CN113007405A - Flow valve, mass flow control device, and flow valve opening control method - Google Patents
Flow valve, mass flow control device, and flow valve opening control method Download PDFInfo
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- CN113007405A CN113007405A CN202110172194.3A CN202110172194A CN113007405A CN 113007405 A CN113007405 A CN 113007405A CN 202110172194 A CN202110172194 A CN 202110172194A CN 113007405 A CN113007405 A CN 113007405A
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- flow valve
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
- F16K17/20—Excess-flow valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0025—Electrical or magnetic means
- F16K37/0041—Electrical or magnetic means for measuring valve parameters
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
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- Flow Control (AREA)
Abstract
The application provides a flow valve, quality flow control device and flow valve aperture control method, and this flow valve includes the valve body, sets up the removal subassembly in the valve body and with remove the displacement sensor that the subassembly is connected, wherein: the moving assembly is used for moving according to the received moving signal so as to adjust the flow of the flow valve; the displacement sensor is used for determining an actual opening signal of the flow valve according to the movement amount of the moving assembly and sending the actual opening signal to the flow valve opening controller. By applying the method and the device, the opening degree of the flux valve on the MFC can be accurately controlled, and the reliability of the MFC is improved.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a flow valve, a mass flow control device and a flow valve opening control method.
Background
Mass Flow Controllers (MFCs) are generally used for precisely measuring and controlling the Mass Flow of a fluid, and are widely used in scientific research and production in various fields such as semiconductor and integrated circuit processes, special material subjects, chemical industries, petroleum industries, medicine, environmental protection, and vacuum.
In an actual production process, for example, when the flow rate and the flow rate of argon entering a furnace need to be accurately controlled, according to operation experience and specific requirements of a production link, a field operator usually wants to realize the control of the flow rate and the flow rate of gas entering a furnace body by giving a certain opening degree of a flow valve on the premise that the pressure of a gas inlet is certain, but the current gas mass flow controller does not have the function of controlling the opening degree of the flow valve.
Disclosure of Invention
The invention aims to solve at least one technical problem in the prior art, and provides a flow valve, a mass flow control device and a flow valve opening control method, which can realize accurate control on the opening of the flow valve on an MFC and improve the reliability of the MFC.
To achieve the object of the present invention, a first aspect provides a flow valve, which includes a valve body, a moving assembly disposed in the valve body, and a displacement sensor connected to the moving assembly, wherein:
the moving assembly is used for moving according to the received moving signal so as to adjust the flow rate of the flow valve;
the displacement sensor is used for determining an actual opening signal of the flow valve according to the movement amount of the moving assembly and sending the actual opening signal to a flow valve opening controller.
Optionally, the moving assembly and the valve body form a fluid cavity, the fluid cavity is used for containing fluid, and the moving assembly is used for moving along the extending direction of the valve body to adjust the size of the fluid cavity so as to adjust the opening degree of the flow valve.
Optionally, the displacement sensor includes a main body and a telescopic contact, the telescopic contact is in contact with the moving assembly and moves linearly in synchronization with the moving assembly, and the main body is configured to sense a moving position of the telescopic contact to determine an actual opening signal of the flow valve.
Optionally, the moving assembly comprises a magnetic member, and the telescopic contact is in contact with the magnetic member;
the flow valve also comprises a sealing element which is arranged at one end of the valve body close to the moving assembly and is used for sealing the valve body;
the telescopic contact penetrates through the sealing piece and is pressed against the end face, close to the telescopic contact, of the moving assembly, and the telescopic contact is attached to the sealing piece in a sealing mode.
Optionally, the sealing element comprises a first sealing element and a second sealing element which are arranged in sequence along the moving direction of the moving assembly, the first sealing element is connected with the valve body, and the second sealing element is connected with the first sealing element;
the telescopic contact sequentially penetrates through the second sealing piece and the first sealing piece to be pressed against the end face, close to the telescopic contact, of the moving assembly.
Optionally, the flow valve further comprises a fixing support, and the fixing support is connected with the valve body and used for supporting and fixing the displacement sensor.
In order to achieve the object of the present invention, a second aspect provides a mass flow control device, including a flow valve, a flow valve driving circuit, and a controller, wherein the controller is configured to provide a driving signal to the flow valve driving circuit, the flow valve driving circuit is configured to control an opening degree of the flow valve according to the received driving signal, and the flow valve is the flow valve according to the first aspect.
Optionally, the controller includes a gas flow controller and a flow valve opening controller, and the gas flow controller is connected to the flow valve and configured to provide an actual driving signal to the driving circuit according to a real-time flow value and a preset set flow value, so as to adjust an opening of the flow valve;
the flow valve opening controller is connected with the flow valve and used for:
acquiring an actual driving signal provided by the gas flow controller to the flow valve driving circuit;
comparing the actual driving signal with a given driving signal, wherein the given driving signal refers to a driving signal for enabling the flow valve to reach a set opening degree;
when the difference between the actual drive signal and the given drive signal exceeds a predetermined range, the supply of the drive signal to the flow valve drive circuit by the gas flow controller is stopped, and the given drive signal is output to the flow valve drive circuit by the flow valve opening controller.
Optionally, the mass flow control device further comprises a switch selector;
the controller is further used for generating a switching control signal and providing the switching control signal for the switching selection switch so as to enable the gas flow controller to be electrically disconnected with the input end of the flow valve driving circuit and enable the driving signal output end of the flow valve opening controller to be conducted with the control end of the flow valve driving circuit.
Optionally, the flow valve opening controller is further configured to:
calculating or searching a corresponding given driving signal in a database according to at least one of the pressure sensor signal, the flow sensor signal and the displacement sensor signal and at least one of a preset set flow value and a preset set opening value; the pressure sensor signal is used for representing the pressure of the air inlet of the flow valve, the flow sensor signal is used for representing the actual flow of the flow valve, and the displacement sensor signal is used for representing the actual opening degree of the flow valve.
In order to achieve the object of the present invention, a third aspect provides a flow valve opening degree control method applied to the mass flow control device according to the second aspect, the method including:
comparing an actual drive signal to a given drive signal, wherein the actual drive signal is the drive signal provided by the gas flow controller to the flow valve drive circuit; the given driving signal is determined by the flow valve opening controller, and the given driving signal is provided for the flow valve to enable the flow valve to reach the set opening;
when the difference between the actual drive signal and the given drive signal exceeds a predetermined range, the supply of the drive signal to the flow valve drive circuit by the gas flow controller is stopped, and the given drive signal is output to the flow valve drive circuit by the flow valve opening controller.
The invention has the following beneficial effects:
the invention provides a flow valve, a mass flow control device and a flow valve opening control method, wherein the flow valve not only comprises a valve body and a moving component arranged in the valve body, but also comprises a displacement sensor, the displacement sensor can determine the actual opening of the flow valve according to the moving amount of the moving component, can detect the opening of the flow valve in real time, and convert the opening into a displacement sensor signal to be sent to a controller so as to be used for the controller to execute the flow valve opening control method, the controller compares an actual driving signal provided for a flow valve driving circuit with a given driving signal, monitors the opening control state of the flow valve in real time, stops providing the actual driving signal for the flow valve driving circuit when the difference between the actual driving signal and the given driving signal exceeds a preset range, and outputs the given driving signal to the flow valve driving circuit, the undisturbed switching of the two control modes is realized, and the phenomenon that the whole production process is greatly fluctuated due to the switching of the control modes is avoided; meanwhile, a redundancy control design method is adopted, so that the control precision and reliability of the mass flow control device are improved, and great economic loss caused by out-of-control flow control to a user is avoided.
Drawings
Fig. 1 is a schematic diagram of a method for controlling the opening degree of a flow valve according to the present embodiment;
FIG. 2 is a schematic structural diagram of a flow valve provided in an embodiment of the present application;
fig. 3 is a logic diagram of a control process of a mass flow control device according to an embodiment of the present application.
Detailed Description
Reference will now be made in detail to the present application, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar parts or parts having the same or similar functions throughout. In addition, if a detailed description of the known art is not necessary for illustrating the features of the present application, it is omitted. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present application and are not to be construed as limiting the present application.
It will be understood by those within the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be understood that when an element is referred to as being "connected" or "coupled" to another element, it can be directly connected or coupled to the other element or intervening elements may also be present. Further, "connected" or "coupled" as used herein may include wirelessly connected or wirelessly coupled. As used herein, the term "and/or" includes all or any element and all combinations of one or more of the associated listed items.
The following describes the technical solutions of the present application and how to solve the above technical problems in specific embodiments with reference to the accompanying drawings.
In this embodiment, the present gas mass flow controller is analyzed, and it is found that: the flow valve of the existing gas mass flow controller takes an electromagnetic valve as an example, when the electromagnetic valve needs to be opened, a driving circuit of the electromagnetic valve outputs a certain current to a solenoid of the electromagnetic valve according to a received driving signal, according to an electromagnetic induction principle, the solenoid generates a certain electromagnetic force, an armature on the electromagnetic valve moves upwards under the action of the electromagnetic force, so that the electromagnetic valve is opened, and gas passes through the electromagnetic valve. According to the magnitude of the received driving signal, the solenoid valve generates electromagnetic force with corresponding magnitude, and the electromagnetic valve opens corresponding opening degree, so that the control of gas flow is realized. However, since the solenoid valve is opened by applying a certain voltage to the solenoid valve coil, the consistency is poor, and the opening degree of the solenoid valve is greatly different due to the inherent hysteresis of the magnet under the same voltage, which cannot meet the requirement of accurately controlling the gas flow rate in production. In addition, in an actual industrial production process, because components of the gas mass flow controller are aged or abnormal, for example, a sensor wire is broken or electrical breakdown of the components occurs, the mass flow controller is out of control, for example, there is no flow or the flow cannot be controlled, which will greatly affect the actual production, and a light person will affect the quality of the product, and a heavy person will cause interruption of the production, which in turn causes a significant economic loss.
In view of the above, the present embodiment provides a flow valve opening degree control method for controlling the opening degree (opening degree) of a flow valve of a mass flow controller to improve the control accuracy and reliability of the flow valve. Wherein, the mass flow control device can be a gas mass flow controller, and the flow valve can be an electromagnetic valve. In the present embodiment, the gas mass flow controller and the solenoid valve are only used as examples for detailed description, but not limited to these examples, and the mass flow controller may be a liquid mass flow controller, and the flow valve may be an electric valve, a pneumatic valve, a hydraulic valve, or the like, as long as the opening and closing and opening degree of the valve can be controlled by a drive circuit.
As shown in fig. 1, a control schematic diagram of the flow valve opening degree control method may include the following steps S1 and S2.
In step S1, the actual drive signal is compared with the given drive signal.
In the operation process of the mass flow control device, the gas flow controller can be adopted by default to control the flow rate of the flow valve, and meanwhile, the flow valve opening controller is adopted to carry out simulation opening control (operation opening control process, but actual control is not carried out) on the flow valve, so that selective redundant control can be carried out on the opening of the flow valve, and the problem that the mass flow control device is out of control only through flow control is solved. The flow control means adjusting the flow valve according to the current actual flow of the flow valve and a set flow value to be reached by the flow valve. The opening degree control means that the flow valve is adjusted according to the current opening degree of the flow valve and the set opening degree to be reached by the flow valve. The opening degree can be understood as the valve opening degree of the flow valve, and generally the larger the opening degree, the larger the opening degree of the flow valve, and the larger the flow through the flow valve.
The gas flow Controller and the flow valve opening Controller can be integrated into one physical processor or can be separately arranged into two physical processors as long as the two sets of control systems for flow control and opening control can be adopted to carry out selective redundant control on the opening of the flow valve of the mass flow control device so as to solve the problem of out-of-control mass flow control device caused by flow control only.
In this embodiment, the actual flow rate of the flow valve can be detected in real time by the flow sensor, and a flow sensor signal is generated to be used as a process parameter for controlling the opening degree of the flow valve by the controller; the actual opening of the flow valve can be detected in real time through the displacement sensor, and a displacement sensor signal is generated to be used as a process parameter for controlling the opening of the flow valve through the controller. The gas flow controller can calculate the regulating quantity of the flow valve according to the PIC flow control algorithm according to the flow sensor signal and the set flow value, convert the regulating quantity into an actual driving signal of the flow valve driving circuit, and provide the actual driving signal to the flow valve driving circuit so as to enable the flow valve to reach the set flow value. Meanwhile, the flow valve opening controller also calculates the regulating quantity of the flow valve according to a PID position control algorithm through a displacement sensor signal and a set opening value, converts the regulating quantity into a given driving signal of a flow valve driving circuit, and provides the given driving signal to the flow valve driving circuit so that the flow valve can reach the set opening. And the flow valve opening controller also compares the actual driving signal with the given driving signal in real time to realize the real-time monitoring of the flow valve opening. When the flow rate control mode is actually used to control the opening degree of the flow valve, the given driving signal may be stored first, so that when the flow rate control mode needs to be switched to the opening degree control mode to control the opening degree of the flow valve, the given driving signal may be called and applied at any time.
In addition, during the operation of the mass flow control device, the pressure sensor signal (for representing the pressure of the air inlet of the flow valve), the flow sensor signal, the set flow value, the displacement sensor signal, the set opening value, the corresponding actual drive signal and the corresponding given drive signal may be stored as a time series data set, and may be specifically stored in an EEPROM database, and a corresponding data model may be established, and when the opening degree of the flow valve is subsequently controlled by using the opening degree control mode, the history closest to the current operating condition (the data set closest to the current parameters is searched from the data set) may be searched from the history data in the EEPROM database according to at least one of the pressure sensor signal, the flow sensor signal and the displacement sensor signal and at least one of the set flow value and the set opening value (for example, the current displacement sensor signal and the set opening value of the flow valve), determining the given driving signal under the historical working condition as the given driving signal required currently; or, according to the current process parameters, calculating the adjustment quantity of the currently required flow valve and the corresponding given driving signal through the data model.
And step S2, when the difference between the actual drive signal and the given drive signal exceeds a predetermined range, stopping supplying the drive signal to the flow valve drive circuit by the gas flow controller, and outputting the given drive signal to the flow valve drive circuit by the flow valve opening controller.
In the operation process of the mass flow control device, the flow valve opening controller can compare an actual driving signal with a given driving signal in real time and monitor the control state of the flow valve in real time, so that when the control precision of the flow control mode is reduced or out of control, the flow valve opening control is stopped by adopting the flow control mode, namely, the actual driving signal is stopped to be calculated according to a flow sensor signal and a set flow value, the actual driving signal is immediately converted into the opening control mode, the given driving signal determined by the flow valve opening controller is sent to a driving circuit of the flow valve in time, the undisturbed switching can be realized when the control mode is switched, and the phenomenon that the whole production process is greatly fluctuated due to the switching of the control mode is avoided.
The actual drive signal and the given drive signal can be voltage signals provided for the flow valve drive circuit, the drive circuit controls the opening and closing of the flow valve by adopting the voltage signals, and the flow valve can be adjusted and controlled with higher precision, so that the flow regulation precision of the mass flow control device is improved. Preferably, the predetermined range may be equal to or greater than-1V and equal to or less than 1V, that is, the absolute value of the phase difference between the two may be equal to or less than 1V.
It should be noted that the driving signal is a voltage signal of the driving circuit, which is only one embodiment of the present embodiment, and the present embodiment is not particularly limited thereto. For example, if a hydraulic valve or a pneumatic valve is used, the drive signal may be a hydraulic signal or a pneumatic signal.
Further, a changeover selection switch may be provided for switching between the two controllers, and accordingly, the flow valve opening controller (or the gas flow controller) may generate a changeover control signal and supply the changeover control signal to the changeover selection switch so as to electrically disconnect the gas flow controller from the input terminal of the flow valve driving circuit and to conduct the driving signal output terminal of the flow valve opening controller to the control terminal of the flow valve driving circuit. In particular, the switch selector switch may be integrated on one controller entity with the gas flow controller and the flow valve opening controller.
In a specific embodiment of this embodiment, when the difference between the actual driving signal and the given driving signal exceeds a predetermined range, an alarm signal may be generated and an alarm signal regarding a failure may be sent to a network master station, where the network master station may be understood as a server of the production system, and an operator performs manual intervention and control on the production system including the mass flow control device through the network master station. The mass flow control device may also initiate an analysis to find a failure point and find a failure cause, wherein the failure cause includes but is not limited to, for example, a sensor anomaly or a drive circuit anomaly.
It should be noted that the controller including the gas flow controller and the flow valve opening degree controller is only one specific embodiment of the present embodiment, and the specific structure and material of the controller are not particularly limited in the present embodiment as long as the method for controlling the opening degree of the flow valve can be implemented.
In the method for controlling the opening of the flow valve provided in this embodiment, an actual driving signal may be calculated according to a signal of the flow sensor and a set flow value, and the actual driving signal is provided to the flow valve to control the flow rate; the method can also determine a given driving signal through a displacement sensor signal and a set opening value, and monitor the opening control state of the flow valve in real time by comparing the actual driving signal with the given driving signal, when the difference between the actual driving signal and the given driving signal exceeds a preset range, the calculation of the actual driving signal according to the flow sensor signal and the set flow value is stopped, and the given driving signal is output to a flow valve driving circuit, so that the undisturbed switching of two control modes is realized, and the phenomenon that the switching of the control modes brings large fluctuation to the whole production process is avoided; meanwhile, a redundancy control design method is adopted, so that the control precision and reliability of the mass flow control device are improved, and great economic loss caused by out-of-control flow control to a user is avoided.
Based on the same concept of the above flow valve opening degree control method, the present embodiment further provides a controller, including: a storage unit on which an executable program is stored; and the processing unit can realize the flow valve opening degree control method of any embodiment when calling the executable program.
Specifically, in order to meet the requirements of the control accuracy and response speed of the gas mass flow controller in the production process, the controller used for the gas mass flow controller can adopt a processor with more than 32 bits to realize the data processing (including query, calculation and the like) functions of the controller.
The controller provided in this embodiment can execute the flow valve opening degree control method to achieve the beneficial effects that the flow valve opening degree control method can achieve, which are not described herein again.
Based on the same concept of the above-mentioned flow valve opening degree control method, the present embodiment further provides a flow valve, as shown in fig. 2, which includes a valve body 10, a moving assembly disposed in the valve body, and a displacement sensor 30 connected to the moving assembly. The mobile assembly is used for moving according to the received mobile signal so as to adjust the flow of the flow valve; the displacement sensor 30 is connected to the moving member, and is configured to determine an actual opening signal of the flow valve according to an amount of movement of the moving member, and send the actual opening signal to the flow valve opening controller.
The moving signal may be a signal for driving the moving component to move, such as a voltage or current signal; and may also refer to a moving force received by the moving assembly, which is not particularly limited in this embodiment. The actual opening signal is a signal capable of representing the actual opening of the flow valve, and may be, but is not limited to, the displacement sensor signal described above.
The flow valve provided by the embodiment comprises a valve body 10 and a moving component arranged in the valve body, and further comprises a displacement sensor 30, wherein the displacement sensor 30 can determine an actual opening signal of the flow valve according to the moving amount of the moving component so as to detect the opening of the flow valve in real time, and send the actual opening signal to a controller, so that the controller can execute the flow valve opening control method, and the accuracy and reliability of the flow valve opening control are improved.
Specifically, the moving assembly may constitute a fluid chamber with the valve body 10, the fluid chamber may be used for containing fluid, and the moving assembly is used for moving along the extending direction of the valve body 10 to adjust the size of the fluid chamber so as to adjust the opening degree of the flow valve. Wherein, the moving component can comprise a magnetic element 21, such as an armature, the flow valve can further comprise a magnetic coil 22, the magnetic coil 22 can be arranged in the valve body 10 and is arranged around the magnetic element 21, the magnetic coil 22 can generate a magnetic field with corresponding magnitude according to the received moving signal, and the magnetic element 21 can do linear motion along the extending direction of the valve body 10 under the action of the magnetic field to adjust the size of the fluid cavity.
As shown in fig. 2, the displacement sensor 30 may be a linear displacement sensor, and may include a main body 31 and a telescopic contact 32, the telescopic contact 32 may contact the moving assembly and move linearly in synchronization with the moving assembly, and the main body 31 is used to sense a moving position of the telescopic contact 32 to determine an actual opening signal of the flow valve. Specifically, the magnetic member 21 can move in the vertical direction in the figure to adjust the size of the fluid cavity, the telescopic contact 32 can contact with the upper end face of the magnetic member 21, when the magnetic member 21 moves in the vertical direction, the magnetic member 21 can drive the telescopic contact 32 to move, the body 31 connected with the telescopic contact 32 can detect the position of the telescopic contact 32 (a chip can be arranged on the telescopic contact 32, and the body 31 detects the position of the telescopic contact 32 through the chip), the position of the magnetic member 21 is determined, then an actual opening signal of the flow valve is determined, the actual opening signal is converted into a direct current signal of 4-20 mA, and the direct current signal is converted into a digital signal through a signal filter circuit and an a/D converter and is sent to a controller, so that the opening control of the flow valve is realized.
It should be noted that the structure of the displacement sensor 30 is only one embodiment of the present embodiment, and the present embodiment is not limited thereto as long as it can detect the valve opening degree of the flow valve.
In another embodiment of this embodiment, the flow valve may further comprise a sealing member, which may be disposed at an end of the valve body 10 near the moving assembly, for sealing the valve body 10. The telescopic contact 32 can be pressed against the end face of the moving assembly close to the telescopic contact 32 through a sealing piece, and the telescopic contact 32 is in sealing fit with the sealing piece, so that gas (or liquid) is prevented from leaking outwards through the displacement sensor 30.
Specifically, as shown in fig. 2, the sealing member may include a first sealing member 41 and a second sealing member 42 sequentially disposed along the moving direction of the moving assembly, and the first sealing member 41 may be connected to the valve body 10 and disposed at an end of the valve body 10 near the moving assembly. The second seal 42 may be connected with the first seal 41. Specifically, the second sealing member 42, the first sealing member 41 and the valve body 10 may be detachably connected by a fastening member, and may also be connected by welding or other methods, which is not limited in this embodiment. The telescopic contact 32 may be pressed against the end surface of the moving assembly near the telescopic contact through the second sealing member 42 and the first sealing member 41 in sequence, that is, the second sealing member 42 may be disposed at an end of the first sealing member 41 far from the moving assembly, and may seal a connection position of the first sealing member 41 and the telescopic contact 32. Thus, the two sealing elements respectively seal the connection positions between the valve body 10 and the telescopic contact 32 and the moving assembly, so as to seal the fluid cavity and further enhance the control precision of the flow valve. Wherein the second sealing member 42 may be a bellows to enhance the sealing effect thereof.
In another specific embodiment of this embodiment, the flow valve may further include a fixing bracket 33, and the fixing bracket 33 is connected to the valve body 10 and is used for supporting and fixing the displacement sensor 30, so that the overall structure of the flow valve is more stable and reliable, and the method for controlling the opening degree of the flow valve is implemented. Specifically, as shown in fig. 2, the fixing bracket 33 may include a horizontal support plate and a vertical support plate, the vertical support plate may be connected to the valve body 10, and the horizontal support plate may be fixed to the bottom of the body 31 of the displacement sensor 30 to position and support the displacement sensor 30. The horizontal supporting plate and the vertical supporting plate can be formed by bending a sheet metal part.
Based on the same concept of the above flow valve opening degree control method, this embodiment further provides a mass flow control device, which includes a flow valve, a flow valve driving circuit, and a controller, where the controller is configured to provide a driving signal to the flow valve driving circuit, and the flow valve driving circuit is configured to control an opening degree of the flow valve according to the received driving signal, where the flow valve is the flow valve according to any of the above embodiments.
The mass flow control device provided in this embodiment includes the controller and the flow valve, and can execute the flow valve opening degree control method to achieve the beneficial effects that can be achieved by the flow valve opening degree control method, which is not described herein again.
In a specific embodiment of this embodiment, the controller may include a gas flow controller and a flow valve opening controller, where the gas flow controller is connected to the flow valve and is configured to provide an actual driving signal to the driving circuit according to a real-time flow value and a preset set flow value, so as to adjust an opening of the flow valve. The flow valve opening controller is connected with the flow valve and used for: acquiring an actual driving signal provided by a gas flow controller to a flow valve driving circuit; comparing the actual driving signal with a given driving signal, wherein the given driving signal refers to a driving signal for enabling the flow valve to reach a set opening degree; when the difference between the actual drive signal and the given drive signal exceeds a predetermined range, the supply of the drive signal to the flow valve drive circuit by the gas flow controller is stopped, and the given drive signal is output to the flow valve drive circuit by the flow valve opening controller.
In another specific implementation manner of this embodiment, the mass flow control device may further include a switching selection switch, and the controller is further configured to generate a switching control signal and provide the switching control signal to the switching selection switch, so that the gas flow controller is electrically disconnected from the input end of the flow valve driving circuit, and the driving signal output end of the flow valve opening degree controller is electrically connected to the control end of the flow valve driving circuit. The controller may provide the switching control signal to the switching selection switch when a difference between the actual driving signal and the given driving signal exceeds a predetermined range; and the switching selection switch is used for conducting the driving signal output end of the controller with the control end of the flow valve driving circuit when receiving the switching control signal.
In another embodiment of this embodiment, the mass flow control device is further configured to calculate or search a database for a corresponding given driving signal according to at least one of the pressure sensor signal, the flow sensor signal and the displacement sensor signal and at least one of the set flow value and the set opening value; the pressure sensor signal is used for representing the pressure of an air inlet of the flow valve, the flow sensor signal is used for representing the actual flow of the flow valve, and the displacement sensor signal is used for representing the actual opening degree of the flow valve.
In addition, the mass flow control device can automatically determine the zero point of the flow valve, that is, after the mass flow control device is started and initialized, the controller can read the direct current signal sent by the linear displacement sensor 30 at the current moment and use the direct current signal as the displacement sensor signal in the state that the flow valve is closed, that is, the opening signal corresponding to the armature zero displacement, so as to determine the zero point of the flow valve.
For the mass flow control device, as shown in fig. 3, after the device is turned on, it may first select whether to adopt a default control mode (flow control mode), if so, the controller calculates an actual driving signal according to the PIC control algorithm by adopting the flow control mode, and at the same time, calculates a given driving signal according to the PID control algorithm by adopting the opening control mode, compares the deviation of the two driving signals, determines whether the deviation is too large, if not, it continues to execute according to the flow control mode, and provides the calculated actual driving signal to the driving circuit of the flow valve, and may also store the pressure sensor signal, the flow sensor signal, the displacement sensor signal, the set flow value and the set opening value, etc. in the EEPROM memory; if the deviation is overlarge, the control mode can be switched to an opening control mode for control, the calculated given driving signal is provided for a driving circuit of the flow valve, and an alarm signal can be sent to a master station network. If the default control mode (flow control mode) is not adopted, the opening degree control mode can be directly started to calculate the given driving signal according to the PID control algorithm, and the given driving signal is provided for a driving circuit of the flow valve.
It is to be understood that the above embodiments are merely exemplary embodiments that are employed to illustrate the principles of the present application, and that the present application is not limited thereto. It will be apparent to those skilled in the art that various changes and modifications can be made therein without departing from the spirit and scope of the application, and these changes and modifications are to be considered as the scope of the application.
In the description of the present application, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referred device or element must have a particular orientation, be constructed in a particular orientation, and be operated, and thus should not be construed as limiting the present application.
The terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless otherwise specified.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.
In the description herein, particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing is only a partial embodiment of the present application, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present application, and these modifications and decorations should also be regarded as the protection scope of the present application.
Claims (11)
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| CN113007405B (en) | 2023-06-06 |
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Address after: 100176 4s01, 4th floor, building 1, No.8 courtyard, Wenchang Avenue, Beijing Economic and Technological Development Zone, Daxing District, Beijing Patentee after: Beijing Huacheng Electronics Co.,Ltd. Country or region after: China Address before: 100176 room 506, building 1, 8 Wenchang Avenue, Beijing Economic and Technological Development Zone, Beijing Patentee before: BEIJING SEVENSTAR FLOW Co.,Ltd. Country or region before: China |