CN113005401A - Web tensioning method and web tensioning device - Google Patents
Web tensioning method and web tensioning device Download PDFInfo
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- CN113005401A CN113005401A CN202110217987.2A CN202110217987A CN113005401A CN 113005401 A CN113005401 A CN 113005401A CN 202110217987 A CN202110217987 A CN 202110217987A CN 113005401 A CN113005401 A CN 113005401A
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- 238000001704 evaporation Methods 0.000 claims abstract description 228
- 230000008020 evaporation Effects 0.000 claims abstract description 227
- 238000012216 screening Methods 0.000 claims abstract description 52
- 230000008569 process Effects 0.000 claims description 48
- 230000007246 mechanism Effects 0.000 claims description 39
- 238000003892 spreading Methods 0.000 claims description 25
- 230000007480 spreading Effects 0.000 claims description 9
- 230000009471 action Effects 0.000 claims description 8
- 238000003466 welding Methods 0.000 claims description 8
- 238000001179 sorption measurement Methods 0.000 claims description 5
- 238000007740 vapor deposition Methods 0.000 description 44
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 description 31
- 238000000576 coating method Methods 0.000 description 20
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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Abstract
The embodiment of the application provides a net tensioning method and a net tensioning device. The web tensioning method in the first aspect of the embodiment of the application includes: providing a universal evaporation mask, wherein the universal evaporation mask comprises an edge and a latticed shielding part which is enclosed by the edge and is provided with a plurality of evaporation openings, the edge is provided with an evaporation section and a shielding section which are distributed in sequence in the extending direction of the edge, the evaporation section corresponds to the evaporation openings, and the shielding section corresponds to the shielding part; the edge is provided with mean value screening tension force to enable the universal evaporation mask to be screened along the screening direction, and the mean value screening tension force provides the same tension force for the evaporation section and the shielding section of the edge, so that the evaporation section and the shielding section move in the screening direction in parallel and in an equal manner. So that the extensions of the plurality of shades in the direction of the netting are the same. The deformation uniformity of a plurality of evaporation openings in the general evaporation mask is guaranteed, and the mesh opening accuracy of the general evaporation mask is improved, so that the evaporation precision is improved, and the display quality and the reliability of the display panel are improved.
Description
Technical Field
The invention relates to the technical field of mask net stretching, in particular to a net stretching method and a net stretching device.
Background
A display module having an Organic Light-Emitting Diode (OLED) display panel is widely used in various consumer electronic products such as mobile phones, televisions, personal digital assistants, digital cameras, notebook computers, desktop computers, and the like, because the display module has the advantages of high image quality, power saving, thin body, and wide application range.
Generally, when an evaporation process is adopted to prepare an OLED display panel, the problems of low display quality of the display panel, poor reliability of the display panel and the like are easily caused by poor evaporation and low evaporation precision.
Therefore, a new web-spreading method and a new web-spreading device are urgently needed.
Disclosure of Invention
The embodiment of the application provides a net tensioning device and a net tensioning method.
The web tensioning method provided by the first aspect of the embodiment of the application includes:
providing a universal evaporation mask, wherein the universal evaporation mask comprises an edge and a latticed shielding part which is enclosed by the edge and is provided with a plurality of evaporation openings, the edge is provided with an evaporation section and a shielding section which are distributed in sequence in the extending direction of the edge, the evaporation section corresponds to the evaporation openings, and the shielding section corresponds to the shielding part;
the edge is provided with mean value screening tension force to enable the universal evaporation mask to be screened along the screening direction, and the mean value screening tension force provides the same tension force for the evaporation section and the shielding section of the edge, so that the evaporation section and the shielding section move in the screening direction in parallel and in an equal manner.
According to the mesh stretching method provided by the application in the first aspect, in the process of stretching the mesh of the general mask, the evaporation coating section and the shielding section in the edge of the general mask move in the mesh stretching direction in parallel and equally, so that a plurality of shielding parts in the general evaporation coating mask also extend in parallel and equally along the mesh stretching direction, and the extension amounts of the plurality of shielding parts in the mesh stretching direction are the same. The deformation uniformity of a plurality of evaporation openings in the general evaporation mask is guaranteed, and the mesh opening accuracy of the general evaporation mask is improved, so that the evaporation precision is improved, and the display quality and the reliability of the display panel are improved.
In one possible embodiment of the first aspect of the present application, in the step of providing a generic evaporation mask,
the edges are enclosed to form a rectangular structure, opposite first edges are arranged in the first net stretching direction, and the first edges correspond to a plurality of first shielding parts extending along the second net stretching direction; and the second edge corresponds to a plurality of second shielding parts extending along the first net direction, and the first net direction is vertical to the second net direction.
In a possible embodiment of the first aspect of the present application, the step of providing a mean value screen tension to the edge to make the universal evaporation mask screen along the screen direction, where the mean value screen tension provides the same tension to both the evaporation section and the shielding section of the edge, so that the evaporation section and the shielding section move in the screen direction in parallel and equally, includes:
fixing one of the two oppositely arranged first edges, and providing a first mean value net tensioning force for the other one of the two oppositely arranged first edges so that the general evaporation mask is tensioned along the second net tensioning direction; or,
and (3) providing a first mean value net tensioning force for the two first edges which are oppositely arranged, so that the general evaporation mask is tensioned along the second net tensioning direction.
In a possible embodiment of the first aspect of the present application, the step of providing the average tensioning force to the edge makes the universal evaporation mask perform tensioning along the tensioning direction, and the average tensioning force provides the same tensioning force to both the evaporation section and the shielding section of the edge, so that the evaporation section and the shielding section move in the tensioning direction in parallel and equally:
a first stretching mechanism is adopted to provide a first mean value stretching force, the first stretching mechanism is provided with a first attaching part arranged on a first edge, in a second stretching direction, the orthographic projection of the first attaching part on the general evaporation mask covers at least part of the first edge, and in the extending direction of the first edge, the orthographic projection of the first attaching part on the general evaporation mask covers each evaporation section and each shielding section in the first edge;
preferably, the first attaching portion is of an integral structure, or the first attaching portion is composed of a plurality of first sub attaching portions.
In a possible embodiment of the first aspect of the present application, the step of providing the average tensioning force to the edge makes the universal evaporation mask perform tensioning along the tensioning direction, and the average tensioning force provides the same tensioning force to both the evaporation section and the shielding section of the edge, so that the evaporation section and the shielding section move in the tensioning direction in parallel and equally:
the first attaching part is arranged on the first edge in a clamping mode; or the first attaching part is arranged on the first edge in a welding mode; or the first attaching part is arranged on the first edge in a magnetic adsorption mode.
In a possible embodiment of the first aspect of the present application, the step of providing a mean value screen tension to the edge to make the universal evaporation mask screen along the screen direction, where the mean value screen tension provides the same tension to both the evaporation section and the shielding section of the edge, so that the evaporation section and the shielding section move in the screen direction in parallel and equally, includes:
fixing one of the two second edges which are oppositely arranged, and providing a second mean value net tensioning force for the other one of the two second edges which are oppositely arranged so that the general evaporation mask is tensioned along the first net tensioning direction; or,
and providing a second mean value net stretching force for the two second edges which are oppositely arranged, so that the general evaporation mask is net stretched along the first net stretching direction.
In a possible embodiment of the first aspect of the present application, the step of providing the average tensioning force to the edge makes the universal evaporation mask perform tensioning along the tensioning direction, and the average tensioning force provides the same tensioning force to both the evaporation section and the shielding section of the edge, so that the evaporation section and the shielding section move in the tensioning direction in parallel and equally:
a second stretching mechanism is adopted to provide a second mean value stretching force, the second stretching mechanism is provided with a second attaching part arranged on a second edge, in the first web direction, the orthographic projection of the second attaching part on the general evaporation mask covers at least part of the second edge, and in the extending direction of the second edge, the orthographic projection of the second attaching part on the general evaporation mask covers each evaporation section and each shielding section in the second edge;
preferably, the second attaching portion is of an integral structure, or the second attaching portion is composed of a plurality of second sub attaching portions;
preferably, the second attaching portion is arranged on the second edge in a clamping manner; or the second attaching part is arranged on the second edge in a welding mode; or the second attaching part is arranged at the second edge in a magnetic adsorption mode.
The second aspect of the application provides a mesh-opening device, which is used for opening a mesh for a general evaporation mask, wherein the general evaporation mask comprises an edge and a latticed shielding part which is enclosed by the edge and provided with a plurality of evaporation openings, the edge is provided with an evaporation section and a shielding section which are distributed in sequence in the extending direction of the edge, the evaporation section corresponds to the evaporation openings, and the shielding section corresponds to the shielding part;
the net tensioning device is provided with a stretching mechanism which provides the average net tensioning force to the edge,
the stretching mechanism comprises a bonding part arranged at the edge in the process of net stretching and a force application part connected with the bonding part, and the wide bonding end of the bonding part is fixedly arranged at the edge and corresponds to each evaporation section and each shielding section in the process of net stretching;
preferably, the attaching portion is fixedly connected with the force application portion or detachably connected with the force application portion.
The device of stretching out that this application second aspect provided, and stretch out the net in-process stretching mechanism and provide mean value to the edge of general evaporation coating film and stretch out the net pulling force, guarantee that general evaporation coating film stretches out the tensile deformation uniformity of net in-process evaporation coating film, improve the degree of accuracy of stretching out of general evaporation coating film to improve general evaporation coating film and stretch out net efficiency.
In a possible implementation manner of the second aspect of the present application, the attaching portion is an integral structure, an orthographic projection of the attaching portion on a plane where the general evaporation mask is located in the web spreading process is an isosceles trapezoid-like shape, a bottom side of the isosceles trapezoid-like shape corresponds to the wide attaching end, and a top side of the isosceles trapezoid-like shape corresponds to a joint of the attaching portion and the force application portion; or,
the attaching part is composed of a plurality of sub attaching parts, the orthographic projection shape of each sub attaching part on the plane where the universal evaporation mask is located is an isosceles trapezoid-like shape, the bottom edge of each isosceles trapezoid-like shape corresponds to the sub wide attaching end, and the top edge of each isosceles trapezoid-like shape corresponds to the joint of each sub attaching part and each sub force application part.
In one possible embodiment of the second aspect of the present application, the web spreading device further comprises a guiding mechanism,
the guide mechanisms are arranged on two opposite sides of the attaching part, so that the attaching part moves in parallel along the net stretching direction under the guide action of the guide mechanisms in the net stretching process;
preferably, guiding mechanism is including setting up in a set of slide rail of the relative both sides of laminating portion, and the extending direction of slide rail is on a parallel with and opens the net direction.
Drawings
Other features, objects and advantages of the invention will become apparent from the following detailed description of non-limiting embodiments thereof, when read in conjunction with the accompanying drawings, in which like reference characters designate the same or similar parts throughout the figures thereof, and which are not to scale.
FIG. 1 is a schematic structural diagram of a general vapor deposition mask clamped by a plurality of small clamping jaws for preparing a mesh;
FIG. 2 is a schematic view of a partial structure of a general evaporation mask after being screened by a general screening method;
FIG. 3 is a schematic flow chart of an evaporation method according to a first aspect of an embodiment of the present disclosure;
fig. 4 is a schematic structural diagram of a general evaporation substrate in the first aspect of the embodiment of the present application;
FIG. 5 is a schematic flow chart of another method for screening in the first aspect of the embodiment of the present application;
fig. 6 is a schematic flow chart of a further web expanding method in the first aspect of the embodiment of the present application;
FIG. 7 is a schematic flow chart of another web-expanding method according to the first aspect of the embodiment of the present application;
fig. 8 is a schematic flow chart of yet another web expanding method in the first aspect of the embodiment of the present application;
FIG. 9 is a schematic diagram of a web-spreading process in accordance with the first aspect of an embodiment of the present application;
FIG. 10 is a schematic view of another web spreading process in the first aspect of the embodiment of the present application;
FIG. 11 is a schematic view of a partial structure of a screen device in a second aspect of the embodiment of the present application (in the figure, a general vapor deposition mask is used as an aid to the description of the structure of the screen device);
fig. 12 is a schematic view of a partial structure of another screen device according to the second aspect of the embodiment of the present application (in the figure, a general evaporation mask is used as an aid to the description of the screen device structure).
In the figure:
general evaporation mask-1; edge-11; a first edge-111; a second edge-112; an evaporation section-113; a first evaporation section-113 a; a second evaporation section-113 b; an occlusion section-114; a first occlusion section-114 a; a second occlusion section-114 b;
a shielding portion-12; a first shielding portion-121; a second shade-122;
evaporation opening-13;
a stretching mechanism-2; a first bonded portion-21 a; a second bonded portion-21 b; a first sub-attaching portion-211 a; a second sub-attaching portion-211 b; broad width compliant end-212; a force application part-22; a sub force application part-221;
a clamping jaw-3;
a first web direction-X;
a second web direction-Y;
a guide mechanism-4.
Detailed Description
Features and exemplary embodiments of various aspects of the present invention will be described in detail below, and in order to make objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not to be construed as limiting the invention. It will be apparent to one skilled in the art that the present invention may be practiced without some of these specific details. The following description of the embodiments is merely intended to provide a better understanding of the present invention by illustrating examples of the present invention.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
Generally, when an evaporation process is adopted to prepare an OLED display panel, the problems of low display quality of the display panel, poor reliability of the display panel and the like are easily caused by poor evaporation and low evaporation precision. In the course of research, the inventors found that the low deposition accuracy of the common film layer in the display panel causes the problems of low display quality of the display panel and poor reliability of the display panel. It is understood that in some examples, the common film layer of the display panel participates in the formation of the plurality of light emitting devices in the display panel, and is continuously distributed in the directions perpendicular to the light emitting direction of the display panel. In some examples, the common film layer in the display panel includes a hole transport layer, a hole blocking layer, an electron transport layer, an electron injection layer, a cathode layer, and the like. Generally, a common film layer in a display panel is mostly prepared by evaporation of a common mask. When preparing the common film layer by evaporation, if the shape and the position of the evaporation opening on the general mask plate have deviation, the evaporation material is lost in the preset evaporation area of the common film layer of the substrate to be evaporated in the evaporation process, or the distribution of the evaporation material is uneven in the preset evaporation area of the common film layer due to the offset of the evaporation position. The phenomena of evaporation material loss, uneven distribution of the evaporation material and the like cause the problems of partial defect of the formed common film layer, uneven layer thickness and the like, and influence the display quality and reliability of the display panel.
As shown in fig. 1, fig. 1 is a schematic structural diagram of a general-purpose vapor deposition mask 1 clamped by a plurality of small-sized clamping jaws 3 when performing mesh preparation, and the reason that deviations in the shapes and positions of vapor deposition openings on the general-purpose mask are caused by partially clamping an edge 11 of the general-purpose vapor deposition mask 1 by the plurality of small-sized clamping jaws 3 in a mesh direction in the process of preparing the general-purpose mask in the mesh direction, and the small-sized clamping jaws 3 are generally arranged on the edge 11 at intervals and correspond to shielding portions 12 in the mesh direction. It should be noted that, in fig. 1, for clarity, the first shielding portion 121 and the second shielding portion 122 are shown, one of the first shielding portion 121 is shaded, and the other one of the second shielding portion 122 is shaded.
As shown in fig. 2, fig. 2 is a partial schematic view of a general vapor deposition mask 1 that is screened by a general screening method, in which a small rectangular dotted frame in fig. 2 is a vapor deposition opening shape required after vapor deposition of the general mask screen, and a small trapezoid is a vapor deposition opening shape after vapor deposition of the general mask screen. In the screen-spreading process, force is respectively applied to each part of the edge 11 of the universal evaporation mask 1 through a plurality of small clamping jaws which are arranged on the evaporation mask at intervals so as to control the positions, sizes and shapes of the evaporation openings 3 which are arranged in different rows in the screen-spreading direction. Because the part of the edge 11 of the universal evaporation mask 1 in the screen-opening direction corresponds to different shielding parts and is stressed unevenly (for example, the part is stressed unevenly by the tension of the screen and/or the clamping force of the clamping jaw is uneven) in the screen-opening process, the stretching elongation of each part of the edge 11 of the universal evaporation mask 1 is different, so that the outward expansion deformation of each evaporation opening 3 of the universal evaporation mask 1 behind the screen is inconsistent, and the positions of the evaporation openings 3 deviate from the preset positions. Finally, the shape of the evaporation opening 3 tends to a special-shaped quadrangle, the outward expansion deformation of the evaporation opening 3 does not reach the expected problem, and the like, so that the screen precision of the evaporation mask 1 is low, the evaporation precision is low when the common film layer of the display panel is prepared by evaporation, and the display quality and the reliability of the display panel are influenced.
The present application has been made in view of analysis and finding of the above-mentioned problems.
As shown in fig. 3, a web tensioning method provided in the first aspect of the embodiment of the present application includes:
and S10, providing a universal evaporation mask, wherein the universal evaporation mask comprises an edge and a grid-shaped shielding part which is enclosed by the edge and is provided with a plurality of evaporation openings, the edge is provided with an evaporation section and a shielding section which are distributed in sequence in the extending direction of the edge, the evaporation section corresponds to the evaporation openings, and the shielding section corresponds to the shielding part.
And S20, providing average screen tension for the edge to make the general evaporation mask screen along the screen direction, wherein the average screen tension provides the same tension for the evaporation section and the shielding section of the edge to make the evaporation section and the shielding section move along the screen direction in parallel and in an equal manner.
According to the mesh stretching method provided by the first aspect of the embodiment of the application, in the process of stretching a universal mask, the evaporation section and the shielding section in the edge of the universal evaporation mask move in the mesh stretching direction in parallel and equally, so that the plurality of shielding parts in the universal evaporation mask also extend in parallel and equally along the mesh stretching direction, and the extension amounts of the plurality of shielding parts in the mesh stretching direction are the same. The deformation uniformity of a plurality of evaporation openings in the general evaporation mask is guaranteed, and the mesh opening accuracy of the general evaporation mask is improved, so that the evaporation precision is improved, and the display quality and the reliability of the display panel are improved.
The vapor deposition section is a name of a portion of the edge of the vapor deposition mask corresponding to the vapor deposition opening, and the shielding section is a name of a portion of the edge of the vapor deposition mask corresponding to the shielding portion, and it should not be understood that the function, shape, size, and the like of different portions of the edge of the vapor deposition mask are limited.
As shown in fig. 4, in some alternative embodiments, in the step of providing the universal evaporation mask at S10, edges 11 of universal evaporation mask 1 are enclosed to form a rectangular structure. The universal vapor deposition mask 1 includes an edge 11 and a grid-shaped shielding portion 12 surrounded by the edge 11 and having a plurality of vapor deposition openings 13. The general vapor deposition mask 1 has first edges 111 facing each other in the first sheet direction X, and the first edges 111 correspond to a plurality of first shielding portions 121 extending in the second sheet direction Y. The general vapor deposition mask 1 has a second edge 112 opposite to each other in the second sheet direction Y, the second edge 112 corresponds to a plurality of second shielding portions 122 extending in the first sheet direction X, and the first sheet direction X is perpendicular to the second sheet direction Y.
As shown in fig. 5, in some alternative embodiments, step S20 includes the following steps:
s21a, fixing one of the two first edges, and providing a first mean stretching force to the other of the two first edges, so that the universal evaporation mask stretches along the second stretching direction.
In the embodiments, in the screen-spreading process, a fixing mechanism is adopted in the general evaporation mask to fix one of the two oppositely-arranged first edges at a set position in the second screen-spreading direction all the time, and a first average screen-spreading tension is provided for the other one of the two oppositely-arranged first edges. According to the force interaction principle, in the screen stretching process, the fixed one of the two first edges which are oppositely arranged is also subjected to the tension action which is the same as the tension of the first average screen stretching force and has the opposite direction, so that the universal evaporation mask can be stretched along the second screen stretching direction. The first mean net tensioning force is parallel to the second net tensioning direction.
As shown in fig. 6, in some alternative embodiments, step S20 includes the following steps:
and S21b, providing a first average value screen tension force for the two oppositely arranged first edges, so that the universal evaporation mask is screened along the second screen direction.
In these embodiments, the first mean web tension is parallel to the second web direction.
As shown in fig. 7, in some alternative embodiments, step S20 includes the following steps:
s21c, fixing one of the two second edges, and providing a second mean stretching force to the other of the two second edges, so that the universal evaporation mask is stretched along the first stretching direction.
In the embodiments, in the screen tensioning process, a fixing mechanism is adopted in the universal evaporation mask to fix one of the two oppositely arranged second edges at a set position all the time in the first screen direction, and a second average screen tensioning force is provided for the other one of the two oppositely arranged second edges. According to the force interaction principle, in the screen stretching process, the fixed one of the two second edges which are oppositely arranged is also subjected to the tension action which is the same as the tension of the second average screen stretching force and is opposite to the tension of the second average screen stretching force, so that the universal evaporation mask can be stretched in the first screen stretching direction. The second mean web tension is parallel to the first web direction.
As shown in fig. 8, in some alternative embodiments, step S20 includes the following steps:
and S21d, providing a second average tensioning force for the two oppositely arranged second edges, so that the universal evaporation mask is tensioned along the first tensioning direction.
In these embodiments, the second mean web tension is parallel to the first web direction.
In some alternative embodiments, in step S20,
the first average value stretching force is provided by adopting a first stretching mechanism, the first stretching mechanism is provided with a first attaching portion arranged on a first edge, in the second stretching direction, the orthographic projection of the first attaching portion on the general evaporation mask covers at least part of the first edge, and in the extending direction of the first edge, the orthographic projection of the first attaching portion on the general evaporation mask covers each evaporation section and each shielding section in the first edge.
As shown in fig. 9, in some examples, the first attachment portion 21a is a unitary structure, and the first attachment portion 21a is fixedly attached to the first edge 111 during the web-spreading process. In the second web direction Y, an orthogonal projection of the first bonding portion 21a on the common vapor deposition mask 1 is made to cover at least a part of the first edge 111. Since it is necessary to provide the first mean value of the stretching force to the edge in the stretching process so that each of the first vapor deposition sections 113a and each of the first shielding sections 114a in the first edge 111 move in the second stretching direction Y (i.e., the stretching direction of the universal vapor deposition mask at this time) in parallel and equally, the first bonding portion 21a serves as a contact-type force transmitter between the force applying portion of the first stretching mechanism and the universal vapor deposition mask 1, and in the stretching process, it is necessary to fixedly connect each of the first vapor deposition sections 113a and each of the first shielding sections 114a of the first edge 111 in a contact manner in the extending direction of the first edge 111 itself. That is, in the extending direction of the first edge 111 itself (parallel to the first web direction), the orthogonal projection of the first bonding portion 21a on the common vapor deposition mask 1 covers each of the first vapor deposition sections 113a and each of the first shielding sections 114a in the first edge 111.
As shown in fig. 10, in some examples, the first fit portion is constituted by a plurality of first sub-fit portions 211a, which are successively distributed along the extension direction of the first edge 111 itself during the web-expanding process. The first sub-attaching portions 211a are fixedly connected to the first edge 111 such that an orthographic projection of the first attaching portion 21a on the common vapor deposition mask 1 in the second web direction Y covers at least a portion of the first edge 111. It is necessary to provide a first mean value of the stretching force to the first edge 111 during the stretching process so that each first evaporation section 113a and each first shielding section 114a in the first edge 111 move in parallel and equally along the second stretching direction Y (i.e. the stretching direction). Further, since the first bonding portion composed of the plurality of first sub-bonding portions 211a serves as a contact-type force transmission member between the biasing portion of the first stretching mechanism and the common vapor deposition mask 1, the first bonding portion needs to be fixedly connected in contact with each of the first vapor deposition sections 113a and each of the first shielding sections 114a of the first edge 111 in the extending direction of the first edge 111 itself during the web-stretching process. That is, in the extending direction of the first edge 111 itself, the orthogonal projection of the first bonding portion including the plurality of first sub-bonding portions 211a on the common vapor deposition mask 1 covers each of the first vapor deposition sections 113a and each of the first shielding sections 114a in the first edge 111. In some examples, in the extending direction of the first edge 111 itself, the orthogonal projection of the first sub-lamination portion 211a on the universal evaporation mask 1 covers at least one adjacent first evaporation section 113a and one first shielding section 114a in the first edge 111.
In some optional embodiments, the first attaching portion is disposed on the first edge in a clamping manner, and the first attaching portion has a first clamping portion and a second clamping portion for clamping the first edge. First laminating portion adopts the centre gripping mode to do benefit to when setting up in first edge and improves the efficiency that general coating by vaporization mask opened the net.
In some optional embodiments, the first attaching portion is disposed on the first edge by welding. In some examples, a large-sized general evaporation mask needs to be adopted to be suitable for a large-sized substrate to be evaporated, the edge of the large-sized general evaporation mask is long, in order to ensure that a first attaching portion is always and stably arranged on a first edge in a net stretching process, so that each first evaporation section and each first shielding section in the first edge move parallelly and equally along the direction of a second net in the net stretching process, the first attaching portion is arranged on the first edge in a welding mode to increase the connection strength of the first attaching portion and the general evaporation mask.
In some optional embodiments, the first attaching portion is disposed on the first edge in a magnetic attraction manner. In some examples, the first attaching portion is arranged on the first edge in a magnetic adsorption manner, so that the arrangement efficiency of the first attaching portion can be improved, the connection strength between the first edge and the first attaching portion is ensured, the first edge can be prevented from being wrinkled in the connection process with the first attaching portion, the net tensioning quality is further ensured, and the net tensioning precision is improved.
In some alternative embodiments, in step S20,
and in the extending direction of the second edge, the orthographic projection of the second attaching part on the general evaporation mask covers each evaporation section and each shielding section in the second edge.
Referring also to fig. 9, in some examples, the second attachment portion 21b is a unitary structure, and the second attachment portion 21b is fixedly attached to the second edge 112 during the web-spreading process. In the first web direction X, an orthogonal projection of the second bonding section 21b on the universal vapor deposition mask 1 is made to cover at least a part of the second edge 112. As the second average value screen tension is required to be provided to the edge in the screen tensioning process, each second evaporation section 113b and each second shielding section 114b in the second edge 112 move in parallel and equally along the first screen tensioning direction X (i.e. the screen tensioning direction); since the second bonding portion 21b serves as a contact force transmission member between the biasing portion of the second stretching mechanism and the common vapor deposition mask 1, it is necessary to fixedly connect the second bonding portion to each of the second vapor deposition sections 113b and each of the second shielding sections 114b of the second edge 112 in a contact manner in the extending direction of the second edge 112 itself during the web stretching process. That is, in the extending direction of the second edge 112 itself, the orthogonal projection of the second bonding portion 21b on the common vapor deposition mask 1 covers each second vapor deposition section 113b and each second shielding section 114b in the second edge 112.
Referring to fig. 10, in some examples, the second attaching portion is formed by a plurality of second sub-attaching portions 211b, the plurality of second sub-attaching portions 211b are sequentially distributed along the extending direction of the second edge 112 during the web-opening process, and the plurality of second sub-attaching portions 211b are fixedly connected with the second edge 112. So that the orthographic projection of the second attaching part on the universal evaporation mask 1 in the first web direction X covers at least part of the second edge 112. Since it is necessary to provide the second edge 112 with the second mean value of the stretching force during the web-spreading process so that the second vapor deposition sections 113b and the second shielding sections 114b in the second edge 112 move in parallel and equally along the first web-spreading direction X (i.e., the web-spreading direction), the second bonding portion formed by the plurality of second sub-bonding portions 211b needs to be fixedly connected in contact with the second vapor deposition sections 113b and the second shielding sections 114b of the second edge 112 in the extending direction of the second edge 112 itself as a contact-type force transmission body between the force application portion of the second stretching mechanism and the universal vapor deposition mask 1 during the web-spreading process. That is, in the extending direction of the second edge 112 itself, the orthogonal projection of the second bonding portion constituted by the plurality of second sub-bonding portions 211b on the common vapor deposition mask 1 covers each of the second vapor deposition sections 113b and each of the second shielding sections 114b in the second edge 112. In some examples, in the extending direction of the second edge 112 itself, the orthogonal projection of the second sub-lamination portion 211b on the universal evaporation mask 1 covers at least one adjacent second evaporation section 113b and one second shielding section 114b in the second edge 112.
In some embodiments, the second fitting portion is disposed on the second edge in a clamping manner.
In some embodiments, the second fitting portion is disposed on the second edge by welding.
In some embodiments, the second fitting portion is disposed on the second edge in a magnetic absorption manner.
The effect of the second attaching portion corresponding to the manner of the second edge is corresponding to the effect of the first attaching portion corresponding to the manner of the first edge, and the description is omitted here.
In some optional embodiments, in the process of screening the general evaporation mask, a first attaching portion is disposed on each of two opposite first edges in a first screening direction, and a second attaching portion is disposed on each of two opposite second edges in a second screening direction, so that a first average screening tension is provided to the first edges and a second average screening tension is provided to the second edges at the same time. In the general evaporation mask screening process, each first evaporation section and each first shielding section in the first edge move in parallel and equally along the second screening direction, and each second evaporation section and each second shielding section in the second edge move in parallel and equally along the first screening direction. The method has the advantages that the outward expansion deformation of each evaporation opening in the universal evaporation mask is consistent, the mesh opening accuracy is improved, the size, the shape and the position of each evaporation opening in the universal mask after the mesh opening are ensured to meet the expectation, the evaporation precision is improved, and the display quality and the reliability of the display panel are improved.
As shown in fig. 11, a second aspect of the present application provides a web stretching apparatus of a web stretching method. The mesh spreading device is used for spreading a mesh on a general evaporation mask, the general evaporation mask comprises an edge and a latticed shielding part which is enclosed by the edge and is provided with a plurality of evaporation openings, the edge is provided with an evaporation section and a shielding section which are distributed in sequence in the extending direction of the edge, the evaporation section corresponds to the evaporation openings, and the shielding section corresponds to the shielding part; the net stretching device is provided with a stretching mechanism for providing mean net stretching force for the edges, the stretching mechanism comprises a bonding part arranged on the edges and a force application part connected with the bonding part in the net stretching process, and the wide bonding end of the bonding part is fixedly arranged on the edges and corresponds to each evaporation section and each shielding section in the net stretching process.
As shown in fig. 11, the web stretching device has a stretching mechanism 2 for providing a mean web stretching force to the edge 11, the stretching mechanism 2 includes a bonding portion (a first bonding portion 21a or a second bonding portion 21b) provided at the edge 11 during web stretching and a force applying portion 22 connected to the bonding portion, and the wide bonding end 212 of the bonding portion 21 is fixedly provided at the edge 11 and corresponds to each vapor deposition section and each shielding section during web stretching. For example, the wide bonding end of the first bonding portion 21a is fixed to the first edge 111, and corresponds to each of the first vapor deposition sections 113a and each of the first shielding sections 114 a. The wide bonding end of the second bonding portion 21b is fixed to the second edge 112, and corresponds to each of the second vapor deposition sections 113b and each of the second shielding sections 114 b.
In some alternative embodiments, the attaching portion is fixedly connected to the force application portion 22, and in some examples, the attaching portion and the force application portion 22 are of an integral structure, and the attaching portion includes a first clamping portion and a second clamping portion for clamping the edge 11 of the universal evaporation mask 1.
In other alternative embodiments, the attachment portion is detachably connected to the force application portion 22, and in some examples, the attachment portion is provided with a clamping fit structure, and the force application portion 22 is provided with a clamping structure, and the attachment portion is connected to the force application portion 22 in a clamping manner. In some examples, the universal evaporation mask 1 is connected with the attaching portion in the screen-spreading process by a press welding mode.
The device of stretching out that this application second aspect provided, and stretch out the net in-process stretching mechanism and provide mean value to the edge of general evaporation coating film and stretch out the net pulling force, guarantee that general evaporation coating film stretches out the tensile deformation uniformity of net in-process evaporation coating film, improve the degree of accuracy of stretching out of general evaporation coating film to improve general evaporation coating film and stretch out net efficiency.
In some alternative embodiments, as shown in fig. 11, the attaching portion (the first attaching portion 21a and/or the second attaching portion 21b) is an integral structure, and during the screen-spreading process, an orthographic projection of the attaching portion on the plane of the universal evaporation mask 1 is an isosceles trapezoid, a bottom side of the isosceles trapezoid corresponds to the wide attaching end 212, and a top side of the isosceles trapezoid corresponds to a connection position of the attaching portion and the force-applying portion 22. In these embodiments, the attaching portion has a wide attaching end 212, during the screening process, the wide attaching end 212 is disposed corresponding to each evaporation section and each shielding section in the edge 11 of the universal evaporation mask 1 to provide the same tension to both the evaporation section and the shielding section of the edge 11, and the top side of the isosceles trapezoid corresponds to the connection of the attaching portion and the force applying portion 22, so that the tension applied to the edge 11 by the force applying portion 22 can be uniformly transmitted to each position of the edge 11 (each evaporation section and each shielding section distributed in succession) through the attaching portion.
In some optional embodiments, the bonding portion is composed of a plurality of sub bonding portions, an orthogonal projection shape of the sub bonding portions on a plane where the general evaporation mask is located is an isosceles trapezoid-like shape, a bottom side of the isosceles trapezoid-like shape corresponds to the sub wide bonding end, and a top side of the isosceles trapezoid-like shape corresponds to a connection position of the sub bonding portion and the force application portion. In these embodiments, a plurality of sub-attaching portions may be correspondingly connected to the force application portion; one sub-attaching portion may correspond to one sub-urging portion of the urging portions; or each sub-attaching part group corresponds to one sub-force application part in the force application part, wherein each sub-attaching part group comprises a plurality of sub-attaching parts.
As shown in fig. 12, in some alternative embodiments, the web spreading device further includes a guiding mechanism 4, and the guiding mechanism 4 is disposed at two opposite sides of the attaching portion (the first attaching portion 21a and/or the second attaching portion 21b) so that the attaching portions are moved in parallel in the web spreading direction under the guiding action of the guiding mechanism 4 during the web spreading process. In some examples, the guiding mechanism 4 includes a set of sliding rails disposed on two opposite sides of the attaching portion, and the extending direction of the sliding rails is parallel to the stretching direction. In these embodiments, set up guiding mechanism 4 and further guarantee at a net in-process, the laminating portion is skew at will and is opened the net direction, guarantee to open on the net direction, the relative edge coplane of general evaporation coating mask and relative edge place plane are parallel with a net direction, further keep opening the outer homogeneity that expands of evaporation coating opening along a net direction in the general evaporation coating mask after opening the net, improve a net degree of accuracy, evaporation coating opening's size in the general evaporation coating mask board has been guaranteed, the standard degree of position and shape, further promote the evaporation coating precision of follow-up evaporation coating process, promote display panel's display quality.
In accordance with the above-described embodiments of the present invention, these embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention and various embodiments with various modifications as are suited to the particular use contemplated. The invention is limited only by the claims and their full scope and equivalents.
Claims (10)
1. A method of screening, comprising:
providing a universal evaporation mask, wherein the universal evaporation mask comprises an edge and a grid-shaped shielding part which is enclosed by the edge and is provided with a plurality of evaporation openings, the edge is provided with an evaporation section and a shielding section which are distributed in sequence in the extending direction of the edge, the evaporation section corresponds to the evaporation openings, and the shielding section corresponds to the shielding part;
and providing a mean value screening tension force to the edge to screen the general evaporation mask along the screening direction, wherein the mean value screening tension force provides the same tension force to the evaporation section and the shielding section of the edge so that the evaporation section and the shielding section move along the screening direction in parallel and equally.
2. A screening method according to claim 1, wherein in the step of providing a universal evaporation mask,
the edges are enclosed to form a rectangular structure, opposite first edges are arranged in the first net stretching direction, and the first edges correspond to a plurality of first shielding parts extending along the second net stretching direction; and the second edge corresponds to a plurality of second shielding parts extending along the first net direction, and the first net direction and the second net direction are perpendicular to each other.
3. A screening method according to claim 2, wherein the step of providing the average screening tension to the edge to screen the universal evaporation mask in a screening direction, the average screening tension providing the same tension to both the evaporation section and the shielding section of the edge to move the evaporation section and the shielding section in the screening direction in parallel and equally comprises:
fixing one of the two oppositely arranged first edges, and providing the first mean value screen tension force to the other one of the two oppositely arranged first edges so that the universal evaporation mask is screened along the second screen direction; or,
and providing the first mean value screen tensioning force for the two oppositely arranged first edges, so that the general evaporation mask is screened along the second screen tensioning direction.
4. A screening method according to claim 3, wherein the step of providing the edge with a mean screening tension causes the universal evaporation mask to be screened in a screening direction, the mean screening tension provides the same tension to both the evaporation section and the shielding section of the edge, so that the evaporation section and the shielding section move in the screening direction in parallel and equally:
providing the first mean value stretching force by adopting a first stretching mechanism, wherein the first stretching mechanism is provided with a first attaching part arranged on the first edge, in the second stretching direction, the orthographic projection of the first attaching part on the general evaporation mask covers at least part of the first edge, and in the extending direction of the first edge, the orthographic projection of the first attaching part on the general evaporation mask covers each evaporation section and each shielding section in the first edge;
preferably, the first attaching portion is of an integral structure, or the first attaching portion is composed of a plurality of first sub attaching portions.
5. A screening method according to claim 4, wherein the step of providing the edge with a mean screening tension causes the universal evaporation mask to be screened in a screening direction, the mean screening tension provides the same tension to both the evaporation section and the shielding section of the edge, so that the evaporation section and the shielding section move in the screening direction in parallel and equal alignment:
the first attaching part is arranged on the first edge in a clamping mode; or the first attaching part is arranged on the first edge in a welding mode; or the first bonding part is arranged on the first edge in a magnetic adsorption mode.
6. A screening method according to claim 2, wherein the step of providing the average screening tension to the edge to screen the universal evaporation mask in a screening direction, the average screening tension providing the same tension to both the evaporation section and the shielding section of the edge to move the evaporation section and the shielding section in the screening direction in parallel and equally comprises:
fixing one of the two oppositely arranged second edges, and providing the second mean value screen tension force to the other one of the two oppositely arranged second edges, so that the universal evaporation mask is screened along the first screen direction; or,
and providing the second mean value screen tensioning force for the two oppositely arranged second edges, so that the general evaporation mask is screened along the first screen tensioning direction.
7. The screening method according to claim 6, wherein the step of providing the average screening tension to the edge causes the universal evaporation mask to be screened along a screening direction, and the average screening tension provides the same tension to both the evaporation section and the shielding section of the edge so that the evaporation section and the shielding section move along the screening direction in parallel and equal alignment:
providing the second mean value stretching force by adopting a second stretching mechanism, wherein the second stretching mechanism is provided with a second attaching part arranged on the second edge, in the first web direction, the orthographic projection of the second attaching part on the general evaporation mask covers at least part of the second edge, and in the extending direction of the second edge, the orthographic projection of the second attaching part on the general evaporation mask covers each evaporation section and each shielding section in the second edge;
preferably, the second attaching portion is of an integral structure, or the second attaching portion is composed of a plurality of second sub attaching portions;
preferably, the second attaching portion is arranged on the second edge in a clamping manner; or the second attaching part is arranged on the second edge in a welding mode; or the second attaching part is arranged on the second edge in a magnetic adsorption mode.
8. The mesh-stretching device is used for stretching a universal evaporation mask, the universal evaporation mask comprises an edge and a latticed shielding part which is enclosed by the edge and provided with a plurality of evaporation openings, the edge is provided with an evaporation section and a shielding section which are distributed in sequence in the extending direction of the edge, the evaporation section corresponds to the evaporation openings, and the shielding section corresponds to the shielding part;
the tensioning device has a tensioning mechanism that provides a mean tensioning tension to the edge,
the stretching mechanism comprises a fitting part arranged on the edge in the screen stretching process and a force application part connected with the fitting part, and the wide fitting end of the fitting part is fixedly arranged on the edge and corresponds to each evaporation section and each shielding section in the screen stretching process;
preferably, the attaching portion is fixedly connected with the force application portion or detachably connected with the force application portion.
9. A screening arrangement according to claim 8,
the bonding part is of an integral structure, the orthographic projection of the bonding part on the plane of the universal evaporation mask in the screen spreading process is an isosceles trapezoid, the bottom edge of the isosceles trapezoid corresponds to the wide bonding end, and the top edge of the isosceles trapezoid corresponds to the joint of the bonding part and the force application part; or,
the bonding part is composed of a plurality of sub bonding parts, the orthographic projection shape of the plane of the general evaporation mask is in a similar isosceles trapezoid shape, the bottom edge of the similar isosceles trapezoid corresponds to the sub wide bonding end, and the top edge of the similar isosceles trapezoid corresponds to the joint of the sub bonding part and the force application part.
10. The net stretching device according to claim 8, further comprising a guide mechanism,
the guide mechanisms are arranged on two opposite sides of the bonding part, so that the bonding part moves in parallel along the net stretching direction under the guide action of the guide mechanisms in the net stretching process;
preferably, the guiding mechanism comprises a set of sliding rails arranged on two opposite sides of the attaching portion, and the extending direction of the sliding rails is parallel to the net stretching direction.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110217987.2A CN113005401A (en) | 2021-02-26 | 2021-02-26 | Web tensioning method and web tensioning device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110217987.2A CN113005401A (en) | 2021-02-26 | 2021-02-26 | Web tensioning method and web tensioning device |
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| CN113005401A true CN113005401A (en) | 2021-06-22 |
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Application publication date: 20210622 |