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CN112820813A - Oven and LED wafer for visible light communication - Google Patents

Oven and LED wafer for visible light communication Download PDF

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Publication number
CN112820813A
CN112820813A CN202110193606.1A CN202110193606A CN112820813A CN 112820813 A CN112820813 A CN 112820813A CN 202110193606 A CN202110193606 A CN 202110193606A CN 112820813 A CN112820813 A CN 112820813A
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CN
China
Prior art keywords
light source
ultraviolet light
ultraviolet
led wafer
visible light
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Pending
Application number
CN202110193606.1A
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Chinese (zh)
Inventor
马璐
张振
袁小松
张森森
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Focus Lightings Technology Suqian Co ltd
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Focus Lightings Technology Suqian Co ltd
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Publication date
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Priority to CN202110193606.1A priority Critical patent/CN112820813A/en
Publication of CN112820813A publication Critical patent/CN112820813A/en
Pending legal-status Critical Current

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    • H10P72/0436
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0057Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by ultraviolet radiation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B3/00Drying solid materials or objects by processes involving the application of heat
    • F26B3/28Drying solid materials or objects by processes involving the application of heat by radiation, e.g. from the sun
    • F26B3/283Drying solid materials or objects by processes involving the application of heat by radiation, e.g. from the sun in combination with convection
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/85Packages
    • H10P70/20
    • H10P72/0408
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01Manufacture or treatment
    • H10H20/036Manufacture or treatment of packages

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  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Microbiology (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

The invention provides an oven and an LED wafer for visible light communication, wherein the oven comprises: the device comprises a shell, a first fixing piece and a second fixing piece, wherein a cavity is arranged inside the shell; an ultraviolet light source disposed on at least one surface of the housing and within the chamber; the LED wafer for visible light communication is placed in the cavity, and the ultraviolet light source irradiates ultraviolet rays to the surface of the LED wafer.

Description

Oven and LED wafer for visible light communication
Technical Field
The invention relates to industrial drying equipment, in particular to an oven and an LED wafer for visible light communication.
Background
Under the requirements of the high-efficiency energy-saving era and the emerging economy, the LED chip for visible light communication has the advantages of low energy consumption, small volume, long service life, environmental protection and the like, and can realize the function of visible light wireless communication while giving consideration to illumination. In the manufacturing and packaging process of the LED chip for visible light communication, a plurality of high-temperature drying processes are required, the high-temperature drying processes are mainly realized in an oven, and the purpose of removing water vapor on the surface of the LED chip or evaporating a solvent is achieved by generating a high-temperature environment through a fan and a heating element in the oven.
However, in the process of manufacturing the LED chip for visible light communication, organic substances usually remain on the surface of the wafer, and the remaining organic substances contaminate the LED chip for visible light communication on the wafer or cause other undesirable losses in the subsequent packaging and wire bonding.
Disclosure of Invention
The invention solves the problem that the existing high-temperature baking process can not remove organic matters on the surface of a wafer, so that residual organic matters pollute an LED chip for visible light communication of the wafer, or other bad losses are brought to subsequent packaging and routing.
In order to solve the above problems, the present invention provides an oven, including: the device comprises a shell, a first fixing piece and a second fixing piece, wherein a cavity is arranged inside the shell; an ultraviolet light source disposed on at least one surface of the housing and within the chamber; the LED wafer for visible light communication is placed in the cavity, and the ultraviolet light source irradiates ultraviolet rays to the surface of the LED wafer.
As an optional technical scheme, the wavelength range of the ultraviolet light source is 100nm-350 nm.
As an optional technical solution, the housing is a polyhedral structure, and the ultraviolet light source is disposed on at least one surface of the polyhedral structure.
As an optional technical solution, the ultraviolet light source includes a plurality of ultraviolet lamps, and the plurality of ultraviolet lamps are uniformly distributed on at least one surface of the polyhedral structure.
As an optional technical solution, the ultraviolet light source includes a plurality of ultraviolet lamp beads, and the plurality of ultraviolet lamp beads are disposed on at least one surface of the polyhedral structure.
As an optional technical scheme, the ultraviolet light source further comprises a circuit board, and the plurality of ultraviolet lamp beads are electrically connected to the circuit board to form a planar light source.
As an optional technical scheme, the distribution density of the ultraviolet lamp beads on the circuit board is increased from the edge of the circuit board to the center of the circuit board.
As a selectable technical scheme, the air conditioner further comprises a fan and a heating device, the shell further comprises an air inlet and an air outlet, and the fan is arranged close to the air inlet.
As an optional technical solution, the ultraviolet light source includes a first ultraviolet light source and a second ultraviolet light source, and a wavelength of ultraviolet light provided by the first ultraviolet light source is different from a wavelength of ultraviolet light provided by the second ultraviolet light source.
The invention also provides an LED wafer for visible light communication, and organic matters remained on the surface of the LED wafer are removed by the oven.
Compared with the prior art, the invention provides an oven and an LED wafer for visible light communication, which comprises an ultraviolet light source, wherein organic matters remained on the surface of the LED wafer for visible light communication are removed by the ultraviolet light source, and the oven and the LED wafer for visible light communication at least have the following advantages: 1) the method adopts a non-cleaning reagent contact mode, can be carried out in the air and does not need to be dried after cleaning; 2) organic pollutants remained on the surface of the LED wafer for visible light communication can be thoroughly removed; 3) the problems of solvent volatilization and waste solvent treatment are solved; 4) the high reliability and the high yield of the processed LED wafer for visible light communication are ensured; 5) the uniformity of removing the organic matters remained on the surface of the LED wafer for visible light communication is consistent.
The invention is described in detail below with reference to the drawings and specific examples, but the invention is not limited thereto.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a schematic view of an oven in an embodiment of the present invention.
Fig. 2 is a schematic view of an oven according to another embodiment of the present invention.
FIG. 3 is a schematic view of an ultraviolet light source according to another embodiment of the present invention.
FIG. 4 is a schematic view of an ultraviolet light source according to another embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to embodiments and accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
As shown in fig. 1, in one embodiment of the present invention, an oven 100 is provided, which includes a housing 10 and an ultraviolet light source 20, wherein a cavity is formed inside the housing 10; the ultraviolet light source 20 is disposed on at least one surface of the housing 10, and the ultraviolet light source 20 is located in the chamber; when the LED wafer is placed in the cavity, the uv light source 20 irradiates uv light onto the surface of the LED wafer. Preferably, the LED wafer is an LED wafer for visible light communication.
In the present invention, the ultraviolet light source 20 is added to the oven 100, and the ultraviolet light supplied from the ultraviolet light source 20 is used to remove organic substances remaining on the surface of the LED wafer for visible light communication, particularly photosensitive organic substances remaining on the surface of the LED wafer for visible light communication.
The ultraviolet light source 20 provides ultraviolet light in the wavelength range of 100nm to 350nm, preferably 185nm to 254 nm. When the wavelength of 100nm-350nm is irradiated to the surface of the LED wafer for visible light communication, the residual hydrocarbon organic compound on the surface of the LED wafer for visible light communication and oxygen in the air absorb ultraviolet rays with the wavelength of 100nm-350nm at the same time, and the residual organic matters adhered to the surface of the LED wafer for visible light communication are removed by utilizing the photosensitive oxidation effect of the organic compound, so that the problem of residual organic matters on the surface of the LED wafer for visible light communication after high-temperature baking treatment can be effectively solved.
Specifically, the hydrocarbon organic compound remaining on the surface of the LED wafer for visible light communication readily absorbs energy emitted by ultraviolet rays having a wavelength of 185nm, and is decomposed into ions, free atoms, excited molecules, and neutrons. Meanwhile, oxygen molecules in the air generate ozone and atomic oxygen after absorbing ultraviolet rays with the wavelength of 254 nm. Ozone also has a strong absorption effect on ultraviolet rays with a wavelength of 254nm, and ozone is decomposed into atomic oxygen and oxygen. In the method, under the action of extremely active atomic oxygen, the decomposed substances of carbon and hydrocarbon on the surface of the LED wafer for visible light communication are further converted into volatile carbon dioxide, water and the like, and are escaped from the surface of the LED wafer for visible light communication, so that organic matters adhered to the surface of the LED wafer for visible light communication are thoroughly removed.
In a preferred embodiment of the present invention, the ultraviolet light source 20 includes a first ultraviolet light source 21 and a second ultraviolet light source 22, and the wavelength of the ultraviolet light provided by the first ultraviolet light source 21 is different from the wavelength of the ultraviolet light provided by the second ultraviolet light source 22. The first ultraviolet light source 21 and the second ultraviolet light source 22 are alternately arranged, and preferably, the wavelength of the ultraviolet light provided by the first ultraviolet light source 21 is about 185nm, and the wavelength of the ultraviolet light provided by the second ultraviolet light source 22 is about 254 nm.
By alternately arranging the ultraviolet light sources in different wavelength ranges, ultraviolet rays which are easily absorbed by organic matters and ultraviolet rays which are easily absorbed by oxygen in the air are simultaneously provided, the decomposition of the organic matters is accelerated, the concentration of active oxygen is improved, the removal efficiency of residual organic matters on the LED wafer for visible light communication is higher, and the removal effect is better.
In the present embodiment, the first ultraviolet light source 21 and the second ultraviolet light source 22 are respectively provided in plural numbers and are uniformly and alternately arranged along the long side direction of the top surface 11 of the housing 10. The first ultraviolet light source 21 and the second ultraviolet light source 22 are ultraviolet lamps, respectively. That is, when a plurality of ultraviolet lamps are employed as the ultraviolet light source, the plurality of ultraviolet lamps are uniformly distributed on at least one surface of the housing 10.
In other embodiments of the present invention, the first uv light source and the second uv light source may be arranged non-alternately, for example, may be arranged on two surfaces of the housing respectively, the two surfaces including two adjacent surfaces and two opposite surfaces; alternatively, the first ultraviolet light source is arranged first and then the second ultraviolet light source is arranged in the direction along the long side or the short side of one surface of the housing.
With continued reference to fig. 1, the housing 10 is generally of a hexahedral configuration, including opposing top and bottom surfaces 11, 12, left and right side surfaces 13, 14, and front and rear side surfaces 15, 16; the front side surface 15 is close to the user, and therefore, an open opening (not shown) is often formed at the front side surface 15, and a door body (not shown) is provided at the front side of the open opening, and the door body can be opened or closed relative to the open opening.
The ultraviolet light source 20 is provided on the top surface 11, for example, and irradiates the surface of the LED wafer for visible light communication from above. It should be noted that the shape of the housing 10 of the oven 100 is not limited to a hexahedral structure, and may be any other polyhedral structure. However, the housing is designed to have a hexahedral structure, which has the advantages of easy manufacture and low manufacturing cost.
The rear side 16 of the housing 10 is provided with a fan 30 and a heating device 40, the fan 30 connects the chamber inside the housing 10 to the outside environment, the fan 30 is close to an air inlet (arranged) on the housing 10, and the air inlet is located on the rear side 16. The air outlet 50 is disposed on the rear side surface 16, and organic matter remaining on the surface of the LED wafer irradiated by the ultraviolet light source 20 is decomposed to form carbon dioxide and water, and the carbon dioxide and water are discharged from the air outlet 50 to the outside of the housing 10 under the combined action of the fan 30 and the heating device 40.
Wherein, the fan 30, the air inlet and the air outlet 50 are disposed on the rear side surface 16 together, so that the oven 100 has a more beautiful appearance. In this embodiment, the air outlet 50 is located in the area of the rear side surface 16 close to the top surface 11, mainly because the air flow circulates upward due to the high temperature environment in the chamber, so the air outlet 50 is arranged above.
As shown in fig. 2, in another embodiment of the present invention, an oven 200 is provided, which is different from the oven 100 in that an ultraviolet light source 201 and an ultraviolet light source 202 are disposed on the left side 13 and the right side 14 of the housing 10 of the oven 200, respectively. That is, the ultraviolet light sources are disposed on the plurality of surfaces of the housing 10, and the surface of the LED wafer for visible light communication is irradiated from a plurality of angles, thereby more effectively improving the efficiency of removing organic matter remaining on the surface of the wafer chip.
In a preferred embodiment, the wavelength of the uv light source 201 disposed on the left side 13 is different from the wavelength of the uv light source 202 disposed on the right side 14.
As shown in fig. 3, in another embodiment of the present invention, another ultraviolet light source 1000 is further provided, which can replace the ultraviolet light sources 20, 201, 202 shown in fig. 1 and 2. The ultraviolet light source 1000 includes, for example, a circuit board 1002 and a plurality of ultraviolet lamp beads 1001 disposed on the circuit board 1002, the circuit board 1002 and the plurality of ultraviolet lamp beads 1001 are electrically connected by welding or the like, wherein the circuit board 1002 and the plurality of ultraviolet lamp beads 1001 form a planar light source.
When the ultraviolet lamp tube is replaced by the planar light source, the LED lamp has the advantages of small occupied space and convenience in installation.
In a preferred embodiment of the present invention, the distribution density of the plurality of uv beads 1001 on the circuit board 1002 gradually increases from the edge of the circuit board 1002 toward the center of the circuit board 1002. Considering that the LED wafer for visible light communication is usually placed in the middle of the chamber, the ultraviolet intensity in the central area is controlled to be higher than that in the periphery, and the organic matter residue removal efficiency on the surface of the wafer chip can also be effectively improved.
In addition, the plurality of ultraviolet lamp beads 1001 includes two or more kinds of ultraviolet lamp beads that provide ultraviolet rays of different wavelength ranges.
As shown in fig. 4, in another embodiment of the present invention, another uv light source 2000 is provided, which is different from the uv light source 1000 only in that a plurality of uv light beads 2001 in the uv light source 2000 are arranged in a uniform matrix on the circuit board 2002.
The uniformly arranged ultraviolet light sources 2000 can ensure consistent uniformity of removing organic matters remained on the surface of the LED wafer for visible light communication to a certain extent.
The invention also provides an LED wafer for visible light communication, and organic matters remained on the surface of the LED wafer for visible light communication are removed by the ovens 100 and 200.
In this embodiment, the LED wafer refers to a wafer including a plurality of LED dies for visible light communication.
In summary, the present invention provides an oven and an LED wafer for visible light communication, including an ultraviolet light source, wherein the ultraviolet light source is used to remove organic matters remaining on the surface of the LED wafer for visible light communication, and the oven and the LED wafer for visible light communication have at least the following advantages: 1) the method adopts a non-cleaning reagent contact mode, can be carried out in the air and does not need to be dried after cleaning; 2) organic pollutants remained on the surface of the LED wafer for visible light communication can be thoroughly removed; 3) the problems of solvent volatilization and waste solvent treatment are solved; 4) the high reliability and the high yield of the processed LED wafer for visible light communication are ensured; 5) the uniformity of removing the organic matters remained on the surface of the LED wafer for visible light communication is consistent.
The present invention has been described in relation to the above embodiments, which are only exemplary of the implementation of the present invention. Furthermore, the technical features mentioned in the different embodiments of the present invention described above may be combined with each other as long as they do not conflict with each other. It is to be noted that the present invention may take various other embodiments, and that various changes and modifications may be effected therein by one skilled in the art without departing from the spirit and scope of the invention as defined in the appended claims.

Claims (10)

1.一种烤箱,其特征在于,所述烤箱包括:1. an oven, it is characterised in that the oven comprises: 壳体,所述壳体内部设有腔室;a casing, a chamber is arranged inside the casing; 紫外光源,所述紫外光源设置于所述壳体的至少一个表面上,且位于所述腔室内;an ultraviolet light source, the ultraviolet light source is disposed on at least one surface of the casing and located in the cavity; 其中,放置可见光通信用LED晶圆片于所述腔室中,所述紫外光源照射紫外线至所述可见光通信用LED晶圆片的表面。Wherein, the LED wafer for visible light communication is placed in the chamber, and the ultraviolet light source irradiates ultraviolet rays to the surface of the LED wafer for visible light communication. 2.根据权利要求1所述的烤箱,其特征在于,所述紫外光源的波长范围为100nm-350nm。2. The oven according to claim 1, wherein the wavelength range of the ultraviolet light source is 100nm-350nm. 3.根据权利要求1所述的烤箱,其特征在于,所述壳体为多面体结构,所述多面体结构的至少一个表面上设置所述紫外光源。3 . The oven according to claim 1 , wherein the housing has a polyhedral structure, and the ultraviolet light source is disposed on at least one surface of the polyhedral structure. 4 . 4.根据权利要求3所述的烤箱,其特征在于,所述紫外光源包括紫外灯管,所述紫外灯管的数量为多个,多个紫外灯管在所述多面体结构的至少一个表面上均匀分布。4 . The oven according to claim 3 , wherein the ultraviolet light source comprises ultraviolet lamps, the number of the ultraviolet lamps is plural, and the plurality of ultraviolet lamps are on at least one surface of the polyhedral structure. 5 . Evenly distributed. 5.根据权利要求3所述的烤箱,其特征在于,所述紫外光源包括多个紫外灯珠,所述多个紫外灯珠设置在所述所述多面体结构的至少一个表面上。5 . The oven according to claim 3 , wherein the ultraviolet light source comprises a plurality of ultraviolet lamp beads, and the plurality of ultraviolet lamp beads are arranged on at least one surface of the polyhedral structure. 6 . 6.根据权利要求5所述的烤箱,其特征在于,所述紫外光源还包括电路板,所述多个紫外灯珠电连接于所述电路板形成平面光源。6 . The oven according to claim 5 , wherein the ultraviolet light source further comprises a circuit board, and the plurality of ultraviolet lamp beads are electrically connected to the circuit board to form a planar light source. 7 . 7.根据权利要求6所述的烤箱,其特征在于,所述多个紫外灯珠在所述电路板上的分布密度自所述电路板的边缘朝向所述电路板的中心增大。7 . The oven according to claim 6 , wherein the distribution density of the plurality of ultraviolet lamp beads on the circuit board increases from the edge of the circuit board toward the center of the circuit board. 8 . 8.根据权利要求1所述的烤箱,其特征在于,还包括风机和加热装置,所述壳体还包括入风口和排风口,所述风机靠近所述入风口设置。8 . The oven according to claim 1 , further comprising a fan and a heating device, the housing further comprising an air inlet and an air outlet, and the fan is arranged near the air inlet. 9 . 9.根据权利要求1所述的烤箱,其特征在于,所述紫外光源包括第一紫外光源和第二紫外光源,所述第一紫外光源提供的紫外线的波长与所述第二紫外光源提供的紫外线的波长相异。9. The oven according to claim 1, wherein the ultraviolet light source comprises a first ultraviolet light source and a second ultraviolet light source, and the wavelength of the ultraviolet light provided by the first ultraviolet light source is the same as that provided by the second ultraviolet light source. Ultraviolet rays have different wavelengths. 10.一种可见光通信用LED晶圆片,其特征在于,所述可见光通信用LED晶圆片表面上残留的有机物经上述权利要求1-9中任意一项所述的烤箱去除。10 . An LED wafer for visible light communication, wherein organic matter remaining on the surface of the LED wafer for visible light communication is removed by the oven according to any one of the preceding claims 1-9.
CN202110193606.1A 2021-02-20 2021-02-20 Oven and LED wafer for visible light communication Pending CN112820813A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110193606.1A CN112820813A (en) 2021-02-20 2021-02-20 Oven and LED wafer for visible light communication

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Application Number Priority Date Filing Date Title
CN202110193606.1A CN112820813A (en) 2021-02-20 2021-02-20 Oven and LED wafer for visible light communication

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05166789A (en) * 1991-12-12 1993-07-02 Shimada Phys & Chem Ind Co Ltd Substrate cleaning / drying device
CN1269602A (en) * 2000-04-11 2000-10-11 北京高力通科技开发公司 Ultraviolet surface cleaning machine
JP2006222241A (en) * 2005-02-10 2006-08-24 Tokyo Electron Ltd Organic substance removal apparatus and removal method
CN101006198A (en) * 2004-08-20 2007-07-25 瓦里安半导体设备公司 In situ surface contaminant removal for ion implanting
CN102430547A (en) * 2011-11-07 2012-05-02 中国科学院长春光学精密机械与物理研究所 Deep ultraviolet optical film processing device
CN102974573A (en) * 2012-12-18 2013-03-20 中国科学院微电子研究所 A device and method for ultraviolet cleaning of nano-patterns
CN208817966U (en) * 2018-08-14 2019-05-03 惠州市盛联电子有限公司 A kind of ultraviolet light oven
CN214203727U (en) * 2021-02-20 2021-09-14 聚灿光电科技(宿迁)有限公司 Oven and LED wafer for visible light communication

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05166789A (en) * 1991-12-12 1993-07-02 Shimada Phys & Chem Ind Co Ltd Substrate cleaning / drying device
CN1269602A (en) * 2000-04-11 2000-10-11 北京高力通科技开发公司 Ultraviolet surface cleaning machine
CN101006198A (en) * 2004-08-20 2007-07-25 瓦里安半导体设备公司 In situ surface contaminant removal for ion implanting
JP2006222241A (en) * 2005-02-10 2006-08-24 Tokyo Electron Ltd Organic substance removal apparatus and removal method
CN102430547A (en) * 2011-11-07 2012-05-02 中国科学院长春光学精密机械与物理研究所 Deep ultraviolet optical film processing device
CN102974573A (en) * 2012-12-18 2013-03-20 中国科学院微电子研究所 A device and method for ultraviolet cleaning of nano-patterns
CN208817966U (en) * 2018-08-14 2019-05-03 惠州市盛联电子有限公司 A kind of ultraviolet light oven
CN214203727U (en) * 2021-02-20 2021-09-14 聚灿光电科技(宿迁)有限公司 Oven and LED wafer for visible light communication

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Application publication date: 20210518

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