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CN111811504A - Stacked micro-inertial measurement unit under high overload and high dynamic application environment - Google Patents

Stacked micro-inertial measurement unit under high overload and high dynamic application environment Download PDF

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CN111811504A
CN111811504A CN202010809926.0A CN202010809926A CN111811504A CN 111811504 A CN111811504 A CN 111811504A CN 202010809926 A CN202010809926 A CN 202010809926A CN 111811504 A CN111811504 A CN 111811504A
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measurement unit
inertial measurement
elastic
overload
application environment
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鞠莉娜
蒋鹏
黄艳辉
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China North Industries Group Corp No 214 Research Institute Suzhou R&D Center
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Abstract

本发明公开了一种大过载高动态应用环境下的层叠式微惯性测量单元,包括至少两块电路板,所述电路板上设置有至少一种惯性传感器,所述电路板间通过弹性支撑结构叠层固定,所述弹性支撑结构包括固定部和弹性部,所述弹性部由弹性材料制成,所述电路板间通过柔性导带连接器进行电气互联,所述柔性导带连接器包括柔性导带,所述柔性导带的长度大于电路板之间的间距。微惯性测量单元采用叠层式设计,将所有的惯性传感器进行平面安装,提升了系统抗大过载能力,系统内部电子部件均采用特殊设计的弹性体支撑材料进行叠层装配,实现了微惯性测量单元在大过载高动态环境下的力学防护。

Figure 202010809926

The invention discloses a stacked micro-inertial measurement unit under a large overload and high dynamic application environment, comprising at least two circuit boards, at least one inertial sensor is arranged on the circuit boards, and the circuit boards are stacked by an elastic support structure. The layers are fixed, the elastic support structure includes a fixed part and an elastic part, the elastic part is made of elastic material, and the circuit boards are electrically interconnected through a flexible conductive tape connector, and the flexible conductive tape connector includes a flexible conductive tape connector. The length of the flexible conductive tape is greater than the spacing between the circuit boards. The micro-inertial measurement unit adopts a laminated design, and all inertial sensors are installed on a plane, which improves the system's ability to resist large overloads. The electronic components inside the system are laminated with specially designed elastomer support materials to realize micro-inertial measurement. The mechanical protection of the unit in the high overload and high dynamic environment.

Figure 202010809926

Description

大过载高动态应用环境下的层叠式微惯性测量单元Stacked micro-inertial measurement unit under high overload and high dynamic application environment

技术领域technical field

本发明涉及微惯性测量单元的结构与力学防护设计技术领域,具体地涉及一种大过载高动态应用环境下的层叠式微惯性测量单元。The invention relates to the technical field of structure and mechanical protection design of a micro-inertial measurement unit, in particular to a stacked micro-inertial measurement unit under a large overload and high dynamic application environment.

背景技术Background technique

随着半导体技术的发展,MEMS(微机电系统)技术由于其微型化、低成本以及高可靠性等特点,广泛地应用在无人机,制导弹药、稳定平台等军事领域。而基于MEMS技术的微惯性测量单元作为测量载体动态数据的传感器系统,具有精度高、体积小、环境适应性强、成本低等优点,可应用于大过载、高动态等恶劣环境。微惯性测量单元通过内部集成的MEMS惯性传感器进行运动感知,其测量原理是:传感器内部硅微机械结构的运动与相对位移产生可供检测电学信号,专用集成电路对该电学信号进行处理,对外输出模拟或者数字量,从而感知载体的运动信息。With the development of semiconductor technology, MEMS (Micro-Electro-Mechanical System) technology is widely used in military fields such as drones, guided munitions, and stable platforms due to its miniaturization, low cost, and high reliability. The micro-inertial measurement unit based on MEMS technology, as a sensor system for measuring the dynamic data of the carrier, has the advantages of high accuracy, small size, strong environmental adaptability, and low cost, and can be used in harsh environments such as large overload and high dynamics. The micro-inertial measurement unit performs motion perception through the internal integrated MEMS inertial sensor. The measurement principle is: the movement and relative displacement of the silicon micro-mechanical structure inside the sensor generate electrical signals that can be detected, and the special integrated circuit processes the electrical signals and outputs them externally. Analog or digital, so as to perceive the motion information of the carrier.

微惯性测量单元作为载体运动状态的检测装置,需满足六自由度的惯性参数测量需求,通常采用惯性传感器正交装配实现其敏感轴向的六自由度测量。由于MEMS惯性传感器的硅微机械结构设计原理,在侧向竖直安装情况下,承受过载冲击能力较弱。并且在大过载、高动态环境下,微惯性测量测量单元会承受极大的传递应力与高频振动,均会对系统功能造成影响甚至失效。因此针对恶劣应用环境下的可靠性,需对微惯性测量单元的系统方案进行优化与环境防护设计。并且为了降低机械加工、装配等误差,同时保证系统可靠性与配合强度,微惯性测量单元尽量避免多零件的拼接组装设计。现有的一些做法及存在的缺陷如下:As a detection device for the motion state of the carrier, the micro-inertial measurement unit needs to meet the requirements of six-degree-of-freedom inertial parameter measurement. Usually, the orthogonal assembly of inertial sensors is used to realize the six-degree-of-freedom measurement of its sensitive axial direction. Due to the design principle of the silicon micro-mechanical structure of the MEMS inertial sensor, the ability to withstand overload shock is weak in the case of lateral and vertical installation. And in the large overload and high dynamic environment, the micro-inertial measurement measurement unit will bear great transmission stress and high-frequency vibration, which will affect the system function or even fail. Therefore, for the reliability in harsh application environments, it is necessary to optimize the system scheme of the micro-inertial measurement unit and design the environmental protection. And in order to reduce errors in machining and assembly, and at the same time ensure system reliability and coordination strength, the micro-inertial measurement unit tries to avoid the splicing and assembly design of multiple parts. Some of the existing practices and their shortcomings are as follows:

公告号CN 110017835 A的发明专利《惯性测量单元及应用该惯性测量单元的可移动装置》提出了一种具有恒温加热功能的惯性测量单元与应用该惯性测量单元的可移动装置。该惯性测量单元内部采用高导热率的框架结构,利用加热源产生热量对框架内嵌电路板进行加热,通过多传感器感知系统实时温度,内部隔热板与胶套维持系统预设温度。该方案通过特殊的结构与导热路径设计,保证系统在工作时处于恒温状态,减低系统的温度漂移,提升系统性能。该设计主要针对惯性测量单元的温度特性进行系统环境优化设计,未对大过载、高动态应用环境进行特殊防护。The invention patent "Inertial Measurement Unit and the Movable Device Using the Inertial Measurement Unit" with the publication number CN 110017835 A proposes an inertial measurement unit with a constant temperature heating function and a movable device using the inertial measurement unit. The inertial measurement unit adopts a frame structure with high thermal conductivity, and uses the heating source to generate heat to heat the circuit board embedded in the frame. The real-time temperature of the system is sensed through multi-sensors, and the internal heat insulation board and rubber sleeve maintain the preset temperature of the system. Through the special structure and heat conduction path design, this solution ensures that the system is in a constant temperature state during operation, reduces the temperature drift of the system, and improves the performance of the system. The design is mainly designed to optimize the system environment according to the temperature characteristics of the inertial measurement unit, and does not provide special protection for the large overload and high dynamic application environment.

公告号CN 105352501 A的发明专利《模块化、可扩展型MEMS惯性测量单元》提出了一种敏感模块正交装配与正方体框架,内部叠层计算机模块的可扩展型MEMS惯性测量单元。该方案将四个敏感模块通过螺钉竖直装配与正方支架四个侧框,两个敏感模块与计算机模块水平装配于正方体支架内部,通过单头螺柱实现互连支撑。该惯性测量单元内部紧凑,模块化与灵活性程度较高,系统可配置性好。但由于正方体支架内部层叠三个模块,内部空间十分有限,且敏感模块存在竖直与水平安装,因此敏感模块与计算机模块的信号连接将提高该惯性测量单元的装配复杂程度。The invention patent "Modular and Scalable MEMS Inertial Measurement Unit" with the publication number CN 105352501 A proposes a scalable MEMS inertial measurement unit with an orthogonal assembly of sensitive modules and a cube frame, and an internal stack of computer modules. In this scheme, four sensitive modules are vertically assembled with the four side frames of the square bracket by screws, and two sensitive modules and the computer module are horizontally assembled inside the square bracket, and are interconnected and supported by single-headed studs. The inertial measurement unit has a compact interior, a high degree of modularity and flexibility, and good system configurability. However, since three modules are stacked inside the cube bracket, the internal space is very limited, and the sensitive modules are installed vertically and horizontally, so the signal connection between the sensitive module and the computer module will increase the assembly complexity of the inertial measurement unit.

公告号CN 104296746 A的发明专利《一种新型微惯性测量单元》提出了一种可将MEMS加速度计、MEMS陀螺仪与安装基座进行同一平面或者平行叠层焊接装配的微型惯性测量单元组合。该发明选择不同敏感结构的MEMS加速度计与MEMS陀螺仪,使其惯性测量轴向水平或垂直与传感器焊接平面,从而满足六自由度的惯性参数测量需求。此方案避免惯性传感器的正交装配,空间利用率大,系统集成度较高,抗过载能力强。但是其未对大过载、高动态应用环境进行特殊防护。The invention patent "a new type of micro-inertial measurement unit" with the publication number CN 104296746 A proposes a micro-inertial measurement unit combination that can be assembled by welding a MEMS accelerometer, a MEMS gyroscope and a mounting base on the same plane or parallel stacking. The invention selects MEMS accelerometers and MEMS gyroscopes with different sensitive structures, so that the inertial measurement axis is horizontal or vertical to the welding plane of the sensor, so as to meet the inertial parameter measurement requirements of six degrees of freedom. This solution avoids the orthogonal assembly of inertial sensors, has large space utilization, high system integration, and strong anti-overload capability. However, it does not provide special protection for large overload and high dynamic application environments.

公告号CN 107966144 A的发明专利《一种基于MEMS传感器的惯性测量组合的装配体结构》提出一种通过安装基座实现MEMS惯性传感器三轴正交安装的装配体结构方案。安装基座结构近似六面体,顶面与侧面安装MEMS传感器,底面安装陀螺信号处理电路。安装基座预留走线槽,信号线经绑扎形成线束并对外引出。该方案将信号转换电路至于基座底部密闭腔体,实现物理隔离,减少信号干扰。但该装配体结构较为复杂,加工难度大,且内部信号传输采用导线方式,增加装配流程。The invention patent of the publication number CN 107966144 A, "An Assembly Structure of Inertial Measurement Combination Based on MEMS Sensors", proposes an assembly structure scheme for realizing three-axis orthogonal installation of MEMS inertial sensors through a mounting base. The structure of the installation base is approximately hexahedron, the MEMS sensor is installed on the top surface and the side surface, and the gyro signal processing circuit is installed on the bottom surface. The installation base has reserved wiring grooves, and the signal wires are bound to form a wire bundle and lead out to the outside. In this scheme, the signal conversion circuit is placed in a closed cavity at the bottom of the base to achieve physical isolation and reduce signal interference. However, the structure of the assembly is relatively complex, the processing is difficult, and the internal signal transmission adopts the wire method, which increases the assembly process.

公告号CN 105922836 A的发明专利《可调阻尼的抗冲击微型惯性测量单元》提出了一种由外部壳体、惯性装配体、减振器以及密封垫组成的微惯性测量单元。其中外部壳体与密封垫形成密闭空间,惯性装配体通过减震器悬挂于密闭壳体中,内部空气性高阻尼弹性体。下壳体内表面设有凸起止挡结构,可调节系统抗冲击性能。减震器包含的减振橡胶上下表面具有均匀凹槽,可控制减震器谐振频率。该方案抗冲击与减振性能可根据应用环境进行调整,灵活度较高,多种阻尼设计利于振动隔离。但该方案惯性器件的敏感轴向与微型惯性测量单元的轴向存在一定角度,需通过系统补偿进行比例尺调整,增加了系统误差。The invention patent of Announcement No. CN 105922836 A "Anti-Shock Micro Inertial Measurement Unit with Adjustable Damping" proposes a micro-inertial measurement unit composed of an outer casing, an inertial assembly, a shock absorber and a sealing gasket. The outer casing and the gasket form a closed space, the inertial assembly is suspended in the closed casing through the shock absorber, and the inner air is a high-damping elastic body. The inner surface of the lower casing is provided with a convex stop structure, which can adjust the impact resistance of the system. The shock absorber contains vibration-damping rubber with uniform grooves on the upper and lower surfaces to control the shock's resonance frequency. The impact resistance and vibration reduction performance of this solution can be adjusted according to the application environment, with high flexibility, and various damping designs are conducive to vibration isolation. However, there is a certain angle between the sensitive axial direction of the inertial device and the axial direction of the micro inertial measurement unit in this scheme, and the scale adjustment needs to be carried out through system compensation, which increases the system error.

发明内容SUMMARY OF THE INVENTION

针对上述存在的技术问题,本发明目的是:提供了一种大过载高动态应用环境下的层叠式微惯性测量单元,微惯性测量单元采用叠层式设计,将所有的惯性传感器进行平面安装,提升了系统抗大过载能力,系统内部电子部件均采用特殊设计的弹性体支撑材料进行叠层装配,实现了微惯性测量单元在大过载高动态环境下的力学防护。In view of the above-mentioned technical problems, the purpose of the present invention is to provide a stacked micro-inertial measurement unit under a high-overload and high-dynamic application environment. In order to improve the system's ability to resist large overload, the internal electronic components of the system are laminated with specially designed elastomer supporting materials, which realizes the mechanical protection of the micro-inertial measurement unit in the large overload and high dynamic environment.

本发明的技术方案是:The technical scheme of the present invention is:

一种大过载高动态应用环境下的层叠式微惯性测量单元,包括至少两块电路板,所述电路板上设置有至少一种惯性传感器,所述电路板间通过弹性支撑结构叠层固定,所述弹性支撑结构包括固定部和弹性部,所述弹性部由弹性材料制成,所述电路板间通过柔性导带连接器进行电气互联,所述柔性导带连接器包括柔性导带,所述柔性导带的长度大于电路板之间的间距。A stacked micro-inertial measurement unit under a large overload and high dynamic application environment includes at least two circuit boards, at least one inertial sensor is arranged on the circuit boards, and the circuit boards are laminated and fixed by an elastic support structure, so the The elastic support structure includes a fixed part and an elastic part, the elastic part is made of elastic material, and the circuit boards are electrically interconnected through a flexible conductive tape connector, the flexible conductive tape connector includes a flexible conductive tape, the The length of the flexible conductive tape is greater than the spacing between the circuit boards.

优选的技术方案中,所述弹性材料的材料参数根据应用环境进行设计,保证在承受大过载阶段,弹性部的形变处于弹性区间。In a preferred technical solution, the material parameters of the elastic material are designed according to the application environment, so as to ensure that the deformation of the elastic part is in the elastic range in the stage of bearing a large overload.

优选的技术方案中,计算弹性材料的阻尼特性与系统固有频率,使得弹性材料的阻尼特性与系统固有频率不一致。In a preferred technical solution, the damping characteristic of the elastic material and the natural frequency of the system are calculated, so that the damping characteristic of the elastic material is inconsistent with the natural frequency of the system.

优选的技术方案中,所述固定部通过镶嵌式结构与弹性部连接,通过粘胶进行固连。In a preferred technical solution, the fixing portion is connected to the elastic portion through a mosaic structure, and is fixedly connected by adhesive.

优选的技术方案中,所述弹性支撑结构为圆台结构,所述固定部设置有螺纹。In a preferred technical solution, the elastic support structure is a circular truncated structure, and the fixing portion is provided with threads.

优选的技术方案中,所述述柔性导带连接器还包括金手指焊盘结构和塑料体结构,所述柔性导带两端引出内部走线铜箔,通过增厚形成一定强度的金手指焊盘,将金手指焊盘与部分柔性导带进行注塑,得到塑料体结构。In a preferred technical solution, the flexible conductive strip connector further includes a gold finger pad structure and a plastic body structure, and two ends of the flexible conductive strip lead out internal wiring copper foils, which are thickened to form gold finger welding with a certain strength plate, and injection molding the gold finger pad and part of the flexible conductive tape to obtain a plastic body structure.

优选的技术方案中,控制电路板通过柔性导带连接器连接至电气结构接插件。In a preferred technical solution, the control circuit board is connected to the electrical structural connector through a flexible conductive tape connector.

优选的技术方案中,所述层叠式微惯性测量单元的外围设置有金属壳体,所述金属壳体包括方形套筒与平面底座,所述方形套筒与平面底座每侧具有安装法兰。In a preferred technical solution, a metal casing is provided on the periphery of the stacked micro-inertial measurement unit, and the metal casing includes a square sleeve and a plane base, and each side of the square sleeve and the plane base has a mounting flange.

与现有技术相比,本发明的优点是:Compared with the prior art, the advantages of the present invention are:

1、本发明系统内部电子部件均采用特殊设计的弹性体支撑材料进行叠层装配,实现了微惯性测量单元在大过载高动态环境下的力学防护,且电路板之间通过柔性导带进行信息互联,保证了电气接口的可靠性。同时该层叠结构与信息互联方式,使微惯性测量单元功能具备灵活性与可拓展性。1. The internal electronic components of the system of the present invention are laminated and assembled with specially designed elastomer supporting materials, which realizes the mechanical protection of the micro-inertial measurement unit under the large overload and high dynamic environment, and the information is transmitted between the circuit boards through the flexible conduction belt. The interconnection ensures the reliability of the electrical interface. At the same time, the layered structure and the information interconnection method make the function of the micro-inertial measurement unit flexible and expandable.

2、微惯性测量单元采用叠层式设计,将所有的惯性传感器进行平面安装,使得微惯性测量单元在承受大过载状态下,惯性传感器硅微敏感结构的运动方向与过载方向非重合,提升了系统抗大过载能力。电路板支撑结构采用一定强度的弹性体材料,使其通过形变缓解大过载冲击与高频振动,电路板之间的机械连接采用同种方式,可衰减过载与振动的传递。设计弹性支撑结构的材料特性,使其在承受大过载的过程中,材料处于弹性变形区间,保证大过载冲击阶段结束后,微惯性测量单元的传感器电路板可回归至初始位置。由于支撑结构采用弹性材料,在外界振动传递至微惯性测量单元结构内部,电路板由于其本身惯性会压缩或者拉伸弹性支撑结构,减少由振动引起的位移,起到衰减振动的作用。这种情况会造成电路板间的间距发生一定变化,电路板采用传统线束的电气互联方式会造成线束在电路板之间移动撞击,对输出信号产生极大的噪声,影响系统功能;采用接插件互联的方式,振动会对电路板之间对插强度与可靠性造成影响。本发明采用柔性导带的电气互联方式,导带长度略长于电路板之间的间距,使得电路板间距被压缩或者拉伸的状态下,电气互联保持牢固可靠。2. The micro-inertial measurement unit adopts a stacked design, and all inertial sensors are installed on a plane, so that when the micro-inertial measurement unit is subjected to a large overload, the motion direction of the silicon micro-sensitive structure of the inertial sensor does not coincide with the overload direction, which improves the performance. The system has the ability to resist large overload. The circuit board support structure adopts a certain strength of elastomer material, so that it can relieve large overload shock and high-frequency vibration through deformation, and the mechanical connection between the circuit boards adopts the same method, which can attenuate the transmission of overload and vibration. The material characteristics of the elastic support structure are designed so that the material is in the elastic deformation range during the process of bearing a large overload, so that the sensor circuit board of the micro-inertial measurement unit can return to the initial position after the large overload shock stage is over. Since the support structure is made of elastic material, the external vibration is transmitted to the interior of the micro-inertial measurement unit structure, and the circuit board will compress or stretch the elastic support structure due to its own inertia, reducing the displacement caused by vibration and attenuating vibration. This situation will cause the spacing between the circuit boards to change to a certain extent. The electrical interconnection method of the circuit board using the traditional wiring harness will cause the wiring harness to move and impact between the circuit boards, which will produce great noise on the output signal and affect the system function; the use of connectors In the way of interconnection, vibration will affect the strength and reliability of the interconnection between the circuit boards. The invention adopts the electrical interconnection method of the flexible conductive tape, and the length of the conductive tape is slightly longer than the spacing between the circuit boards, so that the electrical interconnection remains firm and reliable when the spacing between the circuit boards is compressed or stretched.

附图说明Description of drawings

下面结合附图及实施例对本发明作进一步描述:Below in conjunction with accompanying drawing and embodiment, the present invention is further described:

图1是本发明的微惯性测量单元示意图;Fig. 1 is the micro-inertial measurement unit schematic diagram of the present invention;

图2是本发明微惯性测量单元系统示意图;Fig. 2 is the micro-inertial measurement unit system schematic diagram of the present invention;

图3为本发明微惯性测量单元叠层设计示意图;FIG. 3 is a schematic diagram of the stacked design of the micro-inertial measurement unit of the present invention;

图4为本发明一种实施例的弹性支撑结构设计示意图;FIG. 4 is a schematic diagram of the design of an elastic support structure according to an embodiment of the present invention;

图5为图4的连接结构示意图;Fig. 5 is the connection structure schematic diagram of Fig. 4;

图6为本发明另一种实施例的弹性支撑结构设计示意图;6 is a schematic diagram of the design of an elastic support structure according to another embodiment of the present invention;

图7为图6的连接结构示意图;Fig. 7 is the connection structure schematic diagram of Fig. 6;

图8为本发明柔性导带连接器的整体结构示意图;8 is a schematic diagram of the overall structure of the flexible conductive tape connector of the present invention;

图9为本发明柔性导带连接器去掉注塑后的结构示意图。FIG. 9 is a schematic structural diagram of the flexible conductive belt connector of the present invention after the injection molding is removed.

1:方形套筒、2:平面底座、3:电路板锁紧件、41:上部弹性支撑结构、411:上端金属外螺纹结构、412:弹性阻尼材料结构、413:下端金属外螺纹结构、42:中部弹性支撑结构、421:上端金属内螺纹结构、422:弹性阻尼材料结构、423:下端金属外螺纹结构、43:下部弹性支撑结构、431:上端金属内螺纹结构、432:弹性阻尼材料结构、433:下端金属外螺纹结构、5:加速度计电路板、51:X轴加速度计、52:Y轴加速度计、53:Z轴加速度计、6:陀螺仪电路板、61:X轴陀螺仪、62:Y轴陀螺仪、63:Z轴陀螺仪、7:控制电路板、71:控制芯片、8:柔性导带连接器、801:金手指焊盘、802:塑性结构、803:柔性导带、9:电气结构接插件、10:凹槽、11:通孔、12:凸块、13:延伸部。1: Square sleeve, 2: Flat base, 3: Circuit board locking member, 41: Upper elastic support structure, 411: Upper metal external thread structure, 412: Elastic damping material structure, 413: Bottom metal external thread structure, 42 : Middle elastic support structure, 421: Upper metal inner thread structure, 422: Elastic damping material structure, 423: Lower metal outer thread structure, 43: Lower elastic support structure, 431: Upper metal inner thread structure, 432: Elastic damping material structure , 433: Bottom metal external thread structure, 5: Accelerometer circuit board, 51: X-axis accelerometer, 52: Y-axis accelerometer, 53: Z-axis accelerometer, 6: Gyroscope circuit board, 61: X-axis gyroscope , 62: Y-axis gyroscope, 63: Z-axis gyroscope, 7: Control circuit board, 71: Control chip, 8: Flexible conductor tape connector, 801: Gold finger pad, 802: Plastic structure, 803: Flexible conductor Belt, 9: Electrical structure connector, 10: Groove, 11: Through hole, 12: Bump, 13: Extension.

具体实施方式Detailed ways

为使本发明的目的、技术方案和优点更加清楚明了,下面结合具体实施方式并参照附图,对本发明进一步详细说明。应该理解,这些描述只是示例性的,而并非要限制本发明的范围。此外,在以下说明中,省略了对公知结构和技术的描述,以避免不必要地混淆本发明的概念。In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the specific embodiments and the accompanying drawings. It should be understood that these descriptions are exemplary only and are not intended to limit the scope of the invention. Also, in the following description, descriptions of well-known structures and techniques are omitted to avoid unnecessarily obscuring the concepts of the present invention.

如图1所示,本发明设计的叠层式微惯性测量单元,外部金属壳体采用高强度超硬铝,以方形套筒1与平面底座2的形式进行配合。方形套筒1与平面底座2每侧具有安装法兰,并根据装配结构分别设有螺纹孔与圆通孔,实现微惯性测量单元的系统装配与位于载体安装平面的定位安装。As shown in FIG. 1 , in the stacked micro-inertial measurement unit designed by the present invention, the outer metal shell is made of high-strength super-hard aluminum, which is matched in the form of a square sleeve 1 and a plane base 2 . The square sleeve 1 and the plane base 2 have mounting flanges on each side, and are respectively provided with threaded holes and round through holes according to the assembly structure, so as to realize the system assembly of the micro-inertial measurement unit and the positioning and installation on the carrier mounting plane.

大过载高动态应用环境下的层叠式微惯性测量单元,包括至少两块电路板,电路板上设置有至少一种惯性传感器,电路板间通过弹性支撑结构叠层固定,弹性支撑结构包括固定部和弹性部,弹性部由弹性材料制成,电路板间通过柔性导带连接器进行电气互联,柔性导带连接器包括柔性导带,所述柔性导带的长度大于电路板之间的间距。A stacked micro-inertial measurement unit under a large overload and high dynamic application environment includes at least two circuit boards, at least one inertial sensor is arranged on the circuit boards, and the circuit boards are laminated and fixed by an elastic support structure, and the elastic support structure includes a fixing part and a The elastic part is made of elastic material, and the circuit boards are electrically interconnected through a flexible conductive strip connector, and the flexible conductive strip connector includes a flexible conductive strip, and the length of the flexible conductive strip is greater than the distance between the circuit boards.

如图2、3所示,本实施例以三块电路板为例进行说明,包括控制电路板7、加速度计电路板5与陀螺仪电路板6。控制电路板7上设置有控制芯片71,加速度计电路板5上设置有X轴加速度计51,Y轴加速度计52,Z轴加速度计53,陀螺仪电路板6上设置有X轴陀螺仪61,Y轴陀螺仪62,Z轴陀螺仪63。As shown in FIGS. 2 and 3 , this embodiment is described by taking three circuit boards as an example, including a control circuit board 7 , an accelerometer circuit board 5 and a gyroscope circuit board 6 . The control circuit board 7 is provided with a control chip 71, the accelerometer circuit board 5 is provided with an X-axis accelerometer 51, a Y-axis accelerometer 52, a Z-axis accelerometer 53, and the gyroscope circuit board 6 is provided with an X-axis gyroscope 61 , Y-axis gyroscope 62, Z-axis gyroscope 63.

平面底座2内部通过螺纹孔固定下部弹性支撑结构43,下部弹性支撑结构43包括上端金属内螺纹结构431、弹性阻尼材料结构432、下端金属外螺纹结构433,下部弹性支撑结构43近似为两层圆台结构,如图6、7所示,下层圆台为金属材料并设有外螺纹,与平面底座2进行锁紧配合;上层圆台包含弹性材料且顶面设有金属结构内螺纹,与中部弹性支撑结构42进行配合,固定控制电路板7。上端金属内螺纹结构431和下端金属外螺纹结构433通过镶嵌式结构与弹性阻尼材料结构432连接,如图7所示,通过粘胶进行固连,镶嵌式结构设计增大粘接面,使装配牢固,提高可靠性。The lower elastic support structure 43 is fixed inside the plane base 2 through threaded holes. The lower elastic support structure 43 includes an upper end metal inner thread structure 431, an elastic damping material structure 432, and a lower end metal outer thread structure 433. The lower elastic support structure 43 is approximately a two-layer circular truncated structure Structure, as shown in Figures 6 and 7, the lower round table is made of metal material and is provided with an external thread, which is locked with the plane base 2; the upper round table is made of elastic material and the top surface is provided with a metal structure inner thread, and the middle elastic support structure 42 to cooperate to fix the control circuit board 7 . The upper metal inner thread structure 431 and the lower metal outer thread structure 433 are connected to the elastic damping material structure 432 through a mosaic structure. As shown in FIG. 7, they are fixed by glue. The mosaic structure design increases the bonding surface and enables assembly. Strong and improved reliability.

中部弹性支撑结构42与下部弹性支撑结构43相同,如图6、7所示,包括上端金属内螺纹结构421、弹性阻尼材料结构422、下端金属外螺纹结构423,中部弹性支撑结构42与上部弹性支撑结构41进行配合,固定陀螺仪电路板6,上部弹性支撑结构41包括上端金属外螺纹结构411,弹性阻尼材料结构412,下端金属外螺纹结构413,如图4、5所示,上部弹性支撑结构41与电路板锁紧件3固定加速度计电路板5。上端金属外螺纹结构411和下端金属外螺纹结构413通过镶嵌式结构与弹性阻尼材料结构412连接,然后通过粘胶进行固连。The middle elastic support structure 42 is the same as the lower elastic support structure 43, as shown in Figures 6 and 7, including the upper end metal internal thread structure 421, the elastic damping material structure 422, the lower end metal external thread structure 423, the middle elastic support structure 42 and the upper elastic support structure 421. The support structure 41 cooperates to fix the gyroscope circuit board 6. The upper elastic support structure 41 includes an upper metal external thread structure 411, an elastic damping material structure 412, and a lower metal external thread structure 413. As shown in Figures 4 and 5, the upper elastic support The structure 41 and the circuit board locking member 3 fix the accelerometer circuit board 5 . The upper metal external thread structure 411 and the lower metal external thread structure 413 are connected to the elastic damping material structure 412 through a mosaic structure, and then fixedly connected by glue.

镶嵌式结构的一种较佳的实施例,如图5所示,弹性阻尼材料结构412为圆台结构,两端设置有凹槽10,中部设置有通孔11,上端金属外螺纹结构411和下端金属外螺纹结构413的中部设置有与通孔11配合的凸块12,边缘设置有向下延伸的延伸部13,延伸部13与凹槽10卡扣配合。A preferred embodiment of the mosaic structure, as shown in FIG. 5 , the elastic damping material structure 412 is a circular truncated structure, with grooves 10 at both ends, a through hole 11 in the middle, a metal external thread structure 411 at the upper end and a lower end The middle part of the metal external thread structure 413 is provided with a protrusion 12 which cooperates with the through hole 11 , and the edge is provided with an extension part 13 extending downward, and the extension part 13 is snap-fitted with the groove 10 .

弹性阻尼材料结构采用弹性材料制成,例如硬质硅橡胶或者聚氨酯材料,由于硬质硅橡胶或者聚氨酯材料相关材料参数范围较广且组份不同特性不同,在此不列举详细参数。弹性材料根据微惯性测量单元的应用环境,设计其材料参数,保证在承受在大过载阶段,支撑结构的形变处于弹性区间。同时考虑其阻尼特性与系统固有频率,衰减工作状态下外界传入的高频振动,并避开载体系统的谐振频率,提升微惯性测量单元的可靠性。The elastic damping material structure is made of elastic material, such as hard silicone rubber or polyurethane material. Due to the wide range of related material parameters of hard silicone rubber or polyurethane material and the different characteristics of different components, detailed parameters are not listed here. According to the application environment of the micro-inertial measurement unit, the elastic material design its material parameters to ensure that the deformation of the support structure is in the elastic range when it is subjected to a large overload stage. At the same time, considering its damping characteristics and the natural frequency of the system, it can attenuate the high-frequency vibration introduced from the outside world under the working state, and avoid the resonant frequency of the carrier system to improve the reliability of the micro-inertial measurement unit.

电路板之间设计柔性导带连接器8,实现电路板之间的信号互联。如图8和9所示,柔性导带连接器8采用设有金手指焊盘的塑料体结构,中间采用聚酰亚胺(PI)或其他高可靠性基材的柔性导带,柔性导带连接器8包括金手指焊盘801、塑性结构802、柔性导带803。柔性导带803两端引出内部走线铜箔,通过增厚形成一定强度的金手指焊盘801,利用特殊设计的模具将金手指焊盘801与部分柔性导带803进行注塑,建立塑料体结构802,从而实现电气互联作用的柔性导带连接器8。微惯性测量单元电气接口同样采用柔性导带进行连接,由控制电路板7引出,通过柔性导带连接器8连接至电气结构接插件9。微惯性测量单元的加速度计电路板5与陀螺仪电路板6的结构相同,信号接口在电路板内的相对位置相同,通讯方式相同,如SPI,IIC等,实现与控制电路板7的等位连接与按需装配。如系统功能需求为六轴微惯性测量单元,则按照标准结构:控制电路-陀螺仪电路-加速度计电路由下向上叠层装配,实现功能;如系统功能需求为三(两)轴加速度计,则去除陀螺仪电路,按照控制电路与-加速度计电路由下向上叠层装配;如系统功能需求为三(两)轴陀螺仪,则去除加速度计电路,按照控制电路与-陀螺仪电路由下向上叠层装配。如需拓展测量功能,可按照现有信号接口进行电路板设计,如增加地磁、倾角仪电路板等。也可对控制电路板进行功能延伸,增加导航模块,使微惯性测量组件改造为微惯性导航组件。Flexible conductive tape connectors 8 are designed between circuit boards to realize signal interconnection between circuit boards. As shown in Figures 8 and 9, the flexible conductor tape connector 8 adopts a plastic body structure with gold finger pads, and a flexible conductor tape of polyimide (PI) or other high-reliability substrates is used in the middle. The connector 8 includes gold finger pads 801 , a plastic structure 802 , and a flexible conductive strip 803 . The two ends of the flexible conductive tape 803 lead out the internal wiring copper foil, and the gold finger pads 801 with a certain strength are formed by thickening, and the gold finger pads 801 and part of the flexible conductive tape 803 are injection-molded with a specially designed mold to establish a plastic body structure. 802, so as to realize the flexible conductive tape connector 8 for electrical interconnection. The electrical interface of the micro-inertial measurement unit is also connected by a flexible conductive tape, which is led out from the control circuit board 7 and connected to the electrical structure connector 9 through the flexible conductive tape connector 8 . The accelerometer circuit board 5 of the micro-inertial measurement unit has the same structure as the gyroscope circuit board 6, the relative position of the signal interface in the circuit board is the same, and the communication method is the same, such as SPI, IIC, etc., to achieve the same position with the control circuit board 7 Connect and assemble on demand. If the functional requirement of the system is a six-axis micro-inertial measurement unit, the standard structure shall be followed: the control circuit-gyroscope circuit-accelerometer circuit is assembled from bottom to top to realize the function; if the functional requirement of the system is a three (two) axis accelerometer, Then remove the gyroscope circuit, and assemble it from bottom to top according to the control circuit and the -accelerometer circuit; if the system function requirement is three (two) axis gyroscopes, remove the accelerometer circuit, and follow the control circuit and -gyroscope circuit from bottom to bottom Stack up assembly. If you want to expand the measurement function, you can design the circuit board according to the existing signal interface, such as adding geomagnetism, inclinometer circuit board, etc. It is also possible to extend the function of the control circuit board, add a navigation module, and transform the micro-inertial measurement component into a micro-inertial navigation component.

由于系统内部电子部件均采用特殊设计的弹性体支撑材料进行叠层装配,实现了微惯性测量单元在大过载高动态环境下的力学防护,且电路板之间通过柔性导带进行信息互联,保证了电气接口的可靠性。同时该层叠结构与信息互联方式,使微惯性测量单元功能具备灵活性与可拓展性。Since the internal electronic components of the system are laminated and assembled with specially designed elastomer support materials, the mechanical protection of the micro-inertial measurement unit in the large overload and high dynamic environment is realized, and the information interconnection between the circuit boards is carried out through the flexible conduction belt to ensure reliability of the electrical interface. At the same time, the layered structure and the information interconnection method make the function of the micro-inertial measurement unit flexible and expandable.

应当理解的是,本发明的上述具体实施方式仅仅用于示例性说明或解释本发明的原理,而不构成对本发明的限制。因此,在不偏离本发明的精神和范围的情况下所做的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。此外,本发明所附权利要求旨在涵盖落入所附权利要求范围和边界、或者这种范围和边界的等同形式内的全部变化和修改例。It should be understood that the above-mentioned specific embodiments of the present invention are only used to illustrate or explain the principle of the present invention, but not to limit the present invention. Therefore, any modifications, equivalent replacements, improvements, etc. made without departing from the spirit and scope of the present invention should be included within the protection scope of the present invention. Furthermore, the appended claims of this invention are intended to cover all changes and modifications that fall within the scope and boundaries of the appended claims, or the equivalents of such scope and boundaries.

Claims (8)

1. The stacked micro-inertia measurement unit under the large-overload high-dynamic application environment comprises at least two circuit boards, wherein at least one type of inertia sensor is arranged on each circuit board, the circuit boards are fixed in a stacked mode through an elastic support structure, the elastic support structure comprises a fixing portion and an elastic portion, the elastic portion is made of elastic materials, the circuit boards are electrically interconnected through a flexible conduction band connector, the flexible conduction band connector comprises a flexible conduction band, and the length of the flexible conduction band is larger than the distance between the circuit boards.
2. The stacked micro inertial measurement unit under a high overload and high dynamic application environment according to claim 1, wherein the material parameters of the elastic material are designed according to the application environment to ensure that the deformation of the elastic part is in an elastic range in a large overload stage.
3. The stacked micro inertial measurement unit under a large overload and high dynamic application environment of claim 2, wherein the damping characteristic of the elastic material and the system natural frequency are calculated so that the damping characteristic of the elastic material is inconsistent with the system natural frequency.
4. The stacked micro inertial measurement unit under high-overload and high-dynamic application environment according to claim 1, wherein the fixing portion is connected with the elastic portion through a mosaic structure and fixedly connected through glue.
5. The stacked micro inertial measurement unit in a high overload and dynamic application environment according to claim 1, wherein the elastic support structure is a circular truncated cone structure, and the fixing part is provided with a thread.
6. The stacked micro-inertia measurement unit under a large-overload high-dynamic application environment according to claim 1, wherein the flexible conduction band connector further comprises a golden finger pad structure and a plastic body structure, internal routing copper foils are led out from two ends of the flexible conduction band, a golden finger pad with a certain strength is formed through thickening, and the golden finger pad and a part of the flexible conduction band are subjected to injection molding to obtain the plastic body structure.
7. The stacked micro inertial measurement unit in a high overload and high dynamic application environment of claim 1, wherein the control circuit board is connected to the electrical structure connector through a flexible conductive strip connector.
8. The stacked micro inertial measurement unit under a high-overload and high-dynamic application environment according to claim 1, wherein a metal shell is arranged on the periphery of the stacked micro inertial measurement unit, and the metal shell comprises a square sleeve and a planar base, and a mounting flange is arranged on each side of the square sleeve and the planar base.
CN202010809926.0A 2020-08-13 2020-08-13 Stacked micro-inertial measurement unit under high overload and high dynamic application environment Pending CN111811504A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112243328A (en) * 2020-11-10 2021-01-19 萧晓玥 Sensor high-frequency vibration conduction blocking method for unmanned vehicle controller
CN115265531A (en) * 2022-07-12 2022-11-01 北京信息科技大学 A system for identifying motion states using inertial measurement devices
CN115802689A (en) * 2022-10-20 2023-03-14 江西洪都航空工业集团有限责任公司 Installation structure and method of an open missile-loaded integrated control component
CN119394429A (en) * 2024-12-04 2025-02-07 唐智科技湖南发展有限公司 Sensor, sensor circuit board for Z-axis sensitive direction and calibration and installation method thereof
CN120008598A (en) * 2025-04-21 2025-05-16 河北美泰电子科技有限公司 High overload resistant MEMS inertial measurement unit and inertial integrated navigation system

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201739406U (en) * 2010-09-01 2011-02-09 鞍山重型矿山机器股份有限公司 Rubber spring of sieve plate
CN103878911A (en) * 2014-03-27 2014-06-25 北京航天控制仪器研究所 Manufacturing method of cylindrical rubber shock absorber for platform system
CN205014987U (en) * 2015-06-05 2016-02-03 深圳市道通智能航空技术有限公司 Inertial measurement device
CN105352501A (en) * 2015-11-18 2016-02-24 中国船舶重工集团公司第七〇五研究所 Modular extensible MEMS inertial measurement unit
CN206000914U (en) * 2016-09-08 2017-03-08 雷沃重工股份有限公司 A kind of cushion and the suspending mechanism with this cushion
CN106523860A (en) * 2016-12-01 2017-03-22 大连液压件有限公司 Secondary insulation damping foot pad
CN206468731U (en) * 2017-02-22 2017-09-05 刘兆斌 A kind of electro-insulating rubber damper
CN208921141U (en) * 2018-11-29 2019-05-31 重庆前卫科技集团有限公司 A kind of microelectromechanicgyroscope gyroscope inertial navigation
CN110360259A (en) * 2019-07-16 2019-10-22 西安微电子技术研究所 A kind of vibration reduction and cushioning structure and missile equipment applied to Sensitive Apparatus
CN111121773A (en) * 2020-01-09 2020-05-08 陕西华燕航空仪表有限公司 MEMS inertia measurement combination
CN212482500U (en) * 2020-08-13 2021-02-05 中国兵器工业集团第二一四研究所苏州研发中心 Laminated micro-inertia measuring unit under large-overload high-dynamic application environment

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201739406U (en) * 2010-09-01 2011-02-09 鞍山重型矿山机器股份有限公司 Rubber spring of sieve plate
CN103878911A (en) * 2014-03-27 2014-06-25 北京航天控制仪器研究所 Manufacturing method of cylindrical rubber shock absorber for platform system
CN205014987U (en) * 2015-06-05 2016-02-03 深圳市道通智能航空技术有限公司 Inertial measurement device
CN105352501A (en) * 2015-11-18 2016-02-24 中国船舶重工集团公司第七〇五研究所 Modular extensible MEMS inertial measurement unit
CN206000914U (en) * 2016-09-08 2017-03-08 雷沃重工股份有限公司 A kind of cushion and the suspending mechanism with this cushion
CN106523860A (en) * 2016-12-01 2017-03-22 大连液压件有限公司 Secondary insulation damping foot pad
CN206468731U (en) * 2017-02-22 2017-09-05 刘兆斌 A kind of electro-insulating rubber damper
CN208921141U (en) * 2018-11-29 2019-05-31 重庆前卫科技集团有限公司 A kind of microelectromechanicgyroscope gyroscope inertial navigation
CN110360259A (en) * 2019-07-16 2019-10-22 西安微电子技术研究所 A kind of vibration reduction and cushioning structure and missile equipment applied to Sensitive Apparatus
CN111121773A (en) * 2020-01-09 2020-05-08 陕西华燕航空仪表有限公司 MEMS inertia measurement combination
CN212482500U (en) * 2020-08-13 2021-02-05 中国兵器工业集团第二一四研究所苏州研发中心 Laminated micro-inertia measuring unit under large-overload high-dynamic application environment

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112243328A (en) * 2020-11-10 2021-01-19 萧晓玥 Sensor high-frequency vibration conduction blocking method for unmanned vehicle controller
CN115265531A (en) * 2022-07-12 2022-11-01 北京信息科技大学 A system for identifying motion states using inertial measurement devices
CN115802689A (en) * 2022-10-20 2023-03-14 江西洪都航空工业集团有限责任公司 Installation structure and method of an open missile-loaded integrated control component
CN119394429A (en) * 2024-12-04 2025-02-07 唐智科技湖南发展有限公司 Sensor, sensor circuit board for Z-axis sensitive direction and calibration and installation method thereof
CN119394429B (en) * 2024-12-04 2025-11-11 唐智科技湖南发展有限公司 Sensor, sensor circuit board in Z-axis sensitive direction and calibration and installation method of sensor circuit board
CN120008598A (en) * 2025-04-21 2025-05-16 河北美泰电子科技有限公司 High overload resistant MEMS inertial measurement unit and inertial integrated navigation system
CN120008598B (en) * 2025-04-21 2025-08-12 河北美泰电子科技有限公司 High overload resistant MEMS inertial measurement unit and inertial integrated navigation system

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Application publication date: 20201023