CN1256565C - Enlarged camera equipment and metrology testing equipment - Google Patents
Enlarged camera equipment and metrology testing equipment Download PDFInfo
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- CN1256565C CN1256565C CN02131156.0A CN02131156A CN1256565C CN 1256565 C CN1256565 C CN 1256565C CN 02131156 A CN02131156 A CN 02131156A CN 1256565 C CN1256565 C CN 1256565C
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Abstract
The present invention relates to an amplification imaging apparatus, a measurement detection apparatus, and a measurement detection program. A measuring and detecting device capable of easily performing measurement and detection in a short time without causing fatigue to an inspector of an object to be subjected to an enlarged inspection such as a printed circuit board. The measurement detection device (1) is configured from an image pickup device (2), a processing device (3), a display device (4), and a specification device (5). An image pickup apparatus (2) which is movable and can stand by itself and performs image pickup processing on a measurement detection object positioned in the direction of the bottom is used to perform enlarged image pickup on the measurement detection object and display the obtained measurement detection object image on a display apparatus (4). By operating the specification device (5), the measurement detection command is selected from the measurement detection command list displayed on the display device (4), and an arbitrary point on the image is specified. The processing device (3) can be used to perform corresponding operations according to the measurement detection instructions and the designated points on the image, and the results are displayed on the display device (4).
Description
Technical field
The present invention relates to and to implement processing and amplifying and it is presented at picture pick-up device on the image display the Measuring and testing object, can implement the metering and measuring equipment of Measuring and testing to the Measuring and testing object, and make metering and measuring equipment can implement the metering checkout program that Measuring and testing is used.
Background technology
In recent years, the retrofit technology that is applied in each different technologies field develops rapidly.The technology of tellite being implemented processing is no exception, along with the miniaturization day by day, the densification that are installed in the parts on the tellite, and the miniaturization day by day, the high performance that carry the equipment on tellite, very little (narrow) that the interval of distribution and wiring closet becomes.If for instance, needing to produce the distribution width is 50 microns (μ m), and patch bay is the tellite of 10 microns (μ m)～30 microns (μ m).
The manufacturing process of this tellite that uses forms distribution type integrated circuit package by corrosion and coating mode at present, so all can some deviation every batch of distance of making wiring closet in the finished product.Constitute the distribution type integrated circuit package of tellite, although when design the time has been considered to implement to make the deviation that may occur, yet when deviation is big, be difficult to still guarantee that wiring closet has predetermined distance, so when installing other parts and use, may occur such as problems such as electric leakage and short circuits as finished product.
In order to prevent in advance that this problem from occurring, what formerly adopt in the technology is the mode that enforcement is dispatched from the factory and checked to tellite.In order to confirm whether distribution type integrated circuit package has short circuit phenomenon, can use the substrate calibration equipment to implement electric checking, also can implement visual inspection by the examiner.And, can make the tellite that takes out predetermined number in the finished product by every batch and implement selective examination, also can all implement to check to whole tellites.The tellite that the examiner can check needs carries on the work top of inspecting substrate equipment, utilize microscope and magnifier etc. that substrate distribution position is implemented to amplify and the range estimation affirmation, and implement to check according to the mode of the distance of wiring closet being implemented Measuring and testing.
Can pass through following manner, utilize described inspecting substrate equipment to implement the range estimation Measuring and testing:
(1) tellite is carried on the work top of checkout facility.
(2) the mobile working table top makes the cross hair or a sign line at the thing lens central portion place of mint-mark in microscope so that the tellite enforcing location is adjusted, and coincides with the marginal position of distribution.
(3) the metering outfit setting of implementing to reset of adjusting the distance.
(4) mobile working table top, until adjacent distribution edge when overlapping with a cross hair or a sign line till.
(5) the adjust the distance output of metering outfit implement to be confirmed.
By this a succession of operation, can implement Measuring and testing to the distance of wiring closet.
Yet, when utilizing described inspecting substrate equipment to implement the range estimation Measuring and testing, the examiner needs and will carry on work top as the tellite of checking object, when the bigger tellite of size is implemented to check, also need the inspection position of mobile working table top, and this adjustment is quite to bother with the adjustment tellite.And, also have the examiner and need implement Measuring and testing by microscope, therefore can make the examiner feel eye fatigue even can cause the problem of visual deterioration.
At present, developed for such as tellite etc., need to implement to amplify that the object of checking, examiner can easily be implemented to confirm, the inspecting substrate equipment of Measuring and testing in the short time.This inspecting substrate equipment is a kind ofly can utilize microscope (magnifier) and picture pick-up device, and the light word enlarged image of object is presented at amplification facilities for observation on the image display.
Yet in the inspecting substrate equipment in this technology formerly, microscope and picture pick-up device are fixedly installing, so the examiner needs and will carry on work top as the tellite of checking object, and the mobile working table top is estimated Measuring and testing with enforcement as required.For the occasion that as the tellite of checking object is the large scale tellite that constitutes by several small-sized substrates, when the examiner implements to check to each small-sized substrate, still need the mobile working table top to adjust the inspection position of tellite.Therefore, still need to implement the quite adjustment operation of trouble.
In order to address this problem, formerly also adopted the amplifying camera equipment that can carry on the tellite of conduct inspection object in the technology.The examiner is when the amplifying camera equipment that uses surveillance equipment this and enforcement image demonstration usefulness to be connected, amplifying camera equipment can be moved to needs to implement the position of inspection and it is arranged on this position, thereby can easily implement to confirm to the image that is positioned at this position.Therefore, compare, can in the short time, finish the range estimation Measuring and testing with the occasion of using aforementioned amplification facilities for observation.
Summary of the invention
Yet aforesaid amplifying camera equipment is a kind ofly to have bifocal optical system, though implement the switching of enlargement ratio easily, but only can implement to switch between the predetermined multiplying power that enlargement ratio is fixed.Therefore, have the examiner and be difficult to adopt the enlargement ratio of the most suitable inspection to implement to check, so be difficult to carry out the level and smooth stable problem of checking.
And this amplifying camera equipment does not have metering checkout program, is difficult on picture so also have, and the object that adopts aforesaid amplification facilities for observation shooting to obtain is implemented the problem of Measuring and testing.
And, may have small concavo-convex fluctuating on the tellite, when visual inspection is implemented at the distribution edge, easier enforcement is confirmed if can observe by three-dimensional form.Yet, formerly this amplifying camera equipment in the technology is to utilize several light emitting diodes (LED), press predetermined angular by oblique upper sightingpiston is implemented illumination, so be difficult to distribution be implemented to observe by three-dimensional form, therefore have the burden that meeting increases the examiner, make examiner's eyes be easy to generate tired problem.
The present invention is exactly the invention that addresses the above problem usefulness, purpose of the present invention just provides a kind of for the object such as tellite etc., can easily implement the amplification inspection and make the examiner not feel eye fatigue, and can in the short time, implement the amplifying camera equipment of Measuring and testing, metering and measuring equipment and corresponding metering checkout program to the size of required position.
By technical solution provided by the invention, that address the above problem usefulness, can be the following various forms of the composition.
(1) a kind of amplifying camera equipment is characterized in that being provided with in frame parts inside or surface the bottom surface opening, that can carry on the Measuring and testing object:
Described Measuring and testing object is implemented the amplifying camera portion that amplifying camera is handled usefulness;
Enlargement ratio to described amplifying camera portion is implemented the multiplying power changing unit that usefulness is handled in change;
The image that is obtained by the shooting of described amplifying camera portion is implemented the image efferent that usefulness is handled in output;
The top Lighting Division of light beam irradiates being used to described Measuring and testing object place by oblique upper;
The side lighting portion that light beam irradiates is used to described Measuring and testing object place by side direction;
And the light quantity adjustment part of the light quantity of described top Lighting Division and described side lighting portion being implemented to adjust usefulness.
If adopt this form of the composition, picture pick-up device can be with the light beam irradiates of being launched by oblique upper and side direction, light quantity was implemented to adjust to Measuring and testing object place.Therefore, can make each surface of Measuring and testing object be different light and shade states, so can export relevant Measuring and testing object, have a relief enlarged image.And, on the Measuring and testing object that amplifying camera equipment can carry, implement the position that shooting is handled so it easily can also be moved to.
(2) and, this amplifying camera equipment can also further make described light quantity adjustment part, can be respectively the light quantity of the light quantity of described top Lighting Division and described side lighting portion is implemented to adjust.
Therefore, can also to by the light beam of oblique upper irradiation with by surveying the light beam enforcement light quantity adjustment that direction is shone, implement image affirmation, that be three-dimensional form easily corresponding to the Measuring and testing object thereby can export by image display.
(3) and, the underside frame parts that this amplifying camera equipment can also further make described frame parts have the upperside frame parts and be made by transparent resin;
And, can be according to be arranged on threaded portion upperside frame parts downside end place, that be formed on bail handle portion place in mode free to rotate, combine with the screw thread between the threaded portion that is formed on underside frame parts upper side end place, implement the combination of retractable, be formed with flange at the downside end place of described underside frame parts.
If adopt this form of the composition, underside frame parts screw thread can also be combined in the handle portion place, so can make the underside frame parts produce telescopic moving by the rotating operation that handle portion is implemented.Therefore, can also implement trickle adjustment, and output there is not the picture rich in detail of ghost image by telescopic moving mode focusing position.And, can adopt transparent material to make the underside frame parts, so when the Measuring and testing object is implemented the shooting processing, can also easily implement to confirm by the outside to the target location.And, can also make and receive upperside frame parts and the setting of underside frame isolation of components that the dress parts are used, thereby can implement to change to the underside frame parts corresponding to the kind of Measuring and testing object, therefore can also implement shooting and handle according to the mode that adapts with the Measuring and testing object.
(4) and, this amplifying camera equipment is a place in described upperside frame parts and described underside frame parts further, flexible direction along described underside frame parts disposes groove, another place dispose can and described groove between realize that the ripple of sliding gomphosis plays portion.
If adopt this form of the composition, can also make upperside frame parts and underside frame parts realize sliding gomphosis by groove and the ripple portion of rising, so when swing handle, can prevent that the underside frame parts from producing corresponding rotation, and it only can be moved along flexible direction.
(5) and, this amplifying camera equipment can also further dispose the camera position place that is positioned at described amplifying camera portion in the bottom surface of described underside frame parts, be formed with the calibration portion of peristome, and can make the peripheral region of described peristome form grinding cup shape.
If adopt this form of the composition, can also when the Measuring and testing object is implemented the shooting processing, the target location be implemented to set reliably.And, when described Measuring and testing object being implemented shooting handle, can also make the light beam launched by side lighting portion or not of being calibrated shelter from.
(6) a kind of metering and measuring equipment is characterized in that having:
As any one described amplifying camera equipment in the item of above-mentioned (1) to (5);
To image by described amplifying camera equipment output, and the image display of the Measuring and testing instruction complete list that described image enforcement Measuring and testing is used being implemented to show usefulness;
Measuring and testing instruction in the described Measuring and testing instruction complete list is implemented to select, and implement to specify the designated equipment of usefulness being presented at arbitrfary point in the image on the described image display;
And according to the image enlargement ratio that is presented on the described image display, instruct by the Measuring and testing that described designated equipment is selected, and the specified point on the image implements computing, and operation result is presented at the treatment facility of using on the described image display.
If adopt this form of the composition, the Measuring and testing object image that is obtained by the shooting of amplifying camera equipment can also be presented on the image display, and can utilize designated equipment that Measuring and testing instruction enforcement is selected, arbitrfary point on the image is implemented to specify, and can with the corresponding operation result of image enlargement ratio, be presented on the image display.Therefore, can on picture, implement to amplify Measuring and testing to the Measuring and testing object.
(7) a kind of metering and measuring equipment is characterized in that having:
By be configured in be concave shape the bottom surface substantially the central portion place, can be towards lower side to implementing the amplifying camera portion that amplifying camera is handled, and the image that is obtained by the shooting of described amplifying camera portion is implemented output handles that the image efferent of usefulness constitutes, can move and can stand voluntarily and to be positioned at lower side to the Measuring and testing object implement the picture pick-up device that usefulness is handled in shooting;
To image by described picture pick-up device output, and the image display that can implement the instruction complete list enforcement demonstration usefulness of Measuring and testing;
Measuring and testing instruction in the described Measuring and testing instruction complete list is implemented to select, and implement to specify the designated equipment of usefulness being presented at arbitrfary point in the image on the described image display;
And according to the Measuring and testing instruction of selecting by described designated equipment, and the specified point on the image implements corresponding computing, and operation result is presented at the Measuring and testing treatment facility of using on the described image display.
If adopt this form of the composition, can also utilize can stand voluntarily and to be positioned at lower side to the Measuring and testing object implement the picture pick-up device that shooting is handled, the Measuring and testing object is implemented amplifying camera handle, and its image is presented on the image display.And, when selection has been implemented in the Measuring and testing instruction that is presented in the Measuring and testing instruction complete list on the image display, and when appointment has been implemented in the arbitrfary point on the image, the Measuring and testing treatment facility can also instruct according to Measuring and testing, and the specified point on the image implements corresponding computing, and operation result is presented on the image display.Therefore, the examiner can implement to check under the state that keeps original position when using metering and measuring equipment constructed according to the invention to the tellite that is positioned on the manufacturing line.And, can also implement to confirm to the Measuring and testing object image that is presented on the image display on one side, Yi Bian implement Measuring and testing.Therefore, can be in the short time implement can not resemble formerly to make eyes feel tired checked operation the technology easily, thereby can improve checking efficiency significantly.
(8) and, this metering and measuring equipment can also further make described amplifying camera portion implement to switch to the shooting multiplying power.
If adopt this form of the composition, can also implement to switch to the shooting multiplying power of amplifying camera portion, and then the image of Measuring and testing object be implemented shooting handle.Therefore, implement Measuring and testing in the time of can matching in position, and can implement to confirm, so can implement level and smooth stable inspection to the image of implementing after multiplying power is switched with the Measuring and testing object.And, can be when the Measuring and testing object be implemented Measuring and testing, the image of suitable size is presented on the image display, so can also easily implement assigned operation needed measuring point.
(9) and, this metering and measuring equipment can also further make described picture pick-up device have the Measuring and testing object that is positioned at bottom direction is implemented the Lighting Division that light beam irradiates is used.
If adopt this form of the composition, can also utilize Lighting Division with light beam irradiates at the Measuring and testing object place that is positioned at the bottom direction place, and utilize amplifying camera portion to implement shooting and handle.Therefore, painted image can be presented on the image display, so can further alleviate examiner's eye fatigue degree.
(10) a kind of metering checkout program is characterized in that making the computing machine that is connected with any one described amplifying camera equipment in the item of described (1) to (9) to have:
As image to exporting by described amplifying camera equipment, and the function of the Measuring and testing instruction complete list that described image enforcement Measuring and testing is used being implemented the display module of demonstration usefulness;
As the Measuring and testing instruction in the described Measuring and testing instruction complete list is implemented to select, and implement to specify the function of the indication component of usefulness to being presented at arbitrfary point in the image on the described image display;
As the image enlargement ratio of foundation by described amplifying camera equipment output, by the Measuring and testing instruction of selecting in the described Measuring and testing instruction complete list, and the specified point on the image implements computing, and operation result implemented to show the function of the processing components of usefulness;
As the function of described operation result being implemented the storage assembly of storage usefulness;
And as the function that stored operation result is exported to the output precision of using at other routine processes assembly place.
If adopt this form of the composition, can also instruct according to Measuring and testing, the arbitrfary point and the image enlargement ratio of appointment on image implement corresponding computing, and operation result is presented on the image display, operation result can also be exported in other routine processes assembly simultaneously.Therefore, can also utilize other routine processes assembly that operation result is implemented processing, thereby further improve the use value of data.
If employing the present invention can obtain technique effect as described below.
(1) picture pick-up device can with launch by oblique upper and side direction, implemented light beam irradiates that light quantity adjusts at Measuring and testing object place, so can make each surface on the Measuring and testing object be different bright-dark degrees, so can export relevant with the Measuring and testing object, have a relief enlarged image.And the form of the composition of amplifying camera equipment can be carried on the Measuring and testing object it, so can easily it be moved to camera position.
(2), can also implement the image confirmed, be three-dimensional form easily by image display output by adjusting with respect to the Measuring and testing object by the light beam light quantity of oblique upper irradiation with by the mode of the light beam light quantity of side direction irradiation.
(3) underside frame parts screw thread can also be installed in the handle portion place, and can make the underside frame parts produce relative stretching motion by the mode of turning handle hand.Owing to can implement trickle adjustment by this telescopic moving focusing position, so can export the picture rich in detail that can not produce ghost image.And, can adopt transparent material to make the underside frame parts, so when the Measuring and testing object is implemented the shooting processing, can easily implement to confirm by the outside to the target location.And, can also make and receive upperside frame parts and the setting of underside frame isolation of components that the dress parts are used, so can implement to change to the underside frame parts corresponding to the kind of Measuring and testing object, handle thereby can also implement shooting according to the mode that adapts with the Measuring and testing object.
(4) upperside frame parts and underside frame parts can also be realized sliding gomphosis by groove and the ripple portion of rising, so when the turning handle hand, can prevent that the underside frame parts from rotating, and it can be moved along flexible direction thereupon.
(5) when the Measuring and testing object being implemented shooting and handles, target setting position reliably.And when described Measuring and testing object being implemented shooting handle, can also implement shooting and handle according to not making the light beam of launching by side lighting portion be subjected to mode that calibration portion blocks.
(6) the Measuring and testing object image that is obtained by the shooting of amplifying camera equipment can be presented on the image display, and can utilize designated equipment that Measuring and testing instruction enforcement is selected, arbitrfary point on the image is implemented to specify, and can with the corresponding operation result of image enlargement ratio, be presented on the image display.Adopt this mode, can also on picture, implement to amplify and Measuring and testing the Measuring and testing object.
(7) examiner is when using metering and measuring equipment constructed according to the invention, can implement to confirm to the Measuring and testing object image that is presented on the image display on one side, implement Measuring and testing on one side, so can in the short time, implement easily to check, do not make eye fatigue and can not resemble formerly the technology, therefore can improve checking efficiency significantly.
(8) implement Measuring and testing in the time of can matching in position, and can implement to confirm, so can smoothly stably implement to check to the image of implementing after multiplying power is switched with the Measuring and testing object.
(9) when the Measuring and testing object is implemented Measuring and testing, suitably big or small image can be presented on the image display, so can easily determine the point of required mensuration.And, painted image can also be presented on the image display, so can further alleviate examiner's eye fatigue degree.
(10) can instruct according to Measuring and testing, the arbitrfary point of appointment on image and image enlargement ratio implement computing, and operation result is presented on the image display, operation result can also be exported in other routine processes assembly simultaneously.Adopt this form of the composition, can also utilize other routine processes assembly that operation result is implemented the processing processing, thereby can further improve the use value of data.
Description of drawings
The block scheme that Fig. 1 uses as a kind of metering and measuring equipment cardinal principle form of the composition of the embodiment of the invention for expression.
Fig. 2 (A), the stereographic map that Fig. 2 (B) uses for this metering and measuring equipment cardinal principle form of the composition of expression.
Fig. 3 (A), Fig. 3 (B) are presented at the synoptic diagram that the display frame example is used at the display device place in this metering and measuring equipment for expression.
Fig. 4 uses the process flow diagram of the process of Measuring and testing object enforcement Measuring and testing being used as the metering and measuring equipment of the embodiment of the invention for explanation.
The block scheme that Fig. 5 uses as a kind of metering and measuring equipment cardinal principle form of the composition of the embodiment of the invention for expression.
Fig. 6 (A), Fig. 6 (B) are the front view and the sectional view of picture pick-up device.
Fig. 7 (A), the stereographic map that Fig. 7 (B) uses for a kind of metering and measuring equipment cardinal principle of expression form of the composition.
Fig. 8 (A), the synoptic diagram that the display frame example is used that Fig. 8 (B) uses for the metering checkout program in the expression metering and measuring equipment.
When Fig. 9 (A), Fig. 9 (B) implement Measuring and testing according to the Measuring and testing instruction to the Measuring and testing object for the expression metering and measuring equipment, be presented at a synoptic diagram that the display frame example is used on the display device.
Figure 10 (A), Figure 10 (B) export the synoptic diagram of the data at form software for calculation place to for expression.
Embodiment
[first embodiment]
The block scheme that Fig. 1 uses as a kind of metering and measuring equipment cardinal principle form of the composition of the embodiment of the invention for expression.This metering and measuring equipment 1 can be by picture pick-up device 2, and as the treatment facility 3 of Measuring and testing treatment facility, as the display device 4 of image display, and designated equipment 5 constitutes.
Picture pick-up device 2 can have the amplifying camera portion 10 that is made of enlarging section 11, image pickup part 12 and multiplying power adjustment part 13, Lighting Division 14, light quantity adjustment part 15, operating portion 16 and signal input and output portion 17.Enlarging section 11 is used for by predetermined multiplying power the Measuring and testing object being implemented processing and amplifying, and can adopt such as formations such as optical lenses.Image pickup part 12 is used for handling implementing shooting by the image of the Measuring and testing object after the 11 enforcement processing and amplifying of enlarging section.Multiplying power adjustment part 13 is used for implemented the Measuring and testing object multiplying power enforcement switching that processing and amplifying is used by enlarging section 11.Lighting Division 14 is used for light beam irradiates to implementing the Measuring and testing object place that shooting is handled by image pickup part 12.Light quantity adjustment part 15 is used for Lighting Division 14 is exposed to the irradiation light quantity enforcement adjustment at Measuring and testing object place.The user can utilize the enlargement ratio of 16 pairs of picture pick-up devices 2 of operating portion and illumination light quantity to implement to adjust.Signal input and output portion 17 is used for obtaining being made a video recording by image pickup part 12, the view data relevant with the Measuring and testing object exports treatment facility 3 places to, and the multiplying power of treatment facility 3 outputs is adjusted signal be sent to multiplying power adjustment part 13, light quantity is adjusted signal be sent to light quantity adjustment part 15.
Designated equipment 5 is used for the arbitrfary point that is presented on the image on the display device 4, that expression Measuring and testing object is used is implemented to specify, and is used for the Measuring and testing instruction that is presented at display part 32 places is implemented to select.
Multiplying power adjustment part 13 can be passed through in enlarging section 11 in the picture pick-up device 2, and (1) in several fixedly enforcement switchings between multiplying power that differs from one another, (2) are being implemented to switch by required any multiplying power between predetermined multiplying power to another by predetermined multiplying power.Occasion for employing scheme (1), can between low range and high magnification, switch, so can when adjusting the Measuring and testing position, the low range image be presented on the display device 4, when implementing Measuring and testing, the high magnification image is presented on the display device 4, thereby can under level and smooth stable status, implements to detect.For the occasion of employing scheme (2), the image that is amplified to required any multiplying power can be presented on the image display 4, thereby can implement Measuring and testing according to the desirable multiplying power of user.
A kind of concrete form of the composition to metering and measuring equipment 1 describes below.Fig. 2 (A), the stereographic map that Fig. 2 (B) uses for this metering and measuring equipment cardinal principle of the expression form of the composition.The bottom of picture pick-up device 2 can be recessed shape (arch or door font).Enlarging section 11 is configured in the cardinal principle central portion place of this bottom according to implementing the mode that shooting is handled to the bottom direction of picture pick-up device 2.Therefore, the shooting processing can be stood and implement to picture pick-up device 2 voluntarily.Place, side at picture pick-up device 2 also disposes operating portion 16.Picture pick-up device 2 can be the size that staff is controlled easily, and can be connected with treatment facility 3 by cable.
If for instance, can utilize portable computer 6, constitute treatment facility 3, display device 4 and designated equipment 5 that the present invention uses.For the occasion that adopts portable computer 6, the main body that can utilize portable computer 6 is as treatment facility 3, utilize liquid crystal display part on the portable computer 6 as display device 4, and utilize keyboard on the portable computer 6 and touch plate as designated equipment 5.And, treatment facility 3, display device 4 and the designated equipment 5 that also can adopt the Table top type calculation mechanism to become the present invention to use.For the occasion that adopts the Table top type computing machine, can utilize basic computer as treatment facility 3, utilize its surveillance equipment as display device 4, and utilize its keyboard and mouse as designated equipment 5.
Occasion for can implement digital signal transfers between signal input and output portion 17 on the picture pick-up device 2 and the signal input and output portion 21 on the treatment facility 3 can also adopt the IO interface such as specifications such as RS-232C, USB, IEEE 1394.For the occasion that adopts this form of the composition, can be provided with at signal input and output portion 17 places view data is implemented the assembly that analog/digital (A/D) conversion is used, be provided with at signal input and output portion 21 places and implement the assembly that digital-to-analog (D/A) conversion is used.And, for the occasion that adopts this IO interface, can also implement power supply to picture pick-up device 2 by cable and supply with.
For between signal input and output portion 17 on the picture pick-up device 2 and the signal input and output portion 21 on the treatment facility 3, implementing the occasion that simulating signal is transmitted, can video signal interface be set in signal input and output portion 17 and signal input and output portion 21 places, and both be implemented to connect by video cables.For the occasion that adopts this form of the composition, can implement power supply to picture pick-up device 2 by other approach and supply with.
When utilizing the 1 pair of Measuring and testing object of metering and measuring equipment to implement Measuring and testing, the Measuring and testing object can be placed on the surface level such as work top etc., and the Measuring and testing object be arranged on the place, bottom of the enlarging section 11 in the picture pick-up device 2.In other words be exactly, picture pick-up device 2 can be carried and on the Measuring and testing object, carry out Measuring and testing for size shown in Fig. 2 (A), the Measuring and testing object the occasion bigger than the bottom of picture pick-up device 2.And, for size shown in Fig. 2 (B), the Measuring and testing object the occasion littler than the bottom of picture pick-up device 2, Measuring and testing is carried out in the recessed space place, bottom, that be arch or door font that the Measuring and testing object can be configured in the enlarging section 11 that is positioned on the picture pick-up device 2.
Constituted mode as described above, picture pick-up device 2 can be implemented change to enlargement ratio, so when carrying picture pick-up device 2 on the Measuring and testing object, can under the low range condition, implement shooting, and pass through on display device, to observe the mode of image to the enforcement adjustment of Measuring and testing position, and can when the position adjustment finishes, enlargement ratio be switched to the high magnification state, therefore can implement Measuring and testing to the Measuring and testing object expeditiously.
Picture pick-up device 2 is also as Fig. 2 (A), shown in Fig. 2 (B), can easily implement to move, and when mode is used portable computer 6 as described above, can also under the condition of size that can not metered detected object thing and the influence of Measuring and testing place, implement Measuring and testing to the Measuring and testing object.Therefore, no longer need the Measuring and testing object is carried on the work top that resembles the technology formerly, by microscope it is implemented to observe and Measuring and testing, so can implement Measuring and testing to the Measuring and testing object expeditiously.
Display image example to display device 4 places that are presented at metering and measuring equipment 1 describes below.Fig. 3 (A), Fig. 3 (B) are presented at the synoptic diagram that the display frame example is used at the display device place in this metering and measuring equipment for expression.And, for Fig. 3 (A), Fig. 3 (B) expression, the distance between two points on the tellite is implemented the occasion of Measuring and testing, when the Measuring and testing order button on the tool bar is implemented the some extract operation, can demonstrate the Measuring and testing project that can implement by metering and measuring equipment 1.By implementing the mode of some extract operation, can also implement to adjust by the enlargement ratio and the illumination light quantity of 3 pairs of picture pick-up devices 2 of treatment facility to being presented at multiplying power order button on the tool bar in the display device 4 and light and shade order button.
The Measuring and testing of utilizing 1 pair of Measuring and testing object of metering and measuring equipment to implement can be implemented according to following order.Fig. 4 uses as the metering and measuring equipment of the embodiment of the invention for explanation the Measuring and testing object is implemented the process flow diagram that the Measuring and testing process is used.Can at first operate operating portion 16 or designated equipment 5 on the picture pick-up device 2, the enlargement ratio of picture pick-up device 2 is set at low range (step 1).Picture pick-up device 2 is carried on the Measuring and testing object, and (step 2) implemented to adjust in the Measuring and testing position.
Subsequently, to the operating portion on the picture pick-up device 2 16 or designated equipment 5 implementation and operation once more, the enlargement ratio of picture pick-up device 2 is set at high magnification (step 3).At this moment, confirm to treat whether the object position of Measuring and testing is positioned at camera position place (step 4).For camera position and the occasion for the treatment of that the Measuring and testing position is different, implement further trickle adjustment (step 5).
The indication that the examiner can demonstrate according to display part 32 is implemented point to needed several arbitrfary points and is got processing (step 8).Control part 22 will be relevant with the instruction of the Measuring and testing selected information, with image on the relevant information of specified point, with the information that the enlargement ratio of picture pick-up device 2 is correlated with, be sent to Measuring and testing portion 23 places.Measuring and testing portion 23 implements computing according to received information, and operation result is sent to control part 22 (step 9).
Be example with the occasion of the distance of required any point-to-point transmission being implemented Measuring and testing below, an instantiation implementing Measuring and testing according to aforesaid each step is described.Processing mode until step 5 place is identical with the occasion of illustrated mistake, so omitted the detailed description to them here, only the processing mode after the step 6 is described below.After finishing the camera position adjustment of picture pick-up device 2 with respect to the Measuring and testing object, the examiner can utilize the mouse as designated equipment 5, and the Measuring and testing order button on the tool bar is implemented the some extract operation, to demonstrate Measuring and testing instruction complete list.Subsequently, distance between two points is implemented instruction enforcement selection (point is got) (step 6) of Measuring and testing.
At this moment, control part 22 can pass through signal input part 21, the operation signal that acquisition is provided by designated equipment 5, this signal is implemented to handle and be sent to image processing part 24, and the operational motion in the designated equipment 5 can be presented on the display device 4, by the selected Measuring and testing instruction that goes out of Measuring and testing portion 23 operation.Measuring and testing portion 23 can be according to the enlargement ratio data of picture pick-up device 2, and 2 position datas that point takes out are implemented computing (step 9).Subsequently, Measuring and testing portion 23 can be sent to control part 22 with the distance between two points data as operation result.Control part 22 is sent to image processing part 24 with these distance between two points data again, by image processing part 24 this distance between two points data conversion is become and can implement the literal of demonstration by display device 4, and will represent that the lteral data that this distance between two points is used is sent to display device 4.The pre-position of display device 4 on display part 32 according to the mode such as " distance that some 1-point is 2: 30 microns (μ m) ", implements to show to lteral data received, the expression distance between two points and instruction.
And it is self-evident, for to implement the occasion of Measuring and testing by any 3 definite radius of a circles, also can be according to the mode of all fours, instruction is implemented to select to specify to the radius Measuring and testing, and according to can on display device 4, demonstrating corresponding indicated number to the mode of three somes enforcement appointments, so can also implement to specify to three points according to this indication, and then radius of a circle is implemented Measuring and testing.
And, this metering and measuring equipment 1 not only can be according to foregoing mode, distance and (2) radius of a circle to (1) point-to-point transmission are implemented Measuring and testing, but also can implement various Measuring and testing as described below: the summit angle that (3) are determined by any three points, (4) straight line of determining by any two points, and the intersection point angle between the straight line of determining by two other point, (5) the round centre coordinate of determining by any three points, and the distance of center circle between the round centre coordinate of determining by other three points from, (6) straight line of determining by any two points, with respect to length by the perpendicular line of a bit determining in addition, (7) straight line of determining by any two points, with respect to by the distance between parallel lines of determining in addition a bit, (8) by two X-axis, article two, Y-axis totally four tetragonal lateral separations (X) that reference axis is surrounded, fore-and-aft distance (Y), diagonal distance (D), the zone that (9) are fenced up by the arbitrfary point (circle, polygon) area etc.And these Measuring and testing instructions and operation program all can be set in advance in control part 22 places, thereby make the user of metering and measuring equipment 1 can easily utilize these Measuring and testing instructions.
[second embodiment]
The block scheme that Fig. 5 uses as a kind of metering and measuring equipment cardinal principle form of the composition of the embodiment of the invention for expression.With identical part in the metering and measuring equipment as shown in Figure 1,, represent, and omitted detailed description them by identical reference number as first embodiment of the invention.This metering and measuring equipment 1 can be by picture pick-up device 2, treatment facility 3, and image display 4 and designated equipment 5 constitute.
Picture pick-up device 2 can have enlarging section 11, image pickup part 12, multiplying power adjustment part 13, Lighting Division 14, light quantity adjustment part 15, operating portion 16 and signal efferent 18.Image pickup part 12 can be by formations such as electric charge coupled mode (CCD) video cameras.Signal efferent 18 is used for the Measuring and testing object view data with image pickup part 12 shooting acquisitions, is sent to treatment facility 3 places.
The picture pick-up device 2 that the present invention uses can have two illuminators.In other words be exactly, Lighting Division 14 can have the top Lighting Division 14a that is implemented illumination by the oblique upper of Measuring and testing object, and the 14b of side lighting portion that is implemented illumination by the side direction of Measuring and testing object.Accordingly, light quantity adjustment part 15 can be by light quantity adjustment part, the top 15a that the light quantity of top Lighting Division 14a is implemented to adjust usefulness, and the side direction light quantity adjustment part 15b that the light quantity of side direction Lighting Division 14b implements to adjust usefulness is constituted.Can pass through operating portion 16, implement light quantity adjustment respectively top Lighting Division 14a and the 14b of side lighting portion, and the operation of lighting, extinguishing etc.
Designated equipment 5 can utilize cursor, implements to specify to being presented at arbitrfary point on the display device 4, that be arranged in Measuring and testing object image, and can implement to select to the Measuring and testing instruction that is presented at display part 32 places.
The enlarging section 11 and first embodiment in the picture pick-up device 2 are similar, can pass through multiplying power adjustment part 13, and (1) in several fixedly enforcement switchings between multiplying power that differs from one another, (2) are being implemented to switch by required any multiplying power between predetermined multiplying power to another by predetermined multiplying power.
Below according to Fig. 6 (A), Fig. 6 (B) describes a kind of concrete form of the composition of picture pick-up device 2.Fig. 6 (A), front view and sectional view that Fig. 6 (B) uses for the expression picture pick-up device.As Fig. 6 (A), shown in Fig. 6 (B), the profile of picture pick-up device 2 can be can stand voluntarily cylindrical, thereby can carry on the Measuring and testing object, along the bottom surface direction Measuring and testing object that has amplified is implemented shooting and handles.Picture pick-up device 2 can be the size that staff controls the easily size of beverage can (such as can be).Place, side at picture pick-up device 2, also be provided with the multiplying power operating portion 46, top light quantity operating portion 47a, the side direction light quantity operating portion 47b that are configured in operating portion 16 places, they can all be the dial (of a telephone) form in one embodiment, thereby can also enlargement ratio and light quantity be adjusted to needed arbitrary value by the rotating operation that each operating portion is implemented.
Be positioned at the cardinal principle center position of main casing 41 on the picture pick-up device 2, cylindrical shape, electric charge coupled mode (CCD) video camera 52 also be installed and amplify reducing glass 55.When picture pick-up device 2 being the form of standing is arranged on the Measuring and testing object voluntarily, can implementing shooting to the object that is positioned at the bottom surface side position along the cardinal principle vertical direction and handle.Locate at main casing 41 leading sections (bottom surface side), also focus pack 45 as bail handle portion is installed with rotary way as the upperside frame parts.45 places are formed with the threaded portion at focus pack, thereby can combine with being positioned at by implementing screw thread such as transparent resins such as third rare resins between threaded portions that make, cylindrical circular outer cover part 43 upper side end places.At outer cover part 43 places as the underside frame parts, also be formed with the notch 43a that several are arch according to predetermined space, thereby when picture pick-up device 2 being the form of standing is arranged on the Measuring and testing object voluntarily, can implement to confirm to the Measuring and testing position on the Measuring and testing object by the outside of outer cover part 43.And, can also be formed with eight juts according to equally spaced form at focus pack 45 places.
By rotating the mode of focus pack 45, can change the relative position of 41 of outer cover part 43 and main casings, thereby make picture pick-up device 2 produce telescopic moving.Adopt this mode, can change the leading section of amplification reducing glass 55 and the distance between the bottom surface, thereby when the Measuring and testing object is implemented the shooting processing, can focusing implement adjustment.If for instance, when focus pack 45 rotated when circle, and the relative position of 41 of main casings can change about one millimeter (mm).
In the office, following side of main casing 41, can also form flange part (ripple plays portion) along the flexible direction of outer cover part 43, and can form line of rabbet joint portion (groove) at outer cover part 43 places.Be the sliding gomphosis form between this flange part and line of rabbet joint portion, thereby when rotating focus pack 45, can also prevent that outer cover part 43 from producing corresponding rotation, and it can be moved along flexible direction.And, for when rotation focus pack 45 is implemented the focuses adjustment, can implement extruding to outer cover part 43 and fix, can also form lug boss (flange) 43b in the leading section on the outer cover part 43 (bottom surface side) office, outside portion with preset width.
Leading section on outer cover part 43 (bottom surface side) is located, outer cover part calibration plate 44 also detachably is installed, this outer cover part calibration plate 44 is used for according to implementing the mode that shooting is handled to the target location on the Measuring and testing object, picture pick-up device 2 is implemented to carry handle.This outer cover part calibration plate 44 can be disc-shape, be pasted with in the surface and prevent to scratch the film (is the film of " テ Off ロ Application " such as can adopt registered trademark) that the detected object thing uses that is measured, and also be formed with through hole 44a with preset aperture in the cardinal principle central position.If for instance, can also be formed with the several holes 44b that is fan-shaped at the location about place of hole 44a, so that can implement to confirm to the other parts on the object easily.And, the location about place of the hole 44a on outer cover part calibration plate 44, can also according to when by the 14b of side lighting portion when the Measuring and testing object is implemented light beam irradiates, can not implement inclined cut and handle the predetermined angular that light beam not produce shading.In other words be exactly it is formed grind the cup shape.
And outer cover part calibration plate 44 can be implemented dismounting in the manner described above, when outer cover part calibration plate 44 is not installed, also can implements shooting and handle.And, can also adopt the outer cover part calibration plate of other shape, replace this outer cover part calibration plate 44.If for instance, movable outer cover part calibration plate can also be installed in calibration portion place, thereby be using calibration portion and not using under the state of calibration portion, all can not take off the form of the composition of outer cover part calibration plate 44.
And, can also take off outer cover part 43, and it is replaced by the outer cover part that is other shape.Adopt this constituted mode, can also implement to change to lower case, handle with the shooting of implementing to adapt with the Measuring and testing object corresponding to the kind of Measuring and testing object.
If for instance, picture pick-up device 2 can be implemented continuous magnification transformable between 50 times～400 times, and can be the form of the composition of easily enlargement ratio being set, switched to 50 times, 100 times, 200 times and 400 times.And, can also lens subassembly further be installed in the front end of amplifying reducing glass 55, so that can between 125 times～1000 times, implement magnification transformable.
2 pairs of Measuring and testing objects of picture pick-up device are implemented the Lighting Division that light beam irradiates is used, and can have foregoing two illuminators.As Fig. 6 (A), shown in Fig. 6 (B), top Lighting Division 14a can by be positioned at amplify reducing glass 55 leading section vicinity, constitute by rounded several the high briliancy white light-emitting diodes (LED) that disposing of predetermined space.Top Lighting Division 14a can be for the object that is positioned at the bottom surface side central position, according to become the mode of predetermined angle theta 1 to implement light beam irradiates with the bottom surface.The 14b of side lighting portion can by be positioned near position outer cover part 43 inside bottom surface, constitute by rounded several the high briliancy white light-emitting diodes (LED) that disposing of predetermined space.The 14b of side lighting portion can be for the object that is positioned at the bottom surface side central position, according to become the mode of predetermined angle theta 2 to implement light beam irradiates with the bottom surface.The shape of Measuring and testing object may differ from one another, and has the occasion of surface level for the Measuring and testing object, and it is more intense to reflex to the folded light beam of amplifying reducing glass 55 places by object when angle θ 1 spends near 90, halation may occur.Therefore, preferably angle θ 1 is set in 60～75 degree.When angle θ 2 is bigger, will be difficult to obtain the stereoscopic sensation of object.Therefore, preferably angle θ 2 is set in 0～15 degree.When implementing to check, can be by operation to operating portion 16, respectively the light quantity of top Lighting Division 14a and the 14b of side lighting portion is implemented to adjust, thereby can make each surface on the Measuring and testing object be different bright-dark degrees, have relief image so that can on display device 4, demonstrate.
Can also adopt illuminating bundle except that white light beam, that be other color that the Measuring and testing object is implemented illumination.If for instance, can also adopt redness and green beam that the Measuring and testing object is implemented to check easily.And, can also adopt can be to the form of the composition of top Lighting Division 14a in the picture pick-up device 2 and the 14b of side lighting portion enforcement replacing, thereby can be by substrate with the light emitting diode (LED) that other color is installed, to the mode that the tellite enforcement that high briliancy white light-emitting diode (LED) is installed is changed, use other color beam except white light beam that object is implemented irradiation.
A kind of concrete form of the composition to metering and measuring equipment 1 describes below.Fig. 7 (A), the stereographic map that Fig. 7 (B) uses for a kind of cardinal principle form of the composition of expression metering and measuring equipment.This picture pick-up device 2 can be as previously mentioned, and its profile is the cylindrical shape that can stand voluntarily, and can be connected with Measuring and testing treatment facility 3 by cable 7.
If for instance, can utilize portable computer 6, constitute Measuring and testing treatment facility 3 of the present invention, image display 4 and designated equipment 5.For the occasion that adopts portable computer 6, the main body that can utilize portable computer 6 is as Measuring and testing treatment facility 3, utilize liquid crystal display part on the portable computer 6 as image display 4, and utilize keyboard on the portable computer 6 and touch plate as designated equipment 5.For the occasion that is connected with mouse, also can utilize mouse as designated equipment 5.Certainly, also can adopt the Table top type calculation mechanism to become Measuring and testing treatment facility 3 of the present invention, image display 4 and designated equipment 5.For the occasion that adopts the Table top type computing machine, can utilize basic computer as Measuring and testing treatment facility 3, utilize surveillance equipment as image display 4, and utilize keyboard and mouse as designated equipment 5.
For as shown in Figure 5, between the signal efferent 18 and the signal input part 21 on the treatment facility 3 on the picture pick-up device 2, the occasion of digital signal transfers can be implemented by cable 7, IO interface can also be adopted such as specifications such as RS-232C, USB, IEEE 1394.For the occasion that adopts this form of the composition, can be provided with at signal efferent 18 places view data is implemented the assembly that analog/digital (A/D) conversion is used, be provided with at signal input part 21 places and implement the assembly that digital-to-analog (D/A) conversion is used.And, for the occasion that adopts this IO interface, can also implement power supply to picture pick-up device 2 by cable 7 and supply with.
For between signal efferent 18 on the picture pick-up device 2 and the signal input part 21 on the treatment facility 3, implementing the occasion that simulating signal is transmitted, can video signal interface be set at signal efferent 18 and signal input part 21 places, and both be implemented to connect by video cables.For the occasion that adopts this form of the composition, can implement power supply to picture pick-up device 2 by other approach and supply with.
When utilizing 1 pair of Measuring and testing object of metering and measuring equipment to implement Measuring and testing, the Measuring and testing object can be placed on the surface level such as work top etc., and the 44a place, hole that is installed in the cardinal principle center position on the outer cover part calibration plate 44 that leading section on the picture pick-up device 2 (bottom surface side) locates can be positioned at, mode according to aiming at the part enforcing location that will be implemented the shooting processing is arranged on picture pick-up device 2 on the Measuring and testing object.In other words be exactly, picture pick-up device 2 can be carried and on the Measuring and testing object, carry out Measuring and testing for size shown in Fig. 7 (A), the Measuring and testing object the occasion bigger than the bottom of picture pick-up device 2.And, for size shown in Fig. 7 (B), the Measuring and testing object the occasion littler, the Measuring and testing object can be configured in the processing of making a video recording under the outer cover part calibration plate 44 that is positioned on the picture pick-up device 2 than the bottom of picture pick-up device 2.And, also the outer cover part calibration plate 44 on the picture pick-up device 2 can be taken off, the shooting processing is implemented in the inboard that the Measuring and testing object is arranged on outer cover part 43.
Mode as described above, picture pick-up device 2 can be implemented change to enlargement ratio, so when carrying picture pick-up device 2 on the Measuring and testing object, can under the low range condition, implement shooting, and the Measuring and testing position is implemented to adjust by the mode of on display device, observing image, but also can when the position adjustment finishes, enlargement ratio be switched to the high magnification state, therefore can implement Measuring and testing to the Measuring and testing object expeditiously.
And, shown in Fig. 7 (B), can utilize picture pick-up device 2 and portable computer 6 to constitute this metering and measuring equipment 1, thereby can move whole metering and measuring equipment 1 easily as Fig. 7 (A).And, metering and measuring equipment of the present invention 1 since as described above mode use portable computer 6, so no longer need to use special-purpose treatment facility and image display, therefore can reduce cost.
For the view data enforcement demonstration that only needs obtaining, and implement the occasion that image is confirmed, can also adopt the form of the composition as described below by picture pick-up device 2 shootings.Make picture pick-up device 2 be the form of the composition of exporting simulating signal, and with the simulating signal output plug on the picture pick-up device 2, directly with dispose video signal input terminal, be connected such as the image display 4 of surveillance equipment etc.Adopt this form of the composition, can also adopt surveillance equipment with low cost to implement structure, thereby can also obtain a kind ofly to constitute simple, with low cost and can under high magnification, implement the metering and measuring equipment of visual inspection.
To the metering checkout program on the image display 4 that is presented at metering and measuring equipment 1 one shows that example describes below.Fig. 8 (A), the synoptic diagram that the display frame example is used that Fig. 8 (B) uses for the metering checkout program in the expression metering and measuring equipment.This metering checkout program can be pre-configured in the portable computer 6 for operation.
At Fig. 8 (A), the tellite image that obtains for shooting among Fig. 8 (B) is to adopt trellis scale (square frame) form that can simply implement to calculate to size to implement to show.Metering and measuring equipment 1 can according to the corresponding mode of the switch magnification of picture pick-up device 2, these trellis scales are implemented to switch.If for instance, can between 50 times～400 times, implement continuous magnification transformable for picture pick-up device 2, and the occasion that is the form of the composition of easily enlargement ratio being set, switched to 50 times, 100 times, 200 times and 400 times can also make the image display 4 can be easily to implementing to set with the corresponding trellis scale of these four kinds of multiplying powers.In other words be exactly, can be the form of the trellis scale 61 on the display part 32 shown in Fig. 8 (A), that be presented at image display 4 as the trellis scale that the regulation multiplying power is used.And, also can be the form of the reference shown in Fig. 8 (B) with trellis scale 62.Adopt this form of the composition, metering and measuring equipment 1 can also be by the mode of operation metering checkout program, even do not use the Measuring and testing instruction also can implement Measuring and testing to size and distance etc. simply.
Though the trellis scale that is presented on the image display 4 is simple, but how much understand some error, yet, just can implement Measuring and testing to size accurately when utilizing after benchmark trellis scale and benchmark determine with program the trellis scale that is presented at display part 32 places to be implemented to proofread and correct.If be exactly concretely, metering checkout program can be switched to correction mode, will be presented at display part 32 places to the image that benchmark trellis scale enforcement shooting obtains, and the distance of benchmark trellis scale point-to-point transmission will be implemented Measuring and testing.Distance according to point-to-point transmission on the benchmark trellis scale is implemented to proofread and correct to the Measuring and testing result, and demonstrates revised value subsequently.Implementing to proofread and correct at the trellis scale, and using Measuring and testing trellis scale to implement after the Measuring and testing in the following manner, just can be to implementing correct Measuring and testing such as distance between two points and area etc.
When Fig. 9 (A), Fig. 9 (B) implement Measuring and testing according to the Measuring and testing instruction to the Measuring and testing object for the expression metering and measuring equipment, be presented at a synoptic diagram that the display frame example is used on the display device.For Fig. 9 (A), Fig. 9 (B) expression, distance between two points is implemented the occasion of Measuring and testing, when the Measuring and testing order button on the tool bar is implemented the some extract operation, can demonstrate the Measuring and testing project that can implement by metering and measuring equipment 1.
And it is self-evident, for to implement the occasion of Measuring and testing by any 3 definite radius of a circles, also can be according to the mode of all fours, instruction is implemented to select to specify to the radius Measuring and testing, and according to can on display device 4, demonstrating corresponding indicated number to the mode of three somes enforcement appointments, so can also implement to specify to three points according to this indication, and then radius of a circle is implemented Measuring and testing.
And, as the metering and measuring equipment 1 of second embodiment with similar as the metering and measuring equipment of first embodiment, also can be to such as various amounts such as the distance of (1) point-to-point transmission and (2) radius of a circle are implemented Measuring and testing.And these Measuring and testing instructions and operation program all can be set in advance in control part 22 places, thereby make the user of metering and measuring equipment 1 can easily use these Measuring and testing instructions.
And metering and measuring equipment 1 not only can utilize the Measuring and testing instruction that the Measuring and testing object is implemented Measuring and testing, can also implement to apply in a flexible way to the Measuring and testing data and the view data of object.In other words be exactly, can also implement accumulation Measuring and testing data and view data, and as implementing output for the data that form software for calculation assembly uses.If for instance,,, can also adopt the mode of the precalculated position on several tellites being implemented inspection in order to implement to confirm to the substandard product and the position deviation that occur for the tellite of same kind.Figure 10 (A), Figure 10 (B) exports the synoptic diagram that the data at form software for calculation assembly place are used to for expression.In general, image can be sticked in the form software for calculation, thus can be shown in Figure 10 (A), the view data of each tellite is become a table with the Measuring and testing data creating, and implement output with data as form software for calculation assembly.And can shown in Figure 10 (B), implement accumulation, and gather the back in enforcement and implement output with data as form software for calculation assembly to the Measuring and testing data of several tellites.Metering and measuring equipment constructed according to the invention utilizes this function, can also utilize the form software for calculation assembly that sets in advance in computing machine, the Measuring and testing data is implemented processing handle.If can also obtain for instance, maximal value, minimum value, mean value, standard deviation of Measuring and testing data etc. easily.
And, because the treatment facility 3 and the display device 4 that can utilize portable computer 6 to constitute in the metering and measuring equipment of the present invention, so when this portable computer is connected with the LAN of factory and enterprises, Measuring and testing data that can also obtain by metering and measuring equipment and transfer to other computing machine by the view data that shooting obtains and use, thus these data can be used more neatly.If for instance, the computing machine of quality management department can also be easily to implementing affirmation in the Measuring and testing data of checking on-the-spot Measuring and testing object that obtain by metering and measuring equipment of the present invention, relevant and view data, and can be to applying the worker in fact flexible Application.
In the superincumbent explanation, be that example describe as metering and measuring equipment of the present invention with metering detected object thing with tellite, yet the present invention is not limited to this, the present invention can also be applied in and implement to amplify Measuring and testing in each technical field.If for instance, when implementing retrofit, all can utilize metering and measuring equipment provided by the invention easily to implement visual inspection and Measuring and testing such as the equipment of liquid crystal display, plasma display panel device, shielding photo etched mask process equipment, lead frame process equipment etc.
Claims (5)
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001315712A JP3774390B2 (en) | 2001-10-12 | 2001-10-12 | Measuring device |
| JP315712/2001 | 2001-10-12 | ||
| JP315712/01 | 2001-10-12 | ||
| JP275259/02 | 2002-09-20 | ||
| JP2002275259A JP2004109836A (en) | 2002-09-20 | 2002-09-20 | Magnifying/imaging apparatus, measurement device and measurement program |
| JP275259/2002 | 2002-09-20 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200510085125XA Division CN100368766C (en) | 2001-10-12 | 2002-10-11 | Enlarged camera equipment and metrology testing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1412520A CN1412520A (en) | 2003-04-23 |
| CN1256565C true CN1256565C (en) | 2006-05-17 |
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ID=26623882
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN02131156.0A Expired - Fee Related CN1256565C (en) | 2001-10-12 | 2002-10-11 | Enlarged camera equipment and metrology testing equipment |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN1256565C (en) |
| TW (1) | TW561796B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101448098B (en) * | 2007-11-28 | 2014-05-28 | 索尼株式会社 | Imaging apparatus and method, and information processing apparatus and method |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7869645B2 (en) * | 2008-07-22 | 2011-01-11 | Seiko Epson Corporation | Image capture and calibratiion |
| US8269836B2 (en) * | 2008-07-24 | 2012-09-18 | Seiko Epson Corporation | Image capture, alignment, and registration |
| KR101572378B1 (en) * | 2014-08-04 | 2015-11-27 | 엘지디스플레이 주식회사 | Display device having touch sensors |
| DE102017207071A1 (en) * | 2017-04-27 | 2018-10-31 | Robert Bosch Gmbh | Test device for optical inspection of an object and object inspection arrangement |
-
2002
- 2002-10-09 TW TW091123243A patent/TW561796B/en not_active IP Right Cessation
- 2002-10-11 CN CN02131156.0A patent/CN1256565C/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101448098B (en) * | 2007-11-28 | 2014-05-28 | 索尼株式会社 | Imaging apparatus and method, and information processing apparatus and method |
Also Published As
| Publication number | Publication date |
|---|---|
| TW561796B (en) | 2003-11-11 |
| CN1412520A (en) | 2003-04-23 |
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