm/min.
In step S2, the machining requires surface roughness Ra <100nm, surface type precision PV <1 lambda, RMS <100nm.
In step S4, the machining requires surface roughness Ra <20nm, surface type precision PV <0.1λ, and RMS <100nm.
And measuring the far-field light spot energy concentration degree, the near-field light spot uniformity and the power loading capacity of the workpiece through a beam shaping experiment so as to test the optical performance of the workpiece.
Compared with the prior art, the invention has the advantages that:
The manufacturing method of the quartz double-aspheric rod mirror disclosed by the invention adopts laser-assisted ultra-precise turning combined with conformal polishing processing, increases the service life of a cutter and improves the precision of the processed surface (the surface type error PV is within 1 mu m and the RMS is within 100 nm) at the same time, reduces the surface roughness after processing (the surface roughness Ra is within 100 nm), increases the turning efficiency, and realizes the rapid improvement of the roughness of the processed rod mirror (the surface roughness Ra is better than 20 nm) by introducing a conformal polishing process after ultra-precise turning processing. After processing, the energy concentration of far-field light spots of the rod lens in a beam shaping experiment reaches 50.19%, the uniformity of the near-field light spots is better than 85%, the maximum power reaches 88.11%, and the power load reaches 14.7kW.
Additional features and advantages of the invention will be set forth in the detailed description which follows.
Drawings
FIG. 1 is a schematic flow chart of a method for manufacturing a fused silica double-aspherical rod mirror according to the present invention.
Fig. 2 shows the result of the precision detection after laser-assisted ultra-precise turning of the workpiece.
Fig. 3 is a graph showing the result of surface roughness detection after laser-assisted ultra-precise turning of a workpiece.
Fig. 4 is a graph showing the surface roughness measurement after conformal polishing of a workpiece.
Fig. 5 shows the far-field spot morphology of the workpiece in the far-field beam shaping experiment.
Fig. 6 is a near field spot morphology of a workpiece in a near field beam shaping experiment.
Detailed Description
In the description of the present invention, it should be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate describing the present invention and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present invention, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed, mechanically connected, electrically connected, directly connected, indirectly connected via an intervening medium, or in communication between two elements or in an interaction relationship between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
The invention is described in further detail below with reference to the drawings and specific examples of the specification.
Referring to fig. 1 to 6, taking a quartz double-aspheric beam shaping element as an example, the rod lens is composed of two aspheric surfaces, one end is a concave aspheric surface, the other end is a convex aspheric surface, wherein the effective caliber of the concave surface is 6mm, the effective caliber of the convex surface is 14mm, and the machining requires surface type precision PV <0.1 lambda, RMS <100nm and surface roughness Ra <20nm.
The implementation steps of the manufacturing method of the fused quartz double-aspheric rod mirror in the embodiment comprise:
Step 1, performing laser-assisted ultra-precise turning on a fused quartz double-aspheric rod mirror;
Step 2, detecting the surface precision and the surface roughness of the fused quartz double-aspheric rod mirror;
step 3, performing conformal polishing on the fused quartz double-aspheric rod lens;
step 4, detecting the surface precision and the surface roughness of the fused quartz double-aspheric rod mirror;
and 5, carrying out optical inspection on the fused quartz double-aspheric rod mirror.
In the step 1, laser assisted ultra-precise turning is carried out on a quartz double-aspheric rod mirror, which comprises rough turning, semi-finish turning and finish turning, wherein a single-point diamond cutter with a front angle of-30 degrees, a rear angle of 13 degrees and a curvature radius of 0.5mm is adopted when the aspheric surface of the convex rod mirror is machined in rough turning, a single-point diamond cutter with a front angle of-30 degrees, a rear angle of 18 degrees and a curvature radius of 0.5mm is adopted when the aspheric surface of the concave rod mirror is machined, and the machining adopts the technological parameters of 1000rpm of a workpiece, 2mm/min of cutter feeding speed, 6 mu m of cutting depth, 1064nm of laser wavelength and 10W of laser power.
The laser-assisted semi-finish turning of the quartz double-aspheric rod mirror adopts the technological parameters that the workpiece rotating speed is 1000rpm, the cutter feeding speed is 1mm/min, the cutting depth is 4 mu m, the cutting depth is reduced by reducing the feeding speed, the turning precision is improved, the laser wavelength is 1064nm, and the laser power is 10W. The tool parameters are consistent with rough turning.
The technological parameters adopted for carrying out laser auxiliary finish turning on the fused quartz double-aspheric rod lens are that the workpiece rotating speed is 1000rpm, the cutter feeding speed is 0.5mm/min, the cutting depth is 2 mu m, and the cutting depth is reduced by further reducing the feeding speed, so that the turning precision is further improved, and the machining requirement is met, the laser wavelength is 1064nm, and the laser power is 10W. The cutter parameters are consistent with rough turning and semi-finish turning.
In the step 2, the surface type precision detection is carried out on the quartz double-aspheric rod mirror subjected to finish turning by adopting a high-precision surface profiler, the surface roughness detection is carried out by utilizing a white light interferometer, the detection results are shown in fig. 2 and 3, the detection result is that the convex surface Ra value is 37.89nm, the PV value is 0.73 mu m, the RMS value is 88.01nm, the concave surface Ra value is 52.4nm, the PV value is 0.85 mu m, the RMS value is 46.27nm, the surface roughness Ra is <100nm, the surface type precision PV <1 lambda (lambda is the laser wavelength used by the interferometer), the RMS is <100nm, otherwise, the half finish turning is carried out by returning to the step 1 and introducing the compensated curvature radius according to the actually measured result, and the processing parameters are that the workpiece rotation speed is 1000rpm, the cutter feeding speed is 1mm/min, the cutting depth is 2 mu m, the laser wavelength is 1064nm and the laser power is 10W. And then finish turning is carried out, wherein the machining parameters are that the workpiece rotating speed is 1000rpm, the cutter feeding speed is 1mm/min, the cutting depth is 2 mu m, the laser wavelength is 1064nm, and the laser power is 10W.
In step 3, after ultra-precise turning, the technical requirements of the elements have a large gap, and the surfaces need to be subjected to further conformal polishing. And carrying out conformal polishing on the processed quartz double-aspheric rod mirror, and carrying out conformal polishing on the turned rod mirror by adopting a turning and polishing integrated machine tool so as to improve the roughness. The parameters of the conformal polishing process are that the workpiece rotation speed is 10rpm, the polyurethane polishing rotation speed is 8000rpm, the pressure is 5N, and the feeding speed is 2mm/min.
In step 4, the surface precision and the surface roughness of the processed quartz double-aspheric rod lens are detected again, the roughness result is shown in fig. 4 by adopting a white light interferometer, the convex surface Ra is 5.86nm, the PV is 0.08 mu m, the RMS is 7.38nm, the concave surface Ra is 6.21nm, the PV is 0.09 mu m, the RMS is 15.02nm, the Ra <20nm, the PV <0.1 lambda, and the RMS <100nm meeting the processing index requirements are achieved, otherwise, the polishing process is carried out again according to the measured result in step 3.
In step 5, optical detection is carried out on the polished double-aspheric rod lens, and the far-field light spot energy concentration, the near-field light spot uniformity and the power loading capacity are measured through a beam shaping experiment to test the optical performance. The far-field light spot appearance is shown in fig. 5, the energy concentration of the far-field light spot is 50.19%, the shaping effect is good, the shaped light spot is uniform, and in the far-field light spot shaping experiment, the power of the fiber laser is 50W, and the wavelength is 1070nm. The appearance of the near field light spot is shown in fig. 6, the uniformity of the near field light spot is measured to be higher than 85 percent and up to 88.11 percent, and in a near field beam shaping experiment, the power of the fiber laser is 50W, and the wavelength is 1070nm. A high-power laser with the wavelength of 1070nm and the power of 2.9kW is applied to detect the power load of the rod lens after processing, and the rod lens can normally work under the power of 2.9kW, and the power load of the rod lens is 14.7kW through calculation.
The manufacturing method of the quartz double-aspheric rod mirror adopts laser-assisted ultra-precise turning and conformal polishing, increases the service life of a cutter and improves the precision of the machined surface (the surface error PV is within 1 mu m and the RMS is within 100 nm) by introducing a laser-assisted technology and a single-point diamond cutting technology, reduces the surface roughness (the surface roughness Ra is within 100 nm) after machining, increases the turning efficiency, and realizes the rapid improvement of the roughness of the machined rod mirror (the surface roughness Ra is better than 20 nm) by introducing a conformal polishing method after ultra-precise turning.
While the invention has been described with reference to preferred embodiments, it is not intended to be limiting. Many possible variations and modifications of the disclosed technology can be made by anyone skilled in the art, or equivalent embodiments with equivalent variations can be made, without departing from the scope of the invention. Therefore, any simple modification, equivalent variation and modification of the above embodiments according to the technical substance of the present invention shall fall within the scope of the technical solution of the present invention.
Claims (7)
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| CN109590603A (en) * | 2019-01-07 | 2019-04-09 | 中国科学院上海光学精密机械研究所 | The laser beam polishing method of fused quartz optical glass |
| CN112157486A (en) * | 2020-09-28 | 2021-01-01 | 中国人民解放军国防科技大学 | Ultra-precision machining method for fused quartz strong laser optical element |
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| IL139038A (en) * | 1998-05-21 | 2004-06-20 | Ophir Optronics Ltd | Precision double-sided aspheric elements |
| JP4556383B2 (en) * | 2002-11-29 | 2010-10-06 | コニカミノルタホールディングス株式会社 | Processing method of transfer optical surface |
| CN118081491A (en) * | 2024-03-28 | 2024-05-28 | 中国人民解放军国防科技大学 | A method for processing small-caliber fused quartz high-intensity laser shaping components |
| CN119282868A (en) * | 2024-10-15 | 2025-01-10 | 中国人民解放军国防科技大学 | A method for manufacturing aspherical fused silica optical element |
| CN120326799A (en) * | 2025-04-21 | 2025-07-18 | 中国人民解放军国防科技大学 | A method for processing single crystal silicon complex curved surface optical element |
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| CN109590603A (en) * | 2019-01-07 | 2019-04-09 | 中国科学院上海光学精密机械研究所 | The laser beam polishing method of fused quartz optical glass |
| CN112157486A (en) * | 2020-09-28 | 2021-01-01 | 中国人民解放军国防科技大学 | Ultra-precision machining method for fused quartz strong laser optical element |
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