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CN112817073A - Infrared wave absorbing device based on principle of non-reflection filter - Google Patents

Infrared wave absorbing device based on principle of non-reflection filter Download PDF

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CN112817073A
CN112817073A CN202011625320.8A CN202011625320A CN112817073A CN 112817073 A CN112817073 A CN 112817073A CN 202011625320 A CN202011625320 A CN 202011625320A CN 112817073 A CN112817073 A CN 112817073A
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马栎敏
徐晗
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Nanjing University of Aeronautics and Astronautics
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Abstract

本发明涉及一种基于无反射滤波器原理的红外吸波器,包括若干个顺次排列的吸波单元,每个吸波单元包括从下到上依次贴合的导电反射层、介质层和微结构单元层,所述微结构单元层由四个相同的等腰直角三角形单元绕微结构单元层的中心点经四重旋转后形成,每个等腰直角三角形单元由一个大等腰直角三角形和一个小等腰直角三角形组成,每个等腰直角三角形单元中,大等腰直角三角形和小等腰直角三角形的斜边贴近且平行。该吸波器结构简单、厚度薄,在4.1‑4.7μm中红外波段有四个吸收峰,且吸收率高,在军事、环境监测和成像系统等领域具有很大的应用潜能。

Figure 202011625320

The invention relates to an infrared wave absorber based on the principle of a non-reflection filter, comprising several wave absorbing units arranged in sequence, and each wave absorbing unit includes a conductive reflection layer, a dielectric layer and a Structural unit layer, the micro-structural unit layer is formed by four identical isosceles right-angled triangle units after quadruple rotation around the center point of the micro-structural unit layer, each isosceles right-angled triangle unit is composed of a large isosceles right-angled triangle and It consists of a small isosceles right triangle. In each isosceles right triangle unit, the hypotenuses of the large isosceles right triangle and the small isosceles right triangle are close and parallel. The absorber has a simple structure and a thin thickness, has four absorption peaks in the mid-infrared band of 4.1-4.7 μm, and has a high absorption rate. It has great application potential in the fields of military, environmental monitoring and imaging systems.

Figure 202011625320

Description

一种基于无反射滤波器原理的红外吸波器An infrared wave absorber based on the principle of non-reflection filter

技术领域technical field

本发明属于红外超材料技术领域,具体涉及一种基于无反射滤波器原理的红外吸波器。The invention belongs to the technical field of infrared metamaterials, and in particular relates to an infrared wave absorber based on the principle of a non-reflection filter.

背景技术Background technique

超材料指的是一类具有人工设计结构的复合材料,之所以称之为超材料,是因为具有天然材料不具备的某些超常的电磁特性。电磁超材料凭借特定的人工结构能够对电磁波的相位、振幅以及偏振态进行调控,从而实现各种超常的物理现象,可以实现例如负折射率、电磁隐身、完美透镜完美吸收等特殊功能。超材料吸波器是一种通过特殊机构和材料,可以将入射到其表面的电磁波能量转化为其他能量损耗掉的器件。Metamaterials refer to a class of composite materials with artificially designed structures. They are called metamaterials because they have some extraordinary electromagnetic properties that natural materials do not possess. Electromagnetic metamaterials can control the phase, amplitude and polarization state of electromagnetic waves with specific artificial structures, thereby realizing various extraordinary physical phenomena, and can achieve special functions such as negative refractive index, electromagnetic stealth, and perfect absorption by perfect lenses. A metamaterial absorber is a device that can convert the electromagnetic wave energy incident on its surface into other energy and lose it through special mechanisms and materials.

中红外辐射通常定义为波长在2.5-25μm范围内的电磁波,其不仅可用于分子含量的检测和分子类型的鉴定,还可以实现分子的成像,从而在军事、环境监测、医学治疗以及基础研究等领域具有广泛的应用。所以对中红外波段的超材料吸收器研究具有重要意义。现有的红外吸波器通常只具有单一的吸收频段,而且由于其超表面结构形貌较复杂,不利于大规模加工生产。Mid-infrared radiation is usually defined as electromagnetic waves with wavelengths in the range of 2.5-25 μm, which can not only be used for the detection of molecular content and identification of molecular types, but also to realize molecular imaging, which can be used in military, environmental monitoring, medical treatment, and basic research. field has a wide range of applications. Therefore, it is of great significance to study metamaterial absorbers in the mid-infrared band. Existing infrared absorbers usually only have a single absorption frequency band, and due to their complex metasurface structure and morphology, it is not conducive to large-scale processing and production.

发明内容SUMMARY OF THE INVENTION

本发明的目的在于解决现有技术的不足,提供一种基于无反射滤波器原理的红外吸波器,其结构简单、厚度薄,在4.1-4.7μm波段有四个吸收峰,具有高吸收率并且极化敏感。The purpose of the present invention is to solve the deficiencies of the prior art, and to provide an infrared wave absorber based on the principle of a non-reflection filter, which has a simple structure, a thin thickness, four absorption peaks in the 4.1-4.7 μm band, and a high absorption rate. and polarization sensitive.

技术方案Technical solutions

一种基于无反射滤波器原理的红外吸波器,包括若干个顺次排列的吸波单元,每个吸波单元包括从下到上依次贴合的导电反射层、介质层和微结构单元层,所述微结构单元层由四个相同的等腰直角三角形单元绕微结构单元层的中心点经四重旋转后形成,每个等腰直角三角形单元由一个大等腰直角三角形和一个小等腰直角三角形组成,每个等腰直角三角形单元中,大等腰直角三角形和小等腰直角三角形的斜边贴近且平行;所述微结构单元层的材料选自金属、石墨烯或ITO中的任意一种;所述导电反射层的材料为金属或ITO中的一种。An infrared wave absorber based on the principle of a non-reflection filter, comprising a number of wave absorption units arranged in sequence, each wave absorption unit including a conductive reflection layer, a dielectric layer and a microstructure unit layer that are sequentially laminated from bottom to top , the microstructure unit layer is formed by four identical isosceles right triangle units after quadruple rotation around the center point of the microstructure unit layer, each isosceles right triangle unit consists of a large isosceles right triangle and a small isosceles right triangle In each isosceles right triangle unit, the hypotenuse of the large isosceles right triangle and the small isosceles right triangle are close to and parallel; the material of the microstructure unit layer is selected from metal, graphene or ITO. Any one; the material of the conductive reflective layer is one of metal or ITO.

进一步,所述等腰直角三角形单元中,大等腰直角三角形直角边长为1.000μm,小等腰直角三角形直角边长为0.707μm,大等腰直角三角形和小等腰直角三角形的斜边相距0.200μm。Further, in the isosceles right triangle unit, the length of the right angle of the large isosceles right triangle is 1.000 μm, the length of the right angle of the small isosceles right triangle is 0.707 μm, and the hypotenuses of the large isosceles right triangle and the small isosceles right triangle are apart from each other. 0.200μm.

进一步,所述介质层为介电常数为2.88、损耗角正切0.0032的聚酰亚胺薄膜。Further, the dielectric layer is a polyimide film with a dielectric constant of 2.88 and a loss tangent of 0.0032.

进一步,所述介质层厚度为3.00μm。Further, the thickness of the dielectric layer is 3.00 μm.

进一步,所述导电反射层和微结构单元层的厚度均为0.100μm。Further, the thicknesses of the conductive reflective layer and the microstructure unit layer are both 0.100 μm.

本发明的有益效果:本发明提供了一种基于无反射滤波器原理的红外吸波器,其包括若干个顺次排列的吸波单元,每个吸波单元包括从下到上依次贴合的导电反射层、介质层和微结构单元层,微结构单元层具有独特的结构,可以在4.1-4.7μm波段得到4个吸收峰,底部导电反射层的材料为具有强电磁波反射作用的金属或ITO,可以保证无电磁波透射,进入到吸波体内部的电磁波在介质损耗和欧姆损耗的作用下被全部损耗掉,本发明的红外吸波器结构简单、厚度薄、利于集成以及具有柔性,在中红外波段有四个吸收峰且吸收率高,在军事、环境监测、医学治疗以及基础研究等领域具有广泛的应用。Beneficial effects of the present invention: The present invention provides an infrared wave absorber based on the principle of a non-reflection filter, which includes several wave absorbing units arranged in sequence, and each wave absorbing unit includes a Conductive reflective layer, dielectric layer and micro-structure unit layer. The micro-structure unit layer has a unique structure and can obtain 4 absorption peaks in the 4.1-4.7μm band. The material of the bottom conductive reflective layer is metal or ITO with strong electromagnetic wave reflection. , it can ensure that no electromagnetic wave is transmitted, and the electromagnetic wave entering the wave absorber is completely lost under the action of dielectric loss and ohmic loss. The infrared wave absorber of the invention has a simple structure, a thin thickness, is conducive to integration and has flexibility. The infrared band has four absorption peaks and high absorption rate, and has a wide range of applications in military, environmental monitoring, medical treatment and basic research.

附图说明Description of drawings

图1为实施例1基于无反射滤波器原理的红外吸波器的吸波单元的三维结构示意图;Fig. 1 is the three-dimensional structure schematic diagram of the wave absorbing unit of the infrared wave absorber based on the principle of the non-reflection filter in Embodiment 1;

图2是实施例1基于无反射滤波器原理的红外吸波器的吸波单元的的正视图;Fig. 2 is the front view of the wave absorbing unit of the infrared wave absorber based on the principle of non-reflection filter of embodiment 1;

图3是实施例1基于无反射滤波器原理的红外吸波器的阵列图;Fig. 3 is the array diagram of the infrared wave absorber based on the non-reflection filter principle of embodiment 1;

图4是实施例1基于无反射滤波器原理的红外吸波器在4.1-4.7μm波段的吸收特性曲线图;Fig. 4 is the absorption characteristic curve diagram of the infrared wave absorber based on the principle of non-reflection filter in the 4.1-4.7 μm waveband of Example 1;

图中,1-微结构单元层;2-介质层;3-导电反射层。In the figure, 1-microstructure unit layer; 2-dielectric layer; 3-conductive reflective layer.

具体实施方式Detailed ways

下面结合附图和具体实施方式对本发明进行详细描述说明。The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.

实施例1Example 1

如图1-3,一种基于无反射滤波器原理的红外吸波器,包括若干个顺次排列的吸波单元,每个吸波单元包括从下到上依次贴合的导电反射层3、介质层2和微结构单元层1,所述微结构单元层1由四个相同的等腰直角三角形单元绕微结构单元层中心点经四重旋转后形成,每个等腰直角三角形单元由一个大等腰直角三角形和一个小等腰直角三角形组成,每个等腰直角三角形单元中,大等腰直角三角形和小等腰直角三角形的斜边贴近且平行,本实施例中,大等腰直角三角形直角边长为1.000μm,小等腰直角三角形直角边长为0.707μm,同一单元中大等腰直角三角形和小等腰直角三角形的斜边相距0.200μm。As shown in Figure 1-3, an infrared wave absorber based on the principle of non-reflection filter includes several wave absorbing units arranged in sequence, and each wave absorbing unit includes a conductive reflective layer 3, The dielectric layer 2 and the microstructure unit layer 1, the microstructure unit layer 1 is formed by four identical isosceles right triangle units after quadruple rotation around the center point of the microstructure unit layer, each isosceles right triangle unit is formed by a A large isosceles right triangle and a small isosceles right triangle. In each isosceles right triangle unit, the hypotenuses of the large isosceles right triangle and the small isosceles right triangle are close to and parallel. In this embodiment, the large isosceles right triangle The length of the right angle of the triangle is 1.000 μm, the length of the right angle of the small isosceles right triangle is 0.707 μm, and the hypotenuse of the large isosceles right triangle and the small isosceles right triangle in the same unit is 0.200 μm apart.

本实施例中,所述介质层为介电常数为2.88、损耗角正切0.0032的聚酰亚胺薄膜,厚度为3.000μm;导电反射层和微结构单元层由电导率为5.8×107S/m,厚度均为0.100μm的金属铜构成。该基于无反射滤波器原理的红外吸波器,对应的晶格常数为L=5.000μm,其余的参数结构为X1=1μm,X2=0.707μm,W1=0.707μm,W2=0.200μm,大等腰直角三角形和小等腰直角三角形的线宽W=0.100μm,大等腰直角三角形和小等腰直角三角形靠近中心点的底角距离中心点长度同为2.236μm。In this embodiment, the dielectric layer is a polyimide film with a dielectric constant of 2.88 and a loss tangent of 0.0032, with a thickness of 3.000 μm; the conductive reflective layer and the microstructure unit layer have a conductivity of 5.8×10 7 S/ m, both of which are made of metallic copper with a thickness of 0.100 μm. The corresponding lattice constant of the infrared absorber based on the principle of non-reflection filter is L=5.000μm, and the rest of the parameter structure is X1=1μm, X2=0.707μm, W1=0.707μm, W2=0.200μm, etc. The line width of the right isosceles triangle and the small isosceles right triangle is W=0.100 μm, and the length of the base angle near the center point of the large isosceles right triangle and the small isosceles right triangle is 2.236 μm.

采用CST微波工作室对实施例1的基于无反射滤波器原理的红外吸波器进行仿真测试,图4是实施例1的基于无反射滤波器原理的红外吸波器在4.1-4.7μm波段的吸收特性曲线图,由图4可以看出,本发明的基于无反射滤波器原理的红外吸波器在4.17μm、4.29μm、4.41μm和4.61μm波长处对应吸收率分别为94.00%、97.09%、92.75%和98.42%The infrared wave absorber based on the principle of non-reflection filter of Example 1 was simulated and tested by CST microwave studio. As can be seen from Figure 4, the absorption characteristic curve of the infrared wave absorber based on the principle of the non-reflection filter of the present invention is 94.00% and 97.09% respectively at the wavelengths of 4.17 μm, 4.29 μm, 4.41 μm and 4.61 μm. , 92.75% and 98.42%

上述基于无反射滤波器原理的红外吸波器的制备方法:以镀膜的方式先在介质层的两面镀上厚度为0.100μm的导电反射层,然后在微结构单元层所在一面采用化学刻蚀的方式刻蚀出上述微结构单元层的结构,得到吸波单元,将多个吸波单元顺次排列到一起,得到红外吸波器。The preparation method of the above-mentioned infrared wave absorber based on the principle of non-reflection filter: firstly, a conductive reflective layer with a thickness of 0.100 μm is coated on both sides of the dielectric layer by means of coating, and then chemically etched on the side where the microstructure unit layer is located. The structure of the microstructure unit layer is etched in a manner to obtain a wave absorbing unit, and a plurality of wave absorbing units are arranged in sequence to obtain an infrared wave absorber.

Claims (5)

1. An infrared wave absorbing device based on a reflection-free filter principle comprises a plurality of wave absorbing units which are sequentially arranged, wherein each wave absorbing unit comprises a conductive reflecting layer, a dielectric layer and a micro-structure unit layer which are sequentially attached from bottom to top; the material of the microstructure unit layer is selected from any one of metal, graphene or ITO; the material of the conductive reflecting layer is one of metal or ITO.
2. An infrared absorber based on the principle of a reflectionless filter as set forth in claim 1, wherein in said isosceles right triangle unit, the length of the right angle side of the large isosceles right triangle is 1.000 μm, the length of the right angle side of the small isosceles right triangle is 0.707 μm, and the distance between the hypotenuses of the large isosceles right triangle and the small isosceles right triangle is 0.200 μm.
3. The infrared absorber based on the principle of the reflectionless filter of claim 1, wherein the dielectric layer is a polyimide film having a dielectric constant of 2.88 and a loss tangent of 0.0032.
4. An infrared absorber based on the principle of a reflectionless filter as set forth in claim 1, wherein the dielectric layer has a thickness of 3.00 μm.
5. The infrared absorber based on the principle of the reflectionless filter of claim 1, 2, 3, or 4, wherein the thickness of the conductive reflective layer and the microstructure unit layers are each 0.100 μm.
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