CN1258783C - High-dielectric constant and reduction resistant dielectric material for capacitor with basic-metal electrode - Google Patents
High-dielectric constant and reduction resistant dielectric material for capacitor with basic-metal electrode Download PDFInfo
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Abstract
Description
技术领域technical field
本发明属于电容器材料技术领域,特别涉及一种用于贱金属电极的高介电、抗还原电容介质材料。The invention belongs to the technical field of capacitor materials, in particular to a high-dielectric and anti-reduction capacitor dielectric material used for base metal electrodes.
背景技术Background technique
随着电子工业的飞速发展,小型化和轻型化成为各类电子产品诸如数码相机、移动电话、笔记本电脑、掌上电脑等的发展趋势,这要求构成这些电子设备的元器件必须减小体积和重量,并能够适应表面贴装技术(SMD)的需要。表面贴装技术要求的元器件为片式元器件,多层陶瓷电容器、多层陶瓷电感器以及片式电阻是片式元件中应用最广泛的三大类无源元件。多层陶瓷电容器(MultilayerCeramic Capacitors)简称MLCC,它是将多层内电极材料与陶瓷坯体交替叠合,共烧成一个独石体,并在独石体的两端涂镀外电极,分别与交替暴露的内电极电学联接而成。根据国际电子工业协会EIA(Electronic Industries Association)标准,Y5V型MLCC是指以25℃的电容值为基准,在温度从-30℃到+85℃的范围之内,容温变化率介于+22%~-82%,介电损耗(DF)≤2.5%。Y5V型MLCC按组成分两大类:一类由含铅的铁电体组成,另一类以BaTiO3的固溶体为基材的非铅系铁电体组成。其中后者由于对环境污染小,并且机械强度、抗老化性能、可镀性以及可靠性优于前者,因此非铅系Y5V型MLCC具有广阔的应用前景。With the rapid development of the electronics industry, miniaturization and light weight have become the development trend of various electronic products such as digital cameras, mobile phones, notebook computers, handheld computers, etc., which requires that the components that make up these electronic devices must be reduced in size and weight , and can adapt to the needs of surface mount technology (SMD). The components required by surface mount technology are chip components. Multilayer ceramic capacitors, multilayer ceramic inductors and chip resistors are the three most widely used passive components in chip components. Multilayer Ceramic Capacitors (Multilayer Ceramic Capacitors) is referred to as MLCC, which alternately stacks multilayer inner electrode materials and ceramic bodies, co-fires a monolithic body, and coats the outer electrodes on both ends of the monolithic body, respectively. Alternately exposed inner electrodes are electrically connected. According to the EIA (Electronic Industries Association) standard, the Y5V type MLCC refers to the capacitance value at 25°C as the reference, and within the temperature range from -30°C to +85°C, the capacity temperature change rate is between +22 %~-82%, dielectric loss (DF)≤2.5%. Y5V type MLCC is divided into two categories according to the composition: one is composed of lead-containing ferroelectrics, and the other is composed of non-lead ferroelectrics based on BaTiO 3 solid solution. Among them, because the latter has less environmental pollution, and its mechanical strength, anti-aging performance, platability and reliability are superior to the former, the non-lead Y5V type MLCC has broad application prospects.
与铅系铁电陶瓷相比,钛酸钡及其固溶体材料需要较高温度烧结(1100℃~1350℃),因此该类材料组成的多层陶瓷电容器在空气中烧结时,需要使用贵金属(Pt、Au、Pd、Ag等金属及其合金等)作为内电极。这些贵金属高昂的价格大大提高了MLCC的生产成本,利用廉价的金属材料取代贵金属作为内电极材料成为降低MLCC成本的重要途径。常用的贱金属内电极材料包括Ni、Fe、Co、Cu以及他们的合金,当在空气中烧结时,MLCC中的内电极贱金属会被空气中的氧气氧化,生成不易导电的氧化物,失去作为内电极的作用,因此贱金属内电极MLCC的烧结必须使用中性或者还原性气氛。同时为了保证钛酸钡基介电陶瓷在中性或还原气氛下烧结时不被还原成为半导体,并且有足够的绝缘性能和较高的抗击穿特性,贱金属内电极MLCC的烧结一般采用两段式烧结,即先在1100℃~1350℃较高的温度范围内进行烧结,获得致密的独石体,烧结气氛的氧分压介于10-6~10-12Pa,然后在1000℃~1100℃的温度下,在具有10-3~10-8Pa氧分压的气氛中进行退火,以提高陶瓷的绝缘电阻和抗击穿能力,保证MLCC的可靠性。烧结过程中的气氛一般由氮气、氢气和水蒸汽,或者氮气、一氧化碳和二氧化碳组成,通过调整混合气体的组份获得具有特定氧分压的烧结气氛和退火气氛。目前,在美国专利US 5361187中,Y5V介质陶瓷采用(Ba1-xCax)(Ti1-y-zSnyZrz)O3基固溶体为主料,获得了较高的室温介电常数(8000~19000),但是只能在空气中烧结,限制了该类材料在贱金属内电极MLCC中的应用。美国专利US 6078494采用改性的(BaxCay)(TizZrw)O3钙钛矿铁电陶瓷获得了抗还原的Y5V型高介(≥20000)陶瓷,但其成分非常复杂,工艺条件苛刻,而且陶瓷的晶粒尺寸较大(3~5μm),室温介电损耗较大,不适合用在制造单层介质厚度低于10μm的高性能多层陶瓷电容器。Compared with lead-based ferroelectric ceramics, barium titanate and its solid solution materials need to be sintered at a higher temperature (1100 ° C ~ 1350 ° C), so multilayer ceramic capacitors composed of such materials need to use precious metals (Pt , Au, Pd, Ag and other metals and their alloys, etc.) as internal electrodes. The high price of these precious metals has greatly increased the production cost of MLCC, and the use of cheap metal materials to replace noble metals as internal electrode materials has become an important way to reduce the cost of MLCC. Commonly used base metal internal electrode materials include Ni, Fe, Co, Cu and their alloys. When sintered in air, the internal electrode base metal in MLCC will be oxidized by oxygen in the air to form oxides that are not easily conductive and lose As an internal electrode, the sintering of the base metal internal electrode MLCC must use a neutral or reducing atmosphere. At the same time, in order to ensure that barium titanate-based dielectric ceramics are not reduced to semiconductors when sintered in a neutral or reducing atmosphere, and have sufficient insulation performance and high breakdown resistance, the sintering of the base metal inner electrode MLCC generally adopts two stages. Type sintering, that is, sintering at a relatively high temperature range of 1100°C to 1350°C to obtain a dense monolithic body, the oxygen partial pressure of the sintering atmosphere is between 10 -6 and 10 -12 Pa, and then at 1000°C to 1100 Annealing is carried out in an atmosphere with an oxygen partial pressure of 10 -3 ~ 10 -8 Pa at a temperature of ℃, so as to improve the insulation resistance and breakdown resistance of ceramics and ensure the reliability of MLCC. The atmosphere in the sintering process is generally composed of nitrogen, hydrogen and water vapor, or nitrogen, carbon monoxide and carbon dioxide, and the sintering atmosphere and annealing atmosphere with a specific oxygen partial pressure can be obtained by adjusting the composition of the mixed gas. At present, in the US patent US 5361187, the Y5V dielectric ceramic uses (Ba 1-x Ca x )(Ti 1-yz Sn y Zr z )O 3 based solid solution as the main material, and obtains a relatively high room temperature dielectric constant (8000 ~19000), but can only be sintered in air, which limits the application of this type of material in base metal inner electrode MLCC. U.S. Patent US 6078494 uses modified (Ba x Ca y )(T z Zr w )O 3 perovskite ferroelectric ceramics to obtain anti-reduction Y5V type high-dielectric (≥20000) ceramics, but its composition is very complicated and the process The conditions are harsh, and the grain size of ceramics is large (3-5 μm), and the dielectric loss at room temperature is large, so it is not suitable for manufacturing high-performance multilayer ceramic capacitors with a single-layer dielectric thickness less than 10 μm.
发明内容Contents of the invention
本发明的目的是提供制备工艺简便,配方简单可调,烧结条件易控,介电性能优良的一种用于贱金属电极的高介电、抗还原电容介质材料,该材料由主料固溶体和二次添加物组成,其特征在于:所述主料固溶体Bax(ZrySnzTi1-y-z)O3由钛酸钡BaTiO3与锆酸钡BaZrO3以及锡酸钡BaSnO3组成,其中0.995≤x≤1.01,0.10≤y≤0.20,0≤z≤0.10,在配方中所占的摩尔数为96~98mol%;所述二次添加物的用量占材料总量的2~4mol%,包括CaO、TiO2、SiO2、Li2O、MnO2、ZnO和一种或一种以上的稀土氧化物M2O3、或是二次添加物的前驱体;所述的各材料以摩尔计的配比为:CaO:0.3~1.0mol%;TiO2:0.1~0.5mol%;SiO2:0~0.5mol%;Li2O:0.2~1.5mol%;MnO2:0.4~1.4mol%;ZnO:0.8~2.5mol%;Re2O3:0.2~1.2mol%。The purpose of the present invention is to provide a high dielectric and anti-reduction capacitor dielectric material for base metal electrodes with simple preparation process, simple and adjustable formula, easy control of sintering conditions, and excellent dielectric properties. The material is composed of main material solid solution and The secondary additive composition is characterized in that: the main material solid solution Ba x ( Zry Snz Ti 1-yz ) O 3 is composed of barium titanate BaTiO 3 , barium zirconate BaZrO 3 and barium stannate BaSnO 3 , wherein 0.995≤x≤1.01, 0.10≤y≤0.20, 0≤z≤0.10, the number of moles in the formula is 96-98mol%; the amount of the secondary additives accounts for 2-4mol% of the total amount of materials, Precursors including CaO, TiO 2 , SiO 2 , Li 2 O, MnO 2 , ZnO and one or more rare earth oxides M 2 O 3 , or secondary additives; The ratio of the meter is: CaO: 0.3~1.0mol%; TiO 2 : 0.1~0.5mol%; SiO 2 : 0~0.5mol%; Li 2 O: 0.2~1.5mol%; MnO 2 : 0.4~1.4mol% ; ZnO: 0.8-2.5 mol%; Re 2 O 3 : 0.2-1.2 mol%.
所述主料固溶体的组成材料的颗粒尺寸要求小于1000nm;所述二次添加物的粉末状颗粒尺寸要求小于600nm;二次添加物的前驱体要求以溶液的方式混合均匀后干燥沉积,然后将沉积物在800℃~900℃进行煅烧处理,并加以球磨。The particle size of the constituent materials of the main material solid solution is required to be less than 1000nm; the powder particle size of the secondary additive is required to be less than 600nm; The deposit is calcined at 800°C to 900°C and ball milled.
所述二次添加物的前驱体包括碳酸盐、氢氧化物、草酸盐、醋酸盐、硝酸盐、柠檬酸盐以及醇盐:四丁醇钛、或乙醇钙、或乙醇锌。The precursors of the secondary additives include carbonates, hydroxides, oxalates, acetates, nitrates, citrates and alkoxides: titanium tetrabutoxide, or calcium ethoxide, or zinc ethoxide.
所述稀土氧化物M2O3中M代表:La-镧、Ce-铈、Pr-镨、Nd-钕、Sm-钐、Eu-铕、Gd-钆、Tb-铽、Dy-镝、Ho-钬、Er-铒、Tm-铥、Yb-镱、Lu-镥,以及Y-钇。M in the rare earth oxide M 2 O 3 represents: La-lanthanum, Ce-cerium, Pr-praseodymium, Nd-neodymium, Sm-samarium, Eu-europium, Gd-gadolinium, Tb-terbium, Dy-dysprosium, Ho - Holmium, Er-erbium, Tm-thulium, Yb-ytterbium, Lu-lutetium, and Y-yttrium.
制造多层陶瓷电容器-MLCC的具体工艺步骤如下:The specific process steps for manufacturing multilayer ceramic capacitors-MLCC are as follows:
(1)将粉末状的碳酸钡、二氧化锆、二氧化锡和二氧化钛相混合,以水为介质,氧化锆球为磨介,在尼龙罐中球磨24小时;(1) Mix powdered barium carbonate, zirconium dioxide, tin dioxide and titanium dioxide, use water as the medium, and zirconia balls as the grinding medium, and ball mill in a nylon tank for 24 hours;
(2)将烘干的上述混合物在1100℃<T≤1200℃、在10-7~1.2×10-12低分氧压下煅烧,合成具有钙钛矿结构的固溶体主料;(2) calcining the dried above-mentioned mixture at 1100°C<T≤1200°C under a low partial oxygen pressure of 10 -7 to 1.2×10 -12 to synthesize a solid solution main material with a perovskite structure;
(3)所述二次添加物的前驱体要求以溶液的方式混合均匀后干燥沉积,然后将沉积物在800℃~900℃进行煅烧处理,并加以球磨。(3) The precursor of the secondary additive is required to be uniformly mixed in the form of a solution, then dried and deposited, and then the deposit is calcined at 800° C. to 900° C. and ball milled.
(4)固溶体主料的粉碎:以水为介质,氧化锆球为磨介,在尼龙罐中球磨48小时,获得颗粒尺寸小于1000nm的主料粉;(4) Grinding of the main material of the solid solution: using water as the medium and zirconia balls as the grinding medium, ball milling in a nylon tank for 48 hours to obtain the main material powder with a particle size of less than 1000nm;
(5)将上述固溶体粉料与二次添加物相混合,加入适当的有机溶剂醋酸正丙酯、粘结剂聚乙烯醇缩丁醛、增塑剂苯二甲酸二辛酯、分散剂聚丙烯酸铵,用氧化锆球为磨介在尼龙罐中球磨48小时,获得流延浆料;(5) Mix the above solid solution powder with secondary additives, add appropriate organic solvent n-propyl acetate, binder polyvinyl butyral, plasticizer dioctyl phthalate, dispersant polyacrylic acid Ammonium, using zirconia balls as a grinding medium in a nylon tank for ball milling for 48 hours to obtain cast slurry;
(6)用上述流延浆料流延成介电层:介电层厚度为10μm或10μm以下;(6) Casting the dielectric layer with the above-mentioned casting slurry: the thickness of the dielectric layer is 10 μm or less;
(7)在上述介电层上印刷贱金属内电极层,再将印有内电极的流延介电层相互叠加,热压后切割,形成MLCC生坯;(7) printing a base metal internal electrode layer on the above-mentioned dielectric layer, and then stacking the tape-cast dielectric layers printed with internal electrodes, cutting after hot pressing to form a MLCC green body;
(8)排胶:在300℃~340℃的温度范围内,在空气中保温20个小时,排除MLCC生坯中的有机物质,排胶过程的升温速度不高于10℃/h;(8) Debinding: In the temperature range of 300°C to 340°C, keep warm in the air for 20 hours to remove organic substances in the MLCC green body, and the heating rate of the debinding process is not higher than 10°C/h;
(9)在还原气氛下烧结:烧结过程中通入N2/H2/H2O的混合气体,将氧分压控制在10-6~10-12Pa的范围内,炉温控制在1100℃<T<1350℃;(9) Sintering in a reducing atmosphere: a mixed gas of N 2 /H 2 /H 2 O is introduced during the sintering process, the oxygen partial pressure is controlled within the range of 10 -6 ~ 10 -12 Pa, and the furnace temperature is controlled at 1100 ℃<T<1350℃;
(10)在弱氧化条件下退火:炉温在1000℃<T<1100℃,保温2~4小时,氧分压控制在10-3~10-8Pa的范围内;(10) Annealing under weak oxidation conditions: the furnace temperature is 1000°C<T<1100°C, heat preservation for 2 to 4 hours, and the oxygen partial pressure is controlled within the range of 10 -3 to 10 -8 Pa;
(11)涂镀端电极:端电极为Cu或Ag,炉温在700℃~850℃,保温1小时,氮气保护,自然冷却后,即得到Y5V型贱金属内电极多层陶瓷电容器。(11) Coating terminal electrodes: the terminal electrodes are Cu or Ag, the furnace temperature is 700°C-850°C, heat preservation for 1 hour, nitrogen protection, and after natural cooling, a Y5V base metal inner electrode multilayer ceramic capacitor is obtained.
本发明的有益效果为按本发明的材料配方,可以在1200℃及低于1350℃的温度下烧结出性能优异的Y5V型高介电、抗还原电容介质材料。其室温介电常数可以控制在8,000~15,000之间,-30℃~+85℃范围内容温变化率介于+22%~-82%,满足EIA-Y5V要求,室温介电损耗≤2.5%,交流击穿场强高于4.5kV/mm,陶瓷晶粒尺寸介于500nm~2,500nm。适用于制造以贱金属为内电极材料的薄层(≤10μm)、高层数、大容量的多层陶瓷电容器。The beneficial effect of the invention is that according to the material formula of the invention, a Y5V type high dielectric and anti-reduction capacitor dielectric material with excellent performance can be sintered at a temperature of 1200°C or lower than 1350°C. Its room temperature dielectric constant can be controlled between 8,000 and 15,000, and the temperature change rate in the range of -30°C to +85°C is +22% to -82%, which meets the requirements of EIA-Y5V, and the dielectric loss at room temperature is ≤2.5%. The AC breakdown field strength is higher than 4.5kV/mm, and the ceramic grain size is between 500nm and 2,500nm. It is suitable for the manufacture of multilayer ceramic capacitors with thin layers (≤10μm), number of layers, and large capacity using base metal as the internal electrode material.
附图说明Description of drawings
图1为实施例1样品的介电常数与温度的变化曲线;Fig. 1 is the variation curve of the dielectric constant and temperature of embodiment 1 sample;
图2为实施例1样品的自然表面的显微结构照片;Fig. 2 is the photomicrostructure of the natural surface of embodiment 1 sample;
图3为实施例2样品的介电常数与温度的变化曲线;Fig. 3 is the variation curve of the dielectric constant and temperature of embodiment 2 sample;
图4为实施例2样品的自然表面的显微结构照片;Fig. 4 is the photomicrostructure of the natural surface of embodiment 2 sample;
图5为实施例3样品的介电常数与温度的变化曲线;Fig. 5 is the variation curve of the dielectric constant and temperature of embodiment 3 samples;
图6为实施例3样品的自然表面的显微结构照片。Fig. 6 is a photo of the microstructure of the natural surface of the sample of Example 3.
具体实施方式Detailed ways
本发明为一种制备工艺简便,配方简单可调,烧结条件易控,介电性能优良的用于贱金属电极的高介电、抗还原电容介质材料,该材料由钛酸钡BaTiO3与锆酸钡BaZrO3以及锡酸钡BaSnO3的固溶体Bax(ZrySnzTi1-y-z)O3和二次添加剂组成,所述主料固溶体Bax(ZrySnzTi1-y-z)O3、在配方中所占的摩尔数为96~98mol%;所述二次添加物的用量占材料总量的2~4mol%。其中0.995≤x≤1.01,0.10≤y≤0.20,0≤z≤0.10,主料的颗粒尺寸要求小于1000nm。所述二次添加剂包括CaO、TiO2、SiO2、Li2O、MnO2、ZnO和一种或一种以上的稀土氧化物M2O3,或是二次添加物的前驱体:包括碳酸盐、氢氧化物、草酸盐、醋酸盐、硝酸盐、柠檬酸盐以及醇盐(四丁醇钛、乙醇钙、乙醇锌等,并不确定于某一种醇盐)。所述的各材料配比为(以摩尔计):CaO:0.3~1.0mol%;TiO2:0.1~0.5mol%;SiO2:0~0.5mol%;Li2O:0.2~1.5mol%;MnO2:0.4~1.4mol%;ZnO:0.8~2.5mol%:Re2O3:0.2~1.2mol%。The invention is a high dielectric and anti-reduction capacitor dielectric material for base metal electrodes with simple preparation process, simple and adjustable formula, easy control of sintering conditions and excellent dielectric properties. The material is composed of barium titanate BaTiO 3 and zirconium Barium oxide BaZrO 3 and barium stannate BaSnO 3 solid solution Ba x ( Zry Sn z Ti 1-yz )O 3 and secondary additive composition, the main material solid solution Ba x (Zry y Sn z Ti 1-yz )O 3. The number of moles in the formula is 96-98 mol%; the amount of the secondary additive accounts for 2-4 mol% of the total amount of materials. Among them, 0.995≤x≤1.01, 0.10≤y≤0.20, 0≤z≤0.10, the particle size of the main material is required to be less than 1000nm. The secondary additives include CaO, TiO 2 , SiO 2 , Li 2 O, MnO 2 , ZnO and one or more rare earth oxides M 2 O 3 , or the precursors of the secondary additives: including carbon salt, hydroxide, oxalate, acetate, nitrate, citrate, and alkoxide (titanium tetrabutoxide, calcium ethoxide, zinc ethoxide, etc., not specific to a certain alkoxide). The ratio of each material described is (by mole): CaO: 0.3-1.0 mol%; TiO 2 : 0.1-0.5 mol%; SiO 2 : 0-0.5 mol%; Li 2 O: 0.2-1.5 mol%; MnO 2 : 0.4-1.4 mol %; ZnO: 0.8-2.5 mol %; Re 2 O 3 : 0.2-1.2 mol %.
稀土氧化物M2O3中M代表:La-镧、Ce-铈、Pr-镨、Nd-钕、Sm-钐、Eu-铕、Gd-钆、Tb-铽、Dy-镝、Ho-钬、Er-铒、Tm-铥、Yb-镱、Lu-镥,以及Y-钇。M in rare earth oxide M 2 O 3 represents: La-lanthanum, Ce-cerium, Pr-praseodymium, Nd-neodymium, Sm-samarium, Eu-europium, Gd-gadolinium, Tb-terbium, Dy-dysprosium, Ho-holmium , Er-erbium, Tm-thulium, Yb-ytterbium, Lu-lutetium, and Y-yttrium.
上述二次添加物中粉末状颗粒尺寸要求小于600nm,所述二次添加物的前驱体要求以溶液(溶剂一般是水、乙醇、乙酸或者它们的混合物,对于碳酸盐、醋酸盐、硝酸盐等易溶于水的盐类,溶剂选用水,对于醇盐可以选用乙醇,以防止水解,醋酸盐、草酸盐等可以选用醋酸或者醋酸的水溶液作为溶剂)的方式混合均匀后干燥沉积,然后将沉积物在800℃~900℃进行煅烧处理,并加以球磨。In the above-mentioned secondary addition, the powder particle size requires less than 600nm, and the precursor of the secondary addition requires a solution (solvent is generally water, ethanol, acetic acid or their mixture, for carbonate, acetate, nitric acid Salt and other salts that are easily soluble in water, the solvent is water, ethanol can be used for alkoxide to prevent hydrolysis, acetate, oxalate, etc. can be mixed with acetic acid or an aqueous solution of acetic acid as a solvent) and then dried and deposited , and then the deposit is calcined at 800°C to 900°C and ball milled.
制造MLCC的具体工艺步骤如下:The specific process steps for manufacturing MLCC are as follows:
(1)将粉末状的碳酸钡、二氧化锆、二氧化锡和二氧化钛相混合,以水为介质,氧化锆球为磨介,在尼龙罐中球磨24小时;(1) Mix powdered barium carbonate, zirconium dioxide, tin dioxide and titanium dioxide, use water as the medium, and zirconia balls as the grinding medium, and ball mill in a nylon tank for 24 hours;
(2)将烘干的上述混合物在1100℃<T≤1200℃、在10-7~1.2×10-12低分氧压下煅烧,合成具有钙钛矿结构的固溶体主料;(2) calcining the dried above-mentioned mixture at 1100°C<T≤1200°C under a low partial oxygen pressure of 10 -7 to 1.2×10 -12 to synthesize a solid solution main material with a perovskite structure;
(3)固溶体主料的粉碎:以水为介质,氧化锆球为磨介,在尼龙罐中球磨48小时,获得颗粒尺寸小于1000nm的主料粉;(3) Grinding of the main material of the solid solution: using water as the medium and zirconia balls as the grinding medium, ball milling in a nylon tank for 48 hours to obtain the main material powder with a particle size of less than 1000nm;
(4)将上述固溶体粉料与二次添加物相混合,加入适当的有机溶剂、粘结剂、增塑剂、分散剂等,用氧化锆球为磨介在尼龙罐中球磨48小时,获得流延浆料;(4) Mix the above-mentioned solid solution powder with secondary additives, add appropriate organic solvents, binders, plasticizers, dispersants, etc., and use zirconia balls as grinding media in nylon tanks for 48 hours to obtain fluid extended slurry;
(5)用上述流延浆料流延成介电层:介电层厚度为10μm或10μm以下;(5) Casting the dielectric layer with the above-mentioned casting slurry: the thickness of the dielectric layer is 10 μm or less;
(6)在上述介电层上印刷贱金属内电极层,再将印有内电极的流延介电层相互叠加,热压后切割,形成MLCC生坯;(6) Print a base metal internal electrode layer on the above-mentioned dielectric layer, then superimpose the tape-cast dielectric layers printed with internal electrodes, and cut after hot pressing to form a MLCC green body;
(7)排胶:在300℃~340℃的温度范围内,在空气中保温20个小时,排除MLCC生坯中的有机物质,排胶过程的升温速度不高于10℃/h;(7) Debinding: In the temperature range of 300°C to 340°C, keep warm in the air for 20 hours to remove organic substances in the MLCC green body, and the heating rate of the debinding process is not higher than 10°C/h;
(8)在还原气氛下烧结:烧结过程中通入N2/H2/H2O的混合气体,将氧分压控制在10-6~10-12Pa的范围内,炉温控制:以200℃/小时的速度升温到1250℃,保温时间为2小时;(8) Sintering in a reducing atmosphere: During the sintering process, a mixed gas of N 2 /H 2 /H 2 O is introduced to control the partial pressure of oxygen in the range of 10 -6 ~ 10 -12 Pa. The furnace temperature is controlled by The temperature is raised to 1250°C at a rate of 200°C/hour, and the holding time is 2 hours;
(9)在弱氧化条件下退火:炉温在1000℃<T<1100℃,保温2~4小时,氧分压控制在10-3~10-8Pa的范围内;(9) Annealing under weak oxidation conditions: the furnace temperature is 1000°C<T<1100°C, heat preservation for 2 to 4 hours, and the oxygen partial pressure is controlled within the range of 10 -3 to 10 -8 Pa;
(10)涂镀端电极:端电极为Cu或Ag,炉温在700℃~850℃,保温1小时,氮气保护,自然冷却后,即得到Y5V型贱金属内电极多层陶瓷电容器。(10) Coating terminal electrodes: the terminal electrodes are Cu or Ag, the furnace temperature is 700°C-850°C, heat preservation for 1 hour, nitrogen protection, and after natural cooling, a Y5V type base metal inner electrode multilayer ceramic capacitor is obtained.
下面再举实施例进一步说明如下:Give examples again below to further illustrate as follows:
实施例1,先按照Bax(ZrySnzTi1-y-z)O3(其中x=1.005,y=0.13,z=0.04)合成钙钛矿固溶体,合成温度1150℃,球磨粉碎后固溶体的颗粒尺寸为570nm。然后按照Bax(ZrySnzTi1-y-z)O3固溶体:96mol%;CaO:0.4mol%;TiO2:0.5mol%;SiO2:0.2mol%;Li2O:0.4mol%;MnO2:0.6mol%;ZnO:1.4mol%;Sm2O3:0.3mol%;Dy2O3:0.2mol%配比称量。将上述材料进行混合,加入适当的有机添加剂醋酸正丙酯后球磨,然后流延成膜片,与印刷Ni电极叠加,制成MLCC生坯,排胶后,在还原气氛下烧结(烧结过程中通入N2/H2,同时加湿,将氧分压控制在10-11Pa,以200℃/小时的速度升温到1260℃,保温时间为2小时),然后在弱氧化条件下退火(炉温在1100℃,保温2小时,氧分压控制为10-7Pa)。之后涂烧Cu端电极(炉温在850℃,保温1小时,氮气保护)。对上述多层陶瓷电容器进行性能测试,电学性能参数见表1。图1的曲线给出的是本实施例样品介电常数随温度的变化曲线,图2给出样品自然表面的显微结构,晶粒尺寸介于1500~2000nm之间。Example 1, first synthesize perovskite solid solution according to Ba x ( Zry Sn z Ti 1-yz )O 3 (where x=1.005, y=0.13, z=0.04), the synthesis temperature is 1150°C, and the solid solution after ball milling The particle size is 570nm. Then according to Ba x ( Zry Snz Ti 1-yz )O 3 solid solution: 96mol%; CaO: 0.4mol%; TiO 2 : 0.5mol%; SiO 2 : 0.2mol%; Li 2 O: 0.4mol%; MnO 2 : 0.6mol%; ZnO: 1.4mol%; Sm 2 O 3 : 0.3mol%; Dy 2 O 3 : 0.2mol% Proportional weighing. Mix the above materials, add an appropriate organic additive n-propyl acetate and ball mill, then cast into a film, superimpose with the printed Ni electrode to make a MLCC green body, after debinding, sinter in a reducing atmosphere (during the sintering process Introduce N 2 /H 2 , humidify at the same time, control the oxygen partial pressure at 10-11 Pa, raise the temperature to 1260°C at a rate of 200°C/hour, and keep it for 2 hours), and then anneal under weak oxidation conditions (furnace The temperature was kept at 1100°C for 2 hours, and the oxygen partial pressure was controlled at 10 -7 Pa). Then apply and burn the Cu terminal electrode (furnace temperature at 850°C, heat preservation for 1 hour, nitrogen protection). Performance tests were performed on the above-mentioned multilayer ceramic capacitors, and the electrical performance parameters are shown in Table 1. The curve in Fig. 1 shows the variation curve of the dielectric constant of the sample in this embodiment with temperature, and Fig. 2 shows the microstructure of the natural surface of the sample, and the grain size is between 1500-2000 nm.
表1 样品1的电学性能参数
实施例2,先按照Bax(ZrySnzTi1-y-z)O3(其中x=1.002,y=0.17,z=O)合成钙钛矿固溶体,合成温度1150℃,球磨粉碎后固溶体的颗粒尺寸为410nm。然后按照Bax(ZrySnzTi1-y-z)O3固溶体:97mol%;CaO:0.3mol%;TiO2:0.1mol%;SiO2:0.2mol%;Li2O:0.2mol%;MnO2:0.5mol%;ZnO:1.2mol%;Nd2O3:0.2mol%;La2O3:0.3mol%配比称量。将上述材料进行混合,加入适当的有机添加剂醋酸正丙酯后球磨,然后流延成膜片,与印刷Ni电极叠加,制成MLCC生坯,排胶后,在还原气氛下烧结(烧结过程中通入N2/H2,同时加湿,将氧分压控制在10-11Pa,以200℃/小时的速度升温到1220℃,保温时间为2小时),然后在弱氧化条件下退火(炉温在1100℃,保温3小时,氧分压控制为10-7Pa)。之后涂烧Cu端电极(炉温在850℃,保温1小时,氮气保护)。对上述多层陶瓷电容器进行性能测试,电学性能参数见表2。图3的曲线给出的是本实施例样品介电常数随温度的变化曲线,图4给出样品新鲜断面的显微结构,晶粒尺寸介于800~1000nm之间。Example 2, first synthesize perovskite solid solution according to Ba x ( Zry Sn z Ti 1-yz )O 3 (where x=1.002, y=0.17, z=O), the synthesis temperature is 1150°C, and the solid solution after ball milling The particle size is 410 nm. Then according to Ba x ( Zry Snz Ti 1-yz )O 3 solid solution: 97mol%; CaO: 0.3mol%; TiO 2 : 0.1mol%; SiO 2 : 0.2mol%; Li 2 O: 0.2mol%; MnO 2 : 0.5mol%; ZnO: 1.2mol%; Nd 2 O 3 : 0.2mol%; La 2 O 3 : 0.3mol% Proportional weighing. Mix the above materials, add an appropriate organic additive n-propyl acetate and ball mill, then cast into a film, superimpose with the printed Ni electrode to make a MLCC green body, after debinding, sinter in a reducing atmosphere (during the sintering process Introduce N 2 /H 2 , humidify at the same time, control the oxygen partial pressure at 10-11 Pa, raise the temperature to 1220°C at a rate of 200°C/hour, and keep it for 2 hours), and then anneal under weak oxidation conditions (furnace The temperature was kept at 1100°C for 3 hours, and the oxygen partial pressure was controlled at 10 -7 Pa). Then apply and burn Cu terminal electrodes (furnace temperature at 850°C, keep warm for 1 hour, nitrogen protection). Performance tests were performed on the above-mentioned multilayer ceramic capacitors, and the electrical performance parameters are shown in Table 2. The curve in Fig. 3 shows the variation curve of the dielectric constant of the sample in this embodiment with temperature, and Fig. 4 shows the microstructure of the fresh section of the sample, and the grain size is between 800-1000nm.
表2 样品2的电学性能参数
实施例3,先按照Bax(ZrySnzTi1-y-z)O3(其中x=0.998,y=0.14,z=0.08)合成钙钛矿固溶体,合成温度1150℃,球磨粉碎后固溶体的颗粒尺寸为650nm。然后按照Bax(ZrySnzTi1-y-z)O3固溶体:97mol%;CaO:0.8mol%;TiO2:0.2mol%;SiO2:0mol%;Li2O:0.2mol%;MnO2:0.4mol%;ZnO:1.0mol%;Yb2O3:0.2mol%;Ho2O3:0.2mol%配比称量。将上述材料进行混合,加入适当的有机添加剂醋酸正丙酯后球磨,然后流延成膜片,与印刷Ni电极叠加,制成MLCC生坯,排胶后,在还原气氛下烧结(烧结过程中通入N2/H2,同时加湿,将氧分压控制在10-11Pa,以200℃/小时的速度升温到1300℃,保温时间为2小时),然后在弱氧化条件下退火(炉温在1050℃,保温4小时,氧分压控制为10-7Pa)。之后涂烧Cu端电极(炉温在850℃,保温1小时,氮气保护)。对上述多层陶瓷电容器进行性能测试,电学性能参数见表3。图5的曲线给出的是本实施例样品介电常数随温度的变化曲线,图6给出样品自然表面的显微结构,晶粒尺寸介于1500~2500nm之间。Example 3, the perovskite solid solution was first synthesized according to Ba x ( Zry Snz Ti 1-yz )O 3 (where x=0.998, y=0.14, z=0.08), the synthesis temperature was 1150°C, and the solid solution after ball milling The particle size is 650nm. Then according to Ba x ( Zry Snz Ti 1-yz )O 3 solid solution: 97mol%; CaO: 0.8mol%; TiO 2 : 0.2mol%; SiO 2 : 0mol%; Li 2 O: 0.2mol%; MnO 2 : 0.4mol%; ZnO: 1.0mol%; Yb 2 O 3 : 0.2mol%; Ho 2 O 3 : 0.2mol%. Mix the above materials, add an appropriate organic additive n-propyl acetate and ball mill, then cast into a film, superimpose with the printed Ni electrode to make a MLCC green body, after debinding, sinter in a reducing atmosphere (during the sintering process Introduce N 2 /H 2 , humidify at the same time, control the oxygen partial pressure at 10-11 Pa, raise the temperature to 1300°C at a rate of 200°C/hour, and keep it for 2 hours), and then anneal under weak oxidation conditions (furnace The temperature was kept at 1050°C for 4 hours, and the oxygen partial pressure was controlled at 10 -7 Pa). Then apply and burn the Cu terminal electrode (furnace temperature at 850°C, heat preservation for 1 hour, nitrogen protection). Performance tests were performed on the above-mentioned multilayer ceramic capacitors, and the electrical performance parameters are shown in Table 3. The curve in Fig. 5 shows the variation curve of the dielectric constant of the sample in this embodiment with temperature, and Fig. 6 shows the microstructure of the natural surface of the sample, and the grain size is between 1500-2500nm.
表3 样品3的电学性能参数
上述实施例在1100℃<T≤1200℃的温度范围内,制备了满足EIA-Y5V性能指标要求的钛酸钡固溶体基贱金属内电极高介电、抗还原电容介质材料。其室温介电常数可以控制在8000到1,5000之间,-30℃~+85℃容温变化率介于+22%~-82%,介电损耗小于2.5%。绝缘电阻率约为1011Ω·cm,交流击穿电压大于4.5KV/mn。利用本发明的配方和工艺,可获得烧结温度范围广,性能可调,稳定性和再现性良好的抗还原钛酸钡固溶体基Y5V型MLCC材料。而且材料的晶粒均匀,陶瓷晶粒尺寸介于500nm~2,500nm。可以应用于大容量,超薄层(介电层厚度小于10μm)多层陶瓷电容器,是一种具有广泛应用前景的MLCC材料。In the above-mentioned embodiments, in the temperature range of 1100°C<T≤1200°C, a barium titanate solid solution-based base metal internal electrode high dielectric and reduction-resistant capacitor dielectric material meeting the performance index requirements of EIA-Y5V was prepared. Its room temperature dielectric constant can be controlled between 8,000 and 1,5000, the capacity temperature change rate between -30°C and +85°C is between +22% and -82%, and the dielectric loss is less than 2.5%. The insulation resistivity is about 10 11 Ω·cm, and the AC breakdown voltage is greater than 4.5KV/mn. Utilizing the formula and process of the invention, the anti-reduction barium titanate solid solution-based Y5V type MLCC material can be obtained with wide sintering temperature range, adjustable performance, good stability and reproducibility. Moreover, the crystal grains of the material are uniform, and the ceramic grain size is between 500nm and 2,500nm. It can be applied to large-capacity, ultra-thin layer (dielectric layer thickness less than 10 μm) multilayer ceramic capacitors, and is a MLCC material with broad application prospects.
上述图1~图6为对应于实施例1~3的各样品介电常数的温度特性曲线和表面显微形貌。介温特性的测试温度为-55℃~+125℃。1 to 6 above are the temperature characteristic curves and surface micromorphology of the dielectric constants of the samples corresponding to Examples 1 to 3. The test temperature of the medium temperature characteristic is -55℃~+125℃.
表1~表3中各参数代表的意义如下:The meanings of the parameters in Table 1 to Table 3 are as follows:
TCC(-30℃):-30℃时容温变化率;TCC(85℃):85℃时容温变化率;TCC(-30°C): rate of change of capacity temperature at -30°C; TCC(85°C): rate of change of capacity temperature at 85°C;
tgδ(25℃):室温时介电损耗,测试频率为1kHz,测试电压1.0V;tgδ(25℃): dielectric loss at room temperature, test frequency is 1kHz, test voltage is 1.0V;
TCC(T)%=100×(ε(T)-ε(25℃))/ε(25℃):容温变化率;TCC(T)%=100×(ε(T)-ε(25℃))/ε(25℃): capacity temperature change rate;
ρ(25℃):室温电阻率,测试条件为直流电压100V,保持60s;ρ(25°C): Room temperature resistivity, the test condition is DC voltage 100V, hold for 60s;
Eb(25℃):室温交流击穿场强,交流电场频率为50Hz。E b (25°C): AC breakdown field strength at room temperature, the frequency of the AC electric field is 50Hz.
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| CN1404081A (en) | 2003-03-19 |
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