CN1279137C - Grinding liquid used for grinding back surface of storage hard disk magnetic head - Google Patents
Grinding liquid used for grinding back surface of storage hard disk magnetic head Download PDFInfo
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- CN1279137C CN1279137C CN 200510011128 CN200510011128A CN1279137C CN 1279137 C CN1279137 C CN 1279137C CN 200510011128 CN200510011128 CN 200510011128 CN 200510011128 A CN200510011128 A CN 200510011128A CN 1279137 C CN1279137 C CN 1279137C
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Abstract
一种用于存储器硬盘磁头背面研磨的研磨液,属于表面超精研磨技术领域。本研磨液含有下列组分:十一碳到十三碳的烷烃的矿物油、油性剂、金刚石单晶超微粉、抗氧防腐剂、非离子型表面活性剂、消泡剂和抗静电剂,各组分的重量配比为:烷烃的矿物油:50~94.79%;油性剂:5~35%;金刚石超微粉:0.01%~5%;抗氧防腐剂:0.02~0.5%;非离子型表面活性剂:0.1~5%;消泡剂:0.03~1.5%;抗静电剂0.05~3.0%。使用本研磨液可降低成本、提高工作效率和提高表面研磨精度,研磨后表面无划痕、表面残余应力低、表面粗糙度为0.3~0.4纳米。The invention discloses a grinding liquid used for grinding the back surface of a magnetic head of a memory hard disk, belonging to the technical field of surface superfine grinding. The grinding liquid contains the following components: mineral oil of eleven-carbon to thirteen-carbon alkanes, oily agent, diamond single crystal superfine powder, anti-oxidation and anti-corrosion agent, non-ionic surfactant, defoamer and antistatic agent, The weight ratio of each component is: alkane mineral oil: 50-94.79%; oily agent: 5-35%; diamond superfine powder: 0.01%-5%; anti-oxidant preservative: 0.02-0.5%; Surfactant: 0.1-5%; defoamer: 0.03-1.5%; antistatic agent: 0.05-3.0%. The use of the grinding liquid can reduce the cost, improve the work efficiency and improve the surface grinding precision, the surface has no scratches after grinding, the surface residual stress is low, and the surface roughness is 0.3-0.4 nanometers.
Description
技术领域technical field
本发明涉及一种用于存储器硬盘磁头背面研磨的研磨液,属于表面超精研磨技术领域。The invention relates to a grinding liquid used for grinding the back surface of a magnetic head of a memory hard disk, and belongs to the technical field of surface ultrafine grinding.
背景技术Background technique
存储器硬盘磁头的表面质量是限制存储器硬盘容量和存储密度的瓶颈。为了提高磁头的表面质量,很多人进行了大量的研究。目前的研究主要针对磁头正面的超精研磨和抛光,而对磁头背面的研究很少涉及。磁头背面的表面质量对消除磁头应力集中现象和磁头的后续加工质量都至关重要。目前对磁头背面的研磨是使用和磁头正面相同的研磨液,采用的是纳米金刚石粉或金刚石多晶超微粉与油性介质组成的研磨液,一方面价格昂贵,另一方面研磨率很低。The surface quality of memory hard disk heads is the bottleneck that limits the capacity and storage density of memory hard disks. In order to improve the surface quality of the magnetic head, many people have conducted a lot of research. The current research mainly focuses on the superfine grinding and polishing of the front side of the magnetic head, while the research on the back side of the magnetic head is rarely involved. The surface quality of the back of the magnetic head is very important to eliminate the stress concentration phenomenon of the magnetic head and the subsequent processing quality of the magnetic head. At present, the grinding liquid on the back of the magnetic head is the same as that on the front of the magnetic head. The grinding liquid composed of nano-diamond powder or diamond polycrystalline ultrafine powder and oily medium is used. On the one hand, it is expensive, and on the other hand, the grinding rate is very low.
发明内容Contents of the invention
本发明的目的是提供一种金刚石粉粒度为微米级的研磨液,能够将产品表面粗糙度降到纳米级水平,可用在存储器硬盘磁头背面的研磨中,研磨后的磁头表面无划痕,表面粗糙度为0.3~0.4nm,同时研磨后的磁头表面残余应力小,研磨效率高,成本低。The object of the present invention is to provide a kind of diamond powder particle size is micron grade abrasive liquid, can reduce product surface roughness to nanoscale level, can be used in the grinding of memory hard disk magnetic head backside, the magnetic head surface after grinding has no scratches, the surface The roughness is 0.3-0.4nm, and at the same time, the residual stress on the surface of the magnetic head after grinding is small, the grinding efficiency is high, and the cost is low.
本发明的磁头背面研磨液,含有烷烃的矿物油、油性剂、金刚石粉、抗氧防腐剂、非离子型表面活性剂、消泡剂和抗静电剂,所述的烷烃矿物油为碳十一到碳十三的正构烷烃矿物油、异构烷烃矿物油中的任一种;所述的油性剂为合成油中的季戊四醇酯、聚α-烯烃、天然精致植物油中的菜籽油、蓖麻油中的任一种;所述的金刚石粉为金刚石单晶超微粉,其颗粒平均尺寸在0.1~0.2μm的约占95%以上;所述的抗氧防腐剂可以是二叔丁基对甲酚抗氧防腐剂T501,并配以微量的苯三唑衍生物抗氧防腐剂以增加其抗氧增效作用,并降低T501用量,也可以采用高温抗氧剂液体混合二烷基二苯胺;所述的非离子型表面活性剂可以采用聚氧乙烯失水山梨醇单油酸酯、山梨醇酐单油酸酯、脂肪醇聚氧乙烯醚中的任一种;所述的消泡剂可以采用Lubrizol公司的889D非硅消泡剂、Ciba公司生产的IRGALUBE AF1液态酯聚合物消泡剂中的任一种;所述的抗静电剂选用N,N-乙撑双酯酰胺、壬基酚聚氧乙烯醚中的任一种。The magnetic head back grinding liquid of the present invention contains alkane mineral oil, oily agent, diamond powder, anti-oxidation anticorrosion agent, nonionic surfactant, defoamer and antistatic agent, and described alkane mineral oil is carbon eleven Any one of normal paraffin mineral oils to carbon thirteen, isoparaffin mineral oils; the oily agent is pentaerythritol esters in synthetic oils, polyalpha-olefins, rapeseed oil in natural refined vegetable oils, castor Any one in sesame oil; the described diamond powder is a diamond single crystal superfine powder, and its particle average size accounts for more than 95% in 0.1~0.2 μ m; Phenolic anti-oxidant preservative T501, combined with a small amount of benzotriazole derivative anti-oxidant preservative to increase its anti-oxidative synergistic effect and reduce the amount of T501, or use high-temperature antioxidant liquid mixed with dialkyl diphenylamine; Described nonionic surfactant can adopt any one in polyoxyethylene sorbitan monooleate, sorbitan monooleate, fatty alcohol polyoxyethylene ether; Described defoamer can be Adopt any one in the 889D non-silicon defoamer of Lubrizol Company, the IRGALUBE AF1 liquid ester polymer defoamer produced by Ciba Company; Described antistatic agent is selected N for use, N-ethylene diester amide, nonylphenol Any of polyoxyethylene ethers.
所述的各组分的重量配比如下:The weight proportion of each described component is as follows:
烷烃的矿物油 50~94.79%Alkane mineral oil 50~94.79%
油性剂 5~35% Oil agent 5~35%
金刚石超微粉 0.01%~5% Superfine diamond powder 0.01%~5%
抗氧防腐剂 0.02~0.5% Antioxidant preservative 0.02~0.5%
非离子型表面活性剂 0.1~5% Non-ionic surfactant 0.1~5%
消泡剂 0.03~1.5% Defoamer 0.03~1.5%
抗静电剂 0.05~3.0% Antistatic agent 0.05~3.0%
本发明制备得到的研磨液粒子分布均匀,分散稳定性良好,现场用于计算机磁头背面的抛光中,用原子力显微镜测量抛光后的表面粗糙度为0.3~0.4nm,表面十分光整。在抛光过程中烃类矿物油和合成油或天然精致植物油起到充分的冷却和润滑作用,使计算机磁头的背面在很短的时间内达到需要的加工精度。The grinding liquid particles prepared by the invention have uniform distribution and good dispersion stability, and are used in the field polishing of the back of the computer magnetic head. The surface roughness after polishing is 0.3-0.4nm measured by an atomic force microscope, and the surface is very smooth. During the polishing process, hydrocarbon mineral oil and synthetic oil or natural refined vegetable oil can fully cool and lubricate, so that the back of the computer magnetic head can achieve the required processing accuracy in a short time.
本发明的特点:Features of the present invention:
本发明的研磨液可以用于存储器硬盘磁头背面的研磨,或类似于磁头背面的金属或非金属表面的研磨。为了保证具有比较高的研磨速率,不会产生划痕和表面黑点,不造成研磨后的残余应力过大,该研磨液具有合理的粘度,同时组分中添加了5~35%粘度指数比较高的合成油或天然植物油,使该研磨剂具有比较高的粘度指数,在研磨过程中,不会由于温度升高粘度下降而造成润滑不足;同时该研磨液中采用金刚石单晶超微粉,其价格低,而且晶体的表面比较尖锐,有利于提高研磨速率。用该研磨液进行存储器硬盘磁头背面超精研磨,可以获得高质量的表面,同时可使用于类似于硬盘磁头背面这样要求光洁度很高的金属或非金属表面。The grinding liquid of the present invention can be used for grinding the back of the magnetic head of the memory hard disk, or the grinding of the metal or non-metallic surface similar to the back of the magnetic head. In order to ensure a relatively high grinding rate, no scratches and black spots on the surface, and no excessive residual stress after grinding, the grinding liquid has a reasonable viscosity, and 5-35% of the viscosity index is added to the components to compare High synthetic oil or natural vegetable oil makes the abrasive have a relatively high viscosity index. During the grinding process, it will not cause insufficient lubrication due to the increase in temperature and decrease in viscosity; at the same time, the grinding liquid uses diamond single crystal ultrafine powder, which The price is low, and the surface of the crystal is relatively sharp, which is conducive to improving the grinding rate. The abrasive liquid is used for ultra-fine grinding on the back of the memory hard disk magnetic head to obtain a high-quality surface, and it can also be used on metal or non-metallic surfaces that require a high degree of finish similar to the back of the hard disk magnetic head.
具体实施方式:Detailed ways:
实施例一:取单晶金刚石超微粉0.5g,聚氧乙烯(20)失水山梨醇单油酸酯非离子表面活性剂2g,季戊四醇酯60g、碳12正构烷烃矿物油240g,二叔丁基对甲酚抗氧防腐剂1g,苯三唑衍生物抗氧防腐剂0.1g、Lubrizol公司的889D非硅消泡剂1g、N,N-乙撑双酯酰胺抗静电剂1g,充分混合使其成为悬浮液状的研磨液。用该研磨液研磨计算机磁头背面,磁头背面的表面粗糙度可以达到0.3~0.4nm。Embodiment one: get single crystal diamond superfine powder 0.5g, polyoxyethylene (20) sorbitan monooleate nonionic surfactant 2g, pentaerythritol ester 60g, carbon 12 n-paraffin mineral oil 240g, di-tert-butyl 1 g of p-cresol anti-oxidant preservative, 0.1 g of benzotriazole derivative anti-oxidant preservative, 1 g of 889D non-silicon antifoaming agent of Lubrizol Company, 1 g of N, N-ethylene diester amide antistatic agent, fully mixed to make It becomes a suspension-like grinding liquid. The back of the magnetic head of the computer is ground with the abrasive liquid, and the surface roughness of the back of the magnetic head can reach 0.3-0.4nm.
实施例二:取单晶金刚石超微粉0.8g,脂肪醇聚氧乙烯醚非离子表面活性剂2g,聚α-烯烃80g、碳13异构烷烃矿物油220g,二叔丁基对甲酚抗氧防腐剂1.5g,苯三唑衍生物抗氧防腐剂0.1g、Lubrizol公司的889D非硅消泡剂1g、N,N-乙撑双酯酰胺抗静电剂1g,充分混合使其成为悬浮液状的研磨液。用该研磨液研磨计算机磁头背面,磁头背面的表面粗糙度可以达到0.3~0.4nm。Embodiment 2: Take 0.8g of single crystal diamond superfine powder, 2g of fatty alcohol polyoxyethylene ether nonionic surfactant, 80g of polyalphaolefin, 220g of carbon 13 isoparaffin mineral oil, di-tert-butyl p-cresol antioxidant Preservative 1.5g, benzotriazole derivative anti-oxidant preservative 0.1g, Lubrizol 889D non-silicon antifoaming agent 1g, N, N-ethylene diester amide antistatic agent 1g, mix well to make it into a suspension Slurry. The back of the magnetic head of the computer is ground with the abrasive liquid, and the surface roughness of the back of the magnetic head can reach 0.3-0.4nm.
实施例三:取单晶金刚石超微粉0.6g,山梨醇酐单油酸酯非离子表面活性剂2g,天然精制菜籽油50g、碳13正构烷烃矿物油250g,高温抗氧剂液体混合二烷基二苯胺1g、IRGALUBEAF1液态酯聚合物消泡剂1g、壬基酚聚氧乙烯醚1g,充分混合使其成为悬浮液状的研磨液。用该研磨液研磨计算机磁头背面,磁头背面的表面粗糙度可以达到0.3~0.4nm。Embodiment three: get single crystal diamond superfine powder 0.6g, sorbitan monooleate nonionic surfactant 2g, natural refined rapeseed oil 50g, carbon 13 n-paraffin mineral oil 250g, high temperature antioxidant liquid mixing two Alkyl diphenylamine 1g, IRGALUBEAF1 liquid ester polymer defoamer 1g, nonylphenol polyoxyethylene ether 1g, mix well to make it into a suspension-like grinding liquid. The back of the magnetic head of the computer is ground with the abrasive liquid, and the surface roughness of the back of the magnetic head can reach 0.3-0.4nm.
实施例四:取单晶金刚石超微粉0.8g,脂肪醇聚氧乙烯醚非离子表面活性剂2g,天然精制蓖麻油30g、碳11异构烷烃矿物油270g,二叔丁基对甲酚抗氧防腐剂1.5g,苯三唑衍生物抗氧防腐剂0.1g、Lubrizol公司的889D非硅消泡剂1g、N,N-乙撑双酯酰胺抗静电剂1g,充分混合使其成为悬浮液状的研磨液。Embodiment 4: Get 0.8g of single crystal diamond superfine powder, 2g of fatty alcohol polyoxyethylene ether nonionic surfactant, 30g of natural refined castor oil, 270g of carbon 11 isomeric alkane mineral oil, di-tert-butyl p-cresol antioxidant Preservative 1.5g, benzotriazole derivative anti-oxidant preservative 0.1g, Lubrizol 889D non-silicon antifoaming agent 1g, N, N-ethylene diester amide antistatic agent 1g, mix well to make it into a suspension Slurry.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101565831B (en) * | 2009-04-30 | 2012-01-18 | 深圳市科玺化工有限公司 | Cyclic renewable water-based cleaning agent and cyclic renewing technology |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US7708904B2 (en) * | 2005-09-09 | 2010-05-04 | Saint-Gobain Ceramics & Plastics, Inc. | Conductive hydrocarbon fluid |
| CN1891803B (en) * | 2006-05-19 | 2010-05-12 | 赵国春 | Nano lubricating oil for internal combustion engine, and its preparing method |
| JP5285866B2 (en) * | 2007-03-26 | 2013-09-11 | 富士フイルム株式会社 | Polishing liquid |
| CN101979450B (en) * | 2009-11-05 | 2013-10-23 | 北京天科合达蓝光半导体有限公司 | Grinding liquid, preparation method of grinding liquid and grinding method using the same |
| CN102268225B (en) * | 2011-05-30 | 2014-03-26 | 上海百兰朵电子科技有限公司 | Permanent-suspension diamond grinding liquid |
| CN102337084B (en) * | 2011-07-25 | 2014-04-09 | 郑州磨料磨具磨削研究所有限公司 | Grinding fluid for processing LED (light-emitting diode) substrate and preparation method thereof |
| CN105647475B (en) * | 2015-12-31 | 2017-12-01 | 河南联合精密材料股份有限公司 | Oily two molten diamond grinding fluids of a kind of water and preparation method thereof |
| CN106701019A (en) * | 2016-12-29 | 2017-05-24 | 东莞市淦宏信息科技有限公司 | Improved ceramic plate grinding fluid |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101565831B (en) * | 2009-04-30 | 2012-01-18 | 深圳市科玺化工有限公司 | Cyclic renewable water-based cleaning agent and cyclic renewing technology |
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