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CN111924826B - A kind of preparation method of narrow diameter distribution, high-purity metallic single-wall carbon nanotube - Google Patents

A kind of preparation method of narrow diameter distribution, high-purity metallic single-wall carbon nanotube Download PDF

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CN111924826B
CN111924826B CN202010709224.5A CN202010709224A CN111924826B CN 111924826 B CN111924826 B CN 111924826B CN 202010709224 A CN202010709224 A CN 202010709224A CN 111924826 B CN111924826 B CN 111924826B
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刘畅
李鑫
张峰
侯鹏翔
成会明
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Abstract

The invention relates to the field of controllable preparation of metallic single-walled carbon nanotubes, in particular to a preparation method of a narrow-diameter-distribution high-purity metallic single-walled carbon nanotube. The preparation method comprises the steps of controllably preparing catalyst nano particles with uniform size by using a block copolymer self-assembly method, and designing components of the catalyst and regulating and controlling oxidation and reduction conditions of the catalyst to obtain bimetal solid solution nano particles with uniform size, monodispersity, close-packed hexagonal structure and high melting point; and then the dynamic reaction conditions of low temperature, low carbon source, low hydrogen and low carrier gas flow rate are controlled to realize the quasi-static chemical vapor deposition process, and the metallic single-walled carbon nanotube with the diameter of 1.1 +/-0.3 nm and the purity of 80 wt% is directly grown. The invention combines the design of the catalyst with growth thermodynamics and kinetics control, realizes the direct controllable growth of the metallic single-walled carbon nanotube with narrow diameter distribution and high purity, improves the structure control precision of the metallic single-walled carbon nanotube and lays a material foundation for promoting the application of the metallic single-walled carbon nanotube.

Description

一种窄直径分布、高纯度金属性单壁碳纳米管的制备方法A kind of preparation method of narrow diameter distribution, high-purity metallic single-wall carbon nanotube

技术领域technical field

本发明涉及金属性单壁碳纳米管的可控制备领域,具体为一种窄直径分布、高纯度金属性单壁碳纳米管的制备方法。The invention relates to the field of controllable preparation of metallic single-walled carbon nanotubes, in particular to a preparation method of narrow diameter distribution and high-purity metallic single-walled carbon nanotubes.

背景技术Background technique

具有不同手性角和直径的单壁碳纳米管可表现为金属性和半导体性。金属性单壁碳纳米管因量子输运效应而具有超高的电输运特性,是未来纳电子器件中优异的电极材料,而半导体性单壁碳纳米管因具有高载流子迁移率和一维结构,是构建场效应晶体管沟道的理想材料。因此,获得高纯度单一导电属性的单壁碳纳米管(金属性或者半导体性),是实现其在上述领域中应用的必要前提,具有重要意义。Single-walled carbon nanotubes with different chiral angles and diameters can exhibit metallic and semiconducting properties. Metallic single-walled carbon nanotubes have ultra-high electrical transport properties due to quantum transport effects, and are excellent electrode materials for future nanoelectronic devices, while semiconducting single-walled carbon nanotubes have high carrier mobility and One-dimensional structures are ideal materials for constructing field effect transistor channels. Therefore, obtaining high-purity single-walled carbon nanotubes (metallic or semiconducting) with single conductive properties is a necessary prerequisite for its application in the above-mentioned fields, and is of great significance.

目前,虽然单壁碳纳米管的可控制备工作已取得了较大进展,但大多数利用了半导体性单壁碳纳米管比金属性单壁碳纳米管具有更低化学反应活性的特点,通过原位引入刻蚀性气体去除金属性碳纳米管,获得半导体性富集的单壁碳纳米管。相比之下,金属性单壁碳纳米管的制备更为困难,其选择性制备的报道也较少。仅有的代表性工作如下:(1)通过对单壁碳纳米管的形核阶段控制,如:控制形核时催化剂表面状态和形貌来择优生长金属性单壁碳纳米管(文献一:Harutyunyan A.R.;Cheng,G.,Sumanasekera,G.U.et.al.Science,2009,326,116);(2)对催化剂高温稳定性和暴露出特定晶面的晶相控制,实现特定晶面的催化剂与特定结构的单壁碳纳米管相匹配(文献二:Yang,F.;Wang,X.;Li,Y.et al.Nature 2014,510,7506);(3)对催化剂特定晶面的对称性控制,实现催化剂与特定属性碳纳米管的对称性匹配(文献三:Zhang,S.C.;Kang,L.X.;Zhang,J.et al.Nature2017,543,7644);(4)对高熔点非金属氧化物催化剂纳米颗粒的尺寸和生长过程中氧含量的控制,实现窄直径分布、金属性单壁碳纳米管的直接生长(文献四:Zhang,L.L.;Sun,D.M.;Liu,C.et al.Advanced Materials,2017,29,32)。At present, although great progress has been made in the controllable preparation of single-walled carbon nanotubes, most of them take advantage of the lower chemical reactivity of semiconducting single-walled carbon nanotubes than metallic single-walled carbon nanotubes. In situ introduction of etching gas removes metallic carbon nanotubes to obtain semiconducting enriched single-walled carbon nanotubes. In contrast, the preparation of metallic single-walled carbon nanotubes is more difficult, and there are fewer reports on their selective preparation. The only representative works are as follows: (1) Preferential growth of metallic SWNTs by controlling the nucleation stage of SWNTs, such as controlling the surface state and morphology of the catalyst during nucleation (Reference 1: Harutyunyan A.R.; Cheng, G., Sumanasekera, G.U.et.al.Science, 2009, 326, 116); (2) High temperature stability of catalysts and crystal phase control of exposing specific crystal planes, realizing catalysts with specific crystal planes and specific structures (Li, Y. et al. Nature 2014, 510, 7506); (3) Symmetry control on specific crystal planes of catalysts, Achieve symmetry matching between catalysts and carbon nanotubes with specific properties (Literature 3: Zhang, S.C.; Kang, L.X.; Zhang, J. et al. Nature2017, 543, 7644); (4) For high melting point non-metal oxide catalyst nano Control of particle size and oxygen content during growth to achieve direct growth of narrow diameter distribution and metallic single-walled carbon nanotubes (Literature 4: Zhang, L.L.; Sun, D.M.; Liu, C. et al. Advanced Materials, 2017 , 29, 32).

然而,目前制备金属性单壁碳纳米管仍存在很多问题:(1)所采用的铁、钴和镍等传统金属催化剂因其熔点低,高温(>600℃)化学气相沉积过程中易发生团聚和奥斯瓦尔德熟化,颗粒尺寸分布变宽,导致碳纳米管的直径分布宽;(2)双金属催化剂的成分和结构调控难度较大,无法获得尺寸均一、成分和结构可控的高熔点双金属催化剂纳米颗粒;(3)非金属催化剂的活性较低导致其生长金属性碳纳米管的效率低下;(4)可控生长金属性单壁碳纳米管的机理仍不清晰。However, there are still many problems in the preparation of metallic single-walled carbon nanotubes: (1) The traditional metal catalysts such as iron, cobalt and nickel used are prone to agglomeration during high temperature (>600°C) chemical vapor deposition due to their low melting points. After aging with Oswald, the particle size distribution becomes wider, resulting in a wide diameter distribution of carbon nanotubes; (2) The composition and structure of bimetallic catalysts are difficult to control, and it is impossible to obtain a high melting point with uniform size and controllable composition and structure. Bimetallic catalyst nanoparticles; (3) the low activity of non-metallic catalysts leads to low efficiency of growing metallic CNTs; (4) the mechanism of controllable growth of metallic SWNTs is still unclear.

所以,目前面临的主要问题是:如何在理解可控生长机理的基础上,发展一种可控生长窄直径分布、金属性单壁碳纳米管的方法。Therefore, the main problem currently faced is: how to develop a method for the controllable growth of narrow diameter distribution, metallic single-walled carbon nanotubes on the basis of understanding the controllable growth mechanism.

发明内容SUMMARY OF THE INVENTION

本发明的目的是提供一种窄直径分布、高纯度金属性单壁碳纳米管的制备方法,通过对催化剂尺寸、成分及结构的设计,克服一般金属纳米颗粒高温不稳定易团聚导致生长碳纳米管直径分布宽的问题;选用低温、低碳源、低氢气、低流速的准静态化学气相沉积条件,直接生长窄直径分布、高纯度、高质量的金属性单壁碳纳米管。The purpose of the present invention is to provide a preparation method of narrow diameter distribution, high-purity metallic single-walled carbon nanotubes, through the design of catalyst size, composition and structure, to overcome the high temperature instability of general metal nanoparticles and easy agglomeration to lead to the growth of carbon nanometers The problem of wide distribution of tube diameters; the quasi-static chemical vapor deposition conditions of low temperature, low carbon source, low hydrogen and low flow rate are used to directly grow metallic single-wall carbon nanotubes with narrow diameter distribution, high purity and high quality.

本发明的技术方案:Technical scheme of the present invention:

一种窄直径分布、高纯度金属性单壁碳纳米管的制备方法,利用嵌段共聚物自组装法可控制备尺寸均一的催化剂纳米颗粒,通过设计催化剂的成分并调控其氧化、还原条件,获得尺寸均一、单分散、密排六方结构、高熔点的双金属固溶体纳米颗粒,为单壁碳纳米管的形核和生长提供热力学基础;再通过控制低温、低碳源、低氢气和低载气流速的动力学反应条件实现准静态化学气相沉积过程,直接生长直径为1.1±0.3nm、含量75~85wt%的金属性单壁碳纳米管,具体包括以下步骤:A method for preparing a narrow diameter distribution, high-purity metallic single-walled carbon nanotube, utilizing a block copolymer self-assembly method to controllably prepare catalyst nanoparticles of uniform size, by designing the composition of the catalyst and regulating its oxidation and reduction conditions, The bimetallic solid solution nanoparticles with uniform size, monodispersion, close-packed hexagonal structure and high melting point were obtained, which provided the thermodynamic basis for the nucleation and growth of single-walled carbon nanotubes; The dynamic reaction conditions of the gas flow rate realize the quasi-static chemical vapor deposition process, and directly grow metallic single-wall carbon nanotubes with a diameter of 1.1±0.3nm and a content of 75-85wt%, which specifically includes the following steps:

(1)嵌段共聚物胶束薄膜的制备:先将硅片基底浸泡于食人鱼溶液中清洗和亲水处理,再进行氧等离子体处理,随后旋涂嵌段共聚物胶束溶液,形成嵌段共聚物胶束薄膜;(1) Preparation of block copolymer micelle film: first, the silicon wafer substrate was immersed in piranha solution for cleaning and hydrophilic treatment, then oxygen plasma treatment was performed, and then the block copolymer micelle solution was spin-coated to form a block copolymer. segmented copolymer micelle film;

(2)催化剂纳米团簇的制备:将表面覆盖胶束薄膜的基片浸渍于NaReO4和K3[Co(CN)6]催化剂前驱体盐溶液中,吸附两种金属阴离子ReO4 -和[Co(CN)6]3-组装成为纳米团簇;通过调节溶液中两种催化剂前驱体的浓度,实现对团簇成分的控制;(2) Preparation of catalyst nanoclusters: The substrate covered with micellar film was immersed in NaReO 4 and K 3 [Co(CN) 6 ] catalyst precursor salt solution to adsorb two metal anions ReO 4 - and [ Co(CN) 6 ] 3- assembles into nanoclusters; by adjusting the concentration of the two catalyst precursors in the solution, the control of the cluster composition is realized;

(3)催化剂纳米颗粒的制备:对催化剂纳米团簇先后进行高温氧化、氢气和氩气混合气体还原处理,得到CoRex固溶体纳米颗粒;其工艺参数如下:高温氧化为700~750℃氧化1~5min,通入500~800sccm氩气1~5min,切换为75~250sccm Ar和5~40sccm H2的混合气体,还原2~5min;(3) Preparation of catalyst nanoparticles: The catalyst nanoclusters are subjected to high temperature oxidation and hydrogen and argon mixed gas reduction treatment successively to obtain CoRe x solid solution nanoparticles; the process parameters are as follows: high temperature oxidation is 700 ~ 750 ℃ oxidation 1 ~ 5min, pass 500~800sccm argon gas for 1~5min, switch to the mixed gas of 75~250sccm Ar and 5~40sccm H 2 , and reduce for 2~5min;

(4)单壁碳纳米管的制备:以CoRex纳米颗粒为催化剂,在低温、低碳源、低氢气和低流速的准静态化学气相沉积条件下,直接生长窄直径分布、金属性占优的单壁碳纳米管;其工艺参数如下:以30~40sccm氩气载入乙醇分子作为碳源,2~15sccm H2作为纳米颗粒还原和碳纳米管生长时控制生长速率的刻蚀性气体,75~115sccm的Ar调节气体的流速、碳源和氢气的浓度,气体总流量保持在115~200sccm,进行化学气相沉积生长单壁碳纳米管,生长时间为1~10min。(4) Preparation of single-walled carbon nanotubes: using CoRex nanoparticles as catalysts, under the conditions of quasi-static chemical vapor deposition at low temperature, low carbon source, low hydrogen and low flow rate, the direct growth of narrow diameter distribution and dominant metallicity The process parameters are as follows: 30-40 sccm argon is loaded with ethanol molecules as the carbon source, 2-15 sccm H 2 is used as an etchant gas to control the growth rate during nanoparticle reduction and carbon nanotube growth, Ar of 75-115 sccm adjusts the gas flow rate, carbon source and hydrogen concentration, the total gas flow is maintained at 115-200 sccm, and chemical vapor deposition is performed to grow single-walled carbon nanotubes, and the growth time is 1-10 min.

所述的窄直径分布、高纯度金属性单壁碳纳米管的制备方法,催化剂和单壁碳纳米管的结构表征:利用原子力显微镜测量并统计催化剂纳米颗粒的直径和密度,透射电子显微镜表征催化剂的晶体结构和成分分布;利用扫描电子显微镜测量并统计单壁碳纳米管的密度和长度,利用透射电子显微镜测量单壁碳纳米管直径并统计其分布,利用多波长拉曼光谱估算金属性单壁碳纳米管的纯度。The preparation method of the described narrow diameter distribution, high-purity metallic single-walled carbon nanotubes, and the structural characterization of the catalyst and the single-walled carbon nanotubes: using atomic force microscopy to measure and count the diameter and density of catalyst nanoparticles, and transmission electron microscopy to characterize the catalyst The crystal structure and composition distribution of single-walled carbon nanotubes were measured and counted by scanning electron microscopy, the diameter and distribution of single-walled carbon nanotubes were measured and counted by transmission electron microscopy, and the metallic single-walled carbon nanotubes were estimated by multi-wavelength Raman spectroscopy. Purity of walled carbon nanotubes.

所述的窄直径分布、高纯度金属性单壁碳纳米管的制备方法,所制备的催化剂结构为密排六方的CoRex固溶体颗粒,颗粒尺寸分布在1.5~3.5nm范围内,Co和Re的原子比例为1:1~1:9,由合金相图知熔点在2000℃以上,为高熔点催化剂。In the method for preparing a narrow diameter distribution, high-purity metallic single-walled carbon nanotube, the prepared catalyst structure is hexagonal close-packed CoRex solid solution particles, and the particle size distribution is in the range of 1.5-3.5 nm, and Co and Re are in the range of 1.5 to 3.5 nm. The atomic ratio is 1:1~1:9, and the melting point is above 2000 ℃ from the alloy phase diagram, which is a high melting point catalyst.

所述的窄直径分布、高纯度金属性单壁碳纳米管的制备方法,所生长的单壁碳纳米管长度为1~10μm。In the method for preparing a narrow diameter distribution, high-purity metallic single-wall carbon nanotube, the length of the grown single-wall carbon nanotube is 1-10 μm.

所述的窄直径分布、高纯度金属性单壁碳纳米管的制备方法,通过调控热力学形核条件和动力学生长条件,包含催化剂成分、尺寸、结构,以及生长温度、碳源、氢气浓度和流速,来调控单壁碳纳米管的直径和导电属性。The preparation method of the narrow diameter distribution, high-purity metallic single-walled carbon nanotubes, by regulating the thermodynamic nucleation conditions and kinetic growth conditions, includes catalyst composition, size, structure, growth temperature, carbon source, hydrogen concentration and flow rate to control the diameter and conductivity properties of single-walled carbon nanotubes.

所述的窄直径分布、高纯度金属性单壁碳纳米管的制备方法,步骤(1)中,嵌段共聚物胶束溶液采用浓度为0.01~0.25wt%聚苯乙烯-b-聚(4-乙烯基吡啶)嵌段共聚物的甲苯及四氢呋喃溶液,甲苯与四氢呋喃的质量比2~4:1,嵌段共聚物胶束高度为6~15nm。In the method for preparing metallic single-walled carbon nanotubes with narrow diameter distribution and high purity, in step (1), the block copolymer micelle solution adopts polystyrene-b-poly(4) with a concentration of 0.01-0.25wt% -vinylpyridine) block copolymer in toluene and tetrahydrofuran solution, the mass ratio of toluene and tetrahydrofuran is 2-4:1, and the block copolymer micelle height is 6-15nm.

所述的窄直径分布、高纯度金属性单壁碳纳米管的制备方法,步骤(2)中,NaReO4和K3[Co(CN)6]催化剂前驱体盐溶液为摩尔浓度0.01~1M的盐酸溶液,NaReO4和K3[Co(CN)6]的摩尔比为x:(0.5-x),x=0.1~0.3。In the method for preparing metallic single-walled carbon nanotubes with narrow diameter distribution and high purity, in step (2), the NaReO 4 and K 3 [Co(CN) 6 ] catalyst precursor salt solution has a molar concentration of 0.01-1M In the hydrochloric acid solution, the molar ratio of NaReO 4 and K 3 [Co(CN) 6 ] is x: (0.5-x), and x=0.1-0.3.

所述的窄直径分布、高纯度金属性单壁碳纳米管的制备方法,步骤(3)中,CoRex固溶体纳米颗粒的粒度为0.5~3.5nm。In the method for preparing a narrow diameter distribution, high-purity metallic single-walled carbon nanotube, in step (3), the particle size of the CoRex solid solution nanoparticles is 0.5-3.5 nm.

本发明的设计思想是:The design idea of the present invention is:

本发明以高熔点双金属固溶体CoRex为催化剂,直接选择性生长金属性单壁碳纳米管。该方法设计并制备单分散、尺寸均匀、密排六方的CoRe的高熔点催化剂,既避免了催化剂的高温团聚,又解决了金属性碳纳米管成核的控制问题,可获得尺寸均一稳定的碳帽;由于Re相比Co与H有更强的亲和力,故CoRex(如:CoRe4等)表面吸附更多的氢原子,抑制碳源的分解和扩散,采用低温、低碳源、低氢、低流速的准静态化学气相沉积条件,使得碳原子以准静态缓慢地在催化剂表面扩散、生长,进而实现金属性单壁碳纳米管和半导体性单壁碳纳米管生长速率差异的最大化,实现金属性单壁碳纳米管的择优生长。In the invention, the high melting point bimetallic solid solution CoRex is used as a catalyst to directly and selectively grow metallic single-walled carbon nanotubes. The method designs and prepares a monodisperse, uniform size, hexagonal close-packed CoRe high melting point catalyst, which not only avoids the high temperature agglomeration of the catalyst, but also solves the problem of controlling the nucleation of metallic carbon nanotubes, and can obtain uniform and stable carbon cap; since Re has a stronger affinity for H than Co, the surface of CoRe x (such as CoRe 4 , etc.) adsorbs more hydrogen atoms, which inhibits the decomposition and diffusion of carbon sources. , The quasi-static chemical vapor deposition conditions of low flow rate make carbon atoms diffuse and grow slowly on the catalyst surface in a quasi-static manner, thereby maximizing the growth rate difference between metallic SWNTs and semiconducting SWNTs, Achievement of preferential growth of metallic single-walled carbon nanotubes.

本发明的优点及有益效果是:The advantages and beneficial effects of the present invention are:

1、本发明实现了尺寸均一、成分和结构可控高熔点双金属催化剂纳米颗粒的制备,解决了催化剂高温团聚的问题;1. The present invention realizes the preparation of high melting point bimetallic catalyst nanoparticles with uniform size, controllable composition and structure, and solves the problem of catalyst agglomeration at high temperature;

2、本发明直接生长出高纯度金属性富集的单壁碳纳米管,且方法简单,适用性强;2. The present invention directly grows high-purity metallic-enriched single-walled carbon nanotubes, and the method is simple and has strong applicability;

3、本发明所制备的金属性单壁碳纳米管直径分布窄;3. The diameter distribution of the metallic single-walled carbon nanotubes prepared by the present invention is narrow;

4、本发明阐明了影响金属性单壁碳纳米管生长的主要因素及其可控生长机制,为碳纳米管的可控生长提供新思路。4. The present invention clarifies the main factors affecting the growth of metallic single-walled carbon nanotubes and the controllable growth mechanism thereof, and provides a new idea for the controllable growth of carbon nanotubes.

总之,本发明以控制单壁碳纳米管形核阶段起决定性作用的催化剂为出发点,通过调控双金属催化剂的高熔点和结构组分等热力学条件和化学气相沉积生长碳纳米管过程中的动力学条件,突破了现阶段金属性单壁碳纳米管控制制备的瓶颈,为特定结构的单壁碳纳米管的可控生长提供了新的认识。In a word, the present invention starts from the catalyst that plays a decisive role in controlling the nucleation stage of single-walled carbon nanotubes, and controls the thermodynamic conditions such as the high melting point and structural components of the bimetallic catalyst and the kinetics in the process of chemical vapor deposition growth of carbon nanotubes. It breaks through the current bottleneck of the controlled preparation of metallic SWCNTs and provides a new understanding for the controllable growth of SWCNTs with specific structures.

附图说明Description of drawings

图1.CoRex双金属催化剂纳米颗粒的制备,及生长窄直径分布金属性单壁碳纳米管过程示意图。Figure 1. The preparation of CoRex bimetallic catalyst nanoparticles and the schematic diagram of the process of growing narrow diameter distribution metallic single-walled carbon nanotubes.

图2.CoRex双金属催化剂纳米颗粒生长窄直径分布金属性单壁碳纳米管原理示意图。Figure 2. Schematic diagram of the principle of narrow diameter distribution metallic single-walled carbon nanotubes grown by CoRex bimetallic catalyst nanoparticles.

图3.CoRe4纳米颗粒的形貌和结构。其中,(a)纳米颗粒的原子力显微镜照片;(b)纳米颗粒的透射电镜照片;(c)透射电镜统计的颗粒尺寸分布柱状图;(d-e)纳米颗粒的高分辨透射电镜照片;(f-g)纳米颗粒高分辨傅里叶变换照片。Figure 3. Morphology and structure of CoRe 4 nanoparticles. Among them, (a) AFM photo of nanoparticles; (b) TEM photo of nanoparticles; (c) histogram of particle size distribution of TEM statistics; (de) high-resolution TEM photo of nanoparticles; (fg) High-resolution Fourier transform photographs of nanoparticles.

图4.CoRe4纳米颗粒的成分表征。其中,(a)高角环形暗场像;(b)透射电镜中能谱的点扫描元素分布,横坐标的位置为(a)中圆圈的颗粒划线始末距离;(c-d)面扫描的元素含量分布。Figure 4. Compositional characterization of CoRe 4 nanoparticles. Among them, (a) high-angle annular dark field image; (b) point scanning element distribution of energy spectrum in transmission electron microscope, the position of abscissa is the distance between the beginning and end of the particle scribe in the circle in (a); (cd) element content of surface scanning distributed.

图5.CoRe4催化剂制备的碳纳米管的形貌与结构。其中,(a)硅片表面碳纳米管的扫描电镜照片;(b-c)单壁碳纳米管的透射电镜照片;(d)基于透射电镜照片统计的碳纳米管直径分布柱状图。Figure 5. Morphology and structure of carbon nanotubes prepared by CoRe 4 catalyst. Among them, (a) SEM photo of carbon nanotubes on the surface of silicon wafer; (bc) TEM photo of single-walled carbon nanotube; (d) histogram of carbon nanotube diameter distribution based on TEM photo statistics.

图6.CoRe4纳米颗粒作为催化剂所生长单壁碳纳米管的多波长拉曼光谱。其中,(a)633nm波长激光激发的呼吸模;(b)532nm波长激光激发的呼吸模;(c)785nm波长激光激发的呼吸模;(d)532nm激光激发的D、G模。Figure 6. Multiwavelength Raman spectra of single-walled carbon nanotubes grown with CoRe 4 nanoparticles as catalyst. Among them, (a) breathing mode excited by 633nm laser; (b) breathing mode excited by 532nm laser; (c) breathing mode excited by 785nm laser; (d) D and G modes excited by 532nm laser.

图7.Co纳米颗粒催化剂的形貌与结构表征。其中,(a)纳米颗粒的原子力显微镜照片;(b)纳米颗粒的透射电镜照片;(c)透射电镜统计的颗粒尺寸分布柱状图;(d-e)纳米颗粒的高分辨透射电镜照片;(f-g)纳米颗粒高分辨傅里叶变换照片。Figure 7. Morphology and structural characterization of Co nanoparticle catalysts. Among them, (a) AFM photo of nanoparticles; (b) TEM photo of nanoparticles; (c) histogram of particle size distribution of TEM statistics; (d-e) high-resolution TEM photos of nanoparticles; (f-g) High-resolution Fourier transform photographs of nanoparticles.

图8.Co和CoRe1为催化剂制备的单壁碳纳米管的扫描照片和对应的多波长拉曼光谱RBM模。其中,(a)Co为催化剂生长的单壁碳纳米管的扫描照片;(b)Co为催化剂生长的单壁碳纳米管532nm波长激光RBM模;(c)Co为催化剂生长的单壁碳纳米管633nm波长激光RBM模;(d)Co:Re原子比=1:1为催化剂生长的单壁碳纳米管的扫描照片;(e)CoRe为催化剂生长的单壁碳纳米管的532nm波长激光RBM模;(f)CoRe为催化剂生长的单壁碳纳米管的633nm波长激光RBM模。Figure 8. Scanning photos of single-walled carbon nanotubes prepared by Co and CoRe 1 as catalysts and the corresponding RBM modes of multi-wavelength Raman spectroscopy. Among them, (a) Co is the scanning photo of the catalyst-grown single-walled carbon nanotubes; (b) Co is the 532 nm laser RBM mode of the catalyst-grown single-walled carbon nanotubes; (c) Co is the catalyst-grown single-walled carbon nanotubes 633nm wavelength laser RBM mode of the tube; (d) Co:Re atomic ratio=1:1 is the scanning photo of the catalyst-grown SWNT; (e) CoRe is the 532nm wavelength laser RBM of the catalyst-grown SWNT mode; (f) CoRe is the 633 nm wavelength laser RBM mode of the catalyst-grown single-walled carbon nanotubes.

具体实施方式Detailed ways

如图1所示,本发明以CoRex高熔点双金属固溶体纳米颗粒为催化剂,制备窄直径分布、高纯度金属性单壁碳纳米管的方法,具体制备与生长过程如下:As shown in Figure 1, the present invention uses CoRe x high melting point bimetallic solid solution nanoparticles as catalysts to prepare a method for narrow diameter distribution, high-purity metallic single-walled carbon nanotubes, and the specific preparation and growth process are as follows:

该方法通过调控嵌段共聚物自组装过程及其后处理形成纳米颗粒的方法,制备单分散、窄直径分布的CoRex(X=1~9)双金属纳米颗粒催化剂;采用嵌段共聚物自组装方法获得尺寸均匀的嵌段共聚物胶束,每个嵌段共聚物胶束通过旋涂、浸渍、化学吸附定量的双金属阴离子,从而获得尺寸均一的金属纳米团簇;通过控制双金属组成比例和低温氧化、还原条件,获得单分散、密排六方结构、高熔点的CoRex催化剂纳米颗粒;再通过控制低温、低碳源、低氢气和低流速的生长动力学条件实现的准静态化学气相沉积,使得碳原子缓慢地在催化剂表面扩散与组装,实现金属性和半导体性单壁碳纳米管生长速率差异的最大化,并直接可控生长出窄直径分布(直径为1.1±0.3nm)、高纯度(纯度达80wt%)的金属性单壁碳纳米管。The method prepares monodisperse, narrow diameter distribution CoRex (X=1-9) bimetallic nanoparticle catalyst by regulating the self-assembly process of block copolymer and its post-processing to form nanoparticles; The assembly method obtains block copolymer micelles with uniform size, and each block copolymer micelle is subjected to spin coating, dipping, and chemical adsorption of quantitative bimetal anions, thereby obtaining uniform size metal nanoclusters; by controlling the composition of bimetals Proportion and low temperature oxidation and reduction conditions to obtain monodisperse, close-packed hexagonal structure, high melting point CoRex catalyst nanoparticles; and then by controlling the growth kinetics conditions of low temperature, low carbon source, low hydrogen and low flow rate to achieve quasi-static chemistry Vapor deposition makes carbon atoms diffuse and assemble slowly on the catalyst surface, maximize the difference in growth rate of metallic and semiconducting single-walled carbon nanotubes, and directly controllable growth of narrow diameter distribution (diameter is 1.1±0.3nm) , High-purity (purity up to 80wt%) metallic single-walled carbon nanotubes.

本发明通过催化剂设计结合生长热力学和动力学控制,实现了窄直径分布、高纯度金属性单壁碳纳米管的直接可控生长,提高了金属性单壁碳纳米管的结构控制精度,为推动金属性单壁碳纳米管的应用奠定材料基础。The invention realizes the direct and controllable growth of metallic single-walled carbon nanotubes with narrow diameter distribution and high-purity through catalyst design combined with growth thermodynamics and kinetic control, improves the structural control precision of metallic single-walled carbon nanotubes, and promotes the The application of metallic single-walled carbon nanotubes lays the material foundation.

如图2所示,控制窄直径分布金属性单壁碳纳米管生长的机制如下:As shown in Figure 2, the mechanism controlling the growth of narrow diameter distribution metallic SWNTs is as follows:

首先,热力学方面,催化剂CoRex相比Co具有更高的熔点,钴面心立方熔点为1495℃,钴-铼合金密排立方熔点>2000℃,可以有效抑制催化剂团聚、高温奥斯瓦尔德熟化、纳米颗粒高温熔化和热振动,从而在形核阶段稳定了碳帽的结构,故制备的颗粒尺寸较小而且更均匀,利于生长窄直径分布的单壁碳纳米管,且CoRex的结构为密排六方,利于金属性碳纳米管的形核;First of all, in terms of thermodynamics, the catalyst CoRex has a higher melting point than Co, the face-centered cubic melting point of cobalt is 1495 °C, and the cobalt-rhenium alloy close-packed cubic melting point is >2000 °C, which can effectively inhibit catalyst agglomeration and high-temperature Oswald ripening. , high temperature melting and thermal vibration of nanoparticles, thus stabilizing the structure of the carbon cap in the nucleation stage, so the prepared particle size is smaller and more uniform, which is conducive to the growth of single-walled carbon nanotubes with narrow diameter distribution, and the structure of CoRe x is Close-packed hexagonal, which is conducive to the nucleation of metallic carbon nanotubes;

其次,在动力学方面,由于Re相比Co,与H有更强的亲和力,Co表面可以吸附5个氢原子([CoH5]4-)或4个氢原子([CoH4]5-),Re表面可以吸附9个氢原子([ReH9]2-)或6个氢原子([ReH6]5-),故而CoRe4表面吸附更多的氢原子,从而占据和金属表面的吸附的活性位点,抑制碳源在催化剂表面吸附、催化裂解和表面扩散。因此,在获得尺寸均一稳定的金属性碳帽基础上,采用低温、低碳源、低氢、低流速的准静态化学气相沉积条件,使得碳原子以准静态缓慢地在催化剂表面扩散组装,进而实现了金属性单壁碳纳米管和半导体性单壁碳纳米管生长速率差异的最大化,最后通过生长时间的控制,实现了金属性单壁碳纳米管的长择优生长。Secondly, in terms of kinetics, since Re has a stronger affinity for H than Co, the surface of Co can adsorb 5 hydrogen atoms ([CoH 5 ] 4- ) or 4 hydrogen atoms ([CoH 4 ] 5- ) , the surface of Re can adsorb 9 hydrogen atoms ([ReH 9 ] 2- ) or 6 hydrogen atoms ([ReH 6 ] 5- ), so the surface of CoRe 4 adsorbs more hydrogen atoms, thus occupying the adsorption capacity of the surface of the metal. The active site inhibits the adsorption, catalytic cracking and surface diffusion of carbon sources on the catalyst surface. Therefore, on the basis of obtaining uniform and stable metallic carbon caps, the quasi-static chemical vapor deposition conditions of low temperature, low carbon source, low hydrogen and low flow rate are used to make carbon atoms diffuse and assemble slowly on the surface of the catalyst in a quasi-static manner, and then The difference between the growth rates of metallic single-walled carbon nanotubes and semiconducting single-walled carbon nanotubes is maximized. Finally, by controlling the growth time, the long-preferred growth of metallic single-walled carbon nanotubes is realized.

下面,通过实施例进一步详述本发明。Hereinafter, the present invention will be further described in detail through examples.

实施例1.Example 1.

本实施例中,窄直径分布、高纯度金属性单壁碳纳米管的制备与表征如下:In this embodiment, the preparation and characterization of narrow diameter distribution, high-purity metallic single-walled carbon nanotubes are as follows:

(1)CoRex双金属催化剂的制备:(1) Preparation of CoRe x bimetallic catalyst:

将10mm×10mm硅片置于食人鱼溶液中浸泡15min清洁处理,用去离子水洗涤后,用功率为32W的氧等离子体处理。将浓度为0.01~0.25wt%聚苯乙烯-b-聚(4-乙烯基吡啶)嵌段共聚物(PS50000-b-P4VP13000)的甲苯及四氢呋喃溶液(甲苯与四氢呋喃的质量比3:1),以转速2000~7000rpm旋涂于亲水处理过的硅片表面,形成嵌段共聚物胶束薄膜,嵌段共聚物胶束高度为6~15nm。再将该硅片浸渍于溶剂为0.01~1M(mol/L)的盐酸溶液,其中溶质为双金属催化剂前驱体盐(x mM(mmol/L)NaReO4和(0.5-x)mM(mmol/L)K[Co(CN)6]3,x=0.1~0.3),时间为1~3min,吸附ReO4 -和[Co(CN)6]3-两种金属阴离子组装成为纳米团簇,通过调节双金属催化剂前驱体盐溶液中两种催化剂前驱体的浓度,可以实现对团簇成分的控制。取出后用去离子水洗涤,并在50~60℃下干燥15~20min,做氧等离子体处理1~5min。The 10mm×10mm silicon wafer was soaked in piranha solution for 15min for cleaning treatment, washed with deionized water, and then treated with oxygen plasma with a power of 32W. The concentration of 0.01 ~ 0.25wt% polystyrene-b-poly (4-vinylpyridine) block copolymer (PS50000-b-P4VP13000) in toluene and tetrahydrofuran solution (the mass ratio of toluene and tetrahydrofuran 3:1), Spin coating on the surface of the hydrophilic treated silicon wafer at a rotational speed of 2000-7000 rpm to form a block copolymer micelle film, and the block copolymer micelle height is 6-15nm. The silicon wafer is then immersed in a hydrochloric acid solution with a solvent of 0.01-1M (mol/L), wherein the solutes are bimetallic catalyst precursor salts (x mM (mmol/L) NaReO 4 and (0.5-x) mM (mmol/ L)K[Co(CN) 6 ] 3 , x=0.1~0.3), for 1~3min, adsorb ReO 4 - and [Co(CN) 6 ] 3- two metal anions and assemble into nanoclusters. The control of the cluster composition can be achieved by adjusting the concentrations of the two catalyst precursors in the bimetallic catalyst precursor salt solution. After taking out, it is washed with deionized water, dried at 50-60° C. for 15-20 minutes, and treated with oxygen plasma for 1-5 minutes.

将上述处理过的硅片置于管式炉的石英舟中,700~750℃氧化1~5min,石英舟推出后冷却至室温。然后管式炉中通入500~800sccm氩气4min,切换为75~250sccm Ar和5~40sccm H2的混合气体,并将载有硅片的石英舟推入恒温区还原2~5min,得到CoRex固溶体纳米颗粒,其粒度为1.5~3.5nm,对制备的纳米颗粒进行结构表征。The above-treated silicon wafers are placed in a quartz boat in a tube furnace, oxidized at 700-750° C. for 1-5 minutes, and cooled to room temperature after the quartz boat is pushed out. Then, 500-800 sccm argon gas was introduced into the tube furnace for 4 min, switched to a mixed gas of 75-250 sccm Ar and 5-40 sccm H 2 , and the quartz boat loaded with silicon wafers was pushed into the constant temperature zone for reduction for 2-5 min to obtain CoRe x solid solution nanoparticles, the particle size of which is 1.5-3.5 nm, and the structure of the prepared nanoparticles is characterized.

如图3(a)所示,原子力显微镜表征结果表明,纳米颗粒均匀分散在硅基底表面。如图3(b)所示,透射电镜表征结果表明纳米颗粒尺寸均一。随机统计了150个颗粒的直径,其结果如图3(c)所示,纳米颗粒的粒径分布在1.5~3.5nm。图3(d-e)为纳米颗粒的高分辨透射电镜照片,其对应的傅里叶变化为图3(f-g),可见颗粒为典型的密排六方结构,晶格条纹间距为a-轴0.20~0.27nm,b-轴0.32~0.44nm。As shown in Fig. 3(a), AFM characterization results showed that the nanoparticles were uniformly dispersed on the surface of the silicon substrate. As shown in Fig. 3(b), the results of TEM characterization indicated that the nanoparticles were uniform in size. The diameters of 150 particles were randomly counted, and the results are shown in Figure 3(c), and the particle size distribution of the nanoparticles is 1.5-3.5 nm. Figures 3(d-e) are high-resolution TEM images of the nanoparticles, and the corresponding Fourier transforms are shown in Figures 3(f-g). nm, b-axis 0.32 to 0.44 nm.

如图4(a)所示,进一步通过HADDF表征其尺寸及成分分布,其成分分布均匀。如图4(b)所示,从颗粒EDS统计中看出,对应颗粒的元素含量的原子比例Co:Re为1:4。如图4(c-d)所示,颗粒中均含有Co和Re。As shown in Figure 4(a), the size and composition distribution were further characterized by HADDF, and the composition distribution was uniform. As shown in Fig. 4(b), from the particle EDS statistics, the atomic ratio Co:Re of the element content corresponding to the particle is 1:4. As shown in Fig. 4(c-d), both Co and Re are contained in the particles.

(2)窄直径分布、高纯度金属性单壁碳纳米管的制备与表征:(2) Preparation and characterization of narrow diameter distribution, high-purity metallic single-walled carbon nanotubes:

在步骤(1)的基础上生长单壁碳纳米管,以CoRe4纳米颗粒为催化剂,以30~40sccm氩气载入乙醇分子作为碳源,2~15sccm H2作为纳米颗粒还原和碳纳米管生长时控制生长速率的刻蚀性气体,75~115sccm的Ar调节气体的流速、碳源和氢气的浓度,气体总流量保持在115~200sccm,进行化学气相沉积生长单壁碳纳米管,生长时间为5min。生长结束后,关闭碳源,在氩气保护下将石英舟推出恒温区后冷却至室温后取出样品。从而,在低温、低碳源、低氢气和低流速的准静态化学气相沉积条件下,直接生长窄直径分布、金属性占优的单壁碳纳米管。On the basis of step (1), single-walled carbon nanotubes are grown, using CoRe 4 nanoparticles as catalyst, 30-40 sccm argon loaded with ethanol molecules as carbon source, 2-15 sccm H2 as nano-particle reduction and carbon nanotubes Etching gas to control the growth rate during growth, 75-115 sccm Ar to adjust the gas flow rate, carbon source and hydrogen concentration, the total gas flow is kept at 115-200 sccm, and chemical vapor deposition is used to grow single-walled carbon nanotubes. Growth time for 5min. After the growth, the carbon source was turned off, the quartz boat was pushed out of the constant temperature zone under the protection of argon, cooled to room temperature, and the samples were taken out. Thus, under the quasi-static chemical vapor deposition conditions of low temperature, low carbon source, low hydrogen and low flow rate, single-walled carbon nanotubes with narrow diameter distribution and dominant metallicity are directly grown.

对催化剂和单壁碳纳米管的结构进行表征:利用原子力显微镜测量并统计催化剂纳米颗粒的直径和密度,透射电子显微镜表征催化剂的晶体结构和成分分布;利用扫描电子显微镜测量并统计单壁碳纳米管的密度和长度,利用透射电子显微镜测量单壁碳纳米管直径并统计其分布,利用多波长拉曼光谱估算金属性单壁碳纳米管的纯度。Characterize the structure of catalysts and single-walled carbon nanotubes: use atomic force microscopy to measure and count the diameter and density of catalyst nanoparticles, and use transmission electron microscopy to characterize the crystal structure and composition distribution of catalysts; use scanning electron microscopy to measure and count single-walled carbon nanotubes The density and length of the tube, the diameter of single-walled carbon nanotubes were measured by transmission electron microscopy and their distribution was calculated, and the purity of metallic single-walled carbon nanotubes was estimated by multi-wavelength Raman spectroscopy.

如图5(a)所示,所制备单壁碳纳米管的扫描电镜照片,可见单壁碳纳米管的管壁较直,长度约为5μm。如图5(b-c)所示,单壁碳纳米管的透射电镜照片为单根单壁碳纳米管,管壁平直说明其具有很好的结晶性。如图5(d)所示,随机统计了150根碳纳米管的直径,可见直径分布非常窄,主要集中于0.8~1.4nm。As shown in Figure 5(a), the scanning electron microscope photo of the prepared single-walled carbon nanotubes shows that the tube walls of the single-walled carbon nanotubes are relatively straight and the length is about 5 μm. As shown in Fig. 5(b-c), the transmission electron microscope pictures of single-walled carbon nanotubes are single single-walled carbon nanotubes, and the tube wall is straight, indicating that it has good crystallinity. As shown in Fig. 5(d), the diameters of 150 carbon nanotubes were randomly counted, and it can be seen that the diameter distribution is very narrow, mainly concentrated in 0.8-1.4 nm.

如图6(a-c)所示,多波长(532nm,633nm,785nm)激光拉曼光谱的呼吸模,可见大部分被激发的单壁碳纳米管位于金属性区间。如图6(d)所示,单壁碳纳米管在1200~1800cm-1范围内的拉曼光谱,在1350cm-1左右无明显的D峰,再次证明其结晶程度高,G模为典型的金属性BWF型峰。根据Katarula plots图及对应区间内呼吸模峰个数估算出金属性单壁碳纳米管含量约为80wt%。As shown in Figure 6(ac), the breathing mode of the multi-wavelength (532nm, 633nm, 785nm) laser Raman spectrum shows that most of the excited SWNTs are located in the metallic region. As shown in Figure 6(d), the Raman spectrum of single-walled carbon nanotubes in the range of 1200-1800 cm -1 has no obvious D peak around 1350 cm -1 , which again proves that its crystallinity is high, and the G mode is typical Metallic BWF-type peaks. According to the Katarula plots and the number of breathing mode peaks in the corresponding interval, it is estimated that the content of metallic single-walled carbon nanotubes is about 80wt%.

比较例1:Co催化剂生长单壁碳纳米管Comparative Example 1: Co-catalyst growth of single-walled carbon nanotubes

将旋涂嵌段共聚物(PS50000-b-P4VP13000)的薄膜浸渍于摩尔浓度0.5mM K3[Co(CN)6]溶液中,热处理条件相同,所得颗粒的形貌及尺寸分布如图7(a-c)所示,可见其直径分布在0.5~5.5nm范围内,颗粒平均尺寸和直径分布范围比CoRex大。如图7(d-g)所示,高分辨透射电镜照片和对应的傅里叶变换照片表明,颗粒为典型的钴FCC结构。The spin-coated block copolymer (PS50000-b-P4VP13000) film was immersed in a 0.5 mM K 3 [Co(CN) 6 ] solution with the same heat treatment conditions. The morphology and size distribution of the obtained particles are shown in Figure 7 ( ac), it can be seen that its diameter distribution is in the range of 0.5-5.5 nm, and the average particle size and diameter distribution range are larger than those of CoRe x . As shown in Fig. 7(dg), the high-resolution TEM image and the corresponding Fourier transform image show that the particles are of a typical cobalt FCC structure.

以上述比较例制备的Co纳米颗粒作为催化剂,在与实施例1相同条件下制备单壁碳纳米管,Co生长的碳纳米管的形貌见图8(a),可见硅片表面生长了长而密的碳纳米管网络。如图8(b-c)所示,拉曼光谱分析其导电属性,发现碳纳米管的直径分布宽,金属性碳纳米管的含量约为35wt%,无导电属性的选择性。Using the Co nanoparticles prepared in the above comparative example as catalysts, single-walled carbon nanotubes were prepared under the same conditions as in Example 1. The morphology of the carbon nanotubes grown by Co is shown in Figure 8(a). dense carbon nanotube network. As shown in Figure 8(b-c), Raman spectroscopy analysis of its conductive properties shows that the diameter distribution of carbon nanotubes is wide, the content of metallic carbon nanotubes is about 35wt%, and there is no selectivity of conductive properties.

比较例2:CoRe催化剂生长单壁碳纳米管Comparative example 2: CoRe catalyst growth of single-walled carbon nanotubes

将旋涂嵌段共聚物(PS50000-b-P4VP13000)的薄膜浸渍于摩尔浓度为0.25mM K3[Co(CN)6]+摩尔浓度为0.25mM NaReO4溶液中,热处理条件相同,得到的CoRe纳米颗粒的直径范围为0.5~4.5nm,其平均粒径为2.9nm,Co与Re元素的原子含量比为1:1,颗粒的平均尺寸和直径分布范围比CoRe4大,比Co颗粒的直径小,为HCP结构。The thin film of the spin-coated block copolymer (PS50000-b-P4VP13000) was immersed in a solution with a molar concentration of 0.25 mM K 3 [Co(CN) 6 ] + a molar concentration of 0.25 mM NaReO 4 , and the heat treatment conditions were the same to obtain CoRe The diameter of the nanoparticles ranges from 0.5 to 4.5 nm, the average particle size is 2.9 nm, and the atomic content ratio of Co and Re elements is 1:1. Small, HCP structure.

以上述比较例制备的CoRe1纳米颗粒作为催化剂,在与实施例(1)的相同条件下制备单壁碳纳米管其扫描和拉曼见图8(d-f)。多波长拉曼表征表明,金属性单壁碳纳米管含量约为50wt%。Using the CoRe 1 nanoparticles prepared in the above comparative example as a catalyst, single-walled carbon nanotubes were prepared under the same conditions as in Example (1). The scan and Raman are shown in Figure 8(df). The multi-wavelength Raman characterization showed that the content of metallic SWCNTs was about 50wt%.

比较例3:动力学条件控制——温度Comparative Example 3: Kinetic Condition Control - Temperature

以实施例1所制备的CoRex纳米颗粒为催化剂,通过提高实施例1中的生长温度,研究温度对碳纳米管生长的影响,当温度低于实施例1温度时,获得碳纳米管的量很少。随着温度提高,碳纳米管的密度、长度和生长速率均有比较明显的提高,碳纳米管的直径和导电属性分布范围变宽。也证实了实施例1的温度条件,利于窄直径和金属性碳纳米管的控制生长。Using the CoRex nanoparticles prepared in Example 1 as a catalyst, by increasing the growth temperature in Example 1, the effect of temperature on the growth of carbon nanotubes was studied. When the temperature was lower than the temperature in Example 1, the amount of carbon nanotubes was obtained. rare. With the increase of temperature, the density, length and growth rate of carbon nanotubes increased significantly, and the distribution range of diameter and conductive properties of carbon nanotubes became wider. It is also confirmed that the temperature conditions of Example 1 are favorable for the controlled growth of narrow diameter and metallic carbon nanotubes.

比较例4:动力学条件控制——碳源浓度Comparative Example 4: Kinetic Condition Control - Carbon Source Concentration

以实施例1所制备的CoRex纳米颗粒为催化剂,通过提高实施例1中生长碳源浓度,研究碳源浓度对碳纳米管生长的影响。结果表明随着碳源浓度的提高,碳纳米管的密度、长度和生长速率均有比较明显的提高,碳纳米管的直径和导电属性分布范围变宽。当碳源浓度过高时,催化剂因碳过饱和而失活,生长碳纳米管的能力降低。这进一步证实实施例1采用的碳源浓度,适于窄直径分布和金属性碳纳米管的控制生长。Using the CoRe x nanoparticles prepared in Example 1 as a catalyst, the effect of the carbon source concentration on the growth of carbon nanotubes was studied by increasing the growth carbon source concentration in Example 1. The results show that with the increase of carbon source concentration, the density, length and growth rate of carbon nanotubes are significantly improved, and the distribution range of diameter and conductivity properties of carbon nanotubes is broadened. When the carbon source concentration is too high, the catalyst is deactivated due to carbon supersaturation, and the ability to grow carbon nanotubes is reduced. This further confirms that the carbon source concentration used in Example 1 is suitable for narrow diameter distribution and controlled growth of metallic carbon nanotubes.

比较例5:动力学条件控制——氢气流速对碳纳米管生长形貌和结构的影响Comparative Example 5: Control of Kinetic Conditions—Influence of Hydrogen Flow Rate on Growth Morphology and Structure of Carbon Nanotubes

以实施例1所制备的CoRex纳米颗粒为催化剂,通过改变实施例1中H2浓度,研究氢气浓度对碳纳米管生长的影响。对所制备单壁碳纳米管进行扫描电镜形貌和多波长拉曼光谱表征发现,在无氢气条件下,碳源的分解能力很强,生长的碳纳米管密度较高、长度较长,拉曼光谱表征表明直径分布范围变宽且无导电属性选择;当H2的流量增至大于6sccm时,氢气对碳源分解的抑制作用增强,碳纳米管的生长速率减小,小直径的金属性碳纳米管被刻蚀,碳纳米管的直径向大直径方向移动。这进一步证实实施例1的合适氢气浓度,利于窄直径和金属性碳纳米管的控制生长。The CoRex nanoparticles prepared in Example 1 were used as catalysts to study the effect of hydrogen concentration on the growth of carbon nanotubes by changing the H2 concentration in Example 1. The characterization of the prepared single-walled carbon nanotubes by scanning electron microscopy and multi-wavelength Raman spectroscopy shows that under the condition of no hydrogen, the decomposition ability of the carbon source is very strong, and the grown carbon nanotubes have a higher density, longer length, and higher tensile strength. Mann spectroscopic characterization shows that the diameter distribution range is widened and there is no choice of conductive properties; when the flow rate of H2 increases to more than 6 sccm, the inhibition effect of hydrogen on the decomposition of carbon source is enhanced, the growth rate of carbon nanotubes is reduced, and the metallicity of small diameters is increased. The carbon nanotubes are etched, and the diameter of the carbon nanotubes is shifted toward the larger diameter. This further confirms that the suitable hydrogen concentration of Example 1 is beneficial for the controlled growth of narrow diameter and metallic carbon nanotubes.

实施例和比较例结果表明,较高的Re含量、相对较低的生长温度、较低的碳源浓度、氢气浓度和低的流速,利于金属性碳纳米管的富集生长。本发明实现了双金属高熔点催化剂纳米颗粒的尺寸、成分和结构的控制,解决了催化剂高温团聚的问题;直接生长出高纯度金属性富集的单壁碳纳米管,方法简单,适用性强;所制备的金属性单壁碳纳米管直径分布窄;阐明了影响金属性碳纳米管生长的主要因素及其生长机制,为纳米碳材料的可控生长提供新思路。提高了对金属性单壁碳纳米管结构控制的精度,为探索特定结构金属性单壁碳纳米管的应用奠定材料基础。本发明并不局限于上述的实施例和比较例,涉及在本发明思路下,本领域工程技术人员对本方案做出的各种变型及改进,均应属于本发明权利要求的保护。The results of Examples and Comparative Examples show that higher Re content, relatively lower growth temperature, lower carbon source concentration, hydrogen concentration and low flow rate are beneficial to the enrichment growth of metallic carbon nanotubes. The invention realizes the control of the size, composition and structure of the bimetallic high melting point catalyst nano-particles, solves the problem of catalyst agglomeration at high temperature; directly grows high-purity metallic-enriched single-wall carbon nanotubes, the method is simple and the applicability is strong ; The diameter distribution of the prepared metallic single-walled carbon nanotubes is narrow; the main factors affecting the growth of metallic carbon nanotubes and the growth mechanism are clarified, which provides a new idea for the controllable growth of nanocarbon materials. The precision of structural control of metallic single-walled carbon nanotubes is improved, and a material foundation is laid for exploring the application of metallic single-walled carbon nanotubes with specific structures. The present invention is not limited to the above-mentioned embodiments and comparative examples, and involves various modifications and improvements made by engineers and technicians in the field to this scheme under the idea of the present invention, which shall belong to the protection of the claims of the present invention.

Claims (8)

1.一种窄直径分布、高纯度金属性单壁碳纳米管的制备方法,其特征在于,利用嵌段共聚物自组装法可控制备尺寸均一的催化剂纳米颗粒,通过设计催化剂的成分并调控其氧化、还原条件,获得尺寸均一、单分散、密排六方结构、高熔点的双金属固溶体纳米颗粒,为单壁碳纳米管的形核和生长提供热力学基础;再通过控制低温、低碳源、低氢气和低载气流速的动力学反应条件实现准静态化学气相沉积过程,直接生长直径为1.1±0.3nm、含量75~85wt%的金属性单壁碳纳米管,具体包括以下步骤:1. a kind of preparation method of narrow diameter distribution, high-purity metallic single-walled carbon nanotubes, it is characterized in that, utilizes block copolymer self-assembly method to controllably prepare the catalyst nanoparticles of uniform size, by designing the composition of catalyst and regulating and controlling Its oxidation and reduction conditions can obtain bimetallic solid solution nanoparticles with uniform size, monodispersion, close-packed hexagonal structure and high melting point, which provide a thermodynamic basis for the nucleation and growth of single-walled carbon nanotubes. , the kinetic reaction conditions of low hydrogen and low carrier gas flow rate to realize the quasi-static chemical vapor deposition process, and the direct growth of metallic single-wall carbon nanotubes with a diameter of 1.1±0.3nm and a content of 75-85wt% includes the following steps: (1)嵌段共聚物胶束薄膜的制备:先将硅片基底浸泡于食人鱼溶液中清洗和亲水处理,再进行氧等离子体处理,随后旋涂嵌段共聚物胶束溶液,形成嵌段共聚物胶束薄膜;(1) Preparation of block copolymer micelle film: first, the silicon wafer substrate was immersed in piranha solution for cleaning and hydrophilic treatment, then oxygen plasma treatment was performed, and then the block copolymer micelle solution was spin-coated to form a block copolymer. segmented copolymer micelle film; (2)催化剂纳米团簇的制备:将表面覆盖胶束薄膜的基片浸渍于NaReO4和K3[Co(CN)6]催化剂前驱体盐溶液中,吸附两种金属阴离子ReO4 -和[Co(CN)6]3-组装成为纳米团簇;通过调节溶液中两种催化剂前驱体的浓度,实现对团簇成分的控制;(2) Preparation of catalyst nanoclusters: The substrate covered with micellar film was immersed in NaReO 4 and K 3 [Co(CN) 6 ] catalyst precursor salt solution to adsorb two metal anions ReO 4 - and [ Co(CN) 6 ] 3- assembles into nanoclusters; by adjusting the concentration of the two catalyst precursors in the solution, the control of the cluster composition is realized; (3)催化剂纳米颗粒的制备:对催化剂纳米团簇先后进行高温氧化、氢气和氩气混合气体还原处理,得到CoRex固溶体纳米颗粒;其工艺参数如下:高温氧化为700~750℃氧化1~5min,通入500~800sccm氩气1~5min,切换为75~250sccm Ar和5~40sccm H2的混合气体,还原2~5min;(3) Preparation of catalyst nanoparticles: The catalyst nanoclusters are subjected to high temperature oxidation and hydrogen and argon mixed gas reduction treatment successively to obtain CoRe x solid solution nanoparticles; the process parameters are as follows: high temperature oxidation is 700 ~ 750 ℃ oxidation 1 ~ 5min, pass 500~800sccm argon gas for 1~5min, switch to the mixed gas of 75~250sccm Ar and 5~40sccm H 2 , and reduce for 2~5min; (4)单壁碳纳米管的制备:以CoRex纳米颗粒为催化剂,在低温、低碳源、低氢气和低流速的准静态化学气相沉积条件下,直接生长窄直径分布、金属性占优的单壁碳纳米管;其工艺参数如下:以30~40sccm氩气载入乙醇分子作为碳源,2~15sccm H2作为纳米颗粒还原和碳纳米管生长时控制生长速率的刻蚀性气体,75~115sccm的Ar调节气体的流速、碳源和氢气的浓度,气体总流量保持在115~200sccm,进行化学气相沉积生长单壁碳纳米管,生长时间为1~10min。(4) Preparation of single-walled carbon nanotubes: using CoRex nanoparticles as catalysts, under the conditions of quasi-static chemical vapor deposition at low temperature, low carbon source, low hydrogen and low flow rate, the direct growth of narrow diameter distribution and dominant metallicity The process parameters are as follows: 30-40 sccm argon is loaded with ethanol molecules as the carbon source, 2-15 sccm H 2 is used as an etchant gas to control the growth rate during nanoparticle reduction and carbon nanotube growth, Ar of 75-115 sccm adjusts the gas flow rate, carbon source and hydrogen concentration, the total gas flow is maintained at 115-200 sccm, and chemical vapor deposition is performed to grow single-walled carbon nanotubes, and the growth time is 1-10 min. 2.按照权利要求1所述的窄直径分布、高纯度金属性单壁碳纳米管的制备方法,其特征在于,催化剂和单壁碳纳米管的结构表征:利用原子力显微镜测量并统计催化剂纳米颗粒的直径和密度,透射电子显微镜表征催化剂的晶体结构和成分分布;利用扫描电子显微镜测量并统计单壁碳纳米管的密度和长度,利用透射电子显微镜测量单壁碳纳米管直径并统计其分布,利用多波长拉曼光谱估算金属性单壁碳纳米管的纯度。2. according to the preparation method of narrow diameter distribution, high-purity metallic single-walled carbon nanotubes according to claim 1, it is characterized in that, the structural characterization of catalyst and single-walled carbon nanotubes: utilize atomic force microscope to measure and count catalyst nanoparticles The crystal structure and composition distribution of the catalyst were characterized by transmission electron microscopy; the density and length of single-walled carbon nanotubes were measured and counted by scanning electron microscopy, and the diameter of single-walled carbon nanotubes was measured by transmission electron microscopy and its distribution was counted, Estimation of the purity of metallic single-walled carbon nanotubes using multi-wavelength Raman spectroscopy. 3.按照权利要求1所述的窄直径分布、高纯度金属性单壁碳纳米管的制备方法,其特征在于,所制备的催化剂结构为密排六方的CoRex固溶体颗粒,颗粒尺寸分布在1.5~3.5nm范围内,Co和Re的原子比例为1:1~1:9,由合金相图知熔点在2000℃以上,为高熔点催化剂。3. according to the preparation method of narrow diameter distribution, high-purity metallic single-walled carbon nanotubes according to claim 1, it is characterized in that, prepared catalyst structure is the CoRex solid solution particle of close-packed hexagonal, and particle size is distributed in 1.5 Within the range of ~3.5nm, the atomic ratio of Co and Re is 1:1 to 1:9, and the melting point is above 2000 ℃ from the alloy phase diagram, which is a high melting point catalyst. 4.按照权利要求1所述的窄直径分布、高纯度金属性单壁碳纳米管的制备方法,其特征在于,所生长的单壁碳纳米管长度为1~10μm。4 . The method for preparing metallic single-walled carbon nanotubes with narrow diameter distribution and high purity according to claim 1 , wherein the grown single-walled carbon nanotubes have a length of 1-10 μm. 5 . 5.按照权利要求1所述的窄直径分布、高纯度金属性单壁碳纳米管的制备方法,其特征在于,通过调控热力学形核条件和动力学生长条件,包含催化剂成分、尺寸、结构,以及生长温度、碳源、氢气浓度和流速,来调控单壁碳纳米管的直径和导电属性。5. according to the preparation method of narrow diameter distribution, high-purity metallic single-walled carbon nanotubes according to claim 1, it is characterized in that, by regulating and controlling thermodynamic nucleation condition and kinetic growth condition, comprise catalyst composition, size, structure, As well as growth temperature, carbon source, hydrogen concentration and flow rate, the diameter and conductivity properties of single-walled carbon nanotubes can be regulated. 6.按照权利要求1所述的窄直径分布、高纯度金属性单壁碳纳米管的制备方法,其特征在于,步骤(1)中,嵌段共聚物胶束溶液采用浓度为0.01~0.25wt%聚苯乙烯-b-聚(4-乙烯基吡啶)嵌段共聚物的甲苯及四氢呋喃溶液,甲苯与四氢呋喃的质量比2~4:1,嵌段共聚物胶束高度为6~15nm。6. The preparation method of narrow diameter distribution and high-purity metallic single-walled carbon nanotubes according to claim 1, wherein in step (1), the concentration of the block copolymer micelle solution is 0.01 to 0.25wt wt % polystyrene-b-poly(4-vinylpyridine) block copolymer in toluene and tetrahydrofuran solution, the mass ratio of toluene and tetrahydrofuran is 2-4:1, and the block copolymer micelle height is 6-15nm. 7.按照权利要求1所述的窄直径分布、高纯度金属性单壁碳纳米管的制备方法,其特征在于,步骤(2)中,NaReO4和K3[Co(CN)6]催化剂前驱体盐溶液为摩尔浓度0.01~1M的盐酸溶液,NaReO4和K3[Co(CN)6]的摩尔比为x:(0.5-x),x=0.1~0.3。7. The preparation method of narrow diameter distribution, high-purity metallic single-walled carbon nanotubes according to claim 1, characterized in that, in step (2), NaReO 4 and K 3 [Co(CN) 6 ] catalyst precursors The body salt solution is a hydrochloric acid solution with a molar concentration of 0.01-1 M, the molar ratio of NaReO 4 and K 3 [Co(CN) 6 ] is x: (0.5-x), and x=0.1-0.3. 8.按照权利要求1所述的窄直径分布、高纯度金属性单壁碳纳米管的制备方法,其特征在于,步骤(3)中,CoRex固溶体纳米颗粒的粒度为0.5~3.5nm。8 . The method for preparing metallic single-walled carbon nanotubes with narrow diameter distribution and high purity according to claim 1 , wherein in step (3), the particle size of the CoRex solid solution nanoparticles is 0.5-3.5 nm. 9 .
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