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CN1295561C - Ultrafast Pulse X-ray Phase Contrast Imaging Device - Google Patents

Ultrafast Pulse X-ray Phase Contrast Imaging Device Download PDF

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CN1295561C
CN1295561C CNB2004100163486A CN200410016348A CN1295561C CN 1295561 C CN1295561 C CN 1295561C CN B2004100163486 A CNB2004100163486 A CN B2004100163486A CN 200410016348 A CN200410016348 A CN 200410016348A CN 1295561 C CN1295561 C CN 1295561C
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CN1560699A (en
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陈建文
高鸿奕
向世清
李儒新
徐至展
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Abstract

An ultrafast pulse X-ray phase contrast imaging device is characterized by comprising a femtosecond laser system, a beam splitter, an optical delay line, a total reflector and a target chamber, wherein an achromatic lens, a sample chamber, a solid target and a concave reflector are arranged in the target chamber, a detector is arranged outside the target chamber, and the position relation of the components is as follows: the beam splitter is arranged on a laser output light path of the femtosecond titanium gem laser system, a laser beam output by the femtosecond titanium gem laser system is split into A, B two light beams by the beam splitter, wherein, a light beam enters a target chamber through an optical delay line and is converged by an achromatic lens to irradiate gas in a sample chamber, a light beam B enters the target chamber through a total reflector, is reflected by a concave reflector and is converged on a solid target to generate an X ray, the X ray enters the sample chamber, the state of plasma in the sample chamber is recorded by a detector, and the distance between the detector and the gas chamber meets the phase contrast imaging condition.

Description

超快脉冲X射线相衬成像装置Ultrafast Pulse X-ray Phase Contrast Imaging Device

技术领域:Technical field:

本发明涉及X射线相衬成像装置,特别是一种超快X射线相衬成像装置。这种成像装置在研究超短脉冲自聚焦丝的形成过程、超快等离子体的形成有着重要的应用前景。The invention relates to an X-ray phase contrast imaging device, in particular to an ultrafast X-ray phase contrast imaging device. This imaging device has important application prospects in the study of the formation process of ultrashort pulse self-focusing filaments and the formation of ultrafast plasma.

背景技术:Background technique:

近年来,X射线相衬成像技术取得了飞速发展,这种成像技术的最大特点是不采用干涉法,可以获得位相信息。它也不同于传统的泽尼克(Zernike)相衬干涉显微镜,它不需要任何用来改变X射线位相的光学元件,就可以获得位相信息。In recent years, X-ray phase-contrast imaging technology has achieved rapid development. The biggest feature of this imaging technology is that it can obtain phase information without using interference method. It is also different from traditional Zernike phase-contrast interference microscopes, which do not require any optical components to change the phase of X-rays to obtain phase information.

当部分相干X射线通过物体时,除了吸收以外,还要产生位相变化,即发生波前的畸变。这种波面畸变导致部分波面的传播方向发生变化,它将和未发生畸变的波面重叠而形成干涉。这样,位相变化转化成强度变化,这种图像不经任何重构技术,可直接获得位相变化图像。When partially coherent X-rays pass through an object, in addition to absorption, a phase change occurs, that is, a distortion of the wavefront occurs. This wavefront distortion causes the propagation direction of part of the wavefront to change, and it will overlap with the undistorted wavefront to form interference. In this way, the phase changes are converted into intensity changes, and the phase change images can be obtained directly without any reconstruction techniques.

X射线相衬成像技术已经被广泛用于研究生物活体、材料分析等诸多领域,已经取得了许多卓有成效的结果。但令人遗憾的是,目前X射线相衬成像中所使用的X射线源限于同步辐射源和X射线管,因此,曝光时间长达几秒甚至几十分钟,所研究对象都是静态样品,限制了X射线相衬成像技术的进一步发展。X-ray phase-contrast imaging technology has been widely used in the study of living organisms, material analysis and many other fields, and has achieved many fruitful results. Unfortunately, the X-ray sources used in X-ray phase-contrast imaging are limited to synchrotron radiation sources and X-ray tubes. Therefore, the exposure time is as long as several seconds or even tens of minutes, and the research objects are all static samples. The further development of X-ray phase contrast imaging technology is limited.

发明内容:Invention content:

本发明针对上述在先技术中所存在的缺点提出一种超快脉冲X射线相衬成像装置,可用来研究超快物理过程。The present invention proposes an ultrafast pulse X-ray phase-contrast imaging device aimed at the above-mentioned shortcomings in the prior art, which can be used to study ultrafast physical processes.

上世纪末,飞秒激光脉冲的出现,使得许多新现象、新规律、新机理和新方法一一开始被揭示出来。同时也使一些新领域不断地被开拓,飞秒脉冲成像技术就是其中一个非常引人注目的全新领域。At the end of the last century, with the appearance of femtosecond laser pulses, many new phenomena, new laws, new mechanisms and new methods began to be revealed one by one. At the same time, some new fields are constantly being explored, and femtosecond pulse imaging technology is one of the new fields that is very eye-catching.

许多发生在原子和分子上的事件,它们的时间尺度都在皮秒和飞秒量级。化学反应过程中,分子键的断裂与重组、液体内分子的碰撞都是发生在飞秒尺度上的超快过程。半导体处理中的光-电效应或光-光相互作用、飞秒脉冲产生的自聚焦现象等都是一个超快过程,这是为什么我们对它如此感兴趣的原因。Many events that occur on atoms and molecules have time scales in the order of picoseconds and femtoseconds. During chemical reactions, the breaking and recombination of molecular bonds and the collision of molecules in liquids are ultrafast processes that occur on the femtosecond scale. The photo-electric effect or light-light interaction in semiconductor processing, the self-focusing phenomenon generated by femtosecond pulses, etc. are all ultrafast processes, which is why we are so interested in it.

要测量一个过程一般需要用比此时间更短的过程来测量。在过去的二十多年里,超短脉冲的脉宽已由皮秒压缩到飞秒量级。虽然目前在实验条件下,亚飞秒量级脉冲的产生已有报道,但尚未进入实用阶段,所以飞秒激光脉冲是当前探测超快过程的重要手段,它在病变早期诊断、医学成像和生物活体检测、外科医疗及超小型卫星的制造上都有其独特的优点和不可替代的作用。将飞秒脉冲激光应用于成像是一个极具潜力的技术,已经在许多探测领域显示出了它的优越性。飞秒脉冲激光的相干长度短,在飞秒时间尺度上拍摄高分辨率的全息图非常困难,例如用100fs的脉冲纪录,全息图包含的条纹数目将少于100,而这严重地降低了分辨率和全息图的视场。但是如果用飞秒脉冲和固体材料相互作用产生X射线,将是一个优良的X射线源,从而克服飞秒脉冲宽带的缺点。To measure a process generally needs to be measured with a process shorter than this time. In the past two decades, the pulse width of ultrashort pulses has been compressed from picoseconds to femtoseconds. Although the generation of sub-femtosecond pulses has been reported under experimental conditions, it has not yet entered the practical stage. Therefore, femtosecond laser pulses are currently an important means of detecting ultrafast processes. Live detection, medical surgery and the manufacture of ultra-small satellites all have their unique advantages and irreplaceable roles. Applying femtosecond pulsed laser to imaging is a promising technology, which has shown its superiority in many detection fields. The coherence length of the femtosecond pulsed laser is short, and it is very difficult to take a high-resolution hologram on the femtosecond time scale. For example, if a 100fs pulse is used to record, the number of fringes contained in the hologram will be less than 100, which seriously reduces the resolution. rate and field of view of the hologram. However, if femtosecond pulses interact with solid materials to generate X-rays, it will be an excellent X-ray source, thereby overcoming the shortcomings of femtosecond pulse broadband.

本发明的技术解决方案如下:Technical solution of the present invention is as follows:

一种超快脉冲X射线相衬成像装置,其构成包括:飞秒激光系统、分束器、光学延迟线、全反射镜和靶室,该靶室内设有消色差透镜、样品室、固体靶和凹面反射镜,在该靶室外还有一个探测器,上述各元件的位置关系为下:在飞秒钛宝石激光系统的激光输出光路上设置该分束器,经该分束器将飞秒钛宝石激光系统输出的激光束分成A、B两光束,其中A光束经光学延迟线进入靶室,被消色差透镜汇聚照射样品室中的气体,B光束经全反射镜反射进入靶室,被凹面反射镜反射并汇聚到固体靶上,产生一X射线,该X射线进入样品室,该样品室内等离子体的状态由探测器记录。探测器与气体室的距离满足相衬成像条件:An ultrafast pulsed X-ray phase-contrast imaging device, its composition includes: a femtosecond laser system, a beam splitter, an optical delay line, a total reflection mirror and a target chamber, the target chamber is equipped with an achromatic lens, a sample chamber, a solid target and a concave reflector, there is also a detector outside the target chamber, and the positional relationship of the above-mentioned components is as follows: the beam splitter is set on the laser output optical path of the femtosecond Ti:sapphire laser system, and the femtosecond The laser beam output by the titanium sapphire laser system is divided into two beams, A and B. The A beam enters the target chamber through the optical delay line, and is converged by the achromatic lens to irradiate the gas in the sample chamber. The B beam is reflected by the total reflection mirror and enters the target chamber. The concave mirror reflects and focuses on the solid target, generating an X-ray, which enters the sample chamber where the state of the plasma is recorded by a detector. The distance between the detector and the gas chamber satisfies the phase contrast imaging conditions:

ZZ 22 == 0.490.49 ZZ 11 λλ Uu 22 ZZ 11 -- 0.490.49

所说的飞秒钛宝石激光系统是一台辐射波长为780-820nm,脉宽为100fs、输出能量为100nj的台式装置。The said femtosecond Ti:Sapphire laser system is a desktop device with a radiation wavelength of 780-820nm, a pulse width of 100fs, and an output energy of 100nj.

所说的分束器实际上是一块半反射半透过的介质膜板,是一块反射50%、透过50%的介质膜板,它将入射的飞秒钛宝石激光脉冲分成A光束和B光束。The so-called beam splitter is actually a semi-reflective and semi-transmissive dielectric film, which is a dielectric film with 50% reflection and 50% transmission. It divides the incident femtosecond Ti:Sapphire laser pulse into A beam and B beam. beam.

所说的全反射介质膜板,是一块100%全反射的介质膜板,其中三块全反射介质膜板组成一个光学延迟线,用以调整A光束和B光束间的相对光学延迟。The so-called total reflection dielectric diaphragm is a 100% total reflection dielectric diaphragm, wherein three total reflection dielectric diaphragms form an optical delay line to adjust the relative optical delay between the A beam and the B beam.

所说的固体靶是一块可移动的固体靶,当飞秒钛宝石激光脉冲和其相互作用以后,将产生特征X射线Kα1和Kα2线,相应辐射波长为0.5-1.8。The solid target is a movable solid target. When the femtosecond titanium sapphire laser pulse interacts with it, characteristic X-ray K α1 and K α2 lines will be generated, and the corresponding radiation wavelength is 0.5-1.8 Ȧ.

所说的消色差透镜是一块用来将飞秒钛宝石激光聚焦的透镜,以照射空气室的气体产生等离子体作为被测样品。The so-called achromatic lens is a lens used to focus the femtosecond Ti:Sapphire laser, and the plasma generated by irradiating the gas in the air chamber is used as the measured sample.

所说的空气室,是用来储存产生等离子体的气体,当飞秒钛宝石激光和其相互作用时,会产生等离子体,该等离子体的产生、膨胀、消失等全过程将作为研究对象。The so-called air chamber is used to store the gas that generates plasma. When the femtosecond Ti:Sapphire laser interacts with it, plasma will be generated. The whole process of the plasma generation, expansion, and disappearance will be used as the research object.

所说的凹面镜,是一块非球面凹面镜,用它来聚焦飞秒钛宝石激光,照射固体靶产生X射线。The so-called concave mirror is an aspherical concave mirror, which is used to focus the femtosecond Ti:Sapphire laser and irradiate the solid target to generate X-rays.

所说的X射线探测器是一台X射线波段的CCD相机。Said X-ray detector is a CCD camera in the X-ray band.

本发明的技术效果如下:Technical effect of the present invention is as follows:

本发明采用飞秒激光器与固体靶相互作用,产生激光等离子体X射线作为探测光束。X射线源的大小取决于凹面镜聚焦光斑的大小,通常使焦斑的尺寸为10-20μm,这个尺寸比同步辐射源的尺寸小近一个数量级,从而保证X射线相称成像分辨率可达10-20μm大小。The invention adopts femtosecond laser to interact with a solid target to generate laser plasma X-rays as a detection beam. The size of the X-ray source depends on the size of the focused spot of the concave mirror, usually the size of the focal spot is 10-20 μm, which is nearly an order of magnitude smaller than the size of the synchrotron radiation source, thus ensuring that the X-ray symmetrical imaging resolution can reach 10- 20μm size.

激光等离子体X射线的脉冲持续时间比激光脉冲更短,从而保证了本发明时间分辨率优于100fs,由于采用了时间延迟线,从而能方便地调整作用光束与探测光束之间的相对延迟,当作用光束在样品室中产生作为研究对象的等离子体时,那么探测光束只好以不同的时间延迟进入待测样品中去,就可以记录下待研究对象等离子体的全过程。The pulse duration of laser plasma X-rays is shorter than that of laser pulses, thereby ensuring that the time resolution of the present invention is better than 100 fs. Due to the use of time delay lines, the relative delay between the active beam and the detection beam can be easily adjusted. When the active beam generates plasma as the research object in the sample chamber, the detection beam has to enter the sample to be tested with different time delays, and the whole process of the plasma to be studied can be recorded.

与在先技术相比,本发明采用飞秒脉冲激光产生的等离子体X射线源,脉冲时间为100fs左右,并且可以看成是一个点光源,因此空间相等性相当优良,能用来研究高速动态事件,空间分辨率可以达到10-20μm,时间分辨率可以达到100fs左右。Compared with the prior art, the present invention adopts the plasma X-ray source generated by femtosecond pulsed laser, the pulse time is about 100fs, and can be regarded as a point light source, so the spatial equality is quite good, and can be used to study high-speed dynamic Events, the spatial resolution can reach 10-20μm, and the time resolution can reach about 100fs.

附图说明:Description of drawings:

图1为本发明的超快脉冲X射线相称成像装置原理图。Fig. 1 is a principle diagram of the ultrafast pulsed X-ray phase-contrast imaging device of the present invention.

具体实施方式:Detailed ways:

本发明的超快脉冲X射线相衬成像装置如图1所示。它包括飞秒激光系统1、一个分束器2、一个由全反射镜3、4、5构成的光学延迟线、一个全反射镜6和一个靶室12,该靶室12内设有一个消色差透镜8、一个样品室9、一个固体靶7和一块凹面反射镜10,在靶室12外还有一个探测器11。上述各元件的位置关系为下:在飞秒钛宝石激光系统1的激光输出光路上安置分束器2,飞秒钛宝石激光系统1输出的激光经分束器2输出A和B两光束。其中A光束经光学延迟线进入靶室12,被一消色差透镜8汇聚进入样品室9中并与其中的气体相互作用,产生一待研究的等离子体。这种光束称为作用光束。The ultrafast pulsed X-ray phase contrast imaging device of the present invention is shown in FIG. 1 . It includes a femtosecond laser system 1, a beam splitter 2, an optical delay line composed of total reflection mirrors 3, 4, 5, a total reflection mirror 6 and a target chamber 12, which is equipped with a Chromatic aberration lens 8 , a sample chamber 9 , a solid target 7 and a concave mirror 10 , and a detector 11 outside the target chamber 12 . The positional relationship of the above components is as follows: a beam splitter 2 is placed on the laser output optical path of the femtosecond Ti:sapphire laser system 1, and the laser output from the femtosecond Ti:sapphire laser system 1 outputs two beams A and B through the beam splitter 2. The light beam A enters the target chamber 12 through the optical delay line, is converged by an achromatic lens 8 and enters the sample chamber 9 and interacts with the gas therein to generate a plasma to be studied. Such beams are called action beams.

B光束经一全反射镜6反射进入靶室12中去。被一凹面反射镜10反射并汇聚射到固体靶7上,产生一X射线再进入到样品室9中去,探测A光束产生等离子体的过程。B光束称为探测光束.。The light beam B is reflected by a total reflection mirror 6 and enters the target chamber 12 . It is reflected by a concave mirror 10 and converged onto the solid target 7 to generate an X-ray which then enters the sample chamber 9 to detect the process of plasma generation by the A beam. The B beam is called the probe beam.

该样品室内等离子体的状态由探测器记录。探测器与气体室的距离满足相衬成像条件:The state of the plasma in the sample chamber is recorded by a detector. The distance between the detector and the gas chamber satisfies the phase contrast imaging conditions:

ZZ 22 == 0.490.49 ZZ 11 λλ Uu 22 ZZ 11 -- 0.490.49

所说的飞秒钛宝石激光系统1,是一台辐射波长为780-820nm,脉宽为100fs、输出能量为100nj的台式装置。The femtosecond Ti:Sapphire laser system 1 is a desktop device with a radiation wavelength of 780-820nm, a pulse width of 100fs, and an output energy of 100nj.

所说的分束器2实际上室一块半反射半透过介质膜板,是一块对800nm反射50%、透过50%的介质膜板,它将入射的飞秒钛宝石激光脉冲分成A光束和B光束。The said beam splitter 2 is actually a semi-reflective and semi-permeable dielectric membrane, which is a dielectric membrane that reflects 50% of 800nm and transmits 50%. It divides the incident femtosecond Ti:Sapphire laser pulse into A beam and B beams.

所说的全反射介质膜板3、4、5、6,是一块块对800nm100%全反射的介质膜板,其中全反射介质膜板3、4、5组成一个光学延迟线,用以调整A光束和B光束间的相对光学延迟。Said total reflection dielectric diaphragms 3, 4, 5, 6 are dielectric diaphragms for 800nm100% total reflection one by one, wherein the total reflection dielectric diaphragms 3, 4, 5 form an optical delay line for adjusting A The relative optical delay between the B beam and the B beam.

所说的固体靶7是一块可移动的铜靶,当飞秒钛宝石激光脉冲和其相互作用以后,将产生特征X射线Kα1和Kα2线,相应辐射波长为1.540562和1.544398。The solid target 7 is a movable copper target. When the femtosecond titanium sapphire laser pulse interacts with it, characteristic X-ray K α1 and K α2 lines will be generated, and the corresponding radiation wavelengths are 1.540562 Ȧ and 1.544398 Ȧ.

所说的消色差透镜8用来将飞秒钛宝石激光聚焦照射样品室9中的气体,以产生等离子体,形成被测样品。The achromatic lens 8 is used to focus the femtosecond Ti:Sapphire laser to irradiate the gas in the sample chamber 9 to generate plasma and form the sample to be measured.

所说的空气室9用来储存产生等离子体的气体,当飞秒钛宝石激光和其相互作用时,会产生等离子体,该等离子体的产生、膨胀、消失等全过程将作为研究对象。The said air chamber 9 is used to store the gas that generates the plasma. When the femtosecond Ti:Sapphire laser interacts with it, the plasma will be generated. The whole process of the generation, expansion and disappearance of the plasma will be used as the research object.

 所说的凹面反射镜10是一块非球面凹面镜,它被用来聚焦作为打靶透镜。Said concave reflector 10 is an aspheric concave mirror, which is used for focusing as a target lens.

所说的X射线探测器11,是一台X射线波段的CCD相机。Said X-ray detector 11 is a CCD camera in the X-ray band.

本发明超快X射线相衬成像装置工作原理和基本过程是:The working principle and basic process of the ultrafast X-ray phase contrast imaging device of the present invention are:

当硬X射线穿透样品后,如果将探测器直接放在样品后面,记录的是一张基于吸收衬度机制的X射线投影图。如果探测器和样品距离满足以下公式时:When hard X-rays penetrate the sample, if the detector is placed directly behind the sample, an X-ray projection image based on the absorption contrast mechanism is recorded. If the distance between the detector and the sample satisfies the following formula:

ZZ 22 == 0.490.49 ZZ 11 λλ Uu 22 ZZ 11 -- 0.490.49 -- -- -- (( 11 ))

就可以获得物体的位相衬度像,式中:λ是X射线波长,U是物体空间频率,Z1是待测样品和X射线源的距离。因此,当λ、U、Z1已确定以后,Z2有一特定距离。特别要指出的是,这种相衬成像反映的是物体折射率发生突变的地方。The phase contrast image of the object can be obtained, where: λ is the wavelength of the X-ray, U is the spatial frequency of the object, and Z 1 is the distance between the sample to be measured and the X-ray source. Therefore, when λ, U, and Z1 have been determined, Z2 has a certain distance. In particular, it should be pointed out that this phase contrast imaging reflects the places where the refractive index of the object changes suddenly.

所说的真空靶室12采用3台机械泵和3台扩散泵,可使真空室内真空度达到5×10-8τ。The vacuum target chamber 12 adopts 3 mechanical pumps and 3 diffusion pumps, which can make the vacuum degree in the vacuum chamber reach 5×10 −8 τ.

当飞秒钛宝石激光脉冲入射到半反射半透过介质膜板2以后,分成A光束和B光束。A光束飞秒脉冲经由全反射介质膜板3、4、5构成的延迟线以后,进入真空靶室12,经消色差透镜8聚焦进入到气体室9中,产生等离子体。When the femtosecond Ti:Sapphire laser pulse is incident on the semi-reflective and semi-permeable dielectric membrane plate 2, it is divided into A beam and B beam. The femtosecond pulse of beam A enters the vacuum target chamber 12 after passing through the delay line formed by the fully reflective dielectric film plates 3, 4, 5, and is focused by the achromatic lens 8 into the gas chamber 9 to generate plasma.

B光束飞秒脉冲经全反射镜6反射进入真空室12,被凹面镜10聚焦入射到固体铜靶7,产生铜的特征X射线Kα1线和Kα2线,这个X射线作为气体室9中的等离子体X射线源,由于探测器11距气体室9满足公式1相衬成像条件,因此可以测出气体室中等离子体折射率的变化,改变延迟线,即可测出气体室中等离子从产生到消失的过程。The femtosecond pulse of the B beam is reflected by the total reflection mirror 6 and enters the vacuum chamber 12. It is focused by the concave mirror 10 and incident on the solid copper target 7 to generate the characteristic X-ray K α1 line and K α2 line of copper. This X-ray is used as the gas chamber 9 The plasma X-ray source, since the distance between the detector 11 and the gas chamber 9 satisfies the phase contrast imaging condition of formula 1, the change of the plasma refractive index in the gas chamber can be measured, and the delay line can be changed to measure the change of the plasma in the gas chamber from process from birth to disappearance.

Claims (8)

1、一种超快脉冲X射线相衬成像装置,其特征在于它的构成包括飞秒钛宝石激光系统(1)、分束器(2)、光学延迟线、全反射镜(6)和靶室(12),该靶室(12)内设有消色差透镜(8)、样品室(9)、固体靶(7)和凹面反射镜(10),在该靶室(12)外还有一个探测器(11),上述各元件的位置关系为下:在飞秒钛宝石激光系统(1)的激光输出光路上设置该分束器(2),经该分束器(2)将飞秒钛宝石激光系统(1)输出的激光束分成A、B两光束,其中A光束经光学延迟线进入靶室(12),被消色差透镜(8)汇聚照射样品室(9)中的气体,B光束经一全反射镜(6)反射进入靶室(12),被凹面反射镜(10)反射并汇聚到固体靶(7)上,产生一X射线,该X射线进入样品室(9),该样品室(9)内等离子体的状态由探测器(11)记录,该探测器(11)与样品室(9)的距离Z2满足下面的相衬成像条件:1. An ultrafast pulsed X-ray phase-contrast imaging device, characterized in that its composition includes a femtosecond Ti:Sapphire laser system (1), a beam splitter (2), an optical delay line, a total reflection mirror (6) and a target Chamber (12), this target chamber (12) is provided with achromatic lens (8), sample chamber (9), solid target (7) and concave mirror (10), outside this target chamber (12) also has A detector (11), the positional relationship of the above-mentioned components is as follows: the beam splitter (2) is set on the laser output optical path of the femtosecond Ti:sapphire laser system (1), and the beam splitter (2) will fly The laser beam output by the second Ti:Sapphire laser system (1) is divided into two beams, A and B. The beam A enters the target chamber (12) through the optical delay line, and is converged by the achromatic lens (8) to irradiate the gas in the sample chamber (9). , the B light beam is reflected by a total reflection mirror (6) and enters the target chamber (12), is reflected by the concave mirror (10) and converges on the solid target (7), and generates an X-ray, which enters the sample chamber (9 ), the state of the plasma in the sample chamber (9) is recorded by the detector (11), and the distance Z between the detector (11) and the sample chamber ( 9 ) satisfies the following phase contrast imaging conditions: ZZ 22 == 0.490.49 ZZ 11 λλ Uu 22 ZZ 11 -- 0.490.49 式中:λ是X射线波长,U是物体空间频率,Z1是待测样品和X射线源的距离。In the formula: λ is the wavelength of X-rays, U is the spatial frequency of the object, and Z 1 is the distance between the sample to be measured and the X-ray source. 2、根据权利要求1所述的超快脉冲X射线相衬成像装置,其特征在于所述的飞秒钛宝石激光系统(1)是辐射波长范围为780-820nm,脉宽为5-100fs、输出能量为10nJ-1000nJ的台式装置。2. The ultrafast pulsed X-ray phase contrast imaging device according to claim 1, characterized in that the femtosecond Ti:sapphire laser system (1) has a radiation wavelength range of 780-820nm and a pulse width of 5-100fs, Benchtop device with output energy from 10nJ-1000nJ. 3、根据权利要求1所述的超快脉冲X射线相衬成像装置,其特征在于所述的分束器(2)是一块反射50%、透过50%的介质膜板。3. The ultrafast pulsed X-ray phase contrast imaging device according to claim 1, characterized in that the beam splitter (2) is a dielectric film with 50% reflection and 50% transmission. 4、根据权利要求1所述的超快脉冲X射线相衬成像装置,其特征在于所述的光学延迟线是由100%反射的全反射介质膜板(3、4、5)组成。4. The ultrafast pulsed X-ray phase-contrast imaging device according to claim 1, characterized in that the optical delay line is composed of a 100% fully reflective dielectric film plate (3, 4, 5). 5、根据权利要求1所述的超快脉冲X射线相衬成像装置,其特征在于所述的固体靶(7)是一块可移动的固体靶,当飞秒钛宝石激光脉冲和其相互作用后,将产生特征X射线Kα1和Kα2线,相应的辐射波长为0.5-1.8。5. The ultrafast pulsed X-ray phase contrast imaging device according to claim 1, characterized in that the solid target (7) is a movable solid target, when the femtosecond Ti:sapphire laser pulse interacts with it , will produce characteristic X-ray K α1 and K α2 lines, the corresponding radiation wavelength is 0.5-1.8 Ȧ. 6、根据权利要求1所述的超快脉冲X射线相衬成像装置,其特征在于所述的消色差透镜(8)是一块用来将飞秒钛宝石激光聚焦的透镜。6. The ultrafast pulse X-ray phase contrast imaging device according to claim 1, characterized in that the achromatic lens (8) is a lens for focusing femtosecond Ti:Sapphire laser light. 7、根据权利要求1所述的超快脉冲X射线相衬成像装置,其特征在于所述的凹面反射镜(10)是一块非球面凹面反射镜。7. The ultrafast pulse X-ray phase contrast imaging device according to claim 1, characterized in that the concave mirror (10) is an aspherical concave mirror. 8、根据权利要求1所述的超快脉冲X射线相衬成像装置,其特征在于所述的探测器(11),是一台X射线波段的CCD相机。8. The ultrafast pulsed X-ray phase contrast imaging device according to claim 1, characterized in that the detector (11) is a CCD camera in the X-ray band.
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