CN111854652A - Adsorption plate flatness detection device and detection method thereof - Google Patents
Adsorption plate flatness detection device and detection method thereof Download PDFInfo
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Abstract
The invention discloses a device and a method for detecting the flatness of an adsorption plate, comprising a base; the X-axis module is horizontally arranged along the direction of the base; the Y-axis module is used for detecting that the Y-axis module is vertically arranged on the X sliding block; the Z-axis module is connected with the Y-axis sliding plate; the detection module, it sets up on Z axle module to detect the module, detects the module and includes that grating chi, reading head are examined, the coordinate needle, and the coordinate is to just setting up the top at the adsorption plate. According to the detection device and the detection method for the flatness of the adsorption plate, the flatness of the adsorption plate can be accurately measured, the measurement precision is superior to that of manual measurement, and the problem of low production operation yield caused by low flatness of the adsorption plate is effectively solved.
Description
Technical Field
The invention relates to the technical field of semiconductor detection, in particular to a device and a method for detecting flatness of an adsorption plate.
Background
In the semiconductor industry, the operation of adsorbing and positioning a product to be processed and then processing the product is often adopted, for example, after adsorbing a substrate, the substrate dispensing processing is performed, generally, the adsorbing substrate needs an adsorbing plate, and the flatness of the adsorbing plate affects the precision of the substrate dispensing processing, so that a method capable of accurately judging the flatness of the adsorbing plate is urgently needed to screen the adsorbing plate with high flatness.
Disclosure of Invention
In view of this, the invention provides an apparatus and a method for detecting flatness of an adsorption plate, which can measure the flatness of the adsorption plate and avoid the problem of processing operation failure caused by the substandard flatness of the adsorption plate.
In order to solve the technical problems, the invention adopts the following technical scheme:
according to an embodiment of the first aspect of the invention, an adsorption plate flatness detection apparatus includes:
the base is consistent with the X-axis direction in a coordinate system;
the X-axis module comprises an X-axis track, an X-axis motor and an X sliding block; the X-axis track is arranged along the direction of the base; the X-axis motor drives the X sliding block to move along the X-axis track;
the Z-axis module comprises a Z-axis track, a Z-axis motor and a Z-axis sliding block; the Z-axis track is vertically arranged on the X slide block along the Z-axis direction in the coordinate system; the Z-axis motor drives the Z-axis slide block to move along the Z-axis track;
the Y-axis module comprises a Y-axis track, a Y-axis motor, a Y-axis sliding block and a Y-axis sliding plate; the detection Y-axis track is vertically arranged on the Z sliding block along the Y-axis direction in the coordinate system; the Y-axis motor drives the Y-axis sliding block to move along the Y-axis track;
the detection module is connected with the Y-axis sliding plate; the detection module comprises a grating detection ruler, a reading head and a coordinate needle, wherein the coordinate needle is arranged above the adsorption plate in an aligned mode.
Preferably, the device further comprises a controller connected to the motor.
Preferably, the detection module is provided with three grating scales, a first grating scale is arranged along the X-axis track, a second grating scale is arranged along the Z-axis track, and a third grating scale is arranged along the Y-axis track.
Preferably, the detection module is provided with three reading heads, a first reading head is used for reading the value of the first grating ruler, a second reading head is used for reading the value of the second grating ruler, and a third reading head is used for reading the value of the third grating ruler.
According to a second aspect of the present invention, a method for detecting flatness of a suction plate is applied to any one of the above suction plate flatness detection apparatuses, and the method includes:
step 1, placing an adsorption plate in a detection area, and moving an X-axis track, a Y-axis track and a Z-axis track to zero positions;
step 2, calibrating coordinates of four vertex angles of the adsorption plate on the X-axis track and the Y-axis track;
step 3, inputting X-axis and Y-axis coordinates of the four vertex angles into a controller, wherein the controller drives an X-axis module and a Y-axis module to respectively move to the four vertex angles of the adsorption plate along the X-axis track and the Y-axis track;
step 4, when the X-axis module and the Y-axis module move to the first vertex angle position of the adsorption plate, the Z-axis module moves vertically downwards to drive the detection module to move vertically downwards until a coordinate needle of the detection module is poked into the adsorption plate and a Z-axis motor of the Z-axis module continuously rises under resistance current, and the controller reads a current value triggered by the resistance of the Z-axis motor in real time;
step 5, comparing the current value read by the controller in the step 4 with a first threshold value, when the current value is greater than the first threshold value, judging that the measurement height of the first vertex angle is finished, and reading the Z-axis height value of the first vertex angle through the reading head;
and 6, repeating the steps, sequentially obtaining Z-axis height values of the rest three vertex angles of the adsorption plate, calculating the difference value of the Z-axis height values of the four vertex angles of the adsorption plate, and judging the leveling of the adsorption plate if the difference value is smaller than a second threshold value.
Preferably, the adsorption plate is disposed at an outer edge of the first edge of the base in the detection area and directly below the coordinate needle.
Preferably, the three axes of the X-axis track, the Y-axis track and the Z-axis track are zeroed by an optical sensor.
Preferably, in the step 4, the Z-axis module moves vertically downward in a speed loop mode.
Preferably, in step 2, the coordinates of the X axis and the Y axis of the four vertex angle positions are manually calibrated to be (X1, Y1), (X1, Y2), (X2, Y1), (X2, and Y2), respectively.
Preferably, the Z-axis motor is subjected to a continuous rise of the resistance current, and when the current value is greater than the first threshold value, the Z-axis motor stops moving.
The purpose of the invention is realized by adopting the following technical scheme:
according to the detection device and the detection method for the flatness of the adsorption plate, the flatness of the adsorption plate can be accurately measured, the measurement precision is superior to that of manual measurement, and the problem of low production operation yield caused by low flatness of the adsorption plate is effectively solved.
Drawings
Fig. 1 is a schematic structural diagram of an absorption plate flatness detecting apparatus according to an embodiment of the present invention;
fig. 2 is a schematic partial structure diagram of an absorption plate flatness detecting apparatus according to an embodiment of the present invention;
fig. 3 is a flowchart of a method for detecting the flatness of an adsorption plate according to an embodiment of the present invention.
Reference numerals:
100. a base;
200. an X-axis module; 210. an X-axis orbit; 220. an X-axis slider;
300. a Z-axis module; 310. a Z-axis track; 320. a Z-axis slide block;
400. a Y-axis module; 410. a Y-axis track; 420. a Y-axis slider; 430. a Y-axis slide plate;
500. a detection module; 510. a reading head; 520. a coordinate needle;
600. and (5) adsorbing the plate.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings of the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the invention, are within the scope of the invention.
Unless defined otherwise, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs. The use of "first," "second," and similar terms in the present application do not denote any order, quantity, or importance, but rather the terms are used to distinguish one element from another. Also, the use of the terms "a" or "an" and the like do not denote a limitation of quantity, but rather denote the presence of at least one. The terms "connected" or "coupled" and the like are not restricted to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships are changed accordingly.
First, a cleaning apparatus for a water-cooled heat shield according to an embodiment of the first aspect of the present invention will be described in detail with reference to the drawings.
As shown in fig. 1 and 2, the suction plate flatness detecting apparatus according to the embodiment of the first aspect of the present invention includes a base 100, an X-axis module 200, a Z-axis module 300, a Y-axis module 400, and a detecting module 500.
Specifically, the base 100 is aligned with the X-axis direction in the coordinate system, and the X-axis module 200 includes an X-axis rail 210, an X-axis motor (not shown), and an X slider 220; the X-axis rail 210 is disposed along the base 100; the X-axis motor drives the X-slider 220 to move along the X-axis track 210, the Z-axis module 300 includes a Z-axis track 310, a Z-axis motor (not shown), and a Z-axis slider 320, the Z-axis track 310 is vertically disposed on the X-slider 220 along the Z-axis direction in the coordinate system, and the Z-axis motor drives the Z-axis slider 320 to move along the Z-axis track 310. The Y-axis module 400 includes a Y-axis rail 410, a Y-axis motor (not shown), a Y-axis slider 420, and a Y-axis sled 430; the detection Y-axis rail 410 is vertically disposed on the Z slider 320 along the Y-axis direction in the coordinate system; the Y-axis motor drives the Y-axis slider 420 to move along the Y-axis track 410, and the detection module 500 is connected with the Y-axis sliding plate 430; the detection module 500 includes a grating ruler (not shown), a reading head 510, and a coordinate pin 520, wherein the coordinate pin 520 is aligned above the adsorption plate 600.
That is to say, X, Y, Z axle modules are arranged in the same coordinate system, so that the movement of the detection module 500 in a three-dimensional space is realized, the detection module can be moved to each position of the adsorption plate 600 according to actual needs, and the accuracy of detecting the flatness of the adsorption plate 600 is improved.
According to an embodiment of the present application, the apparatus further comprises a controller connected to the motor, whereby the controller can precisely control X, Y, Z the movement of the shaft module to a designated position, for example, X, Y, Z the shaft module moves along the X, Y, Z shaft rail 310 to four top corner positions of the suction plate 600.
According to an embodiment of this application, the motor is the bar motor, and the bar motor has the advantage that the size is little, can embed in X, Y, Z axle module, reduces the volume of whole device, has improved space utilization.
According to an embodiment of the present application, the detection module 500 is provided with three scales, wherein the three scales are respectively disposed corresponding to the X-axis, the Y-axis, and the Z-axis, the first scale is disposed along the X-axis track 210, the second scale is disposed along the Z-axis track 310, and the third scale is disposed along the Y-axis track 410.
According to an embodiment of the present application, the detection module 500 is provided with three reading heads 510, the first reading head 510 is configured to read a value of the first grating, the second reading head 510 is configured to read a value of the second grating, and the third reading head 510 is configured to read a value of the third grating, that is, when the X, Y, Z axis module moves to a specified position under the driving of the controller, the reading heads 510 read values of the corresponding X-axis, Y-axis, and Z-axis gratings, that is, obtain the current X, Y, Z axis coordinate of the specified position.
Therefore, according to the flatness detection device for the adsorption plate 600 in the embodiment of the present application, the coordinates of any point on the adsorption plate 600 to be detected can be obtained, wherein the running distances of the X, Y, Z axis module on the X-axis track 210, the Y-axis track 420, and the Z-axis track 310 can be obtained by reading the grating scale through the reading head 510, that is, the X, Y, Z axis coordinates of the position.
The method for detecting the flatness of the adsorption plate 600 according to the second embodiment of the present invention is applied to any one of the above apparatuses for detecting the flatness of the adsorption plate 600, as shown in fig. 3, and the method includes:
step S100, the adsorption plate 600 is placed in the detection area, and the X-axis rail 210, the Y-axis rail 410, and the Z-axis rail 310 are moved to zero positions. The optical sensor can be used for zeroing three axes of an X axis, a Y axis and a Z axis, when the X, Y, Z axis module moves to a zero point position along a track, light received by the optical sensor can be shielded, at the moment, the X, Y, Z axis module is considered to be zeroed, and the zeroing work of the X, Y, Z axis is completed.
Step S200, coordinates of the four vertex angles of the adsorption plate 600 on the X-axis track 210 and the Y-axis track 410 are calibrated, wherein the coordinates of the X-axis and the Y-axis at the four vertex angles are manually calibrated and are respectively identified as (X1, Y1), (X1, Y2), (X2, Y1), (X2, and Y2), and since the adsorption plate 600 is a standard rectangular solid, the coordinates of the four vertex angles of the adsorption plate 600 are manually calibrated twice on the X-axis coordinates and twice on the Y-axis coordinates, and the coordinates of the four vertex angles can be obtained by combining the coordinates of the four vertex angles.
In step S300, X, Y coordinates of the four corners are input to the controller, and the controller drives the X-axis module 200 and the Y-axis module 400 to move to the four corners of the adsorption plate 600 along the X-axis rail 210 and the Y-axis rail 410, respectively. The X-axis slider 220 drives the Z-axis module 300 to move along the X-axis direction, the Z-axis slider 320 drives the Y-axis module 400 to move along the Z-axis direction, the Y-axis slider 430 drives the detection module 500 to move, and finally, the detection module 500 can move to any three-dimensional coordinate point along the X-axis, the Y-axis and the Z-axis.
Step S400, when the X-axis module 200 and the Y-axis module 400 move to the first vertex angle position of the adsorption plate 600, the Z-axis module 300 vertically moves downwards to drive the detection module 500 to vertically move downwards until the coordinate needle 520 of the detection module 500 pokes the adsorption plate 600 and the Z-axis motor of the Z-axis module 300 continuously rises under the resistance current, and the controller reads the current value triggered by the resistance of the Z-axis motor in real time.
Step S500, comparing the current value read by the controller in step S4 with a first threshold, when the current value is greater than the first threshold, determining that the measurement height of the first vertex angle is completed, and reading a Z-axis height value of the first vertex angle through the reading head 510, which is identified by Z1.
Step S600, repeating steps 3 and 4 to sequentially obtain Z-axis height values of the remaining three vertex angles of the adsorption plate 600, respectively identified by Z2, Z3, and Z4, and calculating differences between the Z-axis height values of the four vertex angles of the adsorption plate 600, that is, if the differences between Z1, Z2, Z3, and Z4 are less than a second threshold, it is determined that the adsorption plate 600 is leveled, for example, the second threshold is set to 0.001mm, and when the differences in pairwise comparison among Z1, Z2, Z3, and Z4 are less than 0.001mm, it is determined that the flatness of the adsorption plate 600 meets the standard.
According to an embodiment of the present application, the suction plate 600 is disposed at the outer edge of the first edge of the base 100 in the detection area and directly below the coordinate needle 520420, wherein, in order to ensure accurate detection of the flatness of the suction plate 600, the suction plate 600 is disposed in a position strictly along the X, Y, Z axis direction in the coordinate system, that is, the first edge of the suction plate 600 is closely attached to the base 100 and is flush with the first edge of the base 100, that is, flush with the X axis, so that the coordinates of the suction plate 600 obtained by the detection module 500 are accurate.
According to an embodiment of the present application, in step 4, the Z-axis module 300 moves vertically downward in a speed loop mode, wherein the speed loop mode can reduce errors in the transmission process of the middle module, and increase the moving precision of the whole Z-axis module 300.
According to an embodiment of the present application, the Z-axis motor is continuously raised by the resistance current, when the current value is greater than the first threshold value, the Z-axis motor stops moving, that is, when the Z-axis module 300 vertically moves downward, the transmission moves downward for the detection module 500, the coordinate needle 520 sticks to the adsorption plate 600 and receives the resistance, in this time, the Z-axis module 300 also receives the resistance, the Z-axis motor is continuously raised by the resistance current, in order to avoid damaging the Z-axis motor, when the current value triggered by the resistance of the Z-axis motor is greater than the second threshold value, the motor is automatically powered off and stopped.
According to the detection device and the detection method for the flatness of the adsorption plate, the flatness of the adsorption plate can be accurately measured, the measurement precision is superior to that of manual measurement, and the problem of low production operation yield caused by low flatness of the adsorption plate is effectively solved.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. The utility model provides an adsorption plate flatness detecting device which characterized in that includes:
a base (100), the base (100) being coincident with an X-axis direction in a coordinate system;
the X-axis module (200), the X-axis module (200) comprises an X-axis track (210), an X-axis motor and an X sliding block (220); the X-axis track (210) is arranged along the direction of the base (100); the X-axis motor drives the X sliding block (220) to move along the X-axis track (210);
the Z-axis module (300) comprises a Z-axis track (310), a Z-axis motor and a Z-axis slider (320); the Z-axis track (310) is vertically arranged on the X slider (220) along the Z-axis direction in the coordinate system; the Z-axis motor drives the Z-axis slider (320) to move along the Z-axis track (310);
the Y-axis module (400), the Y-axis module (400) comprises a Y-axis track (410), a Y-axis motor, a Y-axis slider (420) and a Y-axis sliding plate (430); the detection Y-axis track (410) is vertically arranged on the Z slider (320) along the Y-axis direction in the coordinate system; the Y-axis motor drives the Y-axis slider (420) to move along the Y-axis track (410);
the detection module (500), the detection module (500) is connected with the Y-axis sliding plate (430); the detection module (500) comprises a grating detection ruler, a reading head (510) and a coordinate needle (520), wherein the coordinate needle (520) is aligned above the adsorption plate (600).
2. The device of claim 1, further comprising a controller coupled to the motor.
3. The apparatus of claim 1, wherein the detection module (500) is provided with three rasters, a first raster being disposed along the X-axis track (210), a second raster being disposed along the Z-axis track (310), and a third raster being disposed along the Y-axis track (410).
4. The device according to claim 1 or 3, characterized in that the detection module (500) is provided with three reading heads (510), a first reading head for reading the value of the first grating scale, a second reading head for reading the value of the second grating scale, and a third reading head for reading the value of the third grating scale.
5. A method for detecting flatness of an adsorption plate, which is applied to the adsorption plate flatness detection apparatus according to any one of claims 1 to 4, the method comprising:
step 1, placing an adsorption plate (600) in a detection area, and moving an X-axis track (210), a Y-axis track (410) and a Z-axis track (310) to zero positions;
step 2, calibrating coordinates of four vertex angles of the adsorption plate (600) on the X-axis track (210) and the Y-axis track (410);
step 3, inputting X, Y coordinates of the four vertex angles to a controller, wherein the controller drives an X-axis module (200) and a Y-axis module (400) to move to the four vertex angles of the adsorption plate (600) along the X-axis track (210) and the Y-axis track (410) respectively;
step 4, when the X-axis module (200) and the Y-axis module (400) move to the first vertex angle position of the adsorption plate (600), the Z-axis module (300) moves vertically downwards to drive the detection module (500) to move vertically downwards until a coordinate needle (520) of the detection module (500) pokes the adsorption plate (600) and a Z-axis motor of the Z-axis module (400) continuously rises under resistance current, and the controller reads a current value triggered by the resistance of the Z-axis motor in real time;
step 5, comparing the current value read by the controller in the step 4 with a first threshold value, when the current value is greater than the first threshold value, judging that the measurement height of the first vertex angle is finished, and reading the Z-axis height value of the first vertex angle through the reading head (420);
and 6, repeating the steps 3 and 4 to sequentially obtain the Z-axis height values of the rest three vertex angles of the adsorption plate (600), calculating the difference value of the Z-axis height values of the four vertex angles of the adsorption plate (600), and if the difference value is smaller than a second threshold value, judging that the adsorption plate (600) is leveled.
6. The apparatus of claim 5, wherein the suction plate (600) is disposed at an outer edge of the detection area at the first side of the base (100) and directly below the coordinate pin (420).
7. The method of claim 5, wherein the X-axis trajectory (210), Y-axis trajectory (410), Z-axis trajectory (310) are tri-axially zeroed by an optical sensor.
8. The method of claim 5, wherein in step 4, the Z-axis module (300) is moved vertically downward in a speed loop mode.
9. The method of claim 5, wherein in the step 2, the coordinates of the X axis and the Y axis for manually calibrating the four vertex angle positions are (X1, Y1), (X1, Y2), (X2, Y1), (X2, Y2), respectively.
10. The method of claim 4, wherein the Z-axis motor is subjected to a continuous increase in resistive current, and wherein the Z-axis motor stops when the current value is greater than the first threshold.
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