CN113203405B - A three-axis gyroscope - Google Patents
A three-axis gyroscope Download PDFInfo
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- CN113203405B CN113203405B CN202110565198.8A CN202110565198A CN113203405B CN 113203405 B CN113203405 B CN 113203405B CN 202110565198 A CN202110565198 A CN 202110565198A CN 113203405 B CN113203405 B CN 113203405B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional vibrators, e.g. wine glass-type vibrators
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Abstract
The present invention provides a triaxial gyroscope comprising: a first driving frame capable of performing a resonance motion along an X-axis; a second driving frame parallel to the first driving frame and spaced apart from the first driving frame by a predetermined distance, and capable of performing a resonating motion along the X-axis in a direction opposite to the first driving frame; an X/Y gyroscope structure coupled between the first drive frame and the second drive frame; the Z gyroscope structure is coupled between the first driving frame and the second driving frame and is positioned at one side of the X/Y gyroscope structure; the X/Y gyro structure and the Z gyro structure are mutually independent, and the X/Y gyro structure and the Z gyro structure are driven by the first driving frame and the second driving frame together. The triaxial gyroscope is reasonable and compact in structure and high in integration level, orthogonal errors can be reduced, and detection accuracy is improved.
Description
[ Field of technology ]
The invention relates to the technical field of micro-mechanical systems, in particular to a triaxial gyroscope.
[ Background Art ]
The gyroscope is a sensor for measuring angular rate, is one of core devices of inertial technology, and plays an important role in the fields of modern industrial control, aerospace, national defense, military, consumer electronics and the like.
The development of gyroscopes can be roughly divided into three phases:
The first stage is a traditional mechanical rotor gyro which has high precision and plays an irreplaceable role in military strategic weapons such as nuclear submarines, intercontinental strategic missiles and the like, but has large volume, complex manufacturing process, high price, long period and is not suitable for mass production; the second stage is an optical detection gyro, mainly comprising a laser gyro and an optical fiber gyro, mainly utilizing the Sagnac effect, and has the advantages of no rotating part, higher precision, playing an important role in navigation and aerospace, but still facing the problems of larger volume, higher cost and difficult integration; the third stage is a micromechanical gyroscope, which is developed in the 90 th century of the 20 th century, has a relatively late research start, but can be rapidly developed by virtue of the unique advantages of small volume, low power consumption, light weight, mass production, low price, strong overload resistance and integration, is suitable for civil fields such as aircraft navigation, automobile manufacturing, digital electronics, industrial instruments and the like, and modern national defense and military fields such as unmanned aerial vehicles, tactical missiles, intelligent bombs, military aiming systems and the like, and has wide application prospects and is receiving more and more attention from people.
With the increasing demand in the consumer market, there is a higher demand for the size and performance of MEMS (Micro-Electro-MECHANICAL SYSTEM) gyroscopes, which also change from single axis gyroscopes to tri-axis gyroscopes, where early tri-axis gyroscopes consisted of three independent single axis gyroscopes, and where it was necessary to include a separate drive structure, the overall structural size was large. In the current consumer-level application, a monolithic three-axis gyroscope is generally characterized by driving and sharing, and reasonably distributing an X/Y/Z gyroscope mass block, however, the three-axis gyroscope also has the problems of larger size, low integration level and large quadrature error.
Referring to a Chinese patent No. 108225295A, a three-axis gyroscope with tuning fork driving effect is disclosed, the three-axis gyroscope structure disclosed by the patent skillfully designs a steering structure, a left mass block and a right mass block are used for detecting Y/Z axis angular velocity, a center mass block is used for detecting X axis angular velocity, the integration level is obviously not high, and the common mass blocks of the Y/Z mass blocks are easy to generate coupling; with continued reference to chinese patent CN110926445A, a three-axis MEMS gyroscope is disclosed, and the micro-gyroscope structure disclosed in the patent is a shared drive, which is characterized in that the structural design of the X/Y gyroscope is novel, the X/Y gyroscopes interact and are disposed in the middle position of the driving frame, and are supported by a central anchor point, and the Z-axis gyroscopes are distributed on two sides of the X/Y gyroscope and are connected with the middle gyroscope structure. The integrated structure is novel and reasonable in design and high in integration level, but the Z-axis gyroscope is not directly decoupled, and the problems of low sensitivity and large quadrature error can be met.
Therefore, a new technical solution is needed to solve the problems of low integration level and large quadrature error of the tri-axis gyroscope in the prior art.
[ Invention ]
One of the purposes of the present invention is to provide a three-axis gyroscope, which has the advantages of high integration level and small quadrature error.
According to one aspect of the present invention, there is provided a three-axis gyroscope comprising: a first driving frame capable of performing a resonance motion along an X-axis; a second driving frame parallel to the first driving frame and spaced apart from the first driving frame by a predetermined distance, and capable of performing a resonating motion along the X-axis in a direction opposite to the first driving frame; an X/Y gyroscope structure connected between the first drive frame and the second drive frame; the Z gyroscope structure is connected between the first driving frame and the second driving frame and is positioned at one side of the X/Y gyroscope structure; the X/Y gyro structure and the Z gyro structure are mutually independent, and the X/Y gyro structure and the Z gyro structure are driven by the first driving frame and the second driving frame together.
Compared with the prior art, the X/Y gyroscope structure and the Z gyroscope structure of the triaxial gyroscope are driven by the same two driving frames, and meanwhile, the X/Y gyroscope structure and the Z gyroscope structure are mutually independent, and the triaxial gyroscope structure is reasonable and compact in whole and high in integration level. When the induced angular velocities in different directions are different, the X/Y gyroscope structure and the Z gyroscope structure are independent of each other and are not mutually influenced due to the Kelvin effect, so that the quadrature error can be reduced, and the detection precision is improved.
[ Description of the drawings ]
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the description of the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art. Wherein:
FIG. 1 is a schematic diagram of the overall structure of a tri-axis gyroscope in one embodiment of the present invention;
FIG. 2 is a schematic view of the structure of the Z-centered coupling beam 4i of FIG. 1 according to the present invention;
FIG. 3 is a schematic diagram of the tri-axis gyroscope of FIG. 1 in a driving state according to the present invention;
FIG. 4 is a schematic diagram of the three-axis gyroscope of FIG. 1 for X-axis detection according to the present invention;
FIG. 5 is a schematic diagram of the three-axis gyroscope of FIG. 1 in accordance with the present invention;
FIG. 6 is a schematic diagram of the three-axis gyroscope of FIG. 1 for Z-axis detection according to the present invention;
FIG. 7 is an enlarged schematic view of the first drive frame area shown in FIG. 1;
FIG. 8 is an enlarged schematic view of the X/Y center coupling beam region shown in FIG. 1;
fig. 9 is an enlarged schematic view of the Z-mass region shown in fig. 1.
Wherein 1 a-upper drive frame (or first drive frame); 1 b-a lower drive frame (or a second drive frame);
2 a-upper mass Y (or first mass); 2 b-lower mass Y (or second mass); 2 c-left mass X (or third mass); 2 d-right mass X (or fourth mass); 2 e-upper mass Z (or first Z mass); 2 f-lower mass Z (or second Z mass); 2 g-upper detection frame (or first Z detection frame); 2 h-lower detection frame (or second Z detection frame);
3 a.1-3 a.12-a first driving electrode; 3 a.13-3 a.24-second driving electrodes; 3b.1 and 3b.2-a first drive feedback electrode; 3b.3 and 3b.4-second drive feedback electrodes; 3 c.1-a first Y-axis detection electrode, 3 c.2-a second Y-axis detection electrode; 3 d.1-a first X-axis detection electrode, 3 d.2-a second X-axis detection electrode; 3 e.1-3e.16-first Z-axis detection electrode, 3 e.17-3e.32-second Z-axis detection electrode;
4a.1 and 4 a.2-first drive frame support beams, 4a.3 and 4 a.4-second drive frame support beams; 4b.1-first X/Y drive coupling beam, 4b.2-second X/Y drive coupling beam; 4c.1 first Z drive coupling beam, 4c.2-second Z drive coupling beam; 4 d.1-a first X/Y steering beam, 4 d.2-a second X/Y steering beam, 4 d.3-a third X/Y steering beam, and 4 d.4-a fourth X/Y steering beam; 4 e.1-a first X/Y connection beam, 4 e.2-a second X/Y connection beam, 4 e.3-a third X/Y connection beam, 4 e.4-a fourth X/Y connection beam; 4f-X/YZ center coupling beam; 4j.1 to 4j.4-first Z connecting beam, 4j.5 to 4j.8-second Z connecting beam; 4h.1 and 4h.2-detecting the frame coupling beams; 4i-Z center coupling beam;
5a.1 and 5a.2-first drive frame anchor, 5a.3 and 5a.4-second drive frame anchor; 5 b.1-first X/Y turn Liang Maodian, 5 b.2-second X/Y turn Liang Maodian, 5 b.3-third X/Y turn Liang Maodian, 5 b.4-fourth X/Y turn Liang Maodian; 5 c.1-first detection frame coupling Liang Maodian, 5 c.2-second detection frame coupling Liang Maodian; 5d-Z center coupling Liang Maodian.
[ Detailed description ] of the invention
In order that the above-recited objects, features and advantages of the present invention will become more readily apparent, a more particular description of the invention will be rendered by reference to the appended drawings and appended detailed description.
Reference herein to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic may be included in at least one implementation of the invention. The appearances of the phrase "in one embodiment" in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. Unless specifically stated otherwise, the terms connected, or connected herein denote an electrical connection, either directly or indirectly.
In the description of the present invention, it should be understood that the terms "upper", "lower", "left", "right", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. In the description of the present invention, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
In the present invention, unless specifically stated and limited otherwise, the terms "mounted," "connected," "secured," "coupled," and the like are to be construed broadly; for example, the two parts can be fixedly connected, detachably connected or integrated; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
Aiming at the problems existing in the prior art, the invention provides a triaxial gyroscope. Referring to fig. 1, a schematic diagram of an overall structure of a tri-axis gyroscope according to an embodiment of the present invention is shown.
The three-axis gyroscope shown in fig. 1 includes a first driving frame 1a, a second driving frame 1b, an X/Y gyroscope structure, and a Z gyroscope structure. The first driving frame 1a is capable of resonance movement along the X axis. The second driving frame 1b is parallel to the first driving frame 1a and spaced apart a predetermined distance, and is capable of performing a resonating motion along the X-axis in a direction opposite to the first driving frame 1a. The X/Y gyroscope structure is connected between the first driving frame 1a and the second driving frame 1b, and can sense the X-axis angular velocity and the Y-axis angular velocity. The Z gyroscope structure is connected between the first driving frame 1a and the second driving frame 1b and is positioned on one side of the X/Y gyroscope structure, and can sense the angular speed of the Z axis. The X/Y gyro structure and the Z gyro structure are independent of each other and are not directly connected with each other, and the X/Y gyro structure and the Z gyro structure are driven by the first driving frame 1a and the second driving frame 1b together. The triaxial gyroscope is reasonable and compact in structure and high in integration level. When the induced angular velocities in different directions are different, the X/Y gyroscope structure and the Z gyroscope structure are independent of each other and are not mutually influenced due to the Kelvin effect, so that the quadrature error can be reduced, and the detection precision is improved.
In order to better illustrate the structure of the tri-axial gyroscope according to the present invention, a three-dimensional rectangular coordinate system may be established, and in the embodiment shown in fig. 1, in a plane where the base of the tri-axial gyroscope is located, a direction parallel to the first driving frame 1a and the second driving frame 1b is taken as an X axis, a direction perpendicular to the first driving frame 1a and the second driving frame 1b is taken as a Y axis, and the X axis and the Y axis are taken as coordinate axes, and the three-dimensional rectangular coordinate system established through the X axis, the Y axis and the Z axis is shown in fig. 1.
As shown in fig. 1, 7-9, the tri-axis gyroscope further includes: first drive frame anchors 5a.1 and 5a.2; first drive frame support beams 4a.1 and 4a.2 connected between first drive frame anchor points 5a.1,5a.2 and first drive frame 1a; second drive frame anchors 5a.3 and 5a.4; second drive frame support beams 4a.3 and 4a.4 connected between second drive frame anchor points 5a.3 and 5a.4 and second drive frame 1 b; first driving electrodes 3a.1 to 3a.12 and first driving feedback electrodes 3b.1 and 3b.2 disposed within the first driving frame 1a; second driving electrodes 3a.13-3a.24 and second driving feedback electrodes 3b.3 and 3b.4 disposed within the second driving frame 1 b.
The first driving electrodes 3a.1-3a.12, the first driving feedback electrodes 3b.1 and 3b.2, the second driving electrodes 3a.13-3a.24 and the second driving feedback electrodes 3b.3 and 3b.4 are fixedly disposed on a substrate (not shown), the first driving frame 1a is connected with the first driving frame anchor points 5a.1 and 5a.2 through the first driving frame support beams 4a.1 and 4a.2, the first driving frame 1a and the first driving frame support beams 4a.1 and 4a.2 are suspended above the substrate, the second driving frame 1b is connected with the second driving frame anchor points 5a.3 and 5a.4 through the second driving frame support beams 4a.3 and 4a.4, and the second driving frame 1b and the second driving frame support beams 4a.3 and 4a.4 are suspended above the substrate. The driving frames 1a and 1b and the driving frame supporting beams 4a.1-4a.4 have the same thickness and are of a suspension structure, and the anchor points 5a.1-5a.4 are of a non-suspension structure and are directly connected with a substrate to play a supporting role.
In the specific embodiment shown in fig. 1 and 7 to 9, the first driving frame 1a and the second driving frame 1b are identical in structure and symmetrically arranged about the X-axis (or symmetrically distributed up and down). The first driving frame 1a is connected to the first driving frame anchor points 5a.1 and 5a.2 through first driving frame support beams 4a.1 and 4a.2, respectively, the first driving electrodes 3a.1 to 3a.12 are sequentially arranged in the first driving frame 1a along the X-axis direction (or left-right direction), and the first driving feedback electrodes 3b.1 and 3b.2 are arranged between two adjacent first driving electrodes 3a.6 and 3a.7 in the first driving frame 1a along the X-axis direction. The second driving frame 1b is connected to the second driving frame anchor points 5a.3 and 5a.4 through second driving frame support beams 4a.3 and 4a.4, respectively, the second driving electrodes 3a.13 to 3a.24 are sequentially arranged in the second driving frame 1b along the X-axis direction (or left-right direction), and the second driving feedback electrodes 3b.3 and 3b.4 are arranged between two adjacent second driving electrodes 3a.18 and 3a.19 in the second driving frame 1b along the X-axis direction. The driving frame supporting beams 4a.1 to 4a.4 all adopt the same U-shaped structure, and the opening direction is parallel to the Y axis, wherein the driving frame supporting beams 4a.1 and 4a.3 are symmetrically distributed about the X axis, and the driving frame supporting beams 4a.2 and 4a.4 are symmetrically distributed about the X axis; the drive frame anchors 5a.1 and 5a.3 are symmetrically distributed about the X-axis and the drive frame anchors 5a.2 and 5a.4 are symmetrically distributed about the X-axis.
As shown in fig. 3, the first driving frame 1a is driven to perform resonance motion along the X-axis by applying a driving voltage to the first driving electrodes 3a.1 to 3a.12; the second drive frame 1b is driven to perform a resonating motion along the X-axis in opposition to the first drive frame 1a by applying a drive voltage across the second drive electrodes 3a.13-3a.24. Fig. 3 shows only one direction of movement of the first drive frame 1a and the second drive frame 1b along the X-axis by way of example. For details of applying a driving voltage to the driving electrode to drive the driving frame to perform resonant motion along the X-axis, reference is made to the related art, and details thereof will not be described herein.
In one embodiment, the X/Y gyroscope structure includes: a first X/Y driving coupling beam 4b.1, a second X/Y driving coupling beam 4b.2, a first mass 2a, a second mass 2b, a third mass 2c and a fourth mass 2d, four steering Liang Maodian b.1-5b.4 and four steering beams 4d.1-4d.4. The first mass block 2a, the second mass block 2b, the third mass block 2c and the fourth mass block 2d are respectively arranged at four positions of the center point A of the X/Y gyroscope structure, the first mass block 2a is arranged adjacent to the third mass block 2c and the fourth mass block 2d, the second mass block 2b is arranged adjacent to the third mass block 2c and the fourth mass block 2d, the first mass block 2a is connected with the first driving frame 1a through a first X/Y driving coupling beam 4b.1, and the second mass block 2b is connected with the second driving frame 2b through a second X/Y driving coupling beam 4 b.2. Each steering beam 5 b.1-5 b.4 is connected to a corresponding one of the steering Liang Maodian d.1-4d.4, and two adjacent masses are connected by a corresponding one of the steering beams. When the first driving frame 1a performs resonant motion along the X axis and the second driving frame 1b performs resonant motion opposite to the first driving frame 1a along the X axis, the first driving frame 1a drives the first mass block 2a to perform resonant motion along the X axis through the first X/Y driving coupling beam 4b.1, the second driving frame 1b drives the second mass block 2b to perform resonant motion opposite to the first mass block 2a along the X axis through the second X/Y driving coupling beam 4b.2, and the first mass block 2a and the second mass block 2b drive the third mass block 2c to perform resonant motion along the Y axis through corresponding steering beams (e.g., steering beams 4d.1 and 4d.3) and drive the fourth mass block 2d to perform resonant motion opposite to the third mass block 2c along the Y axis through corresponding steering beams (e.g., steering beams 4d.2 and 4d.4). Wherein, a certain number of damping holes can be arranged on the mass blocks 2 a-2 d of the X/Y gyroscope structure to reduce damping and improve the quality factor and sensitivity of the gyroscope.
In one embodiment, the X/Y gyroscope structure further comprises: an X/Y center coupling beam 4f located at a center point A of the X/Y gyroscope structure; four X/Y connection beams 4e.1 to 4e.4 respectively connected to the inner sides of the corresponding masses, each of which is connected to the X/Y center coupling beam 4f; a first Y-axis detection electrode 3c.1 disposed below the first mass 2 a; a second Y-axis detection electrode 3c.2 disposed below the second mass 2 b; a first X-axis detection electrode 3d.1 disposed below the third mass 2 c; and a second X-axis detection electrode 3d.2 disposed below the fourth mass 2 d. When sensing the input of the Y-axis angular velocity, the first mass block 2a and the second mass block 2b are enabled to move reversely along the Z-axis direction, the first Y-axis detection electrode 3c.1 detects the change of the distance between the first mass block 2a and the second Y-axis detection electrode 3c.2 detects the change of the distance between the first mass block and the second mass block 2b, specifically, the capacitance of the first Y-axis detection electrode 3c.1 and the capacitance of the second Y-axis detection electrode 3c.2 after sensing the Y-axis angular velocity are increased and the capacitance of the first Y-axis detection electrode and the second Y-axis detection electrode 3c.2 are reduced, and the difference between the first Y-axis detection electrode and the second Y-axis detection electrode obtains the capacitance change caused by the Y-axis angular velocity, so that the input Y-axis angular velocity is obtained; when the input of the X-axis angular velocity is sensed, the third mass block 2c and the fourth mass block 2d are reversely moved along the Z-axis direction, the first X-axis detection electrode 3d.1 detects the change of the distance between the first mass block and the third mass block 2c, the second X-axis detection electrode 3d.2 detects the change of the distance between the first X-axis detection electrode 3d.1 and the fourth mass block 2d, specifically, the capacitance of the first X-axis detection electrode 3d.1 and the capacitance of the second X-axis detection electrode 3d.2 after the X-axis angular velocity is sensed are increased, the capacitance of the first X-axis detection electrode and the capacitance of the second X-axis detection electrode 3d.2 are reduced, and the capacitance change caused by the X-axis angular velocity is obtained through difference between the first X-axis detection electrode and the second X-axis detection electrode, and the input X-axis angular velocity is obtained.
In the specific embodiment shown in fig. 1, the first X/Y drive coupling beam 4b.1 and the second X/Y drive coupling beam 4b.2 are identical in structure and symmetrical about the X axis; the four mass blocks 2 a-2 d in the X/Y gyroscope structure have the same structure and comprise rectangular parts and isosceles trapezoid parts; the four mass blocks 2 a-2 d are integrally symmetrical about an X axis and a Y axis; the four steering beams 4d.1 to 4d.4 are integrally symmetrical about an X axis and a Y axis; the four turns Liang Maodian b.1-5 b.4 are generally symmetrical about the X-axis and the Y-axis; x-axis detection electrodes 3d.1, 3d.2, Y-axis detection electrodes 3c.1, 3c.2, steering Liang Maodian b.1-5b.4 are fixedly arranged on the substrate; four mass blocks 2 a-2 d, four steering beams 4d.1-4d.4, X/Y driving coupling beams 4b.1, 4b.2, an X/Y center coupling beam 4f and four X/Y connecting beams 4e.1-4e.4 of the X/Y gyroscope structure are suspended above the substrate. The four steering beams 4d.1-4d.4 are respectively positioned at four corners of a graph formed by the four mass blocks 2 a-2 d in the X/Y gyroscope structure; the four turns Liang Maodian b.1-5 b.4 are respectively located at the four corners of the pattern consisting of the four masses 2 a-2 d of the X/Y gyroscope structure; the four steering beams 4d.1-4d.4 are respectively connected with the four steering beams Liang Maodian b.1-5b.4 in a one-to-one correspondence manner; two adjacent masses are connected by a corresponding one of the steering beams, for example, an X/Y steering beam 4d.1 connects the third mass 2c and the first mass 2a, an X/Y steering beam 4d.2 connects the first mass 2a and the fourth mass 2d, an X/Y steering beam 4d.3 connects the fourth mass 2d and the second mass 2b, and an X/Y steering beam 4d.4 connects the second mass 2b and the third mass 2c.
In the specific embodiment shown in fig. 1, each of the steering beams 4d.1 to 4d.4 is a pentagon formed by removing one corner from a square, wherein one corner of each pentagon is connected with a corresponding steering beam block anchor point, and the other two corners adjacent to the corner are respectively connected with two corresponding adjacent mass blocks in the X/Y gyroscope structure. The X/Y center coupling beam 4f is of a concentric circle structure, and the center of the X/Y center coupling beam is the center point A of the X/Y gyro structure; the four X/Y connecting beams 4e.1-4e.4 have the same structure, the four X/Y connecting beams 4e.1-4e.4 are integrally symmetrical about an X axis and a Y axis, and each X/Y connecting beam 4e.1-4e.4 comprises a plurality of hollow straight beam parts with the lengths gradually reduced from outside to inside and connecting parts for connecting the hollow straight beams; wherein, the X/Y connection beams 4e.1 and 4e.2 located on the upper and lower sides of the X/Y center coupling beam 4f are placed parallel to the X axis (or placed in the left-right direction), and the X/Y connection beams 4e.3 and 4e.4 located on the left and right sides of the X/Y center coupling beam 4f are placed parallel to the Y axis (or placed in the up-down direction).
As shown in fig. 1,7-9, the Z-gyro structure includes:
A first Z drive coupling beam 4c.1 and a second Z drive coupling beam 4c.2;
A first Z detection frame 2g connected to the first driving frame 1a through a first Z driving coupling beam 4c.1, defining a first Z space therein;
the first Z mass block 2e is positioned in the first Z space and connected with the first Z detection frame 2g through first Z connecting beams 4j.1-4j.4;
A second Z detection frame 2h connected to the second drive frame 1b through a second Z drive coupling beam 4c.2, in which a second Z space is defined;
the second Z mass block 2f is positioned in the second Z space and is connected with the second Z detection frame 2h through second Z connecting beams 4j.5-4j.8;
When the first driving frame 1a performs resonance movement along the X axis and the second driving frame 1b performs resonance movement opposite to the first driving frame 1a along the X axis, the first driving frame 1a drives the first Z mass block 2e to perform resonance movement along the X axis through the first Z driving coupling beam 4c.1, the first Z detecting frame 2g, and the first Z connecting beams 4j.1 to 4j.4, and the second driving frame 1b drives the second Z mass block 2f to perform resonance movement opposite to the first Z mass block 2e along the X axis through the second Z driving coupling beam 4c.2, the second Z detecting frame 2h, and the second Z connecting beams 4j.5 to 4j.8.
In the specific embodiment shown in fig. 1,7-9, the first Z drive coupling beam 4c.1 and the second Z drive coupling beam 4c.2 are identical in structure and symmetrical about the X axis; the first Z detection frame 2g and the second Z detection frame 2h have the same structure and are symmetrical about the X axis; the first Z-mass 2e and the second Z-mass 2f are identical in structure and symmetrical about the X-axis; the first Z connecting beams 4j.1 to 4j.4 and the second Z connecting beams 4j.5 to 4j.8 have the same overall structure and are symmetrical about the X axis. The four first Z connecting beams 4j.1 to 4j.4 are respectively located at the left end and the right end of the top of the first Z mass block 2e, the other two first Z connecting beams 4j.3 and 4j.4 are respectively located at the left end and the right end of the bottom of the first Z mass block 2e, and the first Z connecting beams 4j.1 to 4j.4 are placed parallel to the X-axis direction (or placed along the left-right direction); the number of the second Z connecting beams 4j.5 to 4j.8 is four, wherein two second Z connecting beams 4j.5 and 4j.6 are respectively positioned at the left and right ends of the top of the second Z mass block 2f, the other two second Z connecting beams 4j.7 and 4j.8 are respectively positioned at the left and right ends of the bottom of the second Z mass block 2f, and the second Z connecting beams 4j.5 to 4j.8 are placed parallel to the X axis direction (or placed along the left and right directions). And a certain number of damping holes can be formed in the first Z mass block 2e and the second Z mass block 2f and used for reducing damping and improving the sensitivity of the Z-axis gyroscope.
As shown in fig. 1,2,7-9, the Z-gyro structure further includes:
detection frame coupling Liang Maodian c.1, 5c.2;
A detection frame coupling beam 4h.1, 4h.2 connected to the detection frame coupling Liang Maodian c.1, 5c.2, connected between the first Z detection frame 2g and the second Z detection frame 2 h;
z-center coupling Liang Maodian d;
A Z center coupling beam 4i connected to the Z center coupling Liang Maodian d, which is located at the center point B of the Z gyro structure and connected between the first Z detection frame 2g and the second Z detection frame 2 h;
The arrangement of the detection frame coupling beams 4h.1, 4h.2 and the Z-center coupling beam 4i causes the first Z detection frame 2g and the second Z detection frame 2h to move in opposite directions along the X-axis.
In the specific embodiment shown in fig. 1,7-9, two detection frame coupling beams 4h.1, 4h.2 are provided, two detection frame coupling Liang Maodian c.1, 5c.2 are provided, the two detection frame coupling beams 4h.1, 4h.2 are distributed symmetrically left and right, the two detection frame coupling beams 4h.1, 4h.2 are respectively connected with one detection frame coupling Liang Maodian, and one ends of the two detection frame coupling beams 4h.1, 4h.2 are respectively connected with left and right ends of the bottom of the first Z detection frame 2 g; the other ends of the two detection frame coupling beams 4h.1 and 4h.2 are respectively connected with the left end and the right end of the top of the second Z detection frame 2 h. The two detection frame coupling beams 4h.1 and 4h.2 are of an E-shaped structure, and the opening directions of the two detection frame coupling beams are opposite, wherein the E-shaped structure comprises three parallel parts which are arranged in parallel, and a connecting part which connects the three parallel parts, wherein the three parallel parts are respectively called an upper parallel part, a middle parallel part and a lower parallel part, and the upper parallel parts of the detection frame coupling beams 4h.1 and 4h.2 are connected with the bottom of the first Z detection frame 2 g; the middle parallel part of the detection frame coupling beams 4h.1 and 4h.2 is connected with the detection frame coupling Liang Maodian c.1 and 5c.2; the lower parallel portions of the detection frame coupling beams 4h.1, 4h.2 are connected to the top of the second Z detection frame 2 h.
Please refer to fig. 2, which is a schematic diagram of the Z-center coupling beam 4i shown in fig. 1 according to the present invention. As can be seen in conjunction with fig. 1 and 2, the Z-center coupling beam 4i includes a first structural part connected to the first Z-detecting frame 2g and a second structural part connected to the second Z-detecting frame 2h, and the first and second structural parts of the Z-center coupling beam 4i are symmetrical (or distributed symmetrically up and down) about the X-axis, and the Z-center coupling beam 4i includes four coupling elastic beams 210, four coupling intermediate connection beams 220, four coupling support beams 230, a first coupling end connection beam 240, and a second coupling end connection beam 250.
One end of the first coupling end connection beam 240 is connected to the first Z detection frame 2g, and the other end is connected to the middle of one coupling elastic beam 210; one end of the second coupling end connection beam 250 is connected to the second Z detection frame 2h, and the other end is connected to the middle of the other coupling elastic beam 210; the four coupling elastic beams 210 and the four coupling middle connecting beams 220 are alternately connected end to end in sequence to form a closed loop; one end of each coupling support beam 230 is connected to the Z-center coupling Liang Maodian d, and the other end is connected to the middle of a corresponding one of the coupling middle connection beams 220.
The partial structure of the Z-center coupling beam 4i on the side of the X-axis near the first Z-detection frame 2g is referred to as a first structural portion, and the partial structure of the Z-center coupling beam 4i on the side of the X-axis near the second Z-detection frame 2h is referred to as a second structural portion.
In the embodiment shown in fig. 1 and 2, the coupling elastic beams 210 are U-shaped structures, and the opening direction of each U-shaped structure is away from the Z-center coupling Liang Maodian d; the first coupling end connection beam 240 is connected to the bottom of one U-shaped structure; the second coupling end connection beam 250 is connected to the bottom of the other U-shaped structure; each coupling intermediate connecting beam 220 is of an L-shaped structure, and the opening direction of the L-shaped structure faces to the Z center for coupling Liang Maodian d; one end of each of the coupling support beams 230 is connected to the Z-center coupling Liang Maodian d, and the other end thereof is connected to the corner point of the L-shaped structure, so that four coupling support beams 230 form diagonal lines in a closed loop.
As shown in fig. 1,7-9, the Z-gyro structure further includes:
first Z-axis detection electrodes 3e.1 to 3e.16 provided in the first Z-mass 2 e;
Second Z-axis detection electrodes 3e.17 to 3e.32 provided in the second Z-mass 2 f;
When the input of the angular velocity of the Z axis is sensed, the first Z mass block 2e and the second Z mass block 2f are enabled to move reversely along the Y axis direction, the first Z axis detection electrodes detect the distance change between 3e.1 to 3e.16 and the first Z mass block 2e, and the second Z axis detection electrodes 3e.17 to 3e.32 detect the distance change between the first Z mass block 2e and the second Z mass block 2 f. Specifically, the capacitances of the first Z-axis detection electrodes 3e.1 to 3e.16 and the second Z-axis detection electrodes 3e.17 to 3e.32 after sensing the Z-axis angular velocity are increased and decreased, and the capacitance change caused by the Z-axis angular velocity is obtained by the difference between the two electrodes, so that the input Z-axis angular velocity is obtained.
The Z-axis detection electrodes 3e.1-3e.32, the Z-center coupling Liang Maodian d and the detection frame couplings Liang Maodian c.1 and 5c.2 are arranged on a substrate, and the first Z-driving coupling beam 4c.1 and the second Z-driving coupling beam 4c.2, the first Z detection frame 2g, the second Z detection frame 2h, the first Z mass block 2e, the second Z mass block 2f and the detection frame coupling beams 4h.1 and 4h.2 of the Z-axis gyro structure are suspended above the substrate.
The detection principle of the triaxial gyroscope shown in fig. 1 in the present invention is described below.
1. X/Y axis gyroscope detection principle
Fig. 3 is a schematic diagram of the driving state of the tri-axis gyroscope shown in fig. 1 according to the present invention. The first driving frame 1a and the second driving frame 1b at the upper side and the lower side are subjected to reverse resonance movement along the X-axis direction by applying driving voltage, so that the X/Y gyroscope structure is driven to move. The specific process is that the first driving frame 1a and the second driving frame 1b drive the first mass block 2a and the second mass block 2b to generate reverse resonance motion along the X axis direction through X/Y driving coupling beams 4b.1 and 4b.2, and the first mass block 2a and the second mass block 2b drive the third mass block 2c and the fourth mass block 2d to generate reverse resonance motion along the Y axis up and down through X/Y steering beams 4d.1-4d.4 arranged around.
Fig. 4 is a schematic diagram of the three-axis gyroscope of fig. 1 in the present invention during X-axis detection. When the X-axis angular velocity is sensed, the Kelvin effect can generate Kelvin force to drive the third mass block 2c and the fourth mass block 2d to move reversely along the Z-axis direction, the X-axis detection electrodes 3d.1 and 3d.2 arranged below the third mass block 2c and the fourth mass block 2d are sensitive to the change of distance, and then the self-capacitance of the X-axis detection electrodes 3d.1 and 3d.2 can be changed along with the change of capacitance, so that the size of the X-axis angular velocity can be obtained through the change of the detection capacitance.
Fig. 5 is a schematic diagram of the three-axis gyroscope of fig. 1 in the present invention. When the Y-axis angular velocity is sensed, the Kelvin effect can generate Kelvin force to drive the first mass block 2a and the second mass block 2b to move reversely along the Z-axis direction, the sensitive distance between the Y-axis detection electrodes 3c.1 and 3c.2 arranged below the first mass block 2a and the second mass block 2b is changed, and then the self-capacitance of the Y-axis detection electrodes 3c.1 and 3c.2 is changed, so that the Y-axis angular velocity can be obtained through detecting the change of the capacitance.
2. Z-axis gyroscope detection principle
With continued reference to fig. 3, the driving voltage is applied to make the first driving frame 1a and the second driving frame 1b on the upper and lower sides generate inverse resonance motion along the X-axis direction, so as to drive the Z-gyro structure to generate motion. The specific process is that the first driving frame 1a and the second driving frame 1b drive the first Z detection frame 2g and the second Z detection frame 2h to generate left-right reverse resonance motion along the X-axis direction through the Z driving coupling beams 4c.1 and 4c.2, the first Z detection frame 2g and the second Z detection frame 2h are internally provided with a first Z mass block 2e and a second Z mass block 2f respectively, and the first Z detection frame 2g and the second Z detection frame 2h can drive the first Z mass block 2e and the second Z mass block 2f to generate left-right reverse resonance motion along the X-axis direction.
Fig. 6 is a schematic diagram of the three-axis gyroscope of fig. 1 in the present invention. When the input of the Z-axis angular velocity is sensed, the Kelvin effect can generate Kelvin force to drive the first Z mass block 2e and the second Z mass block 2f to reversely move along the Y-axis direction, the sensitive distance of the Z detection electrodes 3e.1-3e.16 and 3e.17-3e.32 respectively arranged in the first Z mass block 2e and the second Z mass block 2f is changed, and then the self capacitance of the Z detection electrodes 3e.1-3e.16 and 3e.17-3e.32 can be changed along with the change of the self capacitance, and the size of the Z-axis angular velocity can be obtained by detecting the change of the capacitance.
In summary, according to the triaxial gyroscope of the present invention, when the upper driving frame 1a and the lower driving frame 1b drive the mass blocks 2a to 2f to move, the displacement of the mass blocks 2a to 2f in the sensitive direction is negligible, and the angular rate signal detection is not affected. When the angular velocity is sensitive in different directions, the corresponding mass block moves due to the Kelvin effect without affecting other mass blocks, so that the triaxial gyroscope designed by the invention can reduce the quadrature error and improve the detection precision.
In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Further, one skilled in the art may combine and combine the different embodiments or examples described in this specification.
While embodiments of the present invention have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the invention, and that variations, modifications and alternatives to the above embodiments may be made by those skilled in the art within the scope of the invention.
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| CN113203403B (en) * | 2021-05-24 | 2024-12-03 | 美新半导体(天津)有限公司 | A three-axis gyroscope |
| CN114166195B (en) * | 2021-11-04 | 2023-06-16 | 杭州士兰微电子股份有限公司 | Triaxial gyroscope |
| CN115355898B (en) * | 2022-07-15 | 2025-04-22 | 瑞声开泰科技(武汉)有限公司 | A fully decoupled three-axis MEMS gyroscope |
| CN115790557B (en) * | 2022-10-28 | 2025-08-15 | 无锡莱斯能特科技有限公司 | Sensor design structure |
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