CN1287452C - Window type ball grid array semiconductor package with lead frame as carrier and its manufacturing method - Google Patents
Window type ball grid array semiconductor package with lead frame as carrier and its manufacturing method Download PDFInfo
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Abstract
Description
技术领域technical field
本发明是关于一种半导体封装件及制法,特别是关于一种以导线架为芯片承载件(Chip Carrier)的开窗型球栅阵列(Window Ball GridArray,WBGA)半导体封装件,以及制造该半导体封装件的方法。The present invention relates to a semiconductor package and its manufacturing method, in particular to a semiconductor package with a window ball grid array (Window Ball GridArray, WBGA) with a lead frame as a chip carrier (Chip Carrier), and the manufacture of the semiconductor package Method for semiconductor packaging.
背景技术Background technique
开窗型球栅阵列半导体封装件的特点为:其使用的基板开设有至少一贯穿基板的开孔,供芯片以覆盖该开孔的方式接置在基板的一表面上,并借贯穿在开孔中的焊线电性连接至基板,且在基板的一相对表面上植设有多个焊球,使芯片能够借焊球与外界成电性连接关系。这种封装结构的优点是它适用于中央焊垫型(Central-Pad Type)的芯片以缩短焊线长度,并能够降低封装件的整体厚度。The feature of the window-type ball grid array semiconductor package is that the substrate used is provided with at least one opening through the substrate, and the chip is placed on a surface of the substrate in a manner covering the opening, and is passed through the opening. The bonding wires in the holes are electrically connected to the substrate, and a plurality of soldering balls are planted on an opposite surface of the substrate, so that the chip can be electrically connected with the outside through the soldering balls. The advantage of this packaging structure is that it is suitable for central pad type (Central-Pad Type) chips to shorten the length of bonding wires and reduce the overall thickness of the package.
这种现有的开窗型球栅阵列封装结构是如图6A所示,是使用一具有上、下表面100、101的基板10,在该基板10开设一贯穿基板10的开孔102,供一芯片11以面朝下(Face-Down)方式接置至基板10的上表面100上、并封盖住该开孔102的一端口,使形成在芯片11的作用表面110上的焊垫111外露在基板10的开孔102中,供多条焊线12通过该开孔102将芯片11的焊垫111电性连接至基板10的下表面101。然后,在基板10的上、下表面100、101上分别形成一封装胶体13、14,使该下表面101上的下封装胶体13填满基板10的开孔102并包覆焊线12,且使该上表面100上的上封装胶体14包覆芯片11;接着,植设多个焊球15在基板10的下表面101上不影响下封装胶体13的区域,使焊球15能够作为输入/输出(Input/Output,I/O)端以电性连接芯片11至外界装置,如印刷电路板(Printed Circuit Board,未图标)。相关的现有技术例如美国专利第5,920,118、6,144,102、6,190,943及6,218,731号案等;其中,美国专利第5,920,118号案是使用一陶瓷基板(CeramicSubstrate)作为芯片承载件,而美国专利第6,144,102、6,190,943、6,218,731号案是使用一有机材料(如BT树脂等)制成的基板以供载接芯片之用;然而,这种陶瓷基板及有机基板的制造成本极高,因而大幅提高封装件的生产成本。This existing windowed ball grid array package structure is as shown in FIG. 6A, which uses a
台湾专利公告第411537号案是一种以导线架为芯片承载件的开窗型球栅阵列封装结构,其中,导线架由多条管脚构成,使芯片载接至管脚的一表面上,而管脚的一相对表面上则敷设有拒焊剂(SolderMask),并开设多条贯穿拒焊剂的开口以使管脚上预设的植球部位能够借该开口露出,而能植设焊球在该外露的植球部位。然而,这种封装结构具有诸多缺点;其一为敷设拒焊剂至管脚上的制程极为复杂且成本高,同时,欲使相邻管脚间的空隙敷设有拒焊剂在实施上也有一定的困难;再者,由于拒焊剂具有较高的吸湿性,使敷设至管脚上的拒焊剂极易聚集湿气,导致拒焊剂与管脚间的界面产生分层(Delamination)。Taiwan Patent Announcement No. 411537 is a windowed ball grid array packaging structure with a lead frame as a chip carrier, wherein the lead frame is composed of a plurality of pins, so that the chip is connected to one surface of the pins, On the opposite surface of the pin, a Solder Mask is laid, and a plurality of openings are opened through the solder mask so that the preset ball planting position on the pin can be exposed through the opening, so that the solder ball can be planted on the pin. The exposed bulb site. However, this packaging structure has many disadvantages; one is that the process of applying solder repellant to the pins is extremely complicated and costly, and at the same time, it is difficult to implement solder repellant in the gaps between adjacent pins. Furthermore, due to the high hygroscopicity of the solder repellant, the solder repellant deposited on the pins is easy to accumulate moisture, resulting in delamination at the interface between the solder repellent and the pins.
此外,上述使用基板或导线架的半导体封装结构还易产生溢胶问题。以图6A的封装结构为例,进行一模压(Molding)制程以在基板10上形成上封装胶体14及下封装胶体13时,如图6B所示,是将布设有芯片11及焊线12的基板10安置在一封装模具16中,该模具16由上模17及下模18构成,以使基板10夹置在该上、下模17、18之间,其中,上模17形成有一能够容置芯片11的上凹穴170,而下模18设有一对应于基板10的开孔102的下凹穴180,使焊线12的线弧能够容置在该下凹穴180中;当一树脂材料(如环氧树脂等)注入模具16时,树脂材料会填充在上凹穴170及下凹穴180中,从而形成上封装胶体14及下封装胶体13以分别包覆芯片11与焊线12。然而,由于上凹穴170覆盖基板10的面积较下凹穴180大,基板10的下表面101上邻接下封装胶体13的区域NC(意指“未夹压”,Non-Clamping)缺乏来自上模17的夹压力(Clamping Force),使树脂材料极易溢胶至基板10的下表面101上,令基板10下表面101上预设的植球部位也受溢胶污染(如图6C中的箭头所示),故后续植设在植球部位的焊球15无法完整地焊接至基板10,从而影响制成品的电性连接品质。In addition, the above-mentioned semiconductor packaging structure using a substrate or a lead frame is also prone to adhesive overflow problems. Taking the packaging structure of FIG. 6A as an example, when a molding process is performed to form the upper packaging compound 14 and the
因此,如何解决上述问题,能够提供一降低成本、防止分层且避免溢胶的半导体封装结构,是需要解决的一个问题。Therefore, how to solve the above problems and provide a semiconductor packaging structure that reduces costs, prevents delamination and avoids glue overflow is a problem that needs to be solved.
发明内容Contents of the invention
为克服上述现有技术的不足,本发明的主要目的在于提供一种以导线架为芯片承载件的开窗型球栅阵列半导体封装件及制法,它不需使用高成本的基板作为芯片承载件,能大幅降低半导体封装件的制造成本。In order to overcome the deficiencies of the above-mentioned prior art, the main purpose of the present invention is to provide a kind of open-type ball grid array semiconductor package with lead frame as chip carrier and its manufacturing method, which does not need to use high-cost substrate as chip carrier components, which can greatly reduce the manufacturing cost of the semiconductor package.
本发明的另一目的在于提供一种以导线架为芯片承载件的开窗型球栅阵列半导体封装件及制法,它在导线架上敷设非导电性(Non-Conductive)树脂材料以取代常用的拒焊剂,能消除拒焊剂与导线架间产生分层的缺点,确保半导体封装件的可靠性。Another object of the present invention is to provide a windowed ball grid array semiconductor package with a lead frame as a chip carrier and its manufacturing method. It lays a non-conductive (Non-Conductive) resin material on the lead frame to replace the commonly used The excellent solder repellant can eliminate the defect of delamination between the solder repellant and the lead frame, and ensure the reliability of the semiconductor package.
本发明的又一目的在于提供一种以导线架为芯片承载件的开窗型球栅阵列半导体封装件及制法,它能够避免在导线架上的焊线区域及植球区域造成溢胶现象,使焊线及焊球能够电性完整地植设至焊线区域及植球区域,确保制成品的电性品质及优良率。Another object of the present invention is to provide a windowed ball grid array semiconductor package with a lead frame as a chip carrier and its manufacturing method, which can avoid glue overflow in the wire bonding area and ball planting area on the lead frame , so that the welding wire and the solder ball can be electrically and completely planted to the welding wire area and the ball planting area, ensuring the electrical quality and excellent rate of the finished product.
本发明的再一目的在于提供一种以导线架为芯片承载件的开窗型球栅阵列半导体封装件及制法,它可使用现有制程完成,故不会增加制程的复杂性。Another object of the present invention is to provide a windowed ball grid array semiconductor package with a lead frame as a chip carrier and its manufacturing method, which can be completed using existing manufacturing processes, so the complexity of the manufacturing process will not be increased.
为达到上述及其它目的,本发明的一种以导线架为芯片承载件的开窗型球栅阵列半导体封装件包括:一导线架,由多条管脚构成,使该多条管脚围绕一贯穿导线架的通孔,各管脚具有一朝向该通孔的端部,且各管脚具有一上表面及一相对的下表面,其中,各管脚的下表面上界定有一焊线部及一植球部;一第一非导电性树脂材料,敷设至管脚的下表面及端部上,使管脚的焊线部及植球部外露出第一非导电性树脂材料;至少一芯片,具有一作用表面及一相对的非作用表面,使芯片的作用表面接置在管脚的上表面上并覆盖导线架通孔的一端口,令该作用表面的电性区外露在该通孔中;多条贯穿于导线架通孔中的焊线,用以电性连接芯片的电性区至管脚的焊线部;一封装胶体,形成在导线架上,使封装胶体具有第一部分及第二部分,其中,该第一部分是敷设至管脚的上表面上以包覆芯片,封装胶体的第二部分是填充在导线架的通孔中以包覆焊线;以及多个焊球,植设在管脚的植球部。In order to achieve the above and other objects, a windowed ball grid array semiconductor package using a lead frame as a chip carrier of the present invention includes: a lead frame, which is composed of a plurality of pins, so that the plurality of pins surround a Through the through hole of the lead frame, each pin has an end facing the through hole, and each pin has an upper surface and an opposite lower surface, wherein the lower surface of each pin defines a soldering portion and A ball-planting part; a first non-conductive resin material, laid on the lower surface and the end of the pin, so that the first non-conductive resin material is exposed outside the wire-bonding part and the ball-planting part of the pin; at least one chip , has an active surface and an opposite non-active surface, so that the active surface of the chip is connected to the upper surface of the pin and covers a port of the through hole of the lead frame, so that the electrical area of the active surface is exposed to the through hole middle; a plurality of bonding wires that run through the through holes of the lead frame to electrically connect the electrical area of the chip to the bonding wire portion of the pin; a packaging compound is formed on the lead frame, so that the packaging compound has a first part and a The second part, wherein the first part is applied to the upper surface of the pin to cover the chip, and the second part of the encapsulant is filled in the through hole of the lead frame to cover the bonding wire; and a plurality of solder balls, Planted on the ball planting part of the tube foot.
一种以导线架为芯片承载件的开窗型球栅阵列半导体封装件的制法是这样实现的:制备一导线架,该导线架由多条管脚构成,使该多条管脚围绕一贯穿导线架的通孔,各该管脚具有一朝向该通孔的端部,且各该管脚具有一上表面及一相对的下表面,其中,各该管脚的下表面上界定有一焊线部及一植球部,并于该管脚的下表面及端部上敷设一第一非导电性树脂材料,而使该焊线部及植球部外露出该第一非导电性树脂材料;制备至少一芯片,该芯片具有一作用表面及一相对的非作用表面,并接置该芯片的作用表面于该管脚的上表面上,使该作用表面覆盖该导线架的通孔的一端口,而令该作用表面的电性区外露于该通孔中;形成多条贯穿于该通孔中的焊线,以借该焊线电性连接该芯片的电性区至该管脚的焊线部;形成一封装胶体于该导线架上,而使该封装胶体具有第一部分及第二部分,其中,该第一部分是敷设至该管脚的上表面上以包覆该芯片,而该第二部分是填充于该通孔中以包覆该焊线;以及植设多个焊球于该管脚的植球部。A method for manufacturing a windowed ball grid array semiconductor package with a lead frame as a chip carrier is realized in the following way: a lead frame is prepared, the lead frame is composed of a plurality of pins, and the plurality of pins surround a Each of the pins has an end facing the through hole, and each of the pins has an upper surface and an opposite lower surface, wherein a solder joint is defined on the lower surface of each of the pins. wire part and a ball planting part, and a first non-conductive resin material is laid on the lower surface and the end of the pin, so that the first non-conductive resin material is exposed from the wire bonding part and the ball planting part Prepare at least one chip, the chip has an active surface and an opposite non-active surface, and connect the active surface of the chip on the upper surface of the pin, so that the active surface covers a through hole of the lead frame port, so that the electrical area of the active surface is exposed in the through hole; forming a plurality of bonding wires penetrating through the through hole, so as to electrically connect the electrical area of the chip to the pin through the bonding wire Welding part; forming a packaging glue on the lead frame, so that the packaging glue has a first part and a second part, wherein the first part is laid on the upper surface of the pin to cover the chip, and the packaging glue has a first part and a second part. The second part is filled in the through hole to cover the bonding wire; and planting a plurality of solder balls on the ball planting part of the pin.
在另一实施例中,一第二非导电性树脂材料能够敷设至管脚的上表面上,使芯片的作用表面接置在该第二非导电性树脂材料上,令第二非导电性树脂材料夹置在芯片与导线架之间;且各管脚的上表面上界定有一焊线对应部及一植球对应部,使该焊线对应部及植球对应部分别对应于管脚的下表面上的焊线部及植球部,其中,焊线对应部及植球对应部是外露出该第二非导电性树脂材料,且第二非导电性树脂材料与第一非导电性树脂材料可以是相同的树脂材料。In another embodiment, a second non-conductive resin material can be laid on the upper surface of the pin, so that the active surface of the chip is connected to the second non-conductive resin material, so that the second non-conductive resin The material is sandwiched between the chip and the lead frame; and the upper surface of each pin defines a corresponding portion for bonding wire and a corresponding portion for planting balls, so that the corresponding portion for bonding wires and the corresponding portion for planting balls correspond to the bottom of the pins respectively. The wire-bonding portion and the ball-planting portion on the surface, wherein the wire-bonding corresponding portion and the ball-planting corresponding portion expose the second non-conductive resin material, and the second non-conductive resin material and the first non-conductive resin material It may be the same resin material.
上述半导体封装结构能够提供诸多优点;其一为以导线架作为芯片承载件,无需使用现有成本较高的基板(如陶瓷基板、有机基板等),因此能有效降低整体封装件的制造成本。再者,该导线架的管脚表面上是敷设非导电性的树脂材料而不是现有的拒焊剂;与拒焊剂比较,该非导电性材料与管脚的结合性较好,且它的吸湿性要远小于拒焊剂的吸湿性,故非导电性材料与管脚之间不会产生分层;同时,非导电性材料的敷设是在制备导线架时一并完成,故不会增加封装件制程的复杂程度和成本。此外,在敷设非导电性材料的制程中,导线架的管脚能够紧密夹置在模具中,使管脚上预设的焊线部位及植球部位获得来自模具适度的夹压力,令非导电性材料不会溢胶至该焊线部位及植球部位,使焊线及焊球能够完整地焊接在焊线部位及植球部位,能确保制成的半导体封装件的电性连接品质及优良率。The above-mentioned semiconductor package structure can provide many advantages; one is that the lead frame is used as the chip carrier without using existing high-cost substrates (such as ceramic substrates, organic substrates, etc.), so the manufacturing cost of the overall package can be effectively reduced. Furthermore, the surface of the pins of the lead frame is laid with a non-conductive resin material instead of the existing solder repellant; compared with the solder repellant, the non-conductive material has better bonding with the pins, and its moisture absorption The hygroscopicity is much smaller than the hygroscopicity of the solder repellant, so there will be no delamination between the non-conductive material and the pins; at the same time, the laying of the non-conductive material is completed when the lead frame is prepared, so there will be no increase in the package The complexity and cost of the process. In addition, in the process of laying non-conductive materials, the pins of the lead frame can be tightly clamped in the mold, so that the preset wire bonding parts and ball planting parts on the pins can obtain moderate clamping force from the mold, making the non-conductive The non-reactive material will not overflow the glue to the wire bonding part and the ball planting part, so that the soldering wire and the solder ball can be completely welded on the wire bonding part and the ball planting part, and the electrical connection quality and excellent quality of the semiconductor package can be ensured. Rate.
附图说明Description of drawings
图1A是本发明实施例1的半导体封装件的剖视图;1A is a cross-sectional view of a semiconductor package according to Embodiment 1 of the present invention;
图1B是显示图1A所示的半导体封装件中导线架的焊线部及植球部外露出第一非导电性材料的仰视图;FIG. 1B is a bottom view showing the first non-conductive material exposed from the wire bonding portion and the ball mounting portion of the lead frame in the semiconductor package shown in FIG. 1A;
图2A至图2E是本发明实施例1的半导体封装件的制程示意图;2A to 2E are schematic diagrams of the manufacturing process of the semiconductor package according to Embodiment 1 of the present invention;
图3A是本发明实施例2的半导体封装件的剖视图;3A is a cross-sectional view of a semiconductor package according to Embodiment 2 of the present invention;
图3B是显示图3A所示的半导体封装件中制备导线架的制程示意图;3B is a schematic diagram showing the process of preparing a lead frame in the semiconductor package shown in FIG. 3A;
图3C是显示图3B所示的导线架的焊线对应部及植球对应部外露出第二非导电性材料的上视图;FIG. 3C is a top view showing the second non-conductive material exposed outside the wire-bonding corresponding portion and the ball-planting corresponding portion of the lead frame shown in FIG. 3B;
图4是本发明实施例3的半导体封装件的剖视图;4 is a cross-sectional view of a semiconductor package according to Embodiment 3 of the present invention;
图5A是本发明实施例4的半导体封装件的剖视图;5A is a cross-sectional view of a semiconductor package according to Embodiment 4 of the present invention;
图5B是显示堆栈图5A所示的半导体封装件而成的封装结构;FIG. 5B shows a package structure formed by stacking the semiconductor packages shown in FIG. 5A;
图6A是现有半导体封装件的剖视图;6A is a cross-sectional view of a conventional semiconductor package;
图6B是显示图6A所示的半导体封装件中形成封装胶体的模压制程示意图;以及FIG. 6B is a schematic diagram showing a molding process for forming an encapsulant in the semiconductor package shown in FIG. 6A; and
图6C是显示图6B所示的半导体封装件中形成封装胶体时产生溢胶的示意图。FIG. 6C is a schematic diagram showing glue overflow when forming the encapsulant in the semiconductor package shown in FIG. 6B .
具体实施方式Detailed ways
以下配合图1A至图1B、图2A至图2E、图3A至图3C、图4及图5A至图5B,说明本发明以导线架为芯片承载件(Chip Carrier)的开窗型球栅阵列(Window Ball Grid Array,WBGA)半导体封装件及制法。1A to FIG. 1B, FIG. 2A to FIG. 2E, FIG. 3A to FIG. 3C, FIG. 4 and FIG. 5A to FIG. 5B, the windowed ball grid array using the lead frame as the chip carrier (Chip Carrier) of the present invention will be described. (Window Ball Grid Array, WBGA) semiconductor package and its manufacturing method.
实施例1Example 1
如图1A所示,本发明的开窗型球栅阵列半导体封装件是使用一导线架20作为芯片承载件供承载芯片之用,该导线架20由多条管脚200构成,使该多条管脚200围绕一贯穿导线架20的通孔201,其中,各管脚200具有一朝向该通孔201的端部202,并具有一上表面203及一相对的下表面204,且各管脚200的下表面204上界定有一焊线部(Wire-Bonding Portion)205及一植球部(Ball-Implanting Portion)206。一第一非导电性材料21是敷设至管脚200的下表面204及端部202上,使该下表面204上的焊线部205及植球部206外露出第一非导电性材料21,如图1B所示。至少一芯片22是以覆盖通孔201的一端口的方式接置在导线架20上;该芯片22具有一作用表面220及一相对的非作用表面221,使芯片22的作用表面220粘设在管脚200的上表面203上,且使该作用表面220的电性区222外露于导线架20的通孔201中,从而露出布设在电性区222上的焊垫223;同时,芯片22是借多条贯穿于该通孔201中的焊线23电性连接至导线架20,其中,焊线23是焊接至芯片22的焊垫223及管脚200的焊线部205,焊线23以电性连接芯片22的作用表面220至管脚200。一封装胶体24是敷设至导线架20上而形成第一部分240及第二部分241,该第一部分240敷设至管脚200的上表面203上以包覆芯片22,而封装胶体24的第二部分241是填充在导线架20的通孔201中以包覆焊线23。此半导体封装件还在管脚200的植球部206上植设有多个焊球25,作为半导体封装件的输入/输出(Input/Output,I/O)端与外界形成电性连接关系。As shown in FIG. 1A, the windowed ball grid array semiconductor package of the present invention uses a
上述半导体封装件可以按图2A至图2E所示的制程步骤制成;下述制法是以批次(Batch)方式制造半导体封装件,但本发明不限于此。The above-mentioned semiconductor package can be manufactured according to the process steps shown in FIG. 2A to FIG. 2E ; the following manufacturing method is to manufacture the semiconductor package in batch mode, but the present invention is not limited thereto.
首先,如图2A所示,制备一导线架片2,它是由多个导线架20整合而成(相邻导线架20以图标虚线分隔),各导线架20是由多条管脚200构成,而该多条管脚200是围绕一贯穿导线架20的通孔201;其中,各管脚200具有一朝向通孔201的端部202,并具有一上表面203及一相对的下表面204,且各管脚200的下表面204上界定有一焊线部205及一植球部206。First, as shown in FIG. 2A , a lead frame sheet 2 is prepared, which is formed by integrating a plurality of lead frames 20 (adjacent lead frames 20 are separated by dotted lines in the figure), and each
如图2B所示,进行一预模压(Pre-Molding)制程,将导线架片2置于一预制模具26中,该模具26由一上模260及一下模261构成,使导线架片2夹置在上模260及下模261之间,其中,管脚200的上表面203与上模260的底面262接触;下模261的顶面263形成有多个对应于焊线部205的凸部205′、对应于植球部206的凸部206′、及对应于导线架20的通孔201的凸部264,且该凸部264的尺寸小于通孔2C1的尺寸,而管脚200的下表面204与下模261的凸部205′、206′及264接触。As shown in Figure 2B, a pre-molding (Pre-Molding) process is carried out, and the lead frame sheet 2 is placed in a
当上模260与下模260合模后,管脚200夹置在上模260及下模261之间,使管脚200的焊线部205及植球部206与下模261顶面263的凸部205′、206′紧密接合,而管脚200的上表面203则与上模260的底面262紧密接合,且下模261的凸部264通经通孔201顶触到上模260的底面262,并使凸部264与通孔201间存有一间隙;接着,令一第一非导电性材料21(如树脂材料)注入模具26中,填充在下模261的顶面263与管脚200的下表面204之间的间隙中以及凸部264与通孔201之间的间隙中,该第一非导电性材料21不会溢胶至与模具26紧密接触的管脚200的上表面203及下表面204上的焊线部205及植球部206,使第一非导电性材料21仅敷设至管脚200的下表面204及端部202上,令管脚200的焊线部205及植球部206能够外露出第一非导电性材料21。完成第一非导电性材料21的敷设后,自导线架片2上移除模具26,如此即完成导线架片2的制备;其中,敷设至管脚200的下表面204上的第一非导电性材料21形成有一预定厚度,该预定厚度是视下模261的凸部205′、206′的高度而定,且需与管脚200的焊线部205形成一空间足以容纳后续焊线(未图标)的线弧(容后详述)。After the
然后,如图2C所示,对上述制成的导线架片2进行一置晶(Die-Bonding)作业,将至少一芯片22接置在各导线架20上,该芯片22具有一作用表面220及一相对的非作用表面221,使芯片22的作用表面220借一胶粘剂(未图标),粘设在管脚200的上表面203上并覆盖导线架20的通孔201的一端口,令该作用表面220的电性区222外露在通孔201中,以露出布设在电性区222上的焊垫223。Then, as shown in FIG. 2C , a Die-Bonding operation is performed on the lead frame sheet 2 made above, and at least one
进行一焊线(Wire-Bonding)作业以借助焊线23电性连接芯片22至导线架20。在各导线架20的通孔201的中形成多条贯穿该通孔201的焊线23,使焊线23焊接至芯片22的焊垫223及管脚200的焊线部205,借此以电性连接芯片22的作用表面220至管脚200的下表面204。由于管脚200的端部202上敷设有第一非导电性材料21,贯穿于通孔201中的焊线23不会触及管脚200的端部202,因此不会产生短路或电性连接不良现象。再者,敷设至管脚200的下表面204上的第一非导电性材料21具有一预定厚度,该厚度是大于焊线23突出于管脚200的下表面204上的线弧部分的高度,因此焊线23的线弧能够方便地容置在第一非导电性材料21与焊线部205所形成的空间中。A wire-bonding operation is performed to electrically connect the
进行一模压(Molding)制程以利用常用的封装模具(未图标),在导线架片2上形成一封装胶体24(可使用如环氧树脂等现有树脂材料),使该封装胶体24具有第一部分240及第二部分241,其中,封装胶体24的第一部分240是敷设至导线架20的管脚200的上表面203上,以包覆所有接置在各导线架20上的芯片22,封装胶体24的第二部分241是填充在各导线架20的通孔201中,以包覆所有用以电性连接芯片22至管脚200的焊线23。由于焊线23的线弧能够容置在第一非导电性材料21与管脚200的焊线部205所形成的空间中,封装胶体24的第二部分241的外露底面242,能够与第一非导电性材料21的外露表面210齐平,而能完整地使焊线23为封装胶体24所包覆。A molding process is performed to utilize a commonly used packaging mold (not shown) to form an encapsulant 24 (existing resin materials such as epoxy resin can be used) on the lead frame sheet 2, so that the
接着,如图2D所示,进行一植球(Ball-Implantation)制程,在导线架片2上露出的植球部206植设多个焊球25,令焊球25的高度大于敷设至管脚200下表面204上的第一非导电性材料21的厚度。Next, as shown in FIG. 2D , a Ball-Implantation process is performed, and a plurality of
最后,进行一切单作业以沿切割线(图2D所示的箭头方向)切割封装胶体24、导线架片2及第一非导电性材料21,借以分离各导线架20而成多条独立的半导体封装件,如图2E所示。如此即完成本发明实施例1的半导体封装件的制程,其中,外露的焊球25是作为半导体封装件的输入/输出端,使芯片22能够与外界装置如印刷电路板(PrintedCircuit Board,未图标)成电性连接关系。Finally, all single operations are performed to cut the
实施例2Example 2
图3A显示本发明实施例2的半导体封装件。此半导体封装件的组件与上述实施例1的组件大致相同,故在此相同的组件以相同的标号示之。FIG. 3A shows a semiconductor package according to Embodiment 2 of the present invention. The components of this semiconductor package are substantially the same as those of the first embodiment, so the same components are denoted by the same reference numerals.
如图3A所示,本实施例的半导体封装件与上述实施例1的不同之处在于管脚200的上表面203上敷设有一第二非导电性材料27,它可以与敷设至管脚200的下表面204上的第一非导电性材料21为相同的树脂材料,且与该第一非导电性材料21同时在制备导线架20时形成;再者,各管脚200的上表面203上还界定有一焊线对应部207及一植球对应部208,它们是分别对应于管脚200的下表面204上的焊线部205及植球部206。在上述预模压制程中,如图3B所示,导线架20是夹置在模具26的上模260与下模261之间,该上模260的底面262形成有多个对应于焊线对应部207的凸部207′及对应于植球对应部208的凸部208′;因此在预模压制程进行时,管脚200的上表面203上的焊线对应部207及植球对应部208与上模260的焊线对应部凸部207′及植球对应部凸部208′紧密接合,使注入模具26中的第二非导电性材料27填充在上模260的底面262与管脚200的上表面203之间的间隙中,不会溢胶至与模具26紧密接合的焊线对应部207及植球对应部208,使焊线对应部207及植球对应部208能够外露出第二非导电性材料27,如图3C所示。由于第二非导电性材料27与第一非导电性材料21是相同的树脂材料,故能够同时借模具26敷设第一非导电性材料21与第二非导电性材料27至导线架20上,使制备完成的导线架20的管脚200的上、下表面203、204分别敷设有第二非导电性材料27及第一非导电性材料21,且管脚200的端部202被第一非导电性材料21所包覆,能够令此制成的导线架20进行后续制程(如图3A所示)。As shown in FIG. 3A , the difference between the semiconductor package of this embodiment and the above-mentioned Embodiment 1 is that a second
接着,将至少一芯片22接置在导线架20上,使芯片22的作用表面220以覆盖通孔201的方式,粘接至敷设有第二非导电性材料27管脚200的上表面203上,该芯片22借助多条贯穿于通孔201中的焊线23电性连接至管脚200的下表面204。Next, at least one
然后,导线架20上形成一封装胶体24,使封装胶体24的第一部分240形成在管脚200的上表面203的第二非导电性材料27上,以包覆芯片22并遮覆管脚200的焊线对应部207及植球对应部208,且使封装胶体24的第二部分241填充在导线架20的通孔201中以包覆焊线23。Then, an
最后,植设多个焊球25在管脚200的下表面204上的植球部206,完成本实施例的半导体封装件。Finally, planting a plurality of
上述实施例1及实施例2所述的半导体封装件具有诸多优点;其一为以导线架作为芯片承载件,无需使用现有成本高的基板(如陶瓷基板、有机基板等),故能够有效降低整体封装件的制造成本。再者,该导线架的管脚表面上是敷设非导电性的树脂材料,而不是现有的拒焊剂;与拒焊剂相比,该非导电性材料与管脚的结合性较好,且其吸湿性远小于拒焊剂,因此非导电性材料与管脚之间不会产生分层(Delamination);同时,非导电性材料的敷设是在制备导线架时一并完成,故不会增加封装件制程的复杂程度和成本。此外,在敷设非导电性材料的制程中,导线架的管脚能够紧密夹置在模具中,使管脚上预设的焊线部位及植球部位获得来自模具的适度夹压力,使得非导电性材料不会溢胶至该焊线部位及植球部位,使焊线及焊球能够完整地焊接在焊线部位及植球部位,从而能确保制成的半导体封装件的电性连接品质及优良率。The semiconductor package described in the above-mentioned embodiment 1 and embodiment 2 has many advantages; one is that the lead frame is used as the chip carrier, and there is no need to use existing high-cost substrates (such as ceramic substrates, organic substrates, etc.), so it can effectively Reduce the manufacturing cost of the overall package. Furthermore, the surface of the pins of the lead frame is laid with non-conductive resin material instead of the existing solder repellant; compared with the solder repellent, the non-conductive material has better combination with the pins, and its The hygroscopicity is much smaller than that of solder repellent, so there will be no delamination between the non-conductive material and the pins; at the same time, the laying of the non-conductive material is completed when the lead frame is prepared, so there will be no increase in the package The complexity and cost of the process. In addition, in the process of laying non-conductive materials, the pins of the lead frame can be tightly clamped in the mold, so that the preset wire bonding parts and ball planting parts on the pins can obtain moderate clamping force from the mold, making the non-conductive The non-reactive material will not spill glue to the soldering wire and the ball-planting part, so that the soldering wire and the solder ball can be completely welded on the soldering wire and the ball-planting part, thereby ensuring the electrical connection quality and quality of the semiconductor package produced. Excellent rate.
实施例3Example 3
图4显示本发明实施例3的半导体封装件。此半导体封装件的组件是大致与上述实施例1相同,故在此相同的组件以相同的标号示之。FIG. 4 shows a semiconductor package according to Embodiment 3 of the present invention. The components of this semiconductor package are substantially the same as those of the above-mentioned embodiment 1, so the same components are denoted by the same reference numerals.
如图4所示,本实施例的半导体封装件与上述实施例1的不同之处在于,芯片22的非作用表面221未用封装胶体24的第一部分240所包覆而外露(即裸晶型封装件),使该非作用表面221直接与外界接触,能使芯片22运作所产生的热量借外露的非作用表面221散逸至外界,增进半导体封装件的散热效率。As shown in FIG. 4 , the difference between the semiconductor package of this embodiment and the above-mentioned Embodiment 1 is that the
实施例4Example 4
图5A显示本发明实施例4的半导体封装件。此半导体封装件的组件是大致与上述实施例2相同,故在此相同的组件以相同的标号示之。FIG. 5A shows a semiconductor package according to Embodiment 4 of the present invention. The components of this semiconductor package are substantially the same as those of the above-mentioned embodiment 2, so the same components are denoted by the same reference numerals.
如图5A所示,本实施例的半导体封装件与上述实施例2的不同之处在于:敷设至管脚200上表面203上的封装胶体24的第一部分240是完全包覆芯片22,但使管脚200的上表面203的植球对应部208外露出封装胶体24,且使焊球25的设置部位对应于该植球对应部208。这种半导体封装件能够上下叠接,可制成如图5B所示的封装结构,其中,上、下相接的半导体封装件使上层半导体封装件的焊球25触接至下层半导体封装件外露的植球对应部208,从而能彼此电性连接,能增进整体封装结构的操作功能;此外,实施例3所示的裸晶型半导体封装件也能够适用于图5B所示的叠接的封装结构。As shown in FIG. 5A , the difference between the semiconductor package of this embodiment and the above-mentioned Embodiment 2 is that: the
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| US7790514B2 (en) | 2005-07-21 | 2010-09-07 | Chipmos Technologies Inc. | Manufacturing process for a chip package structure |
| US7795079B2 (en) | 2005-07-21 | 2010-09-14 | Chipmos Technologies Inc. | Manufacturing process for a quad flat non-leaded chip package structure |
| US7803667B2 (en) | 2005-07-21 | 2010-09-28 | Chipmos Technologies Inc. | Manufacturing process for a quad flat non-leaded chip package structure |
| CN100446231C (en) * | 2006-01-25 | 2008-12-24 | 矽品精密工业股份有限公司 | Semiconductor package structure and method for fabricating the same |
| CN100446230C (en) * | 2006-01-25 | 2008-12-24 | 矽品精密工业股份有限公司 | Semiconductor package structure and method for fabricating the same |
| TWI320228B (en) | 2006-05-04 | 2010-02-01 | A structure of a lead-frame matrix of photoelectron devices | |
| CN100530623C (en) * | 2006-06-20 | 2009-08-19 | 亿光电子工业股份有限公司 | Lead frame material structure of photoelectric element |
| CN100578765C (en) * | 2006-07-24 | 2010-01-06 | 力成科技股份有限公司 | Integrated Circuit Package Construction |
| CN100481407C (en) * | 2006-08-14 | 2009-04-22 | 南茂科技股份有限公司 | Pin ball grid array package structure on chip |
| CN100550364C (en) * | 2007-10-30 | 2009-10-14 | 日月光半导体制造股份有限公司 | Packaging structure and packaging substrate thereof |
| CN102130085B (en) * | 2010-01-18 | 2013-03-13 | 矽品精密工业股份有限公司 | Semiconductor package with electrical connection structure and manufacturing method thereof |
| CN103258933B (en) * | 2012-04-09 | 2017-05-17 | 东莞市久祥电子有限公司 | Method for preventing glue overflowing in packaging process of wafer-type light-emitting diode (LED) circuit board through copper plating |
| TWI556359B (en) * | 2015-03-31 | 2016-11-01 | 南茂科技股份有限公司 | Quad flat no-lead package structure and quad flat no-lead package leadframe structure |
| CN110649048A (en) * | 2018-06-26 | 2020-01-03 | 三赢科技(深圳)有限公司 | Photosensitive chip packaging module and method for forming the same |
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