CN111562002A - High-throughput, high-resolution, high-contrast polarization interference spectroscopy imaging device and method - Google Patents
High-throughput, high-resolution, high-contrast polarization interference spectroscopy imaging device and method Download PDFInfo
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Abstract
本发明涉及一种高通量高分辨率高对比度的偏振干涉光谱成像装置及方法。克服传统迈克尔逊干涉的成像光谱仪探测精度较低以及传统基于Sagnac干涉仪的成像光谱仪能量利用率和分辨率较低的问题,包括依次设置在光路中的准直镜、偏振片、干涉仪、色散系统、成像镜及探测器;干涉仪包括位于偏振分束器的出射光路中的半波片及光程差标准具;目标光源入射到干涉仪利用半波片调节S光或P光的振动方向,使得S光和P光具有相同的振动方向;利用光程差标准具调节S光和/或P光的光程,使得S光和P光之间产生固定的光程差;非偏分束器将具有相同振动方向、固定光程差的S光和P光均反射和透射,形成干涉条纹;干涉条纹经色散系统色散后成像在探测器上。
The invention relates to a high-throughput, high-resolution, high-contrast polarization interference spectrum imaging device and method. Overcome the problems of low detection accuracy of traditional Michelson interferometer imaging spectrometers and low energy utilization and resolution of traditional Sagnac interferometer-based imaging spectrometers, including collimating mirrors, polarizers, interferometers, and chromatic dispersion that are sequentially arranged in the optical path System, imaging mirror and detector; the interferometer includes a half-wave plate and an optical path difference etalon located in the outgoing optical path of the polarization beam splitter; the target light source is incident on the interferometer and the half-wave plate is used to adjust the vibration of S light or P light direction, so that the S light and the P light have the same vibration direction; use the optical path difference etalon to adjust the optical path of the S light and/or the P light, so that a fixed optical path difference is generated between the S light and the P light; non-polarized separation The beamer reflects and transmits both the S light and the P light with the same vibration direction and a fixed optical path difference to form interference fringes; the interference fringes are imaged on the detector after being dispersed by the dispersion system.
Description
技术领域technical field
本发明属于光谱成像领域,涉及一种高通量高分辨率高对比度的偏振干涉光谱成像装置及方法。The invention belongs to the field of spectral imaging, and relates to a high-throughput, high-resolution, high-contrast polarization interference spectral imaging device and method.
背景技术Background technique
干涉成像光谱技术是近年来发展起来的一种非破坏性的、快速灵敏的目标识别和探测技术,目前该技术在环境监测、海洋水质监测、生物医学、天文探测、光纤通讯、军事科学以及农业等诸多领域都有重要的应用。Interferometric imaging spectroscopy is a non-destructive, fast and sensitive target recognition and detection technology developed in recent years. At present, the technology is used in environmental monitoring, marine water quality monitoring, biomedicine, astronomical detection, optical fiber communication, military science and agriculture. It has important applications in many fields.
干涉光谱仪一般可分为时间调制型和空间调制型两种类型。基于迈克尔逊干涉的成像光谱仪和基于Sagnac干涉仪的成像光谱仪分别是时间调制型和空间调制型的典型代表。前者可实现较高精度的光谱测量,但对光谱测量过程中外界环境的扰动和机械扫描精度很敏感。后者由于共光路的设计可以自动补偿外界扰动和震动,以及无运动部件可以使得系统更加稳定,但该类光谱仪仍然存在能量利用率和分辨率较低的问题。对于弱光探测尤其在天文领域能量利用率是非常重要的。随着干涉成像光谱技术的发展,在探测过程中对光谱分辨率的要求也越来越高。Interference spectrometers can generally be divided into two types: time modulation type and spatial modulation type. Imaging spectrometers based on Michelson interference and imaging spectrometers based on Sagnac interferometers are typical representatives of temporal modulation and spatial modulation, respectively. The former can achieve high-precision spectral measurement, but it is very sensitive to the disturbance of the external environment and the mechanical scanning accuracy during the spectral measurement process. The latter can automatically compensate for external disturbances and vibrations due to the design of the common optical path, and the absence of moving parts can make the system more stable, but this type of spectrometer still has problems of low energy utilization and resolution. Energy utilization is very important for weak light detection, especially in the astronomical field. With the development of interferometric imaging spectroscopy, the requirements for spectral resolution in the detection process are getting higher and higher.
发明内容SUMMARY OF THE INVENTION
为克服传统迈克尔逊干涉的成像光谱仪探测精度较低以及传统基于Sagnac干涉仪的成像光谱仪能量利用率和分辨率较低的问题,本发明提出了一种高通量高分辨率高对比度的偏振干涉光谱成像装置及方法,该装置将Sagnac干涉仪、偏振元件以及光栅结合,提高了光谱仪的能量利用率,分辨率和对比度。In order to overcome the problems of low detection accuracy of the traditional Michelson interferometer imaging spectrometer and low energy utilization and resolution of the traditional Sagnac interferometer-based imaging spectrometer, the present invention proposes a high-throughput, high-resolution, high-contrast polarization interferometer. A spectral imaging device and method, the device combines a Sagnac interferometer, a polarizing element and a grating to improve the energy utilization rate, resolution and contrast of the spectrometer.
本发明的技术解决方案是提供一种高通量高分辨率高对比度的偏振干涉光谱成像装置,其特殊之处在于:包括依次设置在光路中的准直镜、偏振片、干涉仪、色散系统、成像镜及探测器;The technical solution of the present invention is to provide a high-throughput, high-resolution, high-contrast polarization interference spectroscopy imaging device, which is special in that it includes a collimator, a polarizer, an interferometer, and a dispersion system sequentially arranged in the optical path. , imaging mirrors and detectors;
所述干涉仪为非对称结构的共光路Sagnac干涉仪,其包括沿光路依次设置的一个偏振分束器、三个平面反射镜和一个非偏分束器;还包括设置在偏振分束器至非偏分束器传播光路中的半波片和光程差标准具;所述半波片位于的偏振分束器的任一出射光路中;所述光程差标准具位于偏振分束器的任一出射光路或两路出射光路中;The interferometer is a Sagnac interferometer with an asymmetric structure and a common optical path, which includes a polarization beam splitter, three plane mirrors and a non-polarization beam splitter arranged in sequence along the optical path; The half-wave plate and the optical path difference etalon in the propagation optical path of the non-polarizing beam splitter; the half-wave plate is located in any outgoing optical path of the polarization beam splitter; the optical path difference etalon is located in the polarization beam splitter In any outgoing light path or two outgoing light paths;
所述偏振分束器用于将经准直镜及偏振片的目标光源分成两路振动方向相互垂直的S光和P光;所述半波片用于调节S光或P光的振动方向,使得S光和P光具有相同的振动方向;所述光程差标准具用于调节S光和/或P光的光程,使得S光和P光之间产生固定的光程差;所述三个平面反射镜用于将S光和P光反射,并最终将具有相同振动方向、固定光程差的S光和P光反射至非偏分束器;所述非偏分束器用于将具有相同振动方向、固定光程差的S光和P光均反射和透射,形成干涉条纹;The polarizing beam splitter is used to divide the target light source through the collimator lens and the polarizer into two paths of S light and P light whose vibration directions are perpendicular to each other; the half-wave plate is used to adjust the vibration direction of the S light or the P light, so that The S light and the P light have the same vibration direction; the optical path difference etalon is used to adjust the optical path of the S light and/or the P light, so that a fixed optical path difference is generated between the S light and the P light; the three A plane mirror is used to reflect the S light and the P light, and finally reflect the S light and the P light with the same vibration direction and a fixed optical path difference to the non-polarization beam splitter; the non-polarization beam splitter is used to Both S light and P light with the same vibration direction and fixed optical path difference are reflected and transmitted to form interference fringes;
所述干涉条纹经色散系统色散后通过成像镜成像在探测器上。The interference fringes are imaged on the detector by the imaging mirror after being dispersed by the dispersion system.
进一步地,为了保证经过偏振分束器分光之后两束光的强度基本一致,所述偏振片的透振方向与S光的振动方向的夹角为45°,其中S光为偏振分束器的反射光;为了使透射光和反射光的振动方一致,所述半波片的快轴方向与入射光的振动方向之间的夹角为45°。Further, in order to ensure that the intensities of the two beams of light are basically the same after the polarization beam splitter is split, the angle between the vibration-transmitting direction of the polarizer and the vibration direction of the S light is 45°, and the S light is the polarization beam splitter. Reflected light; in order to make the vibration directions of the transmitted light and the reflected light consistent, the angle between the fast axis direction of the half-wave plate and the vibration direction of the incident light is 45°.
进一步地,所述光程差标准具的材料为单轴晶体或非晶体材料;光垂直入射至光程差标准具表面。Further, the material of the optical path difference etalon is a uniaxial crystal or an amorphous material; the light is vertically incident on the surface of the optical path difference etalon.
进一步地,若经偏振分束器后的两路出射光路中均设置单轴晶体材料的光程差标准具时,两光程差标准具表面均与相应入射光垂直,晶体光轴平行于晶面,且半波片位于光程差标准具之后的光路中。Further, if the optical path difference etalon of uniaxial crystal material is set in the two outgoing optical paths after the polarization beam splitter, the surfaces of the two optical path difference etalons are both perpendicular to the corresponding incident light, and the crystal optical axis is parallel to crystal plane, and the half-wave plate is located in the optical path behind the optical path difference etalon.
进一步地,为了调节干涉条纹的周期,所述三个平面反射镜中至少有一个平面反射镜的倾斜角度可调。Further, in order to adjust the period of the interference fringes, the inclination angle of at least one of the three plane mirrors can be adjusted.
进一步地,当偏振分束器的两路出射光路中均设置单轴晶体材料的光程差标准具时,光程差标准具位于倾斜角度可调的平面反射镜之前。Further, when an optical path difference etalon made of a uniaxial crystal material is set in both outgoing optical paths of the polarizing beam splitter, the optical path difference etalon is located in front of the flat reflection mirror whose tilt angle is adjustable.
进一步地,若平面反射镜EF与入射光之间的夹角等于45°,所述色散系统包括两组色散单元;Further, if the included angle between the plane mirror EF and the incident light is equal to 45°, the dispersion system includes two groups of dispersion units;
每组色散单元包括沿光路依次设置的第一柱面镜、第二柱面镜、狭缝、准直系统及光栅;所述第一柱面镜与第二柱面镜的汇聚方向互相垂直;所述狭缝位于第二柱面镜的焦点处,狭缝的长度方向与干涉条纹的周期方向一致;Each group of dispersion units includes a first cylindrical mirror, a second cylindrical mirror, a slit, a collimation system and a grating arranged in sequence along the optical path; the convergence directions of the first cylindrical mirror and the second cylindrical mirror are perpendicular to each other; The slit is located at the focal point of the second cylindrical mirror, and the length direction of the slit is consistent with the periodic direction of the interference fringes;
两组干涉条纹分别经每组色散单元中的第一柱面镜和第二柱面镜后成像在狭缝处,再经准直系统准直,最后经光栅色散。The two groups of interference fringes are respectively imaged at the slit through the first cylindrical mirror and the second cylindrical mirror in each group of dispersion units, and then collimated by the collimation system, and finally dispersed by the grating.
进一步地,若平面反射镜EF与入射光之间的夹角不等于45°,所述色散系统沿光路依次设置的第一柱面镜、第二柱面镜、狭缝、准直系统及光栅;所述第一柱面镜与第二柱面镜的汇聚方向互相垂直,所述狭缝位于第二柱面镜的焦点处,狭缝的长度方向与干涉条纹的周期方向一致;Further, if the angle between the plane reflection mirror EF and the incident light is not equal to 45°, the first cylindrical mirror, the second cylindrical mirror, the slit, the collimation system and the grating are sequentially arranged along the optical path of the dispersion system. ; The convergence directions of the first cylindrical mirror and the second cylindrical mirror are perpendicular to each other, the slit is located at the focal point of the second cylindrical mirror, and the length direction of the slit is consistent with the periodic direction of the interference fringes;
两组干涉条纹同时经第一柱面镜和第二柱面镜后成像在狭缝长度方向上的不同位置处,再经准直系统准直,最后经光栅色散。The two groups of interference fringes are simultaneously imaged at different positions in the length direction of the slit after passing through the first cylindrical mirror and the second cylindrical mirror, and then collimated by the collimation system, and finally dispersed by the grating.
本发明还提供一种基于上述的高通量高分辨率高对比度的偏振干涉光谱成像装置的成像方法,包括以下步骤:The present invention also provides an imaging method based on the above-mentioned high-throughput, high-resolution, high-contrast polarization interference spectroscopy imaging device, comprising the following steps:
步骤1、目标光源经过准直镜和偏振片之后,入射到偏振分束器;Step 1. After the target light source passes through the collimating lens and the polarizer, it enters the polarization beam splitter;
步骤2、偏振分束器将经准直镜及偏振片的目标光源分成两路振动方向相互垂直、强度一致的S光和P光;Step 2. The polarization beam splitter divides the target light source through the collimating lens and the polarizer into two paths of S light and P light whose vibration directions are perpendicular to each other and have the same intensity;
步骤3、三个平面反射镜依次将S光和P光反射,利用半波片调节S光或P光的振动方向,使得S光和P光具有相同的振动方向;利用光程差标准具调节S光和/或P光的光程,使得S光和P光之间产生固定的光程差;三个平面反射镜最终将具有相同振动方向、固定光程差的S光和P光反射至非偏分束器;
步骤4、非偏分束器将具有相同振动方向、固定光程差的S光和P光均反射和透射,形成干涉条纹;
步骤5、干涉条纹经色散系统色散后成像在探测器上。
进一步地,若平面反射镜EF与入射光之间的夹角等于45°,所述步骤5具体为:Further, if the angle between the plane mirror EF and the incident light is equal to 45°, the
两组干涉条纹分别经每组色散单元中的第一柱面镜和第二柱面镜后成像在狭缝处,再经准直系统准直,最后经光栅色散后成像在两个不同的探测器上;The two groups of interference fringes are respectively imaged at the slit by the first cylindrical mirror and the second cylindrical mirror in each group of dispersion units, and then collimated by the collimation system, and finally imaged at two different detectors after being dispersed by the grating. on the device;
若平面反射镜EF与入射光之间的夹角不等于45°,所述步骤5具体为:If the angle between the plane mirror EF and the incident light is not equal to 45°, the
首先,调节平面反射镜EF的角度,使其反射光束与进入色散系统的另一光束不在同一平面内;经平面反射镜EF的反射光束与所述另一光束经过第一柱面镜和第二柱面镜后成像在狭缝长度方向上的不同位置处,再经准直系统准直,最后经光栅(64)色散成像在探测器的不同位置。First, adjust the angle of the plane mirror EF so that the reflected beam and the other beam entering the dispersion system are not in the same plane; the reflected beam passing through the plane mirror EF and the other beam pass through the first cylindrical mirror and the second beam The cylindrical mirror is then imaged at different positions in the length direction of the slit, and then collimated by the collimation system, and finally imaged at different positions of the detector through the grating (64) dispersion.
本发明的有益效果是:The beneficial effects of the present invention are:
(1)在光通量方面,本发明成像装置的能量利用率得到了提高。(1) In terms of luminous flux, the energy utilization rate of the imaging device of the present invention is improved.
首先是非对称的结构设计使得原本返回光源的一路光束被重新利用;其次,由于干涉仪中使用了偏振分束器和半波片,使得原本振动方向相互垂直的两束光的振动方向一致,省去了检偏器。因此光源的能量利用率得到了提高,从而也提高了系统的灵敏度。Firstly, the asymmetrical structure design enables the original beam returning to the light source to be reused; secondly, due to the use of a polarizing beam splitter and a half-wave plate in the interferometer, the vibration directions of the two beams whose vibration directions are perpendicular to each other are the same, saving energy. went to the analyzer. Therefore, the energy utilization rate of the light source is improved, thereby also improving the sensitivity of the system.
(2)具有高稳定性。(2) It has high stability.
由于该装置采用共光路的设计方案,两路光经过的光程(除加入的固定光程差外)基本上是一致的,因此外界振动和热力学变化对干涉的影响基本上可以忽略不计,干涉条纹相比较非共路的干涉仪会更加稳定。Since the device adopts the design scheme of the common optical path, the optical paths of the two paths of light (except for the added fixed optical path difference) are basically the same, so the influence of external vibration and thermodynamic changes on the interference can basically be ignored. The fringes are more stable than non-common-path interferometers.
(3)具有高的光谱分辨率。(3) It has high spectral resolution.
由于该装置在干涉仪之后使用了光栅,系统的光谱分辨率由光栅决定。可根据探测需求选择合适的光栅,与传统的干涉成像光谱仪加入射狭缝或者在干涉仪中直接加入光程差相比,不仅提高了能量利用率也改善了干涉条纹的对比度。Since the device uses a grating after the interferometer, the spectral resolution of the system is determined by the grating. The appropriate grating can be selected according to the detection requirements. Compared with the traditional interference imaging spectrometer adding the emission slit or adding the optical path difference directly in the interferometer, it not only improves the energy utilization rate but also improves the contrast of the interference fringes.
(4)具有高的对比度。(4) Has a high contrast ratio.
本发明在干涉仪之前加入了偏振片,通过调节偏振片的角度,使得经过偏振分束器分光之后两束光的强度基本一致,且干涉仪中半波片的使用将两束光的振动方向变成一致,因此可提高干涉条纹的对比度。偏振分束器和半波片的配合使用可以减小或者消除两路光在干涉仪中多次反射或散射引起的干扰也会进一步提高对比度。In the present invention, a polarizer is added before the interferometer, and by adjusting the angle of the polarizer, the intensities of the two beams of light after being split by the polarizing beam splitter are basically the same, and the use of the half-wave plate in the interferometer changes the vibration directions of the two beams of light. become consistent, so the contrast of the interference fringes can be improved. The combined use of the polarization beam splitter and the half-wave plate can reduce or eliminate the interference caused by multiple reflections or scattering of the two paths of light in the interferometer and further improve the contrast ratio.
(5)本发明中,通过在干涉仪中加入光程差标准具产生固定的光程差,根据干涉原理可知该光程差可以放大干涉条纹的相位变化,因此,在高精度探测过程中有利于提高探测精度。(5) In the present invention, a fixed optical path difference is generated by adding an optical path difference etalon in the interferometer. According to the interference principle, it can be known that the optical path difference can amplify the phase change of the interference fringes. It is beneficial to improve the detection accuracy.
(6)本发明中,后色散系统中使用光栅,可将干涉条纹沿着波长方向色散开,由于不同波长得到的干涉条纹的周期不一样,色散后可减小不同波长的光之间干涉条纹的重合,从而提高系统的对比度。(6) In the present invention, a grating is used in the post-dispersion system to disperse the interference fringes along the wavelength direction. Since the periods of the interference fringes obtained at different wavelengths are different, the interference between lights of different wavelengths can be reduced after dispersion. The overlapping of the stripes, thereby improving the contrast of the system.
(7)本发明中,在干涉仪之后使用了两个柱面镜,这两个柱面镜的汇聚方向相互垂直。从干涉仪出射之后的后的光束通过两个柱面镜之后成像在狭缝处。根据狭缝的尺寸可设计两柱透镜的焦距,使得光束能在不损失或者能量损失最小的情况下通过狭缝。由于柱面镜只改变一个方向的光焦度,利用两个柱面镜可以分别控制两个方向上的光焦度,因此可以通过改变两个柱面镜的焦距得到不同长宽比的光斑。(7) In the present invention, two cylindrical mirrors are used after the interferometer, and the convergence directions of the two cylindrical mirrors are perpendicular to each other. The rear beam after exiting the interferometer is imaged at the slit after passing through two cylindrical mirrors. The focal length of the two cylindrical lenses can be designed according to the size of the slit, so that the light beam can pass through the slit with no or minimal loss of energy. Since the cylindrical mirror only changes the optical power in one direction, the two cylindrical mirrors can be used to control the optical power in two directions respectively. Therefore, light spots with different aspect ratios can be obtained by changing the focal length of the two cylindrical mirrors.
附图说明Description of drawings
图1为本发明实施例一中的偏振干涉光谱成像装置示意图;1 is a schematic diagram of a polarization interference spectroscopy imaging device in Embodiment 1 of the present invention;
图2为本发明实施例二中偏振干涉光谱成像装置中使用一组色散单元的示意图;2 is a schematic diagram of a set of dispersion units used in the polarization interference spectroscopy imaging device in Embodiment 2 of the present invention;
图中附图标记为:1-光源,2-准直镜,3-偏振片,4-干涉仪,41-偏振分束器,42-平面反射镜,43-非偏分束器,44-半波片,45-光程差标准具,5-平面反射镜EF,6-色散系统,60-第一柱面镜,61-第二柱面镜,62-狭缝,63-准直系统,64-光栅,7-成像镜,8-探测器;The reference numbers in the figure are: 1-light source, 2-collimating mirror, 3-polarizer, 4-interferometer, 41-polarizing beam splitter, 42-plane mirror, 43-non-polarizing beam splitter, 44- Half-wave plate, 45-optical path difference etalon, 5-plane mirror EF, 6-dispersion system, 60-first cylindrical mirror, 61-second cylindrical mirror, 62-slit, 63-collimation system , 64-grating, 7-imaging mirror, 8-detector;
具体实施方式Detailed ways
本发明高通量高分辨率高对比度的偏振干涉光谱成像装置,主要包括准直系统,干涉仪和后色散系统三部分。准直系统用于对进入系统的光路进行准直。干涉仪采用非对称结构的共光路Sagnac干涉仪,不仅使得原本返回光源的一路光可被后续光路继续利用,而且两路光在干涉仪中经过的光程基本一致,改善了系统的光通量和稳定性;采用偏振分束器进行分光可得到两个振动方向相互垂直的偏振光,在其中一路光中加入半波片,使得两路光的振动方向一致,避免了使用检偏器,提高了能量利用率;通过在干涉仪之后加入光栅实现高的光谱分辨率,而且光栅的使用可将入射光沿波长方向色散,提高了干涉条纹的对比度;干涉仪中固定光程差的加入可放大干涉条纹相位变化,因此在根据干涉条纹相位变化探测视向速度中可提高探测精度。The high-throughput, high-resolution, high-contrast polarization interference spectrum imaging device of the invention mainly includes three parts: a collimation system, an interferometer and a back dispersion system. The collimation system is used to collimate the light path entering the system. The interferometer adopts the Sagnac interferometer with asymmetric structure of the common optical path, which not only makes the original light returning to the light source can be used by the subsequent optical path, but also the optical path of the two paths in the interferometer is basically the same, which improves the luminous flux and stability of the system. The polarization beam splitter can be used for light splitting to obtain two polarized lights whose vibration directions are perpendicular to each other. A half-wave plate is added to one of the lights to make the vibration directions of the two lights consistent, avoiding the use of an analyzer and improving the energy. Utilization; high spectral resolution is achieved by adding a grating after the interferometer, and the use of the grating can disperse the incident light along the wavelength direction and improve the contrast of the interference fringes; the addition of a fixed optical path difference in the interferometer can amplify the interference fringes Therefore, the detection accuracy can be improved in detecting the radial velocity based on the phase change of the interference fringe.
以下结合附图及具体实施例,对本发明进行详细说明。The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
实施例一Example 1
如图1所述,本实施例高对比度高通量高分辨率的相干色散光谱成像装置主要由准直镜2、偏振片3、非对称结构的共光路Sagnac干涉仪4、平面反射镜EF5、色散系统6、成像镜7及探测器8构成。As shown in FIG. 1 , the high-contrast, high-throughput, and high-resolution coherent dispersive spectroscopy imaging device in this embodiment is mainly composed of a collimating mirror 2, a
目标光源经过准直镜2和偏振片3之后,入射到非对称结构的共光路Sagnac干涉仪4中,该干涉仪由三个平面反射镜42、一个偏振分束器41、一个非偏分束器43及位于偏振分束器41出射光路中的半波片44及光程差标准具45组成。首先,目标光源被偏振分束器分成两路振动方向相互垂直的偏振光,分别为S光和P光,其中反射光为S光,透射光为P光。需要说明的是,偏振片的透振方向应与S光的振动方向的夹角为45°,这样就可保证S光和P光经之后的强度一致,也保证干涉条纹的对比度。采用非对称结构的共光路Sagnac干涉仪,使得原本返回光源的一路光可被利用,而且两路光经过的光程基本一致,改善了系统的光通量和稳定性。After the target light source passes through the collimating mirror 2 and the
经偏振分束器41后,S光依次经过反射镜AB,BC,CD。与S光类似,透射光P依次经过反射镜CD,BC和AB。为了使S光和P光两路之间产生固定的光程差,可在任一光路中加入固定光程差,也可在两路中同时加入光程差。干涉仪中的光程差可通过在其中一路中加入光程差标准具产生,但需要说明的是,如果在任一路中加入光程差,则将光程差标准具45设置在S光或P光光路中,光程差标准具45的材料可以选择单轴晶体也可以选择非晶体;当选择非晶体材料时,要求光垂直入射至光程差标准具45表面,光程差的大小和材料的长度和折射率相关;如果选择将晶体材料的光程差标准具45插入任一光路中获取固定光程差,当光束垂直入射时,晶体的光轴既可与晶面垂直,也可与晶面平行。第一种情况由于不会发生双折射,光的传播方向也不会发生变化,计算光程差时,选用的折射率是该类正常光的折射率(no);对于第二种情况,由于入射光是振动方向平行于入射面或垂直于入射面的线偏振光,因此,当光轴平行于晶面时,光的传播方向也不会发生变化,只不过由于反射光和透射光的振动方向相互垂直,导致折射率(no或ne)不一致,因此将晶体插入反射光和透射光产生的光程差会有差别。如果通过同时在两路光中加入晶体材料的光程差标准具45产生光程差时,需两束光都垂直入射,光轴平行于晶面,这样两束光经过光程差标准具之后的传播方向保持不变,且S光(no)和P(ne)光在光程差标准具中的折射率不同,可产生固定的光程差(L*(no-ne))。After passing through the polarization beam splitter 41, the S light passes through the mirrors AB, BC, and CD in sequence. Similar to the S light, the transmitted light P passes through the mirrors CD, BC and AB in sequence. In order to generate a fixed optical path difference between the two paths of the S light and the P light, a fixed optical path difference can be added to either optical path, or the optical path difference can be added to the two paths at the same time. The optical path difference in the interferometer can be generated by adding an optical path difference etalon to one of the paths, but it should be noted that if an optical path difference is added to any path, the optical path difference etalon 45 is set to the S light or P In the optical path, the material of the optical path difference etalon 45 can be either uniaxial crystal or amorphous; when selecting an amorphous material, the light is required to be vertically incident on the surface of the optical path difference etalon 45, the size of the optical path difference and the material The length of the crystal material is related to the refractive index; if the optical path difference etalon 45 of the crystal material is selected to be inserted into any optical path to obtain a fixed optical path difference, when the beam is incident vertically, the optical axis of the crystal can be either perpendicular to the crystal plane or perpendicular to the crystal plane. The crystal planes are parallel. In the first case, since birefringence will not occur, the propagation direction of the light will not change. When calculating the optical path difference, the refractive index selected is the refractive index (n o ) of this type of normal light; for the second case, Since the incident light is linearly polarized light whose vibration direction is parallel to the incident plane or perpendicular to the incident plane, when the optical axis is parallel to the crystal plane, the propagation direction of the light will not change. The vibrational directions are perpendicular to each other, resulting in an inconsistent refractive index (no or ne ) , so inserting the crystal into the reflected and transmitted light creates a difference in the optical path difference. If the optical path difference is generated by adding the optical path difference etalon 45 of crystal material to the two paths of light at the same time, the two beams of light are required to be incident vertically, and the optical axis is parallel to the crystal plane, so that the two beams of light pass through the optical path difference etalon. The propagation direction remains unchanged, and the refractive indices of S light (n o ) and P( ne ) light in the optical path difference etalon are different, resulting in a fixed optical path difference (L*(n o -ne ) ).
图1中给出的是在反射光中插入非晶体材料光程差标准具的例子。以下按照这一情况叙述,其它情况与该情况类似。当反射光经过平面反射镜AB之后,再经过半波片44,且半波片44的快轴方向与入射光的振动方向之间的夹角为45°,这样可使透射光和反射光的振动方一致。当然也可将半波片44加入到透射光中,和加入反射光中的目的相同。采用偏振分束器进行分光得到两个振动方向相互垂直的偏振光,在其中一路光中加入半波片,使得两路光的振动方向一致,避免了使用检偏器,提高了能量利用率。但需要注意的是,如果要让两路光同时通过晶体材料的光程差标准具45时,则半波片44需在两路光通过光程差标准具45之后加,这样才可以产生光程差。Figure 1 shows an example of an optical path difference etalon inserted in an amorphous material in the reflected light. The following description is based on this case, and other cases are similar to this case. After the reflected light passes through the plane mirror AB, it passes through the half-wave plate 44, and the angle between the fast axis direction of the half-wave plate 44 and the vibration direction of the incident light is 45°, so that the difference between the transmitted light and the reflected light can be reduced. Vibration is the same. Of course, the half-wave plate 44 can also be added to the transmitted light, for the same purpose as adding the reflected light. The polarization beam splitter is used to split the light to obtain two polarized lights whose vibration directions are perpendicular to each other. A half-wave plate is added to one of the lights to make the vibration directions of the two lights consistent, avoiding the use of an analyzer and improving the energy utilization rate. However, it should be noted that if two paths of light are to pass through the optical path difference etalon 45 of the crystal material at the same time, the half-wave plate 44 needs to be added after the two paths of light pass through the optical path difference etalon 45, so that light can be generated. difference.
当两束光分别依次经过三个平面反射镜42后,透射光束和反射光束再次通过非偏分束器43,因此透射光和反射光分别再次被反射和透射,形成4路光,由于满足干涉条件,因此,经过偏振分束器41透射再经非偏分束器43透射的光和经偏振分束器41反射再被非偏分束器43反射的两路光干涉,经偏振分束器41透射再经非偏分束器43反射的光和经偏振分束器41反射再经非偏分束器43透射的两路光干涉。After the two beams of light pass through the three plane mirrors 42 in sequence, the transmitted beam and the reflected beam pass through the
由于干涉仪采用非对称的设计,返回光源的那路干涉光和光源的出射光在空间上产生了一定的位移,因此,通过平面反射镜EF5反射之后可被有效利用,使得整个光路的能量利用率得到提高。Due to the asymmetric design of the interferometer, the interference light returning to the light source and the outgoing light from the light source have a certain displacement in space. Therefore, it can be effectively used after being reflected by the plane mirror EF5, so that the energy of the entire optical path can be utilized. rate increased.
在这里需要说明的是,可以通过调节三个平面反射镜42中任意一个的倾角来调节干涉条纹的周期。图1中,是调节了平面反射镜CD的倾角。虽然这个倾角很小,但是会改变光束的传播反向,而且要经过三次反射,因此这个小量也会被放大4倍。为了方便之后的光程差的测量和计算,需要光束垂直通过光程差标准具45的表面,因此,我们将光程差标准具45加到了反射光中。需要说明的是,如果需要通过同时在两路光中加入晶体材料的光程差标准具45产生光程差,为了准确的计算光程差,需要将晶体材料的光程差标准具45加入到调节倾角的平面反射镜之前。It should be noted here that the period of the interference fringes can be adjusted by adjusting the inclination of any one of the three plane mirrors 42 . In Fig. 1, the inclination of the flat mirror CD is adjusted. Although this angle of inclination is small, it changes the direction of propagation of the beam and has to undergo three reflections, so this small amount is also amplified by a factor of 4. In order to facilitate the measurement and calculation of the optical path difference later, the light beam needs to pass through the surface of the optical path difference etalon 45 vertically, so we add the optical path difference etalon 45 to the reflected light. It should be noted that, if the optical path difference etalon 45 of the crystal material needs to be added to the two paths of light at the same time to generate the optical path difference, in order to accurately calculate the optical path difference, the optical path difference etalon 45 of the crystal material needs to be added to the optical path difference etalon 45 of the crystal material. Adjust the tilt angle of the flat mirror before.
本实施例,色散系统6包括两组色散单元,每组色散单元包括沿光路依次设置的第一柱面镜60、第二柱面镜61、狭缝62、准直系统63及光栅64;当光束通过干涉仪产生两路干涉条纹后,其中一路经过平面反射镜EF5反射至第一组色散单元中,另一路直接进入第二组色散单元中,两路干涉条纹分别经过各色散单元中的第一柱面镜60、第二柱面镜61压缩之后汇聚到相应狭缝62处。第一柱面镜60、第二柱面镜61的汇聚方向相互垂直,两者之间的距离可根据需要的光斑的长宽比来调节,即不同焦距的柱面镜组合得到的光斑的长宽比不同。狭缝62的位置在第二柱面镜61的焦点处,且狭缝的长度方向与干涉条纹的周期方向一致。经过狭缝62之后干涉条纹再通过准直系统63,入射到光栅64上,使得干涉条纹沿波长方向色散,两束色散光束最终分别经过成像镜7成像在探测器8,本实施例采用CCD探测器。In this embodiment, the dispersion system 6 includes two groups of dispersion units, and each group of dispersion units includes a first
实施例二Embodiment 2
图1中从干涉仪出射的两路干涉光由于相位相反,且平面反射镜EF5与入射光的夹角为45°,如果用一套色散单元,可能会导致两路光的强度由于相位相反而被抵消,因此,图1中用了两套色散单元分别将这两束光色散后成像在探测器上。但是,如果平面反射镜EF5与入射光之间的夹角不是45°,则我们可以使用一套色散单元,最终将两束光成像在CCD的不同位置。如图2,本实施例色散系统6包括一套色散单元,即沿光路依次设置的第一柱面镜60、第二柱面镜61、狭缝62、准直系统63及光栅64;具体成像步骤为:首先,调节平面反射镜EF的角度,使其反射光束与进入色散系统的另一光束不在同一平面内;经平面反射镜EF的反射光束与所述另一光束经过第一柱面镜和第二柱面镜后成像在狭缝长度方向上的不同位置处,再经准直系统准直,最后经光栅64色散成像在探测器的不同位置。The two paths of interference light emitted from the interferometer in Fig. 1 have opposite phases, and the angle between the plane mirror EF5 and the incident light is 45°. If a set of dispersion units is used, the intensity of the two paths of light may be changed due to the opposite phases. Therefore, in Figure 1, two sets of dispersion units are used to disperse the two beams of light and image them on the detector. However, if the angle between the flat mirror EF5 and the incident light is not 45°, then we can use a set of dispersive cells, which will eventually image the two beams at different locations on the CCD. As shown in FIG. 2 , the dispersion system 6 of this embodiment includes a set of dispersion units, that is, a first
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| CN115560854B (en) * | 2022-10-28 | 2025-05-30 | 北京京仪博电光学技术有限责任公司 | Spectrophotometer and detection method for fully automatic batch detection of narrow-band interference filters |
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