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CN111900939A - A monolithic low-noise amplifier with externally matched input port for liquid helium temperature region - Google Patents

A monolithic low-noise amplifier with externally matched input port for liquid helium temperature region Download PDF

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CN111900939A
CN111900939A CN202010882661.7A CN202010882661A CN111900939A CN 111900939 A CN111900939 A CN 111900939A CN 202010882661 A CN202010882661 A CN 202010882661A CN 111900939 A CN111900939 A CN 111900939A
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CN111900939B (en
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何川
王生旺
王自力
张�诚
刘盼盼
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China Electronics Technology Group Corp No 16 Institute
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Abstract

本发明涉及一种用于液氦温区输入端口可外匹配的单片低噪声放大器,包括输入端匹配电路、宽频带的单片低噪声放大电路。输入端匹配电路与单片低噪声放大电路级联,主要通过电容C1、C2,电感L1和电阻R1对单片放大电路输入端口进行匹配进而优化放大器的噪声和端口回波损耗等性能;单片低噪声放大电路包括三级应变高电子迁移率晶体管、匹配电路和偏置电路组成。通过采用本发明公开的低噪声放大器,能够稳定用于超低温的液氦温区,在2GHz~15GHz的宽频带范围内,增益大于32dB,噪声温度小于10K,通过改变外输入端匹配电路可以实现更为优异的窄带性能,器件具有噪声低、体积小、匹配方便等特点,能够应用于深空探测、射电天文等领域的接收系统中。

Figure 202010882661

The invention relates to a single-chip low-noise amplifier for externally matching input ports in a liquid helium temperature zone, comprising an input-end matching circuit and a wide-band single-chip low-noise amplifier circuit. The input end matching circuit is cascaded with the monolithic low-noise amplifier circuit, and the input port of the monolithic amplifier circuit is matched mainly through capacitors C1, C2, inductance L1 and resistor R1 to optimize the noise and port return loss performance of the amplifier; monolithic The low-noise amplifying circuit consists of three-stage strain high electron mobility transistor, matching circuit and bias circuit. By using the low-noise amplifier disclosed in the present invention, the liquid helium temperature region of ultra-low temperature can be stably used. In the wide frequency range of 2GHz to 15GHz, the gain is greater than 32dB, and the noise temperature is less than 10K. For excellent narrowband performance, the device has the characteristics of low noise, small size, and convenient matching, and can be used in receiving systems in the fields of deep space exploration and radio astronomy.

Figure 202010882661

Description

一种用于液氦温区输入端口可外匹配的单片低噪声放大器A monolithic low-noise amplifier with externally matched input port for liquid helium temperature region

技术领域technical field

本发明涉及微波器件技术领域,具体涉及一种用于液氦温区输入端口可外匹配的单片低噪声放大器。The invention relates to the technical field of microwave devices, in particular to a single-chip low-noise amplifier with externally matched input ports in a liquid helium temperature region.

背景技术Background technique

接收机系统的灵敏度被系统噪声所限制,而系统噪声由使用器件噪声与环境背景噪声共同决定,在一般的微波接收系统中对噪声指标的要求不是很高,常规的微波放大器就能够满足其需求,但是对于射电天文、深空探测以及低温物理等系统,其接收信号的背景噪声仅有几K,这情况就对系统本身的噪声要求是非常严格的,必须采用以超低温低噪声放大器为核心的致冷接收前端最大程度降低器件产生的噪声,才能发挥接收机系统的最佳性能。The sensitivity of the receiver system is limited by the system noise, and the system noise is determined by the noise of the device used and the background noise of the environment. In general microwave receiving systems, the requirements for noise indicators are not very high, and conventional microwave amplifiers can meet their needs. , but for systems such as radio astronomy, deep space exploration, and low-temperature physics, the background noise of the received signal is only a few K. In this case, the noise requirements of the system itself are very strict, and ultra-low temperature low-noise amplifiers must be used. The best performance of the receiver system can be achieved by cooling the receiving front end to minimize the noise generated by the device.

应变高电子迁移率晶体管(mHEMT)具有最优异的噪声和卓越的高频特性,在较低漏极电压时就能获得很高的载流子速度,此外在超低温度下由于量子阱势能变大激发出电子所需要的能量必然要高于常温,而mHEMT技术在超低温下电子迁移时能够不遭受载流子冻析效应的影响,在液氦(-269℃左右)温区下仅需要略微提升一点栅极电压就能确保器件的正常工作。Strained High Electron Mobility Transistors (mHEMTs) have the best noise and excellent high frequency characteristics, high carrier velocities can be obtained at lower drain voltages, and at ultra-low temperatures due to the large quantum well potential The energy required to excite electrons must be higher than normal temperature, and the mHEMT technology can not suffer from the carrier freezing effect during electron migration at ultra-low temperature, and only needs a slight increase in the temperature region of liquid helium (about -269 °C). A little gate voltage can ensure proper operation of the device.

噪声性能是低噪声放大器最为关注的指标,由输入端电路与第一级mHEMT器件的噪声阻抗匹配性决定,常规单片低噪声放大器的匹配电路与其他电路一起集成至片上,在液氦温区工作出现工作频带漂移时无法调试,甚至更为严重出现自激振荡。本发明正是基于mHEMT器件的低温特性和单片电路的特点设计了一种用于液氦温区输入端口可外匹配的单片低噪声放大器。Noise performance is the most concerned indicator of low-noise amplifiers, which is determined by the noise impedance matching between the input circuit and the first-stage mHEMT device. The matching circuit of conventional monolithic low-noise amplifiers is integrated with other circuits on the chip. It cannot be debugged when the working frequency band drifts, and even more serious self-oscillation occurs. The invention designs a single-chip low-noise amplifier with external matching for the input port of the liquid helium temperature region based on the low-temperature characteristics of the mHEMT device and the characteristics of the single-chip circuit.

发明内容SUMMARY OF THE INVENTION

本发明提出的一种用于液氦温区输入端口可外匹配的单片低噪声放大器,可解决射电天文、深空探测以及低温物理等领域对宽带低噪声放大器的需求,同时输入端的外匹配电路可以根据实际使用频段做优化调整,最大程度的扩展放大器使用范围。The invention proposes a single-chip low-noise amplifier with external matching for the input port of the liquid helium temperature region, which can meet the needs of the fields of radio astronomy, deep space exploration and low-temperature physics for broadband low-noise amplifiers. The circuit can be optimized and adjusted according to the actual frequency band used to maximize the use range of the amplifier.

为实现上述目的,本发明采用了以下技术方案:To achieve the above object, the present invention has adopted the following technical solutions:

一种用于液氦温区输入端口可外匹配的单片低噪声放大器包括输入端匹配电路、单片低噪声放大电路,所述输入端匹配电路与单片低噪声放大电路级联;A single-chip low-noise amplifier for externally matching input ports in a liquid helium temperature region comprises an input-end matching circuit and a single-chip low-noise amplifying circuit, wherein the input-end matching circuit is cascaded with the single-chip low-noise amplifying circuit;

其中,所述输入端匹配电路包括通过电容C1、电容C2,电感L1、电阻R1、微带线TL7、微带线TL8和栅极偏置电路,微带线TL8和单片电路PAD1通过一条直径25μm长度350μm至400μm的金丝连接。可以对单片放大电路输入端口进行匹配,进而优化放大器的噪声和端口回波损耗等性能,也有利于液氦环境中电路性能的优化调试。Wherein, the input end matching circuit includes a capacitor C1, a capacitor C2, an inductor L1, a resistor R1, a microstrip line TL7, a microstrip line TL8 and a gate bias circuit, and the microstrip line TL8 and the monolithic circuit PAD1 pass through a diameter 25μm length 350μm to 400μm gold wire connection. The input port of the monolithic amplifier circuit can be matched to optimize the performance of the amplifier's noise and port return loss, which is also conducive to the optimization and debugging of the circuit performance in the liquid helium environment.

进一步的,所述单片低噪声放大电路包括第一级mHEMT管T1,第二级mHEMT管T2,第三级mHEMT管T3,第一级mHEMT管T1的栅极通过PAD1连接输入端匹配电路,源极通过微带线TL1和TL2接地,漏极通过级间匹配电路与第二级mHEMT管T2连接,第二级mHEMT管T2的源极通过微带线TL3和TL4接地,漏极通过级间匹配电路与第三级mHEMT管T3连接,第三级mHEMT管T3的栅极连接输入端匹配电路,源极通过微带线TL5和TL6接地,漏极通过输出匹配电路与输出端口PAD2连接。其中TL1~TL6提升电路的稳定性,TL7和TL8为50Ω阻抗的微带传输线,单片低噪声放大电路采用130nm工艺,由于三级mHEMT管T1、T2、T3的常温微波性能与偏置工作点具有较大差异,在设计时使用超低温微波探针台提取mHEMT管在液氦温区的散射参数(S参数)与直流参数,同时通过测试夹具提取了电阻、电容、电感等无源器件液氦温区的S参数,并建立mHEMT管和无源器件液氦温区的模型电路应用于低噪声单片电路的仿真设计,提高单片放大器的设计效率。Further, the monolithic low-noise amplifier circuit includes a first stage mHEMT transistor T1, a second stage mHEMT tube T2, a third stage mHEMT tube T3, and the gate of the first stage mHEMT tube T1 is connected to the input end matching circuit through PAD1, The source is grounded through the microstrip lines TL1 and TL2, and the drain is connected to the second-stage mHEMT transistor T2 through an inter-stage matching circuit. The matching circuit is connected to the third stage mHEMT transistor T3, the gate of the third stage mHEMT tube T3 is connected to the input matching circuit, the source is grounded through the microstrip lines TL5 and TL6, and the drain is connected to the output port PAD2 through the output matching circuit. Among them, TL1~TL6 improve the stability of the circuit, TL7 and TL8 are microstrip transmission lines with 50Ω impedance, and the monolithic low-noise amplifier circuit adopts 130nm process. There is a big difference. In the design, the ultra-low temperature microwave probe station was used to extract the scattering parameters (S parameters) and DC parameters of the mHEMT tube in the liquid helium temperature region. The S-parameters of the temperature region were established, and the model circuit of the mHEMT tube and the passive device liquid helium temperature region was established for the simulation design of the low-noise monolithic circuit to improve the design efficiency of the monolithic amplifier.

进一步的,所述第一级mHEMT管T1的栅宽为2×100μm,第二级mHEMT管T2栅宽为2×50μm,第三级mHEMT管T3栅宽为2×50μm。Further, the gate width of the first-stage mHEMT transistor T1 is 2×100 μm, the gate width of the second-stage mHEMT transistor T2 is 2×50 μm, and the gate width of the third-stage mHEMT transistor T3 is 2×50 μm.

进一步的,所述三级mHEMT管T1、T2、T3的栅极和漏极分别由B1~B6组成的偏置电路独立供电,mHEMT管的栅极与漏极分开供电有利于常温与液氦温区的调试与测试。Further, the gates and drains of the three-stage mHEMT tubes T1, T2, and T3 are independently powered by bias circuits composed of B1 to B6, and the gates and drains of the mHEMT tubes are powered separately, which is conducive to room temperature and liquid helium temperature. Area debugging and testing.

进一步的所述信号输入端口和信号输出端口可以接SMA、K型同轴连接器,也可以采用微带线与其它微波器件集成为多功能超低温微波组件。Further, the signal input port and the signal output port can be connected to SMA or K-type coaxial connectors, or a microstrip line can be used to integrate with other microwave devices to form a multifunctional ultra-low temperature microwave component.

由上述技术方案可知,本发明的一种用于液氦温区输入端口可外匹配的单片低噪声放大器主要是由输入端匹配电路、单片低噪声放大电路组成。单片低噪声放大电路确保放大器在宽频带范围内的增益、带内平坦度和噪声性能;外匹配电路可以对放大器的输入端口进行匹配,进而优化放大器的噪声和端口回波损耗等性能,并且通过优化设计为工作在液氦温区的窄带低噪声放大器。综上所述,本发明具有体积小、噪声温度低等特点,能够应用于深空探测、射电天文以及低温物理研究等对噪声性能有极致要求的接收系统。It can be known from the above technical solutions that a single-chip low-noise amplifier for externally matching input ports in a liquid helium temperature region of the present invention is mainly composed of an input-end matching circuit and a single-chip low-noise amplifier circuit. The monolithic low-noise amplifier circuit ensures the gain, in-band flatness and noise performance of the amplifier over a wide frequency range; the external matching circuit can match the input port of the amplifier to optimize the amplifier's performance such as noise and port return loss, and A narrow-band low-noise amplifier designed to work in the liquid helium temperature region. To sum up, the present invention has the characteristics of small size and low noise temperature, and can be applied to receiver systems with extreme requirements for noise performance, such as deep space exploration, radio astronomy, and low-temperature physics research.

附图说明Description of drawings

图1是本发明的电路示意图;Fig. 1 is the circuit schematic diagram of the present invention;

图2是本发明的增益测试结果图;Fig. 2 is the gain test result figure of the present invention;

图3是本发明的噪声温度测试结果图。FIG. 3 is a graph of the noise temperature test result of the present invention.

具体实施方式Detailed ways

为使本发明实施例的目的、技术方案和优点更加清楚,下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例是本发明一部分实施例,而不是全部的实施例。In order to make the purposes, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments These are some embodiments of the present invention, but not all embodiments.

本实施例提供一种用于液氦温区输入端口可外匹配的单片低噪声放大器,如图1所示,包括输入端匹配电路、单片低噪声放大电路,其中,输入端匹配电路与单片低噪声放大电路级联。This embodiment provides a single-chip low-noise amplifier for externally matching input ports in a liquid helium temperature region, as shown in FIG. 1 , including an input-end matching circuit and a single-chip low-noise amplifier circuit, wherein the input-end matching circuit and Monolithic low-noise amplifier circuits are cascaded.

具体的,所述输入端匹配电路包括通过电容C1、电容C2,电感L1、电阻R1、微带线TL7、微带线TL8和栅极偏置电路,微带线TL8和单片电路PAD1通过一条直径25μm长度350μm至400μm的金丝连接。可以对单片放大电路输入端口进行匹配,进而优化放大器的噪声和端口回波损耗等性能,也有利于液氦环境中电路性能的优化调试。Specifically, the input end matching circuit includes a capacitor C1, a capacitor C2, an inductor L1, a resistor R1, a microstrip line TL7, a microstrip line TL8 and a gate bias circuit. The microstrip line TL8 and the monolithic circuit PAD1 pass through a A gold wire connection with a diameter of 25 μm and a length of 350 μm to 400 μm. The input port of the monolithic amplifier circuit can be matched to optimize the performance of the amplifier's noise and port return loss, which is also conducive to the optimization and debugging of the circuit performance in the liquid helium environment.

所述单片低噪声放大电路包括第一级mHEMT管T1的栅宽为2×100μm,第二级mHEMT管T2栅宽为2×50μm,第三级mHEMT管T3栅宽为2×50μm。第一级mHEMT管T1的栅极通过PAD1连接输入端匹配电路,源极通过微带线TL1和TL2接地,漏极通过级间匹配电路与第二级mHEMT管T2连接,第二级mHEMT管T2的源极通过微带线TL3和TL4接地,漏极通过级间匹配电路与第三级mHEMT管T3连接,第三级mHEMT管T3的栅极连接输入端匹配电路,源极通过微带线TL5和TL6接地,漏极通过输出匹配电路与输出端口PAD2连接。其中TL1~TL6提升电路的稳定性,TL7和TL8为50Ω阻抗的微带传输线,单片低噪声放大电路采用130nm工艺,由于三级mHEMT管T1、T2、T3的常温微波性能与偏置工作点具有较大差异,在设计时使用超低温微波探针台提取mHEMT管在液氦温区的散射参数(S参数)与直流参数,同时通过测试夹具提取了电阻、电容、电感等无源器件液氦温区的S参数,并建立mHEMT管和无源器件液氦温区的模型电路应用于低噪声单片电路的仿真设计,提高单片放大器的设计效率。The monolithic low-noise amplifier circuit includes the gate width of the first-stage mHEMT transistor T1 is 2×100 μm, the gate width of the second-stage mHEMT transistor T2 is 2×50 μm, and the gate width of the third-stage mHEMT transistor T3 is 2×50 μm. The gate of the first-stage mHEMT transistor T1 is connected to the input matching circuit through PAD1, the source is grounded through the microstrip lines TL1 and TL2, and the drain is connected to the second-stage mHEMT transistor T2 through the inter-stage matching circuit, and the second-stage mHEMT transistor T2 The source is grounded through the microstrip lines TL3 and TL4, the drain is connected to the third stage mHEMT tube T3 through the inter-stage matching circuit, the gate of the third stage mHEMT tube T3 is connected to the input matching circuit, and the source is connected through the microstrip line TL5. And TL6 is grounded, and the drain is connected to the output port PAD2 through the output matching circuit. Among them, TL1~TL6 improve the stability of the circuit, TL7 and TL8 are microstrip transmission lines with 50Ω impedance, and the monolithic low-noise amplifier circuit adopts 130nm process. There is a big difference. In the design, the ultra-low temperature microwave probe station was used to extract the scattering parameters (S parameters) and DC parameters of the mHEMT tube in the liquid helium temperature region. The S-parameters of the temperature region were established, and the model circuit of the mHEMT tube and the passive device liquid helium temperature region was established for the simulation design of the low-noise monolithic circuit to improve the design efficiency of the monolithic amplifier.

所述三级mHEMT管T1、T2、T3的栅极和漏极分别由B1~B6组成的偏置电路独立供电,mHEMT管的栅极与漏极分开供电有利于常温与液氦温区的调试与测试,在液氦温区使用时根据实际情况三级mHEMT管的漏极电压和电流分别为:T1的漏极电压1.5V,电流8mA;T2的漏极电压1.2V,电流6mA;T3的漏极电压1.2V,电流6mA。The gates and drains of the three-stage mHEMT tubes T1, T2, and T3 are independently powered by bias circuits composed of B1 to B6, and the gates and drains of the mHEMT tubes are powered separately, which is conducive to debugging in normal temperature and liquid helium temperature regions. According to the actual situation, the drain voltage and current of the three-stage mHEMT tube are: T1 drain voltage 1.5V, current 8mA; T2 drain voltage 1.2V, current 6mA; T3 drain voltage 1.2V, current 6mA The drain voltage is 1.2V, and the current is 6mA.

所述信号输入端口可以接SMA、K型同轴连接器,也可以采用微带线连接其它微波器件。信号输出端口可以用2根直径25μm,长度小于300μm的金丝键合到SMA、K型同轴连接器,也可以金丝键合到微带线后再连接其它微波器件。The signal input port can be connected to an SMA or K-type coaxial connector, or a microstrip line can be used to connect other microwave devices. The signal output port can be bonded to SMA and K-type coaxial connectors with two gold wires with a diameter of 25 μm and a length of less than 300 μm, or can be bonded to a microstrip line and then connected to other microwave devices.

本发明实施例提供的一种用于液氦温区输入端口可外匹配的单片低噪声放大器中内部元器件的型号可根据实际情况来选择,示例性的,输入端匹配电路电容元件可以选用芯片电容,电容C1值为12pF,电容C2值为33pF;电感元件为空芯线圈电感,电感L1值为39nH;电阻元件可以选用芯片电阻,电阻R1值为20Ω;微带线TL7、微带线TL8的阻抗都为50Ω。单片低噪声放大电路采用130nm砷化镓GaAs基工艺,电路标准厚度为100μm。The model of the internal components in the monolithic low-noise amplifier for external matching of the input port of the liquid helium temperature region provided by the embodiment of the present invention can be selected according to the actual situation. Exemplarily, the capacitive element of the input end matching circuit can be selected Chip capacitor, the value of capacitor C1 is 12pF, and the value of capacitor C2 is 33pF; the inductance element is an air-core coil inductance, and the value of inductance L1 is 39nH; the resistance element can be a chip resistor, and the value of R1 is 20Ω; microstrip line TL7, microstrip line The impedance of TL8 is all 50Ω. The monolithic low-noise amplifier circuit adopts 130nm gallium arsenide GaAs-based process, and the standard thickness of the circuit is 100μm.

本发明实施例提供的一种用于液氦温区输入端口可外匹配的单片低噪声放大器设计的工作区间可以为2GHz~15GHz,测试时校准仪器后将放大器安装在低温杜瓦内,密封、抽空后制冷,当器件工作温度降液氦温区时,继续保温1小时,用矢量网络分析仪测试器件的增益,实测曲线如图2所示;使用高精度噪声测试平台测试器件的噪声温度,实测曲线如图3所示,从图2,3中可以看出器件的增益大于32dB,噪声温度小于10K。The working range of a single-chip low-noise amplifier designed for externally matching input ports in a liquid helium temperature region provided by the embodiment of the present invention can be 2 GHz to 15 GHz. After calibrating the instrument during testing, the amplifier is installed in a low-temperature dewar, and sealed , Refrigerate after evacuating. When the working temperature of the device drops to the helium temperature region, continue to keep warm for 1 hour. Use a vector network analyzer to test the gain of the device. The measured curve is shown in Figure 2. Use a high-precision noise test platform to test the noise temperature of the device. , the measured curve is shown in Figure 3. From Figures 2 and 3, it can be seen that the gain of the device is greater than 32dB, and the noise temperature is less than 10K.

以上实施例仅用以说明本发明的技术方案,而非对其限制;尽管参照前述实施例对本发明进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本发明各实施例技术方案的精神和范围。The above embodiments are only used to illustrate the technical solutions of the present invention, but not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: The recorded technical solutions are modified, or some technical features thereof are equivalently replaced; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims (6)

1. A monolithic low noise amplifier for external matching of an input port of a liquid helium temperature zone is characterized in that:
the broadband low-noise amplifier comprises an input end matching circuit and a broadband monolithic low-noise amplifying circuit which can work at 269 ℃ below zero, wherein the input end matching circuit is cascaded with the broadband monolithic low-noise amplifying circuit;
the input end matching circuit comprises a capacitor C1, a capacitor C2, an inductor L1, a resistor R1, a microstrip line TL7, a microstrip line TL8 and a gate bias circuit, wherein the microstrip line TL8 and the single chip PAD1 are connected through a gold wire with the diameter of 25 mu m and the length of 350 mu m to 400 mu m.
2. The monolithic low noise amplifier for external matching of an input port of a liquid helium temperature zone of claim 1, wherein: the broadband monolithic low-noise amplification circuit comprises a first-stage mHEMT tube T1, a second-stage mHEMT tube T2 and a third-stage mHEMT tube T3, the grid of the first-stage mHEMT tube T1 is connected with an input end matching circuit through a PAD1, the source is grounded through microstrip lines TL1 and TL2, the drain is connected with the second-stage mHEMT tube T2 through an interstage matching circuit, the source of the second-stage mHEMT tube T2 is grounded through microstrip lines TL3 and TL4, the drain is connected with the third-stage mHEMT tube T3 through the interstage matching circuit, the grid of the third-stage mHEMT tube T3 is connected with the input end matching circuit, the source is grounded through microstrip lines TL5 and TL6, and the drain is connected with an output port PAD.
3. The monolithic low noise amplifier for external matching of an input port of a liquid helium temperature zone of claim 2, wherein: the grid width of the first-stage mHEMT tube T1 is 2 x 100 mu m, the grid width of the second-stage mHEMT tube T2 is 2 x 50 mu m, and the grid width of the third-stage mHEMT tube T3 is 2 x 50 mu m.
4. The monolithic low noise amplifier for external matching of an input port of a liquid helium temperature zone of claim 3, wherein: the grids and the drains of the three-stage mHEMT tubes T1, T2 and T3 are independently powered by a bias circuit consisting of B1-B6.
5. The monolithic low noise amplifier for external matching of an input port of a liquid helium temperature zone of claim 4, wherein:
the capacitance element of the input end matching circuit is a chip capacitor, the value of the capacitor C1 is 12pF, and the value of the capacitor C2 is 33 pF;
the inductance element of the input end matching circuit is an air-core coil inductance, and the value of the inductance L1 is 39 nH;
the resistor element of the input end matching circuit is a chip resistor, and the value of the resistor R1 is 20 omega; the impedances of the microstrip line TL7 and the microstrip line TL8 are both 50 Ω.
6. The monolithic low noise amplifier for external matching of an input port of a liquid helium temperature zone of claim 5, wherein:
the broadband monolithic low-noise amplification circuit adopts a 130nm gallium arsenide (GaAs) based process, and the standard thickness of the circuit is 100 mu m.
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