CN113915809B - A local cooling structure for the window flange of a high vacuum and high temperature operation device - Google Patents
A local cooling structure for the window flange of a high vacuum and high temperature operation device Download PDFInfo
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- CN113915809B CN113915809B CN202010650769.3A CN202010650769A CN113915809B CN 113915809 B CN113915809 B CN 113915809B CN 202010650769 A CN202010650769 A CN 202010650769A CN 113915809 B CN113915809 B CN 113915809B
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- 238000001816 cooling Methods 0.000 title claims abstract description 82
- 238000007789 sealing Methods 0.000 claims abstract description 169
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 5
- 238000005516 engineering process Methods 0.000 abstract description 5
- 239000002184 metal Substances 0.000 abstract description 4
- 238000012545 processing Methods 0.000 abstract description 3
- 230000017525 heat dissipation Effects 0.000 abstract description 2
- 238000003466 welding Methods 0.000 description 11
- 239000012535 impurity Substances 0.000 description 8
- 238000003745 diagnosis Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 4
- 238000007599 discharging Methods 0.000 description 3
- 230000004927 fusion Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D1/00—Devices using naturally cold air or cold water
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D1/00—Devices using naturally cold air or cold water
- F25D1/02—Devices using naturally cold air or cold water using naturally cold water, e.g. household tap water
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Pressure Vessels And Lids Thereof (AREA)
Abstract
本发明属于冷却结构，具体涉及一种高真空高温运行装置上窗口法兰的局部冷却结构。一种高真空高温烘烤运行装置上法兰的局域冷却结构，包括内密封结构，内密封结构的内壁为内密封面，内密封面的形状与内部零件的形状相匹配，在内密封结构上方端面设置外密封结构体，外密封结构体下方与内密封结构固定连接，外密封结构体的下端形成外密封面，外密封结构体上方设置外密封压盘，外密封结构体与外密封压盘之间设置诊断窗口。本发明的显著效果是：金属密封和橡胶密封为一体式结构，冷却管道直接对内外两个高真空密封面进行冷却，不需要外接水道，结构紧凑，加工工艺简单，水道导流良好，散热能力强，冷却效率高。
The present invention belongs to a cooling structure, and specifically relates to a local cooling structure of a window flange on a high vacuum and high temperature operating device. A local cooling structure of a flange on a high vacuum and high temperature baking operating device includes an inner sealing structure, the inner wall of the inner sealing structure is an inner sealing surface, the shape of the inner sealing surface matches the shape of the internal parts, an outer sealing structure is arranged on the upper end face of the inner sealing structure, the lower part of the outer sealing structure is fixedly connected to the inner sealing structure, the lower end of the outer sealing structure forms an outer sealing surface, an outer sealing pressure plate is arranged above the outer sealing structure, and a diagnostic window is arranged between the outer sealing structure and the outer sealing pressure plate. The significant effect of the present invention is that the metal seal and the rubber seal are an integrated structure, the cooling pipe directly cools the inner and outer high vacuum sealing surfaces, no external water channel is required, the structure is compact, the processing technology is simple, the water channel has good flow guidance, the heat dissipation capacity is strong, and the cooling efficiency is high.
Description
Technical Field
The invention belongs to a cooling structure, and particularly relates to a local cooling structure of a window flange on a high-vacuum high-temperature operation device.
Background
Impurities in a magneto-restrictive fusion device, which are mainly derived from residual gases retained on the walls and part of the internal component materials and which will be discharged outwards during the discharge, have a very large influence on the plasma discharge, the confinement quality and the safe operation of the device. The current means for high temperature baking or high temperature wall operation of the device under high vacuum conditions is to release residual gases, especially water vapor and impurities containing oxygen components, retained on the surfaces of the device and internal components, and to pump these impurities out through a vacuum pump. Generally, the higher the temperature of the baking operation, the higher the density and pressure of the impurities and vapors, and the easier it is to release from the walls, the higher the baking temperature needs to be in order to obtain a cleaner vacuum and wall environment.
The current world main high temperature operation experiment device can be divided into three types according to baking temperature capability, wherein (1) about 100 ℃ is adopted by most of the current middle and small devices, the devices have smaller volume, main vapor impurities can be discharged through common baking, then the plasma is used for continuously bombarding the wall of an exercise device in the discharging process to realize the discharge of the impurities, (2) about 200 ℃ is mainly used for discharging the vapor, the section is mainly represented by a device such as British MAST and the like, (3) about 300 ℃ is mainly used for discharging the impurities in the interior and small gaps of materials, the impurities on the wall have very good cleaning effect, and the devices such as an international thermonuclear fusion experimental reactor (ITER), an American DIII-D and the like are all baked at 300 ℃, and the largest fusion experiment device in China (China) (HL-2M Tokamak) which is being built is baked at 300 ℃.
However, under the prior art condition, some diagnostic components and measurement windows cannot withstand high temperatures of 300 ℃, for example, the most commonly used O-rings can only reach 180 ℃ at most, and some electronic components can only work to 100 ℃ at most, so that special local cooling structures or processes are required to protect the windows and components. Current DIII-D devices use glass metallization for some small diagnostic windows and then can be sealed with metal. For some larger diagnostic windows (CF 200 or more, runway window) due to high temperature stress, etc., the mode of welding quartz glass and metal cannot be directly adopted, but a pipeline is led out from the device, and the temperature difference of the stainless steel pipeline is used for cooling. But this approach will increase the window-to-plasma distance, affecting the solid angle of the diagnostic measurement. The spiral cooling water flow is arranged on the pipeline, so that the cooling water flow needs to be welded for a plurality of times, the processing technology is relatively complex, and the large-area cooling pipeline not only affects the whole baking effect, but also affects the measuring visual field.
Disclosure of Invention
The invention aims at the defects of the prior art, and provides a local cooling structure technology of a flange on a high-vacuum high-temperature operation device, which only aims at the flange end surface and a knife edge part to be protected for cooling.
The invention discloses a local cooling structure of a flange on a high-vacuum high-temperature baking operation device, which comprises an inner sealing structure, wherein the inner wall of the inner sealing structure is an inner sealing surface, the shape of the inner sealing surface is matched with that of an internal part, an outer sealing structure body is arranged on the upper end surface of the inner sealing structure, the lower part of the outer sealing structure body is fixedly connected with the inner sealing structure, the lower end of the outer sealing structure body forms an outer sealing surface, an outer sealing pressure plate is arranged above the outer sealing structure body, and a diagnosis window is arranged between the outer sealing structure body and the outer sealing pressure plate.
The local cooling structure of the flange on the high-vacuum high-temperature baking operation device comprises a connecting surface of the outer sealing structure body and the inner sealing structure body, wherein the connecting surface of the outer sealing structure body and the inner sealing structure body form a cavity, the cavity is a cooling channel, the cooling channel is communicated with the outside through an external cooling inlet and outlet pipeline, and the external cooling inlet and outlet pipeline is fixedly connected with the outer sealing structure body.
The local cooling structure of the flange on the high-vacuum high-temperature baking operation device is characterized in that the inner sealing structure and the outer sealing structure are fixedly connected through the first ultrahigh vacuum sealing welding.
The local cooling structure of the flange on the high-vacuum high-temperature baking operation device is characterized in that the external inlet and outlet cooling pipeline is fixedly connected with the external sealing structure body through the second ultrahigh vacuum sealing welding.
The local cooling structure of the flange on the high-vacuum high-temperature baking operation device is characterized in that an inner sealing screw hole is formed in the outer sealing structure body, and the outer sealing structure body is fixedly connected with the edge surface of the flange through a screw arranged in the inner sealing screw hole.
The local cooling structure of the flange on the high-vacuum high-temperature baking operation device is characterized in that the outer sealing structure body and the outer sealing pressure plate are provided with screw holes with matched positions, the two positions are matched to form the outer sealing screw holes, and the outer sealing structure body and the outer sealing pressure plate are fixedly connected through screws arranged in the outer sealing screw holes.
The local cooling structure of the flange on the high-vacuum high-temperature baking operation device is characterized in that the cooling channel is arranged for more than one circle along the outer sealing surface of the outer sealing structure body.
The local cooling structure of the flange on the high-vacuum high-temperature baking operation device is characterized in that a cooling sealing ring is further arranged between the outer sealing structure and the diagnosis window.
The local cooling structure of the flange on the high vacuum high temperature baking operation device is characterized in that the vacuum leakage rate of the first ultrahigh vacuum sealing welding 3 and the second ultrahigh vacuum sealing welding 6 is less than 1.0 multiplied by 10 -10Pam3/sec.
The local cooling structure of the flange on the high-vacuum high-temperature baking operation device is characterized in that the inner sealing surface is a high-vacuum step sealing structure or a knife edge sealing structure, the sealing structure is matched with the vacuum flange structure of the device, and the outer sealing surface is a high-finish sealing surface.
The local cooling structure of the flange on the high-vacuum high-temperature baking operation device is characterized in that the cooling channel is a water cooling channel or an air cooling channel.
The local cooling structure of the flange on the high vacuum high temperature baking operation device is characterized in that a corrugated pipe is arranged in the outer sealing structure body, and the corrugated pipe divides the outer sealing structure body into an inner part and an outer part.
The invention has the remarkable effects that the metal seal and the rubber seal are integrated, the cooling pipeline directly cools the inner vacuum sealing surface and the outer vacuum sealing surface, an external water channel is not needed, the structure is compact, the processing technology is simple, the water channel has good flow guide, the heat dissipation capacity is strong, and the cooling efficiency is high.
Drawings
Fig. 1 is a schematic diagram of a local cooling structure of a flange on a high vacuum high temperature baking operation device provided by the invention.
The device comprises a 1-inner sealing structure, a 2-inner sealing surface, a 3-first ultrahigh vacuum sealing welding, a 4-outer sealing structure, a 5-cooling channel, a 6-second ultrahigh vacuum sealing welding, a 7-external inlet and outlet cooling pipeline, an 8-cooling sealing ring, a 9-outer sealing surface, a 10-diagnosis window, an 11-outer sealing screw hole, a 12-inner sealing screw hole and a 13-outer sealing pressure plate.
Detailed Description
As shown in fig. 1, a local cooling structure of a flange on a high vacuum high temperature baking operation device,
The device comprises an inner sealing structure 1, a sealing surface 2, a first ultrahigh vacuum sealing weld 3, an outer sealing structure body 4, a cooling channel 5, a second ultrahigh vacuum sealing weld 6, an external inlet and outlet cooling pipeline 7, a cooling sealing ring 8, an outer sealing surface 9, a diagnosis window 10, an outer sealing screw hole 11, an inner sealing screw hole 12 and the like. The connection mode is that an inner sealing surface 2 of an inner sealing structure 1 is connected with a flange knife edge surface of the device through an inner sealing screw hole 12, the end surface of the inner sealing structure 1 is connected with an inner end surface of an outer sealing structure body 4 through a first ultrahigh vacuum sealing weld 3, a cooling channel 5 with a moderate space is reserved between the two structures, the cooling channel 5 is required to be arranged for more than one circle along a sealing surface 9 of the outer sealing structure body 4 and led out from the edge through an external inlet and outlet pipeline, the cooling channel 5 is connected with the external inlet and outlet cooling pipeline 7 through a second ultrahigh vacuum sealing weld 6 on the side surface of the outer sealing structure body 4, the sealing outer end surface of the outer sealing structure body 4 is connected with a diagnosis window 10 through an outer sealing screw hole 11 through a cooling sealing ring 8 surface, and an outer sealing pressure plate 13 is connected with the outer sealing structure body 4 through screws.
The first ultrahigh vacuum seal welding 3 and the second ultrahigh vacuum seal welding 6 are of the same high vacuum seal welding structure and method, and the vacuum leakage rate is required to be less than 1.0X10 -10Pam3/sec.
The cooling sealing ring 8 is a rubber ring which can not bear high temperature of approximately 300 ℃, such as a furs rubber ring, and is cooled by the structure of the invention to be within the bearable range of the O ring, namely, below 180 ℃.
The inner sealing surface 2 on the inner sealing structure 1 is a high vacuum step sealing structure or a knife edge sealing structure, the sealing structure is matched with a vacuum flange structure of the device, the outer sealing surface 9 is a high-finish sealing surface, and the vacuum leakage rate requirement of the device needs to be met.
The cooling channel 5 can be water-cooled or air-cooled, and the aperture of the pipeline is determined by the temperature difference required to be cooled, the cooling medium, the heat conductivity of the material, the flow rate and other factors.
The diagnostic window 10 is determined by factors such as the structure and materials required for diagnosis.
When the temperature of the device is very high and reaches more than 300 ℃, the outer sealing structure body 4 can be divided into an inner part and an outer part by using the corrugated pipe, so that the effect of increasing the thermal resistance can be achieved, and in addition, the thermal stress caused by higher temperature difference can be relieved.
The flange knife edge surface of the device is connected with an inner sealing surface 2 of an inner sealing structure 1, the end surface of the inner sealing structure 1 is connected with an inner end surface of an outer sealing structure body 4 through a first ultrahigh vacuum sealing weld 3, a cooling channel 5 with a moderate space is reserved between the two structures, the cooling channel 5 is required to be arranged for more than one circle along a sealing surface 9 of the outer sealing structure body 4 and led out from the edge through an external inlet and outlet pipeline, the cooling channel 5 is connected with an external inlet and outlet cooling pipeline 7 through a second ultrahigh vacuum sealing weld 6 on the side surface of the outer sealing structure body 4, and the sealing outer end surface of the outer sealing structure body 4 is connected with a diagnosis window 10 and an external sealing pressure disc 13 through a cooling sealing ring 8 surface.
In the present invention, the terms "first" and "second" do not denote any logical order or importance, but rather are used to distinguish one element from another.
Compared with the prior art, the invention has the advantages that the common cooling structure adopts a water-cooling pipe to be directly welded on the pipeline, which requires a certain length of neck between the inner flange and the outer flange, and the cooling efficiency is not very good. The cooling pipeline provided by the invention is directly arranged between the two sealing surfaces, and only acts on the local part needing cooling, thereby protecting the outer sealing surface and not affecting the baking or hot wall operation of the device. In addition, the cooling technology provided by the invention is an integrated welding structure, the water channel has good flow guide, the structure is compact, and the occupied space is small.
The present invention is not limited to the above-described embodiments, and various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the spirit of the present invention, and still fall within the scope of the present invention, as will be understood by those of ordinary skill in the art.
Claims (8)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010650769.3A CN113915809B (en) | 2020-07-08 | 2020-07-08 | A local cooling structure for the window flange of a high vacuum and high temperature operation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010650769.3A CN113915809B (en) | 2020-07-08 | 2020-07-08 | A local cooling structure for the window flange of a high vacuum and high temperature operation device |
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| Publication Number | Publication Date |
|---|---|
| CN113915809A CN113915809A (en) | 2022-01-11 |
| CN113915809B true CN113915809B (en) | 2025-03-14 |
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Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN212962327U (en) * | 2020-07-08 | 2021-04-13 | 核工业西南物理研究院 | Local cooling structure of window flange on high-vacuum high-temperature operation device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| GB1364983A (en) * | 1971-05-07 | 1974-08-29 | Kernforschung Gmbh Ges Fuer | Evacuatable chamber for heat treatment of workpieces |
| CH633413A5 (en) * | 1978-11-08 | 1982-12-15 | Prometheus Ag Fabrik Elektrisc | Oven door with inspection window |
| SU1000659A1 (en) * | 1981-05-13 | 1983-02-28 | Московский Институт Электронного Машиностроения | Quick-release super-high vacuum sealing assembly |
| JP4051038B2 (en) * | 2004-02-10 | 2008-02-20 | エスペック株式会社 | Pipe heater manufacturing method and pipe heater |
| KR101187701B1 (en) * | 2010-04-07 | 2012-10-10 | 단국대학교 산학협력단 | Baking device for linear structure bodies |
| KR101852113B1 (en) * | 2013-12-05 | 2018-04-25 | 박상만 | heat treatment vacuum furnace |
| CN107723425A (en) * | 2017-09-21 | 2018-02-23 | 江苏恒力炉业有限公司 | A kind of high-efficiency vacuum annealing furnace |
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| CN212962327U (en) * | 2020-07-08 | 2021-04-13 | 核工业西南物理研究院 | Local cooling structure of window flange on high-vacuum high-temperature operation device |
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