CN1273961C - Suspension rack for disk drive - Google Patents
Suspension rack for disk drive Download PDFInfo
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- CN1273961C CN1273961C CN 02107697 CN02107697A CN1273961C CN 1273961 C CN1273961 C CN 1273961C CN 02107697 CN02107697 CN 02107697 CN 02107697 A CN02107697 A CN 02107697A CN 1273961 C CN1273961 C CN 1273961C
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- actuator base
- elastic hinge
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- 229910003781 PbTiO3 Inorganic materials 0.000 description 1
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- Supporting Of Heads In Record-Carrier Devices (AREA)
- Moving Of The Head To Find And Align With The Track (AREA)
Abstract
Description
技术领域technical field
本发明涉及一种安装在信息处理装置、诸如个人电脑里的磁盘驱动器用的悬架。The present invention relates to a suspension for a disk drive mounted in an information processing device such as a personal computer.
背景技术Background technique
在具有转动磁盘或磁光盘的磁盘驱动器里,一磁头用来在磁盘的记录表面记录或读出数据。磁头包括一面对磁盘的记录表面的滑动件,隐藏在滑动件里的传感器,等等。当磁盘高速转动时,滑动件在磁盘上略微上升,由此在磁盘和滑动件之间形成气垫。固定着磁头的一悬架包括一叫做负载梁的梁部件,由非常薄的板弹簧形成的、固定在负载梁上的挠曲件,设置在负载梁的近端部分的底板,等等。构成磁头的滑动件安装在挠曲件的末端部分。In a disk drive having a rotating magnetic disk or a magneto-optical disk, a magnetic head is used to record or read data from the recording surface of the disk. The magnetic head includes a slider facing the recording surface of the magnetic disk, a sensor hidden in the slider, and the like. When the disk rotates at high speed, the slider rises slightly on the disk, thereby forming an air cushion between the disk and the slider. A suspension to which a magnetic head is fixed includes a beam member called a load beam, a flexure formed of a very thin leaf spring fixed to the load beam, a bottom plate provided at a proximal end portion of the load beam, and the like. A slider constituting a magnetic head is mounted on an end portion of the flexure.
在硬盘驱动器(HDD)里,磁盘的磁道中线必须服从下列控制,即在磁道宽度的±10%内。随着高密度磁盘的最新发展,磁道宽度已减小到1μm或更小,从而难以使滑动件保持在磁道中线上。因此,实现滑动件的精确位置控制和增加磁盘的刚性是必须的,由此减少磁盘的摆动。In a hard disk drive (HDD), the track centerline of the magnetic disk must be subject to control within ±10% of the track width. With the recent development of high-density magnetic disks, the track width has been reduced to 1 µm or less, making it difficult to keep the slider on the track centerline. Therefore, it is necessary to achieve precise position control of the slider and increase the rigidity of the magnetic disk, thereby reducing the wobble of the magnetic disk.
通常,传统的磁盘驱动器是单致动类型的,使一悬架只通过音圈电动机移动。单致动悬架在低频波段上具有许多共振峰值。这样,在高频波段时,它只通过音圈电动机难以控制在悬架末端上的滑动件(头部),而伺服系统的带宽不能增加。Typically, conventional disk drives are of the single-actuation type, with a suspension moved by voice coil motors only. Single-actuation suspensions have many resonant peaks on the low frequency band. Thus, in the high frequency band, it is difficult to control the slider (head) on the end of the suspension only by the voice coil motor, and the bandwidth of the servo system cannot be increased.
因此,发展了一种双致动悬架,它包括一微型致动部分和一音圈电动机。微型致动部分使第二致动器在悬架的横向方向(所谓的摆动方向)略微移动负载梁的末端部分或滑动件。Therefore, a dual-actuation suspension has been developed which includes a micro-actuation section and a voice coil motor. The micro-actuating part causes the second actuator to slightly move the end part of the load beam or the slider in the transverse direction of the suspension (the so-called swing direction).
由于由第二致动器驱动的可移动部分在重量上比单致动悬架的可移动部分轻许多,因此可在高频带上控制滑动件。这样,与单致动悬架相比,双致动悬架可使供滑动件的位置控制用的伺服系统的带宽高几倍,并可相应地减少寻道错误。Since the movable part driven by the second actuator is much lighter in weight than that of a single-actuation suspension, the slider can be controlled over a high frequency band. In this way, the dual-actuation suspension allows several times higher bandwidth of the servo system for position control of the slide compared to a single-actuation suspension, and correspondingly reduces seek errors.
众所周知,压电陶瓷元件、诸如叫做PZT的锆钛酸铅(PbZrO3和PbTiO3的固溶体)可用来作第二致动器的材料。由于PZT具有相当高的共振频率,它适合作为双致动悬架的第二致动器。压电陶瓷元件利用粘结剂固定在一致动器底座上。It is well known that piezoelectric ceramic elements such as lead zirconate titanate (a solid solution of PbZrO3 and PbTiO3 ) called PZT can be used as the material of the second actuator. Since PZT has a rather high resonance frequency, it is suitable as the second actuator of a dual-actuation suspension. The piezoelectric ceramic element is fixed on an actuator base with adhesive.
用作微型致动部分的、诸如PZT的压电陶瓷元件薄到10-100微米且易碎。提供电流给压电陶瓷元件的电极形成于元件的正面或反面。另一方面,构成致动器底座的金属底板等被用作电气接地。因此,为了防止压电陶瓷元件的电极和致动器底座之间短路,在电极和致动器底座之间的电绝缘的间距必须保证。通常,通过用一夹具将压电陶瓷元件和致动器底座定位并夹紧使粘结剂固化,相信该间距可得到保证。Piezoelectric ceramic elements such as PZT used as micro-actuating parts are as thin as 10-100 micrometers and fragile. Electrodes for supplying current to the piezoelectric ceramic element are formed on the front or back side of the element. On the other hand, a metal base plate or the like constituting the base of the actuator is used as an electrical ground. Therefore, in order to prevent a short circuit between the electrodes of the piezoceramic element and the actuator base, an electrically insulating distance between the electrodes and the actuator base must be ensured. Usually, the gap is believed to be secured by positioning and clamping the piezoceramic element and the actuator base with a jig to cure the adhesive.
然而,如果压电陶瓷元件被夹具夹住,在某些情况下,它可能由于应力而断裂,因为粘结剂固化时略微收缩。如果压电陶瓷元件在粘结工艺中未断裂,当它在后来的粘结工艺中经受外力作用时可能因残余应力而断裂。However, if the piezoceramic element is held by a jig, in some cases, it may break due to stress because the adhesive shrinks slightly while curing. If the piezoceramic element is not broken during the bonding process, it may break due to residual stress when it is subjected to an external force during the subsequent bonding process.
发明内容Contents of the invention
因此,本发明的目的是提供一种磁盘驱动器的悬架,其中,压电陶瓷元件可与致动器底座安全地绝缘而不会断裂。It is therefore an object of the present invention to provide a suspension for a magnetic disk drive in which a piezoelectric ceramic element can be safely insulated from an actuator base without breaking.
为了实现上述目的,本发明的悬架包括一负载梁,其上安装一挠曲件,该负载梁具有一近端部分和一与该近端部分相对的末端部分;一致动器底座,它安装在负载梁的近端部分上;一压电陶瓷元件,它安装在致动器底座上,当给其施加电压时,它能变形而沿摆动方向移动负载梁;以及一粘结剂层,它将压电陶瓷元件固定在致动器底座上;粘结剂层包括电绝缘粘结剂和与该粘结剂混和的、由电绝缘材料形成的许多充填物,充填物具有可在压电陶瓷元件和致动器底座之间获得电绝缘间距的尺寸。充填物可由具有电绝缘性能、在压缩负载下不容易变形的材料、诸如二氧化硅颗粒形成。In order to achieve the above object, the suspension of the present invention includes a load beam on which a flexure is mounted, the load beam has a proximal portion and an end portion opposite to the proximal portion; an actuator base, which mounts on the proximal portion of the load beam; a piezoceramic element mounted on the actuator base that deforms to move the load beam in the swing direction when a voltage is applied to it; and an adhesive layer that Fix the piezoelectric ceramic element on the actuator base; the adhesive layer includes an electrically insulating adhesive and mixed with the adhesive, a number of fillers formed of electrically insulating materials, the fillers have Dimensions to obtain electrically insulating spacing between the element and the actuator base. The filling may be formed of a material having electrically insulating properties that does not readily deform under compressive loads, such as silica particles.
按照本发明,在压电陶瓷元件的导电部分、诸如一电极和致动器底座之间可容易地获得用于电绝缘的适当间距。这样,不需要用夹具夹住压电陶瓷元件可使粘结剂固化,从而可避免应力产生,可防止压电陶瓷元件断裂。According to the present invention, an appropriate spacing for electrical insulation can be easily obtained between a conductive portion of the piezoelectric ceramic element, such as an electrode, and the actuator base. In this way, the adhesive can be solidified without clamping the piezoelectric ceramic element with a jig, thereby avoiding stress generation and preventing the piezoelectric ceramic element from breaking.
在本发明的悬架里,致动器底座可形成有能安装压电陶瓷元件的开口部分,开口部分内安装压电陶瓷元件。按照本发明,由于压电陶瓷元件安装在致动器底座的开口部分里,因此它可得到保护,而微型致动部分可变薄。此外,由于压电陶瓷元件的厚度方向中心相对底板的厚度方向中心的偏移较小,因此压电陶瓷元件的移动可有效地在摆动方向传递。In the suspension of the present invention, the actuator base may be formed with an opening portion capable of installing the piezoelectric ceramic element, and the piezoelectric ceramic element is installed in the opening portion. According to the present invention, since the piezoelectric ceramic element is installed in the opening portion of the actuator base, it can be protected, and the micro-actuating portion can be thinned. In addition, since the thickness direction center of the piezoelectric ceramic element is less deviated from the thickness direction center of the bottom plate, the movement of the piezoelectric ceramic element can be effectively transmitted in the swing direction.
此外,在本发明的悬架里,压电陶瓷元件的正面和反面分别形成有不同极性的电极(第一和第二电极)。在这样设计的微型致动部分里,压电陶瓷元件的第一电极通过致动器底座接地,而一导线与第二电极连接,按照本发明,在第一电极和致动器底座之间可获得用于电绝缘的适当间距。Furthermore, in the suspension of the present invention, electrodes (first and second electrodes) of different polarities are formed on the front and back surfaces of the piezoelectric ceramic element, respectively. In the micro-actuating part designed like this, the first electrode of the piezoelectric ceramic element is grounded through the actuator base, and a lead is connected with the second electrode. According to the present invention, the first electrode and the actuator base can be Obtain proper spacing for electrical isolation.
在本发明的悬架里,充填物的推荐颗粒尺寸是10μm或以上,较佳的是30μm或以上。按照本发明,在高电压下可获得良好的电绝缘性能,不要说是施加给传统压电陶瓷元件的电压了。In the suspension of the present invention, the recommended particle size of the filler is 10 μm or above, preferably 30 μm or above. According to the present invention, good electrical insulating properties can be obtained at high voltages, not to mention voltages applied to conventional piezoelectric ceramic elements.
较佳的是,粘结剂在固化状态时的杨氏模量是60MPa或以上。由于粘结剂的杨氏模量是60MPa或以上,按照本发明,压电陶瓷元件的行程可保持在一实际而合理的水平上。这样,如果将具有比粘结剂层高的杨氏模量的充填物混和在粘结剂里,粘结剂层的杨氏模量可得到进一步改善。Preferably, the Young's modulus of the adhesive in a cured state is 60 MPa or above. Since the Young's modulus of the adhesive is 60 MPa or more, according to the present invention, the stroke of the piezoelectric ceramic element can be maintained at a practical and reasonable level. Thus, if a filler having a higher Young's modulus than that of the adhesive layer is mixed in the adhesive, the Young's modulus of the adhesive layer can be further improved.
在本发明的悬架里,致动器底座可包括一底板和一固定于该底板上的弹性铰接件,该弹性铰接件还固定于负载梁而使得底板通过该弹性铰接件连接于负载梁。按照本发明,可使用符合负载梁、致动器底座和铰接件所需性能的材料,这样,悬架的性能可得到改善。In the suspension of the present invention, the actuator base may include a bottom plate and an elastic hinge fixed to the bottom plate, and the elastic hinge is also fixed to the load beam such that the bottom plate is connected to the load beam through the elastic hinge. According to the present invention, the performance of the suspension can be improved by using materials matching the required properties of the load beam, actuator base and hinge.
本发明的其它目的和优点将在下面的描述中看出,部分地将从描述中变得清楚,或可从本发明的实施中学到。本发明的目的和优点可通过下面特别指出的手段和组合得以实现和获得。Additional objects and advantages of the invention will appear from the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objects and advantages of the invention can be realized and obtained by means of the instrumentalities and combinations particularly pointed out hereinafter.
附图说明Description of drawings
结合在说明书里并构成说明书一部分的附图介绍了本发明目前的较佳实施例,将上述的总体说明和下面给出的较佳实施例的详细说明结合在一起,用来描述本发明的原理。The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate the presently preferred embodiment of the invention and, together with the foregoing general description and the following detailed description of the preferred embodiment, serve to describe the principles of the invention .
图1是按照本发明第一实施例的一悬架的平面图;1 is a plan view of a suspension according to a first embodiment of the present invention;
图2是图1所示的悬架中的底板的平面图;Figure 2 is a plan view of the base plate in the suspension shown in Figure 1;
图3是图1所示的悬架中的铰接件的平面图;Figure 3 is a plan view of a hinge in the suspension shown in Figure 1;
图4是沿着图1中的F4-F4线的、悬架中的微型致动部分的剖视图;Figure 4 is a cross-sectional view of the micro-actuating part of the suspension along the line F4-F4 in Figure 1;
图5是显示图4所示的微型致动部分的一部分的放大的剖视图;FIG. 5 is an enlarged cross-sectional view showing a portion of the microactuating portion shown in FIG. 4;
图6是显示各压电陶瓷元件和铰接件之间的间距与确保电绝缘的悬架的数量之间的关系的图表;Fig. 6 is a graph showing the relationship between the spacing between each piezoelectric ceramic element and the hinge and the number of suspensions ensuring electrical insulation;
图7是显示各压电陶瓷元件和底板之间的间距与确保电绝缘的悬架的数量之间的关系的图表;7 is a graph showing the relationship between the spacing between each piezoelectric ceramic element and the base plate and the number of suspensions ensuring electrical insulation;
图8粘结剂的杨氏模量和各压电陶瓷元件的行程之间的关系的图表;以及8 is a graph showing the relationship between the Young's modulus of the binder and the stroke of each piezoelectric ceramic element; and
图9是显示按照本发明第二实施例的一悬架的一部分的剖视图。Fig. 9 is a sectional view showing a part of a suspension according to a second embodiment of the present invention.
具体实施方式Detailed ways
现在参考图1至5介绍按照本发明第一实施例的、供磁盘驱动器用的悬架10A。A
图1中所示的双致动型的悬架10A包括一负载梁11、微型致动部分12、底板13、铰接件14等等。A
负载梁11是用具有(例如)约100μm厚度的弹性金属板形成的。挠曲件15安装在负载梁11上。挠曲件15是由比负载梁11薄的高精度金属板弹簧形成的。构成磁头的滑动件16安装在挠曲件15的末端部分。The
如图2所示,一圆形毂孔21形成于底板13的近端部分20处。一对孔部分23形成于底板13的近端部分20和前端部分22之间。各孔部分23大到足以容纳一压电陶瓷元件40。一条形连接部分24沿着底板13的纵向方向(悬架10A的轴向方向)、在一对孔部分23之间延伸。连接部分24可沿着底板13的横向方向(图1中的箭头S所示的摆动方向)作一定程度的弯曲。As shown in FIG. 2 , a
底板13的近端部分20固定在一致动臂的末端部分上,致动臂由一音圈电动机(未画出)驱动并通过该音圈电动机转动。底板13是由具有(例如)约200μm厚度的金属板形成的。在该实施例的情况下,底板13和铰接件14构成按照本发明的致动器底座25。The
如图3所示,铰接件14包括一重叠固定在底板13的近端部分20上的近端部分30,形成在与底板13的连接部分24对应位置上的条形桥接部分31,形成在与底板13的前端部分22对应位置上的中间部分32,一对可在厚度方向弹性变形的韧性铰接部分33,固定在负载梁11上的末端部分34。铰接件14是由具有约50μm厚度的弹性金属板形成的。As shown in Figure 3, the
微型致动部分12包括一对压电陶瓷元件40,诸如PZT的板状压电元件。各矩形压电陶瓷元件40具有在厚度方向的一正面50和一反面51(图4所示),在纵向相反两端的端面52和53,以及相反的侧面54和55。The
压电陶瓷元件40分别容纳在致动器底座25的开口部分23里,从而基本上互相平行延伸。当各元件40被安装在对应的开口部分23里时,各元件40的相反端而52和53分别在各开口部分23的纵向相反两端上,越过该端面和内表面60和61之间的间隙、面对内表面60和61。靠近连接部分24的各元件40的侧面54越过该侧面54和连接部分24的侧面24a之间的间隙、面对连接部分24的侧面24a。The piezoelectric
如图4所示,诸如金属的导电材料的电极70和71通过喷涂或电镀分别形成于各压电陶瓷元件40的正面50和反面51。一个电极70通过银导电胶72与底板13接地。一条导线73与另一电极71连接。而该导线73与挠曲件15上的布线件的接线端74连接。As shown in FIG. 4,
各压电陶瓷元件40的一个端部40a利用粘结剂层80固定在铰接件14的近端部分30上。元件40的另一端部40b利用粘结剂层80固定在铰接件14的中间部分32上。在这样做的时候,粘结剂层80还必须施加在元件40与致动器底座25的各开口部分23的内表面60和61之间的空间里。这样,压电陶瓷元件40的变形(移动)可更有效地传送给负载梁11,并可使元件40的端面52和53及侧面54和55与致动器底座25之间安全地电绝缘。One
当施加电压时,一对压电陶瓷元件40中的一个沿纵向延伸,而另一元件40沿纵向收缩。这样,按照压电陶瓷元件40变形的方向和行程,负载梁11在横向(摆动方向)移动所需的距离。When a voltage is applied, one of the pair of piezoelectric
如图5示意显示的,粘结剂层80包括用作电绝缘基质树脂的粘结剂81,以及大量的颗粒充填物82。这些颗粒充填物82是用电绝缘材料形成的,并包含在粘结剂81里。虽然环氧树脂是粘结剂81的一个例子,但包括丙烯酸树脂的其它塑料粘结剂也可用于这个目的。As schematically shown in FIG. 5 , the
充填物82具有的尺寸使其可插入各压电陶瓷元件和致动器底座25之间,并可确保两者之间电绝缘的间距。充填物82的粒子尺寸应该是10μm或更大,较佳的是30μm或更大。虽然充填物82是由(例如)硅石(二氧化硅)形成的,但也可由具有电绝缘性能、在压缩负载下不能容易地变形的其它材料、例如陶瓷、玻璃、合成树脂等形成。The filler 82 has such a size that it can be inserted between each piezoceramic element and the
由于在粘结剂层80里使用充填物82,因此可在各压电陶瓷元件40和致动器底座25之间不使用任何夹具就能获得预定的间距。如图5示意显示的,各陶瓷元件40的电极71与铰接件14之间的间距C1、以及元件40的端面52和53与底板13的内表面60和61之间的间距C2是10μm的长度或更大的长度。Since the filler 82 is used in the
为了检查悬架10A的压电陶瓷元件40的电绝缘性能,测试分别在100V、200V、300V和400V电压下进行。通过这些测试确定,在使用本实施例的粘结剂层80时,在上述任何一档电压下均可获得电绝缘。In order to check the electrical insulation performance of the piezoelectric
另一方面,在不使用任何夹具、使用不包括充填物82的粘结剂将各压电陶瓷元件40固定在致动器底座25的情况下用上述电压进行相同的电绝缘测试。这时,某些样本缺少供绝缘用的间距,在100V或100V以下就会绝缘失效。On the other hand, the same electrical insulation test was performed with the above-mentioned voltages without using any jig and fixing each piezoelectric
本发明人试制了大量悬架,其中,压电陶瓷元件利用具有充填物的粘结剂固定在致动器底座上。本发明人检查了确保给定程度的电绝缘的悬架的数量和间距C1(各压电陶瓷元件40和铰接件14之间的间距)之间的关系。图6显示了检查结果。The present inventors have trial-produced a large number of suspensions in which piezoelectric ceramic elements are fixed to an actuator base using an adhesive with a filler. The present inventors examined the relationship between the number of suspensions ensuring a given degree of electrical insulation and the spacing C1 (the spacing between each piezoelectric
图7显示了在使用具有充填物的粘结剂将各陶瓷元件40固定在致动器底座上的情况下,悬架数量和各间距C2(各压电陶瓷元件40和底板13之间的间距)之间的关系的检查结果。这些绝缘测试显示,如果间距C1和C2大于10μm,可确保给定程度的电绝缘。换句话说,如果10μm或更大的充填物混和在粘结剂81里,可获得给定的绝缘程度。7 shows the number of suspensions and the spacing C2 (the spacing between each
在上述实施例里,压电陶瓷元件40通过施加有10μm或更大的充填物的粘结剂层80固定在致动器底座25上。由于使用这种粘结剂层80,不必使用任何夹具就可获得适当的间距(约10μm至50μm)。按照该实施例,可避免在粘结剂固化后产生应力,而这在压电陶瓷元件被夹具夹住时会产生。In the above-described embodiment, the piezoelectric
本发明人按照上述实施例制造了五个样本,并检查了在粘结剂固化后使压电陶瓷元件40断裂的负载。另一方面,本发明人准备了五个作对比的样本,其中,压电陶瓷元件在粘结剂(没有充填物)被固化时被夹具夹住,并检查使陶瓷元件断裂的负载。The present inventors produced five samples according to the above-described examples, and examined the load that would break the piezoelectric
这些破坏性实验表明,基于上述实施例的样本1至5在分别经受140g、160g、130g、180g和130g的负载时断裂,这样,它们的平均负载是148g。另一方面,对比样本1至5在分别经受90g、70g、80g、40g和80g的负载时断裂,这样,它们的平均负载降低至72g。These destructive tests showed that
图8显示了粘结剂的杨氏模量和压电陶瓷元件40的行程之间的关系。在图8中,L1和L2分别表示分析值和测量值。从图8中可看到,粘结剂的杨氏模量越高,可获得的陶瓷元件的行程越有利。特别是,通过使用具有60MPa或更高的杨氏模量的粘结剂可获得适合于实际使用的行程。FIG. 8 shows the relationship between the Young's modulus of the adhesive and the stroke of the piezoelectric
图9显示了按照本发明第二实施例的悬架10B。在这种悬架10B里,一对电极91和92形成于各压电陶瓷元件40的反面51,而第一电极92通过银导电胶72与铰接件14接地。一与第二电极92连接的导线73与挠曲件15上的接线端74连接。第二实施例具有第一实施例中的悬架10A的其它结构和功能。因此,相同的标号被用来表示两个实施例中的相同部分,而这些部分的介绍在这里被省略。在该实施例的悬架10B里,用作绝缘的间距也是通过在压电陶瓷元件40的电极92和铰接件14之间提供具有充填物的粘结剂层80获得的。FIG. 9 shows a suspension 10B according to a second embodiment of the present invention. In this suspension 10B, a pair of electrodes 91 and 92 are formed on the reverse side 51 of each piezoelectric
在上述各实施例里,压电陶瓷元件40分别安装在致动器底座25的开口部分23里。然而,不将元件40安装在开口部分23里,元件40也可以重叠在底板13上的方式、利用粘结剂层80固定在底板13上,如图9中的双点划线F所示。In the above-described embodiments, the piezoelectric
应该知道,在实施包括上述实施例的本发明中,在不超出本发明范围或精神的情况下,构成本发明的、包括负载梁、致动器底座、底板、粘结剂、充填物、压电陶瓷元件等的零件可进行各种改变或改进。为了减轻重量,底板和负载梁可用诸如铝合金的轻金属合金、或轻金属合金和不锈钢的薄片(例如覆层)形成。It should be understood that in practicing the present invention including the above-described embodiments, without departing from the scope or spirit of the present invention, the components constituting the present invention, including the load beam, the actuator base, the base plate, the adhesive, the filler, the pressing Parts such as electroceramic elements can be variously changed or improved. To reduce weight, the base plate and load beam may be formed from light metal alloys such as aluminum alloys, or thin sheets (eg, cladding) of light metal alloys and stainless steel.
对于本技术领域的技术人员来说,其它的优点和改进是容易发现的。因此,广义地说,本发明不限于这里所显示的和所述的具体细节和示范的实施例。在不超出由附后的权利要求书和它们的等价物限定的总的发明构思的精神或范围的情况下,还可以作出许多改进。Additional advantages and modifications will readily appear to those skilled in the art. Therefore, the invention in its broadest sense is not limited to the specific details and exemplary embodiments shown and described herein. Many modifications may be made without departing from the spirit or scope of the general inventive concept as defined by the appended claims and their equivalents.
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| JP5189813B2 (en) * | 2007-09-27 | 2013-04-24 | 日本発條株式会社 | Head suspension and piezoelectric actuator |
| CN101714359B (en) * | 2008-10-03 | 2012-05-02 | 日本发条株式会社 | Head suspension and method of manufacturing head suspension |
| JP4948554B2 (en) * | 2009-02-16 | 2012-06-06 | 日本発條株式会社 | Head suspension |
| JP5500872B2 (en) * | 2009-05-29 | 2014-05-21 | 日本発條株式会社 | Piezoelectric element with electrode and head suspension |
| US8542465B2 (en) | 2010-03-17 | 2013-09-24 | Western Digital Technologies, Inc. | Suspension assembly having a microactuator electrically connected to a gold coating on a stainless steel surface |
| US8339748B2 (en) * | 2010-06-29 | 2012-12-25 | Western Digital Technologies, Inc. | Suspension assembly having a microactuator bonded to a flexure |
| US8665567B2 (en) * | 2010-06-30 | 2014-03-04 | Western Digital Technologies, Inc. | Suspension assembly having a microactuator grounded to a flexure |
| CN109427352B (en) * | 2017-08-25 | 2020-05-05 | 日本发条株式会社 | Electronic machine manufacturing apparatus |
| JP7516191B2 (en) * | 2020-09-29 | 2024-07-16 | 日本発條株式会社 | Manufacturing method and manufacturing device for disk drive suspension |
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