CN113634188B - Be used for abluent accurate liquid equipment of joining in marriage of graphite boat - Google Patents
Be used for abluent accurate liquid equipment of joining in marriage of graphite boat Download PDFInfo
- Publication number
- CN113634188B CN113634188B CN202110872547.0A CN202110872547A CN113634188B CN 113634188 B CN113634188 B CN 113634188B CN 202110872547 A CN202110872547 A CN 202110872547A CN 113634188 B CN113634188 B CN 113634188B
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- Prior art keywords
- pumping
- cleaning
- cleaning tank
- pipeline
- raw material
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- 239000007788 liquid Substances 0.000 title claims abstract description 37
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 24
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 24
- 239000010439 graphite Substances 0.000 title claims abstract description 24
- 238000005304 joining Methods 0.000 title description 2
- 238000004140 cleaning Methods 0.000 claims abstract description 100
- 238000005086 pumping Methods 0.000 claims abstract description 93
- 239000002994 raw material Substances 0.000 claims abstract description 45
- 239000012895 dilution Substances 0.000 claims abstract description 23
- 238000010790 dilution Methods 0.000 claims abstract description 23
- 238000002360 preparation method Methods 0.000 claims abstract description 16
- 238000002156 mixing Methods 0.000 claims abstract description 11
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 6
- 229910000976 Electrical steel Inorganic materials 0.000 claims description 3
- 238000009826 distribution Methods 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000007865 diluting Methods 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910021383 artificial graphite Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 description 1
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention provides accurate liquid preparation equipment for graphite boat cleaning, which comprises a cleaning tank group and a liquid preparation mechanism; the cleaning tank group comprises a supporting frame, a cleaning tank and a pipeline; the liquid preparation mechanism comprises a raw material pipe, a mixing pipe and a pumping mechanism. The invention can configure the quantity and the concentration of the required cleaning liquid according to the quantity and the using degree of the cleaned graphite boats, and reduces the cleaning cost while ensuring the cleaning efficiency; the novel liquid preparation mechanism is matched with the pumping spring through the magnetic attraction generated by the electro-magnetic principle, so that the accurate pumping of liquid preparation raw materials in each raw material pipe is realized while the existing manual configuration and piston pumping mode are effectively replaced, and the cleaning quality of cleaning liquid is ensured; a dilution pipeline is further arranged between the cleaning tanks and can be used for diluting the cleaning liquid flowing into the next-stage cleaning tank so as to ensure that various parts after the graphite boat is disassembled can be cleaned separately, and the pertinence is stronger; novel structure, convenient production and manufacture, good practicality and market prospect.
Description
Technical Field
The invention belongs to the technical field of photovoltaics, and particularly relates to accurate liquid preparation equipment for cleaning a graphite boat.
Background
The graphite boat is a graphite mould, which is a carrier, and can be used for sintering and forming the raw materials and parts which need to be positioned or shaped at high temperature.
The graphite boat is made of artificial graphite through mechanical processing, and all the graphite and carbon-carbon composite materials are characterized by low impurity content, high purity, high corrosion resistance, stable physicochemical property, high strength at high temperature, strong sputtering resistance, moderate electrical conductivity and high thermal conductivity. Generally, the graphite boat should be cleaned after running 100 to 120 times, and after the times are reached, the silicon wafer will turn red, because the SiN on the boat will increase with the increase of the running times, which affects the normal use of the boat. For this reason, the graphite boat is cleaned periodically.
In order to ensure that fine impurities in all process nodes in a graphite boat can be cleaned, the graphite boat needs to be disassembled in the prior art, and in order to ensure the cleaning quality of the graphite boat and save the cleaning cost, cleaning liquid needs to be configured independently according to the cleaning quantity, and most of cleaning liquid used in the prior art is configured in advance. And the concentration of the cleaning liquid needs to be changed correspondingly for different process nodes.
Therefore, the development of a device capable of performing accurate liquid preparation cleaning on each process node of a graphite boat is a problem to be solved by those skilled in the art.
Disclosure of Invention
In order to solve the problems, the invention discloses accurate liquid preparation equipment for cleaning a graphite boat.
In order to achieve the above purpose, the present invention provides the following technical solutions:
an accurate liquid preparation device for graphite boat cleaning comprises a cleaning tank group and a liquid preparation mechanism; the cleaning tank group comprises a supporting frame, a cleaning tank and a pipeline; the support frame is a hollow frame body; the cleaning tank is vertically arranged in the supporting frame and comprises at least three cleaning tanks from top to bottom;
the pipeline comprises an inflow pipeline, an inter-groove pipeline and an outflow pipeline; one end of the inflow pipeline is connected with the liquid distribution mechanism, and the other end of the inflow pipeline is connected with the uppermost cleaning tank; the pipeline between the grooves is used for communicating the two adjacent cleaning grooves; the outflow pipeline is communicated with the lowest cleaning tank;
the liquid preparation mechanism comprises a raw material pipe, a mixing pipe and a pumping mechanism; the raw material pipes are provided with a plurality of raw material tanks, the tops of the raw material pipes are inwards provided with raw material tanks, and the bottoms of the raw material pipes are converged in the mixing pipe through the raw material pipes; the pumping mechanism is arranged in the raw material tank in a matching way; the mixing tube is in communication with the inflow conduit.
Further, a columnar raw material groove is formed in the top of the raw material pipe along the axial direction inwards; the pumping mechanism comprises a pumping plug, a pumping rod, a supporting plate, a pumping plate, a wire, a pumping power supply, a switch and a pumping spring;
the pumping rod comprises a fixed supporting rod and a sliding pumping rod; the fixed support rod is fixedly arranged at the top of the raw material pipe, and a sliding pumping groove is axially and inwards formed in one end of the fixed support rod, which is arranged on the fixed support rod and the raw material pipe; one end of the sliding pumping rod is matched with a pumping plug, and the other end of the sliding pumping rod is slidably arranged in the sliding pumping groove; the supporting sheet is a silicon steel sheet and is attached to the bottom of the sliding pumping groove; the pumping-in piece is an iron piece and is attached to one end of the sliding pumping-in rod positioned in the sliding pumping-in groove; the lead is spirally wound on the surface of the supporting sheet and is sequentially connected with the pumping power supply and the switch to form a loop; the pumping spring is also arranged in the sliding pumping groove, and two ends of the pumping spring are respectively connected with the supporting plate and the pumping plate.
Further, a rheostat is also connected in the loop where the lead is positioned; the switch is a pulse switch.
Further, the rheostat is a multi-turn potentiometer.
Further, the number of the cleaning tanks is three, namely a top cleaning tank, a middle cleaning tank and a bottom cleaning tank; the top cleaning tank, the middle cleaning tank and the bottom cleaning tank are spirally distributed in the supporting frame from top to bottom; the inflow pipeline is communicated with the top end of the top cleaning tank; the outflow pipeline is communicated with the bottom end of the bottom cleaning tank; the number of the pipelines between the tanks is two, the bottom end of the top cleaning tank is communicated with the top end of the middle cleaning tank, and the bottom end of the middle cleaning tank is communicated with the top end of the bottom cleaning tank.
Further, the pipeline between the tanks is also communicated with a dilution pipeline; the dilution pipeline is connected to the dilution tank, and a dilution valve is cooperatively arranged on the dilution pipeline.
Further, the dilution valve is a pulse solenoid valve.
Compared with the prior art, the invention has the following beneficial effects:
1. the amount and the concentration of the required graphite boat cleaning liquid can be configured according to the number and the using degree of the cleaned graphite boats, so that the cleaning efficiency is ensured, and meanwhile, the cleaning cost is reduced;
2. the novel liquid preparation mechanism is matched with the pumping spring through the magnetic attraction generated by the electro-magnetic principle, so that the accurate pumping of liquid preparation raw materials in each raw material pipe is realized while the existing manual configuration and piston pumping mode are effectively replaced, and the cleaning quality of cleaning liquid is ensured;
3. a dilution pipeline is further arranged between the cleaning tanks and can be used for diluting the cleaning liquid flowing into the next-stage cleaning tank so as to ensure that various parts after the graphite boat is disassembled can be cleaned separately, and the pertinence is stronger;
4. novel structure, convenient production and manufacture, good practicality and market prospect.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
fig. 2 is a schematic structural view of a pumping mechanism in the present invention.
List of reference numerals: support frame 1, inflow piping 2, inter-tank piping 3, outflow piping 4, raw material piping 5, mixing piping 6, pumping mechanism 7, raw material tank 8, pumping plug 9, pumping rod, support sheet 10, pumping sheet 11, wire 12, pumping power supply 13, switch 14, pumping spring 15, fixed support rod 16, sliding pumping rod 17, sliding pumping tank 18, varistor 19, top cleaning tank 20, middle cleaning tank 21, bottom cleaning tank 22, dilution piping 23, dilution tank 24, dilution valve 25, raw material introduction pipe 26.
Detailed Description
The technical scheme provided by the present invention will be described in detail with reference to the following specific examples, and it should be understood that the following specific examples are only for illustrating the present invention and are not intended to limit the scope of the present invention.
Referring to fig. 1, the invention is a schematic structural diagram of an accurate liquid dispensing device for cleaning a graphite boat, which comprises a cleaning tank set and a liquid dispensing mechanism.
The cleaning tank group comprises a supporting frame 1, a cleaning tank and a pipeline; the support frame 1 is a hollow frame body; the cleaning tanks are vertically arranged in the support frame 1 and comprise three cleaning tanks from top to bottom, namely a top cleaning tank 20, a middle cleaning tank 21 and a bottom cleaning tank 22; the top cleaning tank 20, the middle cleaning tank 21 and the bottom cleaning tank 22 are spirally distributed in the support frame 1 from top to bottom.
The pipes comprise an inflow pipe 2, an inter-tank pipe 3 and an outflow pipe 4; the inflow pipeline 2 is communicated with the top end of the top cleaning tank 20; the outflow pipeline 4 is communicated with the bottom end of the bottom cleaning tank 22; the number of the pipelines 3 between the tanks is two, and the bottom end of the top cleaning tank 20 is communicated with the top end of the middle cleaning tank 21, and the bottom end of the middle cleaning tank 21 is communicated with the top end of the bottom cleaning tank 22. The channel pipeline 3 is also communicated with a dilution pipeline 23; the dilution pipe 23 is connected to the dilution tank 24, and a dilution valve 25 is cooperatively installed on the dilution pipe 23, and the dilution valve 25 is a pulse solenoid valve.
The liquid preparation mechanism comprises a raw material pipe 5, a mixing pipe 6 and a pumping mechanism 7; the material pipes 5 are provided with a plurality of material tanks 8, the tops of which are inwards provided with material tanks 8, and the bottoms of which are converged in the mixing pipe 6 through material inlet pipes 26; the pumping mechanism 7 is arranged in the raw material tank 8 in a matching way; the mixing pipe 6 communicates with the inflow conduit 2.
As shown in fig. 2, a columnar raw material groove 8 is formed in the top of the raw material pipe 5 axially inwards; the pumping mechanism 7 comprises a pumping plug 9, a pumping rod, a supporting plate 10, a pumping plate 11, a conducting wire 12, a pumping power supply 13, a switch 14 and a pumping spring 15; the pumping rod comprises a fixed supporting rod 16 and a sliding pumping rod 17; the fixed support rod 16 is fixedly arranged at the top of the raw material pipe 5, and a sliding pumping groove 18 is formed inwards along the axial direction at the end of the fixed support rod 16, which is arranged at the end of the fixed support rod, which is opposite to the raw material pipe 5; one end of the sliding pumping rod 17 is matched with the pumping plug 9, and the other end of the sliding pumping rod is slidably arranged in the sliding pumping groove 18; the supporting sheet 10 is a silicon steel sheet and is attached to the bottom of the sliding pumping groove 18; the pumping sheet 11 is an iron sheet and is attached to one end of the sliding pumping rod 17 positioned in the sliding pumping groove 18; the lead 12 is spirally wound on the surface of the supporting sheet 10 and is sequentially connected with the pumping power supply 13 and the switch 14 to form a loop; the pumping spring 15 is also disposed in the sliding pumping groove 18, and both ends are connected to the support sheet 10 and the pumping sheet 11, respectively.
A rheostat 19 is also connected in the loop where the lead 12 is positioned; the switch 14 is a pulse switch and the varistor 19 is selected as a multi-turn potentiometer.
When the cleaning device is used, firstly, the cleaned graphite boat is disassembled, the components are classified according to the process nodes, and the components are respectively filled into the top cleaning tank 20, the middle cleaning tank 21 and the bottom cleaning tank 22 according to the required cleaning liquid concentration.
The cleaning liquid raw material contained in the raw material pipe 5 is arranged according to the need. Specifically, under normal conditions, the liquid preparation raw material of the cleaning liquid is stored in the raw material tank 8 of the raw material pipe 5, the conducting wire 12 wound on the surface of the supporting sheet 10 is in an electrified state, the supporting sheet generates strong adsorption force towards the pumping sheet 11 under the electro-magnetic principle, overcomes the elasticity of the pumping spring 15, and drives the pumping plug 9 to be kept fixed by sliding the pumping rod 17.
When the raw materials of the corresponding raw material pipe 5 need to be prepared for liquid, the circuit of the lead 12 in the corresponding pumping mechanism 7 needs to be disconnected, the switch 14 is selected to be a pulse switch, the pulse switch is directly disconnected under the action of pulse, the original adsorption force of the supporting sheet 10 disappears, and the sliding pumping rod 17 pushes the pumping plug 9 under the action of the pumping spring 15 to lead out the raw materials.
Meanwhile, in order to control the lead-out amount of the corresponding raw materials, a rheostat 19 is arranged in a loop where the lead 12 is positioned, and the current of the lead 12 can be changed by changing the resistance in the access loop, so that the adsorption force of the supporting sheet 10 can be further adjusted to realize the pushing speed of the pumping plug 9.
Finally, it should be noted that the above embodiments are only for illustrating the technical solution of the present invention and not for limiting the technical solution, and those skilled in the art should understand that modifications and equivalents may be made to the technical solution of the present invention without departing from the spirit and scope of the present invention, and all the modifications and equivalents are included in the scope of the claims of the present invention.
Claims (1)
1. Be used for abluent accurate liquid equipment of preparing of graphite boat, its characterized in that: comprises a cleaning groove group and a liquid distribution mechanism; the cleaning tank group comprises a supporting frame (1), a cleaning tank and a pipeline; the support frame (1) is a hollow frame body; the cleaning tank is vertically arranged in the supporting frame (1) and comprises at least three cleaning tanks arranged from top to bottom; the pipeline comprises an inflow pipeline (2), an inter-tank pipeline (3) and an outflow pipeline (4); one end of the inflow pipeline (2) is connected with a liquid distribution mechanism, and the other end of the inflow pipeline is connected with the uppermost cleaning tank; the inter-tank pipeline (3) is used for communicating the two adjacent cleaning tanks; the outflow pipeline (4) is communicated with the lowest cleaning tank; the liquid preparation mechanism comprises a raw material pipe (5), a mixing pipe (6) and a pumping mechanism (7); the raw material pipes (5) are provided with a plurality of raw material tanks (8) at the top inwards, and the bottom is converged in the mixing pipe (6) through raw material inlet pipes (26); the pumping mechanism (7) is arranged in the raw material tank (8) in a matching way; the mixing pipe (6) is communicated with the inflow pipeline (2);
a columnar raw material groove (8) is formed in the top of the raw material pipe (5) along the axial direction inwards; the pumping mechanism (7) comprises a pumping plug (9), a pumping rod, a supporting sheet (10), a pumping sheet (11), a lead (12), a pumping power supply (13), a switch (14) and a pumping spring (15); the pumping rod comprises a fixed supporting rod (16) and a sliding pumping rod (17); the fixed support rod (16) is fixedly arranged at the top of the raw material pipe (5), and a sliding pumping groove (18) is formed in the inner side of one end, which is arranged at the end, where the fixed support rod (16) is arranged with the raw material pipe (5), along the axial direction; one end of the sliding pumping rod (17) is provided with a pumping plug (9) in a matching way, and the other end of the sliding pumping rod is arranged in the sliding pumping groove (18) in a sliding way; the supporting sheet (10) is a silicon steel sheet and is attached to the bottom of the sliding pumping groove (18); the pumping sheet (11) is an iron sheet and is attached to one end of the sliding pumping rod (17) positioned in the sliding pumping groove (18); the lead (12) is spirally wound on the surface of the supporting sheet (10) and is sequentially connected with the pumping power supply (13) and the switch (14) to form a loop; the pumping spring (15) is also arranged in the sliding pumping groove (18), and two ends of the pumping spring are respectively connected with the supporting sheet (10) and the pumping sheet (11);
a rheostat (19) is also connected in a loop where the lead (12) is positioned; the switch (14) is a pulse switch;
the rheostat (19) is a multi-turn potentiometer;
the number of the cleaning tanks is three, namely a top cleaning tank (20), a middle cleaning tank (21) and a bottom cleaning tank (22); the top cleaning tank (20), the middle cleaning tank (21) and the bottom cleaning tank (22) are spirally distributed in the supporting frame (1) from top to bottom; the inflow pipeline (2) is communicated with the top end of the top cleaning tank (20); the outflow pipeline (4) is communicated with the bottom end of the bottom cleaning tank (22); the number of the inter-tank pipelines (3) is two, the bottom end of the top cleaning tank (20) is communicated with the top end of the middle cleaning tank (21), and the bottom end of the middle cleaning tank (21) is communicated with the top end of the bottom cleaning tank (22);
a dilution pipeline (23) is also communicated with the inter-tank pipeline (3); the dilution pipeline (23) is connected to the dilution tank (24), and a dilution valve (25) is arranged on the dilution pipeline (23) in a matched mode;
the dilution valve (25) is a pulse electromagnetic valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110872547.0A CN113634188B (en) | 2021-07-30 | 2021-07-30 | Be used for abluent accurate liquid equipment of joining in marriage of graphite boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110872547.0A CN113634188B (en) | 2021-07-30 | 2021-07-30 | Be used for abluent accurate liquid equipment of joining in marriage of graphite boat |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113634188A CN113634188A (en) | 2021-11-12 |
| CN113634188B true CN113634188B (en) | 2023-12-12 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110872547.0A Active CN113634188B (en) | 2021-07-30 | 2021-07-30 | Be used for abluent accurate liquid equipment of joining in marriage of graphite boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113634188B (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0567380U (en) * | 1992-02-14 | 1993-09-07 | 株式会社北村製作所 | Cleaning equipment |
| JP2003245615A (en) * | 2002-02-22 | 2003-09-02 | Seiko Epson Corp | Cleaning device and cleaning method |
| CN101189431A (en) * | 2005-04-13 | 2008-05-28 | 雅培糖尿病护理公司 | Variable volume, shape memory actuated insulin dispensing pump |
| CN104028492A (en) * | 2014-05-23 | 2014-09-10 | 无锡妤卓兰科技有限公司 | Passageway type cleaning device |
| CN205797868U (en) * | 2016-07-12 | 2016-12-14 | 昊诚光电（太仓）有限公司 | A kind of graphite boat cleans device |
| CN208879212U (en) * | 2018-10-09 | 2019-05-21 | 河北万维克林精密设备有限公司 | A kind of graphite boat cleaning machine acid solution collection structure |
| CN210410585U (en) * | 2019-06-18 | 2020-04-28 | 江门市鸿铸科技有限公司 | A proportioning device for mixed solutions |
| CN213529923U (en) * | 2020-10-27 | 2021-06-25 | 江苏格林保尔光伏有限公司 | Graphite boat cleaning machine |
| CN113020084A (en) * | 2021-04-22 | 2021-06-25 | 通威太阳能(金堂)有限公司 | Graphite boat cleaning device and using method |
-
2021
- 2021-07-30 CN CN202110872547.0A patent/CN113634188B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0567380U (en) * | 1992-02-14 | 1993-09-07 | 株式会社北村製作所 | Cleaning equipment |
| JP2003245615A (en) * | 2002-02-22 | 2003-09-02 | Seiko Epson Corp | Cleaning device and cleaning method |
| CN101189431A (en) * | 2005-04-13 | 2008-05-28 | 雅培糖尿病护理公司 | Variable volume, shape memory actuated insulin dispensing pump |
| CN104028492A (en) * | 2014-05-23 | 2014-09-10 | 无锡妤卓兰科技有限公司 | Passageway type cleaning device |
| CN205797868U (en) * | 2016-07-12 | 2016-12-14 | 昊诚光电（太仓）有限公司 | A kind of graphite boat cleans device |
| CN208879212U (en) * | 2018-10-09 | 2019-05-21 | 河北万维克林精密设备有限公司 | A kind of graphite boat cleaning machine acid solution collection structure |
| CN210410585U (en) * | 2019-06-18 | 2020-04-28 | 江门市鸿铸科技有限公司 | A proportioning device for mixed solutions |
| CN213529923U (en) * | 2020-10-27 | 2021-06-25 | 江苏格林保尔光伏有限公司 | Graphite boat cleaning machine |
| CN113020084A (en) * | 2021-04-22 | 2021-06-25 | 通威太阳能(金堂)有限公司 | Graphite boat cleaning device and using method |
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| Publication number | Publication date |
|---|---|
| CN113634188A (en) | 2021-11-12 |
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