CN120213817A - Bidirectionally coupled optical near-field alignment system based on off-axis parabolic reflectors - Google Patents
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Abstract
The invention discloses a bidirectional coupling optical near-field alignment system based on an off-axis parabolic reflector, which comprises a forward light path, a reverse light path and a coupling reflector pair, wherein the forward light path comprises a light source module, an interferometer module, an OAP and adjusting mechanism module, a probe and a sample table module, the reverse light path is used for switching a sample into a point light source on the basis of the forward light path, the point light source reversely emits laser, and the laser is divided into two paths through a newly added shearing interferometer after being reflected by the OAP. The bidirectional coupling optical near-field alignment system based on the off-axis parabolic reflector disclosed by the invention adopts a standard OAP-based bidirectional coupling optical near-field alignment method, can reduce near-field coupling alignment difficulty and improve near-field coupling efficiency, can realize automatic near-field coupling alignment according to quantitative and visual criteria, and has wide commercial prospect in large-scale and industrialized application and the like.
Description
Technical Field
The invention belongs to the technical field of optical near-field coupling alignment, and particularly relates to a bidirectional coupling optical near-field alignment system based on an off-axis parabolic reflector.
Background
In a near-field optical microscope and a nano infrared spectrometer, the realization of efficient optical near-field coupling alignment is a key for acquiring a near-field signal with a high signal-to-noise ratio. The core link of the optical near-field coupling alignment is to focus far-field plane waves or spherical waves to the tip of a scanning probe and accurately align a focusing light spot of the scanning probe with the tip. The optical elements used for optical near-field coupling alignment mainly include lenses, objective lenses, and off-axis parabolic mirrors (OAPs). OAP is widely used in near field optical imaging and near field spectroscopic measurements due to its achromatic nature. However, OAP requires great demands on the adjustment of the optical path-especially attention is paid to the azimuthal (pitch and yaw) adjustment of the OAP optical axis relative to the optical axis of the incident light. Studies have shown that when the angular deviation exceeds 10mrad, the focusing effect becomes significantly worse, resulting in increased aberrations and a reduction of the near field signal by more than an order of magnitude. Therefore, the OAP-based realization of efficient coupling alignment of the optical near field has great significance in developing and optimizing a near field optical microscope and a nanometer infrared spectrometer.
At present, the optical near-field coupling alignment method based on OAP mainly comprises the following two methods:
First, five-dimensional co-adjustment method, which is used by Bruker corporation, usa, OAP is mechanically fixed above a five-axis displacement table (including a 2-axis azimuth adjustment mechanism and a 3-axis spatial position adjustment mechanism). The method keeps the optical axis of the incident light unchanged, and adjusts the alignment of the OAP and the probe in a five-dimensional parameter joint search and optimization mode, see reference to figure 1. The method has the defects that the efficiency of the 5-dimensional parameter collaborative search and optimization process is low, and the misalignment of an OAP focus and an azimuth angle adjustment center can cause the coupling between the 2-axis azimuth angle and the 3-axis spatial position adjustment, so that the adjustment difficulty is remarkably increased.
Second, by using a special OAP adjustment method including a reflection end face, germany Neaspec adopts the method, which precisely processes a reflection end face on the edge of the OAP, adjusts the azimuth angle of incident light by referencing the reflection end face, and then adjusts the spatial position of the OAP in a translational manner to realize a near-field coupling pair, see fig. 2. The method has the advantages that only 3-dimensional parameters (2-dimensional direction angle adjustment is finished by the assistance of the reflecting end face of the special OAP) are needed to be searched, and the adjustment efficiency is obviously improved. However, the core of this method requires that the normal direction of the reflecting end face is exactly parallel to the direction of the OAP optical axis, which requires extremely high machining accuracy and cannot be generalized to standard OAP optical elements.
Accordingly, the above problems are further improved.
Disclosure of Invention
The invention mainly aims to provide a bidirectional coupling optical near-field alignment system based on an off-axis parabolic reflector, which adopts a bidirectional coupling optical near-field alignment method based on standard OAP, can reduce near-field coupling alignment difficulty and improve near-field coupling efficiency, can realize automatic near-field coupling alignment according to quantitative and visual criteria, and has wide commercial prospect in large-scale and industrialized application and the like.
In order to achieve the above object, the present invention provides a bi-directional coupling optical near-field alignment system based on an off-axis parabolic mirror, comprising a forward optical path, a reverse optical path and a coupling mirror pair, wherein:
The forward light path comprises a light source module, an interferometer module, an OAP and adjusting mechanism module, a probe and a sample stage module, wherein:
The light source module comprises incident laser, second guide laser and a second beam splitter, and the incident laser and the second guide laser are both emitted to the second beam splitter;
the interferometer module comprises a first beam splitter, a detector and a reference path reflector consisting of a reflector and a one-dimensional displacement table;
the OAP and adjusting mechanism module comprises an OAP and a three-dimensional displacement platform, and the OAP is fixed on the three-dimensional displacement platform;
The probe and sample stage module comprises a probe, a sample stage and a sample, wherein the sample is fixed above the sample stage and the probe is arranged above the sample;
The reverse light path is based on the forward light path, a sample is switched into a point light source, the point light source reversely emits laser, the laser is reflected by the OAP and then is divided into two paths by a newly added shearing interferometer, one path is used for interference imaging, the collimation or parallelism of the reversely emitted laser is judged, and the other path is reversely propagated by a first beam splitter;
The coupling reflector pair comprises a first coupling reflector and a second coupling reflector, wherein the first coupling reflector and the second coupling reflector are positioned between the shearing interferometer of the reverse light path and the first beam splitter of the forward light path and used for adjusting the direction of the optical axis in the reverse light path so as to realize the alignment of two optical axes in the bidirectional light path.
As a further preferable technical scheme of the technical scheme, the point light source is a point light source coupled and output by an optical fiber end face or a point light source formed by scattering of nano particles/quantum dots coupled and output by a waveguide end face.
As a further preferable technical solution of the above technical solution, the alignment method of the bi-directional coupling optical near-field alignment system is specifically implemented as the following steps:
Step S1, microscopic imaging is carried out on the probe, the position of the probe is recorded, and then the probe is moved to another safe position;
S2, moving a point light source, and moving the point light source to a position for recording a probe by taking microscopic imaging as a criterion;
s3, moving into a shearing interferometer, and iteratively adjusting a three-dimensional displacement table by taking the dip angle of an interference fringe of the shearing interferometer as a criterion to enable the dip angle of the interference fringe to approach 0 degree, so as to realize the three-dimensional position alignment of an OAP focus and a point light source;
Step S4, removing the shearing interferometer, and iteratively adjusting a coupling reflector pair between the forward optical path and the reverse optical path to enable two optical axes of the bidirectional optical path to coincide, so as to realize two-dimensional angle alignment of an OAP normal and a forward incident optical axis;
step S5, removing the point light source, moving the sample, and moving the probe back to the position of the record probe;
And S6, iteratively adjusting the three-dimensional displacement table by taking the near field signal measured by the detector as a quantitative criterion, so that the near field signal is maximized, and further, the accurate alignment of the optical near field is realized.
As a further preferable technical scheme of the technical scheme, a second collimating coupling mirror or a diaphragm is arranged between the second guided laser and the second beam splitter, and a visualization criterion for superposition of two optical axes of the bidirectional optical path is that the power of the backward propagation light passing through the center of the diaphragm in the forward optical path or passing through the second collimating coupling mirror is the largest.
As a further preferable embodiment of the above technical solution, the fiber point light source includes a first guided laser, a first collimating mirror, a first optical fiber, a clamping mechanism, and an optical fiber end face.
The invention has the beneficial effects that:
1. improving near field coupling alignment adjustment efficiency:
The OAP angle adjustment and displacement adjustment are separated, the original five-dimensional parameter search adjustment is simplified to be separated into three-dimensional parameter search adjustment and two-dimensional parameter search adjustment, and the adjustment complexity and workload are remarkably reduced.
2. Providing quantitative and visual criteria:
The optical fiber point light source reversely passes through the OAP to the shearing interferometer to form visible interference fringes, the angle change of the interference fringes is controlled by controlling the three-dimensional space displacement of the OAP, and the alignment precision with the space error smaller than one wavelength can be realized by using the angle change of the interference fringes as feedback information.
The optical axis alignment of the forward coupling light path and the reverse coupling light path can be realized by adjusting the coupling reflecting mirror group between the OAP and the beam splitter, and the optical power after passing through the diaphragm or the optical power coupled into the optical fiber is used as feedback information, so that the angle alignment precision with the angle deviation being far smaller than 1mrad can be realized.
3. The method has wide applicability:
The OAP-based bidirectional coupling optical near-field alignment method provided by the invention is compatible with standard OAP optical elements, does not need to customize a reflecting end face, and has wider application range and is convenient to popularize and apply.
4. The automation expansibility is strong:
The method provided by the invention can generate quantitative visual criteria, can realize full-automatic optical path calibration and optical near field alignment based on an image recognition and control algorithm, further improves adjustment efficiency and system stability, and has commercial potential in the aspect of industrial application.
Drawings
Fig. 1 is a schematic reference diagram of OAP conventional tuning mode one (five-axis linkage control method).
FIG. 2 is a schematic reference diagram of a second conventional tuning mode of an OAP (a method of tailoring an OAP with a reflective surface).
FIG. 3 is a schematic diagram of a bi-directional coupling optical near-field alignment system of the present invention.
FIG. 4 is a schematic diagram of a bi-directional coupling optical near-field alignment system of the present invention.
FIG. 5 is a schematic diagram of a bi-directional coupling optical near-field alignment system of the present invention.
FIG. 6 is a flow chart of a method for bi-directionally coupling optical near-field alignment of the present invention.
Detailed Description
The following description is presented to enable one of ordinary skill in the art to make and use the invention. The preferred embodiments in the following description are by way of example only and other obvious variations will occur to those skilled in the art. The basic principles of the invention defined in the following description may be applied to other embodiments, variations, modifications, equivalents, and other technical solutions without departing from the spirit and scope of the invention.
In a preferred embodiment of the present invention, those skilled in the art will note that OAPs and the like to which the present invention relates may be regarded as prior art.
Preferred embodiments.
As shown in fig. 3, the invention discloses a bi-directional coupling optical near-field alignment system based on an off-axis parabolic reflector, which comprises a forward optical path, a reverse optical path and a coupling reflector pair, wherein:
The forward light path comprises a light source module, an interferometer module, an OAP and adjusting mechanism module, a probe and a sample stage module, wherein:
The light source module comprises incident laser, second guide laser (namely guide laser 2) and a second beam splitter (namely beam splitter 2), wherein the incident laser and the second guide laser are both emitted to the second beam splitter (the incident laser can be visible light, near infrared light, mid infrared light and terahertz light, the guide laser can be visible light, free space laser or fiber laser output by a collimating coupling mirror);
The interferometer module comprises a first beam splitter (namely a beam splitter 1), a detector and a reference path reflector consisting of a reflector and a one-dimensional displacement table, wherein:
the interferometer module is of a Michelson interferometer framework, light emitted from the second beam splitter irradiates the first beam splitter and is divided into a reflected (or transmitted) signal path and a transmitted (or reflected) reference path, the incident light in the signal path is focused by the OAP and the adjusting mechanism module and then irradiates the probe and the sample stage module, near-field scattering signals are generated, the near-field scattering signals are reversely collimated by the OAP and the adjusting mechanism module and then transmitted (or reflected) by the first beam splitter and then received by the detector, the incident light in the reference path is reflected by the reference path reflector and then reflected (or transmitted) by the first beam splitter and received by the detector, and the signal path and the reference path interfere with each other at the detector. The signal path contains near field information to be detected, the reference path does not contain near field information, and the reference path has the function of improving near field detection signal-to-noise ratio and measuring near field optical phase information by interfering with the signal path. The reflecting mirror in the reference path reflecting mirror is fixed on a one-dimensional displacement table, the one-dimensional displacement table can control the reflecting mirror to reciprocate to change the optical path difference between the reference path and the signal path, and the reciprocating movement of the reflecting mirror can be in a multipoint discrete positioning mode or a continuous waveform modulation mode such as sine wave or triangular wave.
The OAP and adjusting mechanism module comprises an OAP and a three-dimensional displacement platform, and the OAP is fixed on the three-dimensional displacement platform;
The probe and stage module includes a probe, a stage and a sample (the sample is not shown in fig. 3, the sample and the point light source are required to switch positions in the forward and reverse light paths), the sample is fixed above the stage and the probe is placed above the sample;
The reverse light path is based on the forward light path, a sample is switched into a point light source, the point light source reversely emits laser, after being reflected by an OAP, the laser is divided into two paths by a newly added shearing interferometer, one path is used for interference imaging and is used for judging collimation or parallelism of the reversely emitted laser, the other path is reversely propagated by a first beam splitter (in a near-field optical microscope and a nano infrared spectrometer system), the shearing interferometer is different from an interferometer module (generally a relatively large Michelson interferometer and is composed of a separation optical machine element), the shearing interferometer is a free-standing miniaturized interferometer (an integrated structure), interference fringes caused by the incident laser can be observed by an imaging screen of the shearing interferometer, and whether the incident light is collimated or parallel light is judged by the inclination angle of the interference fringes, namely, the inclination angle of the interference fringes is more 0 DEG, and the incident light is more nearly parallel;
the coupling reflector pair comprises a first coupling reflector (namely a coupling reflector 1) and a second coupling reflector (namely a coupling reflector 2), and the first coupling reflector and the second coupling reflector are positioned between a shearing interferometer of a reverse light path and a first beam splitter of a forward light path and are used for adjusting the direction of an optical axis in the reverse light path so as to realize the alignment of two optical axes in the bidirectional light path.
Specifically, the point light source is a point light source coupled and output by an optical fiber end face or a point light source formed by scattering of nano particles/quantum dots coupled and output by a waveguide end face (the optical fiber point light source (including the guiding laser 1, the collimating coupling mirror 1, the optical fiber 1, the clamping mechanism and the optical fiber end face in sequence) is adopted in fig. 3, because the cross-sectional area is smaller than the wavelength of the mid-infrared laser, the laser power coupled and output is strong enough and the coherence is good, and a shearing interferometer can be adopted to judge whether the focus position is found or not).
More specifically, as shown in fig. 6, the alignment method of the bi-directional coupling optical near field alignment system is embodied as the following steps (modular algorithm):
Step S1, microscopic imaging is carried out on the probe, the position of the probe is recorded, and then the probe is moved to another safe position;
S2, moving a point light source, and moving the point light source to a position for recording a probe by taking microscopic imaging as a criterion;
s3, moving into a shearing interferometer, and iteratively adjusting a three-dimensional displacement table by taking the dip angle of an interference fringe of the shearing interferometer as a criterion to enable the dip angle of the interference fringe to approach 0 degree, so as to realize the three-dimensional position alignment of an OAP focus and a point light source;
Step S4, removing the shearing interferometer, and iteratively adjusting a coupling reflector pair between the forward optical path and the reverse optical path to enable two optical axes of the bidirectional optical path to coincide, so as to realize two-dimensional angle alignment of an OAP normal and a forward incident optical axis;
step S5, removing the point light source, moving the sample, and moving the probe back to the position of the record probe;
And S6, iteratively adjusting the three-dimensional displacement table by taking the near field signal measured by the detector as a quantitative criterion, so that the near field signal is maximized, and further, the accurate alignment of the optical near field is realized.
Further, a second collimating coupling mirror (namely a collimating coupling mirror 2) or a diaphragm is arranged between the second guided laser and the second beam splitter, and the visual criterion that two optical axes of the bidirectional optical path coincide is that the power of the backward propagation light after passing through the center of the diaphragm in the forward optical path (figure 4) or passing through the second collimating coupling mirror is the maximum (figure 5).
It should be noted that, for free space light, the relative position of the reverse light center and the diaphragm can be directly determined by human eyes (as shown in fig. 4, the adjustment is convenient, but the automatic control cannot be realized by extension), and the power of the reverse light after passing through the collimating coupling mirror (which is used for realizing the coupling and conversion of the optical fiber mode and the free space parallel light) can be measured (as shown in fig. 5, the power is quantitatively measured by the detector 2 after passing through the optical fiber coupler, and the automatic alignment control can be realized by extension based on the quantitative criterion).
Further, the fiber point light source includes a first guiding laser (i.e. guiding laser 1), a first collimating coupling mirror (i.e. collimating coupling mirror 1), a first optical fiber (i.e. optical fiber 1), a clamping mechanism and an end face of the optical fiber.
The movable adjusting mechanism of the invention mainly comprises a three-dimensional displacement table, a coupling reflecting mirror group and a sample table, in the specific embodiment, the adjusting mechanism can be manually adjusted or can be electrically adjusted, wherein:
As shown in fig. 4, in the manual adjustment mode, a diaphragm is disposed between the second guiding laser and the second beam splitter.
As shown in fig. 5, for the automatic tuning mode, an automatic near-field coupling alignment can be achieved, which will greatly improve the performance (including tuning efficiency, coupling efficiency and operability, ease of use and stability) of the near-field optical microscope and the nano-infrared spectrometer, and the second guided laser is generated by the first guided laser, the first collimating mirror and the fiber coupler, and the first/second guided laser is combined.
For the present invention:
The original optical paths in the near-field optical microscope and the nanometer infrared spectrometer form a forward optical path, a point light source is introduced into a sample end, a reverse optical path is formed in the near-field optical microscope and the nanometer infrared spectrometer after OAP, and based on the principle of reversibility of the optical path, a 5-dimensional parameter searching process in the five-dimensional collaborative adjustment method is simplified into discrete 3-dimensional space position adjustment and 2-dimensional angle adjustment in a two-way coupling mode of the two optical paths, so that the optical near-field coupling alignment efficiency is remarkably improved.
And the three-dimensional space position of the OAP relative to the point light source is adjusted by iteration, so that the counter-propagation light reflected by the OAP is changed into parallel light, and the three-dimensional space position is adjusted. Specifically, in the backward optical path, a shearing interferometer is added behind the OAP, and the angle of the interference fringe of the shearing interferometer is used to determine whether the backward propagating light is parallel. When the dip angle of the interference fringe approaches 0 degrees, 3-dimensional spatial position alignment can be realized.
The optical axis of the reverse optical path is iteratively adjusted to be coincident with the optical axis of the forward optical path, so that two-dimensional angle adjustment is realized. Specifically, 2 coupling reflectors are introduced between a reverse light path and a forward light path (namely between an interferometer beam splitter and an OAP), and the two-way optical axis coincidence is realized by iteratively adjusting the angles of the two reflectors, so that the two-dimensional angle alignment is realized.
It is worth mentioning that the technical key points of the invention are as follows:
The OAP-based bidirectional coupling optical near field alignment method simplifies the traditional five-dimensional parameter adjustment process (three-dimensional space adjustment and two-dimensional angle cooperative adjustment) to discrete three-dimensional space adjustment and two-dimensional angle adjustment, and can effectively simplify the near field alignment method and improve near field coupling efficiency. The method comprises the steps of forming a reverse light path in a system by utilizing point light sources through OAP transmission, realizing the three-dimensional spatial position alignment of the OAP by taking 'forming parallel light through OAP reflection' as a standard or criterion, and realizing the two-dimensional angle alignment of the OAP by utilizing the reversibility of the light path by utilizing a group of reflectors to adjust the optical axis of the reverse light path to coincide with the optical axis of a forward light path.
The hardware of the OAP-based bidirectional coupling optical near-field alignment method is composed of a forward optical path mainly comprising a light source/guide laser, a diaphragm/collimation coupling mirror, a beam splitter, an interferometer and the like which are adopted in a near-field optical microscope and a nanometer infrared spectrometer, a reverse optical path mainly comprising an optical fiber point light source, an OAP, a three-dimensional displacement table, a shearing interferometer and the like, and a group of coupling reflector pairs for adjusting optical axis coincidence are arranged between the forward optical path and the reverse optical path.
Extended application of OAP-based bi-directional coupling optical near-field alignment methods:
the method provided by the invention can be widely applied to standard OAP optical elements, and can improve the applicability and operability of the standard OAP optical elements in a near-field optical microscope and a nanometer infrared spectrometer.
Secondly, the method provided by the invention can obtain quantitative visual criteria, and after the corresponding actuating mechanisms (the three-dimensional displacement table and the azimuth angle adjustment of the coupling reflecting mirror group) are changed into electric control modes, the OAP-based automatic near-field coupling alignment can be realized by combining with a modularized algorithm, so that the efficiency, usability and stability of a near-field optical microscope and a nano infrared spectrometer can be further improved, and a foundation is laid for industrial application of the near-field optical microscope and the nano infrared spectrometer.
It should be noted that technical features such as OAP related to the present application should be regarded as the prior art, and specific structures, working principles, and control modes and spatial arrangements related to the technical features may be selected conventionally in the art, and should not be regarded as the invention point of the present application, which is not further specifically described in detail.
Modifications of the embodiments described above, or equivalents of some of the features may be made by those skilled in the art, and any modifications, equivalents, improvements or etc. within the spirit and principles of the present invention are intended to be included within the scope of the present invention.
Claims (5)
1. A bi-directional coupling optical near-field alignment system based on off-axis parabolic mirrors, comprising a forward optical path, a reverse optical path, and a coupling mirror pair, wherein:
The forward light path comprises a light source module, an interferometer module, an OAP and adjusting mechanism module, a probe and a sample stage module, wherein:
The light source module comprises incident laser, second guide laser and a second beam splitter, and the incident laser and the second guide laser are both emitted to the second beam splitter;
the interferometer module comprises a first beam splitter, a detector and a reference path reflector consisting of a reflector and a one-dimensional displacement table;
the OAP and adjusting mechanism module comprises an OAP and a three-dimensional displacement platform, and the OAP is fixed on the three-dimensional displacement platform;
The probe and sample stage module comprises a probe, a sample stage and a sample, wherein the sample is fixed above the sample stage and the probe is arranged above the sample;
The reverse light path is based on the forward light path, a sample is switched into a point light source, the point light source reversely emits laser, the laser is reflected by the OAP and then is divided into two paths by a newly added shearing interferometer, one path is used for interference imaging, the collimation or parallelism of the reversely emitted laser is judged, and the other path is reversely propagated by a first beam splitter;
The coupling reflector pair comprises a first coupling reflector and a second coupling reflector, wherein the first coupling reflector and the second coupling reflector are positioned between the shearing interferometer of the reverse light path and the first beam splitter of the forward light path and used for adjusting the direction of the optical axis in the reverse light path so as to realize the alignment of two optical axes in the bidirectional light path.
2. The bi-directional coupling optical near-field alignment system based on an off-axis parabolic mirror according to claim 1, wherein the point light source is a point light source coupled out from an end face of an optical fiber or a point light source formed by scattering of nano particles/quantum dots coupled out from an end face of a waveguide.
3. The two-way coupling optical near-field alignment system of claim 2, the alignment method of the bidirectional coupling optical near field alignment system is characterized by comprising the following steps of:
Step S1, microscopic imaging is carried out on the probe, the position of the probe is recorded, and then the probe is moved to another safe position;
S2, moving a point light source, and moving the point light source to a position for recording a probe by taking microscopic imaging as a criterion;
s3, moving into a shearing interferometer, and iteratively adjusting a three-dimensional displacement table by taking the dip angle of an interference fringe of the shearing interferometer as a criterion to enable the dip angle of the interference fringe to approach 0 degree, so as to realize the three-dimensional position alignment of an OAP focus and a point light source;
Step S4, removing the shearing interferometer, and iteratively adjusting a coupling reflector pair between the forward optical path and the reverse optical path to enable two optical axes of the bidirectional optical path to coincide, so as to realize two-dimensional angle alignment of an OAP normal and a forward incident optical axis;
step S5, removing the point light source, moving the sample, and moving the probe back to the position of the record probe;
And S6, iteratively adjusting the three-dimensional displacement table by taking the near field signal measured by the detector as a quantitative criterion, so that the near field signal is maximized, and further, the accurate alignment of the optical near field is realized.
4. A bi-directional coupling optical near-field alignment system based on an off-axis parabolic reflector as claimed in claim 3, wherein a second collimating coupling mirror or diaphragm is arranged between the second guided laser and the second beam splitter, and the visual criterion for the coincidence of the two optical axes of the bi-directional optical path is to maximize the power of the counter-propagating light passing through the center of the diaphragm in the forward optical path or through the second collimating coupling mirror.
5. The system of claim 4, wherein the point source of optical fiber comprises a first guided laser, a first collimating mirror, a first optical fiber, a clamping mechanism, and an end face of the optical fiber.
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| FENG-MING.YEH等: ""The off-axis parabolic mirror optical axis adjustment based on cyclic shearing interferometer"", 《2015 OPTOELECTRONICS GLOBAL CONFERENCE》, 31 December 2015 (2015-12-31), pages 1 - 4 * |
| 徐丹慧;唐霞辉;方国明;吴东京;周海蓉;: "基于干涉条纹的光轴平行性校准方法", 光学学报, no. 17, 31 December 2020 (2020-12-31) * |
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