CN111610006B - A diffraction grating online detection device - Google Patents
A diffraction grating online detection device Download PDFInfo
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- CN111610006B CN111610006B CN202010529014.8A CN202010529014A CN111610006B CN 111610006 B CN111610006 B CN 111610006B CN 202010529014 A CN202010529014 A CN 202010529014A CN 111610006 B CN111610006 B CN 111610006B
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- 238000001514 detection method Methods 0.000 title claims abstract description 20
- 239000013598 vector Substances 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 3
- 229910009372 YVO4 Inorganic materials 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 abstract description 5
- 238000013461 design Methods 0.000 abstract description 3
- 238000012545 processing Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 3
- 238000011897 real-time detection Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000010183 spectrum analysis Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0207—Details of measuring devices
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
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- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Optics & Photonics (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
本发明公开了一种衍射光栅在线检测装置，涉及光学加工领域，包括衍射光栅、光源、分束器、棱镜，衍射光栅上设有刻槽面，刻槽面上设有刻槽线，刻槽线与参考面之间设有光栅角；光源发射的光经由分束器分成三束平行光，分束器与参考面垂直，棱镜的两个反射面也与参考面垂直。本发明在衍射光栅上设置刻槽线，通过分束器将光源分成三束平行的光束，利用第一光束在衍射光栅上产生的两条衍射光，第二光束和第三光束在棱镜反射面作用下产生第一反射光和第二反射光的，将衍射光的传播方向与反射光的传播方向进行对比，从而精确的判断光栅刻槽方向与参考面之间的关系，利用新颖的光路设计，实现对衍射光栅精确定位的功能。
The present invention discloses an online detection device for a diffraction grating, which relates to the field of optical processing, and includes a diffraction grating, a light source, a beam splitter, and a prism. The diffraction grating is provided with a grooved surface, the grooved surface is provided with a grooved line, and a grating angle is provided between the grooved line and the reference surface; the light emitted by the light source is divided into three beams of parallel light by a beam splitter, the beam splitter is perpendicular to the reference surface, and the two reflection surfaces of the prism are also perpendicular to the reference surface. The present invention arranges grooved lines on the diffraction grating, divides the light source into three parallel light beams by a beam splitter, utilizes two diffracted lights generated by the first light beam on the diffraction grating, and the second light beam and the third light beam generate a first reflected light and a second reflected light under the action of the prism reflection surface, and compares the propagation direction of the diffracted light with the propagation direction of the reflected light, so as to accurately judge the relationship between the grating groove direction and the reference surface, and utilizes a novel optical path design to realize the function of accurately positioning the diffraction grating.
Description
Technical Field
The invention relates to the technical field of optical processing, in particular to an on-line diffraction grating detection device.
Background
Diffraction gratings have a number of important applications in the fields of optical spectrum analysis, optical communication systems, AR/VR display technology, etc. The diffraction grating is required to be precisely positioned in the processing and mounting process, and the common positioning mode is not easy to realize an on-line detection function, so that the cost, the efficiency and other comprehensive performances of the product are affected. In order to solve the detection of the diffraction grating, the 'detection method of the diffraction wavefront of the concave diffraction grating' of the Chinese patent No. CN102706542A discloses that a concave diffraction grating diffraction wavefront detection system and component installation in the system are established so as to realize the wavefront detection of the diffraction grating, but the detection mode can only realize the behavior before detection, but can not realize the online real-time detection of the diffraction grating, and the interferometer required by the invention has high price and high cost in after-sale and maintenance.
Therefore, in order to further reduce the production cost of manufacturers and facilitate the realization of the on-line detection of the diffraction grating, the invention uses a newly designed on-line detection device to realize the function of accurately positioning the grating by detecting the direction of the groove line and utilizing a novel light path design.
Disclosure of Invention
(1) Technical problem to be solved
The invention aims at the problems in the prior art, and in order to make up the defects in the prior art, the invention provides the online detection device which can be reasonably manufactured and used and is convenient for two diffraction gratings.
(2) Technical proposal
In order to achieve the technical aim, the invention provides an on-line diffraction grating detection device which comprises a diffraction grating, a light source, a beam splitter and a prism, wherein a groove surface is arranged on the diffraction grating, a groove line is arranged on the groove surface, and a grating angle is arranged between the groove line and a reference surface;
The first light beam is incident into the grooving surface of the diffraction grating to generate-1-order diffraction light and +1-order diffraction light, and the second light beam and the third light beam are incident onto two reflecting surfaces of the prism to correspondingly generate first reflected light and second reflected light respectively;
The beam splitter is perpendicular to the reference plane, two reflecting surfaces of the prism are also perpendicular to the reference plane, and the beam splitter consists of two beam splitting elements.
Preferably, when the grating angle is 90 degrees, the direction of the groove line is exactly perpendicular to the reference plane.
Preferably, the two light-splitting elements are a first light-splitting element and a second light-splitting element, and the first light-splitting element and the second light-splitting element are made of birefringent crystal YVO 4.
(3) Advantageous effects
The invention solves the problems that the prior art can not perform online real-time detection on the diffraction grating and the cost is increased because expensive instruments are needed to be used in detection, the invention arranges a groove line on the diffraction grating, divides a light source into three parallel beams by a beam splitter, utilizes two diffraction lights generated by a first beam on the diffraction grating, generates a first reflection light and a second reflection light by a second beam and a third beam under the action of a prism reflection surface, compares the propagation direction of the diffraction light with the propagation direction of the reflection light, thereby accurately judging the relation between the groove direction of the grating and a reference surface, and realizes the function of accurately positioning the diffraction grating by utilizing a novel light path design.
Drawings
The invention is further described below with reference to the drawings and examples. Wherein:
FIG. 1 is a schematic view of the light path of three flat beams of light reflected and diffracted respectively by the diffraction grating on-line detection device of the present invention;
FIG. 2 is a view of the component distribution structure of FIG. 1 in a plan view;
FIG. 3 is a schematic diagram of a structure between a diffraction grating and a reference plane;
FIG. 4 is a structural view of a light source forming three parallel light beams inside a beam splitter;
fig. 5 is a propagation view of three parallel lights in the state of fig. 4.
Reference numerals are diffraction grating 101, scribe line 102, reference plane 103, grating angle 104, light source 200, first light beam 210, second light beam 220, third light beam 230, beam splitter 201, prism 202, 1 st order diffracted light 209, +1 st order diffracted light 211, first reflected light 221, second reflected light 231,301-first light splitting element, 302-second light splitting element.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments.
Examples:
Referring to fig. 1-5, the diffraction grating on-line detection device of the present invention includes a diffraction grating 101, a light source 200, a beam splitter 201, and a prism 202, wherein a groove surface is provided on the diffraction grating 101, a groove line 102 is provided on the groove surface, a grating angle 104 is provided between the groove line 102 and a reference surface 103, light emitted by the light source 200 is split into three parallel light beams by the beam splitter 201, the three parallel light beams are respectively a first light beam 210, a second light beam 220, and a third light beam 230, the first light beam 210 is incident into the groove surface of the diffraction grating 101 to generate a-1 diffraction light 209 and a +1 diffraction light 211, the second light beam 220 and the third light beam 230 are incident onto two reflection surfaces of the prism 202 to respectively generate a first reflection light 221 and a second reflection light 231, the beam splitter 201 is perpendicular to the reference surface 103, the two reflection surfaces of the prism 202 are also perpendicular to the reference surface 103, the beam splitter 201 is composed of two light splitting elements, the three parallel light beams are respectively, the first light beam 210, the second light beam 220 is incident into a first light beam 220, the second light beam 220 and a third light beam 230, the first light beam 302 is incident into a second light beam 301, the two light splitting elements 301 is respectively perpendicular to the two reflection elements, and the two light splitting elements 301 are respectively, and the two light splitting elements are respectively manufactured.
In the use process of the invention, the reference surface 103 is firstly arranged, the reference surface 103 can be the side surface of the diffraction grating 101 or other surfaces in the device, and the grating angle 104 is set to 90 degrees in most application scenes depending on practical references, so that the direction of the notch line 102 can be accurately perpendicular to the reference surface 103. The invention is illustrated by taking a grating angle of 90 ° as an example, two light splitting elements 301 and 302 in the beam splitter 201 are utilized, so that the incident light source 200 is layered with two parallel light beams in the vertical direction through the first light splitting element 301, one light beam is not deviated from the original incident path, the other first light beam 210 is downwards deviated and then propagates in the parallel direction, the second light splitting element 302 then splits the light beam which is not deviated from the original incident path into two parallel light beams in the horizontal direction, wherein the second light beam 220 propagates along the original incident path, the other light beam 230 propagates in the parallel direction after being leftwards deviated (see fig. 5 in detail), the light splitting elements 301 and 302 can be made of birefringent crystals such as YVO4, or can be made by plating a proper light splitting film after polishing by using optical glass, the process is well known in the industry and is not repeated here.
The three parallel light beams coming out from the beam splitter 201 are respectively a first light beam 210, a second light beam 220 and a third light beam 230, wherein the first light beam 210 is incident on the grooved surface of the diffraction grating to generate-1 order diffraction light 209 and +1 order diffraction light 211, the second light beam 220 and the third light beam 230 are respectively incident on the two reflecting surfaces of the prism 202 to correspondingly generate first reflection light 221 and second reflection light 231, the two reflecting surfaces of the beam splitter 201 and the prism 202 are perpendicular to the reference surface, and the basic principle of diffraction physics can be obtained that 1. The first reflection light 221 and the second reflection light 231 generated by the reflection of the second light beam 220 and the third light beam 230 by the prism 202 are parallel to the reference surface 103, and 2. The first light beam 210 is incident on the diffraction grating 101 to generate the difference vector of the propagation direction vectors of the-1 order diffraction light 209 and the +1 order diffraction light 211 is perpendicular to the direction of the grooved line 102 on the diffraction grating 101.
By measuring the propagation directions of the +1st-order diffraction light 211 and the-1st-order diffraction light 209 in real time and comparing the propagation directions with the propagation directions of the first reflected light 221 and the second reflected light 231, it can be precisely determined whether the grating grooving direction is perpendicular to the reference plane. If necessary, the direction of the groove line 102 of the diffraction grating 101 can be adjusted in real time as shown in fig. 1 until the groove direction is exactly perpendicular to the reference plane.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the invention.
Claims (3)
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| CN202010529014.8A CN111610006B (en) | 2020-06-11 | 2020-06-11 | A diffraction grating online detection device |
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| CN202010529014.8A CN111610006B (en) | 2020-06-11 | 2020-06-11 | A diffraction grating online detection device |
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| CN111610006B true CN111610006B (en) | 2025-02-07 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN212228351U (en) * | 2020-06-11 | 2020-12-25 | 腾景科技股份有限公司 | Diffraction grating on-line measuring device |
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| JPH0663739B2 (en) * | 1987-01-13 | 1994-08-22 | 日本電信電話株式会社 | Position detection method and position detection apparatus using diffraction grating |
| JPH0590126A (en) * | 1991-09-27 | 1993-04-09 | Canon Inc | Position detection equipment |
| US6538749B1 (en) * | 1998-07-27 | 2003-03-25 | Matsushita Electric Industrial Co., Ltd. | Method and apparatus for evaluating aberrations of optical element for use with optical device by using phase differences determined by overlapping two diffracted lights to form a sharing image |
| CN1231743C (en) * | 2004-05-19 | 2005-12-14 | 哈尔滨工业大学 | Optical grating wedge plate and corner measuring device using same |
| DE102006042743A1 (en) * | 2006-09-12 | 2008-03-27 | Dr. Johannes Heidenhain Gmbh | Position measuring device |
| CN107664482B (en) * | 2016-07-29 | 2019-08-23 | 上海微电子装备（集团）股份有限公司 | Grating measuring device |
| CN106646907B (en) * | 2016-12-26 | 2023-01-24 | 清华大学深圳研究生院 | Grating diffraction light deflection prism |
| CN109443249A (en) * | 2018-12-05 | 2019-03-08 | 哈尔滨工业大学 | High precision roll angle measurement method and device based on transmission grating |
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| CN212228351U (en) * | 2020-06-11 | 2020-12-25 | 腾景科技股份有限公司 | Diffraction grating on-line measuring device |
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