CN111450566A - Sublimation furnace and method of using the same - Google Patents

Abstract

The invention relates to a sublimation furnace and a method for using the same. The sublimation furnace comprises: a plurality of vacuum chambers for placing a plurality of materials; a waiting area is arranged on one side of the sublimation furnace, and the waiting area is used for placing a plurality of materials In multiple vacuum chambers, multiple materials are stored in a vacuum state; the heating area is connected to the waiting area, and there is a heating module in the heating area, which is used to heat multiple materials; the cooling area is connected with the heating area, The cooling area is used for cooling a plurality of materials; a plurality of first lifting support frames, one end of which is correspondingly connected with the plurality of vacuum chambers, and the plurality of first lifting support frames are used to drive the plurality of vacuum chambers to rise and fall; and a mobile device, which is connected with the plurality of vacuum chambers. The other ends of the plurality of first lifting supports are connected, and the mobile device is connected to the plurality of vacuum chambers through the plurality of first lifting supports. The invention realizes that a sublimation furnace can simultaneously perform feeding, heating, sublimation and cooling actions, thereby reducing the waiting time of the operator during actual production and increasing the production efficiency.

Description

Sublimation furnace and method of using the same

technical field

The invention relates to a sublimation furnace, in particular to a sublimation furnace for continuously heating, sublimating and cooling a plurality of materials and a method of using the same.

Background technique

The sublimation furnaces in the prior art can usually only perform the actions of feeding, vacuuming, heating, subliming, cooling, collecting and cleaning a single furnace tube in sequence, and the operator can only perform the next action after the completion of the previous action. , Because the furnace tube takes more time in vacuuming, heating and cooling, accounting for 10-30% of the entire sublimation material time.

Therefore, the operator spends most of the time waiting for the vacuuming, heating and cooling of the furnace tube, which wastes a lot of production time, resulting in low production efficiency.

SUMMARY OF THE INVENTION

The technical problem to be solved by the present invention is to provide a sublimation furnace and a method of using the same to solve the above-mentioned technical problems. The specific technical scheme is as follows: a sublimation furnace for continuously heating, sublimating and cooling a plurality of materials, The sublimation furnace includes: a plurality of vacuum chambers for placing a plurality of materials; a waiting area, which is arranged on one side of the sublimation furnace, and the waiting area is used to place a plurality of materials in a plurality of vacuum chambers, and store many materials in a vacuum state. The heating area is connected with the waiting area. There is a heating module in the heating area, and the heating module is used to heat multiple materials; the cooling area is connected with the heating area, and the cooling area is used for cooling multiple materials; One end of the first lifting support frame is correspondingly connected with the plurality of vacuum chambers, and the plurality of first lifting support frames are used to drive the plurality of vacuum chambers to rise and fall; and a moving device is connected with the other ends of the plurality of first lifting support frames, The mobile device is connected with the plurality of vacuum chambers through the plurality of first lifting supports, and the mobile device drives the plurality of vacuum chambers to move from the waiting area to the heating area and from the heating area to the cooling area through the plurality of first lifting supports.

Wherein, after placing one of the multiple materials in one of the vacuum chambers, one of the vacuum chambers is moved to the heating module in the heating zone through the moving device and the first lifting support frame, and the heating module heats one materials, and place another material among the multiple materials in the other vacuum chamber in the waiting area; when one material heats up and sublimates, one vacuum chamber is driven by the moving device and the first lifting support frame to move to the cooling chamber The other vacuum chamber is moved from the waiting area to the heating module in the heating area through the moving device and the first lifting support frame, and the heating module heats another material.

In a possible design, the sublimation furnace further includes: a vacuuming device connected to the plurality of vacuum chambers, and the vacuuming device is used to vacuumize the plurality of vacuum chambers; and a plurality of vacuum valves, corresponding to the plurality of vacuum chambers Between the vacuum chamber and the vacuuming device, a plurality of vacuum valves are used to respectively control the vacuuming of the plurality of vacuum chambers.

In a possible design, multiple vacuum hoses are also included, the vacuuming device is connected to multiple vacuum chambers through multiple vacuum hoses, and multiple vacuum valves are correspondingly arranged on multiple vacuum hoses.

In a possible design, a manipulator is also included, which is arranged in the waiting area, and the manipulator is used for placing a plurality of materials in a plurality of vacuum chambers.

In one possible design, the heating module is a tubular heating furnace.

In a possible design, the tubular heating furnace includes: a plurality of second lifting support frames, one end of which is fixed on the table or the ground; a fixed furnace cover, which is connected with the other ends of the plurality of second lifting support frames, and fixes the furnace cover Driven up and down by a plurality of second lifting support frames; the side-turning furnace cover is arranged above the fixed furnace cover and connected with one end of the fixed furnace cover, and the side-turning furnace cover can be turned over around the connection between the side-turning furnace cover and the fixed furnace cover ; and electric heating wire, which is arranged in the fixed furnace cover and the side-turning furnace cover, and the electric heating wire is used to heat the vacuum cavity.

In a possible design, the moving device is a slide rail, the plurality of first lifting support frames are connected to the sliders on the slide rail, and the plurality of first lift support frames are driven by the sliders to move along the slide rail.

In a possible design, the first lift support frame includes a support portion and a lift portion connected to the support portion, the support portion is used to support the vacuum chamber, and the lift portion drives the vacuum chamber to rise and fall through the support portion.

In a possible design, it also includes a fan, which is arranged in the cooling area, and the fan is used to accelerate the cooling of the material.

A method of using a sublimation furnace, wherein the using method of the sublimation furnace comprises the following steps:

(a) providing a sublimation furnace as described above;

(b) placing one of the plurality of materials in one of the vacuum chambers in the waiting area;

(c) moving a vacuum chamber into the heating zone through a moving device, and placing a vacuum chamber on the heating module through the first lifting support frame;

(d) starting the heating module, heating one material, and at the same time, placing another material among the plurality of materials in the other vacuum chamber in the waiting area;

(e) When a material is heated up and sublimated, the heating module is turned off, a vacuum chamber is moved out of the heating module through the first lifting support frame, and a vacuum chamber is moved into the cooling zone by the moving device for cooling, and at the same time , the other vacuum chamber moves the other vacuum chamber into the heating area through the moving device, and places the other vacuum chamber on the heating module through the first lifting support frame; and

(f) Steps (d) and (e) are repeated until the heating, sublimation and cooling of a plurality of materials are completed.

In one possible design, the material is placed in the vacuum chamber by manual or robotic hands.

In a possible design, the step of placing the vacuum chamber on the heating module through the first lifting support frame includes: the first lifting support frame drives the vacuum chamber to rise; the moving device moves the vacuum chamber to the heating module. above the heating module; and the first lifting support frame drives the vacuum chamber to descend, so that the vacuum chamber is placed on the heating module.

In a possible design, the material and the vacuum chamber are cooled by air cooling or by fan blowing in the cooling zone.

Compared with the prior art, the present invention has the following advantages:

In the present invention, a plurality of vacuum chambers are sequentially moved from the waiting area to the heating area and the cooling area through a moving device and a plurality of first lifting supports, so as to realize that the plurality of vacuum chambers place materials in the waiting area, and heat up and sublime in the heating area. The material is cooled in the cooling area, and the waiting area, heating area and cooling area can be operated at the same time, so that a sublimation furnace can perform feeding, heating, sublimation and cooling at the same time, reducing the waiting time of the operator during actual production, Increase production efficiency.

Description of drawings

The present invention will be further described by using the accompanying drawings, but the content in the accompanying drawings does not constitute any limitation to the present invention.

FIG. 1 is a schematic top view of a sublimation furnace according to a first embodiment of the present invention.

FIG. 2 is a schematic side view of the sublimation furnace according to the first embodiment of the present invention.

FIG. 3 is a schematic structural diagram of the heating module heating the vacuum chamber according to the first embodiment of the present invention.

FIG. 4 is a schematic flowchart of a method of using the sublimation furnace according to the second embodiment of the present invention.

Detailed ways

The terms "first", "second", etc. used in this document do not mean the order or order, nor are they used to limit the present application, but are only used to distinguish components or operations described in the same technical terms. .

The first embodiment of the present invention discloses a sublimation furnace 1, please refer to FIGS. 1-3, for continuously heating, sublimating and cooling a plurality of materials, the sublimation furnace 1 includes a plurality of vacuum chambers 2 , a waiting area 3, a heating area 4, a cooling area 5, a plurality of first lifting supports 6 and a mobile device 7, wherein:

Please refer to FIGS. 1-3 , a plurality of vacuum chambers 2 are used for placing a plurality of materials, preferably, one vacuum chamber 2 is used for placing one material, but it is not limited thereto. The multiple materials in the present invention can be one material or multiple materials. The vacuum chamber 2 is mainly used to heat up and sublime the materials in a vacuum state. In the present invention, the selection of the vacuum chamber 2 may not be particularly special. If required, refer to the routine selection of those skilled in the art.

Please refer to FIGS. 1 and 2. The waiting area 3 is set on one side of the sublimation furnace 1. There is no special requirement for the selection of the waiting area 3 in the present invention. Those skilled in the art can choose the vacuum chamber according to the actual production requirements. The position of filling material in 2 may be the waiting area 3 , and the waiting area 3 disclosed in this embodiment is set on one side of the table 8 . The waiting area 3 is used to place multiple materials in multiple vacuum chambers 2, so that multiple materials are stored in a vacuum state. Not shown in the figure), the material is placed in the vacuum chamber 2, but it is not limited to this, and those skilled in the art can also choose other suitable placement methods according to actual production requirements.

Referring to FIGS. 1 and 2 , the heating area 4 is connected to the waiting area 3 . The heating area 4 disclosed in this embodiment is set at the middle position of the table 8 , but it is not limited thereto. A heating module 41 is provided in the heating zone 4, and the heating module 41 is used to heat a plurality of materials. The heating module 41 disclosed in this embodiment is a tubular heating furnace, but it is not limited to this. Those skilled in the art can Select other suitable heating modules 41 according to actual sublimation requirements.

In a preferred embodiment, please refer to FIG. 3 , the tubular heating furnace includes a plurality of second lifting supports 411 , a fixed furnace cover 412 , a side-turning furnace cover 413 and electric heating wires, and a plurality of second lifting supports. One end of the frame 411 is fixed on the table 8 or the ground, and the fixed furnace cover 412 is connected with the other ends of the plurality of second lifting supports 411 . Preferably, the plurality of second lifting supports 411 are located below the fixed furnace cover 412 and are set on both sides of the fixed furnace cover 412 to ensure the stability of the fixed furnace cover 412 , but not limited thereto. The fixed furnace cover 412 is moved up and down by the plurality of second lifting support frames 411. When the second lifting support frame 411 drives the fixed furnace cover 412 to descend, it is equivalent to reducing the height of the vacuum chamber 2 driven by the first lifting support frame 6 to rise. Further, the height of the sublimation furnace 1 can be reduced. The side-turning furnace cover 413 is arranged above the fixed furnace cover 412 and is connected with one end of the fixed furnace cover 412. The overturned, side-turned furnace cover 413 and the fixed furnace cover 412 may be connected by hinges or rotating shafts, but not limited thereto. The electric heating wire is arranged in the fixed furnace cover 412 and the side-turning furnace cover 413 (not shown in the figure), and the electric heating wire is used to heat the vacuum chamber 2, thereby heating the material to heat up and sublime the material.

Please refer to FIGS. 1 and 2 , the cooling zone 5 is connected to the heating zone 4. There is no special requirement for the selection of the cooling zone 5 in the present invention. Those skilled in the art can select the vacuum chamber 2 and the material cooling according to the actual production requirements. The location of the cooling zone 5 is enough. The waiting zone 3 disclosed in this embodiment is set on the other side of the table 8. The cooling zone 5 is used for cooling multiple materials. (not shown) blowing air to the vacuum chamber 2 for cooling, but not limited to this, and those skilled in the art can also select other suitable cooling methods according to the teachings of the present invention.

Referring to FIGS. 1 and 2 , one end of the plurality of first lifting supports 6 is correspondingly connected to the plurality of vacuum chambers 2 . The corresponding connection method referred to in this embodiment is that two first lifting supports 6 are arranged on one It is not limited to the two sides of the lower end of the vacuum chamber 2, and those skilled in the art can also choose other appropriate corresponding connection methods. The plurality of first lifting support frames 6 are used to drive the plurality of vacuum chambers 2 to rise and fall. The first lifting support frame 6 disclosed in this embodiment includes a support portion 61 and a lift portion 62 connected to the support portion. The support portion 61 is used for supporting In the vacuum chamber 2 , the lifting portion 62 drives the vacuum chamber 2 to lift and lower through the support portion 61 . The lift portion 62 further disclosed in this embodiment is a lift cylinder. The support portion 61 includes an arc-shaped support rod 611 and a vertical support rod 612 disposed at the lower end of the arc-shaped support rod 611. The vacuum chamber 2 is disposed on the arc-shaped support rod 611. The lift cylinder is arranged on the vertical support rod 612. However, the structures of the support portion 61 and the lift portion 62 are not limited to this. Those skilled in the art can also select other suitable structures as the support portion 61 and the lift portion according to the teachings of the present invention. Section 62.

Referring to FIGS. 1-3 , the mobile device 7 is connected to the other ends of the plurality of first lifting supports 6 . The mobile device 7 disclosed in this embodiment is a sliding rail, and the plurality of first lifting supporting frames 6 are connected to the sliding rails. A plurality of first lifting supports 6 are driven by the sliders to move along the slide rails. However, the moving device 7 is not limited to this, and those skilled in the art can also select other suitable moving devices 7 according to actual production requirements. . The moving device 7 drives the plurality of vacuum chambers 2 to move from the waiting area 3 to the heating area 4 and from the heating area 4 to the cooling area 5 through the plurality of first lifting supports 6. The slide rails disclosed in this embodiment pass through the waiting area in turn. Zone 3, heating zone 4 and cooling zone 5, but not limited thereto.

Please refer to FIGS. 1 and 2 , after placing one of the multiple materials in one of the vacuum chambers 2 , one of the vacuum chambers 2 is moved to the heating area by the moving device 7 and the first lifting support frame 6 On the heating module 41 in 4, the heating module 41 heats one material, and in the waiting area 3, another material among the plurality of materials is placed in the other one of the vacuum chambers 2.

When one material is heated up and sublimated, one vacuum chamber 2 is moved to the cooling zone 5 by the moving device 7 and the first lifting support frame 6 , and the other vacuum chamber 2 is moved by the moving device 7 and the first lifting support frame 6 to the waiting area 5 . The zone 3 is moved to the heating module 41 in the heating zone 4, and the heating module 41 heats another material, and reciprocates in the above-mentioned manner, so as to realize the movement of the plurality of vacuum chambers 2 from the waiting zone 3 to the heating zone 4 and cooling. Zone 5, and then realize that multiple vacuum chambers 2 place materials in waiting zone 3, heat up and sublime materials in heating zone 4, and cool materials in cooling zone 5, and wait zone 3, heating zone 4 and cooling zone 5 can be performed at the same time. Operation, realizes that one sublimation furnace 1 performs feeding, heating, sublimation and cooling actions at the same time, reducing the waiting time of the operator during actual production, and increasing the production efficiency.

In a preferred embodiment, please refer to FIGS. 2 and 3 , the sublimation furnace 1 further includes a vacuum pumping device 9 and a plurality of vacuum valves 10 . The vacuum pumping device 9 is connected with the multiple vacuum chambers 2 , and the vacuum pumping device 9 is used For evacuating the plurality of vacuum chambers 2 , a plurality of vacuum valves 10 are correspondingly disposed between the plurality of vacuum chambers 2 and the vacuuming device 9 , and the plurality of vacuum valves 10 are used to control the pumping of the plurality of vacuum chambers 2 respectively. For vacuum, in the present invention, there may be no special requirements for the selection of the vacuuming device 9 and the vacuum valve 10, and it is sufficient to refer to the conventional selection of those skilled in the art. The sublimation furnace 1 further disclosed in this embodiment further includes a plurality of vacuum hoses 11 , the vacuuming device 9 is connected to the plurality of vacuum chambers 2 through the plurality of vacuum hoses 11 , and the plurality of vacuum valves 10 are correspondingly arranged in the plurality of vacuum hoses 11 . On the tube 11, but not limited thereto.

Correspondingly, the second embodiment of the present invention discloses a method 12 of using the sublimation furnace 1 , please refer to FIG. 4 and FIGS. 1-3 , wherein the method 12 of using the sublimation furnace 1 includes the following steps 121 to 126 .

Step 121: Provide the sublimation furnace 1 as disclosed in the first embodiment;

Step 122: Place one of the multiple materials in one of the vacuum chambers 2 in the waiting area 3;

Step 123: Move a vacuum chamber 2 into the heating zone 4 by the moving device 7, and place a vacuum chamber 2 on the heating module 41 by the first lifting support frame 6;

Step 124: Activate the heating module 41 to heat one material, so that the temperature of one material is sublimated, and at the same time, in the waiting area 3, another material among the plurality of materials is placed in the other vacuum chamber 2;

Step 125 : When a material is heated and sublimated, the heating module 41 is turned off, a vacuum chamber 2 is moved out of the heating module 41 through the first lifting support frame 6 , and a vacuum chamber 2 is moved to the cooling zone by the moving device 7 5, cooling is performed, and at the same time, another vacuum chamber 2 is moved into the heating zone 4 by the moving device 7, and the other vacuum chamber 2 is placed in the heating zone by the first lifting support frame 6. on module 41;

Step 126 : Repeat steps 124 and 125 until the heating, sublimation and cooling of multiple materials are completed.

Specifically, a plurality of materials in the above steps (that is, one material and another material described above) are placed in a plurality of vacuum chambers 2 (that is, one vacuum chamber 2 and another vacuum chamber described above) 2) The method can be manually placed or placed by a manipulator, and when the material is placed in the vacuum chamber 2, the vacuum chamber 2 is evacuated by the vacuum device 9.

At the same time, in the above steps, the plurality of vacuum chambers 2 (that is, the above-mentioned one vacuum chamber 2 and another vacuum chamber 2 ) are sequentially placed in the heating mold through the first lifting support frame 6 . The steps on the group 41 include: the first lifting support frame 6 drives the vacuum chamber 2 to rise, the moving device 7 moves the vacuum chamber 2 above the heating module 41 , and the first lifting support frame 6 drives the vacuum chamber 2 to descend, so that The vacuum chamber 2 is placed on the heating module 41 .

Furthermore, when the moving device 7 drives the vacuum chamber 2 to move above the heating module 41 , the second lifting support frame 411 drives the heating module 41 to descend, so as to reduce the rising height of the vacuum chamber 2 .

The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the scope of rights of the present invention; at the same time, the above descriptions should be understood and implemented by those skilled in the relevant technical fields, so others do not depart from those disclosed in the present invention. Equivalent changes or modifications completed under the spirit of the application should be included in the scope of the patent application.

Claims (13)

1. A sublimation furnace for continuously heating, sublimating and cooling a plurality of materials, characterized in that the sublimation furnace comprises:

a plurality of vacuum chambers for holding the plurality of materials;

the waiting area is arranged on one side of the sublimation furnace and used for placing the materials in the vacuum cavities and storing the materials in a vacuum state;

the heating area is connected with the waiting area, a heating module is arranged in the heating area, and the heating module is used for heating the plurality of materials;

a cooling zone in communication with the heating zone, the cooling zone for cooling the plurality of materials;

one end of each first lifting support frame is correspondingly connected with the corresponding vacuum cavity, and the first lifting support frames are used for driving the vacuum cavities to lift; and

the moving device is connected with the other ends of the first lifting support frames, the moving device is connected with the vacuum cavities through the first lifting support frames, and the moving device drives the vacuum cavities to move from the waiting area to the heating area and from the heating area to the cooling area through the first lifting support frames;

wherein, after one of the plurality of materials is placed in the one of the vacuum cavities, the one of the vacuum cavities is moved to the heating module in the heating zone by the moving device and the first lifting support frame, the heating module heats the one material, and another one of the plurality of materials is placed in the another one of the vacuum cavities in the waiting zone; after the material is heated and sublimated, one vacuum cavity body is driven by the moving device and the first lifting support frame to move to the cooling area, the other vacuum cavity body is driven by the waiting area to move to the heating module in the heating area through the moving device and the first lifting support frame, and the heating module heats the other material.

2. Sublimation furnace according to claim 1, further comprising:

the vacuumizing device is connected with the plurality of vacuum cavities and is used for vacuumizing the plurality of vacuum cavities; and

and the plurality of vacuum valves are correspondingly arranged between the plurality of vacuum cavities and the vacuumizing device and are used for respectively controlling the vacuumizing of the plurality of vacuum cavities.

3. The sublimation furnace of claim 2, further comprising a plurality of vacuum hoses, wherein the vacuum pumping device is connected to the plurality of vacuum cavities through the plurality of vacuum hoses, and the plurality of vacuum valves are correspondingly disposed on the plurality of vacuum hoses.

4. The sublimation furnace of claim 1, further comprising a robot disposed within the waiting area, the robot being configured to place the plurality of materials within the plurality of vacuum chambers.

5. Sublimation furnace according to claim 1, wherein the heating module is a tube furnace.

6. Sublimation furnace according to claim 5, wherein the tube furnace comprises:

one end of each second lifting support frame is fixed on the table top or the ground;

the fixed furnace cover is connected with the other ends of the second lifting support frames and is driven by the second lifting support frames to lift;

the side-turning furnace cover is arranged above the fixed furnace cover and is connected with one end of the fixed furnace cover, and the side-turning furnace cover can turn around the connection part of the side-turning furnace cover and the fixed furnace cover; and

and the electric heating wire is arranged in the fixed furnace cover and the side-turning furnace cover and is used for heating the vacuum cavity.

7. The sublimation furnace of claim 1, wherein the moving device is a slide rail, the first lifting support frames are connected with slide blocks on the slide rail, and the first lifting support frames are driven by the slide blocks to move along the slide rail.

8. The sublimation furnace of claim 1, wherein the first lifting support frame comprises a support part and a lifting part connected with the support part, the support part is used for supporting the vacuum chamber, and the lifting part drives the vacuum chamber to lift through the support part.

9. Sublimation furnace according to claim 1, further comprising a fan arranged in the cooling zone for accelerating the cooling of the material.

10. The use method of the sublimation furnace is characterized by comprising the following steps:

(a) providing a sublimation oven as claimed in any one of claims 1-9;

(b) placing one of the plurality of materials within the one of the vacuum cavities within the waiting area;

(c) moving the vacuum cavity into the heating area through the moving device, and placing the vacuum cavity on the heating module through the first lifting support frame;

(d) starting the heating module to heat the material, and meanwhile, placing another material in the plurality of materials in another vacuum cavity in the waiting area;

(e) when the material is heated and sublimated, the heating module is closed, the vacuum cavity is moved out of the heating module through the first lifting support frame, the vacuum cavity is moved into the cooling area through the moving device for cooling, meanwhile, the other vacuum cavity is moved into the heating area through the moving device, and the other vacuum cavity is placed on the heating module through the first lifting support frame; and

(f) and (e) repeating the step (d) and the step (e) until the temperature rise, sublimation and temperature reduction of the materials are completed.

11. Use of the sublimation furnace according to claim 10, wherein the material is placed inside the vacuum chamber manually or by a robot.

12. The method of using the sublimation furnace of claim 10, wherein the step of placing the vacuum chamber on the heating module by the first lift support frame comprises:

the first lifting support frame drives the vacuum cavity to ascend;

the moving device moves the vacuum cavity to the position above the heating module; and

the first lifting support frame drives the vacuum cavity to descend, so that the vacuum cavity is placed on the heating module.

13. Method for using a sublimation furnace according to claim 10, wherein the material and the vacuum chamber are cooled in the cooling zone by air cooling or by fan blowing.

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