CN112697039B - A detection device and a detection equipment - Google Patents
A detection device and a detection equipment Download PDFInfo
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- CN112697039B CN112697039B CN202010861773.4A CN202010861773A CN112697039B CN 112697039 B CN112697039 B CN 112697039B CN 202010861773 A CN202010861773 A CN 202010861773A CN 112697039 B CN112697039 B CN 112697039B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- Length Measuring Devices By Optical Means (AREA)
Abstract
本申请提供一种检测装置，包括光源装置，其用于向待测区及其外围区域发射检测光束，检测光束沿垂直于待测物的方向入射至待测区及其外围区域，检测光束穿过外围区域形成复检光束；反射元件，其具有反射面，反射面平行于待测物，反射面用于使至少部分复检光束反射至外围区域，复检光束穿过外围区域形成第一信号光；以及探测装置，其用于接收信号光，信号光包括沿垂直于待测物的方向自外围区域出射的第一信号光；通过以上设置，可以使得光源装置出射的检测光束可以经待测物反射、折射或散射后形成信号光，被探测装置所收集，形成清晰的轮廓图，从而提高检测精度。
The present application provides a detection device, including a light source device, which is used to emit a detection light beam to a region to be detected and its peripheral region, the detection light beam is incident on the region to be detected and its peripheral region along a direction perpendicular to the object to be detected, and the detection light beam passes through the peripheral region to form a re-detection light beam; a reflective element, which has a reflection surface, the reflection surface is parallel to the object to be detected, the reflection surface is used to reflect at least part of the re-detection light beam to the peripheral region, and the re-detection light beam passes through the peripheral region to form a first signal light; and a detection device, which is used to receive signal light, the signal light includes the first signal light emitted from the peripheral region along a direction perpendicular to the object to be detected; through the above settings, the detection light beam emitted by the light source device can be reflected, refracted or scattered by the object to be detected to form a signal light, which is collected by the detection device to form a clear contour map, thereby improving the detection accuracy.
Description
Technical Field
The invention relates to the technical field of optical detection, in particular to a detection device and detection equipment.
Background
With the rapid development of electronic information technology, the mobile phone is updated more and more rapidly, including software and hardware changes. For example, curved mobile phone screens are becoming a trend, and hypersurface ring screen screens are receiving more and more attention from mobile phone manufacturers.
Aiming at the development trend of mobile phone screens, the existing optical detection technology cannot meet the requirements, and when the edges of curved-surface screens, especially hypersurface annular screen screens, are detected, the existing optical detection instrument cannot clearly image the edges of the curved-surface screens, so that the accuracy of optical detection results is reduced.
How to accurately detect the curved screen of the mobile phone is a problem to be solved in the present day.
Disclosure of Invention
The invention provides a detection device which aims at the defect that the edge of a curved screen cannot be imaged clearly in the existing optical detection technology, and comprises a light source device, a reflection element and a detection device, wherein the light source device is used for emitting detection light beams to a region to be detected and a peripheral region thereof, the detection light beams are incident to the region to be detected and the peripheral region thereof along the direction vertical to an object to be detected, the detection light beams pass through the peripheral region to form complex detection light beams, the region to be detected is used for changing the propagation direction of the detection light beams, the reflection element is provided with a reflection surface, the central axis of the detection light beams is vertical to the reflection element, the reflection surface is used for reflecting at least part of the complex detection light beams to the peripheral region, the complex detection light beams pass through the peripheral region to form first signal light, and the detection device is used for receiving the signal light, and the signal light comprises the first signal light emitted from the peripheral region along the direction vertical to the reflection surface to form detection information.
Through the arrangement, the detection light beam emitted by the light source device is incident to the region to be detected and the peripheral region thereof, part of the detection light is reflected by the surface of the object to be detected to form part of signal light, part of the detection light passes through the peripheral region to form the re-detection light beam, part of the re-detection light beam passes through the peripheral region to irradiate the reflecting surface to form the re-detection light beam, the first signal light is formed by part of the re-detection light beam through the peripheral region, and the detection device receives the signal light, particularly the first signal light emitted from the peripheral region along the direction perpendicular to the object to be detected, so that the contrast of an image can be improved, and the detection accuracy is improved.
In one embodiment, the light source device comprises a light source and a spectroscope, wherein the spectroscope is arranged on a light path between the light source and the object to be detected and is used for enabling the detection light beam emitted by the light source to irradiate the edge of the object to be detected, and the detection device has the advantage of small volume through the arrangement.
In one embodiment, the light source is an LED light source array and the beam splitter is a half mirror.
In one embodiment, the beam splitter is used for reflecting the detection light beam emitted by the light source and transmitting the signal light, or the beam splitter is used for transmitting the detection light beam emitted by the light source and reflecting the signal light.
In one embodiment, the detection device further comprises a bearing surface for placing the object to be detected, the light source device and the reflecting element are respectively located on two sides of the bearing surface, the light source device and the detection device are located on the same side of the bearing surface, and the optical axis of the detection device is perpendicular to the reflecting surface or the light emitting surface of the light source is parallel to the reflecting surface.
In one embodiment, the optical axis of the detecting device is perpendicular to the reflecting surface, the light source device is located between the detecting device and the reflecting element, the light source device has an end face close to the bearing surface, the distance between the end face and the bearing surface is 150-170 mm, and the distance between the bearing surface and the reflecting surface is 18-22 mm.
In one embodiment, the detection beam perpendicular to the reflecting surface has a central beam at the center, which is collinear with the optical axis of the detection device.
In one embodiment, the region to be measured comprises an edge line of the edge of the object to be measured or an edge line of the hole, and the peripheral region comprises the region to be measured on one side of the edge line or/and the space region on the other side of the edge line.
In one embodiment, the angle between the external normal at least one point of the surface of the object to be measured and the reflecting surface is smaller than 20 °.
In one embodiment, the peripheral region includes an object region, and the peripheral region is made of a light-transmitting material or a light-impermeable material with respect to the detection beam.
In one embodiment, the reflective element is a specular mirror.
In one embodiment, the light source device comprises a telecentric parallel light source, and the parallelism of the detection light beam emitted by the light source device is higher through the arrangement.
In one embodiment, the reflective element is annular.
In one embodiment, the object to be tested comprises a central area, a platform and a supporting piece, wherein the central area is located at the periphery of the central area, the supporting piece is located on the platform and used for supporting the central area of the object to be tested, the reflecting element is fixed on the platform, and the supporting piece penetrates through the hollow area of the reflecting element.
In one embodiment, the detection information includes one or more of position, shape, or size information of the region to be detected.
The invention also provides detection equipment, which comprises any detection device and a detection component for detecting the object to be detected.
In one embodiment, the detection component is at least one of a dispersive confocal detection portion, an interferometric detection component, a color camera, or a reflectance spectrum detection portion.
The detection device has the beneficial effects that the detection light beams emitted by the light source device are incident to the region to be detected and the peripheral region thereof, part of the detection light can form part of signal light (second signal light) through the surface reflection of the object to be detected, part of the detection light passes through the peripheral region to form the complex detection light beam, and the complex detection light beam irradiates the reflecting surface through the peripheral region. Meanwhile, the detection light is used for receiving the signal light, the signal light comprises first signal light emitted from the peripheral area along the direction vertical to the reflecting surface, the central axis of the detection light beam is vertical to the reflecting element, so that the parallelism of the detection light beam forming the signal light is good, the light beam of the region to be detected after changing the propagation direction of the detection light beam is not easy to be received by the detection device, and therefore the contrast ratio of the formed image can be further improved, and the detection accuracy is improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a structural transmission diagram of an embodiment of a detection device provided by the present application;
FIG. 2 is a schematic diagram of another embodiment of a detecting device according to the present application;
fig. 3 is a schematic structural diagram of another embodiment of the detection device provided by the present application.
Detailed Description
The core of the invention is to provide a detection device which can obviously improve the definition and contrast of the edge of an object to be detected and improve the detection precision of the object to be detected.
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
It will be understood that when an element is referred to as being "mounted" or "disposed" on another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative and intended to explain the present invention and should not be construed as limiting the invention.
Referring to fig. 1 and fig. 2, fig. 1 is a light transmission diagram of an embodiment of a detection device according to the present invention, and fig. 2 is a schematic structural diagram of an embodiment of a detection device according to the present invention.
In the embodiment, the detection device comprises a detection device 110, a light source device 120 and a reflecting element 130, wherein the light source device 120 is used for emitting detection light beams like a region to be detected and a peripheral region thereof, the detection light beams are incident to the region to be detected and the peripheral region thereof along a direction perpendicular to an object to be detected, the detection light beams pass through the peripheral region to form a re-detection light beam, the region to be detected is used for changing the propagation direction of the detection light beams, the reflecting element 130 is provided with a reflecting surface, the central axis of the detection light beam is perpendicular to the reflecting element, the reflecting surface is used for reflecting at least part of the re-detection light beam to the peripheral region, the re-detection light beam passes through the peripheral region to form first signal light, and the detection device 110 is used for receiving the signal light, and the signal light comprises the first signal light emitted from the peripheral region along a direction perpendicular to the reflecting surface of the reflecting element 130 to form detection information.
The detection device has the beneficial effects that the detection light beams emitted by the light source device are incident to the region to be detected and the peripheral region thereof, part of the detection light can form part of signal light (second signal light) through the surface reflection of the object to be detected, part of the detection light passes through the peripheral region to form the complex detection light beam, and the complex detection light beam irradiates the reflecting surface through the peripheral region. Meanwhile, the detection light is used for receiving the signal light, the signal light comprises first signal light emitted from the peripheral area along the direction vertical to the reflecting surface, the central axis of the detection light beam is vertical to the reflecting element, so that the parallelism of the detection light beam forming the signal light is good, the light beam of the region to be detected after changing the propagation direction of the detection light beam is not easy to be received by the detection device, and therefore the contrast ratio of the formed image can be further improved, and the detection accuracy is improved.
In this embodiment, an included angle between the reflection surface and an external normal line at least one point of the surface of the object to be measured is smaller than 20 °.
Specifically, in this embodiment, as shown in fig. 2, the object 150 is 2.5D or 3D glass, such as a mobile phone screen or a mobile phone case.
In this embodiment, the peripheral area of the detection area includes an area of the object to be detected 150, and the peripheral area is made of a light-transmitting material or a light-impermeable material with respect to the detection beam. In addition, the object 150 includes a central region, and the area to be measured is located at the periphery of the central region.
The peripheral area comprises an object area to be detected positioned at one side of the edge line or/and a space area positioned at the other side of the edge line.
In this embodiment, the region to be measured is an edge line of the object to be measured, and the peripheral region includes an object region to be measured on one side of the edge line and a space region on the other side of the edge line.
The space region refers to a portion not belonging to the object to be measured, for example, air near the edge line of the object to be measured in the present embodiment.
The detection device further comprises a bearing surface, wherein the bearing surface is used for placing an object to be detected.
In this embodiment, the light source device 120 includes a light source 121 and a beam splitter 122, where the beam splitter 122 is disposed on an optical path between the light source 121 and the object to be measured 150, and is used to separate the detection beam and the signal beam emitted from the light source 121. Through the arrangement, the detection device has the advantage of small volume.
Specifically, the light source 121 is an LED light source array, which may be white light, blue light or light with other wavelengths, and emits parallel detection beams, and the spectroscope 122 is a half mirror, which may transmit part of the light and reflect part of the light.
In this embodiment, the light source 121 is configured to emit a detection light beam to the beam splitter 122, and the detection light beam is reflected or transmitted by the beam splitter and then is incident to the area to be measured and the peripheral area thereof along a direction perpendicular to the object to be measured 150.
In this embodiment, as shown in fig. 1, the beam splitter 122 may be used to reflect the detection beam emitted from the light source 121 and transmit the signal light. In another embodiment, as shown in fig. 3, a beam splitter 122 may be used to transmit the detection beam emitted from the light source 121 and reflect the signal light.
In another embodiment, the light source device 120 includes a telecentric parallel light source, and the parallelism of the detection light beam emitted by the light source device is higher.
In this embodiment, the detection beam emitted from the light source device 120 and perpendicular to the reflecting surface of the reflecting element 130 has a central beam at the center, and the central beam passes through the same straight line as the optical axis of the detecting device 110. The central beam and the optical axis of the detecting device 110 pass through the same straight line, so that the intensity of the signal light detected by the detecting device 110 and parallel to the optical axis of the detecting device can be increased to be maximum, and the intensity of the beam with a divergence angle can be reduced, so that the acquired image contrast can be further increased.
For example, in this embodiment, the light source device 120 forms a solid light spot on the plane of the bearing surface, and the center of the field of view area of the detecting device 110 on the plane of the bearing surface coincides with the solid light spot.
In other embodiments, the cross section of the detection beam at the bearing surface is offset from the center of the detection device in the field of view area of the bearing surface.
In this embodiment, the light source device 120 and the reflecting element 130 are respectively located at two sides of the bearing surface, the light source device 120 and the detecting device 110 are located at the same side of the bearing surface, and the optical axis of the detecting device 110 is perpendicular to the reflecting surface of the reflecting element 130.
In this embodiment, the detecting device 110 directly detects the signal light transmitted by the beam splitter 122, and the detected light emitted by the light source directly enters the beam splitter 122. The detection device has compact structure and small volume.
In another embodiment, referring again to fig. 3, the light emitting surface of the light source 121 is parallel to the reflecting surface of the reflecting element 130. The detection device 110 directly detects the signal light reflected by the beam splitter 122, and the detection light emitted by the light source is directly incident to the beam splitter 122.
Both the detection devices shown in fig. 1 and 3 have the advantages of compact structure and small volume.
In other embodiments, the light reflected or projected by the beam splitter may be received by the detection device after being reflected by one or more mirrors. And/or, the detection light emitted by the light source reaches the spectroscope after being reflected by one or more reflectors. In this embodiment, the detecting device 110 includes a detector 111 and a lens 112, and an industrial camera is used, so that materials are easily obtained, and the cost is low. The optical axis of the detecting device 110 is perpendicular to the reflecting surface of the reflecting element 130, the light source device 120 is located between the detecting device 110 and the reflecting element 130, specifically, the light source device 120 has an end face close to the bearing surface, the distance between the end face and the bearing surface is 150-170 mm, preferably 160mm, and the distance between the bearing surface and the reflecting surface of the reflecting element is 18-22 mm, preferably 20mm. Through the above arrangement, after the detection light beam emitted by the light source device 120 is reflected by the object to be detected and/or the reflecting surface, more light can be collected by the detection device, so that the outline image signal output by the detection device is stronger, and the signal to noise ratio of the detection device is reduced.
In the present embodiment, the reflecting surface of the reflecting element 130 is a specular reflection, which can make the detection beam irradiated thereon, especially the re-detection beam, maintain the parallel characteristic after being reflected by the reflecting surface, so that the re-detection beam is irradiated to the edge of the object 150 in parallel.
The reflecting element 130 is annular, i.e. the middle area of the reflecting element 130 is hollow. Referring to fig. 1 again, the detecting apparatus further includes a platform 140, and a supporting member 141 disposed on the platform 140, wherein the supporting member 141 is configured to support a central region of the object 150, the reflecting element 130 is fixed on the platform 140, and the supporting member 141 passes through a hollow region of the reflecting element 130.
The surface of the supporting member 141 for contacting with the object 150 is the bearing surface, and the bearing surface is parallel to the reflecting surface.
When the object 150 is placed on the carrying surface, the main plane of the object 150 is parallel to the carrying surface. For example, the mobile phone housing main plane contacts the bearing surface.
In this embodiment, the supporting member 141 includes a plurality of suction cups, and the plurality of suction cups are used for directly contacting the object 150 to be tested, so as to support the object 150 to be tested. The detecting device 110 is configured to obtain images of the to-be-detected area and the peripheral area according to the signal light, and obtain detection information of the to-be-detected area according to the images.
The detection information includes one or more of position, shape, or size information of the region to be detected.
Specifically, in this embodiment, the detection information includes an edge profile of 2.5D or 3D glass. In other embodiments, the detection information includes an edge line location of the hole.
Referring to fig. 1 again, after passing through the beam splitter 122, the parallel detection beam emitted from the light source 121 is reflected by the beam splitter 122, the detection beam is incident to the region to be detected and the peripheral region thereof along the direction perpendicular to the bearing surface, part of the detection beam is reflected by the surface of the object to be detected 150 to form part of signal light (second signal light), and the propagation direction of the detection beam reaching the region to be detected is not easily changed by the detection device due to scattering or diffraction of the detection beam, so that the gray value of the image of the region to be detected is smaller; the second signal light passes through the spectroscope 122 and then enters the detection device 110, so that the gray value of an image formed by the object to be detected in the peripheral area is higher, part of the detection light beams pass through the object to be detected in the peripheral area and the space to form a re-detection light beam, the re-detection light beam is reflected by the reflecting surface of the reflecting element 130 and then irradiates to the peripheral area again, the re-detection light beam passing through the peripheral area forms a first signal light, the first signal light passes through the spectroscope 122 and then is received by the detection device 110, and the gray value of the image of the object to be detected in the peripheral area is further increased by part of the first signal light passing through the object to be detected in the peripheral area, so that the contrast is improved. Because the change of the light propagation direction of the space area of the peripheral area is small, the light of the re-detection which is incident perpendicularly to the reflecting surface is received by the detection device after being emitted perpendicularly to the re-detection, so that the image gray value of the space area of the peripheral area is higher. In summary, by the above arrangement, the contrast of the acquired image can be improved, and the detecting device can form a clear outline of the object to be detected. In this embodiment, the parallel detection light beam provided by the light source is reflected by the surface of the object to be detected, and is transmitted by the object to be detected after being reflected by the reflecting surface, and is collected by the detection device together, so as to form a profile of the object to be detected, and improve the definition of the edge imaging of the object to be detected.
In this embodiment, the detection device further includes a motion stage 140 for moving and/or rotating the object 150 relative to the detection device 110 and the light source device 120, specifically, the object 150 is disposed on the motion stage 140, and the object 150 can be located in the irradiation range of the light source device 120 by moving the motion stage 140. In other embodiments, the object 150 and the reflecting element 130 may be disposed on the moving stage 140 at the same time, so that the moving stage 140 drives the object 150 and the reflecting element 130 to move at the same time.
The application also provides detection equipment which comprises the detection device and further comprises a detection component, wherein the detection component is used for carrying out optical detection on the object to be detected 150. The detection means may be at least one of a dispersive confocal detection portion, an interferometric detection portion, a color camera or a reflectance spectrum detection portion.
While the present invention has been described with reference to specific examples, which are intended to be illustrative only and not to be limiting of the invention, it will be apparent to those of ordinary skill in the art that changes, additions or deletions may be made to the disclosed embodiments without departing from the spirit and scope of the invention.
Claims (14)
1. The detection device is characterized by comprising a light source device, a part of detection light beams, a peripheral region and a space region, wherein the light source device is used for emitting detection light beams to a region to be detected and the peripheral region thereof, the detection light beams are incident to the region to be detected and the peripheral region thereof along a direction perpendicular to an object to be detected, the detection light beams pass through the peripheral region to form a re-detection light beam, the region to be detected is used for changing the propagation direction of the detection light beams, the part of detection light beams are reflected by the surface of the object to be detected to form second signal light, the region to be detected comprises an edge line of the edge of the object to be detected or an edge line of a hole, and the peripheral region comprises the region to be detected positioned at one side of the edge line or/and the space region positioned at the other side of the edge line;
The reflecting element is provided with a reflecting surface, the central axis of the detection light beam is perpendicular to the reflecting element, the reflecting surface is used for reflecting at least part of the complex detection light beam to the peripheral area, and the complex detection light beam passes through the peripheral area to form first signal light;
And a detection device for receiving signal light including first signal light and the second signal light emitted from the peripheral area in a direction perpendicular to the reflection surface, forming detection information;
The device comprises a platform and a supporting piece positioned on the platform, wherein the supporting piece is used for supporting the central area of the object to be detected, the reflecting element is fixed on the platform, and the supporting piece passes through the hollow area of the reflecting element.
2. The detecting device for detecting the rotation of a motor rotor as claimed in claim 1, wherein the light source device includes a light source and a beam splitter which is disposed on an optical path between the light source and the object to be detected for separating the detecting light beam emitted from the light source from the signal light.
3. The detection device of claim 2, wherein the light source is an array of LED light sources and the beam splitter is a half mirror.
4. The detecting device according to claim 2, wherein the beam splitter is configured to reflect the detection light beam emitted from the light source and transmit the signal light, or the beam splitter is configured to transmit the detection light beam emitted from the light source and reflect the signal light.
5. The test device of claim 1, further comprising a bearing surface for positioning the test object;
the light source device and the reflecting element are respectively positioned at two sides of the bearing surface, and the light source device and the detecting device are positioned at the same side of the bearing surface;
The optical axis of the detection device is perpendicular to the reflecting surface, or the light emitting surface of the light source is parallel to the reflecting surface.
6. The detecting device for detecting the rotation of a motor rotor as claimed in claim 5, wherein the optical axis of the detecting device is perpendicular to the reflecting surface, the light source device is located between the detecting device and the reflecting element, the light source device has an end face close to the carrying surface, the distance between the end face and the carrying surface is 150-170 mm, and the distance between the carrying surface and the reflecting surface is 18-22 mm.
7. The detecting device according to claim 1, wherein the detecting light beam perpendicular to the reflecting surface has a central light beam at the center, the central light beam passing through the same straight line as the optical axis of the detecting device.
8. The apparatus of claim 6, wherein an angle between an external normal to the surface of the object at least at one point and the reflecting surface is less than 20 °.
9. The test device of claim 1, wherein the peripheral region comprises an object region, the peripheral region being of a light transmissive material or a light opaque material relative to the test beam.
10. The detection apparatus according to claim 1, wherein the reflecting element is a specular mirror.
11. The detection apparatus according to claim 1, wherein the light source means comprises a telecentric parallel light source.
12. The detection apparatus of claim 1, wherein the detection information comprises one or more of position, shape, or size information of a region to be detected.
13. A detection apparatus comprising the detection device according to any one of claims 1 to 12, and further comprising a detection means for detecting the object to be detected.
14. The detection apparatus according to claim 13, wherein the detection means is at least one of a dispersive confocal detection portion, an interference detection portion, a color camera, or a reflectance spectrum detection portion.
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| CN112697039A (en) | 2021-04-23 |
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