CN111703713A - A photoresist insulation device - Google Patents

Abstract

The invention discloses a photoresist heat preservation device, which comprises a main box, a sliding drawer, a control box, an auxiliary box, a first fitting piece, a second fitting piece, a bottom connecting cylinder, a processing table and a limiting mechanism, wherein the limiting mechanism is optimally arranged, a mounting opening is convenient for vertically placing a photoresist container, push plates and extrusion plates are arranged on two sides of the mounting opening, the push plates and the extrusion plates are controlled by the transmission matching structures on the two sides to move to tighten and fix the photoresist container on the mounting opening, the photoresist container is simply and fixedly placed, and the use effect is good; the sliding drawer is arranged through optimization, the ring on the irregular part is matched with the mounting port, so that the photoresist container can be reasonably kept in a certain placing direction, and the matching effect of the inner part in the main box is good.

Description

A photoresist insulation device

technical field

The invention relates to the field of photoresist application, in particular to a photoresist heat preservation device.

Background technique

With the continuous development of the semiconductor industry, the industry's requirements for coating equipment in the lithography process are also increasing. The initial single photoresist coating equipment has been difficult to meet the various photoresists required in the lithography process. Gluing requirements, the current commonly used heat preservation method is to keep each photoresist tube separately. In the case of multiple tubes, several sets of single-channel photoresist heat preservation devices are required, and the photoresist heat preservation device is to keep the photoresist heat preservation. device of.

When in use, since the photoresist needs to be kept warm, the photoresist needs to be placed in a certain sealed environment, and a corresponding photoresist container needs to be installed in a reasonable position during storage, and the existing technology is difficult to simplify. The photoresist container is fixedly placed, and the internal coordination effect is general.

SUMMARY OF THE INVENTION

(1) Technical problems solved

Therefore, in order to solve the above deficiencies, the present invention provides a photoresist heat preservation device.

(2) Technical solutions

In order to achieve the above object, the present invention is achieved through the following technical solutions: a photoresist heat preservation device, the device includes a main box, a sliding drawer, a control box, an auxiliary box, a first matching piece, a second matching piece, a bottom A connecting tube, a processing table and a limit mechanism, the sliding drawer is slidably installed on the main box, the control box is fastened and installed on the side end of the main box, the auxiliary box is installed on the processing table, the first The matching piece is vertically installed on the processing table, the bottom end of the second matching piece is fastened with a bottom connecting cylinder, the bottom surface of the bottom connecting cylinder is fixedly installed on the main box, and the limiting mechanism is installed on the sliding drawer , the limiting mechanism is used for tightening and fixing the photoresist container, so as to fix the photoresist container.

Preferably, the limiting mechanism includes a guide block, a housing, a moving block, a threaded rod, a cage, a motor, a support arm, a push plate, a pressing plate, an installation port, a single-tooth arm, a gear and a buffer plate. The guide block is fastened on the moving block, the retainer is locked and installed on the inner wall of the casing, the threaded rod is engaged with the moving block, the bottom end of the casing is fastened on the sliding drawer, the A threaded rod is rotatably installed on the cage, a threaded rod is rotatably installed on the motor, the support arm is hingedly connected with the single-tooth arm, the single-tooth arm is meshed with the gear, and the gear is meshed with the threaded rod, so the The right side of the push plate is fitted with a squeeze plate, the installation port is prefabricated inside the casing, the support arm is hinged with the push plate, and the top end of the buffer plate is adhesively installed on the inner wall of the casing. The photoresist container is placed on the installation port to realize tightening and fixing of the photoresist container.

Preferably, the sliding drawer includes a vertical plate, a sliding opening, a horizontal plate, a ring, a first handle, an irregular piece and a second handle, the vertical plate and the horizontal plate are an integrated structure, and the horizontal plate The sliding port is prefabricated on the side end, the ring is embedded and installed on the irregular piece, the bottom end of the first grip is fastened and installed on the irregular piece, and the bottom end of the second grip is fastened and installed On the irregularities, the irregularities are located inside the main box.

Preferably, the buffer board includes a board body, an adhesive panel and a prefabricated square mouth, the top of the board body is bonded to the adhesive panel, and a prefabricated square mouth is prefabricated on the plate body, and the prefabricated square mouth is located at Below the auxiliary box.

Preferably, the angle between the vertical plate and the horizontal plate is 90 degrees, and the sliding opening is a rectangular parallelepiped opening.

Preferably, the tops of the first grip and the second grip are higher than the tops of the rings, and the irregularities are of an axisymmetric structure.

Preferably, the push plate and the extrusion plate have a rectangular parallelepiped structure, and the sizes of the two are matched.

Preferably, the top end of the installation port communicates with the ring, and the thickness of the ring is greater than two centimeters.

Preferably, the guide block slides vertically along the inner wall of the casing, a notch is provided under the single-tooth arm, and the notch and the casing are an integrated structure.

Preferably, the extrusion plate is made of rubber, which has good elasticity and good fixing effect.

Preferably, the support arm is made of aluminum alloy, which is light in weight and high in hardness.

(3) Beneficial effects

Compared with the prior art, the present invention provides a photoresist heat preservation device, which has the following beneficial effects:

Advantage 1: The photoresist heat preservation device of the present invention is optimized to set a limit mechanism, the installation port is convenient for placing the photoresist container vertically, and a push plate and a squeeze plate are installed on both sides of the installation port. , the photoresist container on the installation port can be tightened and fixed by controlling the displacement of the push plate and the extrusion plate by the transmission matching structure on both sides, and the photoresist container can be easily fixed and placed, and the use effect is good.

Advantage 2: In the photoresist heat preservation device of the present invention, by optimizing the setting of the sliding drawer, the rings on the irregular parts cooperate with the installation openings, so that the photoresist container can reasonably maintain a certain placement direction. The internal coordination effect is good.

Description of drawings

1 is a schematic structural diagram of a photoresist thermal insulation device of the present invention;

Fig. 2 is the structure schematic diagram of the sliding drawer of the present invention;

Fig. 3 is the structural schematic diagram of the limiting mechanism of the present invention;

Fig. 4 is the partial enlarged view of A place in Fig. 3 of the present invention;

FIG. 5 is a schematic view of the structure of the buffer plate of the present invention.

Among them: main box-1, sliding drawer-2, control box-3, auxiliary box-4, first fitting-5, second fitting-6, bottom connecting tube-7, processing table-8, limit mechanism -9, guide block-901, shell-902, moving block-903, threaded rod-904, cage-905, motor-906, support arm-907, push plate-908, extrusion plate-909, installation port -910, single-tooth arm-911, gear-912, buffer plate-913, vertical plate-201, sliding port-202, horizontal plate-203, ring-204, first grip-205, irregular parts-206 , The second grip-207, the board body-9131, the adhesive panel-9132, the prefabricated square mouth-9133.

Detailed ways

The present invention will be described in detail below with reference to the accompanying drawings 1-5, and the technical solutions in the embodiments of the present invention will be described clearly and completely. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. . Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

The present invention provides a photoresist heat preservation device through improvement, please refer to FIG. 1 , which includes a main box 1, a sliding drawer 2, a control box 3, an auxiliary box 4, a first fitting 5, a second fitting 6, The bottom connecting cylinder 7, the processing table 8 and the limiting mechanism 9 (the limiting mechanism 9 is inside the main box 1, please refer to FIG. 2). The main box 1 is slidably installed with a sliding drawer 2, the control box 3 is fastened to the side end of the main box 1, the auxiliary box 4 is installed on the processing table 8, the first matching piece 5 is vertically installed on the processing table 8, The bottom end of the two fittings 6 is fastened with a bottom connecting cylinder 7 , the bottom surface of the bottom connecting cylinder 7 is fixedly installed on the main box 1 , and the limiting mechanism 9 is installed on the sliding drawer 2 (as shown in FIG. 2 ). The limiting mechanism 9 is used for tightening and fixing the photoresist container (not shown), so as to fix the photoresist container.

A corresponding device switch (not marked) may be provided at the position where the lower surface of the processing table 8 of the entire photoresist heat preservation device is located on the front surface of the main box 1 . The control box 3 may have a plurality of corresponding control buttons (not marked), and different control buttons may be used to realize different control functions.

3 and 4, the limiting mechanism 9 includes a guide block 901, a housing 902, a moving block 903, a threaded rod 904, a holder 905, a motor 906, a support arm 907, a push plate 908, a pressing plate 909, a mounting Port 910 , single-tooth arm 911 , gear 912 ( FIG. 4 ) and buffer plate 913 . The guide block 901 is fastened to the moving block 903 . A holder 905 is locked and installed on the inner wall of the housing 902 . The threaded rod 904 is engaged with the moving block 903 . The bottom end of the housing 902 is fastened to the sliding drawer 2 . A threaded rod 904 is rotatably mounted on the holder 905 . A threaded rod 904 is rotatably mounted on the motor 906 . The support arm 907 is hingedly connected with the single-tooth arm 911 . The single-tooth arm 911 meshes with the gear 912, and the transmission and coordination effect is good.

Gear 912 meshes with threaded rod 904 . The right side of the push plate 908 is fitted with a squeeze plate 909. The installation port 910 is prefabricated inside the casing 902. The support arm 907 is hinged to the push plate 908. The limit protects the threaded rod 904.

Further, as shown in FIG. 2, the sliding drawer 2 includes a vertical plate 201, a sliding opening 202, a horizontal plate 203, a ring 204, a first handle 205, an irregular piece 206 and a second handle 207. The vertical plate 201 and the horizontal plate 203 are an integrated structure, the side end of the horizontal plate 203 is prefabricated with a sliding port 202, the ring 204 is embedded and installed on the irregular piece 206, and the bottom end of the first handle 205 is fastened and installed on irregularities 206 . The bottom end of the second handle 207 is fastened to the irregular piece 206 . The irregularities 206 are located inside the main box 1 .

Further, as shown in FIG. 5 , the buffer board 913 includes a board main body 9131, an adhesive panel 9132 and a prefabricated square opening 9133. The top end of the board main body 9131 is bonded to the adhesive panel 9132, and the board main body 9131 is prefabricated. There is a prefabricated square mouth 9133, the prefabricated square mouth 9133 is located below the auxiliary box 4, please refer to FIG. 1 in conjunction.

Further, please refer back to FIG. 2 , the angle between the vertical plate 201 and the horizontal plate 203 is 90 degrees, and the sliding opening 202 is a rectangular parallelepiped opening, which is convenient to cooperate with and control the sliding of the sliding drawer 2 .

Further, please refer back to FIG. 2 , the tops of the first handle 205 and the second handle 207 are higher than the top of the ring 204 , and the irregular piece 206 is an axisymmetric structure. The first grab handle 205 and the second grab handle 207 are used for subsequent workers to move the corresponding structure shown in FIG. 2 directly and conveniently through these two mechanisms.

Further, please continue to refer to FIG. 3 , in this embodiment, the push plate 908 and the squeeze plate 909 are cuboid structures, and the sizes of the two are matched (the width of the push plate 908 is greater than the width of the squeeze plate 909 ) , easy to bond with each other.

Further, referring to FIG. 2 and FIG. 3 , it can be known that the top end of the installation port 910 communicates with the ring 204 , and the thickness of the ring 204 is greater than two centimeters. The ring ring 204 has a stepped double-layer ring structure, the inner layer is a ring with a smaller inner diameter, the outer layer is a ring with a larger inner diameter, and the thickness of the outer ring is larger, forming a corresponding stepped shape.

Further, please continue to refer to FIG. 3 , the guide block 901 can slide vertically along the inner wall of the housing 902 , a notch (not marked) is provided below the single-tooth arm 911 , and the notch is integrated with the housing 902 Structure, in FIG. 3 , the notch is located on the right side of the opening motor 906 .

Further, in this embodiment, the pressing plate 909 may be made of rubber, which has good rubber elasticity and good fixing effect.

Further, in this embodiment, the support arm 907 may be made of aluminum alloy, which is light in weight and high in hardness.

The present invention provides a photoresist heat preservation device through improvement, and the working principle is as follows;

First, when in use, the sliding drawer 2 is slid out using the sliding port 202 (FIG. 2) to cooperate with the inner structure of the main box 1 (FIG. 1), and the photoresist container (not shown) is inserted from the ring 204 into the mounting port 910;

Second, turn on the motor 906 (FIG. 3), the motor 906 drives the threaded rod 904 to rotate, the threaded rod 904 engages with the moving block 903 to move, and the moving block 903 moves stably along the guide block 901 in the housing 902;

Third, the threaded rod 904 meshes with the gear 912 (FIG. 4) to displace the single-tooth arm 911, the single-tooth arm 911 is hinged with the support arm 907, and the support arm 907 is hinged with the push plate 908 to displace the push plate 908 and the squeeze plate 909. The photoresist container on the mounting port 910 is fixed;

Fourth, the ring 204 on the irregular part 206 ( FIG. 2 ) cooperates with the installation opening 910 , so that the photoresist container can reasonably maintain a certain orientation, and the internal matching effect in the main box 1 is good.

The present invention provides a photoresist heat preservation device through improvement. By optimizing the setting of the limit mechanism 9, the installation port 910 is convenient for placing the photoresist container vertically, and both sides of the installation port 910 are provided with push plates 908, squeeze plates The pressing plate 909 uses the transmission matching structure on both sides to control the displacement of the pushing plate 908 and the pressing plate 909 to tighten and fix the photoresist container on the installation port 910, so that the photoresist container can be easily and fixedly placed, and the use effect is good; by optimizing the setting For the sliding drawer 2, the ring 204 on the irregular piece 206 cooperates with the installation opening 910, so that the photoresist container can reasonably maintain a certain orientation, and the internal matching effect in the main box 1 is good.

The basic principles and main features of the present invention and the advantages of the present invention are shown and described above, and the standard parts used in the present invention can be purchased from the market, and the special-shaped parts can be customized according to the description in the description and the drawings, The specific connection method of each part adopts the conventional methods such as mature bolts, rivets and welding in the prior art, and the machinery, parts and equipment adopt the conventional models in the prior art, and the circuit connection adopts the conventional connection in the prior art. method, which will not be described in detail here.

The above description of the disclosed embodiments enables any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (10)

1. A photoresist thermal insulation device, comprising a main box (1), a sliding drawer (2), a control box (3), an auxiliary box (4), a first fitting (5), and a second fitting (6) , the bottom connecting cylinder (7) and the processing table (8), the sliding drawer (2) is slidably installed on the main box (1), and the control box (3) is fastened and installed on the main box (1) At the side end, the auxiliary box (4) is mounted on the processing table (8), the first fitting (5) is vertically mounted on the processing table (8), and the second fitting (6) ) The bottom end is fastened with a bottom connecting cylinder (7), and the bottom surface of the bottom connecting cylinder (7) is fixedly installed on the main box (1); It is characterized in that: it further comprises a limiting mechanism (9), the limiting mechanism (9) is installed on the sliding drawer (2), and the limiting mechanism (9) is used for storing the photoresist container. Fasten tightly to securely place the photoresist container. 2 . The photoresist heat preservation device according to claim 1 , wherein the limiting mechanism ( 9 ) comprises a guide block ( 901 ), a casing ( 902 ), a moving block ( 903 ), a threaded rod ( 2 . 904), cage (905), motor (906), support arm (907), push plate (908), squeeze plate (909), installation port (910), single tooth arm (911), gear (912) and buffer plate (913), the guide block (901) is fastened on the moving block (903), the retainer (905) is locked and installed on the inner wall of the housing (902), and the threaded rod ( 904) engages with the moving block (903). 3. The photoresist thermal insulation device according to claim 2, characterized in that: the bottom end of the casing (902) is fastened on the sliding drawer (2), and the holder (905) is rotatably mounted on the holder (905). There is a threaded rod (904), a threaded rod (904) is rotatably installed on the motor (906), the support arm (907) is hingedly connected with a single-tooth arm (911), and the single-tooth arm (911) is connected to a gear (912) are engaged, the gear (912) is engaged with the threaded rod (904), a pressing plate (909) is fitted on the right side of the push plate (908), and the installation port (910) is prefabricated. Inside the casing (902), the support arm (907) is hinged with the push plate (908), and the top end of the buffer plate (913) is adhesively mounted on the inner wall of the casing (902). 4. The photoresist thermal insulation device according to claim 3, wherein the sliding drawer (2) comprises a vertical plate (201), a sliding opening (202), a horizontal plate (203), a ring (204) ), a first grab handle (205), an irregular piece (206) and a second grab handle (207), the vertical plate (201) and the horizontal plate (203) are an integrated structure, the horizontal plate (203) The side end is prefabricated with the sliding port (202), the ring (204) is embedded and mounted on the irregular piece (206), and the bottom end of the first grip (205) is fastened and mounted on the irregular piece (206). 206), the bottom end of the second grip (207) is fastened on the irregular piece (206), and the irregular piece (206) is located inside the main box (1). 5. A photoresist heat preservation device according to claim 3, characterized in that: the buffer plate (913) comprises a plate body (9131), an adhesive panel (9132) and a prefabricated square mouth (9133), the The top of the board main body (9131) is bonded to the adhesive panel (9132), the board main body (9131) is prefabricated with a prefabricated square mouth (9133), and the prefabricated square mouth (9133) is located below the auxiliary box (4). . 6 . The photoresist heat preservation device according to claim 4 , wherein the angle between the vertical plate ( 201 ) and the horizontal plate ( 203 ) is ninety degrees, and the sliding port ( 202 ) is a rectangular parallelepiped. 7 . Open your mouth. 7. The photoresist heat preservation device according to claim 4, characterized in that: the tops of the first handle (205) and the second handle (207) are higher than the top of the ring (204), and the The rule piece (206) is an axisymmetric structure. 8 . The photoresist heat preservation device according to claim 4 , wherein the push plate ( 908 ) and the extrusion plate ( 909 ) are of rectangular parallelepiped structure, and the sizes of the two are matched. 9 . 9 . The photoresist heat preservation device according to claim 4 , wherein the top end of the installation opening ( 910 ) communicates with the ring ( 204 ), and the thickness of the ring ( 204 ) is greater than two centimeters. 10 . 10. The photoresist heat preservation device according to claim 3, wherein the guide block (901) slides vertically along the inner wall of the housing (902), and a concave is provided under the single-tooth arm (911). The notch and the housing (902) are an integral structure.

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