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CN111829984A - A Fabry-Perot high humidity sensor and its measurement method - Google Patents

A Fabry-Perot high humidity sensor and its measurement method Download PDF

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CN111829984A
CN111829984A CN202010649295.0A CN202010649295A CN111829984A CN 111829984 A CN111829984 A CN 111829984A CN 202010649295 A CN202010649295 A CN 202010649295A CN 111829984 A CN111829984 A CN 111829984A
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perot
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CN111829984B (en
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张亚勋
张敏
刘志海
张羽
杨军
苑立波
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    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41Refractivity; Phase-affecting properties, e.g. optical path length
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G01N2021/458Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods using interferential sensor, e.g. sensor fibre, possibly on optical waveguide
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    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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Abstract

本发明提供一种法布里珀罗高湿度传感器及其测量方法,涉及光纤生物传感技术领域,入射光源与光纤环形器的输入端口通过入射光波导连接,光纤探头由光纤环形器的输出端口引出并且通过光纤固定件固定在滑轨上,光纤固定件与移动反射面一侧由蜘蛛牵引丝两端分别连接,移动反射面另一侧通过微型弹簧与固定在滑轨上的弹簧固定件相连。本发明利用蜘蛛牵引丝吸收水分后超收缩的特性,搭建了一个腔长可变的法布里珀罗腔,使光纤探头端面反射光与移动反射面反射光的干涉光谱在不同湿度下具有不同的自由光谱长范围。将蜘蛛牵引丝的超收缩特性用于湿度测量,使湿度传感器具有良好的可自然降解性、生物相容性及高湿度条件下有较高灵敏度和较高响应速度的特点。

Figure 202010649295

The invention provides a Fabry-Perot high humidity sensor and a measurement method thereof, and relates to the technical field of optical fiber biological sensing. It is led out and fixed on the slide rail through the optical fiber fixing piece. The optical fiber fixing piece is connected with the two ends of the spider pulling wire respectively on one side of the moving reflective surface, and the other side of the moving reflective surface is connected with the spring fixing piece fixed on the sliding rail through a micro spring. . The invention utilizes the super-shrinkage characteristics of spider pulling silk after absorbing moisture, and builds a Fabry-Perot cavity with variable cavity length, so that the interference spectrum of the reflected light from the end face of the optical fiber probe and the reflected light from the moving reflecting surface has different effects under different humidity. free spectral long range. The super-shrinkage characteristics of spider pulling silk are used for humidity measurement, so that the humidity sensor has the characteristics of good natural degradability, biocompatibility, high sensitivity and high response speed under high humidity conditions.

Figure 202010649295

Description

一种法布里珀罗高湿度传感器及其测量方法A Fabry-Perot high humidity sensor and its measurement method

技术领域technical field

本发明涉及一种法布里珀罗高湿度传感器及其测量方法,属于光纤生物传感技术领域。The invention relates to a Fabry-Perot high humidity sensor and a measurement method thereof, belonging to the technical field of optical fiber biological sensing.

背景技术Background technique

随着科学技术的飞速发展,湿度监测被广泛应用于仪器仪表、自动化系统、农业、气象学、地理信息等领域,人们对环境湿度的监测越来越重视。在多种多样的湿度检测技术中,光纤湿度传感技术因其抗电磁干扰、耐腐蚀、导光性能优良、灵敏度高等特点而飞速发展。如今,在绿色经济和绿色科技的号召下,传感器领域越发重视产品对人体健康和环境的影响,即对传感器的生物相容性和环境友好性提出了要求。将生物材料与光纤传感技术相结合设计出的光纤生物传感器是把自然界中天然的细胞、组织等生物材料用于传感的装置,因而具有良好的生物相容性和可降解性,且利于环境保护。With the rapid development of science and technology, humidity monitoring is widely used in instrumentation, automation systems, agriculture, meteorology, geographic information and other fields. People pay more and more attention to the monitoring of environmental humidity. Among various humidity detection technologies, optical fiber humidity sensing technology has developed rapidly due to its characteristics of anti-electromagnetic interference, corrosion resistance, excellent light guiding performance and high sensitivity. Today, under the call of green economy and green technology, the sensor field pays more and more attention to the impact of products on human health and the environment, that is, the biocompatibility and environmental friendliness of sensors are required. The optical fiber biosensor designed by combining biological materials with optical fiber sensing technology is a device that uses natural cells, tissues and other biological materials in nature for sensing, so it has good biocompatibility and degradability, and is conducive to Environmental protection.

蜘蛛丝是产生于蜘蛛丝腺的一种生物蛋白质,不仅可以被自然降解,具有良好的生物相容性,还具有高强度、较好的弹性、以及优秀的光学性能和机械性能。一只蜘蛛能产生七种各具特性的蛛丝,其中蜘蛛牵引丝又被称作“蜘蛛的生命纤”,吸引着研究者的兴趣。蜘蛛牵引丝是一种很特殊的生物蛋白高分子聚合物,其受湿度影响具有超收缩的特性。当相对湿度大于70%RH时,牵引丝轴向发生收缩并且最高能达到其长度的50%(Journal ofExperimental Biology,2009,212(13:1981-1989)。2019年,Novais等人利用琼脂糖凝胶作为湿敏介质,能够实现20%RH到98.5%的湿度探测,但是在整个湿度探测区间光谱的漂移总量仅为2.5nm,60%RH至98.5%RH的高湿度区间湿度灵敏度仅为44.2pm/%RH(Humiditysensor based on optical fiber coated with agarose gel,Optical Sensors,2019)。然而蜘蛛牵引丝却能对大于70%RH的高湿度区做出极其灵敏的反应,长度收缩量最高可达近50%(Nature,2002,416(6876:37-37),蜘蛛丝的长度变化量直接决定其传感灵敏度,因此可以用作高湿度范围的湿度传感。Spider silk is a biological protein produced from spider silk glands. It can not only be degraded naturally, has good biocompatibility, but also has high strength, good elasticity, and excellent optical and mechanical properties. A spider can produce seven kinds of spider silk with different characteristics, among which spider pulling silk is also called "spider's life fiber", which attracts the interest of researchers. Spider traction silk is a very special biological protein polymer, which has super-shrinking properties under the influence of humidity. When the relative humidity is greater than 70% RH, the pull wire shrinks axially and can reach up to 50% of its length (Journal of Experimental Biology, 2009, 212 (13:1981-1989). In 2019, Novais et al. As a humidity sensitive medium, glue can achieve humidity detection from 20%RH to 98.5%, but the total spectral drift in the entire humidity detection range is only 2.5nm, and the humidity sensitivity in the high humidity range from 60%RH to 98.5%RH is only 44.2 pm/%RH (Humidity sensor based on optical fiber coated with agarose gel, Optical Sensors, 2019). However, spider traction silk can respond extremely sensitively to high humidity areas greater than 70% RH, and the length shrinkage can be as high as approx. 50% (Nature, 2002, 416 (6876: 37-37), the length change of spider silk directly determines its sensing sensitivity, so it can be used as humidity sensing in high humidity range.

利用蜘蛛牵引丝长度在高湿度的下的显著收缩,可以构建一个腔长可变的法布里珀罗干涉腔,由此可以通过干涉腔长度变化引起的输出干涉谱自由光谱范围变化来表征环境湿度。与常见的湿度传感器相比,蜘蛛牵引丝的超收缩特性使得基于此的湿度传感器在大于70%RH的高湿度范围内具有极高的灵敏度。传统基于法布里珀罗干涉原理的湿度传感器通常是监测湿度引起的输出光谱红移或蓝移变化量。2018年,Peng J等人利用法布里珀罗腔干涉结构能够实现30%RH至90%RH区间内的湿度测量,干涉谱线总漂移量约10nm(Applied Optics,2018,57(12:2967-2972)。同年Li C等人利用法布里珀罗干涉结构能够实现10%RH至90%RH区间内的湿度测量,干涉谱线总漂移量约15nm(Optics Letters,2018,43(19:4719-4722)。目前尚未有利用蜘蛛丝的超收缩特性制作的法布里珀罗湿度传感器,而蜘蛛牵引丝的超收缩特性使得在高湿度条件下蛛丝长度能够收缩超过50%,可以带动所设计的法布里珀罗干涉腔长度实现近50%的收缩变化,这一变化量比传统的法布里珀罗湿度传感器的腔长变化量更大更明显。因此,监测量并不是干涉光谱的红移或蓝移变化量,而是干涉光谱的自由光谱范围变化。自由光谱范围的变化相比于谱线的红移或蓝移变化更明显,更容易监测且分析更准确。Taking advantage of the significant shrinkage of the spider pulling silk length under high humidity, a Fabry-Perot interference cavity with variable cavity length can be constructed, and the environment can be characterized by the change of the free spectral range of the output interference spectrum caused by the change of the cavity length. humidity. Compared with common humidity sensors, the super-contraction property of spider pulling silk makes the humidity sensor based on it have extremely high sensitivity in the high humidity range greater than 70%RH. Traditional humidity sensors based on the Fabry-Perot interference principle usually monitor the red-shift or blue-shift change of the output spectrum caused by humidity. In 2018, Peng J et al. used the Fabry-Perot cavity interference structure to achieve humidity measurement in the range of 30% RH to 90% RH, and the total drift of the interference spectral line was about 10 nm (Applied Optics, 2018, 57 (12:2967). -2972). In the same year, Li C et al. used the Fabry-Perot interference structure to achieve humidity measurement in the range of 10% RH to 90% RH, and the total drift of the interference spectrum was about 15 nm (Optics Letters, 2018, 43 (19: 4719-4722). At present, there is no Fabry-Perot humidity sensor made by using the super-contraction property of spider silk, and the super-contraction property of spider pulling silk makes the length of spider silk shrink by more than 50% under high humidity conditions, which can drive The designed Fabry-Perot interference cavity length achieves a shrinkage change of nearly 50%, which is larger and more obvious than the cavity length change of the traditional Fabry-Perot humidity sensor. Therefore, the monitored quantity is not interference The amount of redshift or blueshift of the spectrum, but the change of the free spectral range of the interference spectrum. The change of the free spectral range is more obvious than the redshift or blueshift of the spectral line, which is easier to monitor and more accurate to analyze.

发明内容SUMMARY OF THE INVENTION

本发明的目的是为了在于提供一种低成本的、灵敏度极高的、对环境无污染且具有生物相容性的、基于蜘蛛牵引丝超收缩特性的光纤生物湿度传感器及其测量方法。The purpose of the present invention is to provide a low-cost, high-sensitivity, non-polluting and biocompatible optical fiber bio-humidity sensor based on the super-contraction characteristic of spider pulling silk and its measurement method.

本发明的目的是这样实现的:包括入射光源1、入射光波导2、光纤环形器3、光纤探头4、光纤固定件4-1、蜘蛛牵引丝5、移动反射面6、滑轨6-1、微型弹簧7、弹簧固定件8、出射光波导9以及光探测器10,入射光源1与光纤环形器3的①端口通过入射光波导2连接,光纤探头4由光纤环形器3的②端口引出并且通过光纤固定件4-1固定在滑轨6-1上,光纤固定件4-1与移动反射面6一侧之间设置蜘蛛牵引丝5,移动反射面6另一侧通过微型弹簧7与固定在滑轨6-1上的弹簧固定件8相连;光探测器10与光纤环形器的③端口之间通过出射光波导9连接。The purpose of the present invention is achieved as follows: including incident light source 1, incident light waveguide 2, optical fiber circulator 3, optical fiber probe 4, optical fiber fixing member 4-1, spider pulling wire 5, moving reflection surface 6, slide rail 6-1 , a miniature spring 7, a spring holder 8, an outgoing optical waveguide 9 and a photodetector 10, the incident light source 1 and the ① port of the optical fiber circulator 3 are connected through the incident optical waveguide 2, and the optical fiber probe 4 is led out from the ② port of the optical fiber circulator 3 And fixed on the slide rail 6-1 by the optical fiber fixing member 4-1, the spider pulling wire 5 is arranged between the optical fiber fixing member 4-1 and one side of the moving reflection surface 6, and the other side of the moving reflection surface 6 is connected with the micro spring 7 through the micro spring 7. The spring fixing member 8 fixed on the slide rail 6-1 is connected; the optical detector 10 is connected with the ③ port of the optical fiber circulator through the outgoing optical waveguide 9 .

本发明还包括这样一些结构特征:The present invention also includes such structural features:

1.光纤探头4端面与移动反射面6构成法布里珀罗干涉腔,一部分出射光在光纤探头4的端面反射,另一部分出射光由光纤探头4出射后在移动反射面5发生反射并回射到光纤探头4中,两束反射光发生干涉,光探测器10监测并获得干涉光谱。1. The end face of the fiber probe 4 and the moving reflection surface 6 form a Fabry-Perot interference cavity, a part of the outgoing light is reflected on the end face of the fiber probe 4, and the other part of the outgoing light is reflected on the moving reflecting surface 5 after being emitted by the fiber probe 4 and returns. The two beams of reflected light interfere with each other when they are emitted into the fiber probe 4, and the optical detector 10 monitors and obtains the interference spectrum.

2.所述的蜘蛛牵引丝5具有超收缩特性,在湿度大于70%时开始收缩,克服微型弹簧7的拉力而拉动移动反射面6移动靠近光纤探头4;当湿度降低时,蜘蛛牵引丝5超收缩减弱,拉力减小,无法克服微型弹簧7的拉力,移动反射面6在微型弹簧7的拉力作用下移动远离光纤探头4;并且所述的蜘蛛牵引丝在高湿度条件下最高能产生其本身50%轴向长度的收缩,带动法布里珀罗腔的长度发生显著变化。2. The spider pulling silk 5 has super-contraction characteristics, and starts to shrink when the humidity is greater than 70%, overcomes the pulling force of the miniature spring 7 and pulls the moving reflection surface 6 to move close to the fiber probe 4; when the humidity decreases, the spider pulling wire 5 The super-contraction is weakened, the pulling force is reduced, and the pulling force of the miniature spring 7 cannot be overcome, and the moving reflection surface 6 moves away from the optical fiber probe 4 under the pulling force of the miniature spring 7; The shrinkage of 50% of its axial length leads to a significant change in the length of the Fabry-Perot cavity.

3.将法布里珀罗高湿度传感器放置于湿度测试环境中,法布里珀罗腔的长度在蜘蛛牵引丝的超收缩带动下随湿度发生变化,法布里珀罗腔的长度与光谱仪测得的双光束干涉光谱的自由光谱范围呈负相关关系;通过检测干涉光谱的自由光谱范围大小变化,测得所处环境的湿度大小的改变。3. The Fabry-Perot high humidity sensor is placed in the humidity test environment. The length of the Fabry-Perot cavity changes with the humidity driven by the super-contraction of the spider pulling silk. The length of the Fabry-Perot cavity is related to the spectrometer. The free spectral range of the measured double-beam interference spectrum is negatively correlated; by detecting the change of the free spectral range of the interference spectrum, the change of the humidity of the environment is measured.

与现有技术相比,本发明的有益效果是:1.本发明利用蜘蛛牵引丝天然的超收缩特性构建了腔长可变的法布里珀罗干涉结构,输出干涉光谱能够在湿度超过超收缩阈值时产生大幅度的自由光谱范围变化,起到传感作用;2.本发明没有使用任何人工合成材料进行湿度检测,天然的蜘蛛牵引丝不仅利于降解、对环境无污染,与传统湿敏材料相比还具有成本低的优势,可随时取自蜘蛛;3.将蜘蛛牵引丝与光纤器件相结合制成的产品,能够与其他光器件及电器件相容,可以连接应用于各种传输系统中,有利于与现有纤路集成相容。Compared with the prior art, the beneficial effects of the present invention are: 1. The present invention utilizes the natural super-contraction characteristics of spider pulling silk to construct a Fabry-Perot interference structure with variable cavity length, and the output interference spectrum can be used when the humidity exceeds the super-contraction characteristic. When shrinking the threshold, a large change in the free spectral range is generated, which plays a sensing role; 2. The present invention does not use any artificial synthetic materials for humidity detection. Compared with materials, it also has the advantage of low cost and can be taken from spiders at any time; 3. Products made by combining spider pulling silk and optical fiber devices are compatible with other optical and electrical devices, and can be connected to various transmission applications. In the system, it is beneficial to be compatible with the existing fiber line integration.

附图说明Description of drawings

图1为一种基于蜘蛛丝超收缩特性的法布里珀罗高湿度传感器整体结构图;Figure 1 is an overall structural diagram of a Fabry-Perot high humidity sensor based on the super-shrinkage characteristics of spider silk;

图2为本发明基于蜘蛛丝超收缩特性的法布里珀罗高湿度传感器的原理示意图。FIG. 2 is a schematic diagram of the principle of the Fabry-Perot high humidity sensor based on the super-shrinkage characteristic of spider silk according to the present invention.

具体实施方式Detailed ways

下面结合附图与具体实施方式对本发明作进一步详细描述。The present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments.

如图1,一种基于蜘蛛丝超收缩特性的法布里珀罗高湿度传感器,包括入射光源1、入射光波导2、光纤环形器3、光纤探头4、光纤固定件4-1、蜘蛛牵引丝5、移动反射面6、滑轨6-1、微型弹簧7、弹簧固定件8、出射光波导9以及光探测器10;其中,入射光源1与光纤环形器3的①端口通过入射光波导2连接,光纤探头4由光纤环形器3的②端口引出并且通过光纤固定件4-1固定在滑轨6-1上,光纤固定件4-1与移动反射面6一侧由蜘蛛牵引丝5两端分别连接,移动反射面6另一侧通过微型弹簧7与固定在滑轨6-1上的弹簧固定件8相连。光纤探头反射端面与移动反射面平行且位于同一直线上构成法布里珀罗腔。As shown in Figure 1, a Fabry-Perot high humidity sensor based on the super-shrinkage characteristics of spider silk includes an incident light source 1, an incident optical waveguide 2, an optical fiber circulator 3, an optical fiber probe 4, an optical fiber fixing member 4-1, and a spider pulling Wire 5, movable reflection surface 6, slide rail 6-1, miniature spring 7, spring fixing member 8, outgoing optical waveguide 9 and photodetector 10; wherein, the ① port of the incident light source 1 and the optical fiber circulator 3 passes through the incident optical waveguide 2 connection, the fiber probe 4 is led out from the ② port of the fiber optic circulator 3 and fixed on the slide rail 6-1 by the fiber fixing piece 4-1, and the fiber fixing piece 4-1 and the side of the moving reflection surface 6 are drawn by the spider 5 The two ends are respectively connected, and the other side of the movable reflection surface 6 is connected with the spring fixing member 8 fixed on the slide rail 6-1 through the micro spring 7. The reflective end face of the fiber probe and the moving reflective face are parallel and on the same line to form a Fabry-Perot cavity.

法布里珀罗干涉腔由光纤探头4端面与移动反射面6构成,一部分出射光在光纤探头4的端面反射,另一部分光由光纤探头4出射后在移动反射面5发生反射并回射到光纤探头4中,两束反射光发生干涉,光探测器10监测并获得干涉光谱。The Fabry-Perot interference cavity is composed of the end face of the fiber probe 4 and the moving reflection surface 6. A part of the outgoing light is reflected on the end face of the fiber probe 4, and the other part of the light is reflected on the moving reflection surface 5 after being emitted by the fiber probe 4 and is retroreflected to the optical fiber probe 4. In the fiber probe 4, the two beams of reflected light interfere, and the optical detector 10 monitors and obtains the interference spectrum.

所述的蜘蛛牵引丝5具有超收缩特性,在湿度大于70%时开始收缩,克服微型弹簧7的拉力而拉动移动反射面6移动靠近光纤探头4;当湿度降低时,蜘蛛牵引丝5超收缩减弱,拉力减小,无法克服微型弹簧7的拉力,移动反射面6在微型弹簧7的拉力作用下移动远离光纤探头4;并且所述的蜘蛛牵引丝在高湿度条件下最高能产生其本身50%轴向长度的收缩,带动法布里珀罗腔的长度发生显著变化。The spider pulling silk 5 has super-contraction characteristics, and starts to shrink when the humidity is greater than 70%, overcomes the pulling force of the micro-spring 7 and pulls the moving reflecting surface 6 to move close to the fiber probe 4; when the humidity decreases, the spider pulling wire 5 super-contracts weakened, the pulling force is reduced, and the pulling force of the miniature spring 7 cannot be overcome, and the moving reflecting surface 6 moves away from the optical fiber probe 4 under the pulling force of the miniature spring 7; The shrinkage of the % axial length leads to a significant change in the length of the Fabry-Perot cavity.

本发明的测试方法为:Test method of the present invention is:

将法布里珀罗腔干涉结构传感器本身放置于湿度测试环境中,法布里珀罗腔的长度在蜘蛛牵引丝的超收缩带动下随湿度发生变化,法布里珀罗腔的长度与光谱仪测得的双光束干涉光谱的自由光谱范围呈负相关关系;通过检测干涉光谱的自由光谱范围大小变化,就能够测得所处环境的湿度大小的改变。The Fabry-Perot cavity interferometric structure sensor itself is placed in the humidity test environment. The length of the Fabry-Perot cavity changes with the humidity driven by the super-contraction of the spider pulling silk. The length of the Fabry-Perot cavity is related to the spectrometer. The measured free spectral range of the double-beam interference spectrum has a negative correlation; by detecting the change in the free spectral range of the interference spectrum, the change in the humidity of the environment can be measured.

本发明的工作原理:The working principle of the present invention:

入射光11经入射光波导入射光纤环形器并由光纤探头出射,由于光纤探头端面与移动反射面构成了法布里珀罗腔结构,光纤探头端面反射光12和移动反射面反射光13发生干涉且干涉光14经光纤环形器由出射光波导传输至光探测器;光纤探头与移动反射面被蜘蛛牵引丝连接,当湿度上升至牵引丝发生超收缩时,蛛丝产生的拉力将克服微型弹簧的拉力使得移动反射面靠近光纤探头,法布里珀罗腔长减小,干涉光谱的自由光谱范围增大,具体显示为干涉谱线的峰间距增大;当湿度下降时,蛛丝产生的拉力减小至无法克服微型弹簧拉力,移动反射面远离光纤探头,干涉腔长增大,干涉光谱的自由光谱范围减小,具体显示为干涉谱线的峰间距减小。The incident light 11 enters the optical fiber circulator through the incident light wave guide and exits from the optical fiber probe. Since the end face of the optical fiber probe and the moving reflecting surface form a Fabry-Perot cavity structure, the reflected light 12 from the end face of the optical fiber probe and the reflected light 13 from the moving reflecting surface interfere. And the interference light 14 is transmitted from the outgoing optical waveguide to the photodetector through the optical fiber circulator; the optical fiber probe and the moving reflecting surface are connected by the spider pulling silk, when the humidity rises to the point where the pulling wire super-contracts, the pulling force generated by the spider silk will overcome the miniature spring. The pulling force makes the moving reflective surface close to the fiber probe, the Fabry-Perot cavity length decreases, and the free spectral range of the interference spectrum increases, which is shown as the increase in the peak spacing of the interference spectral lines; when the humidity decreases, the spider silk produces When the pulling force is reduced to the point where it cannot overcome the pulling force of the miniature spring, the reflective surface is moved away from the fiber probe, the length of the interference cavity increases, and the free spectral range of the interference spectrum decreases.

蜘蛛牵引丝5具有超收缩特性,在湿度大于70%时开始收缩,最高能产生50%轴向长度的收缩,带动法布里珀罗腔的长度发生显著变化;所产生的拉力可以克服微型弹簧7的拉力而拉动移动反射面6移动靠近光纤探头4,法布里珀罗腔的长度缩短,导致干涉光谱的自由光谱范围增大;当湿度降低时,蜘蛛牵引丝5超收缩减弱,拉力减小,无法克服微型弹簧7的拉力,因此移动反射面6在微型弹簧7的拉力作用下移动远离光纤探头4,法布里珀罗腔长度增加,干涉光谱的自由光谱范围减小,可以通过光探测器10实现湿度探测。The spider pulling silk 5 has super-shrinking characteristics, it starts to shrink when the humidity is greater than 70%, and can produce a maximum shrinkage of 50% of the axial length, which drives the length of the Fabry-Perot cavity to change significantly; the generated tension can overcome the micro-spring 7 and pull the moving reflecting surface 6 to move closer to the fiber probe 4, the length of the Fabry-Perot cavity is shortened, resulting in an increase in the free spectral range of the interference spectrum; when the humidity decreases, the spider pulling silk 5 is super-shrinked and the pulling force is reduced. It is too small to overcome the pulling force of the miniature spring 7, so the moving reflecting surface 6 moves away from the fiber probe 4 under the pulling force of the miniature spring 7, the length of the Fabry-Perot cavity increases, and the free spectral range of the interference spectrum decreases, which can be passed through the optical fiber. The detector 10 realizes humidity detection.

下面结合具体数值给出本发明的实施例:Embodiments of the present invention are provided below in conjunction with specific numerical values:

(1)为尽可能覆盖长的干涉光谱的自由光谱范围变化区间,同时符合常见的通信光源波段,选择1525nm~1610nm的宽谱光源;(1) In order to cover the free spectral range of the interference spectrum as long as possible, and at the same time conform to the common communication light source band, select a broad-spectrum light source of 1525nm ~ 1610nm;

(2)依据信号光选择中心波长为1550nm的光纤环形器,以及1550nm通信用的普通单模光纤用作光纤探头、入射光波导及出射光波导;(2) According to the signal light, the optical fiber circulator with the center wavelength of 1550nm, and the common single-mode optical fiber for 1550nm communication are used as the optical fiber probe, the incident optical waveguide and the outgoing optical waveguide;

(3)取一个玻璃滑轨,取光纤接头的陶瓷芯作为光纤固定件,利用紫外固化胶将光纤固定件水平固定在滑轨一侧;(3) Take a glass slide rail, take the ceramic core of the optical fiber connector as the optical fiber fixing piece, and fix the optical fiber fixing piece horizontally on one side of the slide rail with UV curing glue;

(4)取一段单模光纤,用光纤切割刀处理出平整的光纤端面,并将处理好的单模光纤插入光纤固定件,用紫外固化胶将光纤与固定件固定在一起;(4) Take a section of single-mode optical fiber, process the flat fiber end face with an optical fiber cutter, insert the processed single-mode optical fiber into the optical fiber fixing piece, and fix the optical fiber and the fixing piece together with UV curing glue;

(5)将用PDMS制成的固块作为弹簧固定件,并取一个微型弹簧,将其一端旋转刺入弹簧固定件中,旋转刺入深度约1cm,留在外部的未刺入长度约8mm;而后用紫外固化胶将弹簧固定件固定在滑轨的另一端;(5) Use the solid block made of PDMS as the spring fixture, and take a miniature spring, rotate one end of it and insert it into the spring fixture. ; Then fix the spring fastener on the other end of the slide rail with UV curing glue;

(6)取一小块玻璃在其表面镀反射膜以增强光反射率,用紫外固化胶或热熔胶将玻璃未镀膜的面与微型弹簧固定在一起;(6) Take a small piece of glass and coat it with a reflective film on its surface to enhance the light reflectivity, and fix the uncoated surface of the glass with the miniature spring with UV curing adhesive or hot melt adhesive;

(7)利用镊子从新络妇蛛的吐丝器抽取一定长度的蜘蛛牵引丝,利用紫外固化胶将牵引丝一端与光纤固定件相连,牵引丝的另一端用紫外固化胶将其与移动反射面固定;(7) Use tweezers to extract a certain length of spider pulling silk from the spinneret of the new spider, use UV curing glue to connect one end of the pulling wire to the optical fiber fixture, and use UV curing glue to connect the other end of the pulling wire to the moving reflective surface fixed;

(8)使用光纤焊接机将入射光波导与光纤环形器的①端口光纤进行熔接,将用作光纤探头的单模光纤与光纤环形器的②端口光纤进行熔接,将出射光波导与光纤环形器的③端口光纤进行熔接;(8) Use an optical fiber welding machine to splicing the incident optical waveguide with the fiber at the ① port of the fiber circulator, splicing the single-mode fiber used as the fiber probe with the fiber at the ② port of the fiber circulator, and splicing the outgoing optical waveguide with the fiber circulator. The ③ port optical fiber is spliced;

(9)将入射光源与入射光波导连接,出射光波导与光探测器连接;工作时,光源输出光到达光纤探头后在探头端面产生一束反射光,探头出射光到达反射面后产生第二束反射光,两束反射光具有与两反射面间距相关的光程差,并在光探测器可看到双光束干涉光谱;当相对湿度超过70%RH后引起蛛丝发生超收缩,两反射面间距随湿度的增加而减小以致干涉光谱的自由光谱范围增大;当湿度减小时,蜘蛛丝的拉力不足以抵消微型弹簧的拉力,干涉腔长度在微型弹簧的拉力下增大,以致干涉光谱的自由光谱范围减小,由此实现了高湿度范围内的湿度传感。(9) Connect the incident light source to the incident light waveguide, and the outgoing light waveguide to the photodetector; during operation, the output light from the light source reaches the fiber probe to generate a beam of reflected light on the end face of the probe, and the outgoing light from the probe reaches the reflection surface to generate a second beam of reflected light. A beam of reflected light, the two beams of reflected light have an optical path difference related to the distance between the two reflecting surfaces, and the double-beam interference spectrum can be seen in the photodetector; when the relative humidity exceeds 70% RH, the spider silk is super-contracted, and the two reflections The interplanar spacing decreases with the increase of humidity so that the free spectral range of the interference spectrum increases; when the humidity decreases, the pulling force of the spider silk is not enough to offset the pulling force of the miniature spring, and the length of the interference cavity increases under the pulling force of the miniature spring, so that the interference The free spectral range of the spectrum is reduced, thereby enabling humidity sensing in the high humidity range.

综上,本发明涉及光纤生物传感技术领域,具体涉及一种基于蜘蛛牵引丝超收缩特性的法布里珀罗高湿度传感器及其测量方法。包括入射光源、入射光波导、光纤环形器、光纤固定件、光纤探头、蜘蛛牵引丝、移动反射面、滑轨、微型弹簧、弹簧固定件、出射光波导以及光探测器;其中,入射光源与光纤环形器的输入端口通过入射光波导连接,光纤探头由光纤环形器的输出端口引出并且通过光纤固定件固定在滑轨上,光纤固定件与移动反射面一侧由蜘蛛牵引丝两端分别连接,移动反射面另一侧通过微型弹簧与固定在滑轨上的弹簧固定件相连。本发明提供的一种基于蜘蛛丝超收缩特性的法布里珀罗湿度传感器及其测量方法,利用了蜘蛛牵引丝吸收水分后超收缩的特性,搭建了一个腔长可变的法布里珀罗腔,使得光纤探头端面反射光与移动反射面反射光的干涉光谱在不同湿度下具有不同的自由光谱长范围。将蜘蛛牵引丝的超收缩特性用于湿度测量,使得湿度传感器具有良好的可自然降解性、生物相容性及高湿度条件下有较高灵敏度和较高响应速度的特点。In summary, the present invention relates to the technical field of optical fiber biosensing, and in particular to a Fabry-Perot high humidity sensor based on the super-contraction characteristics of spider pulling silk and a measurement method thereof. Including incident light source, incident optical waveguide, optical fiber circulator, optical fiber fixture, fiber probe, spider pulling wire, moving reflective surface, slide rail, miniature spring, spring fixture, outgoing optical waveguide and photodetector; The input port of the fiber optic circulator is connected by the incident light waveguide, and the fiber probe is led out from the output port of the fiber optic circulator and fixed on the slide rail by the fiber fixing piece. , the other side of the moving reflecting surface is connected with the spring fixing member fixed on the slide rail through the micro spring. The invention provides a Fabry-Perot humidity sensor based on the super-shrinkage characteristics of spider silk and a measurement method thereof. The super-shrinkage characteristics of spider pulling silk after absorbing moisture are utilized to build a Fabry-Perot humidity sensor with variable cavity length. The cavity is adopted, so that the interference spectrum of the reflected light from the end face of the fiber probe and the reflected light from the moving reflecting surface has different free spectral long ranges under different humidity. Using the super-shrinkage characteristics of spider pulling silk for humidity measurement, the humidity sensor has the characteristics of good natural degradability, biocompatibility, high sensitivity and high response speed under high humidity conditions.

Claims (5)

1. A Fabry-Perot high humidity sensor, characterized by: comprises an incident light source (1), an incident light waveguide (2), an optical fiber circulator (3), an optical fiber probe (4), an optical fiber fixing piece (4-1), a spider traction wire (5), a movable reflection surface (6), a slide rail (6-1), a micro spring (7), a spring fixing piece (8), an emergent light waveguide (9) and an optical detector (10), an incident light source (1) is connected with a port of an optical fiber circulator (3) through an incident optical waveguide (2), an optical fiber probe (4) is led out from the port of the optical fiber circulator (3) and is fixed on a slide rail (6-1) through an optical fiber fixing piece (4-1), a spider pull wire (5) is arranged between the optical fiber fixing piece (4-1) and one side of a movable reflecting surface (6), and the other side of the movable reflecting surface (6) is connected with a spring fixing piece (8) fixed on the slide rail (6-1) through a miniature spring (7); the optical detector (10) is connected with the port III of the optical fiber circulator through an emergent light waveguide (9).
2. A fabry-perot high humidity sensor according to claim 1, characterized in that: the end face of the optical fiber probe (4) and the movable reflecting face (6) form a Fabry-Perot interference cavity, one part of emergent light is reflected on the end face of the optical fiber probe (4), the other part of emergent light is emitted by the optical fiber probe (4), then reflected on the movable reflecting face (5) and reflected back to the optical fiber probe (4), two beams of reflected light are interfered, and the optical detector (10) monitors and obtains an interference spectrum.
3. A fabry-perot high humidity sensor according to claim 1 or 2, characterized in that: the spider dragline wire (5) has the super-shrinkage characteristic, starts to shrink when the humidity is higher than 70%, overcomes the pulling force of the micro spring (7) and pulls the movable reflection surface (6) to move close to the optical fiber probe (4); when the humidity is reduced, the super shrinkage of the spider traction wire (5) is weakened, the tension is reduced, the tension of the micro spring (7) cannot be overcome, and the movable reflection surface (6) moves away from the optical fiber probe (4) under the action of the tension of the micro spring (7); and the spider dragline wire can shrink 50% of the axial length of the spider dragline wire at most under the high humidity condition, so that the length of the Fabry-Perot cavity is driven to change remarkably.
4. Method for measuring a fabry-perot high humidity sensor according to claim 1 or 2, characterized in that: the method comprises the following steps that a Fabry-Perot high-humidity sensor is placed in a humidity testing environment, the length of a Fabry-Perot cavity is driven by the super-shrinkage of a spider traction wire to change along with humidity, and the length of the Fabry-Perot cavity is in a negative correlation relation with the free spectral range of a double-beam interference spectrum measured by a spectrometer; and measuring the change of the humidity of the environment by detecting the change of the free spectral range of the interference spectrum.
5. A method of measuring a fabry-perot high humidity sensor according to claim 3, characterized in that: the method comprises the following steps that a Fabry-Perot high-humidity sensor is placed in a humidity testing environment, the length of a Fabry-Perot cavity is driven by the super-shrinkage of a spider traction wire to change along with humidity, and the length of the Fabry-Perot cavity is in a negative correlation relation with the free spectral range of a double-beam interference spectrum measured by a spectrometer; and measuring the change of the humidity of the environment by detecting the change of the free spectral range of the interference spectrum.
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