CN112536539B - Laser processing equipment loading system and method - Google Patents
Laser processing equipment loading system and method Download PDFInfo
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- CN112536539B CN112536539B CN202011418684.9A CN202011418684A CN112536539B CN 112536539 B CN112536539 B CN 112536539B CN 202011418684 A CN202011418684 A CN 202011418684A CN 112536539 B CN112536539 B CN 112536539B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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Abstract
本发明提供激光加工设备上料系统及方法，包括：检测组件、运动组件、计算组件；运动组件用于移动待加工基板至检测组件检测区域、调整工作台的位置；检测组件用于检测待加工基板位置信息，并将检测结果传递至计算组件；计算组件用于对检测结果进行数据处理，并根据数据处理结果控制运动组件；计算组件将检测结果与标准模板进行对比，得出待加工基板与标准模板间的角度偏差值和空间偏差值，根据角度偏差值和空间偏差值计算出角度修正方案和空间修正方案，并通过运动组件进行角度修正和空间修正。本发明通过采用无夹持系统，避免了因夹持动作产生的基片损伤，减少了因夹持误差导致的废片产生，大大提升了放料的稳定性和整机的工作效率。
The present invention provides a laser processing equipment loading system and method, including: a detection component, a motion component, and a calculation component; the motion component is used to move the substrate to be processed to the detection area of the detection component and adjust the position of the workbench; the detection component is used to detect the position information of the substrate to be processed, and transmit the detection result to the calculation component; the calculation component is used to perform data processing on the detection result, and control the motion component according to the data processing result; the calculation component compares the detection result with the standard template, obtains the angle deviation value and space deviation value between the substrate to be processed and the standard template, calculates the angle correction scheme and space correction scheme according to the angle deviation value and space deviation value, and performs angle correction and space correction through the motion component. The present invention avoids substrate damage caused by clamping action by adopting a non-clamping system, reduces the generation of waste sheets caused by clamping errors, and greatly improves the stability of material discharge and the working efficiency of the whole machine.
Description
Technical Field
The invention relates to the field of laser processing equipment, in particular to a feeding system and a feeding method of laser processing equipment.
Background
In the current laser processing field, the feeding system used by more than ninety percent of laser processing equipment in the market is a clamping and positioning workbench with bearings, and a few of the used feeding systems are non-bearing workbench capable of automatically identifying feeding, and the feeding workbench with an automatic identification function is mostly imported equipment and has higher price.
The original feeding system with clamping has the following working modes:
The material taking manipulator takes out the base plate from the feed bin, then drives the material taking manipulator by the motion motor, conveys the base plate to the discharging position, the material taking manipulator descends, places the base plate on the workbench surface, then lifts the material taking manipulator, the motion motor drives the material taking manipulator to move to the undetermined position, the clamping system of the workbench is controlled by the air cylinder, the clamping wheel is driven to clamp the base plate, at the moment, the base plate is positioned between the clamping wheel and the fixed wheel, the base plate positioning is realized in the mode, then the workbench adsorbs vacuum, the clamping wheel resets, and subsequent movement is performed.
The existing clamping and positioning workbench with the perine often has the problems that the substrate is dark and cracked, the clamping action deviation causes waste chips and the like in the feeding process, and the positioning wheel and the driving wheel belong to consumable materials and need to be maintained and replaced regularly.
Disclosure of Invention
The invention provides the following feeding system and method of laser processing equipment for overcoming the defects of the existing clamping and positioning workbench with the Pelin.
In order to achieve the above purpose, the present invention adopts the following specific technical scheme:
the feeding system of the laser processing equipment comprises a detection component, a motion component and a calculation component;
the motion component is used for moving the substrate to be processed to a detection area of the detection component and adjusting the position of the workbench;
The detection component is used for detecting the position information of the substrate to be processed and transmitting the detection result to the calculation component;
the calculation component is used for carrying out data processing on the detection result and controlling the movement component according to the data processing result, compares the detection result with the standard template to obtain an angle deviation value and a space deviation value between the substrate to be processed and the standard template, calculates an angle correction scheme and a space correction scheme according to the angle deviation value and the space deviation value, and carries out angle correction and space correction through the movement component.
Preferably, the detection assembly comprises an identification camera and an illumination light source, the movement assembly moves the substrate to be processed to a set detection position, the illumination light source provides illumination, and the identification camera performs pattern acquisition.
The moving assembly comprises a manipulator, a first micro motor for controlling the manipulator, a second motor for controlling the workbench, wherein the manipulator clamps and moves the substrate to be processed, the first micro motor drives the manipulator to perform angle movement or position movement, and the second motor drives the workbench to perform position movement.
Preferably, the first miniature motor is a small-sized servo motor.
Preferably, the spatial deviation value includes a horizontal deviation value and a vertical deviation value.
The feeding method of the laser processing equipment comprises the following steps:
S1, a moving component performs a sheet taking action, and after the sheet taking action is completed, a substrate to be processed is moved to a set detection area;
S2, comparing the detection result with a standard template by a calculation component to obtain an angle deviation value between the processing substrate and the standard template, calculating an angle correction scheme according to the angle deviation value, and carrying out angle correction by a movement component according to the angle correction scheme;
s3, repeating the step S2 until the substrate to be processed has no angle deviation with the standard template;
S4, the calculating component compares the last detection result in the S2 or the S3 with the standard template to obtain a final space deviation value between the substrate to be processed and the standard template, calculates a space correction scheme according to the space deviation value, and moves the workbench through the moving component to carry out space correction according to the space correction scheme, so that the spatial position relation between the workbench and the substrate to be processed is kept fixed;
s5, the motion assembly moves the substrate to be processed to a set discharging position on the upper surface of the workbench, and one-time feeding operation is completed.
Preferably, the spatial deviation value includes a horizontal deviation value and a vertical deviation value.
The invention can obtain the following technical effects:
(1) By adopting the clamping-free system, the damage to the substrate caused by the clamping action is avoided, the generation of waste sheets caused by the clamping error is reduced, the stability of discharging and the working efficiency of the whole machine are greatly improved, the qualification rate of products is indirectly improved, and the generation of waste sheets in the working process is reduced.
(2) The clamping mechanism is omitted, and further the personnel cost and the capital cost of the daily maintenance of the equipment are reduced.
(3) The development of the clamping mechanism is not needed, so that the quality improvement of the laser processing equipment is greatly facilitated, a solid foundation is laid for future market prospects of the laser processing equipment, and the improvement of different semiconductor equipment in the future is facilitated.
Drawings
FIG. 1 is a three-dimensional schematic diagram of a laser processing apparatus loading system according to an embodiment of the present invention;
FIG. 2 is a front view of a three-dimensional schematic diagram of a loading system of the laser processing apparatus of the embodiment shown in FIG. 1;
FIG. 3 is a right side view of a three-dimensional schematic diagram of a loading system of the laser processing apparatus of the embodiment shown in FIG. 1;
fig. 4 is a top view of a three-dimensional schematic diagram of a loading system of the laser processing apparatus of the embodiment shown in fig. 1.
The reference numerals comprise a detection assembly 1, an identification camera 101, an illumination light source 102, a motion assembly 2, a manipulator 201 and a first miniature motor 202.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not to be construed as limiting the invention.
As shown in FIG. 1, the feeding system of the laser processing equipment provided by the embodiment of the invention comprises a detection component 1, a motion component 2 and a calculation component.
The detection assembly 1 comprises a detector and a detection environment providing device, after the motion assembly 2 moves the substrate to be processed to a detection area of the detection assembly 1, a signal is transmitted to the detection assembly 1, the detection environment providing device is started to provide the environment required by the normal operation of the detector, the detector starts to operate, a detection result is obtained, and the detection result is transmitted to the calculation assembly.
The calculation component processes the data of the detection result transmitted by the detection component, performs scheme design according to the data processing result, transmits the designed scheme to the movement component, and controls the movement component 2 to move.
The motion assembly 2 comprises a manipulator for moving a substrate to be processed, a first motor for controlling the manipulator, a second motor for controlling the workbench, and the first motor and the second motor can move through program control, so that the motion can be performed according to the scheme of the design of the calculation assembly.
In one embodiment of the present invention, the moving assembly 2 includes a rotating motor for angle deviation correction and a linear motor for spatial deviation correction, the angle deviation of the manipulator is corrected by rotating the rotating motor, and the horizontal and vertical correction is performed on the table by the linear motor.
As shown in fig. 2-4, in one embodiment of the present invention, the detection assembly 1 includes an identification camera 101, an illumination light source 102, and the motion assembly 2 includes a manipulator 201, a first micro-motor 202 for controlling the manipulator.
In one embodiment of the present invention, the first micro motor 202 is a small-sized servo motor, and the small-sized servo motor has the advantage of more accurate motion control than a commonly used stepper motor, so that accurate positioning can be performed more effectively.
In one embodiment of the invention, the spatial deviation value comprises a horizontal deviation value and a vertical deviation value, the calculating component calculates a horizontal correction scheme and a vertical correction scheme according to the horizontal deviation value and the vertical deviation value, and sends the correction scheme to the linear motor, and the linear motor carries out horizontal correction and vertical correction on the working table surface.
The specific operation of the invention is described in detail below in connection with fig. 1-4:
(1) The first micro motor 202 controls the manipulator 201 to return to the set starting point operation, and ensures the initial position of the manipulator 201 to be fixed.
(2) The first micro motor 202 controls the manipulator 201 to move to the bin for taking the sheet, and after the sheet taking operation is completed, the manipulator 201 and the substrate to be processed are moved together to set a detection area. After the movement is completed, the first micro motor 202 transmits a movement in-place signal to the motion control card, and the motion control card starts the illumination light source 102 and starts the identification camera 101 to collect images after receiving the movement in-place signal.
(3) The calculation component compares the acquired image with the standard template to obtain an angle deviation value between the processing substrate and the standard template, calculates an angle correction scheme according to the angle deviation value, and controls the manipulator 201 to perform angle correction through the first micro motor 202 according to the angle correction scheme. After the correction is finished, the first micro motor 202 transmits a correction completion signal to the motion control card, and the motion control card restarts the recognition camera 101 to acquire images after receiving the correction completion signal.
(4) And (3) repeating the step (3) until the substrate to be processed has no angle deviation with the standard template.
(5) The calculation assembly compares the image acquired in the last step (3) or (4) with the standard template to obtain a final space deviation value between the substrate to be processed and the standard template, calculates a space correction scheme according to the space deviation value, and performs space correction by moving the workbench through the second motor according to the space correction scheme, so that the spatial position relation between the workbench and the substrate to be processed is kept fixed.
(6) According to the preset action, the first micro motor 202 controls the manipulator 201 to precisely move the substrate to be processed to the set discharging position on the upper surface of the workbench, and one-time feeding operation is completed.
The clamping system is positioned at the opposite side of the clamping system, has the advantages of improving certain quality, improving positioning accuracy, and further reducing yield reduction and production cost increase caused by waste chips formed by inaccurate positioning.
In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.
While embodiments of the present invention have been illustrated and described above, it will be appreciated that the above described embodiments are illustrative and should not be construed as limiting the invention. Variations, modifications, alternatives and variations of the above-described embodiments may be made by those of ordinary skill in the art within the scope of the present invention.
The above embodiments of the present invention do not limit the scope of the present invention. Any other corresponding changes and modifications made in accordance with the technical idea of the present invention shall be included in the scope of the claims of the present invention.
Claims (2)
1. The feeding method of the laser processing equipment is characterized by comprising the following steps of:
S1, a moving component performs a sheet taking action, and after the sheet taking action is completed, a substrate to be processed is moved to a set detection area;
S2, comparing the detection result with a standard template by a calculation component to obtain an angle deviation value between the processing substrate and the standard template, calculating an angle correction scheme according to the angle deviation value, and carrying out angle correction by a movement component according to the angle correction scheme;
s3, repeating the step S2 until the substrate to be processed has no angle deviation with the standard template;
S4, the calculating component compares the last detection result in the S2 or the S3 with the standard template to obtain a final space deviation value between the substrate to be processed and the standard template, calculates a space correction scheme according to the space deviation value, and moves the workbench through the moving component to carry out space correction according to the space correction scheme, so that the spatial position relation between the workbench and the substrate to be processed is kept fixed;
s5, the motion assembly moves the substrate to be processed to a set discharging position on the upper surface of the workbench, and one-time feeding operation is completed.
2. The method of feeding a laser processing apparatus according to claim 1, wherein the spatial deviation value includes a horizontal deviation value and a vertical deviation value.
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| CN202011418684.9A CN112536539B (en) | 2020-12-07 | 2020-12-07 | Laser processing equipment loading system and method |
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| CN202011418684.9A CN112536539B (en) | 2020-12-07 | 2020-12-07 | Laser processing equipment loading system and method |
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| CN112536539B true CN112536539B (en) | 2025-06-10 |
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| CN113619270B (en) * | 2021-07-07 | 2023-05-05 | 上海发那科机器人有限公司 | Automatic rubbing device for vehicle identification code |
| CN116759376B (en) * | 2023-08-22 | 2023-12-01 | 上海隐冠半导体技术有限公司 | Piezoelectric driving clamping device, motion system and substrate detection method |
Citations (2)
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| CN105729477A (en) * | 2016-05-05 | 2016-07-06 | 四川省桑瑞光辉标识系统股份有限公司 | Method and system for automatically placing aged lamp tube onto production line based on visual positioning |
| CN214079849U (en) * | 2020-12-07 | 2021-08-31 | 长春光华微电子设备工程中心有限公司 | Laser processing equipment feeding system |
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| US6115650A (en) * | 1997-04-30 | 2000-09-05 | Ethicon, Inc. | Robotic control system for needle sorting and feeder apparatus |
| JP2003039253A (en) * | 2001-07-24 | 2003-02-12 | Fuji Photo Film Co Ltd | Method for adjusting position of assembling part |
| CN102896631A (en) * | 2012-10-09 | 2013-01-30 | 温州大学 | Real-time/on-line azimuth adjustment device and method |
| CN110342241A (en) * | 2018-04-02 | 2019-10-18 | 上海微电子装备（集团）股份有限公司 | A kind of automatical feeding system |
| CN111633635B (en) * | 2020-07-01 | 2021-12-07 | 中科新松有限公司 | Robot feeding and discharging operation method based on visual positioning |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105729477A (en) * | 2016-05-05 | 2016-07-06 | 四川省桑瑞光辉标识系统股份有限公司 | Method and system for automatically placing aged lamp tube onto production line based on visual positioning |
| CN214079849U (en) * | 2020-12-07 | 2021-08-31 | 长春光华微电子设备工程中心有限公司 | Laser processing equipment feeding system |
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