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CN112212209A - Gas supply device - Google Patents

Gas supply device Download PDF

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Publication number
CN112212209A
CN112212209A CN201910615162.9A CN201910615162A CN112212209A CN 112212209 A CN112212209 A CN 112212209A CN 201910615162 A CN201910615162 A CN 201910615162A CN 112212209 A CN112212209 A CN 112212209A
Authority
CN
China
Prior art keywords
gas
gas supply
pipeline
assembly
input pipeline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910615162.9A
Other languages
Chinese (zh)
Inventor
杨俊杰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nexchip Semiconductor Corp
Original Assignee
Nexchip Semiconductor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nexchip Semiconductor Corp filed Critical Nexchip Semiconductor Corp
Priority to CN201910615162.9A priority Critical patent/CN112212209A/en
Publication of CN112212209A publication Critical patent/CN112212209A/en
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
    • F17C13/023—Special adaptations of indicating, measuring, or monitoring equipment having the mass as the parameter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
    • F17C13/025—Special adaptations of indicating, measuring, or monitoring equipment having the pressure as the parameter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/08—Mounting arrangements for vessels
    • F17C13/084—Mounting arrangements for vessels for small-sized storage vessels, e.g. compressed gas cylinders or bottles, disposable gas vessels, vessels adapted for automotive use
    • F17C13/085—Mounting arrangements for vessels for small-sized storage vessels, e.g. compressed gas cylinders or bottles, disposable gas vessels, vessels adapted for automotive use on wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D1/00—Pipe-line systems
    • F17D1/02—Pipe-line systems for gases or vapours
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D3/00—Arrangements for supervising or controlling working operations
    • F17D3/01—Arrangements for supervising or controlling working operations for controlling, signalling, or supervising the conveyance of a product
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/01—Mounting arrangements
    • F17C2205/0153—Details of mounting arrangements
    • F17C2205/0157—Details of mounting arrangements for transport
    • F17C2205/0161—Details of mounting arrangements for transport with wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107—Single phase
    • F17C2223/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/06—Controlling or regulating of parameters as output values
    • F17C2250/0605—Parameters
    • F17C2250/0626—Pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/06—Controlling or regulating of parameters as output values
    • F17C2250/0689—Methods for controlling or regulating

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Pipeline Systems (AREA)

Abstract

The invention discloses a gas supply device, comprising: a first gas supply assembly for supplying a first gas to the equipment side; a second gas supply assembly for supplying a second gas to the equipment side; a monitoring control assembly disposed on the first gas supply assembly and the second gas supply assembly; the bearing column is used for moving the first gas supply assembly, the second gas supply assembly, the monitoring control assembly and the output gas pipeline; a plurality of wheels are arranged at the bottom of the bearing column; the first gas supply assembly and the second gas supply assembly are connected by an output gas line. The invention adopts the movable gas supply device, and can realize wireless remote control and monitor the gas supply state.

Description

Gas supply device
Technical Field
The invention relates to the technical field of automatic gas supply, in particular to a gas supply device.
Background
At present, gas supply equipment is usually fixed, and a gas supply equipment supplies a lot of equipment, if need change or estimate gas, will influence a lot of equipment, and it is more troublesome to change equipment, can't realize remote control moreover, needs personnel to the scene, just can learn the remaining residual amount of gas, when gas is used up, can't in time remind personnel to need to replace the steel bottle, consequently urgent need improve.
Disclosure of Invention
In view of the above-mentioned shortcomings of the prior art, an object of the present invention is to provide a gas supply device, which is used to solve the problems in the prior art that if gas needs to be replaced or evaluated, a lot of devices will be affected, the replacement of the devices is troublesome, remote control cannot be realized, personnel are required to arrive at the site to know the residual amount of the gas, and when the gas is used up, the personnel cannot be reminded in time to replace the steel cylinder.
To achieve the above and other related objects, the present invention provides a gas supply apparatus, comprising:
a first gas supply assembly for supplying a first gas to the equipment side;
a second gas supply assembly for supplying a second gas to the equipment side;
a monitoring and control assembly connected with the first gas supply assembly and the second gas supply assembly;
the bearing column is used for moving the first gas supply assembly, the second gas supply assembly, the monitoring control assembly and the output gas pipeline; and
a plurality of wheels mounted to the bottom of the load-bearing column;
the first gas supply assembly and the second gas supply assembly are connected by an output gas line.
In one embodiment of the present invention, the first gas supply assembly includes:
the first gas input pipeline is used for inputting the first gas, and the first gas input pipeline is connected with the output gas pipeline; and
and the cleaning pipeline is used for cleaning the first gas input pipeline and is connected with the first gas input pipeline.
In one embodiment of the present invention, the second gas supply assembly includes:
a gas cylinder for providing the second gas; and
and the second gas input pipeline is used for inputting the second gas, one end of the second gas input pipeline is connected with the gas steel cylinder, and the other end of the second gas input pipeline is connected with the output gas pipeline.
In an embodiment of the present invention, the monitoring control component includes:
at least one digital pressure gauge, said digital pressure gauge further comprising at least one first digital signal transceiver for metering the pressure of said first gas and/or said second gas;
the digital weight scale also comprises at least one second digital signal transceiver for measuring the weight of the gas cylinder; and
and the external server is in signal connection with the first digital signal transceiver and the second digital signal transceiver.
In an embodiment of the present invention, the external server is connected to the first digital signal transceiver and the second digital signal transceiver through wireless signals.
In an embodiment of the invention, the gas supply control device further includes a third gas input pipeline, and the third gas input pipeline is connected with the first gas input pipeline.
In an embodiment of the invention, the monitoring and controlling assembly further includes an electromagnetic valve module for controlling the opening or closing of the pneumatic valves on the first gas input pipeline, the second gas input pipeline, the third gas input pipeline, the output gas pipeline and the cleaning pipeline.
In an embodiment of the present invention, the electromagnetic valve module includes a wireless signal transceiver, and the external server is connected to the wireless signal transceiver through a wireless signal.
In an embodiment of the present invention, the monitoring control module further includes:
the human-computer interface is used for receiving a control signal of the external server and feeding back gas supply state information to the external server, and the human-computer interface is in wireless communication connection with the external server;
and the power supply module is used for supplying power to the digital pressure gauge, the digital weight meter, the human-computer interface and the electromagnetic valve module.
In an embodiment of the present invention, a housing is installed on the top of the load-bearing column, and the housing is provided with the first gas supply assembly, the second gas supply assembly, the third gas input pipeline, the monitoring control assembly, and the output gas pipeline.
As described above, the gas supply apparatus of the present invention has the following advantageous effects:
the gas supply device of the invention comprises a first gas supply assembly, a second gas supply assembly, a monitoring control assembly, an output gas pipeline, a bearing column and wheels, the invention adopts the movable gas supply device, the replacement or evaluation gas can be directly operated through the monitoring control assembly, the operation is simple and convenient, the intellectualization of gas supply is realized, the pneumatic valve is wirelessly and remotely controlled by the monitoring control assembly, the wireless remote control and the monitoring of the gas supply state are realized, the manual operation of people for gas supply or gas supply stopping is not needed, in addition, the residual gas amount can be known through the monitoring control assembly, and an operator can be reminded of replacing the steel cylinder in time.
According to the invention, through the cooperation of the first gas supply assembly, the second gas supply assembly, the output gas pipeline and the monitoring control assembly, the original pipeline is maintained in a vacuum state, the vacuum degree and the cleanliness of the pipeline are kept, and the phenomena that the production or evaluation is influenced due to untimely replacement of the gas steel cylinder when the gas steel cylinder is used up are avoided.
Drawings
Fig. 1 is a structural diagram of a gas supply apparatus according to an embodiment of the present disclosure.
Fig. 2 is a structural diagram of a gas supply device provided in an embodiment of the present application during operation.
Fig. 3 is a structural diagram of a gas supply device provided in an embodiment of the present application during operation.
Fig. 4 is a structural diagram of a gas supply device provided in an embodiment of the present application during operation.
Fig. 5 is a block diagram of a structure of an apparatus end of a gas supply apparatus according to an embodiment of the present disclosure.
Fig. 6 is a flowchart illustrating a first gas supplying operation to the equipment side according to an embodiment of the present disclosure.
Fig. 7 is a flowchart illustrating a second gas supply to the equipment side according to an embodiment of the present disclosure.
Description of the element reference numerals
1 gas output pipeline
2 first gas input pipeline
3 cleaning the pipeline
4 gas steel cylinder
5 second gas supply line
6 first digital pressure gauge
7 second digital pressure gauge
8 digit weight meter
9 human-machine interface
10 solenoid valve module
11 power supply module
12 external server
13 third gas supply line
14 casing
15 first discharge pipeline
16 wheel
17 bearing column
18 CDA supply line
19 equipment terminal
20 second discharge line
First to seventh pneumatic valve elements V1-V7
S1-V3 and S101-V103
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention. It is to be noted that the features in the following embodiments and examples may be combined with each other without conflict.
It should be noted that the drawings provided in the following embodiments are only for illustrating the basic idea of the present invention, and the components related to the present invention are only shown in the drawings rather than drawn according to the number, shape and size of the components in actual implementation, and the type, quantity and proportion of the components in actual implementation may be changed freely, and the layout of the components may be more complicated.
Referring to fig. 1, fig. 1 is a structural diagram of a gas supply apparatus according to an embodiment of the present disclosure, the gas supply apparatus includes: a first gas supply assembly for supplying a first gas, which may include, but is not limited to, a raw supply gas, to the plant end 19, a second gas supply assembly, a monitoring and control assembly, a load-bearing column 17, and a plurality of wheels 16; the second gas supply assembly is used to supply a second gas, which may include, but is not limited to, an evaluation gas, for example, to the equipment end 19. The support column 17 is used to move the first gas supply assembly, the second gas supply assembly, the output gas line, and the monitoring and control assembly. The housing 14 is provided with the first gas supply assembly, the second gas supply assembly, an output gas pipeline 1 and a monitoring control assembly, the first gas input pipeline 2 of the first gas supply assembly passes through the housing 14, the output gas pipeline 1 passes through the housing 14 to supply gas to an equipment end 19, the cleaning pipeline 3 passes through the housing 14, the housing 14 is mounted on a bearing column 17, the bottom of the bearing column 17 is provided with a plurality of wheels 16, the wheels 16 can be set to be 2, 4, 6 and the like, the moving function is realized through the wheels 16, the bearing column 17 is provided with a handle through which the gas supply device can be freely moved. The housing 14 is also mounted with a first exhaust line 15 for exhausting gas and a CDA supply line 18 for CDA (clean dry air) supply. The gas supply control device further comprises a cleaning pipeline 3 and a third gas input pipeline 13, and specifically, one end of the cleaning pipeline 3 outputs first gas to a tool pump line; a sixth pneumatic valve V6 is installed on the output gas pipeline 1; the third gas input line 13 is used for inputting nitrogen gas, and the output gas line 1, the first gas input line 2 and the cleaning line 3 are maintained by the nitrogen gas.
It should be noted that: the first gas supplied by the first gas supply assembly and the second gas supplied by the second gas supply assembly are the same in gas type, and are the same type of gas, but the gas supply manufacturers are different.
Specifically, referring to fig. 5, fig. 5 is a block diagram of an apparatus end of a gas supply device according to an embodiment of the present disclosure, the gas supply device sends the first gas or the second gas into a reaction chamber 191, the first gas or the second gas reacts in the reaction chamber 191, the reaction chamber 191 is respectively connected to an engine 192 and a second gas exhaust pipe 195, exhaust gas is exhausted through the second gas exhaust pipe 195, the second gas exhaust pipe 195 is connected to a gas leakage detection system 196, and the engine 192 is connected to a local dust remover 193 through a dry pump 194. For example, the gas leak detection system 196 may be comprised of a gas sensor and an alarm.
The gas supply apparatus is a mobile automated gas supply apparatus, which can be used, but not limited to, for supplying gas to the equipment side 19 of a semiconductor or a tool, and delivering the gas into the reaction chamber of the equipment side 19 or the tool.
The first gas supply assembly includes: first gas input line 2 and clean line 3 still include: a first pneumatic valve member V1 mounted on said first gas input line 2; a second pneumatic valve V2 mounted on the cleaning pipe 3; a third pneumatic valve V3 mounted on the cleaning pipe 3; a fourth pneumatic valve member V4 mounted on said first gas input line 2; the second gas supply assembly includes: gas cylinder 4 and second gas input line 5, further comprising: a fifth pneumatic valve V5 mounted on the second gas inlet line 5.
The monitoring control assembly comprises: the number of the digital pressure gauges can be set according to actual needs, such as one, two, three, four and five.
The monitoring and control assembly shown in fig. 1 comprises a first digital pressure gauge 6 and a second digital pressure gauge 7, wherein the first digital pressure gauge 6 is mounted on the cleaning pipeline 3 and is used for measuring the pressure of the first gas; the second digital pressure gauge 7 is installed on the second gas input pipeline 5 and is used for measuring the pressure of the second gas. The first digital pressure gauge 6 and the second digital pressure gauge 7 comprise a first digital signal transceiver, and the first digital signal transceiver is connected with the external server 12 through wireless signals. The monitoring control component comprises a digital weight meter 8, the digital weight meter 8 comprises a second digital signal transceiver, and the external server 12 is connected with the second digital signal transceiver through wireless signals. The monitoring control assembly further comprises an electromagnetic valve module 10, the electromagnetic valve module 10 comprises a wireless signal transceiver, the external server 12 is connected with the wireless signal transceiver through a wireless signal, the monitoring control assembly further comprises a human-computer interface 9, and the human-computer interface 9 is connected with the external server 12 through wireless communication. It should be noted that: the external server 12 can communicate with the first digital signal transceiver, the second digital signal transceiver, the wireless signal transceiver and the human-computer interface 9 in a wireless connection mode, a wired connection mode, or a wired connection and a wireless connection mode, so that the condition that the communication with the external server 12 is not affected when the digital signal transceiver or the wireless signal transceiver is damaged can be avoided, and the monitoring and control component can maintain a normal working state.
Specifically, the digital weight meter 8 is installed at the lower end of the gas steel cylinder 4, the user side controls the work of the first digital pressure meter 6, the second digital pressure meter 7, the digital weight meter 8, the human-computer interface 9 and the electromagnetic valve module 10 through the external server 12, the electromagnetic valve module 10 is used for controlling the opening and closing of the pneumatic valve, the user side controls the work of the electromagnetic valve module 10 through the external server 12 so as to control the opening and closing of the pneumatic valve, the power supply module 11 is used for providing power support, and the power supply module 11 is respectively connected with the first digital pressure meter 6, the second digital pressure meter 7, the digital weight meter 8, the human-computer interface 9 and the electromagnetic valve module 10. Specifically, the digital weight meter 8, the human-computer interface 9, the electromagnetic valve module 10, and the power supply module 11 are mounted on the housing 14 or in the housing 14. The human-computer interface 9 is used for receiving the control signal of the external server 12, feeding back the state information, which is the gas supply state information, to the external server 12, recording the operation and information by the external server 12, and feeding back the state information to the user by the external server 12. The status information includes the weight of the gas cylinder 4, the pressure of the pipeline, the pressure of the gas cylinder 4, the action of the pneumatic valve, the personnel operation record, the time and other information, and the personnel can analyze and calculate the data through the external server 12.
The gas supply device further comprises a third gas input pipeline 13, the third gas input pipeline 13 is connected with the first gas input pipeline 2, and a seventh pneumatic valve V7 is installed on the third gas input pipeline 13; the gas supply further comprises a second exhaust line 20, the second exhaust line 20 being for outputting the first gas to the tool pump line.
If the monitoring control assembly needs to replace the pipeline or the pneumatic valve, the pipeline or the pneumatic valve can be replaced independently, so that the time is greatly saved, and the cost is saved.
The gas supply device comprises a first gas supply assembly, a second gas supply assembly, a monitoring control assembly, an output gas pipeline 1, a bearing column 17 and a plurality of wheels 16, wherein a plurality of pneumatic valve parts are arranged on a first gas input pipeline 2 and a cleaning pipeline 3, the pneumatic valve parts can be adjusted corresponding to different gas inlet programs or other programs, and the whole gas supply device can move. Can remind the operating personnel in time to need to replace the steel bottle.
Referring to fig. 2 to 4, fig. 6 and fig. 7, fig. 2 to 4 are structural diagrams of a gas supply apparatus in an operation process according to an embodiment of the present disclosure, fig. 6 is a flowchart illustrating a first gas supply method to an equipment side according to an embodiment of the present disclosure, fig. 7 is a flowchart illustrating a second gas supply method to the equipment side according to an embodiment of the present disclosure, and a principle similar to that of the apparatus embodiment is that the present disclosure provides a gas supply method, which includes:
the specific operation steps for supplying the first gas to the equipment end are as follows:
s1, the external server 12 controls the pneumatic valves installed on the first gas input pipeline 2 and the cleaning pipeline 3 to open through the electromagnetic valve module 10, so as to perform a vacuum pumping operation on the first gas input pipeline 2 and the cleaning pipeline 3, and maintain the vacuum degrees of the first gas input pipeline 2 and the cleaning pipeline 3. Wherein, the pneumatic valve on the first gas input pipeline 2 is a first pneumatic valve V1; the pneumatic valve parts on the cleaning pipeline 3 are respectively a second pneumatic valve part V2 and a third pneumatic valve part V3.
S2, the external server 12 controls the pneumatic valves installed on the output gas pipeline 1 and the first gas input pipeline 2 to open through the electromagnetic valve module 10, and supplies the first gas to the equipment end 19. Wherein, the pneumatic valve on the output gas pipeline 1 is a sixth pneumatic valve V6; the pneumatic valves on the first gas input line 2 are a first pneumatic valve V1 and a fourth pneumatic valve V4, respectively.
S3, the external server 12 controls pneumatic valves mounted on the third gas input pipeline 13, the output gas pipeline 1, the first gas input pipeline 2 and the cleaning pipeline 3 to be opened through the electromagnetic valve module 10, and nitrogen is introduced into the output gas pipeline 1, the first gas input pipeline 2 and the cleaning pipeline 3 through the third gas input pipeline 13 to perform maintenance operation on the pipelines. Wherein, the pneumatic valve on the third gas input pipeline 13 is a seventh pneumatic valve V7; the pneumatic valve on the output gas pipeline 1 is a sixth pneumatic valve V6; the pneumatic valves on the first gas input pipeline 2 are a first pneumatic valve V1 and a fourth pneumatic valve V4 respectively; the pneumatic valve parts on the cleaning pipeline 3 are respectively a second pneumatic valve part V2 and a third pneumatic valve part V3. The sequence from step S1 to step S3 is not obvious, and step S2 or step S3 may be performed first.
The specific operation steps for supplying the second gas to the equipment end are as follows:
s101, the external server 12 controls pneumatic valves installed on the first gas input pipeline 2 and the cleaning pipeline 3 to be opened through the electromagnetic valve module 10, vacuumizing operation is conducted on the first gas input pipeline 2 and the cleaning pipeline 3, and the vacuum degree of the first gas input pipeline 2 and the vacuum degree of the cleaning pipeline 3 are maintained.
S102, the external server 12 controls the pneumatic valves installed on the output gas pipeline 1 and the second gas input pipeline 5 to open through the electromagnetic valve module 10, and supplies the second gas to the equipment end. Wherein, the pneumatic valve on the output gas pipeline 1 is a sixth pneumatic valve V6; the pneumatic valve on the second gas input pipeline 5 is a fifth pneumatic valve V5.
S103, the external server 12 controls pneumatic valves mounted on the third gas input pipeline 13, the output gas pipeline 1, the first gas input pipeline 2 and the cleaning pipeline 3 to be opened through the electromagnetic valve module 10, and nitrogen is introduced into the output gas pipeline 1, the first gas input pipeline 2 and the cleaning pipeline 3 through the third gas input pipeline 13 to maintain the pipelines. The step S101 to the step S301 have no obvious sequence, and the operation of the step S102 or the operation of the step S103 may be performed first.
The external server 12 controls the first pneumatic valve V1, the fourth pneumatic valve V4 and the sixth pneumatic valve V6 to open through the electromagnetic valve module 10, so that the original supply pipeline supplies the first gas to the machine through the gas supply device, and the test time of the disassembly and assembly pipeline can be saved by at least 12 hours.
The gas supply method of the invention comprises the steps of vacuumizing the first gas input pipeline 2 and the cleaning pipeline 3, supplying the first gas to the equipment end, or supplying the second gas to the equipment end, and maintaining the pipelines. The working process is that the first gas supply assembly, the second gas supply assembly, the output gas pipeline 1 and the monitoring control assembly are matched to automatically complete, so that the original pipeline is maintained in a vacuum state, the vacuum degree and the cleanliness of the pipeline are kept, and the phenomenon that when a gas steel cylinder is used up, the gas steel cylinder is replaced untimely, production or evaluation is influenced is avoided.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.

Claims (10)

1. A gas supply device, characterized in that the gas supply device comprises:
a first gas supply assembly for supplying a first gas to the equipment side;
a second gas supply assembly for supplying a second gas to the equipment side;
a monitoring and control assembly connected with the first gas supply assembly and the second gas supply assembly;
the bearing column is used for moving the first gas supply assembly, the second gas supply assembly, the monitoring control assembly and the output gas pipeline; and
a plurality of wheels mounted to the bottom of the load-bearing column;
the first gas supply assembly and the second gas supply assembly are connected by an output gas line.
2. The gas supply apparatus of claim 1, wherein the first gas supply assembly comprises:
the first gas input pipeline is used for inputting the first gas, and the first gas input pipeline is connected with the output gas pipeline; and
and the cleaning pipeline is used for cleaning the first gas input pipeline and is connected with the first gas input pipeline.
3. The gas supply apparatus of claim 1, wherein the second gas supply assembly comprises:
a gas cylinder for providing the second gas; and
and the second gas input pipeline is used for inputting the second gas, one end of the second gas input pipeline is connected with the gas steel cylinder, and the other end of the second gas input pipeline is connected with the output gas pipeline.
4. The gas supply apparatus of claim 1, wherein the monitoring and control assembly comprises:
at least one digital pressure gauge, said digital pressure gauge further comprising at least one first digital signal transceiver for metering the pressure of said first gas and/or said second gas;
the digital weight scale also comprises at least one second digital signal transceiver for measuring the weight of the gas cylinder; and
and the external server is in signal connection with the first digital signal transceiver and the second digital signal transceiver.
5. The gas supply apparatus according to claim 4, wherein the external server is connected to the first digital signal transceiver and the second digital signal transceiver by wireless signals.
6. A gas supply control device according to claim 1, wherein: the gas supply control device also comprises a third gas input pipeline, and the third gas input pipeline is connected with the first gas input pipeline.
7. A gas supply device according to claim 4, wherein: the monitoring control assembly further comprises an electromagnetic valve module for controlling the opening or closing of pneumatic valves on the first gas input pipeline, the second gas input pipeline, the third gas input pipeline, the gas output pipeline and the cleaning pipeline.
8. A gas supply apparatus according to claim 7, wherein: the electromagnetic valve module comprises a wireless signal transceiver, and the external server is connected with the wireless signal transceiver through a wireless signal.
9. The gas supply apparatus of claim 4, wherein the monitoring and control assembly further comprises:
the human-computer interface is used for receiving a control signal of the external server and feeding back gas supply state information to the external server, and the human-computer interface is in wireless communication connection with the external server;
and the power supply module is used for supplying power to the digital pressure gauge, the digital weight meter, the human-computer interface and the electromagnetic valve module.
10. A gas supply apparatus according to claim 1, wherein: the top of the bearing column is provided with a shell, and the shell is provided with the first gas supply assembly, the second gas supply assembly, a third gas input pipeline, a monitoring control assembly and an output gas pipeline.
CN201910615162.9A 2019-07-09 2019-07-09 Gas supply device Pending CN112212209A (en)

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Citations (5)

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Publication number Priority date Publication date Assignee Title
CN203533217U (en) * 2013-10-29 2014-04-09 中芯国际集成电路制造(北京)有限公司 Gas supply device
US20180079438A1 (en) * 2016-09-22 2018-03-22 Air Systems, Inc. D.B.A. Air Systems International, Inc. Air cylinder cart with manifold for supplying one or two control panels
CN108730762A (en) * 2018-08-03 2018-11-02 容县康瑞医疗器械有限公司 Uninterrupted feeder
CN108799831A (en) * 2018-08-03 2018-11-13 容县康瑞医疗器械有限公司 Supply monitoring alarm device
CN208655583U (en) * 2018-07-24 2019-03-26 合肥晶合集成电路有限公司 A kind of gas supply device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN203533217U (en) * 2013-10-29 2014-04-09 中芯国际集成电路制造(北京)有限公司 Gas supply device
US20180079438A1 (en) * 2016-09-22 2018-03-22 Air Systems, Inc. D.B.A. Air Systems International, Inc. Air cylinder cart with manifold for supplying one or two control panels
CN208655583U (en) * 2018-07-24 2019-03-26 合肥晶合集成电路有限公司 A kind of gas supply device
CN108730762A (en) * 2018-08-03 2018-11-02 容县康瑞医疗器械有限公司 Uninterrupted feeder
CN108799831A (en) * 2018-08-03 2018-11-13 容县康瑞医疗器械有限公司 Supply monitoring alarm device

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Application publication date: 20210112