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CN112815877B - Five-axis equipment A-axis angular displacement measuring device and measuring calibration method - Google Patents

Five-axis equipment A-axis angular displacement measuring device and measuring calibration method Download PDF

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CN112815877B
CN112815877B CN202110013416.7A CN202110013416A CN112815877B CN 112815877 B CN112815877 B CN 112815877B CN 202110013416 A CN202110013416 A CN 202110013416A CN 112815877 B CN112815877 B CN 112815877B
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axis
silk thread
measurement
precision
measuring
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CN112815877A (en
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唐胜男
赵诗若
唐大春
赵忠兴
敬然
耿子健
吴兆书
娄雪
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Changchun Chunqiu Technology Development Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

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  • A Measuring Device Byusing Mechanical Method (AREA)

Abstract

A five-axis device A-axis angular displacement measuring device and a measuring and calibrating method relate to the technical field of angular displacement measurement and solve the problem that the existing angle measuring mode cannot realize measuring and calibrating the corresponding angle of each grating pitch; one end of the first silk thread is fastened through a silk thread fastening screw, and the other end of the first silk thread is fastened at one end of the sliding table seat; the sliding platform seat is fastened with a second silk thread which is fastened with a balance block after passing through a pulley; the first silk thread and the second silk thread are tightened by the weight of the balance block, the high-precision grating ruler sliding table is driven to move, when the measuring shaft system body rotates, the first silk thread is wound on the outer circle surface of the measuring shaft system body, and meanwhile, the high-precision grating ruler sliding table and the balance block are driven to move. The invention realizes the measurement and calibration of the grating pitch angle of the A-axis circular grating or each grating of the encoder, and improves the measurement precision.

Description

Five-axis equipment A-axis angular displacement measuring device and measuring calibration method
Technical Field
The invention relates to the technical field of angular displacement measurement in equipment manufacturing, in particular to an A-axis angular displacement measurement device and a measurement calibration method for (swing axis) axis equipment.
Background
At present, in actual production, the measurement and calibration of the angular displacement of the axis a (swing axis) of five-axis machining center equipment is a very important index, which directly affects the machining precision and quality of the spatial angle hole and surface of a product, and affects the machining profile tolerance and quality of a spatial curved surface, although five-axis machining center equipment has been used for more than 50 years, until now, there is no ideal method and device for the measurement and calibration of the angular displacement of the axis a (swing axis) of five-axis machining center equipment, and the current standard of common angle calibration is to use prisms for calibration, such as 36 prisms, 24 prisms, 23 prisms and the like; the difference of each surface of the 36-surface prism is 10 degrees, and the difference of each surface of the 24-surface prism is 15 degrees, but the method is different from the measuring method of a high-precision grating ruler (0.0001mm) or a laser interferometer, and the length of the high-precision grating ruler or the laser interferometer is measured through equivalent grating distance or interference wavelength. When the prism is adopted to measure the angle of the A-axis (swing axis) encoder, the difficulty is that the A-axis (swing axis) structure of five-axis equipment limits the prism not to be placed on the rotation center of the A-axis, and in addition, the placement of the prism on the center of the A-axis is only used for measuring the grating precision of the position of the A-axis (swing axis) encoder at the specific angle closest to the prism, and the grating precision of other angles of the A-axis (swing axis) of five-axis equipment can only be used for performing average difference compensation on grating values (grating distance quantity) at the specific angle corresponding to two surfaces of the prism. Therefore, the precision measured by adopting the prism is determined by the original grating distance processing precision of the circular grating of the axis A of the five-axis equipment and the encoder grating, in order to measure the length by equivalent grating distance or interference wavelength (theoretically, the wavelength is 1nm when being 0.000001 mm) like a high-precision grating ruler or a laser interferometer, and measure the precision of the grating distance corresponding to each angle position by a length measuring method, a device for measuring and calibrating the angular displacement of the axis A (swing axis) of the five-axis processing center equipment needs to be developed, the theoretical precision is required to be 0.00005 degrees, namely 0.18 degrees, the full-circle absolute precision can reach 1 degree in consideration of the influences of factors such as objective environment, and therefore, the device can be used as a relatively ideal measuring device for angle measurement.
Disclosure of Invention
The invention provides a five-axis equipment A-axis angular displacement measuring device and a measuring and calibrating method, aiming at solving the problems that the conventional angle measuring mode cannot realize measuring and calibrating of each angular grid distance of a five-axis equipment A-axis and is low in measuring precision.
The device for measuring the A-axis angular displacement of the five-axis equipment comprises a measuring shafting body, a high-precision grating ruler sliding table and a sliding table seat; the test device also comprises a test rod, a centering support, a V-shaped structure support beam, a first silk thread, a second silk thread, a pulley and a balance block;
a silk thread fastening screw and a silk thread hanging pin are processed on the surface of the outer circle of the measuring shafting body; one end of the first silk thread is fastened through a silk thread fastening screw, and the other end of the first silk thread is fastened at one end of the sliding table seat; a second silk thread is fastened at the other end of the sliding platform seat and is fastened to the balance block after passing through the pulley;
the weight of the balance block straightens and tightens the first silk thread and the second silk thread, and drives the high-precision grating ruler sliding table to move;
the measuring shafting reference is fixedly integrated with the inspection rod through a V-shaped structural support beam;
the aligning support is fastened with the inspection stick through an aligning screw, and the aligning screw adjusts the axial positions of the measurement shafting standard and the inspection stick, so that the arc surface (center) of the measurement shafting standard is coaxial with the A shaft.
The method for measuring and calibrating the angular displacement of the A axis of five-axis equipment is realized by the following steps:
firstly, a five-axis equipment control system places a reference point of an A axis at a zero point (vertical position);
secondly, when the shaft A rotates to drive the inspection rod and the measurement shafting to rotate in a reference mode, the control system collects angle data;
thirdly, the controller collects displacement distance data of the high-precision grating ruler, records the displacement distance data of the high-precision grating ruler sliding table, and collects grating angle information of five-axis equipment;
and fourthly, when the reference of the measurement shafting rotates by 90 degrees, the displacement distance data of the high-precision grating ruler corresponds to the grating angle information of the A axis, and the measurement calibration of the A axis is realized.
The invention has the beneficial effects that: according to the measuring device, under the gravity traction of the balance block, the tension of each part of the silk thread is constant, the length of the silk thread wound on the measuring shaft system is constant, namely the uniform winding arc length is the same in the grid distance displayed by the high-precision grating ruler, (the measuring shaft system is controlled to jump 0.001), the circular arc length and the angle are opposite to each other when the measuring shaft system rotates, the precision of the linear grating is directly converted into the precision of an encoder or a circular grating of an A axis, and the angle precision of the A axis is improved.
The measuring device converts the dimensional accuracy of the linear high-accuracy glass grating which cannot be made by the circular grating into the dimensional accuracy of the circumference through the silk thread, and can be used for calibrating the circular grating.
The measurement calibration method can realize measurement calibration of the grating of the A axis and each grating pitch angle of the encoder, and reduces inaccurate errors caused by grating processing.
Drawings
FIG. 1 is a schematic structural diagram of an A-axis angular displacement measuring device of five-axis equipment according to the invention;
FIG. 2 is a bottom view of the positional relationship among a check rod, a measuring shafting reference and a support beam in the five-axis device A-axis angular displacement measuring device according to the present invention;
FIG. 3 is a top view of the positional relationship among a check rod, a measurement shafting datum and a support beam in the five-axis device A-axis angular displacement measurement apparatus according to the present invention;
FIG. 4 is a side view of the positional relationship of a check rod, a measuring shafting datum and a support beam in the five-axis device A-axis angular displacement measuring device according to the invention;
fig. 5 is a schematic structural relationship diagram of a check rod and a measurement axis system reference in the five-axis device a-axis angular displacement measurement apparatus according to the present invention.
In the figure: 1. the device comprises a check rod, 2, a self-aligning screw, 3, a self-aligning support, 4, a measuring shafting benchmark, 5, a first silk thread, 6, a high-precision grating ruler sliding table, 7, a sliding table seat, 8, a second silk thread, 9, a pulley, 10 balance blocks, 11, a check rod fastening screw, 12 and a V-shaped structure support beam, 13, a fastening screw, 14, a silk thread fastening screw and 15 and a silk thread hanging pin.
Detailed Description
In the first embodiment, the present embodiment is described with reference to fig. 1 to 5, a measurement axis system is first established, due to the structure and characteristics of a five-axis machining center device, it is determined that an a axis (swing axis) can only swing left and right at an angle larger than 90 ° and smaller than 130 ° under a general condition, a 360 ° full circle cannot be machined on an excircle of the measurement axis system, only an arc length part of the swing axis from a vertical angle to a swing angle can be machined, and the measurement axis system is rotated 180 ° around a main axis in the opposite direction and then measured and calibrated, specifically including a check rod 1, a self-aligning support 3, a V-shaped structure support beam 12, a measurement axis system reference 4, a first wire 5, a high-precision grating ruler sliding table 6, a sliding table base 7, a second wire 8, a pulley 9, and a balance block 10;
a thread fastening screw 14 and a thread hanging pin 15 are machined on the outer circle surface of the measurement shafting reference 4; one end of the first wire 5 is fastened through a wire fastening screw 14, and the other end of the first wire 5 is fastened at one end of the sliding platform base 7; the other end of the sliding platform base 7 is fastened with a second wire 8, and the second wire 8 is fastened with a balance weight 10 after passing through a pulley 9;
the weight of the balance block 10 straightens and tightens the first silk thread 5 and the second silk thread 8, and pulls the high-precision grating ruler sliding table 6 to move, the tensile force borne by the silk threads is a fixed value under the action of the constant weight force of the balance block 10, the length of the silk threads is fixed at the same temperature, when the measured shafting benchmark 4 rotates, the first silk thread 5 is wound on the outer circle surface of the shafting benchmark 4, and meanwhile, the high-precision grating ruler sliding table 6 and the balance block 10 are pulled to move.
In this embodiment, the measurement shafting reference 4 is provided with a V-shaped bracket beam 12 and is fastened with the inspection rod 1 through a fastening screw 13 and a fastening screw 11 of the inspection rod. The aligning support 3 is fastened with the inspection rod 1 through the aligning screw 2, and the aligning screw 2 adjusts the axial positions of the measurement shafting benchmark 4 and the inspection rod 1, so that the arc surface (center) of the measurement shafting benchmark 4 is coaxial with the A shaft.
In the measuring process, the motion direction of the silk thread is parallel to the moving direction of the high-precision grating ruler sliding table 6, and the first silk thread 5 is tangent to the excircle surface of the measuring shafting datum 4. The moving direction of the first wire 5 is vertical to the axial direction of the measuring shafting datum 4.
In this embodiment, the thread fastening screw 14 is installed in parallel with the thread hanging pin 15, and a connecting line between the thread fastening screw 14 and the thread hanging pin 15 is parallel to an axis of the measurement shafting reference 4. The wire binding screws 14 are close to the edge end of the measuring shafting datum 4.
In the embodiment, the runout between the outer circle surface of the measurement shafting reference 4 and the shafting is 0.001 mm.
In a second specific embodiment, the first specific embodiment is adopted to implement the measurement and calibration method of the five-axis device a-axis angular displacement measurement device, when measuring and calibrating the angle of the a-axis circular grating or the encoder, the a-axis circular grating or the encoder has a reference zero point (vertical position), when the a-axis drives the measurement shafting reference 4 to rotate, the high-precision grating ruler or the laser interferometer synchronously starts to record the displacement distance of the sliding table according to a 0-degree (vertical position) command of the a-axis circular grating or the encoder reference, and the angle information of the a-axis circular grating or the encoder and the displacement information of the high-precision grating ruler or the laser interferometer are synchronously recorded until the angle reaches 90 degrees, so that the displacement of the high-precision grating ruler or the laser interferometer can correspond to the angle of the a-axis circular grating or the encoder.
In the measurement calibration process, when the high-precision grating ruler collects the mth grating distance, the high-precision grating ruler corresponds to the nth grating distance of the A axis, the corresponding angle of the high-precision grating ruler is alpha, and the corresponding angle of the A axis is beta; correcting, namely correcting the angle beta corresponding to the nth grid distance of the axis A into the corresponding angle alpha when the high-precision grating ruler collects the mth grid distance;
the high-precision grating ruler continues to collect until the high-precision grating ruler adopts the Mth grating distance, the high-precision grating ruler corresponds to the Nth grating distance of the A axis, the corresponding angle of the high-precision grating ruler is gamma, and the corresponding angle of the A axis is also gamma; the controller records the grid distance value corresponding to the axis A until the rotation of the reference 4 of the measurement shafting reaches the reference zero point of the axis A; m is more than or equal to 1 and less than or equal to M, N is more than or equal to 1 and less than or equal to N, M and N are integers, and M is not equal to N.
In a third specific embodiment, the third specific embodiment is an embodiment of the method for measuring and calibrating the angular displacement of the axis a of the five-axis device according to the second specific embodiment, if the axis diameter of the outer circle of the reference axis of the measurement axis system is the diameter of the outer circle of the reference axis of the measurement axis system
Figure BDA0002886037280000051
The corresponding 1-degree arc length is 2mm, the precision of the high-precision grating ruler or the laser interferometer is 200nm, and the precision of the A-axis angle calibrated by the high-precision grating ruler or the laser interferometer is 0.0001 degree or 0.36 degree. If the high-precision grating ruler is subdivided by electrons, or if the precision of the laser interferometer is 1nm in a laboratory, the precision of the angle of the A axis calibrated by the high-precision grating ruler or the laser interferometer is 0.000001 degrees or 0.0036 degrees theoretically.
If the 360 DEG of the rotary table is set to have 144000 grid pitches, 1 DEG should be 4000, and an ideal grid pitch corresponds to 0.00025 DEG, the diameter of the outer circle of the reference axis system is measured
Figure BDA0002886037280000052
The circumference is 720mm, the grating pitches of the high-precision grating ruler are 7200000, one grating pitch corresponds to an angle of 0.00005 degrees, when an A-axis grating is measured and calibrated, the measuring shaft system reference 4 rotates to drive the high-precision grating ruler and the turntable grating to move and synchronously acquire two groups of gratings, and as shown in table 1, the table 1 is the corresponding relation of compensation data of the high-precision grating ruler, the A-axis grating ruler and the A-axis grating ruler.
TABLE 1
Serial number High-precision grating ruler A-axis grating ruler A-axis grating scale compensation
1 0.0001mm
2 0.0002mm
3 0.0003mm
4 0.0004mm 0.00025° 0.0002°
5 0.0005mm
6 0.0006mm
7 0.0007mm
8 0.0008mm
9 0.0009mm 0.0005° 0.00045°
10 0.001mm
11 0.0011mm
12 0.0012mm
13 0.0013mm
14 0.0014mm
15 0.0015mm
16 0.0016mm 0.0075° 0.008°
17 0.0017mm
18 0.0018mm
19 0.0019mm
20 0.002mm 0.001° 0.001°
21 0.0021mm
22 0.0022mm
n 0.00nmm
... 0.00n1mm
0 720mm
With reference to table 1, when the high-precision grating scale collects the fourth grating distance, the a axis is the first grating distance, the corresponding angle of the high-precision grating scale is 0.0002 °, the corresponding angle of the a axis is 0.00025 °, the first grating distance of the a axis is changed to 0.0002 ° after correction, when the high-precision grating scale collects the ninth grating distance, the a axis is the second grating distance, the corresponding angle of the high-precision grating scale is 0.00045 °, the corresponding angle of the a axis is 0.0005 °, the second grating distance of the turntable is changed to 0.00045 ° after correction, when the sixteenth grating distance is collected by the high-precision grating scale, the a axis is the third grating distance, the corresponding angle of the high-precision grating scale is 0.0008 °, the corresponding angle of the a axis is 0.00075 °, the second grating distance of the a axis is changed to 0.0008 ° after correction, when the twentieth grating distance is collected by the high-precision grating scale, the a axis is the fourth grating distance, the corresponding angle of the high-precision grating scale is 0.001 °, the high-precision grating scale is equal to the value of the fourth grating distance, the fourth grid distance value of the rotary table is kept unchanged, and the rotary table is pushed downwards in the method until the rotary table returns to the zero position. The error of the turntable calibrated by the measuring shafting reference 4 is less than 0.09 ".
In the embodiment, when the diameter of the outer circle of the measurement shafting reference is 300mm, the circumference of the measurement shafting reference is 942.4778mm, the corresponding high-precision grating pitches are 9424778, one grating pitch corresponds to an angle of 0.0000382 degrees and corresponds to 0.1375 degrees. The error of the A axis calibrated by adopting the measurement shafting reference is less than 0.07'.
In the present embodiment, the wire diameter used has the following influence: when a 0.2mm diameter wire is used, 6283 pitches will be added to the high precision grating when the measurement shafting rotates one circle.
In the embodiment, the wire winding measurement shafting body is adopted, the purpose is three, the first is that under the traction of the gravity of the balance weight, the tension of each part of the wire is constant, the length of the process of winding the wire on the measurement shafting is not changed, namely, the equal winding arc length is the same in the grid distance displayed by the high-precision grating ruler. And secondly, converting the precision of the linear high-precision glass grating which cannot be made by the circular grating into the circumferential dimension through a silk thread, and calibrating the circular grating. The third temperature has an influence on the length of the wire, but the third temperature has an influence on the whole wire, and the equal winding arc length is the same at the grid distance displayed by the high-precision grating ruler, but has no influence on the measurement result.
While certain exemplary embodiments of the present invention have been described above by way of illustration only, it will be apparent to those of ordinary skill in the art that the described embodiments may be modified in various different ways without departing from the spirit and scope of the invention. Accordingly, the drawings and description are illustrative in nature and should not be construed as limiting the scope of the invention.

Claims (7)

1. The device for measuring the A-axis angular displacement of the five-axis equipment comprises a measuring shafting reference (4), a high-precision grating ruler sliding table (6) and a sliding table base (7); the method is characterized in that: the test device also comprises a test rod (1), a self-aligning support (3), a V-shaped structure support beam (12), a first silk thread (5), a second silk thread (8), a pulley (9) and a balancing block (10);
a thread fastening screw (14) and a thread hanging pin (15) are processed on the measuring shafting reference (4); one end of the first silk thread (5) is fastened through a silk thread fastening screw (14), and the other end of the first silk thread (5) is fastened at one end of the sliding table seat (7); a second silk thread (8) is fastened at the other end of the sliding platform seat (7), and the second silk thread (8) is fastened to a balance block (10) after passing through a pulley (9);
the weight of the balance block (10) straightens and tightens the first silk thread (5) and the second silk thread (8) and drives the high-precision grating ruler sliding table (6) to move, when the measurement shafting datum (4) rotates, the first silk thread (5) winds the arc surface of the measurement shafting datum (4), and simultaneously drives the high-precision grating ruler sliding table (6) and the balance block (10) to move;
a V-shaped structure support beam (12) is processed on the measurement shafting reference (4) and is fastened with the inspection rod (1) into a whole;
the aligning support (3) is fastened with the inspection rod (1) through the aligning screw (2), the aligning screw (2) is used for adjusting the axial positions of the measurement shafting benchmark (4) and the inspection rod (1), and the arc surface of the measurement shafting benchmark (4) is coaxial with the A shaft.
2. The five-axis device A-axis angular displacement measurement device of claim 1, characterized in that: in the measuring process, the motion direction of the silk thread is parallel to the moving direction of the high-precision grating ruler sliding table (6), and the first silk thread (5) is tangent to the arc surface of the measuring shafting datum (4).
3. The five-axis device A-axis angular displacement measurement device of claim 1, characterized in that: the motion direction of the first silk thread (5) is vertical to the axial direction of the measuring shafting reference (4).
4. The five-axis device A-axis angular displacement measurement device of claim 1, characterized in that: the thread fastening screw (14) and the thread hanging pin (15) are installed in parallel, and a connecting line of the thread fastening screw (14) and the thread hanging pin (15) is parallel to an axis of the measuring shafting reference (4).
5. The five-axis device A-axis angular displacement measurement device of claim 4, characterized in that: the wire fastening screw (14) is close to the edge end of the measuring shafting datum (4).
6. The measurement calibration method of the five-axis device A-axis angular displacement measurement device according to any one of claims 1 to 5, characterized by comprising the following steps: the method is realized by the following steps:
step one, the five-axis equipment control system places the reference point of the A axis at a zero point, namely: the A axis is vertical to the main axis;
secondly, when the shaft A rotates to drive the inspection rod (1) and the measurement shafting reference (4) to rotate, the control system collects angle data;
thirdly, the control system collects displacement distance data of the high-precision grating ruler recording high-precision grating ruler sliding table (6), and collects grating angle information of an A axis;
and fourthly, when the measurement shafting reference (4) rotates by 90 degrees, the displacement distance data of the high-precision grating ruler corresponds to the grating angle information of the A axis, and the measurement calibration of the A axis is realized.
7. The measurement calibration method according to claim 6, characterized in that: in the measurement calibration process, when the high-precision grating ruler collects the mth grating distance, the high-precision grating ruler corresponds to the nth grating distance of the A axis, the corresponding angle of the high-precision grating ruler is alpha, and the corresponding angle of the A axis is beta; correcting, namely correcting the angle beta corresponding to the nth grid distance of the axis A into the corresponding angle alpha when the high-precision grating ruler collects the mth grid distance;
the high-precision grating ruler continues to collect until the high-precision grating ruler adopts the Mth grating distance, the high-precision grating ruler corresponds to the Nth grating distance of the A axis, the corresponding angle of the high-precision grating ruler is gamma, and the corresponding angle of the A axis is also gamma; the controller records the grid distance value corresponding to the axis A until the rotation of the measurement shafting reference (4) reaches the reference zero point of the axis A; m is more than or equal to 1 and less than or equal to M, N is more than or equal to 1 and less than or equal to N, M and N are integers, and M is not equal to N.
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JPS57132012A (en) * 1981-02-09 1982-08-16 Mitsubishi Heavy Ind Ltd Detector for angle of elevation of boom
CN1044707A (en) * 1989-01-30 1990-08-15 孙恒虎 The length of the length of backguy mechanical drive output electric weight, the method for sensing of measurement of angle and backguy mechanical drive output electric weight, angular transducer
JP2004361285A (en) * 2003-06-05 2004-12-24 Hitachi Cable Ltd Angle sensor and pipeline measuring device using the same
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