CN1134090C - All-solid-state red and blue dual-color laser using superlattice as frequency conversion crystal - Google Patents
All-solid-state red and blue dual-color laser using superlattice as frequency conversion crystal Download PDFInfo
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Abstract
Description
一、发明领域1. Field of invention
本发明涉及一种用超晶格来进行倍频和三倍频是实现短波长激光输出的装置。尤其是以钽酸锂等超晶格为变频晶体的全固态红、蓝双色激光器。The invention relates to a device for realizing short-wavelength laser output by using a superlattice to perform frequency doubling and triple frequency doubling. Especially all-solid-state red and blue dual-color lasers using superlattices such as lithium tantalate as frequency conversion crystals.
二、背景技术2. Background technology
超晶格来进行倍频和三倍频是实现短波长激光输出的重要手段,一向为人们所重视。利用二阶非线性效应实现三倍频必须包含倍频和和频两个参量过程,在此之前相关的研究工作有:Frequency doubling and triple frequency doubling by superlattice is an important means to realize short-wavelength laser output, which has always been paid attention to by people. The use of second-order nonlinear effects to achieve triple frequency must include two parameter processes of frequency doubling and sum frequency. Prior to this, related research work includes:
祝世宁等人1997年在Science上发表了用准周期Fibonacci光学超晶格(QPOS)实现绿光三倍频的文章,利用准周期Fibonacci序列的LiTaO3超晶格的两个倒格矢分别补偿了1570nm基波在倍频和和频两个参量过程中的位相失配,产生了有效的523nm三倍频绿光。该超晶格的基本参数是正畴l=10.7μm,两个结构单元A=24μm,B=17.5μm。样品总长度为gmm,厚度为0.5mm。1570nm红外光单次通过产生的绿光功率达6mW,转换效率为23%。Zhu Shining and others published an article in Science in 1997 on realizing the triple frequency of green light by using quasi-periodic Fibonacci optical superlattice (QPOS), using the two reciprocal lattice vectors of the LiTaO 3 superlattice of the quasi-periodic Fibonacci sequence to compensate The phase mismatch of the 1570nm fundamental wave in the two parameters of frequency doubling and summing produces effective 523nm triple frequency green light. The basic parameters of the superlattice are positive domain l=10.7 μm, two structural units A=24 μm, B=17.5 μm. The total length of the sample is gmm and the thickness is 0.5mm. The green light power generated by a single pass of 1570nm infrared light reaches 6mW, and the conversion efficiency is 23%.
刘照伟等人在2000年6月的ISFD-6会议上发表了名为“双周期LT晶体对1.064μm激光三倍频产生紫外激光”的文章,报导了用双周期结构实现对1.064μm的基波光的直接三倍频,两个周期分别为l=6.77μm,L=51.08μm,设计的匹配温度为40℃。倍频、三倍频的最高转换效率分别为33%和0.54%。Liu Zhaowei and others published an article titled "Double-period LT crystal triples the frequency of 1.064μm laser to generate ultraviolet laser" at the ISFD-6 conference in June 2000, reporting that the use of a double-period structure to realize the fundamental wavelength of 1.064μm The direct three times of the frequency, the two periods are l=6.77μm, L=51.08μm, and the designed matching temperature is 40°C. The highest conversion efficiencies of frequency doubling and triple frequency are 33% and 0.54% respectively.
M.Pierrou等人在1999年的Opt.Lett上发表了“用一阶准位相匹配的KTP晶体通过腔内倍频产生740mW输出的蓝光”的文章。所用的KTP晶体周期为6.09μm,获得的蓝光波长为473nm,转换效率为5.7%。M.Pierrou et al. published the article "Produce 740mW output blue light by intracavity frequency doubling with first-order level-matched KTP crystals" on Opt.Lett in 1999. The period of the KTP crystal used is 6.09 μm, the wavelength of the obtained blue light is 473 nm, and the conversion efficiency is 5.7%.
在第一篇文章中,使用的是标准的Fibonacci准周期光学超晶格实现523nm的三倍频绿光直接输出;第二篇文章使用双周期超晶格实现了355nm的三倍频紫外光的直接输出;第三篇文章使用一块周期超晶格实现倍频的蓝光输出。以上方案均不涉及到利用周期超晶格来同时实现1.342μm的倍频和直接三倍频。In the first article, the standard Fibonacci quasi-periodic optical superlattice was used to realize the direct output of tripled frequency green light at 523nm; the second article used a double-period superlattice to realize the tripled frequency of ultraviolet light at 355nm Direct output; the third article uses a periodic superlattice to achieve frequency-multiplied Blu-ray output. None of the above schemes involves the use of periodic superlattices to achieve 1.342 μm frequency doubling and direct frequency tripling at the same time.
三、发明内容3. Contents of the invention
本发明的目的是:利用周期超晶格来同时实现1.342μm激光的倍频和直接三倍频输出,利用掺Nd晶体如Nd:YVO4优异的激光晶体的性质,并根据设计出具有特定周期的LiTaO3铁电畴超晶格,该超晶格能对Nd:YVO4晶体的1.342μm发射同时实现高效的倍频和三倍频,从而出构造能实现红、蓝双色激光输出的小型全固态激光器。The purpose of the present invention is: utilize periodic superlattice to realize simultaneously the frequency doubling of 1.342 μ m laser and the direct triple frequency output, utilize Nd-doped crystal such as Nd:YVO4 The property of excellent laser crystal, and according to design have specific period LiTaO 3 ferroelectric domain superlattice, the superlattice can achieve efficient frequency doubling and triple frequency at the same time for the 1.342μm emission of Nd:YVO4 crystal, so as to construct a small all-solid-state laser that can realize red and blue two-color laser output .
本发明目的是以下述方式实现的:以钽酸锂等材料的超晶格为变频晶体的全固态红、蓝双色激光器,其特征是以一块周期光学超晶格组成的腔外红蓝两色转换的激光器,由一半导体激光器为泵浦光源,以掺Nd:YVO4晶体(3)的前表面镀膜和腔镜(5)一起构成1.342μm激光的谐振腔;再以一块周期为14.778μmLiTaO3超晶格(8)置于泵浦光路的控温炉(9)中,基波激光的波长为1.342μm。本发明可选用不同掺Nd激光晶体,采用4F3/2->4I13/2的激发谱线,根据不同晶体所对应的发射波长,设计不同周期的LiTaO3超晶格。The purpose of the present invention is achieved in the following manner: an all-solid-state red and blue dual-color laser with a superlattice of materials such as lithium tantalate as a frequency conversion crystal is characterized in that it is an extracavity red and blue two-color laser composed of a periodic optical superlattice The converted laser consists of a semiconductor laser as the pumping light source, the front surface coating of the Nd:YVO 4 crystal (3) and the cavity mirror (5) together form a 1.342 μm laser resonant cavity; The superlattice (8) is placed in the temperature-controlled furnace (9) of the pump light path, and the wavelength of the fundamental wave laser is 1.342 μm. The present invention can choose different Nd-doped laser crystals, adopt the excitation line of 4 F 3/2 -> 4 I 13/2 , and design LiTaO 3 superlattices of different periods according to the emission wavelengths corresponding to different crystals.
1.Nd:YVO4晶体波长为1.342μm的发射正好位于此范围以内,对应的匹配温度为74.1℃,对应的周期为14.778μm。又由以上分析可知,1.342μm附近几纳米的波长均可以用周期的LiTaO3超晶格进行倍频和三倍频(附图),由于在不同晶体中Nd离子对应的4F3/2->4I13/2发射谱线相对于1.342μm有少量位移,这意味其他掺Nd的激光晶体也可以用这种周期LiTaO3超晶格产生倍频红光和三倍频蓝光Nd:YVO4只是对应的基波波长、相匹配温度和超晶格周期略有差异。此设计方案也适用于其它的非线性晶体,如LiNbO3。1. The emission of Nd:YVO 4 crystal with a wavelength of 1.342μm is just within this range, the corresponding matching temperature is 74.1℃, and the corresponding period is 14.778μm. From the above analysis, it can be seen that the wavelengths of several nanometers around 1.342 μm can be frequency-doubled and tripled by the periodic LiTaO 3 superlattice (see attached figure), because the 4 F 3/2 - > 4 I 13/2 The emission line has a small shift relative to 1.342μm, which means that other Nd-doped laser crystals can also use this periodic LiTaO 3 superlattice to generate frequency-doubled red light and tripled blue light Nd:YVO 4 Only the corresponding fundamental wavelength, matching temperature and superlattice period are slightly different. This design scheme is also applicable to other nonlinear crystals, such as LiNbO 3 .
2.本发明适用于光学超晶格对所有含Nd离子的激光晶体所对应的4F3/2->4I13/2发射进行倍频和三倍频,同时获得红、蓝二束激光。如Nd:YAG晶体和Nd:YAP晶体,它们对应的该谱线的发射波长分别为1.325μm和1.341μm,它们分别可用这种超晶格材料获得663nm的红光与442nm的蓝光和671nm的红光与447nm的蓝光。2. The present invention is applicable to the optical superlattice to perform frequency doubling and tripling on the emission of 4 F 3/2 -> 4 I 13/2 corresponding to all laser crystals containing Nd ions, and simultaneously obtain two laser beams of red and blue . For example, Nd:YAG crystal and Nd:YAP crystal, the emission wavelengths of their corresponding spectral lines are 1.325μm and 1.341μm respectively, and they can use this superlattice material to obtain red light at 663nm, blue light at 442nm and red light at 671nm respectively. Light with 447nm blue light.
除了周期超晶格,本发明也包含所有其他准周期、双周期和其他系列非周期光学超晶格对上述激光进行倍频和三倍频,同时获得红、蓝二束激光。如可采用LiNbO3晶体,利用准周期超晶格,同样也可对Nd的这一谱线实现倍频与三倍频。对应于Nd:YVO3晶体,该准周期的结构参数为D=15.329μm,DA=16.300μm,DB=12.493μm,正畴宽度Lc=6.2μm与投影角有关的参数τ=0.17395,相匹配温度为120℃。对准周期参数的选择条件是使其倒空间中倒格矢满足耦合光参量过程中准位相匹配条件:且为二组元周期结构,二组元准周期结构是由A、B两个基元按准周期序列排列构成,该序列可以用投影的方法得到。即在一个二维正方点阵中做一条斜率为tanθ的直线,投影区域宽度为sinθ+cosθ。区域内的格点向直线投影点就构成了一个投影角为θ的二组元准周期序列。本发明所述的准周期介电体超晶格材料即是以上述设置方法制备的具有微结构的材料,以LT和LN晶格材料为典型。例如参见本申请人的0019006.7和0019007.5周期和准周期结构的介电体超晶格材料的设置和制备方法。In addition to the periodic superlattice, the present invention also includes all other quasi-periodic, double-periodic and other series of non-periodic optical superlattices to double and triple the frequency of the above-mentioned laser light, and simultaneously obtain two beams of red and blue laser light. For example, LiNbO 3 crystal can be used, and the quasi-periodic superlattice can also be used to achieve frequency doubling and triple frequency for this spectral line of Nd. Corresponding to the Nd:YVO 3 crystal, the quasi-periodic structural parameters are D=15.329μm, D A =16.300μm, D B =12.493μm, positive domain width Lc=6.2μm, and the parameter τ=0.17395 related to the projection angle, corresponding to The matching temperature is 120°C. The selection condition of the quasi-periodic parameter is to make the reciprocal lattice vector in the reciprocal space meet the quasi-phase matching condition in the coupling optical parameter process: and it is a two-component periodic structure, and the two-component quasi-periodic structure is composed of two primitives A and B Arranged in a quasi-periodic sequence, the sequence can be obtained by the method of projection. That is, make a straight line with a slope of tanθ in a two-dimensional square lattice, and the width of the projection area is sinθ+cosθ. The projection points of the grid points in the area to the straight line constitute a quasi-periodic sequence of two components with a projection angle of θ. The quasi-periodic dielectric superlattice material of the present invention is a material with a microstructure prepared by the above-mentioned setting method, and LT and LN lattice materials are typical. For example, see 0019006.7 and 0019007.5 of the applicant for the arrangement and preparation method of dielectric superlattice materials with periodic and quasi-periodic structures.
3.除了LiTaO3晶体,本发明也包含LiNbO3,KTP、RTP等其他非线性光学晶体的光学超晶格,根据这些晶体的折射率色散关系都可以针对上述的激光晶体所对应的激光波长设计出特定结构和结构参数的光学超晶格实现激光的倍频和三倍频,同时获得红、蓝二束激光。3. In addition to LiTaO 3 crystals, the present invention also includes optical superlattices of LiNbO 3 , KTP, RTP and other nonlinear optical crystals. According to the refractive index dispersion relationship of these crystals, the laser wavelength corresponding to the above-mentioned laser crystals can be designed The optical superlattice with a specific structure and structural parameters realizes the frequency doubling and tripling of the laser, and simultaneously obtains the red and blue laser beams.
周期光学超晶格通常只用于倍频、和频或差频等单个参量过程的频率转换。周期超晶格的倒格矢可以表示为
该结构的设计思路如下:The design idea of the structure is as follows:
周期结构正负电畴的宽度比取1∶1,因偶数阶的倒格矢消光,只取奇数阶的倒格矢。倍频的位相失配比和频的小,为了利用最大的有效非线性系数,用周期结构的一阶倒格矢补偿倍频的位相失配,即
λ为基波波长,Λ为周期。n1和n2分别为基波光和倍频光的折射率。补偿和频位相失配的倒格矢取三阶,即
由方程(1)和(2)得From equations (1) and (2) we get
3(2n2-2n1)=3n3-2n2-n1 …………(3)3(2n 2 -2n 1 )=3n 3 -2n 2 -n 1 …………(3)
我们用如下的色散公式来计算折射率
其中的参数为:The parameters are:
A=4.5284, B=7.2449×10-3,A=4.5284, B=7.2449×10 -3 ,
C=0.2453, D=-2.3670×10-2,C=0.2453, D=-2.3670×10 -2 ,
E=7.7690×10-2, F=0.1838,E=7.7690×10 -2 , F=0.1838,
b(T)=2.6794×10-8(T+273.15)2,b(T)=2.6794×10 -8 (T+273.15) 2 ,
c(T)=1.6234×10-8(T+273.15)2.c(T)=1.6234×10 -8 (T+273.15) 2 .
上述方程中存在两个未知参数λ和T,λ为基波光的波长,T为温度。因为在实用中匹配温度在0℃到150℃之间较容易实现,根据(1)、(2)、(3)式算得的对应基波光波长为1.336μm到1.349μm(如图2所示)。Nd:YVO4晶体波长为1.342μm的发射正好位于此范围以内,对应的匹配温度为74.1℃,对应的周期为14.778μm。又由以上分析可知,1.342μm附近几纳米的波长均可以用周期的LiTaO3超晶格进行倍频和三倍频,由于在不同晶体中Nd离子对应的4F3/2->4I13/2发射谱线相对于1.342μm有少量位移,这意味其他掺Nd的激光晶体也可以用这种周期LiTaO3超晶格产生倍频红光和三倍频蓝光,只是对应的基波波长、相匹配温度和超晶格周期略有差异。此设计方案也适用于其它的非线性晶体,如LiNbO3。只是由于对应的折射率公式不同,能满足位相匹配条件的波长范围也不同。There are two unknown parameters λ and T in the above equation, λ is the wavelength of the fundamental light, and T is the temperature. Because it is easier to realize the matching temperature between 0°C and 150°C in practice, the corresponding fundamental light wavelength calculated according to formulas (1), (2), and (3) is 1.336 μm to 1.349 μm (as shown in Figure 2) . The emission of Nd:YVO 4 crystal with a wavelength of 1.342 μm is just within this range, the corresponding matching temperature is 74.1°C, and the corresponding period is 14.778 μm. From the above analysis, it can be seen that the wavelengths of several nanometers near 1.342 μm can be frequency-doubled and tripled by the periodic LiTaO 3 superlattice, because the corresponding 4 F 3/2 -> 4 I 13 of Nd ions in different crystals The /2 emission line has a small shift relative to 1.342 μm, which means that other Nd-doped laser crystals can also use this periodic LiTaO 3 superlattice to produce frequency-doubled red light and tripled blue light, but the corresponding fundamental wavelength, There are slight differences in matching temperature and superlattice period. This design scheme is also applicable to other nonlinear crystals, such as LiNbO 3 . Only because the corresponding refractive index formulas are different, the wavelength ranges that can satisfy the phase matching conditions are also different.
本发明的优越性:Advantages of the present invention:
1.红、绿、蓝是三种基本颜色,红、绿、蓝激光器在高亮度激光显示,彩色打印等光电子产业中具有重要的应用前景。目前在三色激光器中仅有绿光激光器技术较为成熟,并已形成商品,而红、蓝激光器都还是处于技术探索阶段。本发明从一台激光器能产生红、蓝二色激光,因而具有极高的应用价值。1. Red, green, and blue are three basic colors. Red, green, and blue lasers have important application prospects in optoelectronic industries such as high-brightness laser display and color printing. At present, among the three-color lasers, only the green laser technology is relatively mature and has become a commodity, while the red and blue lasers are still in the stage of technological exploration. The invention can generate red and blue two-color lasers from one laser device, so it has extremely high application value.
2.采用其他结构的光学超晶格也可1.342μm附近的激光倍频和直接三倍频,实现红光和蓝光的同时输出。本发明采用周期结构的光学超晶格,其优越性首先在于周期结构的有效非线性系数高于其它准周期、双周期、非周期等复杂结构,因此更容易获得较高的倍频、三倍频输出。2. The optical superlattice with other structures can also double and triple the frequency of the laser near 1.342 μm to achieve simultaneous output of red light and blue light. The present invention adopts the optical superlattice of periodic structure, and its superiority lies in that the effective nonlinear coefficient of periodic structure is higher than other complex structures such as quasi-periodic, double-periodic, non-periodic, so it is easier to obtain higher frequency doubling, triple frequency output.
3.简单的周期结构在设计以及制版、光刻和极化制备工序上比复杂结构方便且易于控制。3. The simple periodic structure is more convenient and easy to control than the complex structure in the design, plate making, photolithography and polarization preparation process.
4.Nd:YVO4晶体具有吸收系数大,吸收带宽,发射载面大,输出为线偏振等优点,该晶体中对应于1.342μm发射的Nd离子4F3/2->4I13/2能级跃迁具有较强的相对强度,因而可以在较低的阈值条件下获得较高功率的该波长的激光输出。LiTaO3晶体适用的1.342μm的激光,是Nd:YVO4晶体的四能级结构,吸收截面较大,光-光转换效率较高,因而容易产生较高的基波输出,也容易获得较高的倍频、三倍频输出。4. The Nd:YVO 4 crystal has the advantages of large absorption coefficient, wide absorption bandwidth, large emission loading area, and linearly polarized output. In this crystal, the Nd ion 4 F 3/2 -> 4 I 13/2 corresponding to 1.342 μm emission The energy level transition has relatively strong relative intensity, so a higher power laser output of this wavelength can be obtained under a lower threshold condition. The 1.342μm laser suitable for LiTaO 3 crystal is the four-level structure of Nd:YVO 4 crystal, which has a large absorption cross section and high light-to-light conversion efficiency, so it is easy to generate high fundamental wave output and obtain high Multiplier and tripler output.
四、附图说明4. Description of drawings
下面结合附图及具体的实验例对本发明做进一步的详细说明:Below in conjunction with accompanying drawing and concrete experimental example the present invention is described in further detail:
图1为使用本发明同时输出准连续红光和蓝光的激光器的示意图。Fig. 1 is a schematic diagram of a laser that simultaneously outputs quasi-continuous red light and blue light using the present invention.
图2为周期钽酸锂超晶格蓝光三倍频相匹配关系图,且周期为14.778μm的LiTaO3的超晶格产生倍频红光和三倍频蓝光的基波波长所对应的相匹配温度,横座标,纵座标分别是相匹配温度波长和所对应的周期。Figure 2 is a diagram of the matching relationship between the triple frequency triplet of periodic lithium tantalate superlattice blue light, and the LiTaO 3 superlattice with a period of 14.778 μm corresponds to the fundamental wavelength of the double frequency red light and triple blue light. The temperature, the abscissa and the ordinate are the matching temperature wavelength and the corresponding cycle respectively.
图3为使用本发明同时输出准连续红光和蓝光的激光器的一种镀膜设计的结构示意图。Fig. 3 is a structural schematic diagram of a coating design of a laser that simultaneously outputs quasi-continuous red light and blue light using the present invention.
如图1如下:Figure 1 is as follows:
(1)-半导体激光器(LD),波长为809nm;(1)-semiconductor laser (LD) with a wavelength of 809nm;
(2)-聚焦系统,一般为透镜组;(2)-focusing system, generally a lens group;
(3)-Nd:YVO4晶体,产生1.342μm激光的激光介质;(3) -Nd:YVO 4 crystal, laser medium for producing 1.342μm laser;
(4)-调Q装置(如声光装置);(4)-Q-switching device (such as acousto-optic device);
(5)-1342nm激光的输出镜(如T=8%);(5) Output mirror of -1342nm laser (such as T=8%);
(6)-会聚透镜(如f=25mm);(6)-converging lens (such as f=25mm);
(7)-控温炉,用来调谐温度;(7) - temperature control furnace, used to tune the temperature;
(8)-周期超晶格晶体,产生倍频红光,三倍频蓝光;(8)-Periodic superlattice crystals, which produce frequency-doubled red light and triple-frequency blue light;
(9)-输出红蓝双色激光;(9) - output red and blue two-color laser;
(10)-多层膜1342nm的增透膜,671nm的高反膜;(10) - Anti-reflection coating of multilayer film 1342nm, high reflection coating of 671nm;
(11)-多层膜,671nm的高反膜,447nm的高透膜(11)-Multilayer film, 671nm high reflection film, 447nm high transmission film
五、具体实施方式5. Specific implementation
实施例1Example 1
按照图1制作一台用一块周期光学超晶格组成的腔外红蓝两色转换的激光器(这一过程已经在实验上实现)。LD的型号为OPC-DO15-809,输出的波长为809nm,最大输出功率为15W,Nd:YVO4晶体(3)的前表面镀膜,和腔镜(5)一起构成1.342μm激光的谐振腔。经声光开关,在腔镜(5)后能产生平均功率约为500mW的准连续1.342μm的激光,重复频率为10KHz,脉宽约30ns。一块制备好的周期为14.778μm LiTaO3超晶格(8)(长度为1.8cm)置于控温炉(7)中。调节控温炉的温度,在相匹配温度,红光和蓝光输出达到最大,其转换效率分别为41.9%,10.3%。Make an extracavity red-blue two-color conversion laser composed of a periodic optical superlattice according to Fig. 1 (this process has been realized experimentally). The model of the LD is OPC-DO15-809, the output wavelength is 809nm, and the maximum output power is 15W. The front surface of the Nd:YVO 4 crystal (3) is coated, and the cavity mirror (5) together constitutes a resonant cavity of 1.342μm laser. Through the acousto-optic switch, a quasi-continuous 1.342μm laser with an average power of about 500mW can be generated behind the cavity mirror (5), the repetition frequency is 10KHz, and the pulse width is about 30ns. A prepared piece of LiTaO 3 superlattice (8) with a period of 14.778 μm (1.8 cm in length) is placed in a temperature-controlled furnace (7). Adjust the temperature of the temperature-controlled furnace. At the matching temperature, the output of red light and blue light reaches the maximum, and the conversion efficiencies are 41.9% and 10.3%, respectively.
实施例2Example 2
按照图2制作一台用周期超晶格组成的红蓝光激光器。与实施例1不同的是,在超晶格的前后两个面分别镀上多层膜。前表面镀1.342μm的增透膜,671nm的高反膜;后表面镀671nm的高反膜,447nm的高透膜。这样在超晶格内部使倍频所得671nm红光产生谐振,使其强度增加,这能增加三倍频蓝光的转换效率。同时,改变后表面对671nm的透过率,可以改变红光蓝光输出的比例。According to Figure 2, a red and blue laser composed of periodic superlattice is fabricated. The difference from Example 1 is that the front and back surfaces of the superlattice are respectively coated with multi-layer films. The front surface is coated with 1.342μm antireflection coating and 671nm high reflection coating; the back surface is coated with 671nm high reflection coating and 447nm high transmission coating. In this way, the 671nm red light obtained by frequency doubling is resonated inside the superlattice to increase its intensity, which can increase the conversion efficiency of triple frequency blue light. At the same time, changing the transmittance of the back surface to 671nm can change the ratio of red light and blue light output.
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| US10/038,518 US6714569B2 (en) | 2001-01-05 | 2002-01-03 | Design of optical superlattice to realize third-harmonic generation and multi-wavelength laser output and its application in the all-solid state laser |
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