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CN111333026A - Force-electricity coupling loading platform capable of reconstructing three-dimensional microstructure and preparation method thereof - Google Patents

Force-electricity coupling loading platform capable of reconstructing three-dimensional microstructure and preparation method thereof Download PDF

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CN111333026A
CN111333026A CN202010151099.0A CN202010151099A CN111333026A CN 111333026 A CN111333026 A CN 111333026A CN 202010151099 A CN202010151099 A CN 202010151099A CN 111333026 A CN111333026 A CN 111333026A
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reconfigurable
elastic base
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张一慧
庞文博
程旭
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Tsinghua University
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    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00Subject matter not provided for in other groups of this subclass
    • B81C99/0005Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems, or methods for manufacturing the same
    • B81C99/0025Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems not provided for in B81C99/001 - B81C99/002

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Abstract

本发明提出一种可重构三维微结构的力电耦合加载平台及其制备方法,加载平台包括:力加载组件,力加载组件包括底盘、多个夹持件、移动机构和弹性基底,多个夹持件中的至少一个连接于移动机构,夹持件夹持弹性基底,弹性基底为膜状,移动机构能够驱动夹持件移动,通过夹持件移动能够使弹性基底产生形变;以及电加载组件,电加载组件包括导线,导线连接到弹性基底并用于向弹性基底通电,弹性基底的正反两面通过导线分别连接电源的正极和负极,弹性基底由电致活性聚合物制成。通过采用上述技术方案,将力加载组件和电加载组件结合可以相比于现有技术形成更丰富的可重构三维微结构构型,并且容易使三维微结构实现快速重构。

Figure 202010151099

The invention provides a reconfigurable three-dimensional micro-structured electromechanical coupling loading platform and a preparation method thereof. The loading platform includes: a force loading assembly, and the force loading assembly includes a chassis, a plurality of clamping parts, a moving mechanism and an elastic base, and a plurality of At least one of the clamping members is connected to a moving mechanism, the clamping member clamps an elastic base, the elastic base is film-shaped, the moving mechanism can drive the clamping member to move, and the elastic base can be deformed by the movement of the clamping member; and electric loading The component, the electrical loading component includes a wire, the wire is connected to the elastic base and used to energize the elastic base, the positive and negative sides of the elastic base are respectively connected to the positive and negative electrodes of the power source through the wire, and the elastic base is made of electroactive polymer. By adopting the above technical solution, the combination of the force loading assembly and the electric loading assembly can form a richer reconfigurable three-dimensional microstructure configuration compared with the prior art, and it is easy to achieve rapid reconstruction of the three-dimensional microstructure.

Figure 202010151099

Description

可重构三维微结构的力电耦合加载平台及其制备方法Electromechanical coupling loading platform with reconfigurable three-dimensional microstructure and preparation method thereof

技术领域technical field

本发明属于先进制造技术领域,具体涉及一种可重构三维微结构的力电耦合加载平台可重构三维微结构的力电耦合加载平台及其制备方法。The invention belongs to the technical field of advanced manufacturing, and in particular relates to an electromechanical coupling loading platform with a reconfigurable three-dimensional microstructure and a electromechanical coupling loading platform with a reconfigurable three-dimensional microstructure and a preparation method thereof.

背景技术Background technique

近年来,三维微结构,尤其是可重构三维微结构,在生物医学器件、机器人、超材料、微电子机械系统等领域受到越来越多的重视,吸引了国内外众多的研究机构与学者的注意。可重构三维微结构是指可以通过某种加载或变换方式,使一个三维构型能够可逆地变换到其他不同的三维构型的结构。可重构微型天线、可重构磁控软体机器人、基于自组装方法的可重构医疗器件等具有实用性的可重构三维微结构相继被研究和报道。In recent years, three-dimensional microstructures, especially reconfigurable three-dimensional microstructures, have received more and more attention in the fields of biomedical devices, robots, metamaterials, and microelectromechanical systems, attracting many research institutions and scholars at home and abroad. attention. Reconfigurable three-dimensional microstructures refer to structures that can be reversibly transformed from one three-dimensional configuration to other different three-dimensional configurations through a certain loading or transformation method. Practical reconfigurable 3D microstructures, such as reconfigurable micro-antennas, reconfigurable magnetically controlled soft robots, and reconfigurable medical devices based on self-assembly methods, have been successively studied and reported.

现有技术中,屈曲诱导三维微结构组装方法是一种可靠的制备方法。该方法通过预拉伸弹性基体后部分释放,使部分粘贴在弹性基体上的二维构型在压缩应变作用下发生屈曲变形形成三维微结构。In the prior art, the buckling-induced three-dimensional microstructure assembly method is a reliable preparation method. In the method, the elastic substrate is partially released after pre-stretching, so that the two-dimensional configuration partially adhered to the elastic substrate undergoes buckling deformation under the action of compressive strain to form a three-dimensional microstructure.

上述屈曲诱导三维微结构组装方法依靠对预拉伸弹性基底的释放,从而实现三维微结构的组装。该方法可以实现三维微结构的组装,但是对于重构三维微结构,需要将组装的三维微结构恢复为二维结构,再通过改变加载路径进行重构。The above-mentioned buckling-induced three-dimensional microstructure assembly method relies on the release of a pre-stretched elastic substrate, thereby realizing the assembly of three-dimensional microstructures. This method can realize the assembly of three-dimensional microstructures, but to reconstruct three-dimensional microstructures, it is necessary to restore the assembled three-dimensional microstructures to two-dimensional structures, and then reconstruct by changing the loading path.

发明内容SUMMARY OF THE INVENTION

基于上述现有技术的问题,本发明旨在提出一种可重构三维微结构的力电耦合加载平台及其制备方法,使三维微结构容易进行重构变换三维构型。Based on the above-mentioned problems in the prior art, the present invention aims to provide a mechanoelectric coupling loading platform with a reconfigurable three-dimensional microstructure and a preparation method thereof, so that the three-dimensional microstructure can be easily reconstructed and transformed into a three-dimensional configuration.

本发明提出一种可重构三维微结构的力电耦合加载平台,所述加载平台包括:The present invention provides an electromechanical coupling loading platform with a reconfigurable three-dimensional microstructure, and the loading platform includes:

力加载组件,所述力加载组件包括底盘、多个夹持件、移动机构和弹性基底,所述多个夹持件中的至少一个连接于移动机构,所述夹持件夹持所述弹性基底,所述弹性基底为膜状,所述移动机构能够驱动所述夹持件移动,通过所述夹持件移动能够使所述弹性基底产生形变;以及A force loading assembly comprising a chassis, a plurality of clamps, a moving mechanism and an elastic base, at least one of the plurality of clamps being connected to the moving mechanism, the clamps clamping the elastic a base, the elastic base is in the shape of a film, the moving mechanism can drive the clamping member to move, and the elastic base can be deformed by the movement of the clamping member; and

电加载组件,所述电加载组件包括导线,所述导线连接到所述弹性基底并用于向所述弹性基底通电,所述弹性基底的正反两面通过所述导线分别连接电源的正极和负极,所述弹性基底由电致活性聚合物制成。an electric loading assembly, the electric loading assembly includes a wire, the wire is connected to the elastic base and used to energize the elastic base, the positive and negative sides of the elastic base are respectively connected to the positive and negative electrodes of the power supply through the wire, The elastic substrate is made of an electroactive polymer.

优选地,所述电加载组件还包括电极,所述电极设置于所述弹性基底的正反两面,所述导线通过所述电极连接于所述弹性基底。Preferably, the electrical loading assembly further includes electrodes, the electrodes are disposed on the front and back sides of the elastic base, and the wires are connected to the elastic base through the electrodes.

优选地,所述电极由能够变形的导电材料制成,使所述电极能够和所述弹性基底一起产生形变。Preferably, the electrode is made of a deformable conductive material, so that the electrode can deform together with the elastic substrate.

优选地,所述弹性基底由介电弹性体材料制成。Preferably, the elastic substrate is made of a dielectric elastomer material.

优选地,所述夹持件设置有导线接入部和导线接出部,所述导线接入部连接所述导线,所述导线接出部连接所述电源。Preferably, the clamping member is provided with a wire insertion portion and a wire outlet portion, the wire insertion portion is connected to the wire, and the wire outlet portion is connected to the power source.

优选地,所述电加载组件还包括变压器,所述变压器连接于所述电源和所述导线之间,所述变压器能够将交流电转化为直流电并且使电压升高。Preferably, the electrical loading assembly further includes a transformer connected between the power source and the wire, the transformer capable of converting alternating current to direct current and increasing the voltage.

优选地,所述变压器能够使输出电压为两千伏至一万伏。Preferably, the transformer is capable of an output voltage ranging from two kilovolts to ten thousand volts.

本发明还提出一种可重构三维微结构的制备方法,该方法包括:The present invention also provides a method for preparing a reconfigurable three-dimensional microstructure, the method comprising:

将能够形成可重构三维微结构的平面结构部分地粘接于弹性基底;Partially adhering a planar structure capable of forming a reconfigurable three-dimensional microstructure to an elastic substrate;

将所述弹性基底连接于力加载组件的夹持部,所述夹持部移动使所述弹性基底变形,进而使所述平面结构或其变形后形成的三维微结构屈曲变形或发生重构;connecting the elastic base to the clamping part of the force-loading component, and the clamping part moves to deform the elastic base, thereby causing the planar structure or the three-dimensional microstructure formed after the deformation to buckling, deforming, or reconstructing;

所述弹性基底通电使所述弹性基底变形,所述弹性基底变形,进而使所述平面结构或其变形后形成的三维微结构屈曲变形或发生重构。The elastic substrate is energized to deform the elastic substrate, and the elastic substrate deforms, thereby causing the planar structure or the three-dimensional microstructure formed after the deformation to buckling, deforming, or reconstructing.

优选地,所述制备方法使用上述技术方案中任一项所述的可重构三维微结构的力电耦合加载平台。Preferably, the preparation method uses the electromechanical coupling loading platform of the reconfigurable three-dimensional microstructure described in any one of the above technical solutions.

优选地,所述制备方法包括为所述弹性基底通直流电。Preferably, the preparation method includes applying direct current to the elastic substrate.

通过采用上述技术方案,将力加载组件和电加载组件结合可以相比于现有技术形成更丰富的可重构三维微结构构型,并且容易使三维微结构实现快速重构。By adopting the above technical solution, the combination of the force loading assembly and the electric loading assembly can form a richer reconfigurable three-dimensional microstructure configuration compared with the prior art, and it is easy to achieve rapid reconstruction of the three-dimensional microstructure.

附图说明Description of drawings

图1示出了根据本发明的实施方式的加载平台的结构示意图。FIG. 1 shows a schematic structural diagram of a loading platform according to an embodiment of the present invention.

图2示出了根据本发明的实施方式的加载平台的力加载组件(不含弹性基底)的结构示意图。FIG. 2 shows a schematic structural diagram of a force loading assembly (without an elastic base) of a loading platform according to an embodiment of the present invention.

图3示出了根据本发明的实施方式的加载平台的力加载组件的夹持件和电加载组件的导线接入部、导线接出部的结构示意图。FIG. 3 shows a schematic structural diagram of the clamping part of the force loading assembly of the loading platform and the wire entry part and the wire outlet part of the electric loading assembly according to an embodiment of the present invention.

图4a至图4d示出了由平面结构形成三维微结构的示意图。Figures 4a to 4d show schematic diagrams of the formation of three-dimensional microstructures from planar structures.

图5示出了由平面结构形成的另一种三维微结构的示意图。Figure 5 shows a schematic diagram of another three-dimensional microstructure formed from a planar structure.

附图标记说明Description of reference numerals

1力加载组件 11底盘 12夹持件 121凹槽 122挤压部 123螺钉 13移动机构 131滑轨 132丝杠 133电机 14弹性基底1 Force Loading Assembly 11 Chassis 12 Clamp 121 Groove 122 Extrusion 123 Screw 13 Moving Mechanism 131 Slide Rail 132 Lead Screw 133 Motor 14 Elastic Base

2电加载组件 21、21a、21b电极 22导线 23导线接入部 24导线接出部2 Electric loading components 21, 21a, 21b electrodes 22 Lead wires 23 Lead wire access parts 24 Lead wire connection parts

X第一方向 Y第二方向。X first direction Y second direction.

具体实施方式Detailed ways

下面参照附图描述本发明的示例性实施方式。应当理解,这些具体的说明仅用于示教本领域技术人员如何实施本发明,而不用于穷举本发明的所有可行的方式,也不用于限制本发明的范围。Exemplary embodiments of the present invention are described below with reference to the accompanying drawings. It should be understood that these specific descriptions are only used to teach those skilled in the art how to implement the present invention, and are not used to exhaust all possible ways of the present invention, nor to limit the scope of the present invention.

在现有技术中,基于屈曲诱导方法制备可重构三维微结构具有以下缺点:In the prior art, the fabrication of reconfigurable 3D microstructures based on buckling-induced methods has the following disadvantages:

(1)加载平台通过机械加载来实现,使加载路径单一且加载速度慢。(1) The loading platform is realized by mechanical loading, so that the loading path is single and the loading speed is slow.

(2)夹具的加载路径不易改变,两种不同构型的三维微结构不能直接转换,而需要重新恢复到平面状态再转换到另外一种三维构型,利用屈曲诱导的方法不适用于组装可重构三维微结构。(2) The loading path of the fixture is not easy to change, and the three-dimensional microstructures of two different configurations cannot be directly converted, but need to be restored to the plane state and then converted to another three-dimensional configuration. The method of using buckling induction is not suitable for assembly. Reconstruct 3D microstructure.

(3)通过夹具的移动对弹性基底加载后,弹性基底形成的应变场分布较为单一,无法形成复杂的应变场,进而无法制成复杂的三维微结构。(3) After the elastic substrate is loaded by the movement of the clamp, the distribution of the strain field formed by the elastic substrate is relatively simple, and a complex strain field cannot be formed, and thus a complex three-dimensional microstructure cannot be formed.

如图1至图4所示,本发明提出一种可重构三维微结构的力电耦合加载平台,其包括力加载组件1和电加载组件2,力加载组件1和电加载组件2连接在一起,从而通过施加外力和电压使平面结构变形为三维微结构,并且可以通过改变电加载的方式使三维微结构重构为另一种的构型。三维微结构的尺寸通常为纳米级或微米级。As shown in FIG. 1 to FIG. 4 , the present invention proposes a force-electric coupling loading platform with a reconfigurable three-dimensional microstructure, which includes a force-loading component 1 and an electric-loading component 2, and the force-loading component 1 and the electric-loading component 2 are connected to Together, the planar structure can be deformed into a three-dimensional microstructure by applying external force and voltage, and the three-dimensional microstructure can be reconfigured into another configuration by changing the electrical loading. The dimensions of three-dimensional microstructures are usually nanoscale or microscale.

如图1和2所示,力加载组件1包括底盘11、夹持件12、移动机构13和弹性基底14,夹持件12设置有多个,多个夹持件12通过移动机构13连接于底盘11,夹持件12可以通过移动机构13的驱动而相对于底盘11移动。弹性基底14被夹持件12所夹持,弹性基底14为膜状,通过夹持件12相互远离的移动可以使弹性基底14被拉伸或者通过夹持件12相互靠近的移动使被预拉伸的弹性基底14释放预拉伸的形变。As shown in FIGS. 1 and 2 , the force loading assembly 1 includes a chassis 11 , a clamping member 12 , a moving mechanism 13 and an elastic base 14 . There are a plurality of clamping members 12 , and the plurality of clamping members 12 are connected to each other through the moving mechanism 13 . The chassis 11 and the clamping member 12 can be moved relative to the chassis 11 by the driving of the moving mechanism 13 . The elastic base 14 is clamped by the clamping members 12, and the elastic base 14 is film-shaped. The elastic base 14 can be stretched by the movement of the clamping members 12 away from each other or pre-tensioned by the movement of the clamping members 12 towards each other. The stretched elastic substrate 14 releases the pre-stretched deformation.

在本实施方式中,移动机构13和夹持件12设置有4个,移动机构13可以驱动夹持件12沿第一方向X和第二方向Y移动,4个夹持件中的两个可以沿第一方向X移动,另外两个可以沿第二方向Y移动,第一方向X和第二方向Y可以相互垂直。In this embodiment, four moving mechanisms 13 and clamping members 12 are provided, the moving mechanism 13 can drive the clamping members 12 to move along the first direction X and the second direction Y, and two of the four clamping members can be Moving along the first direction X, the other two may move along the second direction Y, and the first direction X and the second direction Y may be perpendicular to each other.

弹性基底14可以为电致活性聚合物薄膜,例如介电弹性体、具有电致变形效应的硅橡胶或水凝胶。The elastic substrate 14 may be an electroactive polymer film, such as a dielectric elastomer, a silicone rubber with electrodeformation effect, or a hydrogel.

如图2所示,移动机构13包括滑轨131、丝杠132和电机133。电机133固定连接于底盘11,丝杠132连接于电机133的输出轴。滑轨131连接于底盘11,滑轨131与丝杠132平行设置,夹持件12套设于丝杠132并且通过螺纹配合,夹持件12与滑轨131配合连接使夹持件12能够沿滑轨131的延伸方向滑动。As shown in FIG. 2 , the moving mechanism 13 includes a slide rail 131 , a lead screw 132 and a motor 133 . The motor 133 is fixedly connected to the chassis 11 , and the lead screw 132 is connected to the output shaft of the motor 133 . The slide rail 131 is connected to the chassis 11 , the slide rail 131 is arranged in parallel with the lead screw 132 , the clamping piece 12 is sleeved on the lead screw 132 and is screwed together, and the clamping piece 12 is connected with the slide rail 131 so that the clamping piece 12 can move along the The extending direction of the slide rail 131 slides.

如图3所示,夹持件12设置有能够容纳弹性基底14的端缘凹槽121,凹槽121中设置有挤压部122,挤压部122可以为板状。螺钉123与夹持件12通过螺纹配合连接,螺钉123能够转动地连接于挤压部122。通过旋转螺钉123能够使挤压部122接近凹槽121的侧壁,通过挤压部122和凹槽121的侧壁来固定弹性基底14。As shown in FIG. 3 , the clamping member 12 is provided with an edge groove 121 capable of accommodating the elastic base 14 , and a pressing portion 122 is provided in the groove 121 , and the pressing portion 122 may be plate-shaped. The screw 123 is connected to the clamping member 12 through screw fitting, and the screw 123 is rotatably connected to the pressing portion 122 . By rotating the screw 123 , the pressing portion 122 can approach the side wall of the groove 121 , and the elastic base 14 is fixed by the pressing portion 122 and the side wall of the groove 121 .

电机133连接于电机信号控制器,可以由电机信号控制器控制电机的旋转,进而通过电机旋转使夹持件12沿滑轨131移动,三维微结构的构型与夹持件12的移动量有关。The motor 133 is connected to the motor signal controller, the rotation of the motor can be controlled by the motor signal controller, and then the clamping member 12 is moved along the slide rail 131 through the rotation of the motor. The configuration of the three-dimensional microstructure is related to the movement amount of the clamping member 12 .

如图1和图3所示,电加载组件2包括柔性电极21、导线22、导线接入部23、导线接出部24和变压器。应当理解,图3中仅示例性地示出了一条导线22,导线22可以为多条,多条导线22可以和一个或多个夹持件12处的导线接入部和导线接出部电连接。As shown in FIGS. 1 and 3 , the electrical loading assembly 2 includes a flexible electrode 21 , a wire 22 , a wire insertion part 23 , a wire outlet part 24 and a transformer. It should be understood that only one wire 22 is exemplarily shown in FIG. 3 , and there may be multiple wires 22 , and the plurality of wires 22 may be electrically connected to the wire access portion and the wire outlet portion at one or more clamping members 12 . connect.

弹性基底14连接有电极21,电极21和导线22可以使用例如石墨碳膏等能够弹性变形的导电材料制成,电极21可以分别设置在弹性基底14的正反两面,每个电极21连接一根导线22,石墨碳膏可以被涂抹形成圆形。弹性基底14的正反两面通过导线22分别连接电源的正极和负极。The elastic base 14 is connected with electrodes 21. The electrodes 21 and the wires 22 can be made of elastically deformable conductive materials such as graphite carbon paste. The electrodes 21 can be respectively arranged on the front and back sides of the elastic base 14, and each electrode 21 is connected to Wire 22, graphite carbon paste can be applied to form a circle. The front and back sides of the elastic base 14 are respectively connected to the positive and negative electrodes of the power source through the wires 22 .

导线接入部23和导线接出部24设置于夹持部12,导线22连接于导线接入部23,导线接出部24通过导线(未示出)与变压器连接。通过导线接入部23和导线接出部24使导线22连接方便便捷。变压器能够将交流电转化为直流电并且使电压升高,变压器连接于电源和导线22之间。The wire insertion portion 23 and the wire outlet portion 24 are disposed on the clamping portion 12, the wire 22 is connected to the wire inlet portion 23, and the wire outlet portion 24 is connected to the transformer through wires (not shown). The wire 22 is connected conveniently and conveniently through the wire insertion portion 23 and the wire outlet portion 24 . A transformer capable of converting alternating current to direct current and boosting the voltage is connected between the power source and the conductors 22 .

虽然上面对本发明的实施方式进行了详细的描述,但是还有以下几点需要说明。Although the embodiments of the present invention have been described in detail above, the following points need to be noted.

(1)虽然在上述实施方式中,每个夹持件12均通过移动机构13连接于底盘11,但是本发明不限于此,多个夹持件12中的部分夹持件12也可以固定连接于底盘11。(1) Although in the above embodiment, each clamping member 12 is connected to the chassis 11 through the moving mechanism 13, the present invention is not limited to this, and some of the clamping members 12 among the plurality of clamping members 12 may also be fixedly connected on chassis 11.

(2)虽然在上述实施方式中,夹持件12的设置了4个,并且移动机构13驱动夹持件12移动的方向为相互垂直的第一方向X和第二方向Y。但是本发明不限于此,夹持件12的具体数量和移动机构13的移动方向、位置关系可以根据需要组装的可重构三维微结构的具体形式来设置。(2) Although in the above-mentioned embodiment, four clamping members 12 are provided, and the direction in which the moving mechanism 13 drives the clamping members 12 to move is the first direction X and the second direction Y which are perpendicular to each other. However, the present invention is not limited thereto, and the specific number of the clamping members 12 and the moving direction and positional relationship of the moving mechanism 13 can be set according to the specific form of the reconfigurable three-dimensional microstructure to be assembled.

(3)虽然在上述实施方式中,电极21为圆形,但是本发明不限于此,电极的形状和数量可以根据需要组装的可重构三维微结构的具体形式来设置。(3) Although in the above embodiment, the electrodes 21 are circular, the present invention is not limited thereto, and the shape and quantity of the electrodes can be set according to the specific form of the reconfigurable three-dimensional microstructure to be assembled.

(4)虽然在上述实施方式中,移动机构13使用电机133驱动丝杠132的方式驱动夹持件12移动,但是本发明不限于此,移动机构还可以使用气动导轨、液压导轨或手动操作等。(4) Although in the above embodiment, the moving mechanism 13 uses the motor 133 to drive the lead screw 132 to drive the clamping member 12 to move, but the present invention is not limited to this, and the moving mechanism may also use pneumatic guide rails, hydraulic guide rails, or manual operation, etc. .

(5)虽然在上述实施方式中,公开了夹持部12的具体结构,但本发明不限于此,夹持部12只要能够夹紧弹性基体14即可,可以使用现有技术中的夹持部件代替。(5) Although the specific structure of the clamping portion 12 is disclosed in the above-mentioned embodiment, the present invention is not limited to this. The clamping portion 12 only needs to be able to clamp the elastic base 14, and conventional clamping can be used. parts instead.

参考图4a至图4d,本发明还提出一种制备可重构三维微结构的方法,该方法包括如下步骤或工序。Referring to Fig. 4a to Fig. 4d, the present invention also provides a method for preparing a reconfigurable three-dimensional microstructure, the method comprising the following steps or procedures.

准备工作,准备如图4a所示的能够形成可重构三维微结构的平面结构100(下面简称为平面结构),将电极21a、21b印刷于弹性基底14并将平面结构100粘接于弹性基底14,并且将弹性基底14安装于上述加载平台。加载平台能够拉伸弹性基底或者使预拉伸的弹性基底释放预拉伸应变,并且能够对电极21a通电。Preparatory work, prepare a planar structure 100 capable of forming a reconfigurable three-dimensional microstructure (hereinafter referred to as a planar structure) as shown in FIG. 4a, print electrodes 21a, 21b on the elastic substrate 14 and bond the planar structure 100 to the elastic substrate 14, and install the elastic base 14 on the above-mentioned loading platform. The loading platform can stretch the elastic substrate or release the pre-tensioning strain from the pre-stretched elastic substrate, and can energize the electrode 21a.

力加载,对弹性基底14施加外力使弹性基底14产生弹性变形,从而使粘接于弹性基底14的平面结构发生面外屈曲形成中间态的立体构型200。如图4b所示,对预拉伸的弹性基底14释放预拉伸应变,使如图4a的平面结构变形为如图4b的中间态的立体构型200。When the force is loaded, an external force is applied to the elastic substrate 14 to elastically deform the elastic substrate 14 , so that the planar structure bonded to the elastic substrate 14 undergoes out-of-plane buckling to form an intermediate three-dimensional configuration 200 . As shown in FIG. 4b, the pre-stretching strain is released to the pre-stretched elastic substrate 14, so that the planar structure of FIG. 4a is deformed into the three-dimensional configuration 200 of the intermediate state of FIG. 4b.

电加载,对电极21通高压直流电,电压例如为两千伏至一万伏,优选地三千伏至六千伏。由于弹性基底14的电致变形作用,电极21的区域会发生面内扩张,从而带动中间态的立体构型200再次发生变形。图4c示出了电极21a和21b与中间态的立体构型200的位置关系,在电极21a通电后弹性基底14在电极21a的区域内会发生电致变形作用,形成如图4d所示的三维微结构300。For electrical loading, the counter electrode 21 is supplied with high voltage direct current, and the voltage is, for example, two kilovolts to ten thousand volts, preferably three kilovolts to six kilovolts. Due to the electro-deformation effect of the elastic substrate 14, the region of the electrode 21 will expand in-plane, thereby driving the three-dimensional configuration 200 in the intermediate state to deform again. Fig. 4c shows the positional relationship between the electrodes 21a and 21b and the three-dimensional configuration 200 in the intermediate state. After the electrode 21a is electrified, the elastic substrate 14 will undergo electro-deformation in the area of the electrode 21a, forming a three-dimensional structure as shown in Fig. 4d. Microstructure 300 .

通过改变电极21的位置、形状或电压的大小,可以使相同的三维微结构构型发生不同的形变,例如将图4c所示的电极21b,在电极21b通电后就可以形成如图5所示的三维微结构400。通过改变电极的位置、形状或电压的大小,也可以由图4d所示的三维微结构300直接重构为如图5所示的三维微结构400,容易使三维微结构实现快速重构。By changing the position, shape or voltage of the electrode 21, the same three-dimensional microstructure can be deformed differently. For example, the electrode 21b shown in FIG. 4c can be formed as shown in FIG. 5 after the electrode 21b is energized. The three-dimensional microstructure 400. By changing the position, shape or voltage of the electrodes, the 3D microstructure 300 shown in FIG. 4d can also be directly reconstructed into the 3D microstructure 400 shown in FIG. 5 , which is easy to achieve rapid reconstruction of the 3D microstructure.

可以理解,在同一时间可以对全部或者部分电极通电,本申请对此不作限制。在设置多个电极的情况下,可以用这些电极重构不同的三维微结构。It can be understood that all or part of the electrodes may be energized at the same time, which is not limited in this application. Where multiple electrodes are provided, different three-dimensional microstructures can be reconstructed with these electrodes.

可以理解,不同性质的电极21,通电后产生的电致变形不同,进而弹性基体14的应变场分布不同,电加载相对于屈曲诱导的多轴拉伸可以产生更复杂的应变场分布,进而形成复杂多变的三维微结构构型。It can be understood that the electrodes 21 with different properties have different electro-induced deformations after being energized, and thus the strain field distribution of the elastic matrix 14 is different. Compared with the buckling-induced multiaxial stretching, electrical loading can generate a more complex strain field distribution, thereby forming Complex and variable three-dimensional microstructural configuration.

上述实施方式先进行力加载然后再进行电加载,但是本发明不限于此,力加载和电加载的顺序可以改变,例如先进行电加载然后再进行力加载,或者同时进行力加载和电加载。在电加载过程中,力加载可以保持或停止;在力加载过程中,电加载可以保持或停止。通过力加载和电加载顺序的调整可以形成种类丰富的不同的可重构三维微结构。In the above embodiment, the force loading is performed first and then the electrical loading is performed, but the present invention is not limited thereto, and the order of the force loading and the electrical loading can be changed, for example, the electrical loading is performed first and then the force loading is performed, or the force loading and the electrical loading are performed simultaneously. During electrical loading, force loading can be maintained or stopped; during force loading, electrical loading can be maintained or stopped. A variety of different reconfigurable three-dimensional microstructures can be formed by adjusting the order of force loading and electrical loading.

Claims (10)

1.一种可重构三维微结构的力电耦合加载平台,其特征在于,所述加载平台包括:1. a reconfigurable three-dimensional microstructure electromechanical coupling loading platform, is characterized in that, described loading platform comprises: 力加载组件(1),所述力加载组件(1)包括底盘(11)、多个夹持件(12)、移动机构(13)和弹性基底(14),所述多个夹持件(12)中的至少一个连接于移动机构(13),所述夹持件(12)夹持所述弹性基底(14),所述弹性基底(14)为膜状,所述移动机构(13)能够驱动所述夹持件(12)移动,通过所述夹持件(12)移动能够使所述弹性基底(14)产生形变;以及A force loading assembly (1) comprising a chassis (11), a plurality of clamps (12), a moving mechanism (13) and an elastic base (14), the plurality of clamps ( At least one of 12) is connected to a moving mechanism (13), the clamping member (12) clamps the elastic base (14), the elastic base (14) is film-shaped, and the moving mechanism (13) The clamping member (12) can be driven to move, and the elastic base (14) can be deformed by the movement of the clamping member (12); and 电加载组件(2),所述电加载组件(2)包括导线(22),所述导线(22)连接到所述弹性基底(14)并用于向所述弹性基底(14)通电,所述弹性基底(14)的正反两面通过所述导线(22)分别连接电源的正极和负极,所述弹性基底(14)由电致活性聚合物制成。An electrical loading assembly (2) comprising a wire (22) connected to the elastic base (14) and for energizing the elastic base (14), the The positive and negative sides of the elastic substrate (14) are respectively connected to the positive electrode and the negative electrode of the power source through the wires (22), and the elastic substrate (14) is made of electroactive polymer. 2.根据权利要求1所述的可重构三维微结构的力电耦合加载平台,其特征在于,所述电加载组件(2)还包括电极(21),所述电极(21)设置于所述弹性基底(14)的正反两面,所述导线(22)通过所述电极(21)连接于所述弹性基底(14)。2 . The electromechanical coupling loading platform for reconfigurable three-dimensional microstructures according to claim 1 , wherein the electrical loading assembly ( 2 ) further comprises an electrode ( 21 ), and the electrode ( 21 ) is arranged on the The front and back sides of the elastic base (14), the wires (22) are connected to the elastic base (14) through the electrodes (21). 3.根据权利要求2所述的可重构三维微结构的力电耦合加载平台,其特征在于,所述电极(21)由能够变形的导电材料制成,使所述电极(21)能够和所述弹性基底(14)一起产生形变。3 . The electromechanical coupling loading platform for reconfigurable three-dimensional microstructures according to claim 2 , wherein the electrodes ( 21 ) are made of deformable conductive materials, so that the electrodes ( 21 ) can interact with The elastic base (14) deforms together. 4.根据权利要求1所述的可重构三维微结构的力电耦合加载平台,其特征在于,所述弹性基底(14)由介电弹性体材料制成。4. The electromechanical coupling loading platform for reconfigurable three-dimensional microstructures according to claim 1, wherein the elastic substrate (14) is made of a dielectric elastomer material. 5.根据权利要求1所述的可重构三维微结构的力电耦合加载平台,其特征在于,所述夹持件(12)设置有导线接入部(23)和导线接出部(24),所述导线接入部(23)连接所述导线(22),所述导线接出部(24)连接所述电源。5 . The electromechanical coupling loading platform for reconfigurable three-dimensional microstructures according to claim 1 , wherein the clamping member ( 12 ) is provided with a wire access portion ( 23 ) and a wire outlet portion ( 24 ). 6 . ), the wire access portion (23) is connected to the wire (22), and the wire outlet portion (24) is connected to the power supply. 6.根据权利要求1所述的可重构三维微结构的力电耦合加载平台,其特征在于,所述电加载组件(2)还包括变压器,所述变压器连接于所述电源和所述导线(22)之间,所述变压器能够将交流电转化为直流电并且使电压升高。6. The electromechanical coupling loading platform for reconfigurable three-dimensional microstructures according to claim 1, wherein the electric loading assembly (2) further comprises a transformer, and the transformer is connected to the power supply and the wire (22), the transformer can convert alternating current into direct current and increase the voltage. 7.根据权利要求6所述的可重构三维微结构的力电耦合加载平台,其特征在于,所述变压器能够使输出电压为两千伏至一万伏。7 . The electromechanical coupling loading platform for reconfigurable three-dimensional microstructures according to claim 6 , wherein the transformer can make the output voltage range from two kilovolts to ten thousand volts. 8 . 8.一种可重构三维微结构的制备方法,其特征在于,该方法包括:8. A method for preparing a reconfigurable three-dimensional microstructure, wherein the method comprises: 将能够形成可重构三维微结构的平面结构部分地粘接于弹性基底(14);partially adhering a planar structure capable of forming a reconfigurable three-dimensional microstructure to an elastic substrate (14); 将所述弹性基底(14)连接于力加载组件(1)的夹持部(12),所述夹持部(12)移动使所述弹性基底(14)变形,进而使所述平面结构或其变形后形成的三维微结构屈曲变形或发生重构;The elastic base (14) is connected to the clamping portion (12) of the force-loading assembly (1), the clamping portion (12) moving to deform the elastic base (14), thereby causing the planar structure or The three-dimensional microstructure formed after its deformation is buckling or reconstructed; 所述弹性基底(14)通电使所述弹性基底(14)变形,所述弹性基底(14)变形,进而使所述平面结构或其变形后形成的三维微结构屈曲变形或发生重构。The elastic substrate (14) is energized to deform the elastic substrate (14), the elastic substrate (14) is deformed, and the planar structure or the three-dimensional microstructure formed after the deformation is buckled, deformed, or reconstructed. 9.根据权利要求8所述的可重构三维微结构的制备方法,其特征在于,所述方法使用权利要求1至7中任一项所述的可重构三维微结构的力电耦合加载平台。9 . The method for preparing a reconfigurable three-dimensional microstructure according to claim 8 , wherein the method uses the electromechanical coupling loading of the reconfigurable three-dimensional microstructure according to any one of claims 1 to 7 . platform. 10.根据权利要求8所述的可重构三维微结构的制备方法,其特征在于,所述方法包括为所述弹性基底(14)通直流电。10. The method for preparing a reconfigurable three-dimensional microstructure according to claim 8, wherein the method comprises applying a direct current to the elastic substrate (14).
CN202010151099.0A 2020-03-06 2020-03-06 Force-electricity coupling loading platform capable of reconstructing three-dimensional microstructure and preparation method thereof Pending CN111333026A (en)

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