CN1120165A - Test method and equipment for microwave dielectric properties of non-metallic materials - Google Patents
Test method and equipment for microwave dielectric properties of non-metallic materials Download PDFInfo
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Abstract
本发明为非金属材料微波介电性能的测试方法,为实施此法专门设计截止波导并通过耦合孔与TE01n模谐振腔耦合,构成复合谐振腔。本方法是在截止波导中含和不含被测材料样品的两种情况下,调节活塞使复合谐振腔达到谐振,并分别记下活塞位置读数Lo、Li和复合谐振腔的Q因子Qo、Qi,代入相应算式求得材料的复介电常数εr。应用此法可使原来只能测量低介、低损耗材料的TE01n谐振腔,也能方便地测量高介低损耗或磁性和非磁性的高损耗材料。
The invention is a method for testing the microwave dielectric properties of non-metallic materials. In order to implement the method, a cut-off waveguide is specially designed and coupled with a TE 01n mode resonant cavity through a coupling hole to form a composite resonant cavity. This method is to adjust the piston to make the composite resonant cavity reach resonance under the two conditions that the cut-off waveguide contains and does not contain the material sample to be tested, and record the readings of the piston position L o , L i and the Q factor Q of the composite resonant cavity respectively o and Q i are substituted into the corresponding formula to obtain the complex permittivity ε r of the material. Applying this method can make the TE 01n resonant cavity, which can only measure low-dielectric and low-loss materials, also conveniently measure high-dielectric and low-loss materials or magnetic and non-magnetic high-loss materials.
Description
本发明属于非金属材料的微波复介电常数、复磁导率等电性能参数的测试方法及为实施该方法而专门设计的设备。The invention belongs to a method for testing electrical performance parameters such as microwave complex permittivity and complex magnetic permeability of non-metallic materials and specially designed equipment for implementing the method.
随着微波集成、移动电话、卫星通讯、广播、电视、雷达、电子对抗,微波在工、农业生产过程中的应用,日用微波以及微波生物、医学等领域的发展,涉及到从半导体到绝缘体,从磁性到非磁性的各类材料,这些材料电学性能差异很大。目前,按材料性能不同,采用三类不同的测量方法:对低介电常数、低损耗材料采用各种波模的谐振腔法;对高介电常数、低损耗材料采用介质谐振腔法;对大损耗的磁性或非磁性材料则采用驻波测量线和微波矢量网络分析仪的方法。因此,所需的设备和测试方法都比较复杂,使用很不方便,成本昂贵。因而,要求能测量材料电学性能差异很大的方法及其设备的呼声愈来愈高。With the development of microwave integration, mobile phones, satellite communications, radio, television, radar, electronic countermeasures, microwaves in industrial and agricultural production processes, daily microwaves and microwave biology, medicine and other fields, it involves everything from semiconductors to insulators. , from magnetic to non-magnetic materials, the electrical properties of these materials vary widely. At present, according to different material properties, three different measurement methods are used: the resonant cavity method of various wave modes is used for low dielectric constant and low loss materials; the dielectric resonant cavity method is used for high dielectric constant and low loss materials; For magnetic or non-magnetic materials with large loss, the method of standing wave measurement line and microwave vector network analyzer is used. Therefore, the required equipment and testing methods are relatively complicated, inconvenient to use, and expensive. Therefore, there are more and more calls for methods and equipment that can measure the electrical properties of materials with great differences.
本发明的目的是提供一种测试方法以及为实施此方法而专门设计的设备,能实现同时适用于上述三类材料的基本的电磁学性能的测量。The purpose of the present invention is to provide a test method and specially designed equipment for implementing the method, which can realize the measurement of the basic electromagnetic properties applicable to the above three types of materials.
在叙述本发明测量方法前,先说明为实施该方法所需设备的结构方案。该设备包括目前广泛使用的TEo1n模谐振腔,通过该腔上的微波信号输入口1馈入频率为2-40GHZ的微波稳频信号,其谐振信号从探测信号输出口2馈至谐振指示器。结构特点是在TEo1n模谐振腔3的腔体上安装一段截止波导4,在截止波导内安放被测材料样品5(以下简称样品),截止波导借助耦合孔6耦合到TEo1n模谐振腔构成复合谐振腔。利用TEo1n模高Q谐振腔的高灵敏度来测量截止波导中的材料性能。Before describing the measurement method of the present invention, the structural scheme of the equipment required for implementing the method will be described first. The equipment includes the TE o1n mode resonant cavity widely used at present, and the microwave frequency stabilization signal with a frequency of 2-40GHZ is fed through the microwave signal input port 1 on the cavity, and the resonance signal is fed to the resonance indicator from the detection signal output port 2 . The structural feature is that a cut-off waveguide 4 is installed on the cavity of the TE o1n mode resonant cavity 3, and a
截止波导的尺寸范围如下:The cut-off waveguides have the following size ranges:
截止波导长度=25~50mm;截止波导直径与TEo1n模谐振腔腔体直径之比=0.25~0.30;耦合孔等效面积与TEo1n模谐振腔腔体圆截面之比=(3~5)×10-3。Cut-off waveguide length = 25 ~ 50mm; ratio of cut-off waveguide diameter to TE o1n mode resonant cavity diameter = 0.25 ~ 0.30; ratio of coupling hole equivalent area to TE o1n mode resonant cavity circular section = (3 ~ 5) ×10 -3 .
图面说明:Graphic description:
图1是本发明设计的一种复合谐振腔的示意图;Fig. 1 is the schematic diagram of a kind of composite resonant cavity that the present invention designs;
图2是本发明设计的另一种复合谐振腔的示意图;Fig. 2 is the schematic diagram of another kind of composite resonant cavity that the present invention designs;
图3为图1、图2的A-A剖视图。Fig. 3 is A-A sectional view of Fig. 1 and Fig. 2 .
参照附图说明本发明设备方案的实施例。Embodiments of the equipment solution of the present invention are described with reference to the accompanying drawings.
例1:example 1:
如图1所示,当TEo1n模谐振腔3的腔体(以下简称腔体)上的微波信号输入口1和探测信号输出口2设在腔体侧壁时,一段铜制截止波导4被固定在腔体顶部,耦合孔6设在截止波导底部,被测材料样品5安装在截止波导4内,TEo1n腔的调谐活塞7是安装在腔体的底部。As shown in Figure 1, when the microwave signal input port 1 and the detection signal output port 2 on the cavity of the TE o1n mode resonant cavity 3 (hereinafter referred to as the cavity) are set on the side wall of the cavity, a section of copper cut-off waveguide 4 is It is fixed on the top of the cavity, the
例2:Example 2:
如图2所示,当上述输入口1和输出口2设在腔体顶部时,截止波导4自由地放在腔体底部的调谐活塞7上,耦合孔设在截止波导的顶部。As shown in Figure 2, when the above-mentioned input port 1 and output port 2 are set on the top of the cavity, the cut-off waveguide 4 is freely placed on the
耦合孔形状由四个对称长条孔(孔的两端为弧形)组成,如图3所示The shape of the coupling hole consists of four symmetrical long holes (both ends of the hole are arc-shaped), as shown in Figure 3
本发明的测量方法,既保持目前测量低介电常数和低损耗材料最佳的TEo1n模谐振腔法测量功能,又进行改造与扩展,建立新的测试方法,使其又能测量高介电常数、低损耗材料和吸波材料的电学参数或电磁学参数。即用一种设备装置就可测量电学性能差异很大的几种材料。The measurement method of the present invention not only maintains the measurement function of the best TE o1n mode resonant cavity method for measuring low dielectric constant and low loss materials at present, but also carries out transformation and expansion, and establishes a new test method so that it can measure high dielectric constant Constants, electrical parameters or electromagnetic parameters of low-loss materials and absorbing materials. That is to say, several materials with very different electrical properties can be measured with one device.
本发明方法的原理:在不含样品的截止波导4中,除了非常小的壁损耗之外,没有功率被吸收,因此它通过耦合孔6引入到谐振腔3的阻抗实际上是纯电抗;放入样品5于截止波导4中时,部分功率被样品吸收,并建立起反射场,产生一个电阻分量与电抗变化。这时通过耦合孔6到腔体3的功率减小,谐振腔产生相应的Q因子降低和谐振长度的变化。样品离开截止波导的耦合孔6的距离和耦合孔6的大小决定了样品5中的电场强度矢量,因而也决定了样品5吸收的功率和电抗变化的大小。因此对截止波导4中置入样品前后谐振腔3谐振行为的分析,便可得关于被测材料样品5电性能的信息。The principle of the method of the present invention: in the cut-off waveguide 4 that does not contain samples, except for very small wall losses, no power is absorbed, so the impedance it introduces to the resonant cavity 3 through the
当截止波导中无样品时,在某角频率ω=2πf条件下,测得谐振时的活塞位置读数Lo和Q因子Qo;在离耦合孔S处放入厚度为d的样品时,上述相应值为Lf、Ql,则输入阻抗Ze=Re+jXe的两个分量分别为:When there is no sample in the cut-off waveguide, under the condition of a certain angular frequency ω=2πf, the piston position reading L o and Q factor Q o at resonance are measured; when a sample with thickness d is placed at the distance from the coupling hole S, the above The corresponding values are L f and Q l , then the two components of the input impedance Z e = R e + jX e are:
电阻
电抗
式中
根据传输线理论,可得空气-介质界面的反射系数ρe=ρe′-jρe″的实部和虚部为:
而空气-介质界面的归一化阻抗Z(0)/Z1在这种样品排列时为:
式中Z1=jωμ0/α0,Z2=jωμ0/α;tanh为双曲函数的正切;
这样,用测得的复反射系数ρe,用计算机按迭代法就能求取非磁性材料的εr′和tanδ。In this way, using the measured complex reflection coefficient ρ e , the ε r ′ and tan δ of the non-magnetic material can be obtained by the computer by iterative method.
对于磁性材料,因有
Z2=jωμ0μr/α (9)
所以除进行上述测量外,还要将样品终端短路,再次以上述同样方法步骤进行测量,获得含样品时活塞读数Lk和Q因子Qk,从式(1)~(5)求出Rk、Xk和ρk,得到:
求解(6)和(11)组成的联立方程,得
本发明的测试方法:Test method of the present invention:
1.求值耦合孔的等效面积A:1. Evaluate the equivalent area A of the coupling hole:
在某固定频率下,在截止波导中不含任何东西条件下调节谐振腔到谐振,读出谐振时活塞读数Lo;再在截止波导中放入金属短路板,使其紧贴耦合孔6,重新调谐得Lm,按下式计算A:At a certain fixed frequency, adjust the resonant cavity to resonance under the condition that there is nothing in the cut-off waveguide, and read the piston reading L o at resonance; then put a metal short circuit board in the cut-off waveguide so that it is close to the
A=πa2α0(Lm-L0) (14)A=πa 2 α 0 (L m -L 0 ) (14)
2.对高介电常数(εr>10)的非磁性材料的测量:2. Measurement of non-magnetic materials with high dielectric constant (ε r > 10):
将微波信号发生器调节到您所需的频率,当截止波导中不含样品时,调节复合谐振腔的活塞到谐振,记下读数Lo,测出Q因子Qo;在截止波导中放入厚度为d的样品后,再调节活塞恢复谐振测得Li、Qi,按式(1)、(2)求出Re、Xe,从式(4)、(5)获得ρe=ρe′-jρe″,最后从式(6)、(7)用牛顿迭代法获得材料的相对复介电常数εr=εr′(1-jtanδ)。Adjust the microwave signal generator to your desired frequency. When the cut-off waveguide does not contain samples, adjust the piston of the composite resonant cavity to resonance, record the reading L o , and measure the Q factor Q o ; put in the cut-off waveguide After the thickness of the sample is d, adjust the piston to restore resonance and measure L i , Q i , calculate R e , X e according to formulas (1) and (2), and obtain ρ e = from formulas (4) and (5) ρ e ′-jρ e ″, and finally the relative complex permittivity ε r =ε r ′(1-jtanδ) of the material is obtained from equations (6) and (7) by the Newton iterative method.
当样品紧贴耦合孔时(即S=0),式(4)~(7)合并简化后得到
这样可以省去中间参数ρe,直接从测得的Xe和Re按迭代法得到复数εr。In this way, the intermediate parameter ρ e can be omitted, and the complex number ε r can be obtained directly from the measured X e and R e by iterative method.
3.对于磁性的大损耗吸波材料的测量:3. For the measurement of magnetic large loss absorbing materials:
将微波信号发生器调节到所需的频率,当截止波导中不含样品时,调节复合谐振腔到谐振,记下读数Lo和测出Q因子Qo。在截止波导中放入厚度为d的样品后,调节活塞恢复谐振,测得Li、Qi;再将样品后面加金属板短路,调节活塞,再次恢复谐振,获得Lk和Qk。将Qi、Qo和Li、Lo代入式(1)、(2)得Re、Xe;再将Lk和Qk替代Li和Qi代入式(1)、(2),获得Rk和Xk。将两组R、X值代入式(4)、(5)得ρe=ρe′-jρe″和ρk=ρk′-jρk″,其相应的归一化阻抗为
接着,可从式(11)得到复传播因子α。这样从式(8)、(10)和(13)就最后得到材料的基本电磁复参数εrμr、μr和εr。Then, the complex propagation factor α can be obtained from equation (11). In this way, the basic electromagnetic complex parameters ε r μ r , μ r and ε r of the material are finally obtained from formulas (8), (10) and (13).
本发明方法的优点,除了测量性能差异很大的材料外,还有对样品与波导配合要求低,即当样品直径小于截止波导直径在0.5mm以内时,基本上不影响测量结果,不像波导或同轴测试系统,样品必须与他们紧配合。The advantage of the method of the present invention is that in addition to measuring materials with greatly different properties, there is also a low requirement for the cooperation between the sample and the waveguide, that is, when the sample diameter is less than the cut-off waveguide diameter within 0.5mm, the measurement results will not be affected basically, unlike the waveguide or coaxial test systems, the sample must fit tightly with them.
本发明的适用频率范围为2~40GHz。The applicable frequency range of the present invention is 2-40 GHz.
为了解本发明方法使用效果,在试验室条件下进行实际操作,其结果如下:In order to understand the inventive method use effect, carry out actual operation under laboratory condition, its result is as follows:
1.在8~12GHz和35GHz频率条件下,我们在内径2a=50mm的TEo1n单模谐振腔上按图2安装截止波导。截止波导的内径2b=15mm,耦合孔面积A=6.03mm2,在频率9.375GHz测得材料BaTi4O9的εr′=39.05,tanδ=0.69×10-4。1. Under the frequency conditions of 8-12GHz and 35GHz, we install the cut-off waveguide on the TE o1n single-mode resonant cavity with an inner diameter of 2a=50mm according to Figure 2. The inner diameter 2b of the cut-off waveguide is 15mm, the area of the coupling hole A is 6.03mm 2 , ε r ′ of the material BaTi 4 O 9 is measured at a frequency of 9.375GHz=39.05, and tanδ=0.69×10 -4 .
2.在频率为2~4GHz,我们在内径2a=180mm的TEo1n腔上按图1安装上截止波导,内径2b=50mm,耦合孔面积A=120mm2,在频率为4~8GHz则在内径2a=120mm的TEo1n腔上按图1安装截止波导内径2b=30mm,耦合孔A=42mm2;测量含羰基铁粉的环氧树脂,其结果为:频率f(GHz) εrμr μr εr2.2 35.66-j12.30 2.99-j0.94 12.06-j0.352.8 30.67-j14.19 2.37-j1.13 12.86-j0.143.8 30.36-j14.67 2.41-j1.05 12.85-j0.515.1 25.40-j15.77 2.38-j1.29 11.02-j0.656.0 22.65-j16.57 2.02-j1.18 11.95-j1.257.1 21.13-j15.72 1.84-j1.23 11.92-j0.618.1 19.15-j15.12 1.62-j1.20 12.07-j0.372. At a frequency of 2-4GHz, we install a cut-off waveguide on the TE o1n cavity with an inner diameter of 2a=180mm according to Figure 1, with an inner diameter of 2b=50mm, and a coupling hole area A=120mm 2 , and at a frequency of 4-8GHz, the inner diameter TE o1n cavity with 2a=120mm is installed according to Figure 1. Cut-off waveguide inner diameter 2b=30mm, coupling hole A=42mm 2 ; measuring epoxy resin containing carbonyl iron powder, the result is: frequency f(GHz) ε r μ r μ r ε r 2.2 35.66-j12.30 2.99-j0.94 12.06-j0.352.8 30.67-j14.19 2.37-j1.13 12.86-j0.143.8 30.36-j14.67 2.41-j1.05 12.85-j0.25.401 -j15.77 2.38-j1.29 11.02-j0.656.0 22.65-j16.57 2.02-j1.18 11.95-j1.257.1 21.13-j15.72 1.84-j1.23 11.92-j0.618.1 19.15-j15.22 1. -j1.20 12.07-j0.37
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| CN104237648A (en) * | 2013-06-24 | 2014-12-24 | 电子科技大学 | Novel method for testing microwave complex permittivity of high-loss liquid and powder materials |
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| CN102608431A (en) * | 2012-03-12 | 2012-07-25 | 浙江大学 | Coaxial-dielectric circular waveguide resonant cavity with frequency range of 1GHz-8GHz and dielectric parameter testing method |
| CN102608431B (en) * | 2012-03-12 | 2014-01-29 | 浙江大学 | Coaxial-dielectric circular waveguide resonant cavity with frequency range of 1GHz-8GHz and dielectric parameter testing method |
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| CN104237648A (en) * | 2013-06-24 | 2014-12-24 | 电子科技大学 | Novel method for testing microwave complex permittivity of high-loss liquid and powder materials |
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| CN107819183B (en) * | 2017-11-20 | 2020-09-01 | 成都航空职业技术学院 | Hoisting type resonant cavity device |
| CN109061319A (en) * | 2018-07-24 | 2018-12-21 | 北京工业大学 | A kind of measuring electromagnetic parameters method based on rectangular cavity |
| CN109061319B (en) * | 2018-07-24 | 2020-07-03 | 北京工业大学 | Electromagnetic parameter measuring method based on rectangular resonant cavity |
| CN115616045A (en) * | 2022-10-27 | 2023-01-17 | 西安交通大学 | A method for testing the dielectric properties of materials based on electromagnetic bandgap structure resonators |
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