CN111834029A - A combined X-ray monochromatic convergence system - Google Patents

Abstract

The invention discloses a combined X-ray monochromatic converging system, comprising an X-ray generator and a plurality of focusing units, one of the focusing units includes a polycapillary X-ray parallel beam lens, a monochromator, a polycapillary X-ray connected in sequence a focuser; the X-ray generator is a point light source, and the point is used as a source to emit X-rays to the periphery; a plurality of polycapillary X-ray parallel beam lenses of the focusing unit are arranged on the optical path of the X-ray generator to radiate outward, The polycapillary X-ray concentrators of several of the focusing units have a converging final focus. The combined X-ray monochromatic converging system of the present invention can be provided with a plurality of focusing units through the X-ray light source with a large exit angle. The multiple focusing units finally have a converging micro-focus. Compared with other X-ray monochromatic focusing devices, it has the excellent performance of high X-ray utilization and higher brightness of the focused focal spot.

Description

A combined X-ray monochromatic convergence system

technical field

The invention relates to the technical field of optical regulation, in particular to a combined X-ray monochromatic focusing optical system.

Background technique

Since X-ray was discovered by German physicist W.K. Roentgen in 1895, it has been a powerful tool for people to explore the microscopic world, and has a wide range of applications in the fields of medical imaging, industrial inspection, physics, chemistry and biological analysis. In practical applications, the most commonly used X-rays are produced by X-ray tubes. The X-rays produced by the X-ray tube are polychromatic and divergent X-rays. However, in the field of X-ray spectroscopic analysis, especially in the field of micro-area X-ray analysis, a monochromatic focused X-ray beam is often required. At present, the most commonly used X-ray focusing monochromatic devices are X-ray multilayer films or curved crystal monochromators. Both X-ray multilayer films and curved crystal monochromators require sophisticated manufacturing techniques, so they are relatively expensive and difficult to popularize widely. The polycapillary X-ray lens is also a commonly used X-ray condensing device, and the cost is low, which is conducive to widespread promotion, but the polycapillary X-ray converging lens does not have a monochromatic effect.

SUMMARY OF THE INVENTION

The purpose of the present invention is to provide a combined X-ray monochromatic convergence system in view of the above problems. The system is capable of both monochromatic and converging divergent polychromatic X-rays produced by conventional experimental X-ray tubes. The system can improve the analytical performance of the X-ray micro-fluorescence analysis device and the improved device for samples. The system has low cost and is easy to popularize.

In order to achieve the above object, the technical scheme of the present invention is:

A combined X-ray monochromatic converging system, comprising an X-ray generator and a plurality of focusing units, one of the focusing units includes a polycapillary X-ray parallel beam lens, a monochromator, and a polycapillary X-ray focuser connected in sequence; The focal spot of the X-ray generator is located at the front focal spot of the polycapillary X-ray parallel beam lens, the X-ray generator is a point light source, and the point is used as the source to emit X-rays to the periphery; The polycapillary X-ray collimated beam lens is arranged on the light path of the X-ray generator radiated outward, and the polycapillary X-ray concentrators of the several focusing units have a converging final focus.

As an improvement to the above technical solution, the target material of the X-ray light pipe is any one of copper, molybdenum, silver or tungsten.

As an improvement to the above technical solution, the X-ray generator is an X-ray light pipe with a point-shaped spot, the focal spot diameter of the light source is 50-500 microns, and the power range of the light source is 10-3000 watts.

As an improvement to the above technical solution, the polycapillary X-ray parallel beam lens has an isosceles trapezoid structure with one end large and one end small, and the small end of the polycapillary X-ray parallel beam lens faces the X-ray generator to receive the X-ray generator. The emitted polychromatic X-rays are emitted, and the large end of the polycapillary X-ray parallel beam lens is directed toward the monochromator, and the polycapillary X-ray parallel beam lens is converted into a quasi-parallel polychromatic X-ray beam; The line connecting the emission light source point and the final focus is the central axis, and the central axis of the polycapillary X-ray parallel beam lens is obliquely intersecting with the central axis.

As an improvement to the above technical solution, the quasi-parallel polychromatic X-ray beam refers to an X-ray beam with small divergence and high intensity gain.

As an improvement to the above technical solution, the divergence of the polycapillary X-ray parallel beam lens is 2-15 mrad; its front focal length f _q is 15-100 mm, the inlet diameter D _in is 2-8 mm, and the outlet diameter D _out is 4 mm -15mm, its length L is 15-60mm.

As an improvement to the above technical solution, the plane of the monochromator is obliquely intersected with the central axis of the polycapillary X-ray parallel beam lens and the polycapillary X-ray concentrator, and receives the quasi-parallel polychromatic beam emitted by the polycapillary X-ray parallel beam lens. The X-ray beam is converted into a monochromatic parallel X-ray beam and sent to the polycapillary X-ray focuser.

As an improvement to the above technical solution, the monochromator is a planar crystal.

As an improvement to the above technical solution, the polycapillary X-ray concentrator is located on the outgoing optical path of the monochromator to receive the monochromatic parallel X-ray beam emitted by the monochromator, and condense the monochromatic parallel X-ray beam into microscopic tens of microns. The focal spot, the micro-focal spots of several polycapillary X-ray concentrators are converged into a final focus; the polycapillary X-ray concentrator is an isosceles trapezoid structure with one large end and a small end, and the large end of the polycapillary X-ray concentrator In the direction of the monochromator, the small end is in the direction of the final focus, and the central axis of the polycapillary X-ray concentrator is oblique to the central axis.

As an improvement to the above technical solution, the concentrator is a capillary X-ray semi-mirror or a single capillary X-ray focusing lens.

The working principle of the combined X-ray monochromatic convergence system of the present invention is:

Compared with the prior art, the present invention has the following advantages and positive effects:

The combined X-ray monochromatic converging system of the present invention can be provided with a plurality of focusing units through the X-ray light source with a large exit angle. The multiple focusing units finally have a converging micro-focus. Compared with other X-ray monochromatic focusing devices, it has the excellent performance of high X-ray utilization and higher brightness of the focused focal spot.

Description of drawings

In order to explain the embodiments of the present invention or the technical solutions in the prior art more clearly, the following briefly introduces the accompanying drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only These are some embodiments of the present invention, and for those of ordinary skill in the art, other drawings can also be obtained from these drawings without any creative effort.

Fig. 1 is the structural representation of the present invention;

2 is a geometrical parameter diagram of a polycapillary X-ray parallel beam lens in an embodiment of the present invention;

FIG. 3 is a geometrical parameter diagram of a polycapillary X-ray concentrator in an embodiment of the present invention.

Among them: 1 is an X-ray generator; 2 is a polycapillary X-ray parallel beam lens; 3 is a monochromator; 4 is a polycapillary X-ray concentrator; 5 is the final focus.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work, any modifications, equivalent replacements, improvements, etc., should be included in the protection scope of the present invention. Inside.

As shown in Figures 1 to 3, the combined X-ray monochromatic converging system of the present invention includes an X-ray generator 1 and several focusing units. The X-ray focusing unit has a front focus and a back focus. It is not on the line connected by the front and rear focal points, so multiple X-ray focusing units can be designed, so that the front and rear focal points of the multiple focusing units are overlapped, and a combined X-ray monochromatic converging device is formed. . The laboratory X-ray generator 1 is placed at the front focal point of the combined monochromatic converging device, and the divergent polychromatic X-rays emitted by it are condensed into a monochromatic X-ray micro-focus 5 .

A described focusing unit includes a polycapillary X-ray parallel beam lens 2, a monochromator 3, a polycapillary X-ray concentrator 4 connected in sequence; the focal spot of the X-ray generator 1 is located at the polycapillary X-ray parallel beam lens 2 At the front focal spot, the X-ray generator 1 is a point light source, and the point is used as the source to emit X-rays to the periphery; several polycapillary X-ray parallel beam lenses 2 of the focusing units are arranged on the X-ray generator to On the optical path of the external radiation 1 , the polycapillary X-ray concentrators 4 of the several focusing units have a converging final focus 5 . Point light source X-ray generator 1: used to generate X-rays, where the X-ray beams generated are divergent polychromatic X-rays; the polycapillary X-ray parallel beam lens 2: an X-ray generator is provided at its entrance focus , used to receive the divergent X-rays emitted by the X light source, and convert the received divergent X-ray beams into quasi-parallel X-ray beams with small divergence and high intensity gain; the monochromator 3: located in the polycapillary X-ray parallel beam lens After 2, form a certain angle with the output direction of the polycapillary X-ray parallel beam lens 2, receive the polychromatic quasi-parallel X-ray beam emitted from the capillary X-ray half-lens 2, and convert it into a monochromatic quasi-parallel X-ray beam; the The polycapillary X-ray concentrator 4: placed in the outgoing optical path of the monochromator 3, receiving the monochromatic quasi-parallel X-ray beam emitted by the monochromator 3, and condensing the quasi-parallel X-ray beam into a micro-focal spot of tens of microns; The microfocal spots of the plurality of polycapillary X-ray concentrators 4 converge into a final focus 5 .

The target material of the X-ray light pipe is any one of copper, molybdenum, silver or tungsten. The X-ray generator is an X-ray light pipe with a point-shaped light spot, the diameter of the focal spot of the light source is 50-500 microns, and the power range of the light source is 10-3000 watts.

The polycapillary X-ray parallel beam lens is an isosceles trapezoid structure with one end large and one end small, and the small end of the polycapillary X-ray parallel beam lens faces the X-ray generator to receive the polychromatic X-rays emitted by the X-ray generator, The large end of the polycapillary X-ray parallel beam lens faces the monochromator, which converts the polycapillary X-ray parallel beam lens into a quasi-parallel polychromatic X-ray beam; The line is the central axis, and the central axis of the polycapillary X-ray parallel beam lens is obliquely intersecting with the central axis. The quasi-parallel polychromatic X-ray beam refers to an X-ray beam with small divergence and high intensity gain. The divergence of the polycapillary X-ray parallel beam lens is 2-15 mrad; its front focal length f _q is 15-100 mm, the inlet diameter D _in is 2-8 mm, the outlet diameter D _out is 4-15 mm, and its length L is 15 mm -60mm.

The plane of the monochromator is obliquely intersected with the central axis of the polycapillary X-ray parallel beam lens and the polycapillary X-ray concentrator, and receives the quasi-parallel polychromatic X-ray beam emitted by the polycapillary X-ray parallel beam lens and converts it into It is a monochromatic parallel X-ray beam and is emitted to a polycapillary X-ray concentrator. The monochromator is a planar crystal.

The polycapillary X-ray concentrator is located on the outgoing optical path of the monochromator to receive the monochromatic parallel X-ray beam emitted by the monochromator, and condense the monochromatic parallel X-ray beam into a micro-focal spot of tens of microns. The micro-focal spot of the light concentrator converges into a final focus; the polycapillary X-ray concentrator is an isosceles trapezoid structure with one end large and one end small, the large end of the polycapillary X-ray concentrator faces the direction of the monochromator, and the small end is directed toward the monochromator. Towards the final focus direction, the central axis of the polycapillary X-ray concentrator is oblique to the central axis. The concentrator is a capillary X-ray half-lens or a single capillary X-ray focusing lens.

In the combined X-ray monochromatic converging system proposed by the present invention, a plurality of focusing units may be used according to their devices, not only limited to the symmetrical two in FIG. 1 . If an X-ray light source with a large exit angle is used, a plurality of focusing units can be provided. Compared with other X-ray monochromatic focusing devices, the combined X-ray monochromatic focusing system has the excellent performance of high X-ray utilization rate and higher focusing focal spot brightness.

Claims (10)

1. a combined X-ray monochromatic converging system is characterized in that: comprise X-ray generator and some focusing units, and a described focusing unit comprises polycapillary X-ray parallel beam lens, monochromator, polycapillary connected successively X-ray concentrator; the focal spot of the X-ray generator is located at the front focal spot of the polycapillary X-ray parallel beam lens, the X-ray generator is a point light source, and the point is used as the source to emit X-rays to the peripheral radiation; several The polycapillary X-ray parallel beam lenses of each of the focusing units are arranged on the light path radiated outward from the X-ray generator, and the polycapillary X-ray concentrators of the focusing units have a converging final focus. 2 . The combined X-ray monochromatic convergence system according to claim 1 , wherein the target material of the X-ray light pipe is any one of copper, molybdenum, silver or tungsten. 3 . 3. The combined X-ray monochromatic converging system of claim 1, wherein the X-ray generator is an X-ray light tube with a point-shaped spot, the light source focal spot diameter is 50-500 microns, and the light source power range 10-3000 watts. 4. The combined X-ray monochromatic converging system according to claim 1, wherein the polycapillary X-ray parallel beam lens is an isosceles trapezoid structure with one end large and one end small, and the polycapillary X-ray parallel beam lens The small end faces the X-ray generator to receive the polychromatic X-rays emitted by the X-ray generator, and the large end of the polycapillary X-ray parallel beam lens faces the monochromator, which converts the polycapillary X-ray parallel beam lens into A quasi-parallel polychromatic X-ray beam; with the line connecting the emission light source point of the X-ray generator and the final focus as the central axis, the central axis of the polycapillary X-ray parallel beam lens is obliquely intersected with the central axis. 5 . The combined X-ray monochromatic converging system according to claim 4 , wherein the quasi-parallel polychromatic X-ray beam is an X-ray beam with small divergence and high intensity gain. 6 . 6. The combined X-ray monochromatic converging system according to claim 5, wherein the divergence of the polycapillary X-ray parallel beam lens is 2-15mrad; its front focal length f _q is 15-100mm, and the entrance The diameter D _in is 2-8mm, the outlet diameter D _out is 4-15mm, and its length L is 15-60mm. 7. The combined X-ray monochromatic converging system of claim 1, wherein the plane of the monochromator is obliquely intersected with the central axis of the polycapillary X-ray parallel beam lens and the polycapillary X-ray concentrator, The quasi-parallel polychromatic X-ray beam emitted by the polycapillary X-ray parallel beam lens is received, converted into a monochromatic parallel X-ray beam, and then sent to the polycapillary X-ray concentrator. 8 . The combined X-ray monochromatic converging system according to claim 7 , wherein the monochromator is a planar crystal. 9 . 9. The combined X-ray monochromatic converging system of claim 1, wherein the polycapillary X-ray concentrator is located on the monochromator exit optical path to receive the monochromatic parallel X-ray beam emitted by the monochromator, The monochromatic parallel X-ray beam is converged into a micro focal spot of tens of microns, and the micro focal spots of several polycapillary X-ray concentrators are converged into the final focus; the polycapillary X-ray concentrator is isosceles with one end large and the other small Trapezoidal structure, the large end of the polycapillary X-ray concentrator faces the direction of the monochromator, the small end faces the direction of the final focus, and the central axis of the polycapillary X-ray concentrator is oblique to the central axis. 10 . The combined X-ray monochromatic converging system according to claim 9 , wherein the concentrator is a capillary X-ray half-lens or a single capillary X-ray focusing lens. 11 .

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