CN111400867A - Simulation analysis-based microwave solid-discharge reliability design method - Google Patents
Simulation analysis-based microwave solid-discharge reliability design method Download PDFInfo
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Abstract
Description
技术领域technical field
本发明属于微波技术领域,具体涉及一种基于仿真分析的微波固放可靠性设计方法。The invention belongs to the technical field of microwaves, and in particular relates to a method for designing reliability of microwave solid placement based on simulation analysis.
背景技术Background technique
高介电常数基板可以显著缩小电路外形尺寸,且满足高密度排布线条的需求。为满足微波固放的高密度、高集成的应用需求,可以采用高介电常数的介质基板来缩小微波固放的电路体积和重量,并在高介电常数的介质基板上使用复合导电膜来解决微波固放的功率负载问题。High dielectric constant substrates can significantly reduce the size of the circuit and meet the needs of high-density wiring. In order to meet the application requirements of high density and high integration for microwave placement, a high dielectric constant dielectric substrate can be used to reduce the volume and weight of microwave placement circuits, and a composite conductive film can be used on the high dielectric constant dielectric substrate. Solve the power load problem of microwave stationary amplifier.
由于复合导电膜在通电后会产生焦耳热,这种焦耳热会对复合导电膜和介质基板造成损伤,从而给微波固放的可靠性埋下了隐患。因此,相关技术中,为了提高微波固放的可靠性,通常采用优化微波固放的电路布局的方式,来减小复合导电膜上所承受的电流。Since the composite conductive film will generate Joule heat after being energized, this Joule heat will damage the composite conductive film and the dielectric substrate, thereby burying a hidden danger for the reliability of microwave placement. Therefore, in the related art, in order to improve the reliability of the microwave placement, the circuit layout of the microwave placement is usually optimized to reduce the current on the composite conductive film.
然而,在功率需求不变的情况下,优化电路布局对于微波固放的可靠性的提升空间有限,因此,如何进一步提高所设计的微波固放的可靠性,是一个亟待解决的技术问题。However, under the condition that the power demand remains unchanged, there is limited room for improving the reliability of the microwave stationary amplifier by optimizing the circuit layout. Therefore, how to further improve the reliability of the designed microwave stationary amplifier is a technical problem that needs to be solved urgently.
发明内容SUMMARY OF THE INVENTION
为了解决现有技术中存在的上述问题,本发明实施例提供了一种基于仿真分析的微波固放可靠性设计方法。In order to solve the above problems existing in the prior art, an embodiment of the present invention provides a method for designing reliability of microwave stationary placement based on simulation analysis.
本发明要解决的技术问题通过以下技术方案实现:The technical problem to be solved by the present invention is realized by the following technical solutions:
一种基于仿真分析的微波固放可靠性设计方法,包括:A reliability design method for microwave solid-state placement based on simulation analysis, comprising:
根据微波固放的介质基板的结构参数,以及所述介质基板上的复合导电膜的结构参数,对所述介质基板和所述复合导电膜进行三维几何建模,得到建模模型;其中,所述介质基板的结构参数中的厚度为预设的初始厚度;According to the structural parameters of the dielectric substrate placed by the microwave and the structural parameters of the composite conductive film on the dielectric substrate, three-dimensional geometric modeling is performed on the dielectric substrate and the composite conductive film to obtain a modeling model; The thickness in the structural parameters of the dielectric substrate is a preset initial thickness;
在所述建模模型上加载多种仿真条件进行多种物理场的仿真,得到每种仿真条件下的仿真结果;其中,所述多种仿真条件为对多种仿真因素各自的可选项进行组合得到的;所述多种仿真因素包括:所述微波固放的可选热沉条件、所述介质基板的可选材质类型、所述介质基板的可选厚度、所述复合导电膜的可选铜层厚度以及所述复合导电膜的可选镍层厚度;Load multiple simulation conditions on the modeling model to simulate multiple physical fields, and obtain simulation results under each simulation condition; wherein, the multiple simulation conditions are combinations of the respective options of multiple simulation factors obtained; the various simulation factors include: optional heat sink conditions for the microwave placement, optional material type of the dielectric substrate, optional thickness of the dielectric substrate, optional composite conductive film Copper layer thickness and optional nickel layer thickness of the composite conductive film;
根据所得到的各个仿真结果,确定微波固放的可靠性设计方案。According to the obtained simulation results, the reliability design scheme of microwave placement is determined.
在本发明的一个实施例中,所述根据所得到的各个仿真结果,确定微波固放的可靠性设计方案,包括:In an embodiment of the present invention, determining the reliability design scheme of the microwave stationary placement according to the obtained simulation results, including:
确定所得到的各个仿真结果中,建模模型所承受综合应力最小的一个仿真结果对应的仿真条件;所述综合应力为:所述多种物理场下综合的应力;Determine the simulation condition corresponding to the simulation result with the smallest comprehensive stress on the modeling model among the obtained simulation results; the comprehensive stress is: the comprehensive stress under the multiple physical fields;
将所确定的仿真条件中,各仿真因素的已选项作为微波固放的可靠性设计方案。In the determined simulation conditions, the selected simulation factors are taken as the reliability design scheme of microwave placement.
在本发明的一个实施例中,在将所确定的仿真条件中,各仿真因素的已选项作为微波固放的可靠性设计方案之后,所述方法还包括:In an embodiment of the present invention, after using the determined simulation conditions and selected simulation factors as a reliability design solution for microwave placement, the method further includes:
在所述建模模型上加载所确定的仿真条件,并对所述建模模型在预设的电流范围内进行电流扫描;Loading the determined simulation conditions on the modeling model, and performing a current sweep on the modeling model within a preset current range;
根据电流扫描的结果,确定在所述可靠性设计方案中,微波固放的过电流能力。According to the result of the current scan, the overcurrent capability of the microwave discharge in the reliability design scheme is determined.
在本发明的一个实施例中,所述多种物理场包括:热场;In one embodiment of the present invention, the plurality of physical fields include: a thermal field;
所述根据电流扫描的结果,确定在所述可靠性设计方案中,微波固放的过电流能力,包括:According to the result of the current scan, the overcurrent capability of the microwave stationary discharge in the reliability design scheme is determined, including:
将所述电流扫描的结果中,所述建模模型所承受的热场应力达到120℃±5℃时的电流作为所述可靠性设计方案中,微波固放所能承受的最大过电流。In the results of the current scan, the current when the thermal field stress that the modeling model is subjected to reaches 120°C ± 5°C is taken as the maximum overcurrent that the microwave placement can withstand in the reliability design scheme.
在本发明的一个实施例中,所述方法还包括:根据电流扫描的结果,利用数值拟合的方法,拟合所述可靠性设计方案中,微波固放的过电流能力的预测公式。In an embodiment of the present invention, the method further includes: using a numerical fitting method to fit a prediction formula of the overcurrent capability of the microwave discharge in the reliability design scheme according to the result of the current scan.
在本发明的一个实施例中,所述复合导电膜的厚度为10μm,且所述复合导电膜的镍层厚度固定时,所述复合导电膜的可选铜层厚度为[1μm,2μm]内的、间隔为0.1μm的所有厚度;In an embodiment of the present invention, the thickness of the composite conductive film is 10 μm, and when the thickness of the nickel layer of the composite conductive film is fixed, the optional thickness of the copper layer of the composite conductive film is within [1 μm, 2 μm] , all thicknesses separated by 0.1 μm;
所述复合导电膜的厚度为10μm,且所述复合导电膜的铜层厚度固定时,所述复合导电膜的可选镍层厚度为[1μm,2μm]内的、间隔为0.1μm的所有厚度。When the thickness of the composite conductive film is 10 μm, and the thickness of the copper layer of the composite conductive film is fixed, the optional nickel layer thickness of the composite conductive film is all thicknesses within [1 μm, 2 μm] with an interval of 0.1 μm .
在本发明的一个实施例中,所述微波固放的可选热沉条件包括:纯空气条件散热、基板底面附金散热以及理想热沉散热。In an embodiment of the present invention, the optional heat sink conditions for the microwave placement include: heat dissipation under pure air conditions, heat dissipation with gold attached to the bottom surface of the substrate, and heat dissipation by an ideal heat sink.
在本发明的一个实施例中,所述介质基板的可选材质类型包括:SF210K和TD36。In an embodiment of the present invention, optional material types of the dielectric substrate include: SF210K and TD36.
在本发明的一个实施例中,任一种材质类型的介质基板的可选厚度包括:0.254mm、0.381mm以及0.635mm。In an embodiment of the present invention, the optional thickness of the dielectric substrate of any material type includes: 0.254 mm, 0.381 mm, and 0.635 mm.
本发明实施例提供的基于仿真分析的微波固放可靠性设计方法中,根据微波固放的介质基板的结构参数,以及介质基板上的复合导电膜的结构参数,对介质基板和复合导电膜进行三维几何建模,得到建模模型;然后,在该建模模型上加载预先组合得到的多种仿真条件进行多种物理场的仿真,得到每种仿真条件下的仿真结果;由于多种仿真因素包括电路布局以外的、影响微波固放可靠性的各种因素,故根据所得到的各个仿真结果,确定微波固放的可靠性设计方案并依此方案设计微波固放时,可以提高所设计的微波固放的可靠性。In the microwave placement reliability design method based on simulation analysis provided by the embodiment of the present invention, according to the structural parameters of the dielectric substrate for microwave placement and the structural parameters of the composite conductive film on the dielectric substrate, the dielectric substrate and the composite conductive film are subjected to Three-dimensional geometric modeling is performed to obtain a modeling model; then, a variety of simulation conditions obtained by pre-combination are loaded on the modeling model to simulate a variety of physical fields, and the simulation results under each simulation condition are obtained; due to a variety of simulation factors Including various factors other than the circuit layout that affect the reliability of the microwave placement, so according to the obtained simulation results, determine the reliability design scheme of the microwave placement and design the microwave placement according to this scheme, it can improve the designed reliability. Reliability of microwave placement.
以下将结合附图及实施例对本发明做进一步详细说明。The present invention will be further described in detail below with reference to the accompanying drawings and embodiments.
附图说明Description of drawings
图1是本发明实施例提供的一种基于仿真分析的微波固放可靠性设计方法的流程示意图;FIG. 1 is a schematic flowchart of a method for designing microwave solid-state reliability based on simulation analysis provided by an embodiment of the present invention;
图2为图1所示方法的仿真分析过程中,建模模型的温度随铜层厚度的变化情况的示意图;Fig. 2 is a schematic diagram of the variation of the temperature of the modeling model with the thickness of the copper layer during the simulation analysis process of the method shown in Fig. 1;
图3为图1所示方法的仿真分析过程中,复合导电膜的膜层应力随铜层厚度的变化情况的示意图;3 is a schematic diagram of the variation of the film stress of the composite conductive film with the thickness of the copper layer during the simulation analysis process of the method shown in FIG. 1;
图4为图1所示方法的仿真分析过程中,介质基板和复合导电膜之间的界面应力随铜层厚度的变化情况的示意图;FIG. 4 is a schematic diagram of the change of the interface stress between the dielectric substrate and the composite conductive film with the thickness of the copper layer during the simulation analysis process of the method shown in FIG. 1;
图5为图1所示方法的仿真分析过程中,建模模型的温度随镍层厚度的变化情况的示意图;Fig. 5 is a schematic diagram of the variation of the temperature of the modeling model with the thickness of the nickel layer in the simulation analysis process of the method shown in Fig. 1;
图6为图1所示方法的仿真分析过程中,复合导电膜的膜层应力随镍层厚度的变化情况的示意图;6 is a schematic diagram of the variation of the film stress of the composite conductive film with the thickness of the nickel layer during the simulation analysis process of the method shown in FIG. 1;
图7为图1所示方法的仿真分析过程中,介质基板和复合导电膜之间的界面应力随镍层厚度的变化情况的示意图;7 is a schematic diagram of the variation of the interfacial stress between the dielectric substrate and the composite conductive film with the thickness of the nickel layer during the simulation analysis process of the method shown in FIG. 1;
图8为图1所示方法的仿真分析过程中,在各种热沉条件下,建模模型的温度随电流的变化情况的示意图;FIG. 8 is a schematic diagram of the variation of the temperature of the modeling model with the current under various heat sink conditions during the simulation analysis process of the method shown in FIG. 1;
图9为图1所示方法的仿真分析过程中,当介质基板的材质类型不同时,建模模型的温度随电流变化的情况的示意图;FIG. 9 is a schematic diagram of a situation in which the temperature of the modeling model changes with the current when the material types of the dielectric substrates are different during the simulation analysis process of the method shown in FIG. 1;
图10为图1所示方法的仿真分析过程中,当介质基板的材质类型不同时,复合导电膜的膜层应力随电流的变化情况的示意图;FIG. 10 is a schematic diagram of the variation of the film stress of the composite conductive film with the current when the material types of the dielectric substrates are different during the simulation analysis process of the method shown in FIG. 1;
图11为图1所示方法的仿真分析过程中,当介质基板的厚度不同时,建模模型的温度随电流的变化情况的示意图;FIG. 11 is a schematic diagram of the variation of the temperature of the modeling model with the current when the thickness of the dielectric substrate is different during the simulation analysis process of the method shown in FIG. 1;
图12为利用图1所示方法所确定的一种可靠性设计方案中,建模模型的温度随电流的变化情况的示意图;FIG. 12 is a schematic diagram of the variation of the temperature of the modeling model with the current in a reliability design scheme determined by the method shown in FIG. 1;
图13为利用图1所示方法所确定的一种可靠性设计方案中,复合导电膜的膜层应力随电流的变化情况的示意图。FIG. 13 is a schematic diagram of the variation of the film stress of the composite conductive film with the current in a reliability design scheme determined by the method shown in FIG. 1 .
具体实施方式Detailed ways
下面结合具体实施例对本发明做进一步详细的描述,但本发明的实施方式不限于此。The present invention will be described in further detail below with reference to specific embodiments, but the embodiments of the present invention are not limited thereto.
为了进一步提高所设计的微波固放的可靠性,本发明实施例提供了一种基于仿真分析的微波固放可靠性设计方法,如图1所示,该方法包括以下步骤:In order to further improve the reliability of the designed microwave placement, an embodiment of the present invention provides a method for designing the reliability of microwave placement based on simulation analysis. As shown in FIG. 1 , the method includes the following steps:
S10:根据微波固放的介质基板的结构参数,以及介质基板上的复合导电膜的结构参数,对介质基板和复合导电膜进行三维几何建模,得到建模模型。S10: According to the structural parameters of the dielectric substrate placed by the microwave and the structural parameters of the composite conductive film on the dielectric substrate, perform three-dimensional geometric modeling on the dielectric substrate and the composite conductive film to obtain a modeling model.
其中,介质基板的结构参数中的厚度为预设的初始厚度。The thickness in the structural parameters of the dielectric substrate is a preset initial thickness.
具体而言,在COMSOL软件中,同步建立介质基板的几何模型以及复合导电膜的几何模型;然后,分别为这两个几何模型设置若干个物理场接口模块和材料模块,并为每个物理场接口模块设置边界条件,得到由介质基板和复合导电膜共同组成的最终的建模模型。其中,COMSOL软件为一款基于物理场,借助数值仿真理解、预测和优化工程设计软件。Specifically, in the COMSOL software, the geometric model of the dielectric substrate and the geometric model of the composite conductive film are established simultaneously; The interface module sets the boundary conditions to obtain the final modeling model composed of the dielectric substrate and the composite conductive film. Among them, COMSOL software is a physics-based software for understanding, predicting and optimizing engineering design with the help of numerical simulation.
S20:在建模模型上加载多种仿真条件进行多种物理场的仿真,得到每种仿真条件下的仿真结果。其中,多种仿真条件为对多种仿真因素各自的可选项进行组合得到的;多种仿真因素包括:微波固放的可选热沉条件、介质基板的可选材质类型、介质基板的可选厚度、复合导电膜的可选铜层厚度以及复合导电膜的可选镍层厚度。为了方案清楚及布局清晰,后续对每种仿真因素的可选项进行举例说明。S20: Load multiple simulation conditions on the modeling model to simulate multiple physical fields, and obtain simulation results under each simulation condition. Among them, various simulation conditions are obtained by combining the respective optional options of various simulation factors; various simulation factors include: optional heat sink conditions for microwave placement, optional material types for dielectric substrates, and optional dielectric substrates. Thickness, optional copper layer thickness for composite conductive films, and optional nickel layer thickness for composite conductive films. For the clarity of the scheme and layout, the options for each simulation factor will be illustrated in the following sections.
该步骤中,多种物理场可以包括:电场、热场和力场。In this step, various physical fields can include: electric field, thermal field and force field.
为了得到较为全面的仿真结果,在对多种仿真因素各自的可选项进行组合时,可以以穷尽方式对5种仿真因素进行组合。举例而言,假设每一种仿真因素具有2种可选项,那么可以组合出25共32种仿真条件。In order to obtain a more comprehensive simulation result, five simulation factors can be combined in an exhaustive manner when the respective options of various simulation factors are combined. For example, assuming that each simulation factor has 2 options, a total of 32 simulation conditions can be combined from 2 to 5 .
另外,为了提高仿真效率,还可以根据仿真人员的仿真经验,对以穷尽方式得到的仿真条件进行进一步筛选,得到最终加载到建模模型上的多种仿真条件。In addition, in order to improve the simulation efficiency, the simulation conditions obtained in an exhaustive manner can be further screened according to the simulation experience of the simulation personnel, and various simulation conditions finally loaded into the modeling model can be obtained.
S30:根据所得到的各个仿真结果,确定微波固放的可靠性设计方案。S30: According to the obtained simulation results, determine the reliability design scheme of the microwave stationary placement.
其中,根据所得到的各个仿真结果,确定微波固放的可靠性设计方案的具体实现方式存在多种。示例性的,在一种实现方式中,当进行仿真分析的目的更为关注微波固放的热场效应时,根据所得到的各个仿真结果,确定微波固放的可靠性设计方案,可以包括:Among them, according to the obtained simulation results, it is determined that there are many specific implementations of the reliability design scheme of microwave stationary placement. Exemplarily, in an implementation manner, when the purpose of the simulation analysis is to pay more attention to the thermal field effect of the microwave solid-state discharge, according to each obtained simulation result, the reliability design scheme of the microwave solid-state discharge is determined, which may include:
确定所得到的各个仿真结果中,建模模型所承受热场应力最小的一个仿真结果对应的仿真条件;Determine the simulation conditions corresponding to the simulation result with the smallest thermal field stress on the modeling model among the obtained simulation results;
将所确定的仿真条件中,各仿真因素的已选项作为所述微波固放的可靠性设计方案。In the determined simulation conditions, the selected simulation factors are used as the reliability design scheme of the microwave placement.
在实际应用中,COMSOL软件中可以显示建模模型的各个位置在热场下的温度;在确定所得到的各个仿真结果中,建模模型所承受热场应力最小的一个仿真结果对应的仿真条件时,可以将所得到的各个仿真结果中,建模模型在热场下的最高温度进行对比,将最高温度最小的一个仿真结果,作为建模模型所承受热场应力最小的一个仿真结果。In practical applications, the temperature of each position of the modeling model under the thermal field can be displayed in the COMSOL software; among the obtained simulation results, the simulation conditions corresponding to the simulation result with the smallest thermal field stress on the modeling model are determined. When the simulation results are obtained, the maximum temperature of the modeling model under the thermal field can be compared, and the simulation result with the smallest maximum temperature can be regarded as the simulation result with the smallest thermal field stress on the modeling model.
在另一种实现方式中,当进行仿真的目的更为关注微波固放的力场效应时,根据所得到的各个仿真结果,确定微波固放的可靠性设计方案,可以包括:In another implementation manner, when the purpose of the simulation is to pay more attention to the force field effect of the microwave placement, the reliability design scheme of the microwave placement is determined according to the obtained simulation results, which may include:
确定所得到的各个仿真结果中,建模模型所承受力场应力最小的一个仿真结果对应的仿真条件;Determine the simulation conditions corresponding to the simulation result with the smallest force field stress on the modeling model among the obtained simulation results;
将所确定的仿真条件中,各仿真因素的已选项作为微波固放的可靠性设计方案。In the determined simulation conditions, the selected simulation factors are taken as the reliability design scheme of microwave placement.
在实际应用中,COMSOL软件中可以显示建模模型在力场下的多个部位所承受的力场应力。具体的,如复合导电膜的膜层应力、介质基板所受应力,以及介质基板和复合导电膜之间的界面应力等等。其中,复合导电膜的膜层应力是指复合导电膜中的各个膜层所承受的力场应力。在确定所得到的各个仿真结果中,建模模型所承受力场应力最小的一个仿真结果对应的仿真条件时,可以将所得到的各个仿真结果中,建模模型的每一部分所承受的力场应力相对最小的一个仿真结果,作为建模模型所承受力场应力最小的一个仿真结果。In practical applications, COMSOL software can display the force field stress of the modeling model in multiple parts under the force field. Specifically, such as the film layer stress of the composite conductive film, the stress on the dielectric substrate, and the interface stress between the dielectric substrate and the composite conductive film, etc. The film layer stress of the composite conductive film refers to the force field stress borne by each film layer in the composite conductive film. When determining the simulation condition corresponding to the simulation result with the smallest force field stress on the modeling model among the obtained simulation results, the force field borne by each part of the modeling model in the obtained simulation results can be determined. The simulation result with the smallest stress is regarded as the simulation result with the smallest force field stress on the modeling model.
在另一种实现方式中,当进行仿真的目的关注微波固放的多种物理场效应时,根据所得到的各个仿真结果,确定微波固放的可靠性设计方案,可以包括:In another implementation manner, when the purpose of the simulation is concerned with various physical field effects of the microwave placement, the reliability design scheme of the microwave placement is determined according to the obtained simulation results, which may include:
确定所得到的各个仿真结果中,建模模型所承受综合应力最小的一个仿真结果对应的仿真条件;这里所说的综合应力为:多种物理场下的应力;Among the obtained simulation results, the simulation conditions corresponding to the simulation result with the smallest comprehensive stress on the modeling model are determined; the comprehensive stress mentioned here is: the stress under various physical fields;
将所确定的仿真条件中,各仿真因素的已选项作为所述微波固放的可靠性设计方案。In the determined simulation conditions, the selected simulation factors are used as the reliability design scheme of the microwave placement.
在实际应用中,COMSOL软件中设有一表征综合应力的参数,读取该参数的数值,便可以获知建模模型所承受的综合应力。In practical applications, there is a parameter representing the comprehensive stress in the COMSOL software. By reading the value of this parameter, the comprehensive stress on the modeling model can be known.
可以理解的是,将所确定的仿真条件中,各仿真因素的已选项作为所述微波固放的可靠性设计方案之后,可以按照各已选项中所选定的因素,对微波固放开展具体的设计。It can be understood that, in the determined simulation conditions, the selected options of each simulation factor are taken as the reliability design scheme of the microwave placement, and the specific microwave placement can be carried out according to the factors selected in the selected options. the design of.
本发明实施例提供的基于仿真分析的微波固放可靠性设计方法中,根据微波固放的介质基板的结构参数,以及介质基板上的复合导电膜的结构参数,对介质基板和复合导电膜进行三维几何建模,得到建模模型;然后,在该建模模型上加载预先组合得到的多种仿真条件进行多种物理场的仿真,得到每种仿真条件下的仿真结果;由于多种仿真因素包括电路布局以外的、影响微波固放可靠性的各种因素,故根据所得到的各个仿真结果,确定微波固放的可靠性设计方案并依次方案设计微波固放时,可以进一步提高所设计的微波固放的可靠性。In the microwave placement reliability design method based on simulation analysis provided by the embodiment of the present invention, according to the structural parameters of the dielectric substrate for microwave placement and the structural parameters of the composite conductive film on the dielectric substrate, the dielectric substrate and the composite conductive film are subjected to Three-dimensional geometric modeling is performed to obtain a modeling model; then, a variety of simulation conditions obtained by pre-combination are loaded on the modeling model to simulate a variety of physical fields, and the simulation results under each simulation condition are obtained; due to a variety of simulation factors Including various factors other than the circuit layout that affect the reliability of microwave placement, so according to the obtained simulation results, the reliability design scheme of microwave placement is determined and the microwave placement is designed in sequence, which can further improve the designed reliability. Reliability of microwave placement.
另外,可选地,在将所确定的仿真条件中,各仿真因素的已选项作为微波固放的可靠性设计方案之后,本发明实施例提供的方法还可以包括:In addition, optionally, after using the selected simulation factors in the determined simulation conditions as a reliability design solution for microwave placement, the method provided by the embodiment of the present invention may further include:
在建模模型上加载所确定的仿真条件,并对建模模型在预设的电流范围内进行电流扫描;Load the determined simulation conditions on the modeling model, and perform a current sweep on the modeling model within a preset current range;
根据电流扫描的结果,确定在该可靠性设计方案中,微波固放的过电流能力。According to the results of the current scanning, the overcurrent capability of the microwave discharge in the reliability design scheme is determined.
该电流扫描的结果中,包含有与所加载的扫描电流对应的热场应力的数据。相应的,根据电流扫描的结果,确定在该可靠性设计方案中,微波固放的过电流能力,具体可以是根据扫描电流对应的热场应力的数据,确定在该可靠性设计方案中,微波固放的过电流能力。例如,将电流扫描的结果中,建模模型所承受的最高温度达到120℃±℃时的电流作为该可靠性设计方案中,微波固放所能承受的最大过电流。其中,120℃接近于可靠性领域中所建议的电子设备的器件或电路板等组成部分的高温工作上限。The result of this current scan includes data on thermal field stress corresponding to the applied scan current. Correspondingly, according to the results of the current scanning, determine the overcurrent capability of the microwave stationary discharge in the reliability design scheme, specifically, according to the data of the thermal field stress corresponding to the scanning current, determine the reliability design scheme, the microwave Fixed overcurrent capability. For example, in the results of the current sweep, the current when the maximum temperature that the modeling model withstands
另外,在将所确定的仿真条件中,各仿真因素的已选项作为微波固放的可靠性设计方案之后,本发明实施例还可以进一步根据电流扫描的结果,利用数值拟合的方法,拟合该可靠性设计方案中,微波固放的过电流能力的预测公式。In addition, after using the selected simulation factors in the determined simulation conditions as the reliability design scheme of the microwave stationary placement, the embodiment of the present invention can further use the numerical fitting method to fit the current scanning results. In this reliability design scheme, the prediction formula of the overcurrent capability of microwave discharge.
在拟合时,可以使用公式y=a+bx+cx2来进行拟合;其中,x代表温度,y代表电流;具体的,取多组扫描电流对应的热场应力的数据代入该公式中,便可以拟合出a、b和c的具体数值。When fitting, the formula y=a+bx+cx 2 can be used for fitting; where x represents temperature and y represents current; specifically, the data of thermal field stress corresponding to multiple sets of scanning currents are taken and substituted into the formula , the specific values of a, b and c can be fitted.
可以理解的是,当依照所确定的可靠性设计方案设计完成微波固放后,根据微波固放的温度传感器所读出的温度,便可以预测出微波固放的过电流,从而对微波固放的可靠性工作状态起到监测的作用。It can be understood that after the microwave placement is designed according to the determined reliability design scheme, the overcurrent of the microwave placement can be predicted according to the temperature read by the temperature sensor of the microwave placement, so as to prevent the microwave placement. The reliability of the working state plays a monitoring role.
为了方案清楚及布局清晰,下面对每种仿真因素的可选项进行举例说明。In order to clarify the scheme and layout, the options for each simulation factor are illustrated below.
示例性的,微波固放的可选热沉条件可以包括:纯空气条件散热、基板底面附金散热以及理想热沉散热。Exemplarily, the optional heat sink conditions for the microwave placement may include: heat dissipation under pure air conditions, heat dissipation with gold attached to the bottom surface of the substrate, and heat dissipation by an ideal heat sink.
其中,基板底面附金散热时,除了基板底面附金可以达到散热效果外,还可以通过空气散热。可以理解的是,复合导电膜可以通过两种途径耗散其自身所产生的热量:复合导电膜上方和侧面包围的空气,以及下方的基板。相应的,介质基板也存在两种方式散热途径:在其承载电路的一侧通过空气散热,以及另一侧连接的热沉进行散热。其中,若使用传热系数h来模拟热通量,那么向空气散热时,该热通量可以表示为:h=5W/(m2×k);其中,W代表功率单位瓦,m代表热量流通的距离,k为玻尔兹曼常数。Wherein, when gold is attached to the bottom surface of the substrate to dissipate heat, in addition to the heat dissipation effect achieved by the deposition of gold on the bottom surface of the substrate, heat can also be dissipated by air. It is understood that the composite conductive film can dissipate the heat generated by itself in two ways: the surrounding air above and on the sides of the composite conductive film, and the substrate below. Correspondingly, the dielectric substrate also has two ways of dissipating heat: dissipating heat through air on one side of the dielectric substrate that carries the circuit, and dissipating heat through a heat sink connected on the other side. Among them, if the heat transfer coefficient h is used to simulate the heat flux, then when the heat is dissipated to the air, the heat flux can be expressed as: h=5W/(m 2 ×k); where W represents the power unit watt, and m represents the heat The flow distance, k is the Boltzmann constant.
同理的,理想热沉散热时,除了理想热沉可以达到散热效果,也可以通过空气散热。这里,基板底面所连接的理想热沉为300K的理想热沉。在实际应用中,当微波固放的介质基板的固定平面足够大时,微波固放的热沉条件即可以视为理想热沉散热。In the same way, when the ideal heat sink dissipates heat, in addition to the ideal heat sink can achieve the heat dissipation effect, the heat can also be dissipated by air. Here, the ideal heat sink connected to the bottom surface of the substrate is an ideal heat sink of 300K. In practical applications, when the fixed plane of the dielectric substrate for microwave placement is large enough, the heat sink condition for microwave placement can be regarded as an ideal heat sink to dissipate heat.
示例性的,介质基板的可选材质类型可以包括:SF210K和TD36。这里,SF210K和TD36均为两种现有的高介电常数的介质基板的类型。Exemplarily, the optional material types of the dielectric substrate may include: SF210K and TD36. Here, SF210K and TD36 are both types of existing high dielectric constant dielectric substrates.
另外,在上述两种介质基板的可选材质类型的基础上,每种介质基板的可选厚度可以包括:0.254mm、0.381mm以及0.635mm。In addition, based on the optional material types of the above two dielectric substrates, the optional thickness of each dielectric substrate may include: 0.254 mm, 0.381 mm, and 0.635 mm.
在上述介质基板的材质类型和可选厚度的基础上,复合导电膜可以为厚度为10μm的、膜层结构从下到上为镍铬合金、金、铜、镍以及金的导电膜。其中,镍铬合金的厚度为0.05μm,底层金的厚度为3μm;当设定镍层厚度为1.5μm时,铜层厚度可以包括[1μm,2μm]内的、间隔为0.1μm的所有厚度;顶层金的厚度随铜层厚度的变化而变化,以使复合导电膜的总厚度不变。或者,当设定铜层厚度为1.5μm时,镍层厚度可以包括[1μm,2μm]内的、间隔为0.1μm的所有厚度;顶层金的厚度随镍层厚度的变化而变化,以使复合导电膜的总厚度不变。Based on the material type and optional thickness of the above-mentioned dielectric substrate, the composite conductive film can be a conductive film with a thickness of 10 μm, and the film structure from bottom to top is nichrome, gold, copper, nickel and gold. Wherein, the thickness of the nickel-chromium alloy is 0.05 μm, and the thickness of the underlying gold is 3 μm; when the thickness of the nickel layer is set to be 1.5 μm, the thickness of the copper layer can include all thicknesses within [1 μm, 2 μm] with an interval of 0.1 μm; The thickness of the top layer gold varies with the thickness of the copper layer, so that the total thickness of the composite conductive film is constant. Alternatively, when the copper layer thickness is set to be 1.5 μm, the nickel layer thickness can include all thicknesses within [1 μm, 2 μm] with an interval of 0.1 μm; the thickness of the top layer gold varies with the thickness of the nickel layer so that the composite The total thickness of the conductive film was not changed.
下面,对本发明实施例在仿真过程中所得到的一些仿真结果进行举例说明。Hereinafter, some simulation results obtained in the simulation process in the embodiment of the present invention will be illustrated by way of example.
图2为图1所示方法的仿真分析过程中,建模模型的温度随铜层厚度的变化情况的示意图;从图2中可以看到,随着铜层厚度的增加,温度线性地降低。Figure 2 is a schematic diagram of the change of the temperature of the modeling model with the thickness of the copper layer during the simulation analysis process of the method shown in Figure 1; it can be seen from Figure 2 that with the increase of the thickness of the copper layer, the temperature decreases linearly.
图3为图1所示方法的仿真分析过程中,复合导电膜的膜层应力随铜层厚度的变化情况的示意图;从图3中可以看到,随着铜层厚度的增加,各个膜层所受的机械应力线性地减小。Figure 3 is a schematic diagram of the variation of the film stress of the composite conductive film with the thickness of the copper layer during the simulation analysis process of the method shown in Figure 1; it can be seen from Figure 3 that with the increase of the thickness of the copper layer, each film layer The mechanical stress experienced decreases linearly.
图4为图1所示方法的仿真分析过程中,介质基板和复合导电膜的各膜层之间的界面应力随铜层厚度的变化情况的示意图;从图4中可以看到,随着铜层厚度增加,界面应力在不断增大,但仍然比理论可以承受最大的屈服应力小一个数量级,这代表该介质基板和复合导电膜在粘附应力方面满足要求。Fig. 4 is a schematic diagram of the variation of the interfacial stress between the dielectric substrate and each film layer of the composite conductive film with the thickness of the copper layer during the simulation analysis process of the method shown in Fig. 1; As the layer thickness increases, the interface stress is increasing, but it is still an order of magnitude smaller than the theoretical maximum yield stress, which means that the dielectric substrate and the composite conductive film meet the requirements in terms of adhesion stress.
其中,图2、图3以及图4中,微波固放的热沉条件、介质基板的材质类型、介质基板的厚度,以及复合导电膜的镍层厚度均为给定的选项。Among them, in Figures 2, 3 and 4, the heat sink conditions for microwave placement, the material type of the dielectric substrate, the thickness of the dielectric substrate, and the thickness of the nickel layer of the composite conductive film are all given options.
图5为图1所示方法的仿真分析过程中,建模模型的温度随镍层厚度的变化情况的示意图;从图5中可以看到,随着镍层厚度的增加,温度线性地降低。Figure 5 is a schematic diagram of the variation of the temperature of the modeling model with the thickness of the nickel layer during the simulation analysis process of the method shown in Figure 1; it can be seen from Figure 5 that the temperature decreases linearly with the increase of the thickness of the nickel layer.
图6为图1所示方法的仿真分析过程中,复合导电膜的膜层应力随镍层厚度的变化情况的示意图;从图6中可以看到,随着镍层厚度的增加,各个膜层所受的机械应力线性地减小。Figure 6 is a schematic diagram of the variation of the film stress of the composite conductive film with the thickness of the nickel layer during the simulation analysis process of the method shown in Figure 1; it can be seen from Figure 6 that with the increase of the thickness of the nickel layer, each film layer The mechanical stress experienced decreases linearly.
图7为图1所示方法的仿真分析过程中,介质基板和复合导电膜之间的界面应力随镍层厚度的变化情况的示意图;从图7中可以看到,随着镍层厚度增加,界面应力在不断增大,但仍然比理论可以承受最大的屈服应力小一个数量级,这代表该介质基板和复合导电膜在粘附应力方面满足要求。Fig. 7 is a schematic diagram of the variation of the interfacial stress between the dielectric substrate and the composite conductive film with the thickness of the nickel layer during the simulation analysis process of the method shown in Fig. 1; it can be seen from Fig. 7 that as the thickness of the nickel layer increases, The interfacial stress is increasing, but it is still an order of magnitude smaller than the theoretical maximum yield stress, which means that the dielectric substrate and composite conductive film meet the requirements in terms of adhesion stress.
其中,图5、图6以及图7中,微波固放的热沉条件、介质基板的材质类型、介质基板的厚度,以及复合导电膜的铜层厚度均为给定的选项。Among them, in Figures 5, 6 and 7, the heat sink conditions for microwave placement, the material type of the dielectric substrate, the thickness of the dielectric substrate, and the thickness of the copper layer of the composite conductive film are all given options.
图8为图1所示方法的仿真分析过程中,在各种热沉条件下,建模模型的温度随电流的变化情况的示意图;FIG. 8 is a schematic diagram of the variation of the temperature of the modeling model with the current under various heat sink conditions during the simulation analysis process of the method shown in FIG. 1;
图8中,微波固放的介质基板的厚度、介质基板的材质类型、复合导电膜的镍层厚度,以及复合导电膜的铜层厚度均为给定的选项。In FIG. 8 , the thickness of the dielectric substrate placed by the microwave, the material type of the dielectric substrate, the thickness of the nickel layer of the composite conductive film, and the thickness of the copper layer of the composite conductive film are all given options.
图9为图1所示方法的仿真分析过程中,当介质基板的材质类型不同时,建模模型的温度随电流的变化情况的示意图;FIG. 9 is a schematic diagram of the variation of the temperature of the modeling model with the current when the material types of the dielectric substrates are different during the simulation analysis process of the method shown in FIG. 1;
图10为图1所示方法的仿真分析过程中,当介质基板的材质类型不同时,复合导电膜的膜层应力随电流变化情况的示意图;由图9和图10可知,随着电流的增大,介质基板所受应力增大。Fig. 10 is a schematic diagram of the variation of the film stress of the composite conductive film with the current when the material types of the dielectric substrates are different during the simulation analysis process of the method shown in Fig. 1; it can be seen from Figs. large, the stress on the dielectric substrate increases.
图9和图10中,微波固放的热沉条件、介质基板的厚度、复合导电膜的镍层厚度以及复合导电膜的铜层厚度均为给定的选项。In FIGS. 9 and 10 , the heat sink conditions for microwave placement, the thickness of the dielectric substrate, the thickness of the nickel layer of the composite conductive film, and the thickness of the copper layer of the composite conductive film are all given options.
图11为图1所示方法的仿真分析过程中,当介质基板的厚度不同时,建模模型的温度随电流变化情况的示意图。从图11中可以看到,在理想热沉的热沉条件下,介质基板的厚度越薄,散热效果越好。FIG. 11 is a schematic diagram illustrating the variation of the temperature of the modeling model with the current when the thickness of the dielectric substrate is different during the simulation analysis process of the method shown in FIG. 1 . It can be seen from FIG. 11 that under the heat sink condition of an ideal heat sink, the thinner the thickness of the dielectric substrate, the better the heat dissipation effect.
图12为利用图1所示方法所确定的一种可靠性设计方案中,建模模型的温度随电流的变化情况的示意图。从图12中可以看到,铜层厚度选定为1μm,镍层厚度选定为2μm时,温度为120℃对应的电流大小约2.7A左右。铜层厚度选定为2μm,镍层厚度选定为1μm时,温度为120℃对应的电流大小约2.9A左右。FIG. 12 is a schematic diagram of the variation of the temperature of the modeling model with the current in a reliability design scheme determined by the method shown in FIG. 1 . It can be seen from Figure 12 that when the thickness of the copper layer is selected as 1 μm and the thickness of the nickel layer is selected as 2 μm, the current corresponding to a temperature of 120°C is about 2.7A. When the thickness of the copper layer is selected as 2 μm and the thickness of the nickel layer is selected as 1 μm, the current corresponding to the temperature of 120°C is about 2.9A.
图13为利用图1所示方法所确定的一种可靠性设计方案中,复合导电膜的膜层应力随电流变化情况的示意图。从图13中可以看到,随着电流的增大,膜层应力逐渐增大。FIG. 13 is a schematic diagram of the variation of the film stress of the composite conductive film with the current in a reliability design scheme determined by the method shown in FIG. 1 . It can be seen from Figure 13 that with the increase of the current, the film stress gradually increases.
在本说明书的描述中,参考术语“一个实施例”、“一些实施例”、“示例”、“具体示例”、或“一些示例”等的描述意指结合该实施例或示例描述的具体特征或者特点包含于本发明的至少一个实施例或示例中。在本说明书中,对上述术语的示意性表述不必须针对的是相同的实施例或示例。而且,描述的具体特征或者特点可以在任何的一个或多个实施例或示例中以合适的方式结合。此外,本领域的技术人员可以将本说明书中描述的不同实施例或示例进行接合和组合。In the description of this specification, description with reference to the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples", etc., mean specific features described in connection with the embodiment or example Or features are included in at least one embodiment or example of the invention. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, those skilled in the art may combine and combine the different embodiments or examples described in this specification.
尽管在此结合各实施例对本申请进行了描述,然而,在实施所要求保护的本申请过程中,本领域技术人员通过查看所述附图、公开内容、以及所附权利要求书,可理解并实现所述公开实施例的其他变化。在权利要求中,“包括”(comprising)一词不排除其他组成部分或步骤,“一”或“一个”不排除多个的情况。单个处理器或其他单元可以实现权利要求中列举的若干项功能。相互不同的从属权利要求中记载了某些措施,但这并不表示这些措施不能组合起来产生良好的效果。Although the application is described herein in conjunction with the various embodiments, those skilled in the art will understand and understand from a review of the drawings, the disclosure, and the appended claims in practicing the claimed application. Other variations of the disclosed embodiments are implemented. In the claims, the word "comprising" does not exclude other components or steps, and "a" or "an" does not exclude a plurality. A single processor or other unit may fulfill the functions of several items recited in the claims. The mere fact that certain measures are recited in mutually different dependent claims does not indicate that these measures cannot be combined to advantage.
以上内容是结合具体的优选实施方式对本发明所作的进一步详细说明,不能认定本发明的具体实施只局限于这些说明。对于本发明所属技术领域的普通技术人员来说,在不脱离本发明构思的前提下,还可以做出若干简单推演或替换,都应当视为属于本发明的保护范围。The above content is a further detailed description of the present invention in combination with specific preferred embodiments, and it cannot be considered that the specific implementation of the present invention is limited to these descriptions. For those of ordinary skill in the technical field of the present invention, without departing from the concept of the present invention, some simple deductions or substitutions can be made, which should be regarded as belonging to the protection scope of the present invention.
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