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CN1272277C - Magneto-electric coupled ceramic materials and preparing method thereof - Google Patents

Magneto-electric coupled ceramic materials and preparing method thereof Download PDF

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CN1272277C
CN1272277C CN200410064900.9A CN200410064900A CN1272277C CN 1272277 C CN1272277 C CN 1272277C CN 200410064900 A CN200410064900 A CN 200410064900A CN 1272277 C CN1272277 C CN 1272277C
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CN1603279A (en
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袁国亮
刘俊明
王一平
刘治国
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Nanjing University
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Abstract

The present invention discloses magneto-electric coupling ceramic material. The present invention has the chemical formula: Biological-xAxFe1-yByO3, wherein x is more than 0 or equal to 0, and less than 0.5; y is more than o or equal to 0, and less than 0.2; x and y can not be 0 simultaneously; A is one or two kinds of trivalent rare earth metal ions of La, Nd, Td, Sm and Pr; B is one kind of transition metal ions of Mn or Co. The material has the following physical property that the breakdown electric field is more than 150kV/ cm; the remanent polarization of the electropolar-electric field loop is between 3 to 30 mu C/cm<2>. Simultaneously, the present invention also discloses a preparation method of the material. The present invention has the invention point that the temperature rises at the temperature rise speed over 30 DEG C/minute during sintering; the sintering is carried out between 850 DEG C to 940 DEG C; then, cooling is carried out rapidly.

Description

一种磁电耦合陶瓷材料及其制备方法A kind of magnetoelectric coupling ceramic material and preparation method thereof

技术领域technical field

本发明涉及一种磁电耦合陶瓷材料及其制备方法。The invention relates to a magnetoelectric coupling ceramic material and a preparation method thereof.

背景技术Background technique

铁电磁体或者磁电耦合材料同时具有铁电性和铁磁(反铁磁)性,并且铁电电极化和铁磁(反铁磁)自旋之间可以发生耦合,产生新的物理效应,也就是说可以通过加电场改变这类材料的磁性或者通过加磁场改变这类材料的铁电性。一般的单相铁电磁体的铁磁居里温度都比较低,比如Pb(Nb1/2Fe1/2)O3的铁磁居里温度为-160℃左右。BiFeO3是现有的单相铁电磁体中少见的铁电居里温度(~700℃)和铁磁居里温度(~370℃)都在室温以上的材料。BiFeO3的反铁磁存在正弦波动,因此仅仅具有较小的二级磁电耦合系数,但是Bi1-xAxFe1-yByO3系列陶瓷(0≤x<0.5,0≤y<0.2,A为稀土金属离子La3+、Nd3+、Td3+、Sm3+、Pr3+中的一种或两种,B为一种三价金属离子Mn3+或Co3+)有望破坏反铁磁的正弦波动并具有较大的一级磁电耦合系数。由于BiFeO3对制备条件非常敏感,三价Fe离子的变价和Bi的挥发导致陶瓷的绝缘性很差;因此在没有解决制备方法之前,Bi1-xAxFe1-yByO3系列陶瓷的研究无法有效开展。当前,能否成功制备出高绝缘性(电阻率~109Ω·cm,击穿电场大于150kV/cm)的具有ABO3型钙钛矿单相陶瓷,是这类陶瓷和薄膜能否被有效开发研究和优化并被应用的关键因素之一。目前,在这一领域,多数人通过一般的固相烧结方法并使用Bi2O3粉末制备Bi1-xAxFe1-yByO3陶瓷,所以烧结温度在Bi2O3的熔点(817℃)以下。但是由于三价Fe离子容易变价,Bi容易挥发,通过一般固相烧结方法很难得到纯ABO3相的陶瓷,因而电阻率较低以至于不能得到饱和的电极化-电场之间的电滞回线(即P-V回线)。Ferroelectric magnets or magnetoelectric coupling materials have both ferroelectricity and ferromagnetic (antiferromagnetic) properties, and coupling between ferroelectric polarization and ferromagnetic (antiferromagnetic) spins can occur, resulting in new physical effects, That is to say, the magnetism of such materials can be changed by applying an electric field or the ferroelectricity of such materials can be changed by applying a magnetic field. The ferromagnetic Curie temperature of general single-phase ferroelectromagnets is relatively low, for example, the ferromagnetic Curie temperature of Pb(Nb 1/2 Fe 1/2 )O 3 is about -160°C. BiFeO 3 is a rare material in the existing single-phase ferroelectric magnets with both ferroelectric Curie temperature (~700°C) and ferromagnetic Curie temperature (~370°C) above room temperature. The antiferromagnetism of BiFeO 3 has sinusoidal fluctuations, so it only has a small second-order magnetoelectric coupling coefficient, but the Bi 1-x A x Fe 1-y By y O 3 series ceramics (0≤x<0.5, 0≤y <0.2, A is one or two of rare earth metal ions La 3+ , Nd 3+ , Td 3+ , Sm 3+ , Pr 3+ , B is a trivalent metal ion Mn 3+ or Co 3+ ) is expected to break the sinusoidal fluctuations of antiferromagnetism and have a large first-order magnetoelectric coupling coefficient. Because BiFeO 3 is very sensitive to the preparation conditions, the price change of trivalent Fe ions and the volatilization of Bi lead to poor insulation of ceramics; therefore, before the preparation method is solved, the Bi 1-x A x Fe 1-y By y O 3 series Research on ceramics cannot be carried out effectively. At present, whether ABO 3 -type perovskite single-phase ceramics with high insulation (resistivity ~ 10 9 Ω·cm, breakdown electric field greater than 150kV/cm) can be successfully prepared depends on whether such ceramics and thin films can be effectively One of the key factors to develop research and optimize and be applied. At present, in this field, most people prepare Bi 1-x A x Fe 1-y By O 3 ceramics through the general solid-state sintering method and use Bi 2 O 3 powder, so the sintering temperature is at the melting point of Bi 2 O 3 (817°C) below. However, because trivalent Fe ions are easy to change in value and Bi is easy to volatilize, it is difficult to obtain pure ABO 3 phase ceramics by general solid-state sintering methods, so the resistivity is so low that it is impossible to obtain a saturated electrical polarization-electric field hysteresis. line (i.e. PV return line).

目前有两种专门针对BiFeO3陶瓷的烧结方法比较著名。第一种是用稀释的硝酸溶解用普通烧结方法形成的杂相,再把剩下的纯相烧结而成陶瓷。用此方法制备的陶瓷,因为很难完全把杂相清除干净,因而击穿电场还是不能达到~150kV/cm,所以无法对BiFeO3陶瓷进行饱和极化[M.Mahesh Kumar,V.R.Palkar,K.Srinivas,and S.V.Suryanarayana,Applied Physics Letters 76,2764(2000).]。第二种方法利用NaOH制备所需离子的氢氧化物混合体沉淀物,然后在-550℃烧结成所需的粉末材料,最后制成陶瓷靶用于脉冲激光沉积(PLD)或者磁控溅射生长薄膜[V.R.Palkar,Darshan C.Kundaliya,and S.K.Malik,Indian Patent Application No.409/MUM/2003,dated 24 April 2003.]。目前,已经有人用传统的固相烧结方法制备了Bi1-xAxFe1-yByO3系列陶瓷,但是他们制备的陶瓷击穿电场很小,难以测到饱和的极化-电场回线[A.V.Zalesskii,A.A.Frolov,T.A.Khimich,and A.A.Bush,Physics of the Solid State45,141(2003);I.Sosnowska,W.Schfer,W.Kockelmann,K.H.Andersen,I.O.Troyanchuk,Appl.Phys.A 74,S1040(2002);V.L.Mathe,K.K.Patankar,R.N.Patil,C.D.Lokhande,Journal of Magnetism and Magnetic Materials270,380(2004);V.L.Mathe,Journal of Magnetism and Magnetic Materials263,344(2003).]。上述文献报道的陶瓷材料的具体性能指标在表一中介绍。因此,使用简单方法制备电阻率达到~109Ω·cm并且击穿电压大于150kV/cm的具有ABO3单相结构的Bi1-xAxFe1-yByO3,成为一个迫切的任务。There are currently two well-known sintering methods specifically for BiFeO 3 ceramics. The first is to dissolve the impurity phase formed by ordinary sintering method with diluted nitric acid, and then sinter the remaining pure phase to form ceramics. Ceramics prepared by this method, because it is difficult to completely remove the impurity phase, so the breakdown electric field still cannot reach ~150kV/cm, so it is impossible to saturate polarization of BiFeO 3 ceramics [M.Mahesh Kumar, VRPalkar, K.Srinivas , and SV Suryanarayana, Applied Physics Letters 76, 2764 (2000).]. The second method uses NaOH to prepare the hydroxide mixture precipitate of the required ions, and then sinters the desired powder material at -550°C, and finally makes a ceramic target for pulsed laser deposition (PLD) or magnetron sputtering Growing Thin Films [VR Palkar, Darshan C. Kundaliya, and SK Malik, Indian Patent Application No. 409/MUM/2003, dated 24 April 2003.]. At present, Bi 1-x A x Fe 1-y By y O 3 series ceramics have been prepared by the traditional solid-state sintering method, but the breakdown electric field of the ceramics prepared by them is very small, and it is difficult to measure the saturated polarization-electric field [AV Zalesskii, AAFrolov, TA Khimich, and AABush, Physics of the Solid State 45, 141 (2003); I.Sosnowska, W.Schfer, W.Kockelmann, KHAndersen, IOTroyanchuk, Appl.Phys.A 74, S1040( 2002); VL Mathe, KK Patankar, RN Patil, CD Lokhande, Journal of Magnetism and Magnetic Materials 270, 380 (2004); VL Mathe, Journal of Magnetism and Magnetic Materials 263, 344 (2003).]. The specific performance indicators of the ceramic materials reported in the above literature are introduced in Table 1. Therefore, the preparation of Bi 1-x A x Fe 1-y By O 3 with ABO 3 single-phase structure with a resistivity of ∼10 9 Ω·cm and a breakdown voltage of more than 150 kV/cm using a simple method has become an urgent Task.

发明内容Contents of the invention

本发明所要解决的技术问题,在于克服现有技术存在的缺陷,提供一种磁电耦合陶瓷材料Bi1-xAxFe1-yByO3,具有如下物理性能:击穿电场大于150kV/cm,铁电磁体的极化-电场回线的剩余极化在3-30μC/cm2之间。The technical problem to be solved by the present invention is to overcome the defects existing in the prior art, and provide a magnetoelectric coupling ceramic material Bi 1-x A x Fe 1-y By O 3 , which has the following physical properties: the breakdown electric field is greater than 150kV /cm, the remnant polarization of the polarization-electric field loop of the ferroelectric magnet is between 3-30μC/cm 2 .

本发明的另一发明目的是提供一种制备上述陶瓷材料的方法,发明人制备的陶瓷材料具有如下物理性能:击穿电场大于150kV/cm,铁电磁体的极化-电场回线的剩余极化在3~30μC/cm2之间。Another object of the present invention is to provide a method for preparing the above-mentioned ceramic material. The ceramic material prepared by the inventor has the following physical properties: the breakdown electric field is greater than 150kV/cm, and the polarization of the ferroelectric magnet-the remnant pole of the electric field loop be between 3 and 30 μC/cm 2 .

上述理化性能是现有材料所不具备的。The above physical and chemical properties are not available in existing materials.

本发明磁电耦合陶瓷材料,其特征是:The magnetoelectric coupling ceramic material of the present invention is characterized in that:

(1)化学式为(1) The chemical formula is

           Bi1-xAxFe1-yByO3 Bi 1-x A x Fe 1-y By y O 3

其中:0≤x<0.5,0≤y<0.2且x、y不能同时为0;Among them: 0≤x<0.5, 0≤y<0.2 and x and y cannot be 0 at the same time;

A为三价稀土金属离子La、Nd、Td、Sm、Pr中的一种或两种;A is one or two of the trivalent rare earth metal ions La, Nd, Td, Sm, and Pr;

B为一种过渡金属离子Mn或Co;B is a transition metal ion Mn or Co;

(2)具有如下物理性能(2) Has the following physical properties

击穿电场大于150kV/cm,铁电磁体的极化-电场回线的剩余极化在3~30μC/cm2之间。The breakdown electric field is greater than 150kV/cm, and the remnant polarization of the polarization-electric field loop of the ferroelectric magnet is between 3 and 30μC/cm 2 .

制备上述陶瓷材料的方法,其步骤为:The method for preparing above-mentioned ceramic material, its step is:

a)利用Bi2O3、La2O3、Fe2O3、Td2O3、Nd2O3、Sm2O3、Mn2O3、Co2O3、Pr2O3粉末或者相应的碳酸盐和硝酸盐粉末作为原料,根据Bi1-xAxFe1-yByO3(0≤x<0.5,0≤y<0.2,A为稀土金属离子La3+、Nd3+、Td3+、Sm3+、Pr3+中的一种或两种,B为一种三价金属离子Mn3+或Co3+。具体成分见表二)系列陶瓷的化学配比配料。a) Using Bi 2 O 3 , La 2 O 3 , Fe 2 O 3 , Td 2 O 3 , Nd 2 O 3 , Sm 2 O 3 , Mn 2 O 3 , Co 2 O 3 , Pr 2 O 3 powder or corresponding Carbonate and nitrate powder as raw materials, according to Bi 1-x A x Fe 1-y By O 3 (0≤x<0.5, 0≤y<0.2, A is rare earth metal ions La 3+ , Nd 3 + , Td 3+ , Sm 3+ , Pr 3+ one or both, B is a trivalent metal ion Mn 3+ or Co 3+ . The specific composition is shown in Table 2) The stoichiometric ratio of series ceramics .

b)把配料的粉末混合均匀,混合物的平均颗粒小于1.0微米。b) Mix the powders of the ingredients evenly, and the average particle size of the mixture is less than 1.0 micron.

c)使用水等容易挥发的液体作为粘合剂,把混合物和粘合剂混合均匀,再压靶。靶的厚度为0.5mm。减小靶厚,有利于烧结过程中热量从表面快速传导到靶心,有利于提高靶心的升温速度。c) Use a volatile liquid such as water as a binder, mix the mixture and the binder evenly, and then press the target. The thickness of the target is 0.5 mm. Reducing the thickness of the target is conducive to the rapid conduction of heat from the surface to the center of the target during the sintering process, which is conducive to increasing the heating rate of the target.

d)使用真空或者非真空的烘箱,在400℃以下让混合物中的粘合剂完全挥发干净。使用容易挥发的粘合剂,并在快速升温烧结之前去除粘合剂,是为了避免烧结过程中粘合剂的挥发吸收热量,从而降低烧结时的升温速度,以至于不能满足30℃/s(度/秒)以上的升温条件。d) Use a vacuum or non-vacuum oven to completely volatilize the binder in the mixture below 400°C. The use of easily volatile binders and the removal of binders before rapid heating and sintering is to avoid the volatilization and absorption of heat by binders during sintering, thereby reducing the heating rate during sintering, so that the 30°C/s ( degrees/second) above the temperature rise conditions.

e)使用快速热处理RTA、管式炉或者其它炉子烧结陶瓷,以30℃/s(度/秒)以上的升温速度升温,在820℃(高于Bi2O3熔点817℃)至940℃之间烧结Bi1-xAxFe1-yByO3系列陶瓷,烧结时间在1分钟至1小时之间最后快速降温。烧结后的陶瓷成ABO3单相,电阻率可达~109Ω·cm并且击穿电场大于150kV/cm。e) Use rapid heat treatment RTA, tube furnace or other furnaces to sinter ceramics, and heat up at a rate of 30°C/s (degrees/second) or more, between 820°C (817°C higher than the melting point of Bi 2 O 3 ) to 940°C The Bi 1-x A x Fe 1-y By y O 3 series ceramics were sintered between 1 minute and 1 hour, and the temperature was rapidly lowered at the end. The sintered ceramics form ABO 3 single phase, the resistivity can reach ~10 9 Ω·cm and the breakdown electric field is greater than 150kV/cm.

如果要制备PLD或者磁控溅射等使用的较大的靶。本发明方法进一步优化方案为:在上述方法的基础上,增加如下步骤:If you want to prepare larger targets for PLD or magnetron sputtering. The further optimization scheme of the inventive method is: on the basis of above-mentioned method, increase following steps:

f)把上一步制备成功的靶再研磨成粉末,往粉末中加入适量水,混合均匀,然后重新制备大靶。大靶放入100℃~400℃的烘箱中保温12小时以上,让水充分挥发,最后让靶以50℃/s(度/秒)以上的速度升温至800℃以上,并在此温度下保温60分钟以内。f) Grind the target successfully prepared in the previous step into powder, add appropriate amount of water to the powder, mix well, and then prepare a large target again. Put the large target in an oven at 100°C to 400°C and keep it warm for more than 12 hours to let the water fully evaporate, and finally let the target heat up to above 800°C at a speed of more than 50°C/s (degrees/second), and keep it warm at this temperature Within 60 minutes.

具体实施方式Detailed ways

下面的实施例可以使本领域技术人员更全面地理解本发明,但不以任何方式限制本发明。The following examples can enable those skilled in the art to understand the present invention more fully, but do not limit the present invention in any way.

表1、目前他人已经制备出的Bi1-xAxFe1-yByO3陶瓷材料及其剩余极化和击穿电压Table 1. Bi 1-x A x Fe 1-y By y O 3 ceramic materials prepared by others and their remanent polarization and breakdown voltage

Figure C20041006490000081
Figure C20041006490000081

本发明磁电耦合陶瓷材料具体制备方法:The specific preparation method of the magnetoelectric coupling ceramic material of the present invention:

a)利用Bi2O3、La2O3、Fe2O3、Td2O3、Nd2O3、Sm2O3、Mn2O3、Co2O3、Pr2O3粉末或者相应的碳酸盐和硝酸盐粉末作为原料,根据Bi1-xAxFe1-yByO3(0≤x<0.5,0≤y<0.2,A为三价稀土金属离子La3+、Nd3+、Td3+、Sm3+、Pr3+中一种或两种,B为过渡金属离子Mn3+、Co3+中的一种,具体成分见表二)系列陶瓷的化学配比配料。a) Using Bi 2 O 3 , La 2 O 3 , Fe 2 O 3 , Td 2 O 3 , Nd 2 O 3 , Sm 2 O 3 , Mn 2 O 3 , Co 2 O 3 , Pr 2 O 3 powder or corresponding According to Bi 1-x A x Fe 1-y By y O 3 (0≤x<0.5, 0≤y<0.2, A is the trivalent rare earth metal ion La 3+ , One or two of Nd 3+ , Td 3+ , Sm 3+ , Pr 3+ , B is one of transition metal ions Mn 3+ , Co 3+ , see Table 2 for the chemical composition of series ceramics than toppings.

b)配料后,把粉末放入玛瑙罐研磨12小时以上,让粉末均匀混合,且粉末的平均颗粒小于1.0微米。b) After batching, put the powder into an agate jar and grind for more than 12 hours, so that the powder is evenly mixed, and the average particle size of the powder is less than 1.0 microns.

c)把混合均匀的粉末烘干,然后加入恰适量的水作为粘合剂。把混合物压成靶,靶的厚度为0.5mm。减小靶厚,有利于烧结过程中热量从表面快速传导到靶心,有利于提高靶心的升温速度。c) Dry the evenly mixed powder, and then add just the right amount of water as a binder. The mixture was pressed into a target with a thickness of 0.5 mm. Reducing the thickness of the target is conducive to the rapid conduction of heat from the surface to the center of the target during the sintering process, which is conducive to increasing the heating rate of the target.

d)调节烘箱的温度至150℃,靶在烘箱中保温10小时以上,目的是让靶中含有的水汽充分挥发。使用水作为粘合剂,并在烧结之前让其挥发干净,是为了避免快速升温烧结过程中水的挥发吸收热量,从而降低烧结时升温速度。d) Adjust the temperature of the oven to 150°C, and keep the target in the oven for more than 10 hours, so as to fully volatilize the water vapor contained in the target. Using water as a binder and letting it evaporate before sintering is to avoid the volatilization of water absorbing heat during rapid heating and sintering, thereby reducing the heating rate during sintering.

e)使用快速热处理(RTA),以30℃/s(度/秒)以上的升温速度升温,在820℃(高于Bi2O3熔点817℃)至940℃之间烧结Bi1-xAxFe1-yByO3系列陶瓷,烧结时间在1分钟至1小时之间。比如烧结BiFeO3样品,30秒以内升温至870度,再在870℃保温5分钟,然后在5分钟以内降温至500度以下。烧结后的陶瓷成ABO3单相,电阻率可达-109Ω·cm并且击穿电场大于150kV/cm。e) Sinter Bi 1-x A between 820°C (817°C above the melting point of Bi2O3 ) and 940°C using rapid thermal treatment (RTA) at a rate of 30 °C/s (degrees/second) or more x Fe 1-y By O 3 series ceramics, the sintering time is between 1 minute and 1 hour. For example, the sintered BiFeO 3 sample is heated to 870 degrees within 30 seconds, then kept at 870 degrees for 5 minutes, and then cooled to below 500 degrees within 5 minutes. The sintered ceramics form ABO 3 single phase, the resistivity can reach -10 9 Ω·cm and the breakdown electric field is greater than 150kV/cm.

f)如果要制备PLD或者磁控溅射等使用的较大的靶。把上一步烧结成功的靶再研磨成粉末,加入水作为粘合剂,重新压成大靶,然后在烘箱中让水充分挥发,在817℃以上烧结1小时以内。比如BiFeO3样品,以50℃/s(度/秒)以上的速度升温至830℃并保温10分钟。f) If you want to prepare larger targets used in PLD or magnetron sputtering. Grind the target successfully sintered in the previous step into powder, add water as a binder, and press it into a large target again, then let the water fully evaporate in an oven, and sinter at 817°C for less than 1 hour. For example, the BiFeO 3 sample is heated to 830°C at a speed of 50°C/s (degrees/second) and kept for 10 minutes.

发明人按上述发明方法制备的磁电耦合陶瓷材料及其物理性能测试结果见表2。The magnetoelectric coupling ceramic material prepared by the inventor according to the above invention method and the test results of its physical properties are shown in Table 2.

表2Table 2

Figure C20041006490000101
Figure C20041006490000101

Claims (5)

1, a kind of magneto-electric coupled ceramic materials is characterized in that:
(1) chemical formula is
Bi 1-xA xFe 1-yB yO 3
Wherein: 0≤x<0.5,0≤y<0.2 and x, y can not be 0 simultaneously;
A is one or both among rare earth cation La, Nd, Td, Sm, the Pr;
B is transition metal ion Mn or Co;
(2) has following physicals
Breakdown electric field is greater than 150kV/cm, and the residual polarization of electropolarization-electric field loop line is at 3~30 μ C/cm 2Between.
2, magneto-electric coupled ceramic materials according to claim 1 is characterized in that: described stupalith makes with following method:
When sintering, the heat-up rate above with 30 degree/seconds heats up, and sintering between 820 ℃ to 940 ℃ was cooled to below 500 degree with interior at 5 minutes then.
3, magneto-electric coupled ceramic materials according to claim 1 is characterized in that: described stupalith makes with following method:
A) utilize Bi 2O 3, La 2O 3, Fe 2O 3, Td 2O 3, Nd 2O 3, Sm 2O 3, Mn 2O 3, Co 2O 3, Pr 2O 3Powder or corresponding carbonate and nitrate powder are as raw material, according to Bi 1-xA xFe 1-yB yO 3The stoicheiometry batching of pottery;
B) even the powder mixes of batching, the average grain of mixture is less than 1.0 microns;
C) make water as tackiness agent, mixture and tackiness agent are mixed, press target again;
D) in the tackiness agent volatilization that allows below 400 ℃ in the mixture;
E) with above heat-up rate intensification 30 degree/seconds, sintering between 820 ℃ to 940 ℃, sintering time were cooled to below 500 degree with interior at 5 minutes between 1 minute to 1 hour then.
4, the preparation method of a kind of claim 1,2 or 3 described magneto-electric coupled ceramic materials the steps include:
A) utilize Bi 2O 3, La 2O 3, Fe 2O 3, Td 2O 3, Nd 2O 3, Sm 2O 3, Mn 2O 3, Co 2O 3, Pr 2O 3Powder or corresponding carbonate and nitrate powder are as raw material, according to Bi 1-xA xFe 1-yB yO 3The stoicheiometry batching of pottery;
B) even the powder mixes of batching, the average grain of mixture is less than 1.0 microns;
C) make water as tackiness agent, mixture and tackiness agent are mixed, press target again;
D) in the tackiness agent volatilization that allows below 400 ℃ in the mixture;
E) with above heat-up rate intensification 30 degree/seconds, sintering between 820 ℃ to 940 ℃, sintering time were cooled to below 500 degree with interior at 5 minutes between 1 minute to 1 hour then.
5, the preparation method of magneto-electric coupled ceramic materials according to claim 4 is characterized in that:
F) previous step is prepared successful target grind into powder again, in powder, add suitable quantity of water, mix, prepare big target then again; Big target was put into 100 ℃~400 ℃ baking oven insulation more than 12 hours, allowed water fully volatilize, and relief target is warming up to more than 800 ℃ with the above speed of 50 ℃/s, and in insulation under this temperature 60 minutes.
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