CN1288434C - Parallel mechanism and inspection device - Google Patents

Abstract

The inspection device of the present invention is provided with at least 3 retractable linear actuators (5), (12), and (13), a travel drive mechanism, a stage support portion (23), and a substrate holder (24). The travel drive mechanism supports the base end portions of the linear actuators (5), (12), and (13) so as to be linearly movable along the guide rails (2), (6), and (7), and has inclined portions (102) and (103) on at least one of the guide rails (2), (6), and (7) whose height changes in accordance with the movement of the linear actuators (12) and (13). The stage support part (23) is supported by the front end parts of the linear actuators (5), (12) and (13). The substrate holder (24) is provided on the movable member and holds the subject.

Description

Parallel mechanism and inspection device

technical field

The invention relates to a parallel mechanical device and an inspection device having several connecting rods, controlling the posture of a movable plate.

Background technique

In the prior art, a Stuart platform-type parallel mechanical device is known. In this parallel mechanical device, several connecting rods are used to connect the upper movable plate and the lower fixed plate, which can be stretched and retracted by actuators such as hydraulic cylinders. , by making each actuator extend and contract, changing the length of the link, controlling the posture of the movable plate, and maintaining it at various angles (horizontal or inclined).

In this parallel mechanical device, the position of each hydraulic cylinder is fixed, and the length of each link is adjusted through the expansion and contraction of these hydraulic cylinders to determine the posture of the movable plate.

The parallel mechanical device is used, for example, in a macro inspection device, etc., and the substrate to be inspected is placed on a movable plate, and the film thickness unevenness or damage on the surface of the substrate to be inspected can be visually observed.

However, the macro substrate inspection apparatus using the conventional parallel robot has the following problems. That is, the posture of the movable plate is determined only by the telescopic adjustment range of the link length of each actuator, so the movement range of the movable plate is small relative to the volume of the device. Therefore, the substrate to be inspected cannot be brought close enough to the inspector, and the inspection of the substrate cannot be performed while peeping at the substrate to be inspected, and the inspector works in an uncomfortable posture.

On the other hand, the posture of the movable plate that can be set by adjusting the length of each link is limited to the horizontal direction and the inclined direction. Therefore, damage to the substrate surface to be inspected is not easy to be seen when it is formed in some directions, and accuracy cannot be measured. high check.

An object of the present invention is to provide a parallel mechanical device with a high degree of freedom capable of operating in a wide range, and an inspection device using the parallel mechanical device that can perform high-precision substrate inspection with high efficiency.

disclosure of invention

The parallel mechanical device of the present invention is characterized in that it is provided with: at least 3 retractable linear actuators;

A travel drive mechanism that supports the base end portions of these linear actuators so as to be linearly movable along each movement path, and has a movement along with the movement of the linear actuator on at least one of these movement paths. And the inclined part of height change;

The movable member is supported by a front end portion of an actuating shaft of the linear actuator in a positional relationship opposite to a base end portion of the linear actuator via a universal joint mechanism. By moving the linear actuators along the inclined portion, the telescopic control of each linear actuator is coordinated, and the movable member can be moved forward, backward, left, and right.

The inspection device of the present invention is characterized in that it is provided with: at least 3 retractable linear actuators;

A travel drive mechanism that supports the base end of the linear actuator so that it can move linearly along each movement path, and has a height that varies with the movement of the linear actuator on at least one of the movement paths. varying slopes;

a movable member supported by a front end portion of an actuating shaft of the linear actuator in a positional relationship opposite to a base end portion of the linear actuator via a universal connection mechanism;

The subject holding mechanism is provided on the movable member for holding the subject.

As a result, according to the present invention, the holding mechanism holding the object can be moved to the vicinity of the examiner's eyes, and the object holding mechanism can be moved back and forth, left, and right, so that the reflection angle of the illumination can be changed, and defects can be easily found, and high-level inspection can be performed. Macroscopic check of accuracy.

A brief description of the drawings

1A and 1B are diagrams showing a substrate inspection apparatus according to an embodiment of the present invention. FIG. 1A is a perspective view showing the whole, and FIG. 1B is a plan view showing a substrate holder.

Fig. 2 is a front view showing a moving table for an actuator incorporated in the substrate inspection apparatus.

Fig. 3 is a longitudinal sectional view showing a linear actuator incorporated in the substrate inspection device.

FIG. 4 is an explanatory view showing the operation of the substrate inspection device.

FIG. 5 is an explanatory view showing the operation of the substrate inspection device.

FIG. 6 is an explanatory view showing the operation of the substrate inspection device.

Embodiments of the present invention will be described below with reference to the drawings.

(first embodiment)

1A is a perspective view showing a substrate inspection apparatus using a parallel mechanism according to an embodiment of the present invention, and FIG. 1B is a plan view showing a substrate holder 24 for holding a substrate W to be inspected as an object to be inspected. In FIG. 1 , 1 is a base made of a rectangular frame, and a concave portion 101 of predetermined length is formed at the central portion of its side portion 1 a (the side portion 1 a corresponds to the front side of the device where the examiner is located). The side portions 1b corresponding to the two sides of the device form inclined portions 102, 103 that gradually increase toward the front of the device.

In addition, along the concave portion 101 of the base 1, the guide rail 2 as a moving path is arranged, and the actuator movable table 3 movable along the guide rail 2 is provided. 4 Set the base end portion of the linear actuator 5.

Similarly, guide rails 6 and 7 as moving passages are disposed along the inclined portions 102 and 103 of the base 1, and movable stages 8 and 9 for actuators that can move along these guide rails 6 and 7 are provided. , On these moving stages 8, 9 for actuators, base end portions of linear actuators 12, 13 are provided via swing portions 10, 11, respectively.

The swing parts 4, 10, and 11 are joints that rotate with one degree of freedom around the rotation axes 4a, 10a, and 11a, respectively. The rotation axis 4 a of the swing portion 4 is parallel to the axial direction of the guide rail 2 . The rotation axes 10a, 11a of the swing parts 10, 11 are parallel to the horizontal plane, and are inclined inward at an angle θ with respect to the horizontal plane projection line of the guide rails 6, 7 . In this embodiment, θ is about 15 degrees, and this value can be changed according to the required range of motion and the like.

As shown in FIG. 2 , the moving table 3 for the actuator is movably supported along the guide rail 2 , and is connected to the screw shaft 14 disposed along the guide rail 2 through the fixing screw portion 15 . When the motor 16 rotates the screw shaft 14 , move back and forth along the guide rail 2 through the fixing screw part 15 .

This structure is also the same for the moving stages 8 and 9 for actuators, and the above-mentioned FIG. 2 is referred to, and the description thereof is omitted.

As shown in Figure 3, the direct-acting actuator 5 is provided with a guide 18 and a screw shaft 19 side by side along the hollow part of the fixed cylinder 17, and an actuating shaft is arranged on the screw shaft 19 through a fixing screw part 20. 21. When the motor 22 rotates the screw shaft 19 through the gear 231, the fixing screw part 20 is reciprocated along the guide 18, so that the actuating shaft 21 is directly moved.

This structure is also the same for the linear actuators 12 and 13, and the above-mentioned FIG. 3 is referred to, and the description thereof is omitted.

To the front ends of the operating shafts 21 of the linear actuators 5, 12, 13, a stage composed of a rectangular frame as a movable part is connected via a universal connection mechanism 21a such as a ball joint. Support part 23 .

The stage supporting portion 23 is connected with the actuating shaft 21 of the linear actuator 5 at the center of the side portion 23a corresponding to the front side of the device; Protruding portions 23a1, 23b1 protruding in the vertical direction. The operating shafts 21 of the linear actuators 12, 13 are connected to these extensions 23a1, 23b1. Between these protruding portions 23a1, 23b1, a substrate holder 24 is supported rotatably. The rotation drive part 25 is provided in the extension part 23a1, 23b1. The rotation drive unit 25 rotatably supports the substrate holder 24 .

The substrate holder 24 is used to place the substrate W to be inspected, and includes a frame body 24a facing the periphery of the substrate W to be inspected, and a plurality of suction ports 24b provided on the frame body 24a. At each suction port 24b, a vacuum suction force by a vacuum pump (not shown) acts, and the substrate W to be inspected is sucked and held. 24c in the figure represents an opening.

The operation of the embodiment of this configuration will be described below. When receiving the substrate W to be inspected, as shown in FIG. Keep the substrate holder 24 in a horizontal state.

Then, the expansion and contraction of the linear motion actuators 5, 12, and 13 are coordinated to move the stage support portion 23 to the loading-in standby position of the substrate W to be inspected, and the substrate to be inspected W is placed on the stand-by position in a horizontal state. on the substrate holder 24.

The substrate holder 24 arranges the received substrates W to be inspected in a normal position, and sucks and holds the substrates W to be inspected by vacuum suction from the suction port 24b.

Next, as shown in FIG. 5 , the actuator moving stages 8 and 9 of the linear actuators 12 and 13 are moved along the inclined portions 102 and 103 . At this time, the moving stages 8 and 9 for the actuator move toward the front of the device along the guide rails 6 and 7 .

As shown in Figure 6, when moving the moving stages 8 and 9 for actuators to the predetermined height positions of the inclined parts 102 and 103, the expansion and contraction of the linear actuators 5, 12 and 13 are coordinated and controlled again, and the substrate base 24 is set. At a height most suitable for visual observation of the substrate W to be inspected.

In this state, illumination light is irradiated onto the surface of the substrate W to be inspected on the substrate holder 24 . Then, the rotation drive unit 25 is driven to incline the substrate holder 24 from a horizontal state to a predetermined angle most suitable for visual observation, and the film on the surface of the substrate W to be inspected is macroscopically observed by using the reflected light on the surface of the substrate W to be inspected. For uneven thickness and damage, etc., conduct visual inspection.

In addition, while moving the linear actuators 12, 13 along the inclined parts 102, 103, the expansion and contraction of the linear actuators 5, 12, 13 can be controlled in coordination, so that the substrate holder 24 can swing forward, backward, left, and right. , macroscopic inspection can be performed while visually observing the substrate holder 24 from various angles.

In addition, recently, inspection of the back surface of the substrate W to be inspected is also required. This is because if dirt or moisture adheres to the back of the substrate W to be inspected, cracks are likely to occur on the cross-section during dicing, or poor adhesion will occur when the chip is bonded to the substrate after dicing, making the finished product unsightly. Pass rate increases. In order to meet the above requirements, in the state where the substrate W to be inspected is sucked and held on the substrate holder 24, the rotation drive unit 25 is used to rotate the substrate holder 24 by 180° so that the back surface of the substrate W to be inspected faces the front of the device. In this way, it is the same as above. Accordingly, the rear surface of the substrate W to be inspected can be macroscopically inspected visually.

Therefore, by moving the linear actuators 12, 13 along the inclined portions 102, 103 formed on the side portion 1b of the base 1, the substrate holder 24 holding the substrate W to be inspected can be moved to the inspector. near the eyes, and coordinated expansion and contraction of each linear actuator 5, 12, 13, can make the substrate holder 24 and the stage support part 2

3 together move back and forth, left and right, therefore, it is possible to align the illumination for macroscopic observation, and then perform visual inspection with high precision.

In addition, in order for the inspector to easily inspect the substrate W to be inspected, it is preferable to raise the substrate holder 24 as far forward as possible. For this reason, the method of lengthening the telescopic stroke of the linear actuators 12, 13 has been adopted, but this method reduces the rigidity of the device, increases the center of gravity of the device, and lowers the stability.

On the other hand, in the substrate inspection apparatus of the present invention, since the inclined portions 102, 103 are inclined toward the near side, the proximal end portions of the linear actuators 12, 3 are moved to the near side without lengthening the telescopic stroke, and the telescopic stroke can be extended. Positioning the substrate holder 24 at a high position ensures stability.

On the other hand, when the inspector observes the substrate W to be inspected from the front side of the apparatus, if there is a component obstructing the observation on the near side, such as a linear actuator, the observation will be affected. On the other hand, in this substrate device, the fulcrum of the linear actuator 5 on the near side is installed near the bottom of the stage support portion 23, so that observation is not hindered. In addition, since the linear actuators 12 and 13 on both sides are arranged at the rear, they do not hinder the observation.

By rotating the substrate holder 24 holding the substrate W to be inspected by the rotation drive unit 25, the substrate W to be inspected can be tilted to an angle that is easy for the observer to perform macroscopic inspection. In addition, by further rotating the substrate holder 24, the back surface of the substrate W to be inspected can be directed toward the front of the apparatus, so that the back surface of the substrate W to be inspected can also be inspected macroscopically with high precision.

That is, by actuating the rotation drive unit 25 to rotate the substrate holder 24 on the stage support unit 23, it is unnecessary to lengthen the linear actuator 5, The telescopic strokes of 12 and 13 can make the device miniaturized and simplified.

Industrial availability

The parallel mechanical device and inspection device of the present invention can realize high-speed and wide-ranging movements with high degrees of freedom, and are suitable for the technical field of parallel mechanical devices and high-precision inspection devices using the parallel mechanical device.

Claims (4)

1. Parallel mechanical device, characterized in that it is provided with: at least 3 telescopic direct-acting actuators; A travel drive mechanism that supports the base end portions of these linear actuators so as to be linearly movable along each movement path, and has a movement along with the movement of the linear actuator on at least one of these movement paths. And the inclined part of height change; The movable member is supported by a front end portion of an actuating shaft of the linear actuator in a positional relationship opposite to a base end portion of the linear actuator via a universal joint mechanism. 2. The parallel mechanical device according to claim 1, wherein the above-mentioned traveling drive mechanism has a guide rail, a movable table for the actuator, and a screw shaft; The actuator is movable along a guide rail; the screw shaft is arranged along the guide rail; and the moving table for the actuator travels along the guide rail by rotating and driving the screw shaft. 3. The inspection device is characterized in that it is provided with: at least 3 telescopic direct-acting actuators; A travel drive mechanism that supports the base end of the linear actuator so that it can move linearly along each movement path, and has a height that varies with the movement of the linear actuator on at least one of the movement paths. varying slopes; a movable member supported by a front end portion of an actuating shaft of the linear actuator in a positional relationship opposite to a base end portion of the linear actuator via a universal connection mechanism; The subject holding mechanism is provided on the movable member for holding the subject. 4. The inspection apparatus according to claim 3, wherein the object holding mechanism is rotatably supported by the movable member.

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