CN111977368A - A tiny product grabbing device - Google Patents

Abstract

The invention discloses a tiny product grabbing device which comprises a data processing module, a negative pressure cavity, a direction adjuster and a sucker, wherein the data processing module is used for processing a tiny product; the upper end of the negative pressure cavity is provided with an air exhaust port and is connected with external air exhaust equipment. According to the invention, the contact force between the sucker and the grabbed object is sensed in real time through the piezoelectric sensor, the contact force is converted into an electric signal and is sent to the data processing module, the data processing module identifies the contact direction of the sucker and the grabbed object according to the received electric signal, and then the length adjuster is correspondingly adjusted to lift the contact position, so that the hard contact between the sucker and the grabbed object is reduced, and the sucker is prevented from crushing the grabbed object.

Description

A tiny product grabbing device

technical field

The invention relates to the field of negative pressure grabbing equipment, in particular to a small product grabbing device.

Background technique

The grasping of tiny products has always been an important technical link in the industrial field represented by the microelectronics industry. Using negative pressure technology, a local negative pressure field lower than atmospheric pressure is generated on the surface of the product, and lift can be formed on the product, thereby realizing the suction of the product to complete subsequent operations such as transportation.

The grasping technology of tiny products has developed along with the development of the microelectronics industry, and a variety of technologies have been developed to complete the grasping of corresponding products. The representative technologies are negative pressure grasping, physical grasping, electrostatic absorption, electromagnetic grasping Among them, negative pressure grabbing has been widely used due to its advantages of wide applicable surface, high reliability, and small damage to products. In view of the smaller and smaller product sizes, especially the grasping of sub-millimeter products, the requirements for negative pressure grasping technology are also getting higher and higher. The main technical problems include: First, the size of the suction head The product matches, so its size, especially the size of the suction hole on the suction head, must be smaller and smaller; the second is that the effective distance between the suction head and the tiny product is getting closer and closer due to fewer and fewer suction holes, which requires When the suction head is working, the parallelism between the suction head and the upper surface of the product is required to be higher and higher, otherwise the surface of the suction head will be deflected after long-term work due to temperature changes, vibration and other displacement deformation, resulting in suction failure or The tip crushes the product. These unfavorable factors are difficult to overcome at one time by the initial installation of the tip product. Therefore, it has become an inevitable choice to develop an intelligent tip technology that can sense and correct the tip posture in time.

SUMMARY OF THE INVENTION

In view of the above deficiencies in the prior art, the invention provides a tiny product grabbing device that solves the problem that the existing negative pressure grabbing equipment cannot adjust the parallelism between the suction head and the object to be grasped in real time, so that the suction head is easily crushed and damaged. Grab problem.

In order to achieve the above-mentioned purpose of the invention, the technical scheme adopted in the present invention is:

A micro product grabbing device is provided, which includes a data processing module, a negative pressure cavity, an orientation adjuster and a suction head; the upper end of the negative pressure cavity is provided with an air suction port, which is connected with an external air suction device;

The orientation adjuster includes a hollow column, a top cover and a base with a through hole in the middle; the upper end of the hollow column is connected with the inner side of the top cover, and the outer side of the upper surface of the top cover is connected with the negative pressure cavity; the lower end of the hollow column is connected with the base At least two length adjusters are arranged between the base and the top cover, and all the length adjusters and the center of the hollow column are not on the same line;

The suction head comprises a cavity wall connected to the outer side of the lower surface of the base, the lower end of the cavity wall is provided with an opening, the lower end of the opening is provided with a suction cup whose surface protrudes from the cavity wall, and the upper surface of the opening is provided with a piezoelectric sensor, An insulating pressure plate is arranged on the upper surface of the piezoelectric sensor, and a compression spring is arranged between the upper surface of the insulating pressure plate and the lower surface of the base; a first ventilation hole is arranged in the middle of the piezoelectric sensor, and a second ventilation hole is arranged in the middle of the insulating pressure plate ;

The data processing module is respectively connected with the piezoelectric sensor and the length adjuster.

Further, the lower surface of the suction cup is provided with a gold-plated layer.

Further, the hole diameter in the suction cup is greater than or equal to 0.01 mm and less than or equal to half of the size of the suction object.

Further, the piezoelectric sensor is a piezoelectric ceramic sensor, the entire lower surface of the piezoelectric ceramic sensor is an electrode, and the upper surface is provided with four insulating slits from the inside to the outside, dividing the upper surface of the piezoelectric ceramic sensor into four mutually Independent upper electrodes; each upper electrode is connected to the data processing module.

Further, the top cover is provided with a signal line interface.

Further, the top cover is provided with at least two first fixing holes, the base is provided with at least two second fixing holes, and the top cover and the base are respectively connected to the negative pressure by the screws passing through the first fixing holes and the second fixing holes. The cavity and the cavity wall are fixedly connected.

Further, there are two length adjusters, and the connecting lines between the two length adjusters and the center of the hollow column are perpendicular to each other.

Further, the data processing module is a computer.

Further, four signal line through holes corresponding to the upper electrodes are provided on the insulating pressure plate.

Further, the length adjuster is a piezoelectric telescopic column.

The beneficial effects of the invention are as follows: the device senses the contact force between the suction cup and the object to be grasped in real time through the piezoelectric sensor, and converts the contact force into an electrical signal and sends it to the data processing module, and the data processing module according to the received electrical signal Identify the contact position between the suction cup and the object to be grasped, and then adjust the length adjuster accordingly, raise the contact point, reduce the hard contact between the suction cup and the object to be grasped, and prevent the suction cup from crushing the object to be grasped.

Description of drawings

Fig. 1 is a sectional view of the device;

Figure 2 is a schematic structural diagram of a piezoelectric sensor;

Fig. 3 is the top view of the azimuth adjuster;

FIG. 4 is a schematic diagram of the structure of the insulating pressure plate.

Among them: 1. Air suction port; 2. Negative pressure chamber; 3. Screws; 4. Top cover; 5. Hollow column; 6. Length adjuster; 7. Base; 8. Cavity wall; , suction cup; 11, piezoelectric sensor; 12, compression spring; 13, signal line interface; 14, insulating seam; 15, upper electrode; 16, first ventilation hole; 17, first fixing hole; 18, second fixing hole ; 19, the signal line through hole; 20, the second ventilation hole.

Detailed ways

The specific embodiments of the present invention are described below to facilitate those skilled in the art to understand the present invention, but it should be clear that the present invention is not limited to the scope of the specific embodiments. For those of ordinary skill in the art, as long as various changes Such changes are obvious within the spirit and scope of the present invention as defined and determined by the appended claims, and all inventions and creations utilizing the inventive concept are within the scope of protection.

As shown in Figure 1, the micro product grasping device includes a data processing module, a negative pressure chamber 2, an orientation adjuster and a suction head; the upper end of the negative pressure chamber 2 is provided with an air suction port 1, which is connected to an external air suction device;

The orientation adjuster includes a hollow column 5, a top cover 4 and a base 7 with through holes in the middle; the upper end of the hollow column 5 is connected with the inner side of the top cover 4, and the outer side of the upper surface of the top cover 4 is connected with the negative pressure cavity 2. The lower end of the hollow column 5 is connected with the inner side of the base 7, and at least two length adjusters 6 are provided between the base 7 and the top cover 4, and the centers of all length adjusters 6 and the hollow column 5 are not on the same straight line, so that each Each length adjuster 6 can control adjustment in different directions;

The suction head includes a cavity wall 8 connected to the outer side of the lower surface of the base 7, the lower end of the cavity wall 8 is provided with an opening, the lower end of the opening is provided with a suction cup 10 whose surface protrudes from the cavity wall 8, and the upper surface of the opening is provided with There is a piezoelectric sensor 11, an insulating pressure plate 9 is arranged on the upper surface of the piezoelectric sensor 11, and a compression spring 12 is arranged between the upper surface of the insulating pressure plate 9 and the lower surface of the base 7, and the compression spring 12 is in a compressed state to ensure piezoelectricity. The sensor 11 is in a stressed state to prevent the piezoelectric sensor 11 from shaking; the piezoelectric sensor 11 is provided with a first ventilation hole 16 in the middle, and the insulating pressure plate 9 is provided with a second ventilation hole 20 in the middle;

The data processing module is connected to the piezoelectric sensor 11 and the length adjuster 6 respectively, and is used for correspondingly controlling the length adjuster 6 according to the signal of the piezoelectric sensor 11 , thereby adjusting the parallelism between the suction cup 10 and the object to be grasped.

In order to reduce the hard contact between the suction head and the grasped object when adjusting the distance and angle between the suction head and the grasped object, and prevent damage to the suction head or the grasped object, the suction cup 10 can be made of metal, and a gold-plated layer is provided on the lower surface of the suction cup 10 , the thickness of the gold-plated layer can be set to several micrometers to several tens of micrometers. In order to ensure the grasping effect, the hole diameter of the suction cup 10 is greater than or equal to 0.01 mm and less than or equal to half of the size of the object to be sucked.

As shown in Figure 2, in order to ensure the sensitivity of the device and enable the device to sense the force in different directions, the piezoelectric sensor 11 is a piezoelectric ceramic sensor, and the entire lower surface of the piezoelectric ceramic sensor is an electrode, and the upper surface is an electrode. Four insulating slits 14 are provided from the inside to the outside, and the upper surface of the piezoelectric ceramic sensor is divided into four mutually independent upper electrodes 15; each upper electrode 15 is connected to the data processing module. As shown in FIG. 4 , the insulating pressing plate 9 is provided with four signal line through holes 19 corresponding to the upper electrodes 15 .

In the specific implementation process, a wireless transmission scheme can be adopted, a wireless transmission device can be set in the cavity wall 8 to send the data of the piezoelectric sensor 11 to the data processing module, or a signal line interface 13 can be set on the top cover 4, through the The signal line interface 13 leads out the signal line of the piezoelectric sensor 11 and connects it to the data processing module.

As shown in FIG. 3 , in order to effectively fix and facilitate the disassembly of the orientation adjuster, the suction head and the negative pressure chamber 2 , at least two first fixing holes 17 are arranged on the top cover 4 , and at least two second fixing holes 17 are arranged on the base 7 . The hole 18 , the top cover 4 and the base 7 are fixedly connected with the negative pressure cavity 2 and the cavity wall 8 through the screw 3 passing through the first fixing hole 17 and the second fixing hole 18 respectively. The number of the first fixing holes 17 and the second fixing holes 18 may be equal to four, so that the distances between two adjacent first fixing holes 17 or two adjacent second fixing holes 18 are equal.

There are two length adjusters 6 , and the lines connecting the two length adjusters 6 with the center of the hollow column 5 are perpendicular to each other. In this arrangement, the suction cup 10 can be adjusted in four directions through the length adjustment of the two length adjusters 6 . When the data processing module receives the signal of the upper electrode 15 located on the left side, but does not receive the signal of other upper electrodes 15, it means that the object to be grasped is located on the left side of the suction cup 10. If the length adjuster 6 on the same line as the center point of the suction cup 10 is located on the left side of the center point of the suction cup 10, then only the length of the length adjuster 6 needs to be shortened to prevent the suction cup 10 from continuing to press against the object to be grasped; the same Therefore, if the length adjuster 6 on the same line as the upper electrode 15 on the left side and the center point of the suction cup 10 is located on the right side of the center point of the suction cup 10, it is only necessary to lengthen the length of the length adjuster 6 to prevent the suction cup 6. 10 Continue to press against the grabbed object.

In one embodiment of the present invention, the data processing module is a computer. In addition, the computer as the data processing module can preferably also control the manipulator or other equipment that clamps the device, so that the manipulator or other equipment that clamps the device can also move horizontally according to the data of the piezoelectric sensor 11, so that the suction cup 10 can move horizontally. The through hole on the upper can be closer to the object to be grasped, thereby improving the grasping efficiency.

For example, a four-axis robot is used as a carrier, and the device is installed on its fourth axis through the air suction port 1. The gas can enter from the hole of the suction cup 10 and pass through the piezoelectric sensor 11, the insulating pressure plate 9, the base 7, and the hollow column in sequence. 5. The top cover 4 and the negative pressure chamber 2 reach the exhaust port 1. The working process of the system is: use a four-axis robot to drive the device to move to the upper surface of the product to be sucked. During this process, the grasping process is monitored in real time by the piezoelectric sensor 11. On the basis of the signal output signal, if the parallelism between the suction cup 10 and the surface of the suction product is poor, resulting in an abnormal contact signal, the four-axis robot can be directly controlled by the signal to stop motion, and the piezoelectric can be controlled according to the preset correction strategy. The expansion and contraction of the telescopic column adjusts the included angle of the suction cup 10 covered with the gold-plated layer, and completes the direction adjustment of the suction head. After that, the piezoelectric sensor 11 feeds back a signal to the four-axis robot, and the four-axis robot starts the grasping action again. The process is repeated until a good suction action is completed. During the cycle, if the number of cycles exceeds 5 and the suction action is still not completed, the four-axis robot can issue an alarm and terminate the action.

In summary, the present invention senses the contact force between the suction cup 10 and the object to be grasped in real time through the piezoelectric sensor 11, and converts the contact force into an electrical signal and sends it to the data processing module. Identify the position where the suction cup 10 is in contact with the object to be grasped, and then adjust the length adjuster 6 accordingly, raise the contact point, reduce the hard contact between the suction cup 10 and the object to be grasped, and prevent the suction cup 10 from crushing the object to be grasped .

Claims (10)

1. A tiny product gripping device is characterized by comprising a data processing module, a negative pressure cavity (2), a direction adjuster and a suction head; the upper end of the negative pressure cavity (2) is provided with an air extraction port (1) and is connected with external air extraction equipment;

the azimuth adjuster comprises a hollow column (5), a top cover (4) and a base (7), wherein the middle of the top cover is provided with a through hole; the upper end of the hollow column (5) is connected with the inner side of the top cover (4), and the outer side of the upper surface of the top cover (4) is connected with the negative pressure cavity (2); the lower end of the hollow column (5) is connected with the inner side of the base (7), at least two length regulators (6) are arranged between the base (7) and the top cover (4), and the centers of all the length regulators (6) and the hollow column (5) are not on the same straight line;

the suction head comprises a cavity wall (8) connected with the outer side of the lower surface of the base (7), the lower end of the cavity wall (8) is provided with an opening, the lower end of the opening is provided with a suction cup (10) with the surface protruding out of the cavity wall (8), the upper surface of the opening is provided with a piezoelectric sensor (11), the upper surface of the piezoelectric sensor (11) is provided with an insulating pressing plate (9), and a pressure spring (12) is arranged between the upper surface of the insulating pressing plate (9) and the lower surface of the base (7); a first vent hole (16) is formed in the middle of the piezoelectric sensor (11), and a second vent hole (20) is formed in the middle of the insulating pressing plate (9);

and the data processing module is respectively connected with the piezoelectric sensor (11) and the length adjuster (6).

2. The tiny product gripping device according to claim 1, wherein the lower surface of the suction cup (10) is provided with a gold plating layer.

3. The device for gripping small products according to claim 1, characterized in that the aperture in the suction cup (10) is equal to or greater than 0.01mm and equal to or less than half the size of the object to be sucked.

4. The tiny product gripping device according to claim 1, wherein the piezoelectric sensor (11) is a piezoelectric ceramic sensor, the whole lower surface of the piezoelectric ceramic sensor is an electrode, the upper surface of the piezoelectric ceramic sensor is provided with four insulation seams (14) from inside to outside, and the upper surface of the piezoelectric ceramic sensor is divided into four mutually independent upper electrodes (15); each upper electrode (15) is connected with a data processing module.

5. The tiny product gripping device according to claim 1, wherein a signal line interface (13) is provided on the top cover (4).

6. The tiny product gripping device according to claim 1, wherein the top cover (4) is provided with at least two first fixing holes (17), the base (7) is provided with at least two second fixing holes (18), and the top cover (4) and the base (7) are fixedly connected with the negative pressure cavity (2) and the cavity wall (8) through screws (3) penetrating through the first fixing holes (17) and the second fixing holes (18), respectively.

7. The small product gripping device according to claim 1, wherein the length adjuster (6) is provided in two, and the two length adjusters (6) are perpendicular to each other with respect to a line connecting centers of the hollow columns (5).

8. The micro-product gripping device according to claim 1, wherein the data processing module is a computer.

9. The tiny product gripping device according to claim 4, wherein the insulating pressing plate (9) is provided with four signal line through holes (19) corresponding to the upper electrodes (15).

10. The small product gripping device according to claim 1, wherein the length adjuster (6) is a piezoelectric telescopic column.

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