CN1260823C - Electrically Erasable Programmable Logic Elements - Google Patents
Electrically Erasable Programmable Logic Elements Download PDFInfo
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Abstract
Description
技术领域technical field
本发明涉及一种电擦除式可编程逻辑元件,尤其涉及一种可利用标准CMOS工艺制造,且无需额外浮置栅极面积而体积缩小的电擦除式可编程逻辑元件。The invention relates to an electrically erasable programmable logic element, in particular to an electrically erasable programmable logic element which can be manufactured by using a standard CMOS process, and does not require additional floating gate area to reduce volume.
背景技术Background technique
近年来,随着便携式电子产品的需求增加,电擦除式可编程只读存储器(Electrically Erasable Programmable Read-Only Memory,以下简称为EEPROM)的技术以及市场应用也日益成熟扩大。EEPROM所应用的领域包括有如数码相机的底片、手机、电视游戏机(Video Game Console)、个人数字助理(Personal Digital Assistant,PDA)的存储卡、电话答录装置以及可编程IC等产品。EEPROM是一种非易失性存储器(Non-Volatile Memory),其运行原理是藉由改变晶体管或存储单元的临界电压(Threshold Voltage)来控制相对应的栅极沟道(channel)的开启或关闭以达到存储数据的目的,使储存在存储器中的数据不会因电源中断而消失。In recent years, with the increasing demand for portable electronic products, the technology and market application of Electrically Erasable Programmable Read-Only Memory (EEPROM for short) are becoming increasingly mature and expanding. The fields of application of EEPROM include products such as digital camera negatives, mobile phones, video game consoles (Video Game Console), personal digital assistant (Personal Digital Assistant, PDA) memory cards, telephone answering devices, and programmable ICs. EEPROM is a kind of non-volatile memory (Non-Volatile Memory). Its operating principle is to control the opening or closing of the corresponding gate channel (channel) by changing the threshold voltage (Threshold Voltage) of the transistor or memory cell. In order to achieve the purpose of storing data, the data stored in the memory will not disappear due to power interruption.
现有EEPROM技术多使用一种堆叠栅(Stacked Gate)的技术,其中一存储单元(Memory Cell)形成于一衬底(Substrate)上,其包含有一漏极、一源极、以及一堆叠栅,而该堆叠栅则通常包含有一浮置栅极(Floating Gate)及一控制栅极(Control Gate),而该浮置栅极与该衬底之间,以及该控制栅极与该浮置栅极之间则由二个氧化层予以隔离。而此种使用堆叠栅技术的EEPROM的操作原理,则是利用外加一高电平电压至该控制栅极而利用电子隧道效应或热电子注入效应来改变该浮置栅极中所储存的电子数量,进而改变该浮置栅极的临界电压以达到存储数据的目的。Existing EEPROM technology mostly uses a stacked gate technology, in which a memory cell (Memory Cell) is formed on a substrate (Substrate), which includes a drain, a source, and a stacked gate, The stack gate usually includes a floating gate (Floating Gate) and a control gate (Control Gate), and between the floating gate and the substrate, and between the control gate and the floating gate Between them are separated by two oxide layers. The operating principle of this kind of EEPROM using stacked gate technology is to change the number of electrons stored in the floating gate by applying a high-level voltage to the control gate and using the electron tunneling effect or hot electron injection effect. , and then change the threshold voltage of the floating gate to achieve the purpose of storing data.
然而上述使用堆叠栅技术的EEPROM的存储单元,由于结构十分复杂,故其并无法使用一般标准互补金属氧化物半导体(Complementary MetalOxide Semiconductor,CMOS)工艺技术来生产制造,而必须使用较为复杂的工艺,因而增加了制造成本。因此,现有技术另外公开了一种单层多晶硅(Single-Poly)的存储单元结构(R.Kazerounian and B.Eitann,“A Single-polyEPROM for custom CMOS logic applications”,IEEE Custom Integrated CircuitsConference,P.59-62,1986.),请参阅图1,图1中显示一现有单层多晶硅存储单元10的侧视断面图,存储单元10形成于一衬底12上,其利用一N型阱(N-Well)14作为一浮置栅极16的耦合栅极(Coupling Gate),用来通过该耦合栅极将一高电平电压(例如9至12V)耦合至浮置栅极16上,进而于浮置栅极16下方的衬底12中形成沟道热电子,并由于该沟道热电子注入浮置栅极16中而改变了浮置栅极16的临界电压,以达到编程存储单元10的目的。而由于此种单层多晶硅结构构造简单,可以利用标准CMOS工艺来生产制造,故能够改善上述使用堆叠栅技术的存储单元成本过高的缺点。However, due to the complex structure of the above-mentioned EEPROM memory cells using the stacked gate technology, it cannot be manufactured using the general standard complementary metal oxide semiconductor (Complementary Metal Oxide Semiconductor, CMOS) process technology, but must use a more complicated process. Thus, the manufacturing cost is increased. Therefore, the prior art additionally discloses a single-layer polysilicon (Single-Poly) memory cell structure (R.Kazerounian and B.Eitann, "A Single-polyEPROM for custom CMOS logic applications", IEEE Custom Integrated Circuits Conference, P. 59-62, 1986.), please refer to FIG. 1, which shows a side cross-sectional view of an existing single-layer polysilicon memory cell 10, the memory cell 10 is formed on a substrate 12, and it utilizes an N-type well ( N-Well) 14 is used as a coupling gate (Coupling Gate) of a floating gate 16, which is used to couple a high-level voltage (such as 9 to 12V) to the floating gate 16 through the coupling gate, and then Channel hot electrons are formed in the substrate 12 below the floating gate 16, and because the channel hot electrons are injected into the floating gate 16, the threshold voltage of the floating gate 16 is changed to achieve programming of the memory cell 10. the goal of. Since this single-layer polysilicon structure is simple in structure and can be manufactured by standard CMOS technology, it can improve the above-mentioned disadvantage of high cost of memory cells using the stacked gate technology.
但是上述现有的单层多晶硅存储单元10仍有一个重大的缺点,即由于其必须利用一面积相对来说十分大的N型阱14才能将该高电平电压耦合至浮置栅极16上,而N型阱14的面积通常为存储单元10其他部分面积的数倍乃至于数十倍的大小,此一特征使得以此单层多晶硅存储单元10为基础的存储器的体积将无法缩小,对于存储器的制造来说为一无法忽视的缺点。However, the above-mentioned existing single-layer polysilicon memory cell 10 still has a major disadvantage, that is, it must utilize a relatively large N-type well 14 to couple the high-level voltage to the floating gate 16. , and the area of the N-type well 14 is usually several times or even tens of times the size of other parts of the memory cell 10. This feature makes it impossible to reduce the volume of the memory based on the single-layer polysilicon memory cell 10. For It is a disadvantage that cannot be ignored in the manufacture of memory.
发明内容Contents of the invention
因此本发明的主要目的在于提供一种电擦除式可编程逻辑元件,其使用单层多晶硅技术,包含有一浮置的栅极及一浮置的离子掺杂区,用来储存数据,以解决上述现有单层多晶硅存储单元面积过大的问题。Therefore, the main purpose of the present invention is to provide an electrically erasable programmable logic element, which uses single-layer polysilicon technology, includes a floating gate and a floating ion-doped region, and is used to store data to solve the problem of The above-mentioned problem that the area of the existing single-layer polysilicon storage unit is too large.
为实现本发明的目的,提供一种电擦除式可编程逻辑元件,其作为一存储器的存储单元,该电擦除可编程逻辑元件包含有一P型衬底;一第一N型离子掺杂区,位于该P型衬底中;一第一栅极,其位于该P型衬底上方并与该第一N型离子掺杂区相邻接,并且处于浮置状态,用来储存该电擦除式可编程逻辑元件的数据;一第二N型离子掺杂区,位于该P型衬底中并与该第一栅极相邻接,并且处于浮置状态;一第二栅极,其为该电擦除式可编程逻辑元件的控制栅极,位于该P型衬底上方并与该第二N型离子掺杂区相邻接;以及一第三N型离子掺杂区,位于该P型衬底中并与该第二栅极相邻接。For realizing the purpose of the present invention, provide a kind of electrically erasable programmable logic element, it is as the storage cell of a memory, and this electrically erasable programmable logic element comprises a P-type substrate; A first N-type ion-doped region, located in the P-type substrate; a first gate, which is located above the P-type substrate and adjacent to the first N-type ion-doped region, and is in a floating state for storing the electrical The data of the erasable programmable logic element; a second N-type ion-doped region, located in the P-type substrate and adjacent to the first gate, and in a floating state; a second gate, It is the control gate of the electrically erasable programmable logic element, located above the P-type substrate and adjacent to the second N-type ion-doped region; and a third N-type ion-doped region, located The P-type substrate is adjacent to the second gate.
根据本发明,提供一种作为存储器的存储单元的电擦除式可编程逻辑元件,该电擦除式可编程逻辑元件包含有:According to the present invention, an electrically erasable programmable logic element as a storage unit of a memory is provided, and the electrically erasable programmable logic element includes:
一P型衬底;A P-type substrate;
一第一N型离子掺杂区,位于该P型衬底中;a first N-type ion-doped region located in the P-type substrate;
在该第一N型离子掺杂区的一侧顺序形成在该P型衬底中的一第二N型离子掺杂区、一第三N型离子掺杂区和一第四N型离子掺杂区,其中所述第一、第二、第三和第四N型离子掺杂区彼此间隔开,且该第二N型离子掺杂区与该第三N型离子掺杂区电连接;A second N-type ion-doped region, a third N-type ion-doped region and a fourth N-type ion-doped region are sequentially formed in the P-type substrate on one side of the first N-type ion-doped region. a heterogeneous region, wherein the first, second, third and fourth N-type ion-doped regions are spaced apart from each other, and the second N-type ion-doped region is electrically connected to the third N-type ion-doped region;
一第一栅极,其位于该P型衬底上方并与该第一和第二N型离子掺杂区相邻接,并且处于浮置状态,用来储存该电擦除式可编程逻辑元件的数据;以及A first gate, which is located above the P-type substrate and adjacent to the first and second N-type ion-doped regions, and is in a floating state, is used to store the electrically erasable programmable logic element data; and
一第二栅极,其为该电擦除式可编程逻辑元件的控制栅极,位于该P型衬底上方并与该第三和第四N型离子掺杂区相邻接。A second gate, which is the control gate of the electrically erasable programmable logic element, is located above the P-type substrate and adjacent to the third and fourth N-type ion-doped regions.
根据本发明,提供一种作为存储器的存储单元的电擦除式可编程逻辑元件,该电擦除式可编程逻辑元件包含有:According to the present invention, an electrically erasable programmable logic element as a storage unit of a memory is provided, and the electrically erasable programmable logic element includes:
一P型衬底;A P-type substrate;
一第一N型离子掺杂区,位于该P型衬底中;a first N-type ion-doped region located in the P-type substrate;
在该第一N型离子掺杂区的一侧顺序形成在该P型衬底中的一第二N型离子掺杂区和一第三N型离子掺杂区,其中所述第一、第二和第三N型离子掺杂区彼此间隔开;A second N-type ion-doped region and a third N-type ion-doped region are sequentially formed in the P-type substrate on one side of the first N-type ion-doped region, wherein the first and the first The second and third N-type ion-doped regions are spaced apart from each other;
一第一栅极,其位于该P型衬底上方并与该第一和第二N型离子掺杂区相邻接,并且处于浮置状态,用来储存该电擦除式可编程逻辑元件的数据;以及A first gate, which is located above the P-type substrate and adjacent to the first and second N-type ion-doped regions, and is in a floating state, is used to store the electrically erasable programmable logic element data; and
一第二栅极,其是该电擦除式可编程逻辑元件的控制栅极,位于该P型衬底上方并与该第二和第三N型离子掺杂区相邻接。A second gate, which is the control gate of the electrically erasable programmable logic element, is located above the P-type substrate and adjacent to the second and third N-type ion-doped regions.
本发明的电擦除式可编程逻辑元件利用一第二栅极来控制一第二N型离子掺杂区的电压电平,进而得以控制一第一栅极的电压电平以于该第一栅极下方的P型衬底处产生沟道热空穴或者沟道热电子,再利用该沟道热空穴或者沟道热电子来改变该第一栅极的临界电压值,以改变该逻辑元件中所储存的数据。The electrically erasable programmable logic element of the present invention uses a second grid to control the voltage level of a second N-type ion-doped region, and then can control the voltage level of a first grid for the first Channel hot holes or channel hot electrons are generated at the P-type substrate under the gate, and then the channel hot holes or channel hot electrons are used to change the threshold voltage value of the first gate to change the logic The data stored in the component.
附图说明Description of drawings
图1为现有的单层多晶硅存储单元的侧视断面图;Fig. 1 is the side view sectional view of existing single-layer polysilicon storage unit;
图2为本发明的电擦除式可编程逻辑元件的正视断面图;Fig. 2 is the front sectional view of the electrically erasable programmable logic element of the present invention;
图3为图2的电擦除式可编程逻辑元件的一实施例的正视断面图;Fig. 3 is a front sectional view of an embodiment of the electrically erasable programmable logic element of Fig. 2;
图4为图3电擦除式可编程逻辑元件在一存储器中以阵列方式排列的示意图;FIG. 4 is a schematic diagram of electrically erasable programmable logic elements of FIG. 3 arranged in an array in a memory;
图5为图4的存储器的布局示意图;以及FIG. 5 is a schematic layout diagram of the memory of FIG. 4; and
图6为本发明的电擦除式可编程逻辑元件的浮置栅极沟道电流对浮置栅极电压的分布示意图。6 is a schematic diagram of the distribution of the floating gate channel current versus the floating gate voltage of the electrically erasable programmable logic element of the present invention.
附图中的附图标记说明如下:The reference signs in the accompanying drawings are explained as follows:
10存储单元 12、22、52衬底10 storage units 12, 22, 52 substrates
14N型阱 16、26、56浮置栅极14N type well 16, 26, 56 floating gate
20、50逻辑元件20, 50 logic elements
24、28、32、54、58a、58b、62N型离子掺杂区24, 28, 32, 54, 58a, 58b, 62N-type ion-doped regions
30、60控制栅极 34、36、64、66氧化层30, 60 control grid 34, 36, 64, 66 oxide layer
40存储器 68金属导线40 memory 68 metal wires
具体实施方式Detailed ways
请参阅图2,图2中显示本发明的电擦除式可编程逻辑元件(ElectricallyErasable Programmable Logic Device)50的正视断面图。电擦除式可编程逻辑元件50包含有一P型衬底(P-Type Substrate)52;一第一N型离子掺杂区54,位于P型衬底52中;一第一栅极56,其位于P型衬底52上方并与第一N型离子掺杂区54相邻接,并且处于浮置(Floating)状态,用来作为电擦除式可编程逻辑元件50的浮置栅极以储存电擦除式可编程逻辑元件50的非易失性数据;一第二N型离子掺杂区58a,位于P型衬底52中并与第一栅极56相邻接;一第三N型离子掺杂区58b,位于P型衬底52中并且电连接于第二N型离子掺杂区58b;一第二栅极60,其作为电擦除式可编程逻辑元件50的控制栅极,位于P型衬底52上方并与第三N型离子掺杂区58b相邻接;以及一第三N型离子掺杂区62,位于P型衬底52中并与第二栅极60相邻接。如本领域技术人员所广泛知晓的那样,于第一栅极(即浮置栅极)56以及第二栅极(即控制栅极)60之中,通常分别包含有一第一氧化层64及一第二氧化层66,如图2所示,位于浮置栅极56与控制栅极60的底侧,用来将该二栅极与P型衬底52隔离,以避免该二栅极与P型衬底52直接接触而导通。而第二及第三N型离子掺杂区58a、58b之间的电连接可通过各种不同的应用达到此一目的,于图2中是利用一金属导线68达成其连结。接下来将列举本发明的一实施例以利详细说明。Please refer to FIG. 2, which shows a front cross-sectional view of an Electrically Erasable Programmable Logic Device (Electrically Erasable Programmable Logic Device) 50 of the present invention. The electrically erasable programmable logic element 50 includes a P-type substrate (P-Type Substrate) 52; a first N-type ion-doped region 54, located in the P-type substrate 52; a first gate 56, which Located above the P-type substrate 52 and adjacent to the first N-type ion-doped region 54, and in a floating (Floating) state, used as a floating gate of the electrically erasable programmable logic element 50 to store The nonvolatile data of the electrically erasable programmable logic element 50; a second N-type ion-doped region 58a, located in the P-type substrate 52 and adjacent to the first grid 56; a third N-type The ion-doped region 58b is located in the P-type substrate 52 and is electrically connected to the second N-type ion-doped region 58b; a second gate 60, which is used as the control gate of the electrically erasable programmable logic element 50, Located above the P-type substrate 52 and adjacent to the third N-type ion-doped region 58b; and a third N-type ion-doped region 62, located in the P-type substrate 52 and adjacent to the second gate 60 catch. As is well known to those skilled in the art, the first gate (i.e. floating gate) 56 and the second gate (i.e. control gate) 60 generally include a first oxide layer 64 and a The second oxide layer 66, as shown in FIG. 2, is located on the bottom side of the floating gate 56 and the control gate 60, and is used to isolate the two gates from the P-type substrate 52, so as to prevent the two gates from contacting the P-type substrate. The substrate 52 is directly contacted to conduct conduction. The electrical connection between the second and third N-type ion-doped regions 58a, 58b can achieve this purpose through various applications. In FIG. 2, a metal wire 68 is used to achieve the connection. Next, an embodiment of the present invention will be listed for detailed description.
请参阅图3,图3中显示本发明的电擦除式可编程逻辑元件20的正视断面图。请注意,图3中的电擦除式可编程逻辑元件20共用图2中的电擦除式可编程逻辑元件50的第二及第三N型离子掺杂区58a及58b而成为一单一的N型离子掺杂区。电擦除式可编程逻辑元件20包含有一P型衬底22;一第一N型离子掺杂区24,位于P型衬底22中;一第一栅极26,其位于P型衬底22上方并与第一N型离子掺杂区24相邻接,并且处于浮置状态,用来作为电擦除式可编程逻辑元件20的浮置栅极以储存电擦除式可编程逻辑元件20的非易失性数据;一第二N型离子掺杂区28,位于P型衬底22中并与第一栅极26相邻接;一第二栅极30,其作为电擦除式可编程逻辑元件20的控制栅极,位于P型衬底22上方并与第二N型离子掺杂区28相邻接;以及一第三N型离子掺杂区32,位于P型衬底22中并与第二栅极30相邻接。如本领域技术人员所广泛知晓的那样,于第一栅极(即浮置栅极)26以及第二栅极(即控制栅极)30之中,通常分别包含有一第一氧化层34及一第二氧化层36,如图3所示,位于浮置栅极26与控制栅极30的底侧,用来将该二栅极与P型衬底22隔离,以避免该二栅极与P型衬底22直接接触而导通。接来下将描述本发明的电擦除式可编程逻辑元件20作为一存储器的存储单元的一优选实施例。Please refer to FIG. 3 , which shows a front cross-sectional view of the electrically erasable
请参阅图4及图5,图4中显示本发明的电擦除式可编程逻辑元件20于一存储器40中以阵列方式排列的示意图,而图5中则显示图4的存储器40的布局(Layout)示意图。图4中的存储器40依照应用的不同可以是一电擦除式可编程只读存储器(即EEPROM),或者是一单次可编程存储器(One-Time Programmable Memory,OTP Memory),当存储器40为一EEPROM时,其可进行读取(Read)、编程(Program)、以及清除(Erase)的动作,而当存储器40为一单次可编程存储器时,则其只需具备读取及编程的功能。如图4所示,存储器40中包含有多个电擦除式可编程逻辑元件20(如图4中虚线范围中即为一逻辑元件20),多个逻辑元件20以包含有多个列(Column)及多个行(Row)的阵列(Array)方式排列,于本实施例中,任何相邻二列的逻辑元件20是以镜像对称(Mirrored Symmetry)的方式配置,举例来说,若其中一列的逻辑元件20是以第一N型离子掺杂区24在左侧,而第三N型离子掺杂区32在右侧的方式配置(如图3中的逻辑元件20),则位于其左侧一列以及其右侧一列的逻辑元件20将均以第三N型离子掺杂区32在左侧,而第一N型离子掺杂区24在右侧的方式配置。Please refer to FIG. 4 and FIG. 5. FIG. 4 shows a schematic diagram of electrically erasable
而于本实施例中,存储器40的连接方式是如下所述,位于同一列的逻辑元件20的第二栅极(控制栅极)30均相互电连接,并连接至一字线(WordLine)WL;位于同一列的逻辑元件20的第三N型离子掺杂区32均相互电连接,并连接至一电源线(Source Line)SL;而位于同一行的逻辑元件的第一N型离子掺杂区24则均相互电连接,并连接至一位线(Bit Line)BL.而依据存储器40中作为存储单元的各个逻辑元件20于阵列中的位置,可以依序将字线WL编号为WL0、WL1、WL2、...、WLX、...,将电源线SL编号为SL0、SL1、SL2、...、SLX、...,而将位线BL编号为BL0、BL1、BL2、...、BLY、...,如图4所示。此外,如图5所示,由于上述任何相邻二列的逻辑元件20是以镜像对称的方式配置,故位于同一行的任何相邻二列的二逻辑元件20于布局当中可以共用其相邻的二第一N型离子掺杂区24,同时位于同一行的任何相邻二列的二逻辑元件20于布局当中亦可共用其相邻的二第三N型离子掺杂区32,以节省部分空间。In this embodiment, the connection mode of the
接下来为了方便说明,将以图4中的存储器40内其中一个逻辑元件20为例子,说明逻辑元件20作为存储单元的操作原理。正如前面所述,逻辑元件20中的第一栅极26处于浮置状态,亦即并没有任何外接的信号或电源连接至第一栅极26,而其用来作为逻辑元件20的浮置栅极。浮置栅极26的功能十分类似于现有使用堆叠栅技术的存储单元中该浮置栅极的功能,它是利用浮置栅极26中所储存的电子数量以改变浮置栅极26的临界电压以达到存储数据的目的,亦即,当浮置栅极26处于高临界电压状态(High VTHState)时,以及当浮置栅极26处于低临界电压状态(Low VTH State)时,其分别代表逻辑元件20中所储存的二进制数字数据为不同的值(其可能为逻辑值“0”或者逻辑值“1”)。而所谓高临界电压状态,是指由于浮置栅极26中储存有较多数量的电子,而导致如果要在浮置栅极26下方的P型衬底22中吸引足够的电子而形成一沟道以电连接第一N型离子掺杂区24与第二N型离子掺杂区28,浮置栅极26将需要有相对较高的电压值;同样地,所谓低临界电压状态,则指由于浮置栅极26中储存有较多数量的空穴,而导致如果要在浮置栅极26下方的P型衬底22中吸引足够的电子而形成一沟道以电连接第一N型离子掺杂区24与第二N型离子掺杂区28,浮置栅极26仅需要有相对较低的电压值即可。而于本实施例接下来的说明中,将以浮置栅极26处于高临界电压状态代表逻辑元件20储存有逻辑值“0”,并以浮置栅极26处于低临界电压状态代表逻辑元件20储存有逻辑值“1”为例,然而与以上设计相反的定义,亦属于本发明的涵盖范围。Next, for the convenience of description, one of the
请参阅图6,图6中显示本发明的电擦除式可编程逻辑元件20的浮置栅极26的栅极电流对浮置栅极26的电压的分布示意图,其中横轴代表浮置栅极26的电压,而纵轴则代表浮置栅极26的栅极电流。请注意,图6中所显示的浮置栅极26的栅极电流,仅显示该沟道电流的绝对值大小而未显示其流通方向,而在不同的区间以标记CHH代表其为沟道热空穴(Channel Hot Hole)所造成的栅极电流,并以标记CHE代表其为沟道热电子(Channel Hot Electron)所造成的栅极电流。从图示中可以看出,当浮置栅极26的电压值由小变大(例如从-3V到7V)的过程中,当中会先出现一段区间(以CHH标示)显示沟道热空穴效应较为显著,而后会再出现一段区间(以CHE标示)显示沟道热电子效应较为显著。此一由沟道热空穴及沟道热电子形成栅极电流的现象,是由于当浮置栅极26及控制栅极30同时导通时,电子会经由导通的二栅极26、30下方的沟道而流动于第三N型离子掺杂区32及第一N型离子掺杂区24之间,而这些电子有一部分会在第一N型离子掺杂区24与P型衬底22的PN结(PN Junction)之处碰撞出电子空穴对,而该电子空穴对则会依照不同的电压电平状态分别流入浮置栅极26及P型衬底22之中,因而产生了该栅极电流。Please refer to FIG. 6, which shows a schematic diagram of the distribution of the gate current of the floating gate 26 of the electrically erasable
由于本发明的逻辑元件20的浮置栅极26处于浮置状态,故其所产生的电压电平由第一N型离子掺杂区24(亦即位线BL)、P型衬底22、以及第二N型离子掺杂区28的电压电平依照一定的比例耦合而得到。也就是说,如果位线BL的电压为VBL,P型衬底22的电压为VPS,而第二N型离子掺杂区28的电压为VX的话,则浮置栅极的电压电平VFG即可表示成以下关系式:Since the floating gate 26 of the
VFG=α1VBL+α2VPS+α3VX V FG = α 1 V BL + α 2 V PS + α 3 V X
其中α1、α2、α3分别为三个代表不同比例的系数。又由于本发明的逻辑元件20的第二N型离子掺杂区28也处于浮置状态,故其电压电平则是利用控制栅极30(也即字线WL)的电压电平VSG控制其下方的沟道的电阻值大小,以决定位于第三N型离子掺杂区32(亦即电源线SL)的电压电平VSL耦合至第二N型离子掺杂区28的程度。而于本实施例中,本发明的逻辑元件20的编程及清除动作,即以固定上述的VBL、VPS、VSL等参数,而仅以改变VSG的电压值的方式将浮置栅极26的电压电平VFG操作于上述CHH或CHE的区间内,以达到改变浮置栅极26中所储存的电子数量的目的,也就是改变浮置栅极26所处的临界电压状态。接下来将详细描述于本实施例中本发明的逻辑元件20的读取、编程、以及清除动作的操作原理。Among them, α 1 , α 2 , and α 3 are three coefficients representing different proportions. Since the second N-type ion-doped region 28 of the
当存储器40欲对作为其存储单元的一被选取的逻辑元件20进行读取的动作时,其是将第一N型离子掺杂区24(即位线BL)接地,而使控制栅极30(即字线WL)的电压电平超出第三N型离子掺杂区32(即电源线SL)的电压电平一预定值(通常为控制栅极30的临界电压),以于控制栅极30下方的P型衬底22中形成一沟道而使第二N型离子掺杂区28及第三N型离子掺杂区32导通。于本实施例中,控制栅极30经由字线WL输入1.8V,而第三N型离子掺杂区32则经由电源线SL输入1V。请注意,其他未被选取的逻辑元件20的控制栅极30及第三N型离子掺杂区32则均输入0V。此时如果浮置栅极26处于高临界电压状态,亦即逻辑元件20中所储存的数据为逻辑值“0”时,则第一N型离子掺杂区24与浮置栅极26、第二N型离子掺杂区28之间的电位差将不足以使浮置栅极下方的沟道导通,因此一检测放大器(Sense Amplifier,并未显示于图中)将从位线BL中读取出逻辑值“0”。相反地,如果浮置栅极26处于低临界电压状态,亦即逻辑元件20中所储存的数据为逻辑值“1”时,则第一N型离子掺杂区24与浮置栅极26、第二N型离子掺杂区28之间的电位差将足以使浮置栅极下方的沟道导通,因此一检测放大器(Sense Amplifier,并未显示于图中)将从位线BL中读取出逻辑值“1”。请注意,上述的该检测放大器可以依照不同的需求及不同的电压电平设计而有相对应的变化。When the
当存储器40欲对作为其存储单元的一被选取的逻辑元件20进行编程的动作时,其将第一N型离子掺杂区24(即位线BL)电连接至一高电位,而将第三N型离子掺杂区32(即电源线SL)接地,并将控制栅极30(即字线WL)电连接至一预设电压值而使浮置栅极26下方的P型衬底22中形成沟道热空穴,而该预设电压值介于图6中的CHH区间内以确保沟道热空穴的形成。于本实施例中,第一N型离子掺杂区24经由位线BL输入8V,而控制栅极30则经由字线WL输入4V。请注意,其他未被选取的逻辑元件20的第一N型离子掺杂区24及控制栅极30则均输入0V。此时如果浮置栅极26处于高临界电压状态,亦即逻辑元件20中所储存的数据为逻辑值“0”时,由于浮置栅极26中储存有数量较多的电子,故浮置栅极26会持续吸引在其下方的P型衬底22中所形成的沟道热空穴,直到浮置栅极26中储存有数量较多的空穴为止,于是浮置栅极26即经由此一过程转换至低临界电压状态,亦即逻辑元件20中所储存的数据被编程为逻辑值“1”。而如果浮置栅极26处于低临界电压状态,亦即逻辑元件20中所储存的数据为逻辑值“1”时,则由于浮置栅极26原本即储存有数量较多的空穴,故其不会因为沟道热空穴的存在而有任何的改变,亦即逻辑元件20中所储存的数据会继续维持为逻辑值“1”。When the
当存储器40要对作为其存储单元的一被选取的逻辑元件20进行清除的动作时,其将第一N型离子掺杂区24(即位线BL)电连接至一高电位,而将第三N型离子掺杂区32(即电源线SL)接地,并将控制栅极30(即字线WL)电连接至一预设电压值而使浮置栅极26下方的P型衬底22中形成沟道热电子,而该预设电压值介于图6中的CHE区间内以确保沟道热电子的形成。于本实施例中,第一N型离子掺杂区24经由位线BL输入8V,而控制栅极30则经由字线WL输入1V。请注意,其他未被选取的逻辑元件20的第一N型离子掺杂区24及控制栅极30则均输入0V。此时如果浮置栅极26处于低临界电压状态,也即逻辑元件20中所储存的数据为逻辑值“1”时,由于浮置栅极26中储存有数量较多的空穴,故浮置栅极26会持续吸引在其下方的P型衬底22中所形成的沟道热电子,直到浮置栅极26中储存有数量较多的电子为止,于是浮置栅极26即经由此一过程转换至高临界电压状态,也即逻辑元件20中所储存的数据被清除为逻辑值“0”。而如果浮置栅极26处于高临界电压状态,也即逻辑元件20中所储存的数据为逻辑值“0”时,则由于浮置栅极26原来就储存有数量较多的电子,故其不会因为沟道热电子的存在而有任何的改变,也即逻辑元件20中所储存的数据会继续维持为逻辑值“0”。When the
与现有技术相比,本发明的电擦除式可编程逻辑元件利用一第二栅极来控制一第二N型离子掺杂区的电压电平,进而得以控制一第一栅极的电压电平以于该第一栅极下方的P型衬底处产生沟道热空穴或者沟道热电子,再利用该沟道热空穴或者沟道热电子来改变该第一栅极的临界电压值,以改变该逻辑元件中所储存的数据。因此本发明的电擦除式可编程逻辑元件与现有技术使用大面积耦合N型阱的单层多晶硅存储单元不同,其有降低成本及缩小体积的优点。Compared with the prior art, the electrically erasable programmable logic element of the present invention uses a second gate to control the voltage level of a second N-type ion-doped region, thereby being able to control the voltage of a first gate level to generate channel hot holes or channel hot electrons at the P-type substrate under the first gate, and then use the channel hot holes or channel hot electrons to change the threshold of the first gate voltage value to change the data stored in the logic element. Therefore, the electrically erasable programmable logic element of the present invention is different from the single-layer polysilicon storage unit using a large-area coupled N-type well in the prior art, and has the advantages of reducing cost and volume.
以上所述仅为本发明的优选实施例,凡依本发明权利要求所做的均等变化与修饰,皆属于本发明专利的涵盖范围。The above descriptions are only preferred embodiments of the present invention, and all equivalent changes and modifications made according to the claims of the present invention are covered by the patent of the present invention.
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