CN111508816A - Excimer lamp and manufacturing method of excimer lamp - Google Patents

Abstract

The present invention provides an excimer lamp and a method for manufacturing the excimer lamp. The excimer lamp includes a discharge container, a pair of electrodes, a pair of connecting parts, a pair of leads, and a pair of non-converted protective films. The discharge container has a first outer surface and a second outer surface opposite to each other. The pair of electrodes are respectively arranged on the first outer surface and the second outer surface of the discharge container. The pair of connecting parts are respectively arranged on the pair of electrodes, and the pair of connecting parts each include solder. The pair of leads are respectively electrically connected to the pair of electrodes via the pair of connecting parts. The pair of non-converted protective films are respectively covered on the surface of the pair of connecting parts.

Description

Excimer lamp and manufacturing method of excimer lamp

technical field

The invention relates to an excimer lamp and a manufacturing method of the excimer lamp, in particular to an excimer lamp and a manufacturing method of the excimer lamp applied to the manufacturing process of a semiconductor or liquid crystal display element.

Background technique

In the manufacturing process of semiconductors or liquid crystal display elements, dry cleaning methods using ultraviolet rays are widely used to decompose and remove organic compounds adhering to the surfaces of silicon wafers of semiconductor substrates or glass substrates of liquid crystal substrates. In particular, the dry cleaning method of ultraviolet rays using an excimer lamp can efficiently perform cleaning in a short time.

However, when the excimer lamp is in use or after use, the welding part (solder) in the excimer lamp may be exposed to cleaning liquid (ethanol, isopropanol), acid gas (sulfuric acid, nitric acid, acetic acid, etc.), ultraviolet rays or When the excimer lamp itself is insufficiently cooled, the welding part may be oxidized or softened due to excessive temperature, resulting in problems such as peeling of the welding part, abnormal discharge, electrode burnout, and damage to the excimer lamp.

SUMMARY OF THE INVENTION

In view of this, the present invention provides an excimer lamp with good durability and a manufacturing method of the excimer lamp with a simple process.

The present invention provides an excimer lamp, comprising: a discharge vessel, a pair of electrodes, a pair of connecting parts, a pair of lead wires, and a pair of non-converted protective films. The discharge vessel is composed of a light-transmitting medium. A sealed space exists inside the discharge vessel, and the discharge gas exists in the sealed space. The discharge vessel has opposing first and second outer surfaces. A pair of electrodes are respectively disposed on the first outer surface and the second outer surface of the discharge vessel. A pair of connection parts are provided on a pair of electrodes, respectively, and each of the pair of connection parts includes solder. A pair of lead wires are respectively electrically connected to a pair of electrodes via a pair of connecting portions. A pair of non-converted protective films cover the surfaces of the pair of connecting portions, respectively.

The present invention also provides a method for manufacturing an excimer lamp, comprising: first, providing a discharge vessel with opposite first outer surfaces and second outer surfaces. Next, a pair of connection portions are respectively provided on the pair of electrodes, and each of the pair of connection portions includes solder. Then, a pair of lead wires are respectively disposed on the pair of connecting portions, so that the pair of lead wires are electrically connected to the pair of electrodes respectively through the pair of connecting portions. A pair of non-converted protective films are respectively formed on the surfaces of the pair of connecting portions. Among them, the discharge vessel is composed of a light-transmitting medium, and a sealed space exists inside the discharge vessel, and a discharge gas exists in the sealed space.

Based on the above, the present invention provides an excimer lamp with good durability and a manufacturing method of the excimer lamp with a simple process. Specifically, the excimer lamp of the present invention forms a non-converted protective film on the connecting portion, and the non-converted protective film can protect the solder in the connecting portion and prevent the solder from contacting with cleaning liquid, acid gas, ultraviolet rays or When the cooling of the excimer lamp itself is insufficient, the welding part is oxidized or the temperature is too high to soften, resulting in the damage of the excimer lamp, thereby effectively improving the durability of the excimer lamp. In addition, through the manufacturing method of the excimer lamp of the present invention, the non-converted protective film formation method does not need to undergo conversion steps such as additional heating, so the manufacturing process of the excimer lamp can be greatly simplified and the production efficiency can be improved.

In order to make the above-mentioned features and advantages of the present invention more obvious and easy to understand, the following embodiments are given and described in detail with the accompanying drawings as follows.

Description of drawings

Figure 1(a) is a top view of an excimer lamp according to a first embodiment of the present invention;

Figure 1(b) is a side view of an excimer lamp according to a first embodiment of the present invention;

Figure 1(c) is a bottom view of an excimer lamp according to the first embodiment of the present invention;

Fig. 2 is the schematic diagram along the AA' section in Fig. 1 (b);

3( a ) to 3 ( d ) are schematic diagrams of a manufacturing method of an excimer lamp according to the first embodiment of the present invention.

Description of reference numbers:

100: Excimer lamp

120: Discharge vessel

122: Sealed Space

130: First electrode

140: Second electrode

150: First lead

150a: The first core wire exposed part

150b: First coating layer

160: Second lead

160a: second core wire exposed portion

160b: Second coating

170: First connection part

170a: First surface

170b: Third surface

172: First Solder

174: First Metal Sheet

176: First non-converted protective film

180: Second connecting part

180a: Second surface

180b: Fourth surface

182: Second Solder

184: Second metal sheet

186: Second non-converted protective film

C: Adhesive composition

S1: first outer surface

S2: Second outer surface

X, Y, Z: direction

Detailed ways

<Excimer lamp>

FIGS. 1( a ) to 1 ( c ) are respectively a top view, a side view and a bottom view of an excimer lamp 100 according to the first embodiment of the present invention. Fig. 2 is a schematic diagram of a cross section along AA' in Fig. 1(b). In particular, for the sake of clarity and convenience of description, the thickness or ratio of each element in FIGS. 1( a ) to 1 ( c ) and FIG. 2 is appropriately enlarged or reduced, which does not represent the actual thickness or scale. 1(a) to 1(c) and FIG. 2 at the same time, the excimer lamp 100 includes a discharge vessel 120, a first electrode 130, and a second electrode 140 (the first electrode 130 and the second electrode 140 are also referred to as "" A pair of electrodes”), a first connection part 170, a second connection part 180 (the first connection part 170 and the second connection part 180 are also referred to as “a pair of connection parts”), the first lead 150, the second lead 160 ( The first lead 150 and the second lead 160 are also referred to as "a pair of leads"), the first non-converted protective film 176 and the second non-converted protective film 186 (the first non-converted protective film 176 and the second The two non-converted protective films 186 are also referred to as "a pair of protective films").

Specifically, the discharge vessel 120 has an opposite first outer surface S1 and a second outer surface S2. The first electrode 130 is disposed on the first outer surface S1 of the discharge vessel 120 . The second electrode 140 is disposed on the second outer surface S2 of the discharge vessel 120 . In addition, the first connection portion 170 and the second connection portion 180 are respectively disposed on the first electrode 130 and the second electrode 140 . The first lead 150 and the second lead 160 are electrically connected to the first electrode 130 and the second electrode 140, respectively. The first non-converted protective film 176 and the second non-converted protective film 186 cover the first connecting portion 170 and the second connecting portion 180, respectively.

Specifically, the discharge vessel 120 is formed of a light-transmitting medium. Examples of the light-transmitting medium include synthetic quartz glass. The appearance of the discharge vessel 120 is substantially a flat rectangular parallelepiped. A sealed space 122 exists inside the discharge vessel 120 . A discharge gas exists in the sealed space 122 . The discharge gas is, for example, xenon gas, chlorine gas, or XeCl. Different discharge gases can generate different wavelengths of excimer light, and are used in different semiconductor processes. Specifically, if xenon gas is selected as the discharge gas, ultraviolet rays with a wavelength of 172 nm can be emitted, whereby the excimer lamp can be applied to the ozone cleaning process. In addition, if XeCl is selected as the discharge gas, ultraviolet rays with a wavelength of 308 nm can be emitted, whereby the excimer lamp can be applied to the ink curing process.

The first electrode 130 is formed of a metal film, wherein the metal film is formed in the film formation region of the entire plane of the first outer surface S1 of the discharge vessel 120 . The second electrode 140 is formed of a metal film, wherein the metal film is formed in a mesh-like pattern (lattice-like) in the film-forming region of the second outer surface S2 of the discharge vessel 120 .

By applying high frequency and high voltage to the first electrode 130 and the second electrode 140 , a dielectric barrier discharge is generated in the sealed space 122 inside the discharge vessel 120 formed of a light-transmitting medium, and a vacuum is emitted. Therefore, vacuum ultraviolet rays can be emitted downward through the gaps of the meshes of the second electrode 140 on the lower flat surface.

The first connecting portion 170 and the second connecting portion 180 are disposed at the same end of the discharge vessel 120 so as to be electrically connected to a socket for providing power. It should be noted that, in addition, the projections of the first connecting portion 170 and the second connecting portion 180 on the X-Y plane, the X-Z plane and the Y-Z plane do not overlap.

The first connection portion 170 is disposed on the first electrode 130 . Furthermore, the first connection portion 170 is preferably in contact with the first electrode 130 . The first connection part 170 has a first surface 170 a not in contact with the first electrode 130 and a third surface 170 b in contact with the first electrode 130 . Specifically, taking the first connection portion 170 as an example of a rectangular parallelepiped having six faces: a front surface, a rear surface, an upper surface, a lower surface, a left side surface and a right side surface, the lower surface of the rectangular parallelepiped is connected to the first electrode 130 When in contact with each other, the front surface, the rear surface, the upper surface, the left side surface, and the right side surface belong to the first surface 170a, and the lower surface belongs to the third surface 170b.

The second connection portion 180 is disposed on the second electrode 140 . Furthermore, the second connection part 180 preferably contacts the second electrode 140 , wherein the second connection part 180 has a second surface 180 a not in contact with the second electrode 140 and a fourth surface 180 a in contact with the second electrode 140 Surface 180b. Specifically, taking the second connection portion 180 as an example of a rectangular parallelepiped having six faces: a front surface, a rear surface, an upper surface, a lower surface, a left side surface and a right side surface, the upper surface of the rectangular parallelepiped and the second electrode 140 When in contact with each other, the front surface, the rear surface, the lower surface, the left surface, and the right surface belong to the second surface 180a, and the upper surface belongs to the fourth surface 180b.

One end of the first lead 150 is electrically connected to the first electrode 130 via the first connecting portion 170 , and the other end is connected to a power source (not shown).

One end of the second lead 160 is electrically connected to the second electrode 140 via the second connecting portion 180 , and the other end is connected to a power source (not shown).

The first non-converted protective film 176 covers the surface of the first connection part 170 . Further, the first non-converted protective film 176 covers the first surface 170 a exposed through the first electrode 130 . Specifically, as shown in FIG. 2 , the first non-converted protective film 176 covers the first surface 170 a of the first connection part 170 other than the third surface 170 b of the first connection part 170 , which is in contact with the first electrode 130 . The first non-converted protective film 176 can prevent the first connection part 170 from being deteriorated due to contact with cleaning liquid, acid gas, and ultraviolet rays, and improve the durability of the excimer lamp.

In another embodiment, the first non-converted protective film 176 is preferably further extended to cover the first core wire exposed portion 150 a of the first lead 150 to be described later. In this way, the first core wire exposed portion 150a of the first lead 150 can be guaranteed to be deteriorated due to contact with cleaning liquid, acid gas, and ultraviolet rays, and the durability of the excimer lamp can be further improved.

The second non-converted protective film 186 covers the surface of the second connection part 180 . Further, the second non-converted protective film 186 covers the second surface 180 a exposed through the second electrode 140 . Specifically, as shown in FIG. 2 , the second non-converted protective film 186 covers the second surface 180 a of the second connection part 180 other than the fourth surface 180 b of the second connection part 180 that is in contact with the second electrode 140 . Thereby, the second connection portion 180 can be prevented from being deteriorated due to contact with cleaning liquid, acid gas, and ultraviolet rays, and the durability of the excimer lamp can be improved.

In another embodiment, the second non-converted protective film 186 is preferably further extended to cover the second core exposed portion 160 a of the second lead 160 to be described later. In this way, the later-described second core wire exposed portion 160a of the second lead 160 can be guaranteed to be deteriorated due to contact with cleaning liquid, acid gas, and ultraviolet rays, and the durability of the excimer lamp can be further improved.

The first non-converted protective film 176 and the second non-converted protective film 186 are formed of the adhesive composition C. The adhesive composition C is a ceramic glue, which includes an adhesive of alumina, silica, metal silicate and water.

In one embodiment, the adhesive composition C includes 1-3 mass % alumina, 63-73 mass % silica, 4-8 mass % metal silicate and 21 mass % % to 29% by mass of water. Metal silicates include molybdenum silicate, lithium silicate, calcium silicate, sodium silicate, potassium silicate, or combinations thereof.

It should be noted that in the case of using the adhesive composition C, as long as it is dried at room temperature, a protective film can be formed on the surface of the solder without conversion steps such as heating, lighting or humidification, so it can be effectively simplified. process, to achieve the effect of improving the durability of the excimer lamp. In addition, the non-converted protective film can ensure the insulation effect of the welding part (solder) and improve the corrosion resistance, and avoid abnormal discharge of the welding part, electrode burning, and excimer lamp damage. In addition, the non-converted protective film formed by the adhesive composition C can further improve the curing effect of the protective film by heating the excimer lamp in the use state without additional heat treatment, thereby improving the insulating effect and Corrosion resistance.

In this article, the so-called "non-converted" means that the adhesive composition will not undergo chemical reaction from a monomer, oligomer or polymer to another monomer, oligomer or polymer during the process of forming the protective film. polymer or polymer steps. Therefore, in the present embodiment, the first non-converted protective film 176 and the second non-converted protective film 186 are formed by volatilizing and drying the moisture in the adhesive composition C, and the conversion step is not performed through additional heat treatment. .

On the contrary, "converted" means that the monomer, oligomer or polymer will be converted into another polymer through chemical reaction in the process of forming the hardened film of the composition. Specifically, specific examples of "converted" include the step of heating polysilazane to form silica; or mixing acrylic monomers, acrylic modified epoxy resins or epoxy resins with hardeners or catalysts Mix hardening step at room temperature. In the process of heating polysilazane to form silica, an additional heating process is required, which complicates the process and consumes energy and time. In addition, acrylic-modified epoxy resin, acrylic-modified epoxy resin, and epoxy resin are not suitable as a protective film on a solder surface because there is a risk of deterioration after being irradiated with ultraviolet rays.

Next, please refer to FIG. 2 and FIG. 3(d) at the same time. It should be noted that, in FIG. 3(d), the partially enlarged schematic diagram of the excimer lamp, in fact, the projections of the first connecting portion 170 and the second connecting portion 180 on the X-Y plane, the X-Z plane and the Y-Z plane do not overlap.

As shown in FIG. 2 and FIG. 3( d ), from the first outer surface S1 of the discharge vessel 120 to the +Y direction, the first electrode 130 , the first connecting portion 170 and the first lead 150 are sequentially formed, and the first non- The converted protective film 176 covers the first surface 170 a of the first connection part 170 and a part of the first lead 150 . Here, the direction indicated by the arrow is the +Y direction, and the direction opposite to the direction indicated by the arrow is the -Y direction.

The first connection portion 170 includes a first solder 172 and a first metal sheet 174 . The first solder 172 and the first metal sheet 174 form a structure stacked on the first electrode 130 . The first solder 172 is located between the first electrode 130 and the first metal sheet 174 , and the first metal sheet 174 is connected to the first electrode 130 via the first solder 172 . The first metal sheet 174 serves as a contact sheet electrically connected to the first electrode 130 .

The first solder 172 is not particularly limited, and is, for example, a solder paste such as a tin alloy.

The material of the first metal sheet 174 may include a nickel sheet, a nickel sheet, a copper sheet, a silver sheet, an aluminum sheet, or other metal sheets with gold formed on the surface. From the viewpoint of corrosion resistance and high temperature resistance, the first metal sheet 174 is preferably a nickel sheet with gold formed on the surface. The nickel sheet with gold formed on the surface is produced by, for example, forming gold on the nickel sheet by sputtering or vapor deposition.

Notably, the first non-converted protective film 176 covers the surface of the first solder 172 . In this way, it can be ensured that the first solder 172 will not be oxidized or softened due to excessive temperature of the soldered portion due to contact with cleaning liquid (ethanol, isopropanol), acid gas, ultraviolet rays or insufficient cooling of the tube body of the excimer lamp 100 . The excimer lamp is damaged, thereby improving the durability of the excimer lamp 100 .

The first lead 150 is electrically connected to the first electrode 130 via the first connection portion 170 . In detail, the first lead 150 is composed of a first core wire exposed portion 150a and a first coating layer 150b covering the periphery of the first core wire. The first coating layer 150b is made of insulating material. The first core wire exposed portion 150a is exposed by the first coating layer 150b from which a part of the core wire is removed. The first core wire exposed portion 150 a of the first lead 150 is connected to the first metal sheet 174 of the first connection portion 170 . The manner in which the first core wire exposed portion 150a of the first lead 150 is connected to the first metal sheet 174 is not particularly limited. on a metal sheet 174 ; or the first core wire exposed portion 150 a is directly welded to the first metal sheet 174 .

Similarly, from the second outer surface S2 of the discharge vessel 120 to the -Y direction, there are the second electrode 140 , the second connection part 180 and the second lead 160 in sequence, and the second non-converted protective film 186 covers the first The second surface 180 a of the two connecting portions 180 and a part of the second lead 160 .

The second connection portion 180 includes a second solder 182 and a second metal sheet 184 . The second solder 182 and the second metal sheet 184 form a structure stacked on the second electrode 140 . The second solder 182 is located between the second electrode 140 and the second metal sheet 184 , and the second metal sheet 184 is connected to the second electrode 140 via the second solder 182 . The second metal sheet 184 serves as a contact sheet electrically connected to the second electrode 140 .

The second solder 182 is not particularly limited, and is, for example, a solder paste such as a tin alloy.

The specific example of the material of the second metal sheet 184 is the same as the specific example of the material of the first metal sheet 174 , and details are not described here. The first metal sheet 174 and the second metal sheet 184 can be made of the same material or different materials.

Notably, the second non-converted protective film 186 covers the surface of the second solder 182 . In this way, it can be ensured that the second solder 182 will not be oxidized or softened due to excessive temperature of the soldered portion due to contact with cleaning liquid (ethanol, isopropanol), acid gas, ultraviolet rays or insufficient cooling of the tube body of the excimer lamp 100 . The excimer lamp is damaged, thereby improving the durability of the excimer lamp 100 .

The second lead 160 is electrically connected to the second electrode 140 through the second connection portion 180 . Specifically, the second lead 160 is composed of a second core wire exposed portion 160a and a second coating layer 160b covering the periphery of the second core wire. The second coating layer 160b is made of insulating material. The second core wire exposed portion 160a is exposed by the second coating layer 160b from which a part of the core wire is removed. The second core wire exposed portion 160 a of the second lead 160 is connected to the second metal sheet 184 of the second connection portion 180 . The manner in which the second core wire exposed portion 160a of the second lead 160 is connected to the second metal sheet 184 is not particularly limited. For example, a loop is formed on the second metal sheet 184, and then the second core wire exposed portion 160a is fastened to the on the two metal sheets 184 ; or the second core wire exposed portion 160 a is directly welded to the second metal sheet 184 .

<Manufacturing method of excimer lamp 100>

FIGS. 3( a ) to 3 ( d ) are schematic diagrams of a manufacturing method of an excimer lamp 100 according to the first embodiment of the present invention. In particular, for the sake of clarity and convenience, the thickness or proportion of each element in Figures 3(a) to 3(d) is appropriately enlarged or reduced, and does not represent the actual thickness or ratio of each layer. Proportion.

Please refer to Figure 3(a). First, a discharge vessel 120 is provided, which has opposing first outer surfaces S1 and second outer surfaces S2. Next, the first electrode 130 and the second electrode 140 are respectively provided on the first outer surface S1 and the second outer surface S2 of the discharge vessel 120 by means of printing, sputtering or vapor deposition. The first electrode 130 and the second electrode 140 are made of corrosion-resistant metals such as gold, silver, copper, nickel, and chromium, for example. In terms of conductivity and durability, the first electrode 130 and the second electrode 140 are preferably gold.

Then, please refer to Figure 3(b). After the bulk of the solder is placed on the first electrode 130 , the bulk of the solder is heated and melted to form the first solder 172 in a molten state. The temperature of heating and melting is related to the melting point of the tin alloy, and specifically, the temperature of heating and melting is about 300°C. Next, the first metal sheet 174 is placed on the first solder 172 on the first electrode 130 to adhere the first metal sheet 174 to the first solder 172 on the first electrode 130 . That is, the first metal sheet 174 is connected to the first electrode 130 via the first solder 172 . In this way, the first connection portion 170 can be disposed on the first electrode 130 . Next, the first core wire exposed portion 150 a of the first lead 150 is disposed on the first metal sheet 174 , so that the first lead 150 is electrically connected to the first electrode 130 through the first connection portion 170 . The manner of disposing the first core wire exposed portion 150a of the first lead 150 on the first metal sheet 174 is not particularly limited. on the first metal sheet 174 ; or the first core wire exposed portion 150 a is directly welded to the first metal sheet 174 .

In addition, the method of disposing the second connecting portion 180 on the second electrode 140 and the method of disposing the second lead 160 on the second connecting portion 180 are respectively the method of disposing the first connecting portion 170 on the first electrode 130 and the method of disposing the first connecting portion 170 on the first electrode 130. The method of disposing the first lead 150 on a connecting portion 170 is the same, and will not be described here.

Next, please refer to FIG. 3( c ) and FIG. 3( d ) at the same time. The adhesive composition C is coated on the first surface 170a of the first connection part 170 exposed through the first electrode 130 and on the second surface 180a of the second connection part 180 exposed through the second electrode 140, and the adhesive composition C is stored at room temperature. Drying is carried out at low temperature, thereby forming a first non-converted protective film 176 and a second non-converted protective film 186 on the first surface 170a and the second surface 180a, respectively. The composition of the adhesive composition C is as described above and will not be repeated here.

In conclusion, the present invention provides an excimer lamp with good durability and a manufacturing method of the excimer lamp with a simple process. Specifically, the excimer lamp of the present invention forms a non-converted protective film on the solder, the non-converted protective film can protect the solder and prevent the solder from contacting the cleaning solution, acid gas, ultraviolet rays or the excimer lamp itself. When the cooling is insufficient, the welding part will be oxidized or softened due to excessive temperature, which will cause damage to the excimer lamp, thereby effectively improving the durability of the excimer lamp. In addition, the method for forming the non-converted protective film does not require conversion steps such as heating, so the manufacturing process of the excimer lamp can be greatly simplified, and the production efficiency can be effectively improved.

Although the present invention has been disclosed above with examples, it is not intended to limit the present invention. Any person skilled in the art can make some changes and modifications without departing from the spirit and scope of the present invention. Therefore, the present invention The scope of protection shall be subject to what is defined in the claims.

Claims (10)

1. An excimer lamp comprising:

a discharge vessel formed of a light transmitting medium, the discharge vessel having a sealed space inside thereof, the sealed space containing a gas for discharge, the discharge vessel having first and second opposing outer surfaces;

a pair of electrodes disposed on the first outer surface and the second outer surface of the discharge vessel, respectively;

a pair of connection portions respectively provided on the pair of electrodes, and each of the pair of connection portions includes solder;

a pair of leads electrically connected to the pair of electrodes through the pair of connection portions, respectively;

a pair of non-converted protective films respectively covering surfaces of the pair of connection parts.

2. The excimer lamp of claim 1, wherein the pair of non-converted protective films are formed from an adhesive composition comprising alumina, silica, metal silicate and water.

3. The excimer lamp of claim 2, wherein the adhesive composition comprises 1 to 3 mass% of alumina, 63 to 73 mass% of silica, 4 to 8 mass% of metal silicate, and 21 to 29 mass% of water.

4. The excimer lamp of claim 1, wherein the pair of connection portions each further comprises a metal sheet connected to the corresponding electrode via the solder.

5. The excimer lamp of claim 4, wherein the metal sheet is a nickel sheet with gold formed on the surface.

6. A method of manufacturing an excimer lamp, comprising:

providing a discharge vessel, wherein the discharge vessel is formed of a light-transmitting medium and a sealed space is present inside the discharge vessel, wherein a gas for discharge is present in the sealed space, and wherein the discharge vessel has a first outer surface and a second outer surface which are opposite to each other;

providing a pair of electrodes on the first and second outer surfaces of the discharge vessel, respectively;

a pair of connection portions are provided on the pair of electrodes, respectively, and each of the pair of connection portions includes solder;

a pair of leads are respectively arranged on the pair of connecting parts, so that the pair of leads are respectively and electrically connected to the pair of electrodes through the pair of connecting parts;

a pair of non-converted protective films are formed on surfaces of the pair of connection portions, respectively.

7. The method of claim 6, wherein the step of forming the pair of non-converted protective films comprises applying an adhesive composition to surfaces of the pair of connection portions and drying the adhesive composition.

8. The method of claim 6, wherein the non-converted protective films are respectively formed of an adhesive composition comprising alumina, silica, metal silicate and water.

9. The method of manufacturing an excimer lamp according to claim 7 or 8, wherein the adhesive composition comprises 1 to 3 mass% of alumina, 63 to 73 mass% of silica, 4 to 8 mass% of a metal silicate, and 21 to 29 mass% of water.

10. The method of manufacturing an excimer lamp according to claim 6, wherein each of the pair of connection portions further comprises a metal sheet connected to the corresponding electrode via the solder.

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