CN111524979A - Array substrate and display panel - Google Patents
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
- H10D30/6723—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device having light shields
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
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- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/441—Interconnections, e.g. scanning lines
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- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
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- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
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- G02—OPTICS
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136222—Colour filters incorporated in the active matrix substrate
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Abstract
阵列基板及显示面板,阵列基板包括基板、像素阵列、绝缘层以及覆盖层。像素阵列位于基板上,像素阵列包括多个像素结构,每一像素结构包含一薄膜晶体管。绝缘层位于薄膜晶体管上。覆盖层位于绝缘层上且接触绝缘层,其中覆盖层的折射率与绝缘层的折射率之间的差值为0至0.1之间,且覆盖层的光吸收系数为0至0.5之间。
Array substrate and display panel, the array substrate includes a substrate, a pixel array, an insulating layer and a covering layer. The pixel array is located on the substrate. The pixel array includes a plurality of pixel structures, and each pixel structure includes a thin film transistor. An insulating layer is located on the thin film transistor. The covering layer is located on the insulating layer and contacts the insulating layer, wherein the difference between the refractive index of the covering layer and the refractive index of the insulating layer is between 0 and 0.1, and the light absorption coefficient of the covering layer is between 0 and 0.5.
Description
技术领域technical field
本公开涉及一种阵列基板及显示面板。The present disclosure relates to an array substrate and a display panel.
背景技术Background technique
薄膜晶体管显示器是目前市场的主流,例如熟知的公用显示器(publicinformation display;PID)及8K超高分辨率(ultra-high definition;UHD)显示器等产品,其具备有高亮度与高分辨率的优点。薄膜晶体管显示器由薄膜晶体管阵列、彩色滤光阵列和液晶层所构成,并藉助背光源产生显示的功能,随着逐渐提高其背光源的亮度,光线会经由上板或晶体管覆盖层的反射、栅绝缘层(gate insulating layer;GI layer)内反射、不同介面产生的绕射进而打到薄膜晶体管阵列中的通道层造成越趋严重的漏电情形。Thin film transistor displays are currently the mainstream in the market, such as well-known public information displays (PID) and 8K ultra-high definition (UHD) displays, which have the advantages of high brightness and high resolution. The thin film transistor display is composed of a thin film transistor array, a color filter array and a liquid crystal layer, and produces a display function with the help of a backlight source. The internal reflection of the insulating layer (gate insulating layer; GI layer), the diffraction generated by different interfaces and then hitting the channel layer in the thin film transistor array cause more and more serious leakage.
若采用黑色光间隙材(black photo spacer;BPS)制作于薄膜晶体管阵列基板(black matrix on array;BOA)的模式来制作显示器可以减缓漏电情形。由于黑色光间隙材需像透明光间隙材料(photo spacer;PS)一样需利用全透过(full tone)和半透过(halftone)的掩模做段差;然而,黑色光间隙材在曝光时会因其黑色使光线无法照到其底部而造成底部交联度不均匀,导致黑色光间隙材的段差处均匀度和良率不佳,而透明间隙材的膜厚稳定度会较佳;举例而言,当改变间隙材料的尺寸和曝光量时,黑色光间隙材的段差变化会远大于透明间隙材的段差变化。并且,在显示器检修缺陷时中,也会因黑色间隙材的覆盖,使通道层上有残余物也不容易被察觉到,进一步造成显示器良率下降的问题。If a black photo spacer (BPS) is used to fabricate a thin film transistor array substrate (black matrix on array; BOA) to fabricate a display, the leakage can be reduced. Because the black photo spacer needs to use full tone and halftone masks to make the step difference like the transparent photo spacer (PS); however, the black photo spacer will be exposed during exposure. Because of its black color, the light cannot reach the bottom, resulting in uneven bottom cross-linking, resulting in poor uniformity and yield at the level difference of the black optical gap material, while the film thickness stability of the transparent gap material will be better; for example , when the size and exposure of the gap material are changed, the level difference of the black optical gap material will be much larger than that of the transparent gap material. In addition, when the display is repaired for defects, it is also difficult to detect residues on the channel layer due to the coverage of the black gap material, which further causes the problem of lowering the yield of the display.
发明内容SUMMARY OF THE INVENTION
本公开提供一种高折射率和低光吸收系数的覆盖层覆盖于薄膜晶体管上,可减缓薄膜晶体管漏电情形并提升段差均匀度和提高显示器良率。The present disclosure provides a covering layer with high refractive index and low light absorption coefficient covering the thin film transistor, which can reduce the leakage of the thin film transistor, improve the uniformity of the step difference and improve the yield of the display.
本发明的阵列基板包括基板、像素阵列、绝缘层以及覆盖层。像素阵列位于基板上,像素阵列包括多个像素结构,每一像素结构包含一薄膜晶体管。绝缘层位于薄膜晶体管上。覆盖层位于绝缘层上且接触绝缘层,其中覆盖层的折射率与绝缘层的折射率之间的差值为0至0.1之间,且覆盖层的光吸收系数为0至0.5之间。The array substrate of the present invention includes a substrate, a pixel array, an insulating layer and a cover layer. The pixel array is located on the substrate, and the pixel array includes a plurality of pixel structures, and each pixel structure includes a thin film transistor. The insulating layer is on the thin film transistor. The cover layer is located on and in contact with the insulating layer, wherein the difference between the refractive index of the cover layer and the refractive index of the insulating layer is between 0 and 0.1, and the light absorption coefficient of the cover layer is between 0 and 0.5.
在本发明的一实施例中,上述的薄膜晶体管包括栅极,覆盖层在基板的正投影重叠栅极在基板的正投影。In an embodiment of the present invention, the above-mentioned thin film transistor includes a gate electrode, and the orthographic projection of the cover layer on the substrate overlaps the orthographic projection of the gate electrode on the substrate.
在本发明的一实施例中,上述的绝缘层的折射率为1.75,覆盖层的折射率为1.65至1.85之间。In an embodiment of the present invention, the refractive index of the above-mentioned insulating layer is 1.75, and the refractive index of the covering layer is between 1.65 and 1.85.
在本发明的一实施例中,上述的覆盖层为透明或半透明。In an embodiment of the present invention, the above-mentioned cover layer is transparent or translucent.
在本发明的一实施例中,上述的覆盖层的材料为透明光间隙材(photo spacer,PS)或是超高开口率(ultra high aperture,UHA)绝缘材料,其组成成分包括树脂、光起始剂、溶剂、促进剂、固化促进剂及/或表面活性剂。In an embodiment of the present invention, the material of the above-mentioned cover layer is a transparent photo spacer (PS) or an ultra high aperture (UHA) insulating material, and its components include resin, photoresist starter, solvent, accelerator, curing accelerator and/or surfactant.
本发明的显示面板包括阵列基板、对向基板以及显示介质层。对向基板与阵列基板对向设置,显示介质层位于对向基板与阵列基板之间。像素阵列位于基板上,其中像素阵列包括多个像素结构,每一像素结构包括一薄膜晶体管。绝缘层位于薄膜晶体管上。覆盖层位于绝缘层上且接触绝缘层,其中覆盖层的折射率与绝缘层的折射率的差值为0至0.1之间,且覆盖层的光吸收系数为0至0.5之间。The display panel of the present invention includes an array substrate, an opposite substrate and a display medium layer. The opposite substrate and the array substrate are arranged opposite to each other, and the display medium layer is located between the opposite substrate and the array substrate. The pixel array is located on the substrate, wherein the pixel array includes a plurality of pixel structures, and each pixel structure includes a thin film transistor. The insulating layer is on the thin film transistor. The cover layer is located on and in contact with the insulating layer, wherein the difference between the refractive index of the cover layer and the refractive index of the insulating layer is between 0 and 0.1, and the light absorption coefficient of the cover layer is between 0 and 0.5.
在本发明的一实施例中,上述的薄膜晶体管包括栅极,栅极在基板的正投影重叠覆盖层在基板的正投影。In an embodiment of the present invention, the above-mentioned thin film transistor includes a gate, and the orthographic projection of the gate on the substrate overlaps the orthographic projection of the cover layer on the substrate.
在本发明的一实施例中,上述的显示面板还包括共用电极。共用电极配置于对向基板,其中覆盖层自绝缘层朝对向基板延伸并接触共用电极,绝缘层的折射率为1.75,且覆盖层的折射率为1.65至1.85之间。In an embodiment of the present invention, the above-mentioned display panel further includes a common electrode. The common electrode is disposed on the opposite substrate, wherein the cover layer extends from the insulating layer toward the opposite substrate and contacts the common electrode, the insulating layer has a refractive index of 1.75, and the cover layer has a refractive index between 1.65 and 1.85.
在本发明的一实施例中,上述的显示面板还包括绿色滤光图案、蓝色滤光图案及红色滤光图案。其中覆盖层位于薄膜晶体管上,覆盖层的材料为红色色阻,绿色滤光图案及蓝色滤光图案的至少其中的一者与覆盖层相邻设置,绝缘层的折射率为1.75,且覆盖层的折射率为1.65至1.85之间。In an embodiment of the present invention, the above-mentioned display panel further includes a green filter pattern, a blue filter pattern and a red filter pattern. The cover layer is located on the thin film transistor, the material of the cover layer is red color resist, at least one of the green filter pattern and the blue filter pattern is arranged adjacent to the cover layer, the refractive index of the insulating layer is 1.75, and the cover layer is The refractive index of the layers is between 1.65 and 1.85.
在本发明的一实施例中,上述的显示面板还包括彩色滤光元件。彩色滤光元件配置于覆盖层上且接触覆盖层,且覆盖层包括半透明的黑色光间隙材料,绝缘层的折射率为1.75,且覆盖层的折射率为1.65至1.85之间。In an embodiment of the present invention, the above-mentioned display panel further includes a color filter element. The color filter element is disposed on the cover layer and contacts the cover layer, and the cover layer includes a translucent black optical gap material, the refractive index of the insulating layer is 1.75, and the refractive index of the cover layer is between 1.65 and 1.85.
基于上述,在本公开的阵列基板及显示面板中,透过覆盖层的折射率与绝缘层的折射率之间的差值为0至0.1之间。由于覆盖层的折射率与绝缘层的折射率之间的差值极小,亦即两者可视为相同介质,因此可避免来自背光源的光线在覆盖层与绝缘层之间的介面发生内反射,从而降低通道层的光吸收量,借此可避免薄膜晶体管产生光漏电。由于覆盖层为透明或半透明,在显示面板的生产过程中,亦可有效检测到通道层上是否具有薄残余物,借此能提升显示面板的良率。Based on the above, in the array substrate and the display panel of the present disclosure, the difference between the refractive index of the transmission cover layer and the refractive index of the insulating layer is between 0 and 0.1. Since the difference between the refractive index of the cover layer and that of the insulating layer is extremely small, that is, the two can be regarded as the same medium, it can prevent the light from the backlight from occurring in the interface between the cover layer and the insulating layer. Therefore, the light absorption amount of the channel layer is reduced, thereby preventing the light leakage of the thin film transistor. Since the cover layer is transparent or semi-transparent, in the production process of the display panel, whether there is a thin residue on the channel layer can also be effectively detected, thereby improving the yield of the display panel.
附图说明Description of drawings
阅读以下详细叙述并搭配对应的附图,可了解本公开的多个样态。需留意的是,附图中的多个特征并未依照该业界领域的标准作法绘制实际比例。事实上,所述的特征的尺寸可以任意的增加或减少以利于讨论的清晰性。Various aspects of the present disclosure can be understood by reading the following detailed description in conjunction with the corresponding drawings. It should be noted that various features in the drawings are not drawn to scale according to standard practice in the industry. In fact, the dimensions of the described features may be arbitrarily increased or decreased to facilitate clarity of discussion.
图1A是依照本发明一实施例的显示面板的局部俯视图。FIG. 1A is a partial top view of a display panel according to an embodiment of the present invention.
图1B是沿图1A的剖线I-I’的剖面示意图。Fig. 1B is a schematic cross-sectional view taken along line I-I' of Fig. 1A.
图1C是依照本发明一实施例的像素阵列的示意图。FIG. 1C is a schematic diagram of a pixel array according to an embodiment of the present invention.
图1D为图1B的区域R的放大示意图。FIG. 1D is an enlarged schematic view of the region R of FIG. 1B .
图2至图5是依照本发明另一实施例的显示面板的剖面示意图。2 to 5 are schematic cross-sectional views of a display panel according to another embodiment of the present invention.
附图标记说明:Description of reference numbers:
10、10a、10b、10c、10d...显示面板10, 10a, 10b, 10c, 10d...display panel
100...阵列基板100...Array substrate
102...对向基板102... Opposite substrate
104...显示介质层104...Display medium layer
106、106a、106b、106c、106d...覆盖层106, 106a, 106b, 106c, 106d... cover layer
108...绝缘层108...Insulation layer
109...绝缘层109...Insulation layer
110...框胶110...Frame glue
111、111c...彩色滤光元件111, 111c...color filter element
112A...主间隙物112A...Main spacer
112B...次间隙物112B...Secondary clearance
114A...平坦部114A...Flat part
114B...主间隙物114B...Main spacer
114C...次间隙物114C...Secondary clearance
116...钝化层116...Passivation layer
118...信号线118...Signal line
120...导体层120...Conductor layer
122...共用电极122...Common electrode
124...钝化层124...passivation layer
AA...显示区AA...display area
AR...像素阵列AR...pixel array
BM...黑色矩阵BM...Black Matrix
C...接触窗C...contact window
CF1...红色滤光图案CF1...Red filter pattern
CF2...绿色滤光图案CF2...Green filter pattern
CF3...蓝色滤光图案CF3...Blue filter pattern
CH...通道层CH...channel layer
CL...共通线CL...Common line
D...漏极D...Drain
DL...数据线DL... data cable
G...栅极G...gate
GI...栅绝缘层GI...Gate Insulator
I-I’...剖线I-I'...section line
L1...路径L1...path
L2...路径L2...path
L3...路径L3...path
P...像素结构P...pixel structure
PE...像素电极PE...pixel electrode
PS1...主间隙物PS1...main spacer
PS2...次间隙物PS2...Secondary spacer
S...源极S...source
SB...基板SB...Substrate
SL...扫描线SL...scan line
T...薄膜晶体管T...thin film transistor
U...像素单元U...pixel unit
具体实施方式Detailed ways
为让本发明的上述特征和优点能更明显易懂,下文特举实施例,并配合说明书附图作详细说明如下。In order to make the above-mentioned features and advantages of the present invention more obvious and easy to understand, the following specific embodiments are given and described in detail as follows in conjunction with the accompanying drawings.
图1A是依照本发明一实施例的显示面板10的局部俯视图。图1B是沿图1A的剖线I-I’的剖面示意图。图1C是本发明一实施例的像素阵列AR的示意图。请同时参照图1A至图1C,本实施例的显示面板10具有显示区AA以及环绕显示区AA四周的周边区NA。FIG. 1A is a partial top view of a
另外,在本实施例中,显示面板10包括阵列基板100、对向基板102以及显示介质层104。阵列基板100包括基板SB、像素阵列AR、绝缘层108及覆盖层106。基板SB与对向基板102彼此相对设置。基板SB及对向基板102的材质可各自为玻璃、石英或有机聚合物。显示介质层104可为液晶层,也就是说,在本实施例中,显示面板10为液晶显示面板。为了方便说明起见,图1A中省略示出对向基板102及显示介质层104等构件。In addition, in this embodiment, the
像素阵列AR位于基板SB上,且位于显示区AA中。像素阵列AR包括多条扫描线SL、多条数据线DL、多个像素结构P以及多条共通线CL,且每一像素结构P对应一个像素单元U设置。扫描线SL及数据线DL具有不相同的延伸方向。于一实施例中,扫描线SL的延伸方向与数据线DL的延伸方向垂直。此外,扫描线SL与数据线DL是位于不相同的膜层,且两者之间夹有绝缘层(未示)。扫描线SL及数据线DL主要用来传递驱动像素结构P的驱动信号。The pixel array AR is located on the substrate SB and is located in the display area AA. The pixel array AR includes a plurality of scan lines SL, a plurality of data lines DL, a plurality of pixel structures P, and a plurality of common lines CL, and each pixel structure P is disposed corresponding to one pixel unit U. The scan lines SL and the data lines DL have different extending directions. In one embodiment, the extending direction of the scan lines SL is perpendicular to the extending direction of the data lines DL. In addition, the scan line SL and the data line DL are located in different film layers, and an insulating layer (not shown) is sandwiched between them. The scan line SL and the data line DL are mainly used to transmit driving signals for driving the pixel structure P.
每一像素结构P跟对应的一条扫描线SL及对应的一条数据线DL电性连接。更详细而言,每一像素单元U中都设置有像素结构P。根据本实施例,像素结构P包括薄膜晶体管T以及像素电极PE。薄膜晶体管T与对应的一条扫描线SL及对应的一条数据线DL电性连接,且像素电极PE与薄膜晶体管T电性连接。更详细而言,薄膜晶体管T包括栅极G、通道层CH、源极S以及漏极D。栅极G与对应的一条扫描线SL电性连接。通道层CH位于栅极G的上方。源极S以及漏极D位于通道层CH的上方,且源极S与对应的一条数据线DL电性连接。漏极D、源极S分别与通道层CH之间夹有绝缘层109。Each pixel structure P is electrically connected to a corresponding scan line SL and a corresponding data line DL. In more detail, each pixel unit U is provided with a pixel structure P. According to this embodiment, the pixel structure P includes the thin film transistor T and the pixel electrode PE. The thin film transistor T is electrically connected to a corresponding scan line SL and a corresponding data line DL, and the pixel electrode PE is electrically connected to the thin film transistor T. In more detail, the thin film transistor T includes a gate G, a channel layer CH, a source S and a drain D. The gate G is electrically connected to a corresponding scan line SL. The channel layer CH is located above the gate G. The source electrode S and the drain electrode D are located above the channel layer CH, and the source electrode S is electrically connected to a corresponding data line DL. An insulating
共通线CL配置于基板SB上,共通线CL与扫描线SL之间具有多个间隙,故共通线CL不会与扫描线SL及栅极G电性导通。进一步而言,在本实施例中,共通线CL彼此电性连接,并连接至共用电压。于本实施例中,薄膜晶体管T的栅极G、共通线CL及扫描线SL是在同一工艺步骤中一起形成,亦即薄膜晶体管T的栅极G、共通线CL及扫描线SL属于同一膜层,具有相同的材质。举例而言,栅极G、共通线CL及扫描线SL的材质为金属,且可为单层或多层。举例而言,栅极G、共通线CL及扫描线SL可为铝(Al)、铝合金(Al alloy)、银(Ag)、银合金(Agalloy)、铜(Cu)、铜合金(Cu alloy)、钼(Mo)、钼合金(Mo alloy)、铬(Cr)、钛(Ti)及/或钽(Ta)所构成的单层,或者,栅极G、共通线CL及扫描线SL可为铜/钼(Cu/Mo)、铝/钼(Al/Mo)、铝/钕(Al/Nd)、钼/钨(Mo/W)、钼/铜/钼(Mo/Cu/Mo)、钼/铝/钼(Mo/Al/Mo)、钛/铜/钛(Ti/Cu/Ti)、钛/铝/钛(Ti/Al/Ti)所构成的多层。于本实施例中,栅极G、共通线CL及扫描线SL的厚度为0.3微米至1微米之间。The common line CL is disposed on the substrate SB, and there are a plurality of gaps between the common line CL and the scan line SL, so the common line CL is not electrically connected to the scan line SL and the gate G. Further, in this embodiment, the common lines CL are electrically connected to each other and connected to the common voltage. In this embodiment, the gate G, the common line CL and the scan line SL of the thin film transistor T are formed together in the same process step, that is, the gate G, the common line CL and the scan line SL of the thin film transistor T belong to the same film. layer, with the same material. For example, the material of the gate G, the common line CL and the scan line SL is metal, and can be a single layer or a multi-layer. For example, the gate G, the common line CL and the scan line SL can be aluminum (Al), aluminum alloy (Al alloy), silver (Ag), silver alloy (Agalloy), copper (Cu), copper alloy (Cu alloy) ), molybdenum (Mo), molybdenum alloy (Mo alloy), chromium (Cr), titanium (Ti) and/or tantalum (Ta) as a single layer, or the gate G, the common line CL and the scan line SL can be are copper/molybdenum (Cu/Mo), aluminum/molybdenum (Al/Mo), aluminum/neodymium (Al/Nd), molybdenum/tungsten (Mo/W), molybdenum/copper/molybdenum (Mo/Cu/Mo), Multilayers composed of molybdenum/aluminum/molybdenum (Mo/Al/Mo), titanium/copper/titanium (Ti/Cu/Ti), and titanium/aluminum/titanium (Ti/Al/Ti). In this embodiment, the thicknesses of the gate G, the common line CL and the scan line SL are between 0.3 μm and 1 μm.
通道层CH的材质可以是非晶硅(α-Si:H)半导体材料并通过掺杂(doping)定义出通道区及位于通道区两端的源极掺杂区与漏极掺杂区(未示)。于本实施例中,薄膜晶体管T的源极S、漏极D及数据线DL是在同一工艺步骤中一起形成,亦即薄膜晶体管T的源极S、漏极D及数据线DL属于同一膜层,具有相同的材质。源极S、漏极D及数据线DL的材质例如为金属,且可为单层或多层。举例而言,源极S、漏极D及数据线DL可为铝(Al)、铝合金(Al alloy)、银(Ag)、银合金(Ag alloy)、铜(Cu)、铜合金(Cu alloy)、钼(Mo)、钼合金(Mo alloy)、铬(Cr)、钛(Ti)及/或钽(Ta)所构成的单层,或者,源极S、漏极D及数据线DL可为铜/钼(Cu/Mo)、铝/钼(Al/Mo)、钼/铜/钼(Mo/Cu/Mo)、钼/铝/钼(Mo/Al/Mo)、钛/铜/钛(Ti/Cu/Ti)、钛/铝/钛(Ti/Al/Ti)所构成的多层。于本实施例中,源极S、漏极D及数据线DL的厚度为0.3微米至1微米之间。The material of the channel layer CH can be amorphous silicon (α-Si:H) semiconductor material, and the channel region and the source doped region and the drain doped region (not shown) at both ends of the channel region are defined by doping . In this embodiment, the source S, the drain D and the data line DL of the thin film transistor T are formed together in the same process step, that is, the source S, the drain D and the data line DL of the thin film transistor T belong to the same film. layer, with the same material. The material of the source electrode S, the drain electrode D and the data line DL is, for example, metal, and can be a single layer or multiple layers. For example, the source electrode S, the drain electrode D and the data line DL can be aluminum (Al), aluminum alloy (Al alloy), silver (Ag), silver alloy (Ag alloy), copper (Cu), copper alloy (Cu) Alloy), molybdenum (Mo), molybdenum alloy (Mo alloy), chromium (Cr), titanium (Ti) and/or tantalum (Ta) constitute a single layer, or, source S, drain D and data line DL Can be copper/molybdenum (Cu/Mo), aluminum/molybdenum (Al/Mo), molybdenum/copper/molybdenum (Mo/Cu/Mo), molybdenum/aluminum/molybdenum (Mo/Al/Mo), titanium/copper/ Multilayers composed of titanium (Ti/Cu/Ti) and titanium/aluminum/titanium (Ti/Al/Ti). In this embodiment, the thicknesses of the source electrode S, the drain electrode D and the data line DL are between 0.3 μm and 1 μm.
在本实施例中,薄膜晶体管T的栅极G上更覆盖有栅绝缘层GI。栅绝缘层GI的材料为无机材料,例如氮化硅(SiNx)、氧化硅(SiOx)或上述至少二种材料的堆叠层。In this embodiment, the gate G of the thin film transistor T is further covered with a gate insulating layer GI. The material of the gate insulating layer GI is an inorganic material, such as silicon nitride (SiN x ), silicon oxide (SiO x ), or a stacked layer of at least two of the above materials.
绝缘层108位于薄膜晶体管T上,详言之,绝缘层108位于薄膜晶体管T的源极S与漏极D上。于本实施例中,绝缘层108的材料是无机材料,例如为氮化硅(SiNx)。覆盖层106位于绝缘层108上且接触绝缘层108。图1D为图1B的区域R的放大示意图。请参照图1D,一部分的光线会沿着路径L3行进,若光线在覆盖层106与绝缘层108之间的介面发生反射,则光线还会沿着路径L1在栅绝缘层GI中发生全内反射(internal reflection),全内反射的光线会照射至通道层CH而被通道层CH所吸收。于本实施例中,覆盖层106的折射率与绝缘层108的折射率之间的差值为0至0.1之间。由于覆盖层106的折射率与绝缘层108的折射率之间的差值极小,亦即两者可视为相同介质,因此可避免来自背光源(未示)的光线在覆盖层106与绝缘层108之间的介面发生内反射,从而降低通道层CH的光吸收量,借此可避免薄膜晶体管T(见图1C)产生光漏电。于一实施例中,绝缘层108的折射率为1.75,覆盖层106的折射率为1.65至1.85之间。The insulating
覆盖层106在基板SB的正投影重叠栅极G在基板SB的正投影。于本实施例中,覆盖层106在基板SB的正投影完全覆盖栅极G在基板SB的正投影,如此一来,光线不会沿着路径L2产生绕射而打到通道层CH,从而避免光线被通道层CH所吸收,借此可避免薄膜晶体管T(见图1C)产生光漏电。The orthographic projection of the
于本实施例中,覆盖层106的材料例如是超高开口率(ultra high aperture;UHA)绝缘材料,此为透明的有机感光材料且为高折射率材料,且覆盖层106为正型光刻胶。于本实施例中,覆盖层106的材料组成包括树脂、光活性化合物(photo active compound;PAC)、溶剂(solvent)及添加剂(additive),添加剂例如是促进剂(promoter)、固化促进剂(curing promoter)及/或表面活性剂。举例而言,树脂例如是丙烯酸树脂(acrylicresin),像是酚醛树脂衍生物(cresol novolak resin)及苯乙烯丙烯酸酯的共聚物(copolymer of 2-propenamide polymer with ethenylbenzene),光活性化合物例如是重氮衍生物(naphthoquinone diazide derivative)。In this embodiment, the material of the
于本实施例中,覆盖层106的光吸收系数为0至0.5之间。由于光吸收系数与透明度有相关性,如此一来,覆盖层106为透明(即光吸收系数为零)或半透明(即光吸收系数为0至0.5之间)。覆盖层106例如是通过曝光、显影、硬烤工艺所形成。由于覆盖层106为透明或半透明,在其进行曝光工艺时,相较于黑色材料可避免其底部交联不完全的情形,在显影和硬烤工艺后使覆盖层106具有良好的膜厚稳定性。并且,由于覆盖层106为透明或半透明,在显示面板10的生产过程中,可有效检测到通道层CH上是否具有薄残余物,借此能提升显示面板10的良率。于本实施例中,覆盖层106的厚度为1微米至5微米之间。In this embodiment, the light absorption coefficient of the
另外,像素电极PE配置在覆盖层106上,而接触窗C位在覆盖层106中。像素电极PE通过接触窗C与薄膜晶体管T的漏极D电性连接。像素电极PE例如是透明像素电极,其材质包括金属氧化物,例如是铟锡氧化物(Indium Tin Oxide;ITO)、铟锌氧化物(Indium ZincOxide;IZO)或其它合适的氧化物、或者是上述至少二者的堆叠层。于本实施例中,像素电极PE的厚度为0.04微米至0.2微米之间。In addition, the pixel electrode PE is disposed on the
显示面板10还包括黑色矩阵(black matrix)BM、彩色滤光元件111、共用电极122、多个主间隙物(photo spacer)PS1、多个次间隙物PS2、框胶110、导体层120及信号线118。导体层120与信号线118连接。于本实施例中,黑色矩阵BM配置于对向基板102上,彩色滤光元件111配置于黑色矩阵BM上,彩色滤光元件111例如包括红色滤光图案CF1、绿色滤光图案CF2以及蓝色滤光图案(未示)。彩色滤光元件彩色滤光元件111的成分组成可包括树脂、单体、颜料(pigment)、染料(dye)、光起始剂(photoinitiator)、溶剂及/或添加剂,添加剂例如是促进剂(promoter)、固化促进剂(curing promoter)及/或表面活性剂(surfactant)。于本实施例中,彩色滤光元件111的厚度为2微米至4微米之间。共用电极122配置于对向基板102上,详言之,共用电极122配置于黑色矩阵BM及彩色滤光元件111上。共用电极122与像素电极PE之间的电位差能驱动显示介质层104,进而使显示面板10显示画面。The
在一些实施例中,黑色矩阵BM位于不同颜色的滤光图案之间。黑色矩阵BM的成分组成包括树脂、单体、碳、光起始剂、溶剂及/或添加剂,添加剂例如是促进剂(promoter)、固化促进剂(curing promoter)及/或表面活性剂。于本实施例中,黑色矩阵BM的厚度为1微米至3微米之间。于本实施例中,主间隙物PS1及次间隙物PS2配置于对向基板102上,详言之,主间隙物PS1及次间隙物PS2配置于共用电极122上,以支撑阵列基板100与对向基板102并形成间隙(cell gap)。主间隙物PS1的高度大于次间隙物PS2的高度,主间隙物PS1自共用电极122延伸至接触覆盖层106的顶面,次间隙物PS2自共用电极122延伸并与覆盖层106之间相隔一距离。主间隙物PS1及次间隙物PS2为有机感光材料,其成分组成包括树脂、单体、光起始剂、溶剂及/或添加剂,添加剂例如是促进剂(promoter)、固化促进剂(curingpromoter)及/或表面活性剂。框胶110设置于对向基板102与阵列基板100之间并实质上环绕显示介质层104。框胶110可具有至少一个开口(未标示),以作为显示介质层104的注入口,但本发明不以此为限。In some embodiments, the black matrix BM is located between the filter patterns of different colors. The components of the black matrix BM include resins, monomers, carbon, photoinitiators, solvents and/or additives, such as promoters, curing promoters and/or surfactants. In this embodiment, the thickness of the black matrix BM is between 1 μm and 3 μm. In this embodiment, the main spacer PS1 and the sub-spacer PS2 are disposed on the
图2是依照本发明另一实施例的显示面板10a的剖面示意图。图2的显示面板10a与图1B的显示面板10的主要差异在于:显示面板10a的覆盖层106a具有主间隙物112A与次间隙物112B,主间隙物112A及次间隙物112B位于基板SB上,而显示面板10的主间隙物PS1及次间隙物PS2位于对向基板102上,其中与图1B类似的元件于此不再重复说明。FIG. 2 is a schematic cross-sectional view of a
请参照图2,覆盖层106a的材料例如是光间隙材(photo spacer,PS),此为透明的有机感光材料且为高折射率材料,其组成成分为树脂、单体、光起始剂、溶剂及/或添加剂,添加剂例如是促进剂(promoter)、固化促进剂(curing promoter)及/或表面活性剂。于本实施例中,覆盖层106a的材料为负型光刻胶。主间隙物112A自绝缘层108朝对向基板102延伸并接触对向基板102上的共用电极122,次间隙物112B自绝缘层108朝对向基板102延伸并与共用电极122之间相隔一距离,像素电极PE分别与主间隙物112A、次间隙物112B之间相隔一距离,于本实施例中,主间隙物112A与次间隙物112B可用于支撑阵列基板100与对向基板102并形成间隙。主间隙物112A与次间隙物112B使用同一张掩模所制作,此掩模为半穿透率掩模(half tone mask)。掩模的光穿透率与显影及硬烤后的光刻胶的厚度具有相关性。举例而言,掩模的对应于主间隙物112A的区域的光穿透率为100%,掩模的对应于次间隙物112B的区域的光穿透率为1%至99%,在曝光显影后,可使主间隙物112A的厚度大于次间隙物112B的厚度。Please refer to FIG. 2 , the material of the
图3是依照本发明另一实施例的显示面板10b的剖面示意图。图3的显示面板10b与图1B的显示面板10的主要差异在于:显示面板10的光间隙材(PS)(例如主间隙物PS1及次间隙物PS2)是由半穿透率掩模(half tone mask)所制备,且显示面板10的覆盖层106为全膜的超高开口率(UHA)绝缘材料,显示面板10b的覆盖层106b还包括平坦部114A,显示面板10b的光间隙材(PS)(例如主间隙物114B、次间隙物114C及平坦部114A)是由多穿透率掩模(multi tone mask)所制备,且显示面板10b的覆盖层106b为超高开口率(UHA)绝缘材料,其中与图1B类似的元件于此不再重复说明。FIG. 3 is a schematic cross-sectional view of a
请参照图3,覆盖层106b的材料例如是多穿透率掩模制备的超高开口率(multi-tone ultra high aperture)绝缘材料,此为透明的有机感光材料且为高折射率材料,其组成成分为树脂、光活性化合物(photo active compound;PAC)、溶剂(solvent)及添加剂(additive),添加剂例如是促进剂(promoter)、固化促进剂(curing promoter)及/或表面活性剂。于本实施例中,覆盖层106b的材料为正型光刻胶。主间隙物114B自平坦部114A朝对向基板102延伸并接触对向基板102上的共用电极122,次间隙物114C自平坦部114A朝对向基板102延伸并与共用电极122之间相隔一距离,像素电极PE分别与主间隙物114B、次间隙物114C之间相隔一距离。于本实施例中,主间隙物114B与次间隙物114C可用于支撑阵列基板100与对向基板102并形成间隙。平坦部114A、主间隙物114B与次间隙物114C使用同一张掩模所制作,举例而言,使用被称为多穿透率(multi-tone)遮罩所制作。如前所述,掩模的光穿透率与显影后的光刻胶的厚度具有相关性。举例而言,掩模的对应于平坦部114A的区域的光穿透率为1%至99%,掩模的对应于主间隙物114B的区域的光穿透率为0%,掩模的对应于次间隙物114C的区域的光穿透率为1%至99%,且掩模的对应于平坦部114A的区域的光穿透率大于对应于次间隙物114C的区域的光穿透率。Referring to FIG. 3 , the material of the
图4是依照本发明另一实施例的显示面板10c的剖面示意图。图4的显示面板10c与图1B的显示面板10的主要差异在于:显示面板10c的彩色滤光元件111c位于基板SB上,构成彩色滤光层于像素阵列上(color filter on array)的结构,其中覆盖层106c相当于红色滤光图案的一部分并和绿色滤光图案CF2、蓝色滤光图案CF3共同构成彩色滤光元件111c,其中与图1B类似的元件于此不再重复说明。4 is a schematic cross-sectional view of a
请参照图4,覆盖层106c的材料例如是有机感光材料且为高折射率材料,例如为红色色阻,举例而言,覆盖层106c包括树脂、单体、光起始剂、红色颜料、溶剂及/或添加剂,添加剂例如是促进剂(promoter)、固化促进剂(curing promoter)及/或表面活性剂。覆盖层106c、绿色滤光图案CF2及蓝色滤光图案CF3各对应一个像素单元U设置。薄膜晶体管T的通道层CH可吸收波长为380纳米至580纳米之间的光线,由于红光的波长位于此范围之外,因此在覆盖层106c中反射的光线(即红光)打到通道层CH也不会被通道层CH所吸收。若覆盖层106c的材料包括绿色色阻或蓝色色阻,由于蓝光与绿光的波长低于600纳米,换言之,蓝光与绿光的波长位于通道层CH可吸收的波长的范围之中,则在覆盖层106c中反射的光线(即蓝光或绿光)会被通道层CH所吸收,造成薄膜晶体管T的光漏电。于本实施例中,显示面板10c还包括钝化层116,钝化层116位于彩色滤光元件111c及覆盖层106c上,且像素电极PE位于钝化层116上。共用电极122配置于黑色矩阵BM上。于本实施例中,主间隙物PS1自共用电极122延伸至接触钝化层116的顶面,次间隙物PS2自共用电极122延伸并与钝化层116之间相隔一距离。Referring to FIG. 4 , the material of the
图5是依照本发明另一实施例的显示面板10d的剖面示意图。图5的显示面板10d与图1B的显示面板10的主要差异在于:显示面板10d的彩色滤光元件111配置于覆盖层106d上,且彩色滤光元件111构成彩色滤光层于像素阵列上(color filter on array)的结构。其中与图1B类似的元件于此不再重复说明。请参照图5,举例而言,覆盖层106d的材料例如是有机感光材料且为高折射率材料的黑色光间隙材料(black photo spacer,BPS),其覆盖层106d的组成成分包括树脂、单体、光起始剂、有机黑色颜料、溶剂及/或添加剂,添加剂例如是促进剂(promoter)、固化促进剂(curing promoter)及/或表面活性剂。于本实施例中,覆盖层106d的材料为负型光刻胶。且覆盖层106d为透明或半透明。显示面板10d还包括钝化层124,钝化层124位于彩色滤光元件111上,且像素电极PE位于钝化层124上。共用电极122配置于黑色矩阵BM上。于本实施例中,主间隙物PS1及次间隙物PS2配置于钝化层124上,主间隙物PS1自钝化层124延伸至接触共用电极122的顶面,次间隙物PS2自钝化层124延伸并与共用电极122之间相隔一距离。FIG. 5 is a schematic cross-sectional view of a
综上所述,在本公开的阵列基板及显示面板中,透过覆盖层的折射率与绝缘层的折射率之间的差值为0至0.1之间。由于覆盖层的折射率与绝缘层的折射率之间的差值极小,亦即两者可视为相同介质,因此可避免来自背光源的光线在覆盖层与绝缘层之间的介面发生内反射,从而降低通道层的光吸收量,借此可避免薄膜晶体管产生光漏电。覆盖层的光吸收系数为0至0.5之间。由于光吸收系数与透明度有相关性,如此一来,覆盖层为透明(即光吸收系数为零)或半透明(即光吸收系数为0至0.5之间)。覆盖层例如是通过曝光、显影及硬烤工艺所形成。由于覆盖层为透明或半透明,在其进行曝光工艺时,可避免交联不完全的情形,在显影及硬烤工艺后使覆盖层具有良好的膜厚稳定性,提升覆盖层的良率。由于覆盖层为透明或半透明,在显示面板的生产过程中,亦可有效检测到通道层上是否具有薄残余物,借此能提升显示面板的良率。To sum up, in the array substrate and the display panel of the present disclosure, the difference between the refractive index of the transmission cover layer and the refractive index of the insulating layer is between 0 and 0.1. Since the difference between the refractive index of the cover layer and that of the insulating layer is extremely small, that is, the two can be regarded as the same medium, it can prevent the light from the backlight from occurring in the interface between the cover layer and the insulating layer. Therefore, the light absorption amount of the channel layer is reduced, thereby preventing the light leakage of the thin film transistor. The light absorption coefficient of the cover layer is between 0 and 0.5. Since the light absorption coefficient is related to transparency, the cover layer is transparent (ie, the light absorption coefficient is zero) or translucent (ie, the light absorption coefficient is between 0 and 0.5). The cover layer is formed by, for example, exposing, developing and hard-baking. Since the cover layer is transparent or semi-transparent, incomplete crosslinking can be avoided during the exposure process, the cover layer has good film thickness stability after developing and hard baking processes, and the yield of the cover layer is improved. Since the cover layer is transparent or semi-transparent, in the production process of the display panel, whether there is a thin residue on the channel layer can also be effectively detected, thereby improving the yield of the display panel.
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